CN104459966B - For the microscopical imaging optical system of visible-ultraviolet detection - Google Patents
For the microscopical imaging optical system of visible-ultraviolet detection Download PDFInfo
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- CN104459966B CN104459966B CN201410620550.3A CN201410620550A CN104459966B CN 104459966 B CN104459966 B CN 104459966B CN 201410620550 A CN201410620550 A CN 201410620550A CN 104459966 B CN104459966 B CN 104459966B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/02—Objectives
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/001—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras
- G02B13/0015—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras characterised by the lens design
Abstract
A kind of for the microscopical imaging optical system of visible ultraviolet detection, along its optical axis direction include successively the first lens, the second lens, the 3rd lens ..., until the 18th lens, wherein the first lens form the first mirror group G1 to the 4th lens, a combination thereof focal length is 200mm, 5th lens to the 18th lens form the second mirror group G2, and a combination thereof focal length is 4mm, and the enlargement ratio of object plane to image planes is 1/50 times, true field radius is 10mm, it is achieved image-side numerical aperture is 0.85.The present invention all uses the i line glass of high permeability, and image quality, close to improving imaging, and compact conformation, can meet completely for the microscopical technology requirement of visible ultraviolet detection.
Description
Technical field
The present invention relates to a kind of imaging optical system, particularly a kind of for the microscopical imaging of visible-ultraviolet detection
System.
Background technology
In every field such as physics, chemistry, material science, life sciences, ultraviolet microscope constantly expands range of application；Especially
It is in semi-conductor industry and optoelectronics industry field, and ultraviolet microscope has become as a kind of highly important testing equipment.Ultraviolet
Microscope may be used for litho pattern on silicon chip (or mask) exposing, develop, detection after the technical process such as etching,
Can measure litho pattern live width (CD) with the whole structure of the upper litho pattern of rapid scan silicon chip (or mask) and lack
Fall into detection etc..
Ultraviolet microscope can be also used for semiconductor packages litho pattern, printed circuit board (PCB) (PCB) litho pattern and lacks
Fall into the detection waited；Particularly with Advanced Packaging and high density interconnecting board (HDI plate) technology, its litho pattern has evolved to
Several micron dimensions, its defects detection requires to have evolved to sub-micrometer scale.In order to improve Advanced Packaging litho pattern and HDI
The yield of plate litho pattern, needs a kind of ultraviolet detection optical microscope with sub-micrometer scale resolution.It addition, in order to carry
The efficiency of high detection and the labor intensity alleviating operator, based on ccd image acquisition technique, the figure that can be amplified by microcobjective
As projecting on CCD photosurface, it is possible to shoot into picture or video analyzes and processes again, so make the operation of detection equipment
Very convenient flexibly.Microcobjective optical system is the microscopical core apparatus of this kind of detection, such as, videomicroscopy or number
Microscope is exactly the microscope as receiving device with CCD camera or CMOS camera, and this kind of microscopical major advantage is easy for using
Computer realizes the automatization of detection and information processing.
Along with the lasting guiding of the market demand, semiconductor technology, Advanced Packaging, High density of PCB plate technique are (such as HDI
Plate) etc. the most constantly make progress, corresponding testing equipment is also required to improve constantly its technical specification with coupling photoetching technique
Testing requirement.For Advanced Packaging and the demand of HDI plate technique, industry needs to provide the detection of a kind of submicron resolution
With ultraviolet microscope, and and imageing sensor (such as CCD camera) composition ultraviolet microscope detection device, and microcobjective optical system
System is the core apparatus of detection ultraviolet microscope, determines the key technical indexes of ultraviolet microscope.Visible-ultraviolet detection shows
Micro mirror use beam splitting system, both can be applied in combination with imageing sensor (such as CCD camera), again can with eyepiece be applied in combination with
Observe for operator.
(October 13 1988 applying date applies for artificial state-run North China light to the Chinese patent of Application No. 88109146.4
Learn instrument plant), disclose a kind of optical system of wide-apperture objective lens for microprojection, be applicable to plate making machine object lens.Its numerical value
Aperture is 0.417, and enlargement ratio is 10 times, and operation wavelength is visible ray (representing with C light, D light, F light), is made up of 7 lens,
Simple in construction, enlargement ratio is relatively low, and numerical aperture is less.Its major defect is that peripheral field resolution is low, distortion is big, is unsatisfactory for
Microscopical technical need is detected in Advanced Packaging and HDI plate litho pattern.
The Chinese patent (October 26 2012 applying date) of Application No. 201210418310.6, disclose a kind of for
The microcobjective optical system of video imaging.This patent of invention use 18 pieces of lens achieve wide spectral range (360nm～
550nm), large-numerical aperture (NA=0.85), the video imaging of big visual field (0.3mm), but for described by this patent should
With, and potential other side should be used for say, the most some needs improve part:
In ■ embodiment table one, have employed the optical material of 12 kinds of trades mark altogether, wherein a kind is HOYA Products, 11 kinds
It it is SCHOTT Products.Segment glass material transmitance used is relatively low, and such as, its 1st piece of lens uses SCHOTT
The N-LAF33 material of company, the transmitance code of this material is 39/32, represents for 10mm heavy sheet glass material at 390nm wavelength
Interior transmitance be 80%, the interior transmitance at 320nm wavelength is 5%, as it is shown in figure 1, for the operation wavelength of this patent
360nm, interior transmitance is necessarily less than 80%；2nd piece of lens are the N-LAK12 materials of SCHOTT company, and transmitance code is 37/
31, for operation wavelength 360nm of this patent, interior transmitance is necessarily less than 80%；It addition, N-LAK34 material transmitance code
Being 37/28, the transmitance code of SF5 material is 37/33, shows that transmitance in operation wavelength 360nm is necessarily less than by the two
80%；N-LAK22 and N-KZFS11 material transmitance code is all 36/30, shows that the two is to transmitance in operation wavelength 360nm
It is 80%；So, selecting substantial amounts of low transmission material, the total transmitance necessarily causing this optical system is too low.
The relative distortion of this optical system of ■ is 0.03%, corresponding to 0.3mm visual field, then can calculate in this visual field
Distortion is 0.03%*0.3mm=90nm, from the point of view of the testing requirement of application described by this patent, the distortion of this magnitude
Bigger.
■ is according to data in this patent Example table 1, and the conjugate distance being calculated this optical system is 469.8mm, shows
This optical system is long, and structure is the compactest.
■, according to the description of this patent of invention, claims employing thing side, image space doubly telecentric conceptual design, but does not provide remote
The data of heart degree deviation.
The overwhelming majority of this optical system of ■ uses balsaming lens group, if to Advanced Packaging photoetching, HDI plate photoetching, print
The technical field application of heavy dose of demands such as brush plate-making photoetching, then this optical system can not be applied owing to there being cementing layer
In heavy dose exposure application.
Summary of the invention
It is an object of the invention to provide a kind of for the microscopical imaging optical system of visible-ultraviolet detection, this is visible-
The microscopical imaging optical system of ultraviolet detection, may be used for the litho pattern such as Advanced Packaging, HDI plate and is exposing, develops, etching
Detection afterwards, can be used for the whole structure of rapid scan litho pattern, can be used for measuring litho pattern live width (CD) etc..
Visible-ultraviolet detection microscope uses beam splitting system, both can make with imageing sensor (such as CCD camera) combination
With, can be applied in combination with eyepiece again and observe for operator.
The described enlargement ratio for the microscopical imaging optical system of visible-ultraviolet detection is 1/50 times, image-side numerical
Aperture NA is 0.85, operating wavelength range be i line, h line and g line, i.e. high voltage mercury lamp main three spectral line 365.0nm,
404.7nm, 435.8nm, true field radius is 10mm, and image space radius is 0.2mm.
The object of the present invention is achieved like this:
One, for the microscopical imaging optical system of visible-ultraviolet detection, is positioned at upside with CCD photosurface for object plane,
Being positioned at downside with sample surface for image planes, owing to light path is reversible, design according to reverse optical path, light is photosensitive from the CCD of upside
Sample surface towards downside is propagated.Described imaging optical system along its optical axis direction, wraps from object plane to image planes successively
Include the first lens, the second lens, the 3rd lens ..., until the 18th lens and aperture diaphragm, the first described lens are to have
Negative power also bends towards the meniscus lens of image planes, described the second lens, the 6th lens, the 8th lens, the 9th lens, the 11st
Lens, the 13rd lens, the 15th lens, the 17th lens are biconvex positive lens, described the 3rd lens, the 5th lens,
Seven lens, the tenth lens, the 16th lens are double-concave negative lens, and the 4th described lens are to have positive light coke and bend towards object plane
Meniscus lens, the 12nd described lens and the 14th lens are to have negative power and bend towards the meniscus lens of object plane, institute
The 18th lens stated are to have positive light coke and bend towards the meniscus lens of image planes, and aperture diaphragm is positioned at the 12nd lens and the tenth
Between three lens, described imaging optical system, all 18 pieces of lens all use the i line glass of OHARA company high permeability
Glass, selects the glass material of 6 kinds of trades mark altogether, wherein said the 4th lens, the 8th lens, the 9th lens, the 11st lens, the
15 lens, the 17th lens select SFPL51Y glass material, the 14th described lens to select PBL25Y glass material, institute
SFSL5Y glass material selected by the 5th lens stated, described the first lens, the 6th lens, the 7th lens, the 13rd lens, the
16 lens use PBM2Y glass materials, described the second lens, the tenth lens, the 12nd lens, the 18th lens to select
BSM51Y glass material, BAL15Y glass material selected by the 3rd described lens.
The imaging optical system of the present invention includes described 18 piece lens and an aperture diaphragm, and wherein the first lens are extremely
4th lens form the first mirror group G1, and a combination thereof focal length is 200mm, and the 5th described lens form the second mirror to the 18th lens
Group G2, a combination thereof focal length is 4mm, and so the enlargement ratio of the imaging optical system described in guarantee is 1/50 times.
The imaging optical system of the present invention compared with prior art, has the following advantages that and good effect:
1, the imaging optical system of the present invention all uses the i line glass of high permeability, and all lens all use point
From separate lenses structure, without glued construction, image quality, close to improving imaging, both may be used for visible-ultraviolet detection micro-
Mirror, may be used for again the fields such as plate making lithographic objective；
2, the imaging optical system of the present invention uses cramped construction design, and object-image conjugate is bigger away from having compared with in first technology
Improvement；
3, the relative distortion maximum of the imaging optical system of the present invention is 0.01%, corresponds to the distortion of 20nm, completely
Meet the technology for visible-ultraviolet detection microscope or plate making lithographic objective etc. to require and application requirement.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of the interior transmitance code CC implication of optical glass material；
Fig. 2 is structure and the index path of the imaging optical system of the present invention；
Fig. 3 is the diffraction modulation transfer function MTF figure of the imaging optical system of the present invention；
Fig. 4 is the scattergram of the RMS wave aberration of the imaging optical system of the present invention；
Fig. 5 is the spherical aberration of the imaging optical system of the present invention, astigmatism, the curvature of field, distortion scattergram；
Fig. 6 is the telecentricity error scattergram of the imaging optical system of the present invention.
Detailed description of the invention
Do further retouch the present invention being used for visible-microscopical imaging optical system of ultraviolet detection in detail below
State, but protection scope of the present invention should not limited with this.
A kind of microscopical imaging optical system of visible-ultraviolet detection that is used for, described visible-ultraviolet detection microscope, can
For litho patterns such as Advanced Packaging, HDI plates exposing, develop, etch after detection, can be used for rapid scan light needle drawing
The whole structure of shape, can be used for measuring litho pattern live width (CD) etc..
Visible-ultraviolet detection microscope uses beam splitting system, both can make with imageing sensor (such as CCD camera) combination
With, can be applied in combination with eyepiece again and observe for operator.
The enlargement ratio β of described visible-microscopical microcobjective of ultraviolet detection is 1/50 times, and image-side numerical aperture NA is
0.85, operating wavelength range is main three spectral line 365.0nm of i line, h line and g line, i.e. high voltage mercury lamp, 404.7nm,
435.8nm。
In order to overcome the problem that Chinese patent 201210418310.6 transmitance is low, the imaging optical system of the present invention also has
One important application, i.e. for fields such as plate making lithographic objectives, therefore, all lens of the present invention all use high saturating
Cross the i line glass of rate, the PBM2Y glass that wherein transmitance is minimum at 365nm wavelength for the interior transmitance of every 10mm thick material
More than 98.6%, in other material, transmitance is all more than 99%.
It addition, the imaging optical system of the present invention does not use glued construction, whole 18 lens all to use the independence of separation
Lens arrangement.
In order to overcome Chinese patent 201210418310.6 object-image conjugate problem away from longer (469.8mm), the present invention's
Imaging optical system uses cramped construction design, and conjugate distance has bigger compression.
Detector used by described visible-ultraviolet detection microscope is CCD camera, and its Pixel Dimensions is 13 × 13 μm2, light
Quick face a size of 13.312 × 13.312mm2, a diameter of 18.826mm of its correspondence, using CCD camera photosurface as the present invention
The object plane of imaging optical system, and take certain design margin, then determine that true field radius is 10mm, due to micro-thing
Mirror enlargement ratio is 1/50 times, and so, image space radius is 0.2mm, and this position is considered as object plane by general microcobjective, amplifies
Again through eyepiece secondary imaging after certain multiplying power, owing to light path is reversible, the present invention uses reverse optical path to design.
Owing to CCD camera Pixel Dimensions is 13 μm, reducing again through microcobjective 50 is 260nm afterwards, divides according to Rayleigh
Resolution formulaWherein, λ uses operation wavelength h line (404.7nm) when calculating, and can calculate process factor k1
Being 0.546, this shows: microcobjective numerical aperture NA selectes 0.85, and the characteristic size for 260nm is can to differentiate completely
's.
The constrained parameters of the imaging optical system of the present invention are as shown in table 1.
The constrained parameters of table 1 imaging optical system
| Constraint project | Parameter |
| Operating wavelength range | 365.0nm、404.7nm、435.8nm |
| True field radius (CCD photosurface) | 10mm |
| Image-side numerical aperture (measured sample face) | 0.85 |
| Enlargement ratio | 1/50 times |
| Object-image conjugate is away from (system overall length) | <270mm |
| Image space working distance | >0.5mm |
| RMS wave aberration | < 71m λ (i.e. 28.7nm, according to h line) |
One embodiment of the imaging optical system of the present invention as in figure 2 it is shown, with CCD photosurface for object plane 101 be positioned at upside,
Being positioned at downside with sample surface for image planes 202, owing to light path is reversible, design according to reverse optical path, light is from the CCD light of upside
Quick face 101 is propagated to the sample surface 202 of downside.Described imaging optical system from object plane to image planes along its optical axis side
To, include successively the first lens L1, the second lens L2, the 3rd lens L3 ..., until the 18th lens L18 and aperture diaphragm, institute
The the first lens L1 stated is to have negative power and bend towards the meniscus lens of image planes 202, described the second lens L2, the 6th lens
L6, the 8th lens L8, the 9th lens L9, the 11st lens L11, the 13rd lens L13, the 15th lens L15, the 17th lens
L17 is biconvex positive lens, described the 3rd lens L3, the 5th lens L5, the 7th lens L7, the tenth lens L10, the 16th lens
L16 is double-concave negative lens, and the 4th described lens L4 is to have positive light coke and bend towards the meniscus lens of object plane 101, described
12nd lens L12 and the 14th lens L14 is to have negative power and bend towards the meniscus lens of object plane 101, described the tenth
Eight lens L18 are to have positive light coke and bend towards the meniscus lens of image planes 202, and described aperture diaphragm is positioned at the 12nd lens
Between L12 and the 13rd lens L13 (303 position), all 18 pieces of lens of described imaging optical system all use OHARA
The i line glass of company's high permeability, selects the glass material of 6 kinds of trades mark, wherein said the 4th lens L4, the 8th lens altogether
L8, the 9th lens L9, the 11st lens L11, the 15th lens L15, the 17th lens L17 select SFPL51Y glass material, institute
The 14th lens L14 stated selects PBL25Y glass material, and the 5th described lens L5 selects SFSL5Y glass material, described
First lens L1, the 6th lens L6, the 7th lens L7, the 13rd lens L13, the 16th lens L16 use PBM2Y glass material
Material, described the second lens L2, the tenth lens L10, the 12nd lens L12, the 18th lens L18 select BSM51Y glass material
Material, the 3rd described lens L3 selects BAL15Y glass material.
The imaging optical system of the present invention includes described 18 piece lens and an aperture diaphragm, wherein the first lens L1
Forming the first mirror group G1 to the 4th lens L4, a combination thereof focal length is 200mm, the 5th described lens L5 to the 18th lens L18
Forming the second mirror group G2, a combination thereof focal length is 4mm, and so the enlargement ratio of the imaging optical system described in guarantee is 1/50 times.
According to the constrained parameters of imaging optical system in above table 1, the design data of the imaging optical system of the present invention are such as
Shown in table 2, table 2 gives the specific design parameter value of each piece of lens of the imaging optical system of the present embodiment.
The design parameter of the imaging optical system of table 2 present invention
The imaging optical system of the present invention uses cramped construction design, can be calculated image altogether according to data in table 2
Yoke, away from for 260.1mm, has greatly improved compared with in first technology (patent 201210418310.6 conjugate distance is 469.8mm).
When under the Parameter Conditions such as operating wavelength range, true field radius, image-side numerical aperture in Table 1, according to specialty
The analytical calculation of optical design software CODE_V understands, and its aberration correction degree is as follows:
Fig. 3 shows the modulation transfer function of the imaging optical system of the present embodiment, close to diffraction limit.Fig. 4 is this
The distribution of the RMS wave aberration of the imaging optical system of embodiment, in visual field, RMS wave aberration maximum is 11.7nm (RMS wave aberration
For 28.913m λ, obtain 11.7nm according to h line computation), the image quality of the imaging optical system which reflects the present invention is close
Improve imaging.Fig. 5 is the spherical aberration of the imaging optical system of the present embodiment, astigmatism, the curvature of field, distortion figure, and wherein, relative distortion is
Big value is 0.01%, corresponds to the distortion of 20nm, compared with in first technology (distortion of patent 201210418310.6 is 90mm),
Have greatly improved.
Fig. 6 is thing side's telecentricity error of the imaging optical system of the present embodiment, and wherein maximum is 5.15mrad.
Use the imaging optical system of the present invention, fully meet for the microscopical technology requirement of visible-ultraviolet detection, become
As superior in quality, and reach reality visible-ultraviolet detection microscopical application requirement.
Claims (6)
1. for the microscopical imaging optical system of visible-ultraviolet detection, from object plane to image planes along its optical axis direction successively
Including the first lens, the second lens, the 3rd lens, the 4th lens, the 5th lens, the 6th lens, the 7th lens, the 8th lens,
9th lens, the tenth lens, the 11st lens, the 12nd lens, aperture diaphragm, the 13rd lens, the 14th lens, the 15th
Lens, the 16th lens, the 17th lens, the 18th lens, it is characterised in that:
The first described lens are to have negative power and bend towards the meniscus lens of image planes, described the second lens, the 6th lens,
8th lens, the 9th lens, the 11st lens, the 13rd lens, the 15th lens, the 17th lens are biconvex positive lens, institute
The 3rd lens stated, the 5th lens, the 7th lens, the tenth lens, the 16th lens are double-concave negative lens, the 4th described lens
Being to have positive light coke and bend towards the meniscus lens of object plane, the 12nd described lens and the 14th lens are to have negative power
And bend towards the meniscus lens of object plane, the 18th described lens are to have positive light coke and bend towards the meniscus lens of image planes,
All 18 pieces of lens all use the i line glass of OHARA company high permeability, select the glass material of 6 kinds of trades mark altogether,
SFPL51Y selected by described the 4th lens, the 8th lens, the 9th lens, the 11st lens, the 15th lens, the 17th lens
Glass material, the 14th described lens selection PBL25Y glass material, the 5th described lens selection SFSL5Y glass material,
Described the first lens, the 6th lens, the 7th lens, the 13rd lens, the 16th lens use PBM2Y glass material, described
The second lens, the tenth lens, the 12nd lens, the 18th lens select BSM51Y glass material, described 3rd lens choosing
Use BAL15Y glass material；
The first described lens to the 4th lens form the first mirror group, and a combination thereof focal length is 200mm；
Described the 5th lens to the 18th lens form the second mirror group, and a combination thereof focal length is 4mm；
Enlargement ratio from object plane to image planes is 1/50；
Object-image conjugate away from, i.e. system overall length be less than 261mm.
Imaging optical system the most according to claim 1, it is characterised in that image-side numerical aperture is more than 0.50.
Imaging optical system the most according to claim 2, it is characterised in that image-side numerical aperture is equal to 0.85.
Imaging optical system the most according to claim 1, it is characterised in that true field radius is more than 1.00mm.
Imaging optical system the most according to claim 4, it is characterised in that true field radius is equal to 10.00mm.
Imaging optical system the most according to claim 1, it is characterised in that operating wavelength range is i line, h line and g line,
I.e. main three spectral lines 365.0nm, 404.7nm, 435.8nm of high voltage mercury lamp.
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| CN106772976B (en) * | 2017-02-28 | 2019-09-20 | 浙江大学 | A kind of microcobjective and wide visual field high-resolution imaging system |
| CN117270185B (en) * | 2023-11-17 | 2024-02-20 | 长春长光智欧科技有限公司 | Micro-optical system with large numerical aperture and wide spectrum |
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| US8107170B2 (en) * | 2008-11-19 | 2012-01-31 | Olympus Corporation | Objective optical system |
| JP5926914B2 (en) * | 2010-11-10 | 2016-05-25 | オリンパス株式会社 | Immersion microscope objective lens |
| CN102928960A (en) * | 2012-10-26 | 2013-02-13 | 中国科学院上海光学精密机械研究所 | Microscope objective optical system for video imaging |
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Effective date of registration: 20190925 Address after: Room 601-10, 6th floor, No. 2, Jingyuan Beijie, Beijing Economic and Technological Development Zone, Daxing District, Beijing, 100176 Patentee after: Beijing Guowang Optical Technology Co., Ltd. Address before: 800-211 201800 post office box, Shanghai, Shanghai, Jiading District Patentee before: Shanghai Optical Precision Machinery Inst., Chinese Academy of Sciences |