CN104458590B - A kind of perpendicular magnetization films test device - Google Patents
A kind of perpendicular magnetization films test device Download PDFInfo
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- CN104458590B CN104458590B CN201410721230.7A CN201410721230A CN104458590B CN 104458590 B CN104458590 B CN 104458590B CN 201410721230 A CN201410721230 A CN 201410721230A CN 104458590 B CN104458590 B CN 104458590B
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Abstract
A kind of perpendicular magnetization films test device of the present invention, is related to electromagnetic detection.It has computer, and laser instrument, polarizing prism composition input path project incident illumination to specimen holder；Analyzing prism and photoelectric detector composition reflected light path；Field scan power supply and electric magnet are into electrically connecting；When electric magnet is 30mm for magnetic gap, magnetic field intensity is not less than the double yoke electric magnet of single line bag of 1T, magnetic direction level when seat is put, and the light hole of straight-through magnetic gap is equipped with the cartridge axis of packet radio side；Its specimen holder is provided with adjustable conducting probe of four across distributions；The conducting probe of a pair of opposing on constant-current source output port connection specimen holder, it is another to conducting probe on nanovoltmeter input port connection specimen holder；The company controlled output port of computer connects field scan power supply and constant-current source control input port respectively, and two signal input ports of computer connect the output port of photoelectric detector and nanovoltmeter respectively.
Description
Technical field
The present invention relates to a kind of electromagnetic detection.
Background technology
Vertical magnetized film is due to various effects such as magneto-optic, magnetoelectricity, magnetic anisotropy and magnetostriction are included, being micro- electricity
Son and the important functional material of a class in information technology, and it is widely used in micro machine, magnetic sensing, optic communication, it is particularly high
Density magnetic storage technology field.But, as in membrane system, magnetic layer thickness is decreased to nanoscale, the magnetic moment of system is reduced, is increased
The magnetic of the ultra-thin membrane system of magnetic has been added to characterize difficulty.With the raising and Application Design requirement of modern thin film preparation process, only comprising number
The nanostructured perpendicular magnetic ultrathin membrane of individual atomic layer is tied to form extremely important for one in current magnetics and area of Spintronics
Study hotspot.
On the other hand, magneto-electronicses, as an emerging front subject and technology in Condensed Matter Physics field, due in height
Fast high density data storage, integrated circuit and device and spin quantum computer etc. field have broad application prospects and quick
Grow up.Magneto-electronicses are that spin states are modulated on meso-scale by magnetic field etc., are conducted and between magnetic by electronics
Associated effect, realizes the modulation to electrons transport property.Therefore in the research of magneto-electronicses, sufficiently large uniform magnetic field is ensureing
The magnetic upset and saturation for realizing magnetization thin film is indispensable experiment condition.
Kerr magnetooptical effect (the Magneto-optical Kerr caused by light and magnetized medium interphase interaction
Effect) sensitivity not only up to monoatomic layer thickness magnetic detection, and contactless in-situ micro area measurement is capable of achieving, it is
One of basic means of surface magnetism measurement.For example, 2006, the Hu of Fudantianxin Science and Educational Instrument Co., Ltd., Shanghai was along congruence
Patent of invention ZL200620041198.9 of people's application, " a kind of surface magneto-optical kerr effect measurement apparatus " disclose a kind of table
Face Kerr magnetooptical effect (surface magneto-optic kerr effect are abbreviated as SMOKE) measuring system, it is using partly
Conductor laser as light source, using the first diaphragm, polarizing prism composition input path, to being arranged in electric magnet magnetic gap
Specimen holder projection incident illumination；Reflected light path is constituted with the second diaphragm, analyzing prism, lens and photoelectric detector, the sample is detected
The optical signal of tested thin magnetic film reflection on product frame.The signal of the photoelectric detector output sends into the Ke Er in operation control system
Signal supervisory instrument further amplifies, and is shown by digital voltmeter.There is field scan power supply in the operation control system
Device, the electric current that the device can under control of the computer for needed for electric magnet provides scanning magnetic field.The SMOKE measuring systems
Feature is that power source of semiconductor laser adopts two grades of regulated power supplys, solves asking for semiconductor laser light output stability difference
Topic；Ring-type core structure of the electric magnet using small size, uniform magnetic field can be put in vacuum system up to 0.3T.But entering
In the research of one step, it is necessary to further improve the output of laser instrument, the magnetic field intensity in electric magnet magnetic gap also has
Wait to improve.
In magnetoelectric effect, Hall voltage signal is inversely proportional to thickness, therefore magnetoelectricity Hall effect (Magneto-optical
Kerr effect) measure the magnetic sign for being also particularly well-suited for magnetic ultrathin membrane.At present, the magneto-optic and magnetic electricity performance of thin magnetic film is
Individually test.But, as the magnetic compass of the magnetized state and measurement process of film sample has pass all through the ages, after remagnetization measurement
Sample tests may produce inconsistent.In order to preferably study thin film magneto-optic, magneto-electric behavior and its interaction, need
Develop the magnetic measurement new equipment that just can obtain magneto-optic and magneto-electric behavior by Primary field scanning simultaneously.
The content of the invention
The present invention is intended to provide a kind of perpendicular magnetization films test device, it can be scanned by Primary field just can be simultaneously
The magneto-optic and magneto-electric behavior of measurement perpendicular magnetization thin film.
The technical scheme is that：A kind of perpendicular magnetization films test device, it has computer；It uses laser instrument, rises
Partial prism constitutes input path, to the specimen holder projection incident illumination being arranged in electric magnet magnetic gap；With analyzing prism and light
Photodetector constitutes reflected light path, and photoelectric detector receives the optical signal of tested thin magnetic film reflection on the specimen holder；Its magnetic
Field scanning power supply and electric magnet are into electrically connecting；The output port of the photoelectric detector is connected with the first signal input port of computer
Connect；The control port of the field scan power supply is connected with the first controlled output port of computer；The electric magnet is magnetic gap
For 30mm when magnetic field intensity be not less than the double yoke electric magnet of single line bag of 1T, magnetic direction level when the electromagnet base is put, and in nothing
The light hole of the insertion electro-magnet magnetic yoke and the straight-through magnetic gap of the cartridge is equipped with the cartridge axis of line bag side；On its specimen holder
It is provided with adjustable conducting probe of four across distributions；It also has constant-current source, nanovoltmeter, the output port of the constant-current source
Connect the conducting probe of a pair of opposing on the specimen holder, the input port of the nanovoltmeter connects another to phase on the specimen holder
To the conducting probe for arranging；Second controlled output port of the computer is connected with the control input port of the constant-current source, the meter
The secondary signal input port of calculation machine is connected with the output port of the nanovoltmeter.
The present invention is using above-mentioned electric magnet big field generating unit uniform with field scan power supply composition；With laser instrument,
Polarizing prism constitutes input path, to the specimen holder projection incident illumination being arranged in electric magnet magnetic gap；With analyzing prism and
Photoelectric detector constitutes reflected light path, and photoelectric detector receives the optical signal of tested thin magnetic film reflection on the specimen holder, formed
Magneto-optical property measuring unit；With adjustable conducting probe of four across distributions, constant-current source, nanovoltmeter group on specimen holder
Into magneto-electric behavior test cell；There are computer unified control and management uniform big field generating unit, magneto-optical property measuring unit
With the operation of magneto-electric behavior test cell, realizing just can be while measures the magnetic of perpendicular magnetization thin film by Primary field scanning
The goal of the invention of light and magneto-electric behavior.Solve existing separate type magneto-optical property measurement apparatus and magneto-electric behavior measurement apparatus difference
During measurement, as the magnetic compass of the magnetized state and measurement process of film sample has pass, the sample test after remagnetization measurement all through the ages
As a result inconsistent problem.
Implement in structure preferred：The electric magnet is the double yoke single tuning adjustable air gap electric magnet of single line bag, its magnetic field
Air gap scalable in the range of the 0-100mm, a diameter of 50mm of its pole-face；On the electric magnet, the aperture of light hole is 1mm.
The test magnetic field of this electric magnet, not only magnetic field intensity is big and uniform, is also convenient for placing sample and is adjusted
It is whole, it is adapted to various different experiments.The aperture of light hole on electric magnet is limited as 1mm, it is ensured that the needs of magneto-optical property measurement,
Can keep to greatest extent again testing magnetic field's regularity and the index of magnetic field intensity is not suffered a loss.
Implement in structure preferred：Hall element is provided with sample on the specimen holder, the Hall is passed
The output port of sensor connects the input port of a Gaussmeter, and the data-out port of the Gaussmeter connects the computer
3rd signal input port.
By arranging above-mentioned magnetic field measurement unit, control action of the computer to field scan power supply can be played, it is ensured that
Electric magnet can produce various accurate magneto-optical properties with the uniform big magnetic field required for magneto-electric behavior experiment.
Implement in structure preferred：The laser instrument is helium neon laser that stability is 0.2%；The laser wavelength
For 632.8nm, power 5mW, degree of polarization are 500:1；1/2 slide is provided between the laser instrument and polarizing prism.
This laser instrument and 1/2 slide coordinate, and the vibration plane of laser instrument line polarized light can be made to turn over the incident illumination of twice
The angle of direction of vibration and slide optical axis, so as to can flexibly realize the rotationally-varying of the plane of polarization of laser instrument line polarized light.1/2 glass
Piece is the polarization direction for rotary laser, so as to change the laser power size incided on sample, meets various different sharp
Test under the conditions of luminous power size needs.
Implement in structure preferred：The polarizing prism has assembled Glan-thompson side solution by a pair with analyzing prism
Stone polariser realizes that the polarizing prism is provided with the anti-reflection film that wavelength is 350-700nm, the polarizing prism and inspection with analyzing prism
The extinction ratio of partial prism is 100000:1.
The setting combination orthogonal with analyzing prism of this polarizing prism can make the light intensity after analyzing prism directly near
The change at magneto-optical kerr angle is proportional to seemingly.
Implement in structure preferred：Optical focal length is provided with described input path between polarizing prism and specimen holder
For the long-focus lenss of 1m.
Long-focus lenss can overcome restriction of the light hole of aperture very little on electric magnet to laser light incident angle, and adjustment is incident
To the laser facula size on tested thin magnetic film surface.
Implement in structure preferred：Arrowband is provided between analyzing prism and photoelectric detector in described reflected light path
Optical filter, the centre wavelength of the narrow band pass filter is 632.8 ± 0.6nm, and halfwidth is 3 ± 2nm.
The narrow band pass filter that this centre wavelength is coordinated with helium neon laser, can effectively exclude other veiling glares to light
The interference of photodetector, improves the signal to noise ratio of photo-detector output signal.
Implement in structure preferred；The specimen holder is with without L-shaped supporting plate, insulant system made by magnetic duralumin material
Into base plate, four copper studs and four elastic conducting probes made by the brass material without magnetic；Base plate is arranged on L-shaped supporting plate
On, four copper stud across distributions are arranged on base plate, and clamp a conducting probe respectively；Conducting probe rear portion is by copper
The part of stud clamping is provided with the adjustment tank of strip, and the front portion of conducting probe is lifted up and sets what is extended downwardly from front end
Round end contact.
This specimen holder, supporting plate provide stable, reliable support for base plate；Operator is relievedly pacified
Put and remove the operation of tested thin magnetic film.The conducting probe reliability of the contact with tested thin magnetic film of elasticity, and will not injure
The face of tested thin magnetic film.In addition, four conducting probes can be adjusted to the round end contact of each conducting probe into cross point
Cloth, to adopt the decussation four-end method vertical with electric current to measure magnetoelectricity Hall effect；Or the circle of four conducting probes
Head contact is conllinear, to measure magnetoresistance.
Perpendicular magnetization films test device of the present invention, provides a kind of once positive and negative field sweep i.e. cocoa for the public while measurement
The magneto-optic of perpendicular magnetization thin film and the integration apparatus of magneto-electric behavior.It is equal up to more than 1T that it can provide large area, intensity
Even magnetic field, and the complicated interaction between polarized light field, conduction electrons and magnetizing mediums can be studied.The test equipment is applied to hangs down
Straight thin magnetic film is particularly the measurement and research of ultra-thin membrane system with multilayer film.Turn over to studying magneto-electronicses field such as electric current auxiliary magnetic
The phenomenon such as turn to play an important role, and can be widely used for magnetic material, the field such as function film and engineering technology.
Compared with prior art, the present invention has the following advantages：
1) characterization technique of magneto-optic and magnetoelectricity hall measurement both highly sensitive nano-magnetic thin films is combined with, it is particularly suitable
In the measurement and research of the ultra thin vertical membrane system of magnetic.
2) the magneto-optic electric coupling effect of perpendicular magnetization thin film can be studied.Using the system, bias current pair can be not only studied
The impact of magneto-optical property；Impact of the incident laser power to magnetoelectricity Hall property can also be studied.It is that other measurement apparatus do not have
Standby.
3) present invention achieves measuring while the magneto-optic and magneto-electric behavior of perpendicular magnetization membrane system and multilayer film, operation letter
Just, sample face will not be injured, repeatability and stability are high；
4) by the way of continuous applying field sweep, the speed of scanning magnetic field is controlled by the current change rate of programmable current source
And triangle can occur involve various field sweep wave modes such as sine wave.Field sweep drive current source can be changed according to the size of externally-applied magnetic field
Rate of change, one-shot measurement can synchronization gain film sample magneto-optic and magnetoelectricity Hall loop line, shorten the testing time, have
Very high measurement efficiency.
Description of the drawings
Fig. 1 is the structural representation of perpendicular magnetization films test device one embodiment of the present invention.
Fig. 2 is the dimensional structure diagram of the double yoke single tuning adjustable air gap electric magnet of single line bag in Fig. 1 embodiments.
Fig. 3 is the double yoke single tuning adjustable air gap electric magnet of single line bag dimensional structure diagram in working order in Fig. 2.
Fig. 4 is the dimensional structure diagram of specimen holder in Fig. 1 embodiments.
Fig. 5 is the dimensional structure diagram of Fig. 4 specimen holders another kind occupation mode.
Fig. 6 is using this device while detecting Co2FeAl0.5Si0.5(1.7nm) the magnetoelectricity Hall and magnetic of the ultra-thin membrane sample of magnetic
Light characteristic.
Fig. 7 is to detect Co using this device2FeAl0.5Si0.5(1.7nm) the ultra-thin membrane sample of magnetic is under different bias currents
Magneto-optical property curve.
Fig. 8 is to detect Co using this device2FeAl0.5Si0.5(1.7nm) the ultra-thin membrane sample of magnetic is with/without laser light incident
Magnetoelectricity Hall property curve.
Specific embodiment
First, embodiment one
Perpendicular magnetization films test device of the present invention characterizes the magneto-optic of perpendicular magnetization thin film using magneto-optic pole to Kerr effect
Characteristic, characterizes the magneto-electric behavior of perpendicular magnetization thin film using magnetoelectricity Hall effect.Fig. 1 is refer to, the perpendicular magnetization films test
Device includes uniform big field generating unit, magneto-optical property measuring unit, magneto-electric behavior test cell, magnetic field measurement unit and meter
The ingredients such as calculation machine 19.
Uniform big field generating unit drives the double yokes of single line bag using the field scan power supply 13 of Programmable and Variable current rate
Single tuning adjustable air gap electric magnet 12 is realized.The structure of the electric magnet 12 refer to Fig. 2 and Fig. 3, on chassis 121 incline 45 °
Double yoke formula yokes 122 are installed.One column sleeve 123 passes through from right side and the inside that yoke 122 is stretched in the middle part of yoke is stood on the right side of yoke 122
In space and in 122 internal sleeve wiring bag 125 of yoke, the magnetic direction level that line bag 2 is produced when electric magnet 12 is put.Line can be made
The adjusting screw rod that bag 125 is moved left and right is set in column sleeve 123 and the right-hand member from column sleeve 123 stretches out and installs 3 124.Line bag
125 left end is provided with the first cartridge 126 along its axis, founds inner side the first cartridge 126 of correspondence in the middle part of yoke and be provided with the left of yoke 122
Second cartridge 127.The pole-face diameter of the first cartridge 126 and the second cartridge 127 is 50mm, the first cartridge 126 and the second cartridge
Magnetic gap between 127 scalable in the range of the 0-100mm, picks and places sample convenient, it is adaptable to measurement is repeated several times.In yoke
The insertion vertical yoke is equipped with the middle part of the vertical yoke of 122 packet radio sides and on 127 axis of the second cartridge and the second cartridge 127 leads directly to magnetic field gas
The light hole 128 of gap, the aperture of light hole 128 is 1mm.
Overturning seat 129 is installed on the left of the horizontal yoke on 122 top of yoke of electric magnet 12, specimen holder 14 is arranged on the overturning seat
In 129 turning part, when specimen holder 14 is dug upwards, can lay on the base plate of specimen holder 14 or remove tested thin magnetic film
15 (see Fig. 2)；When specimen holder 14 is turned over downwards, the base plate of specimen holder 14 is in the first cartridge 126 between the second cartridge 127,
Tested thin magnetic film 15 is just to light hole 128 and perpendicular to the pole-face (see Fig. 3) of the first cartridge 126 and the second cartridge 127.
Field scan power supply 13 is high power constant-current source, and its output port electrically connected for 12 one-tenth with electric magnet, field scan
The control port of power supply 13 is connected with the first controlled output port 195 of computer 19.When field scan power supply 13 is with maximum electricity
Stream output, when the magnetic gap of electric magnet 12 is 30mm, magnetic field intensity is up to more than 1T.
Magneto-optical property measuring unit constitutes incidence with laser instrument 1,1/2 slide 2, polarizing prism 3 and long-focus lenss 4 successively
Light path, to the projection incident illumination of specimen holder 14 being arranged in 12 magnetic gap of electric magnet；In addition, using long-focus lenss 5, light successively
Door screen 6, analyzing prism 7, narrow band pass filter 8 and photoelectric detector 9 composition reflected light path, photoelectric detector 9 are received on specimen holder 14
The optical signal of the reflection of tested thin magnetic film 15；The output port of photoelectric detector 9 and the first signal input port of computer 19
191 connections.
Laser instrument 1 is high stability helium neon laser that stability is 0.2%；The wavelength of laser instrument 1 be 632.8nm, work(
Rate 5mW, degree of polarization are 500:1.1/2 slide 2 is big for the polarization direction for changing laser and the laser power incided on sample
It is little.Polarizing prism 3 has assembled Glan-thompson calcite polariser by a pair with analyzing prism 7 and has realized, the polarizing prism 3 with
Analyzing prism 7 is provided with the anti-reflection film that wavelength is 350-700nm, and the polarizing prism 3 with the extinction ratio of analyzing prism 7 is
100000:1.The optical focal length of two long-focus lenss 4,5 is 1m.Long-focus lenss 4 in input path are used to adjust sharp
Light hot spot incides the size on 15 surface of tested thin magnetic film；Long-focus lenss 5 in reflected light path are used to assemble from sample table
The laser that face reflects, can be effectively increased magneto-optical signal intensity, improve accuracy and the sensitivity of detection.The hole of diaphragm 6
Footpath is adjustable.The centre wavelength of narrow band pass filter 8 is 632.8 ± 0.6nm, and halfwidth is 3 ± 2nm.Photoelectric detector 9 adopts gain
Adjustable silicon detector, its turn off gain be 350-1100nm, bandwidth 10MHz, capture area 13mm2；In photoelectric detector 9
It is furnished with the small signals amplification circuit of low noise in portion.
Magneto-electric behavior test cell includes the adjustable conducting probe for being located at four across distributions on specimen holder 14
146th, high precise current source 10 and nanovoltmeter 11.The output current scope representative value of constant-current source 10 is 0.1 μ A-50mA, its typical case
Optional product is Keithley instrument company (Keithley) 2400.The input voltage range representative value of nanovoltmeter 11 is 0.1 μ V-
30V, its typical optional product are Keithley instrument company (Keithley) 2182A.The output port connection sample of constant-current source 10
The conducting probe 146 of a pair of opposing on frame 14, it is another on the input port connection specimen holder 14 of nanovoltmeter 11 to set to relative
The conducting probe 146 put.Second controlled output port 194 of computer 19 is connected with the control input port of constant-current source 10, meter
The secondary signal input port 192 of calculation machine 19 is connected with the output port of nanovoltmeter 11.
The base plate 161 of specimen holder 16 is made from an insulative material and installed in the L-shaped without magnetic duralumin material polish
On supporting plate 142, the short stile of supporting plate 142 is provided with stock 143.The free end of stock 143 installs balancing weight 144.Four spies
Pin holder -145 across of copper stud distribution is arranged on base plate 141, and clamps an adjustable conducting probe respectively
146；Copper stud 145 and conducting probe 146 are formed by the brass material polish without magnetic.Conducting probe made by spring brass piece
145, its rear portion is provided with the adjustment tank of strip by the part that copper stud 145 is clamped, the front portion of conducting probe 145 be lifted up and
Set the round end contact for extending downwardly from front end, the conducting probe 146 of this elasticity, the contact with tested thin magnetic film 15 can
Lean on, and the face of tested thin magnetic film 15 will not be injured.Four conducting probes 146 by the printed circuit on base plate 141 with draw
Go out electrode to be connected, measuring loop is being constituted with outside constant-current source 12 and nanovoltmeter 13 by cable.It is conductive by changing four
The contact position of probe 146 and tested thin magnetic film 15 can flexibly realize the measures conversion of magnetoelectricity Hall effect and magnetoresistance.
For example shown in Fig. 4, the round end contact of four conducting probes 146, can be using the decussation vertical with electric current into cross distribution
Four-end method measures magnetoelectricity Hall effect.Again as shown in figure 5, collinearly measuring magnetic resistance by the round end contact of four conducting probes 146
Effect.
Magnetic field measurement unit is on rear side of the supporting plate 142 of specimen holder 14 to set Hall element 16 at sample, should
The output port of Hall element 16 connects the input port of a Gaussmeter 17, the data-out port connection of the Gaussmeter 17
3rd signal input port 193 of computer 19.
During use, the DM 12 under the control of computer 19 of field scan power supply 13 produces positive negative fluxfield and sweeps
Retouch.Magnetic field size is linear electric by being placed between 12 first cartridge 126 of electric magnet and the second cartridge 127 near the sample of field regions
The hall probe sensor 16 of pressure output is measured with Gaussmeter 17.The magnetic field intensity signal of the output of Gaussmeter 14 is transferred into calculating
Machine 19, so that computer 19 adjusts the output of field scan power supply 13, makes electric magnet 12 accurately produce regulation according to requirement of experiment
The magnetic field of intensity.Computer 19 gather photoelectric detector 9 output magneto-optical signal while, control high precise current source 12 to
On specimen holder 14, two correspondence conducting probes 146 are powered.And two other conduction spy on specimen holder 14 is obtained by nanovoltmeter 13
The magnetoelectricity Hall voltage signal of the transmission of pin 146.One is covered, once positive and negative field sweep can measure the magnetic of perpendicular magnetization thin film simultaneously
The measurement signal of acquisition is stored and is processed by light and magneto-electric behavior, computer 19, obtains the magneto-optical kerr with synchronicity
And magnetoelectricity Hall property loop line.
Comprising the following steps that for operation is measured using this device：
1) tested thin magnetic film 15 is placed on specimen holder 14,：Overturning seat 129 digs specimen holder 14 first, turns sample
Copper stud 145 on frame 14, unclamps four contacts with base plate 141 of conducting probe 146, tested thin magnetic film 15 (sample) is put
The center of base plate 141 is placed in, and the mode of magnetoelectricity Hall effect is measured according to decussation four-end method, is made four conducting probes
146 round end contact is pressed on sample, is then turned each copper stud 145 again and is locked four conducting probes 146 respectively.By ten thousand
The resistance value of four conducting probes, 146 samples is detected with ammeter, it is ensured that all round end contacts of four conducting probes 146 and sample
The face of product has good electrical contact.Specimen holder 14 is turned over downwards by overturning seat 129, sample is put into into 12 first pole of electric magnet
126 and second in uniform magnetic field between cartridge 127, finely tune the connection of overturning seat 129 and specimen holder 14, make sample film
Face vertical magnetic field direction, sample center alignment light hole 128.As hall probe sensor 16 is installed in specimen holder 14
The central authorities of 142 behind of supporting plate, the hall probe sensor 16 for now measuring magnetic field are also at the first cartridge of electric magnet 126 and second
Near sample between cartridge 127.
2) power supply of helium neon laser 1, is opened, adjustment light path makes laser sequentially pass through adjustment 1/2 wave plate 2 of power, rise
Partial prism 3, long-focus lenss 4, then incided on specimen holder 14 by four conductive spies by the light hole 128 on the left of electric magnet 12
The sample central area that pin 146 is fixed.The light reflected from sample surfaces then by the light hole 128 on the left of electric magnet 12,
Second long-focus lens 5, aperture adjustable diaphragm 6, and polarizer nearly orthogonal arrange analyzing prism 7, after narrow band pass filter 8
Into the light-receiving sensitizing range of the photoelectric detector 9 of variable gain.
3), open the power supply of field scan power supply 13, constant-current source 10, nanovoltmeter 11 and computer power supply 19.Operation is calculated
Machine Data Acquisition ＆ Processing Software；Initialization operation is carried out to the data collection and control port of computer 19, field sweep scope is set,
The parameter such as 13 field sweep speed of field scan power supply and field sweep number of times, and the conducting probe bias current that constant-current source 10 should be exported is set
Size.Gain and the bias current size of photoelectric detector 9 are adjusted, the magneto-optic of the sampling of suitable computers 19 is produced with magnetoelectricity electricity
Pressure signal.
4) 13 DM 12 of the control field scan of computer 19 power supply, is operated to produce positive and negative field sweep magnetic field, while meter
The collection magnetic field size of calculation machine 19, magneto-optic and magnetoelectricity voltage signal, start data processing and storage；Positive and negative field sweep terminates, computer
Magneto-optic, magnetoelectricity voltage data and magnetic field value that collection storage is obtained are processed by 19, obtain magneto-optic and magneto-electric behavior curve.
Experimenter can study impact of the different incident power laser to magnetoelectric effect or set by rotating 1/2 slide 2
Put different bias currents and study its impact to magneto-optical property.
Fig. 6 is shown with this device while detecting Co2FeAl0.5Si0.5(1.7nm) magnetoelectricity that the ultra-thin membrane sample of magnetic is obtained is suddenly
You and magneto-optical property curve.Fig. 7 is shown with this device detection Co2FeAl0.5Si0.5(1.7nm) the ultra-thin membrane sample of magnetic is in difference
Magneto-optical property curve under bias current.Fig. 8 is shown with this device detection Co2FeAl0.5Si0.5(1.7nm) magnetic ultrathin membrane sample
Product are in the magnetoelectricity Hall property curve with/without laser light incident.
The above, only present pre-ferred embodiments do not limit the scope of present invention enforcement, skill under this invention with this
The equivalence changes made by art scheme and description and modification, should all belong to the scope that the present invention covers.
Claims (8)
1. a kind of perpendicular magnetization films test device, it has computer；It constitutes input path with laser instrument, polarizing prism, to
The specimen holder projection incident illumination being arranged in electric magnet magnetic gap；Reflected light path is constituted with analyzing prism and photoelectric detector,
Photoelectric detector receives the optical signal of tested thin magnetic film reflection on the specimen holder；Its field scan power supply is with electric magnet into electricity
Connection；It is characterized in that：The output port of the photoelectric detector is connected with the first signal input port of computer；Sweep in the magnetic field
Retouch the control port of power supply to be connected with the first controlled output port of computer；The magnetic field when electric magnet is 30mm for magnetic gap
Intensity is not less than the double yoke electric magnet of single line bag of 1T, magnetic direction level when the electromagnet base is put, and in the cartridge of packet radio side
The light hole of the insertion electro-magnet magnetic yoke and the straight-through magnetic gap of the cartridge is equipped with axis；Its specimen holder is provided with four into ten
Adjustable conducting probe of font distribution；The output port that it also has constant-current source, nanovoltmeter, the constant-current source connects the specimen holder
The conducting probe of upper a pair of opposing, the input port of the nanovoltmeter connect the conduction of another a pair of opposing on the specimen holder
Probe；Second controlled output port of the computer is connected with the control input port of the constant-current source, the second letter of the computer
Number input port is connected with the output port of the nanovoltmeter.
2. a kind of perpendicular magnetization films test device according to claim 1, it is characterised in that：The electric magnet is single line
The double yoke single tuning adjustable air gap electric magnet of bag, its magnetic gap scalable in the range of the 0-100mm, a diameter of 50mm of its pole-face；
On the electric magnet, the aperture of light hole is 1mm.
3. a kind of perpendicular magnetization films test device according to claim 1 and 2, it is characterised in that：After the specimen holder
Side is provided with Hall element at sample, and the output port of the Hall element connects the input of a Gaussmeter
Mouthful, the data-out port of the Gaussmeter connects the 3rd signal input port of the computer.
4. a kind of perpendicular magnetization films test device according to claim 1 and 2, it is characterised in that：The laser instrument is
Stability is 0.2% helium neon laser；The laser wavelength is 632.8nm, and power 5mW, degree of polarization are 500:1；Swash at this
1/2 slide is provided between light device and polarizing prism.
5. a kind of perpendicular magnetization films test device according to claim 4, it is characterised in that：The polarizing prism and inspection
Partial prism has assembled Glan-thompson calcite polariser by a pair and has realized, the polarizing prism is provided with wavelength with analyzing prism
For the anti-reflection film of 350-700nm, the polarizing prism is 100000 with the extinction ratio of analyzing prism:1.
6. a kind of perpendicular magnetization films test device according to claim 4, it is characterised in that：In described input path
The long-focus lenss that optical focal length is 1m are provided between polarizing prism and specimen holder.
7. a kind of perpendicular magnetization films test device according to claim 4, it is characterised in that：In described reflected light path
Narrow band pass filter is provided between analyzing prism and photoelectric detector, the centre wavelength of the narrow band pass filter is 632.8 ±
0.6nm, halfwidth are 3 ± 2nm.
8. a kind of perpendicular magnetization films test device according to claim 1 and 2, it is characterised in that：The specimen holder tool
Whether there is four copper studs made by base plate made by L-shaped supporting plate, insulant made by magnetic duralumin material, the brass material without magnetic
The conducting probe elastic with four；Base plate is arranged on L-shaped supporting plate, and four copper stud across distributions are arranged on base plate,
And a conducting probe is clamped respectively；Conducting probe rear portion is provided with the adjustment tank of strip by the part that copper stud is clamped, conductive
The front portion of probe is lifted up and sets at front end the round end contact that extends downwardly from.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN108594144B (en) * | 2018-06-27 | 2024-01-19 | 河北工业大学 | Two-dimensional monolithic magnetic characteristic test system and method under bidirectional stress loading condition |
| CN110632180A (en) * | 2019-11-06 | 2019-12-31 | 南昌航空大学 | Portable electromagnetic type pipeline magnetizer |
| CN117571623B (en) * | 2024-01-17 | 2024-04-16 | 北京市农林科学院智能装备技术研究中心 | Portable detection device and method for measuring total phosphorus in soil |
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