CN108362765A - A kind of Ke Er microscopes with sensitivity selection function - Google Patents
A kind of Ke Er microscopes with sensitivity selection function Download PDFInfo
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- CN108362765A CN108362765A CN201810429228.0A CN201810429228A CN108362765A CN 108362765 A CN108362765 A CN 108362765A CN 201810429228 A CN201810429228 A CN 201810429228A CN 108362765 A CN108362765 A CN 108362765A
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Abstract
The present invention relates to material surface Magnetic Measurement fields,A kind of Ke Er microscopes with sensitivity selection function,Including light source,Aspherical mirror I,Aspherical mirror II,Field stop,Polarizer,Aspherical mirror III,Half-mirror,Object lens,Sample,Sample stage,Magnet,Turntable,Compensator,Analyzer,Aspherical mirror IV,Photodetector,Lock-in amplifier,Stepper motor,Computer,Light source,Aspherical mirror I,Aspherical mirror II,Field stop,Polarizer,Aspherical mirror III,Half-mirror,Object lens form illumination path successively,Object lens,Half-mirror,Compensator,Analyzer,Aspherical mirror IV forms imaging optical path successively,The present invention realizes the separation and enhancing of Ke Er contrasts in the magneto-optical kerr microscope of wide field,It can obtain the trivector figure of the surface magnetization of any sample,And the contribution of the parasitic Faraday effect in prism is inhibited in the experiment of magnetic domain in observing samples,Increase contrast and signal-to-noise ratio.
Description
Technical field
It is especially a kind of using special light sources and one kind of magnet structure the present invention relates to material surface Magnetic Measurement field
Ke Er microscopes with sensitivity selection function.
Background technology
Kerr magnetooptical effect measuring device is a kind of important means in material surface magnetism research, and operation principle is base
Kerr magnetooptical effect caused by interaction, can not only carry out monoatomic layer thickness material between Yu Youguang and magnetized medium
Magnetic detection, and can realize non-contact measurement, the magnetic order of magnetic ultrathin film, magnetic anisotropy, layer coupling and
There is important application in the research of the transformation behavior of magnetic ultrathin film etc..Ke Er microscopes are a kind of common devices,
Operation principle is：Linearly polarized light with after the interaction of nontransparent magnetic media surface, produce by the plane of polarization of reflected light
Rotation clockwise or counterclockwise is given birth to, direction of rotation is related with the direction of magnetization of medium, and the ellipse in usual reflected light is partially
It is superposition to shake, and for reflected light after the analyzer in reflected light path, kerr rotation is changed into magnetic domain contrast, to obtain sample
The magnetization characteristic of the magnetic domain of product surface different zones.Prior art defect one：Traditional Ke Er microscopes use mechanical mechanism
Diaphragm slit is adjusted to change the illuminated area on sample, and this is not easy to meet the required precision tested；Prior art defect two：
For material or diluted semi-conductor thin-film sample with smaller kerr rotation, the preferable image of resolution ratio cannot be obtained, it is described
A kind of Ke Er microscopes with sensitivity selection function solve the problems, such as.
Invention content
To solve the above-mentioned problems, the present invention is come using the LED light group of cross-shaped arrangement as light source without diaphragm slit
Change the illuminated area on sample, the x-component and y-component of simultaneously real-time display sample surfaces magnetization vector can be measured, and can
The contrast that component outside component knead dough in the magnetized face of sample surfaces generates is distinguished, increases signal-to-noise ratio, and reduce
Parasitic Faraday effect, improves device sensitivity.
The technical solution adopted in the present invention is：
A kind of Ke Er microscopes with sensitivity selection function include mainly light source, aspherical mirror I, aspherical mirror
II, field stop, polarizer, aspherical mirror III, half-mirror, object lens, sample, sample stage, magnet, turntable, compensation
Device, analyzer, aspherical mirror IV, photodetector, lock-in amplifier, stepper motor, computer, the light source, aspherical mirror
I, aspherical mirror II, field stop, polarizer, aspherical mirror III, half-mirror, object lens form illumination path successively, institute
It states object lens, half-mirror, compensator, analyzer, aspherical mirror IV and forms imaging optical path successively, sample is located at sample stage
On, the sample, sample stage, turntable are sequentially located at below object lens, and the light that light source is sent out passes through aspherical mirror I, aspheric successively
Face mirror II, field stop, polarizer, aspherical mirror III are changed into linear polarization by half-mirror and retrodeviate into object lens,
And sample surfaces are converged to, it is reflected by sample surfaces, the reflected lights of sample surfaces is passed through translucent anti-successively after object lens collect
Enter photodetector after penetrating mirror, compensator, analyzer, aspherical mirror IV, the magnet is made of anode and cathode, sample stage
With central shaft, sample stage can in the horizontal plane be rotated around central shaft, and the anode and cathode of the magnet are relative to sample stage
Substantially symmetrical about its central axis, magnet is fixed on turntable, and can be with turntable around sample stage central shaft 360 degree rotation, the light source
By four across arrange rectangle LED light form, four LED light be lamp I, lamp II, lamp III and lamp IV, each
LED light is respectively connected with an optical fiber, and a diameter of 1.5 millimeters of the optical fiber, the light that LED light is sent out passes through fiber guides to light source
Output end, each LED light output power is 150 milliwatts, and the wavelength for the light that each LED light is sent out is 600 nanometers, is passed through
Adjust the position of aspherical mirror I, aspherical mirror II, field stop and aspherical mirror III so that the output end of light source images in object
The back of the body focussing plane of mirror.
The present apparatus extracts secondary magneto-optical kerr signal component using rotating excitation field method, and advantage is to secondary and linear
Magneto-optical kerr signal is all sensitiveer, and secondary magneto-optical kerr signal can be extracted from monocrystalline or film sample.
Technical principle is as follows：Pole in sample is to the corresponding sample direction of magnetization of Kerr effect for outside face, longitudinal Ke Er is imitated
It is in face and along the plane of incidence of light to answer the corresponding sample direction of magnetization, and the corresponding sample direction of magnetization of transverse Kerr effect is face
It is interior and vertical with light plane of incidence.By the magnetization for changing the direction, sample in the direction of incident light polarization plane, the incidence angle of light
Direction can distinguish the pole in sample to Kerr effect and longitudinal Kerr effect, and transverse Kerr effect can cause to reflect
The amplitude of light changes.According to the refraction of Kerr effect rule, a simple rule can be derived that：Detect obtained sample surfaces
Ke Er contrasts with along being magnetized into for the reflected beams direction of propagation be divided into direct ratio, such as incident light impinges perpendicularly on sample table
Face, reflected light vertically reflect, and magnetize magnetic domain in the face in sample not along the component in reflected light travels direction, i.e., do not show
Go out contrast.On the contrary, outside face in sample in magnetized magnetic domain, there are maximum vector components, that is, show that pole is imitated to Ke Er
The maximum-contrast answered.Therefore, magnetize the contrast difference between magnetic domain in face in order to obtain, that is, distinguish in different faces and magnetize
Magnetic domain needs oblique incident ray：According to the direction of incident optical plane and incident light, the magnetic domain institute of the sample surfaces difference direction of magnetization is anti-
The light penetrated can show different Ke Er contrasts in detector, therefore can differentiate the magnetic domain of the different direction of magnetizations
Come.
Magnetizing the magneto-optical property of crystal can be described by the permeability tensor with magnetization variation, this tensor can indicate
For formula one：Wherein, KijkAnd GijklRespectively linear and secondary magneto-optic
Amount, mkAnd mlRespectively magnetize the component in the directions k and l,It is dielectric tensors, using Onsager reciprocal relations and crystal
Cubic symmetry, permeability tensor can be fully deployed using following parameterN is refraction of the light in magnetizing crystal
Rate, Kijk=Kjki=Kkij=K, K are linear magneto-optic coupling constants, and when i ≠ j, secondary magneto-optic coupling constant has following relationship Giijj
=G11, Giijj=G12, G1212=G1313=G2323=G44, in face in magnetized sample, if in sample magnetic saturation into
Row measures, and the magnetization component outside face can be ignored.In this case, by solving Mike at incident medium-example interface
This Wei Fangcheng, and above-mentioned permeability tensor is used, complete magneto-optical kerr angle just can be obtained, for s polarised lights, Keer rotation table
It is shown as following formula two：
Wherein,Anisotropic magneto-optic coupling constant Δ G=(G11-G12-
2G44),It is incidence angle, γ is the angle in easy magnetic axis direction and light incident surface in face in sample, mLEnter being parallel to light for magnetization
Penetrate the component in the direction of plane, mTFor to magnetize in the component perpendicular to the direction of light plane of incidence, n0It is light in incident medium
Refractive index.
According to above-mentioned formula two, secondary Kerr magnetooptical effect has Time-reversal symmetry and longitudinal Kerr magnetooptical effect makes
It obtains Time-reversal symmetry and generates broken lack.For being rotated in the face of crystal, linear magneto-optic coupling is isotropic, secondary magneto-optic
Coupling parameter is anisotropic.If in rotating excitation field, Ke Er signals are measured when sample is saturated, above-mentioned formula two being capable of letter
Turn to following formula three：
Wherein,X is the angle in magnetic field and light plane of incidence.
The extraction of secondary magneto-optical kerr signal component：
The light intensity measured in experiment includes the contribution of linear Ke Er signals and secondary Ke Er signals, is needed the two point
From.Due to the longitudinal direction Kerr magnetooptical effect reduction when light beam is mutually incident close to method, secondary Kerr magnetooptical effect reaches saturation, because
This covers secondary Kerr magnetooptical effect in order to avoid linear Kerr magnetooptical effect is excessive, the smaller incidence angle of use such as 10
Degree.
In order to extract Kerr magnetooptical effect coefficient, sample direction is fixed using rotating excitation field method, uses photodetector
The light intensity of (0 to 360 degree) is recorded under each magnetic field condition since linear Kerr magnetooptical effect and secondary Kerr magnetooptical effect are to magnetic
The dependence of rink corner degree is different, can detach and extract longitudinal Kerr magnetooptical effect and secondary Kerr magnetooptical effect coefficient then
It by fixed sample angle γ and repeats the above steps, the Kerr magnetooptical effect coefficient under the conditions of this sample angle can be taken out
It takes.If Keer rotation θ than reflected light relative to the deviation angle δ of analyzer much smaller, the pass between the light intensity measured and Keer rotation
System can be indicated that formula four is by formula four：Formula three is substituted into formula four, obtains following equation five：Wherein Q1=b+c × cos4 γ, Q2=c × sin4 γ, will
The data arrived are fitted according to formula five, to obtain the corresponding Q of γ1And Q2Value, and then the secondary magnetic of anisotropy for acquiring sample
The magneto-optical kerr coupling constant of optical coupling constant Δ G and isotropic
It is measured using a kind of Ke Er microscopes with sensitivity selection function, including measures pure pole to Ke Er
Sensitivity, the longitudinal Ke Er sensitivity for measuring horizontal direction, inhibits polar sensitive at the longitudinal Ke Er sensitivity for measuring vertical direction
It spends, obtains multicomponent imaging, measures secondary magneto-optical kerr signal.
The method for measuring different directions Ke Er sensitivity：
Measure method of the pure pole to Ke Er sensitivity：Lamp I, lamp II, lamp III and lamp IV are opened, processing photodetector is visited
Domain pattern is obtained after the electric current measured；
The method for measuring longitudinal Ke Er sensitivity of vertical direction：Open lamp I and lamp III, processing photodetector detection
To electric current after obtain domain pattern；
The method for measuring longitudinal Ke Er sensitivity of horizontal direction：Open lamp II and lamp IV, processing photodetector detection
To electric current after obtain domain pattern；
Inhibit the method for polar sensitive degree：The LED of light source is opened and closed with pulse train pattern, opens two microseconds of lamp I
After close, close after being then turned on two microseconds of lamp III, so repeat, and synchronouss with photodetector, processing photodetector spy
After the electric current measured, two groups of continuously images with opposite incidence angle are obtained, by two groups of image subtractions, to obtain in pure face
Sensitivity；
The method for obtaining multicomponent imaging：Lamp I and lamp IV is alternately opened and closed, is closed after opening two microseconds of lamp I,
It is closed after being then turned on two microseconds of lamp IV, so repeats, the domain pattern in sample can be obtained under the conditions of quadrature sensitivity；
The step of measuring secondary magneto-optical kerr signal be：
When one, is initial, the easy magnetic axis direction of sample is parallel with light plane of incidence, and the direction is defined as γ=0；
Magnetic direction is adjusted to along light plane of incidence direction by two, and angle at this time is defined as magnetic field angle x=0；
Three, are recorded by computer-controlled stepper motor and lock-in amplifier in some fixed sample direction γ
The electric current of photodetector, function of the electric current as magnetic direction adjust magnetic direction, and magnetic field angle x value ranges are from 0
To 360 degree, 0.1 degree of stepping；
Four, repeat third step five times, and are averaged to result, obtain the electric current of photodetector relative to magnetic direction
Variation；
Five, specimen rotating holders arrive 180 degree in sample angle γ ranges 0, all implement three He of the above measuring process every 10 degree
Step 4；
The extraction of six bis- magneto-optical kerr signal components of, the light intensity that measures of separation photodetector include linear and two
Secondary Ke Er signals, if Keer rotation θ is much smaller than the deviation angle δ of analyzer, the relationship between the light intensity measured and Keer rotation can
ByIt indicates, wherein I0The light intensity reflected from sample surfaces when for kerr rotation being 0；
Seven, are by obtained data according to formulaFitting, from
And obtain the corresponding Q of sample angle γ1And Q2Value, and then the secondary magneto-optic coupling constant Δ G of anisotropy that acquires sample and
The magneto-optical kerr coupling constant of isotropic
The beneficial effects of the invention are as follows：
The present invention realizes the separation and enhancing of Ke Er contrasts in the magneto-optical kerr microscope of wide field, can obtain any
The trivector figure of the surface magnetization of sample, and inhibit the parasitic faraday in prism to imitate in the experiment of observing samples magnetic domain
The contribution answered, increases contrast and signal-to-noise ratio.In addition, extracting secondary Kerr effect component, nothing using rotating excitation field method
It need to need accurately to measure its intensity and direction in real time as vector magnet.
Description of the drawings
It is further illustrated with reference to the figure of the present invention：
Fig. 1 is schematic diagram of the present invention, and Fig. 2 is the side enlarged diagram of light source.
In figure, 1. light sources, 1-1. lamps I, 1-2. lamp II, 1-3. lamp III, 1-4. lamp IV, 2. aspherical mirror I, 3. is aspherical
Mirror II, 4. field stops, 5. polarizers, 6. aspherical mirror III, 7. half-mirrors, 8. object lens, 9. samples, 10. samples
Platform, 11. magnets, 12. turntables, 13. compensators, 14. analyzers, 15. aspherical mirror IV, 16. photodetectors.
Specific implementation mode
It is described a kind of with sensitivity choosing if Fig. 2 is the side enlarged diagram of light source if Fig. 1 is schematic diagram of the present invention
Select the Ke Er microscopes of function mainly and include light source 1, aspherical mirror I 2, aspherical mirror II 3, field stop 4, polarizer 5, non-
Spherical mirror III6, half-mirror 7, object lens 8, sample 9, sample stage 10, magnet 11, turntable 12, compensator 13, analyzer
14, aspherical mirror IV15, photodetector 16, lock-in amplifier, stepper motor, computer, the light source 1, aspherical mirror I
2, aspherical mirror II 3, field stop 4, polarizer 5, aspherical mirror III6, half-mirror 7, object lens 8 form illumination successively
Light path, the object lens 8, half-mirror 7, compensator 13, analyzer 14, aspherical mirror IV15 form imaging optical path successively,
Sample 9 is located on sample stage 10, and the sample 9, sample stage 10, turntable 12 are sequentially located at 8 lower section of object lens, what light source 1 was sent out
Light passes through aspherical mirror I 2, aspherical mirror II 3, field stop 4, polarizer 5, aspherical mirror III6 successively, by translucent anti-
It penetrates mirror 7 and is changed into linear polarization and retrodeviate to object lens 8 are entered, and 9 surface of sample is converged to, by 9 surface reflection of sample, 9 surface of sample
Reflected light it is laggard through half-mirror 7, compensator 13, analyzer 14, aspherical mirror IV15 successively after object lens 8 collect
Enter photodetector 16, the magnet 11 is made of anode and cathode, and sample stage 10 has central shaft, and sample stage 10 can be in
Mandrel rotates in the horizontal plane, and the anode and cathode of the magnet 11 are substantially symmetrical about its central axis relative to sample stage, and magnet 11 is fixed on
On turntable 12, and can be with turntable 12 around sample stage central shaft 360 degree rotation, the light source 1 is arranged by four across
The rectangle LED light of row forms, and four LED light are lamp I 1-1, lamp II1-2, lamp III1-3 and lamp IV1-4, each LED
Lamp is respectively connected with an optical fiber, and a diameter of 1.5 millimeters of the optical fiber, the light that LED light is sent out passes through fiber guides to light source 1
Output end, each LED light output power are 150 milliwatts, and the wavelength for the light that each LED light is sent out is 600 nanometers, passes through tune
The position of whole aspherical mirror I 2, aspherical mirror II 3, field stop 4 and aspherical mirror III6 so that the output end of light source is imaged
In the back of the body focussing plane of object lens 8.
The present apparatus extracts secondary magneto-optical kerr signal component using rotating excitation field method, and advantage is to secondary and linear
Magneto-optical kerr signal is all sensitiveer, and secondary magneto-optical kerr signal can be extracted from monocrystalline or film sample.
Technical principle is as follows：Pole in sample is to the corresponding sample direction of magnetization of Kerr effect for outside face, longitudinal Ke Er is imitated
It is in face and along the plane of incidence of light to answer the corresponding sample direction of magnetization, and the corresponding sample direction of magnetization of transverse Kerr effect is face
It is interior and vertical with light plane of incidence.By the magnetization for changing the direction, sample in the direction of incident light polarization plane, the incidence angle of light
Direction can distinguish the pole in sample to Kerr effect and longitudinal Kerr effect, and transverse Kerr effect can cause to reflect
The amplitude of light changes.According to the refraction of Kerr effect rule, a simple rule can be derived that：Detect obtained sample surfaces
Ke Er contrasts with along being magnetized into for the reflected beams direction of propagation be divided into direct ratio, such as incident light impinges perpendicularly on sample table
Face, reflected light vertically reflect, and magnetize magnetic domain in the face in sample not along the component in reflected light travels direction, i.e., do not show
Go out contrast.On the contrary, outside face in sample in magnetized magnetic domain, there are maximum vector components, that is, show that pole is imitated to Ke Er
The maximum-contrast answered.Therefore, magnetize the contrast difference between magnetic domain in face in order to obtain, that is, distinguish in different faces and magnetize
Magnetic domain needs oblique incident ray：According to the direction of incident optical plane and incident light, the magnetic domain institute of the sample surfaces difference direction of magnetization is anti-
The light penetrated can show different Ke Er contrasts in detector, therefore can differentiate the magnetic domain of the different direction of magnetizations
Come.
The present invention, as light source, changes illuminating on sample using the LED light group of cross-shaped arrangement without diaphragm slit
Region reduces the mechanical instability in experiment, can obtain the preferable image of resolution ratio, and save time of measuring.Separately
Outside, secondary Kerr effect component is extracted using rotating excitation field method, is accurately surveyed in real time without being needed as vector magnet
Its intensity and direction are measured, apparatus structure is simplified.
Claims (1)
1. a kind of Ke Er microscopes with sensitivity selection function include mainly light source, aspherical mirror I, aspherical mirror II, regard
Field diaphragm, polarizer, aspherical mirror III, half-mirror, object lens, sample, sample stage, magnet, turntable, compensator, inspection
Inclined device, aspherical mirror IV, photodetector, lock-in amplifier, stepper motor, computer, the light source, aspherical mirror I, aspheric
Face mirror II, field stop, polarizer, aspherical mirror III, half-mirror, object lens form illumination path, the object successively
Mirror, half-mirror, compensator, analyzer, aspherical mirror IV form imaging optical path successively, and sample is located on sample stage, institute
It states sample, sample stage, turntable to be sequentially located at below object lens, the light that light source is sent out passes through aspherical mirror I, aspherical mirror successively
II, field stop, polarizer, aspherical mirror III are changed into linear polarization by half-mirror and retrodeviate into object lens, and converge
Gather sample surfaces, reflected by sample surfaces, the reflected lights of sample surfaces after object lens collect successively through half-mirror,
Enter photodetector after compensator, analyzer, aspherical mirror IV, the magnet is made of anode and cathode, and sample stage has
Central shaft,
It is characterized in that：Sample stage can in the horizontal plane be rotated around central shaft, and the anode and cathode of the magnet are relative to sample
Platform is substantially symmetrical about its central axis, and magnet is fixed on turntable, and can be with turntable around sample stage central shaft 360 degree rotation, the light
The rectangle LED light that source is arranged by four across forms, four LED light be lamp I, lamp II, lamp III and lamp IV, often
A LED light is respectively connected with an optical fiber, and a diameter of 1.5 millimeters of the optical fiber, the light that LED light is sent out passes through fiber guides to light
The output end in source, each LED light output power are 150 milliwatts, and the wavelength for the light that each LED light is sent out is 600 nanometers, are led to
Cross the position of adjustment aspherical mirror I, aspherical mirror II, field stop and aspherical mirror III so that the output end of light source images in
The back of the body focussing plane of object lens.
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| CN201810429228.0A CN108362765A (en) | 2018-04-24 | 2018-04-24 | A kind of Ke Er microscopes with sensitivity selection function |
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| CN201810429228.0A CN108362765A (en) | 2018-04-24 | 2018-04-24 | A kind of Ke Er microscopes with sensitivity selection function |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114280769A (en) * | 2020-12-28 | 2022-04-05 | 深圳同舟光电科技有限公司 | High-sensitivity optical imaging system, method and device |
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2018
- 2018-04-24 CN CN201810429228.0A patent/CN108362765A/en not_active Withdrawn
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114280769A (en) * | 2020-12-28 | 2022-04-05 | 深圳同舟光电科技有限公司 | High-sensitivity optical imaging system, method and device |
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