CN104457729B - Magnetic resonance gyroscope instrument sensitive detection unit and the manufacture method of the unit - Google Patents
Magnetic resonance gyroscope instrument sensitive detection unit and the manufacture method of the unit Download PDFInfo
- Publication number
- CN104457729B CN104457729B CN201410850404.XA CN201410850404A CN104457729B CN 104457729 B CN104457729 B CN 104457729B CN 201410850404 A CN201410850404 A CN 201410850404A CN 104457729 B CN104457729 B CN 104457729B
- Authority
- CN
- China
- Prior art keywords
- air chamber
- magnetic resonance
- groove
- draw
- fixture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/58—Turn-sensitive devices without moving masses
- G01C19/60—Electronic or nuclear magnetic resonance gyrometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Manufacturing & Machinery (AREA)
- Gyroscopes (AREA)
Abstract
Magnetic resonance gyroscope instrument sensitive detection unit and the manufacture method of the unit, are related to belong to atomic sensor field.The present invention is low in order to solve existing sensitive detection unit precision, it is impossible to meet the problem of magnetic resonance gyroscope instrument requirement.Magnetic resonance gyroscope instrument sensitive detection unit of the present invention and the manufacture method of the unit, agent structure is printed by 3D printing technique and is completed, the position of each element is directly defined, the laser that VCSEL laser instrument sends is polarized through the polarizer, then collimate through little focal length collimation lens, inject in nuclear magnetic resonance air chamber after quarter wave plate adjustment polarization state again, alkali metal atom in atomic air chamber is with intert-gas atoms first by pumping optical pumping to excitation state, the photosurface of the emergent light directive photodetector of nuclear magnetic resonance air chamber, completes the detection of NMR signal.It is applied to and develops micro-structural magnetic resonance gyroscope instrument system.
Description
Technical field
The invention belongs to atomic sensor field.
Background technology
Nuclear magnetic resonance atomic gyroscope is the sensor changed come detection angles using the nmr frequency change of atom,
Sensitive detection unit therein is the core component of whole gyroscope, and its stability and precision determine the overall nuclear-magnetism of system
The accuracy of detection of resonating atoms gyroscope, but existing sensitive detection unit precision is low, power consumption is big, volume is big, it is impossible to meet
Magnetic resonance gyroscope instrument requires that therefore, how to design a kind of high accuracy, low-power consumption, the sensitive detection unit of small size becomes
The key of manufacture magnetic resonance gyroscope instrument.
Content of the invention
The present invention is low in order to solve existing sensitive detection unit precision, it is impossible to meet magnetic resonance gyroscope instrument requirement
Problem, now provides the manufacture method of magnetic resonance gyroscope instrument sensitive detection unit and the unit.
Magnetic resonance gyroscope instrument sensitive detection unit, it includes：VCSEL laser instrument, the polarizer, collimation lens, 1/4 ripple
Piece, nuclear magnetic resonance air chamber, photodetector and support；
Support includes：Column, base, laser instrument draw-in groove, polarizer draw-in groove, collimation lens draw-in groove, quarter wave plate draw-in groove, gas
Fixture below fixture, air chamber above room；
Uprights vertical is fixed on base, has photodetector light hole, laser instrument draw-in groove, polarizer card on base
Above groove, collimation lens draw-in groove, quarter wave plate draw-in groove, air chamber, below fixture and air chamber, fixture is sequentially fixed at column from top to bottom
On, and fixture below fixture, air chamber above laser instrument draw-in groove, polarizer draw-in groove, collimation lens draw-in groove, quarter wave plate draw-in groove, air chamber
Coaxial with photodetector light hole；
Above air chamber, below fixture and air chamber, the outer surface of fixture is respectively equipped with magnetic field line ring recess and lower magnetic field line ring recess,
And be wound with field coil and lower field coil in upper magnetic field line ring recess and lower magnetic field line ring recess respectively, above air chamber fixture and
Heating plate and lower heating plate is respectively equipped with below air chamber inside fixture；
VCSEL laser instrument is located in laser instrument draw-in groove, and the polarizer is located in polarizer draw-in groove, and collimation lens draw-in groove is located at standard
In straight lens draw-in groove, quarter wave plate draw-in groove is located in quarter wave plate draw-in groove, and nuclear magnetic resonance air chamber is located above air chamber under fixture, air chamber
Between square fixture, photodetector is located at below base, and the sensitive chip of photodetector is located at photodetector light hole
Center.
The manufacture method of above-mentioned magnetic resonance gyroscope instrument sensitive detection unit is as follows：
Support is integrally printed initially with 3D printing technique, then respectively by VCSEL laser instrument, the polarizer, standard
Straight lens, quarter wave plate, nuclear magnetic resonance air chamber and photodetector are respectively embedded in corresponding draw-in groove, finally obtain nuclear-magnetism altogether
Shake gyroscope sensitive detection unit.
Magnetic resonance gyroscope instrument sensitive detection unit of the present invention and the manufacture method of the unit, agent structure is by 3D
Printing technique is printed and is completed, and structure-integrated degree is high, directly defines the position of each element, is easy to assembling, saves space,
The error that brings in assembling process is avoided, improves the precision of magnetic resonance gyroscope instrument sensitive detection unit；Meanwhile, in high precision
It is higher than first by each several part that the light channel structure framework of 3D printing causes the stability of layout of magnetic resonance gyroscope instrument sensitive detection unit
Light path system after the independent assembling of part, improves the overall precision of system；Heating plate and field coil can be realized in air chamber
The accurate temperature controller of atom and magnetic control；If in addition can achieve several functions using different types of atomic air chamber in this configuration
Atomic sensor.The purpose of Stability Analysis of Structures, dependable performance is invention achieves, wanting for high accuracy magnetic resonance gyroscope instrument can be met
Ask, with very high practical value, it is adaptable to develop micro-structural magnetic resonance gyroscope instrument system.
Description of the drawings
Fig. 1 is the structural representation of the support of magnetic resonance gyroscope instrument sensitive detection unit of the present invention；
Fig. 2 is that the overall structure that magnetic resonance gyroscope instrument sensitive detection unit of the present invention is assemblied on support is illustrated
Figure.
Specific embodiment
Specific embodiment one：See figures.1.and.2 and present embodiment is illustrated, the nuclear-magnetism described in present embodiment is altogether
Shake gyroscope sensitive detection unit, and it includes：VCSEL laser instrument 13, the polarizer 14, collimation lens 15, quarter wave plate 16, nuclear-magnetism
Resonance air chamber 19, photodetector 21 and support；
Support includes：Column 22, base 23, laser instrument draw-in groove 1, polarizer draw-in groove 2, collimation lens draw-in groove 3, quarter wave plate
Fixture 6 below fixture 5, air chamber above draw-in groove 4, air chamber；
Column 22 is vertically fixed on base 23, has photodetector light hole 9 on base 23, laser instrument draw-in groove 1, is risen
Partially above device draw-in groove 2, collimation lens draw-in groove 3, quarter wave plate draw-in groove 4, air chamber, below fixture 5 and air chamber, fixture 6 is from top to bottom successively
It is fixed on column 22, and above laser instrument draw-in groove 1, polarizer draw-in groove 2, collimation lens draw-in groove 3, quarter wave plate draw-in groove 4, air chamber
Below fixture 5, air chamber fixture 6 and photodetector light hole 9 coaxial；
Above air chamber, below fixture 5 and air chamber, the outer surface of fixture 6 is respectively equipped with magnetic field line ring recess 7 and lower field coil
Field coil 17 and lower field coil 18, air chamber are wound with respectively in groove 8, and upper magnetic field line ring recess 7 and lower magnetic field line ring recess 8
Heating plate 11 and lower heating plate 12 are respectively equipped with inside fixture 6 below top fixture 5 and air chamber；
VCSEL laser instrument 13 is located in laser instrument draw-in groove 1, and the polarizer 14 is located in polarizer draw-in groove 2, collimation lens draw-in groove
3 are located in collimation lens draw-in groove 3, and quarter wave plate draw-in groove 4 is located in quarter wave plate draw-in groove 4, and nuclear magnetic resonance air chamber 19 is located on air chamber
Below square fixture 5, air chamber between fixture 6, photodetector 21 is located at 23 lower section of base, and the sensitive chip of photodetector 21
Center positioned at photodetector light hole 9.
In present embodiment, the laser that VCSEL laser instrument 13 sends sequentially passes through the polarizer 14, collimation lens 15 and 1/4
Wave plate 16 is transmitted through in nuclear magnetic resonance air chamber 19, and the emergent light of nuclear magnetic resonance air chamber 19 is incident to the photosurface of photodetector 21
On.
Principle：The laser that VCSEL laser instrument 13 sends is polarized through the polarizer 14, then accurate through little focal length collimation lens 15
Directly, then through quarter wave plate 16 adjust polarization state after inject in nuclear magnetic resonance air chamber 19, the alkali metal atom in atomic air chamber 19 with
Intert-gas atoms first by pumping optical pumping to excitation state, the emergent light directive photodetector 21 of nuclear magnetic resonance air chamber 19
Photosurface, completes the detection of NMR signal.When gyroscope system occurs angle change, detector signal occurs mutually to strain
Change so as to realize the measurement to angle change.
Upper heating plate 11 and lower heating plate 12 can be controlled to the temperature of air chamber；Upper field coil 17 and lower magnetic field line
Circle 18 can be controlled to the steady magnetic field that air chamber is located.The center of all draw-in grooves and fixture all on the same axis, can
Ensure each device install the light path of rear total system be along same axis, to realize the measurement of magnetic resonance gyroscope signal.On
Field coil 17 and lower field coil 18 are fine enamelled wire.
Specific embodiment two：Present embodiment is visits sensitive to the magnetic resonance gyroscope instrument described in specific embodiment one
Survey unit to be described further, in present embodiment, support is integral type structure.
Specific embodiment three：Present embodiment is visits sensitive to the magnetic resonance gyroscope instrument described in specific embodiment one
Survey unit to be described further, in present embodiment, the material of support is photosensitive resin.
Specific embodiment four：Present embodiment is visits sensitive to the magnetic resonance gyroscope instrument described in specific embodiment one
Survey unit be described further, in present embodiment, nuclear magnetic resonance air chamber 19 be shaped as spheroid or cylinder.
Specific embodiment five：Present embodiment is visits sensitive to the magnetic resonance gyroscope instrument described in specific embodiment one
Survey unit to be described further, in present embodiment, above air chamber, fixture 5 is identical with the structure of fixture below air chamber 6, gas
Above room, fixture 5 is opening annulus, and the two ends at the opening of the annulus are equipped with bolt hole 10, and the bolt hole 10 can pass through spiral shell
Bolt 20 changes the diameter of annulus.
Above air chamber described in present embodiment, fixture 6 below fixture 5 and air chamber, i.e., justified come alignment jig by bolt 20
The diameter of ring, and the nuclear magnetic resonance air chamber of various models is carried by changing circle diameter.Described nuclear magnetic resonance air chamber 19
Between fixture 6 below fixture above air chamber 5 and air chamber, after air chamber is placed, the bolt 20 in bolt hole 10 is tightened, by gas
Room is fixedly clamped.
Specific embodiment six：Present embodiment is visits sensitive to the magnetic resonance gyroscope instrument described in specific embodiment one
Survey unit to be described further, in present embodiment, nuclear magnetic resonance air chamber 19 is glass air chamber.
Specific embodiment seven：Present embodiment is visits sensitive to the magnetic resonance gyroscope instrument described in specific embodiment one
Survey unit to be described further, in present embodiment, the wave band of VCSEL laser instrument 13 is 794.9nm.
Specific embodiment eight：Present embodiment is visits sensitive to the magnetic resonance gyroscope instrument described in specific embodiment one
Survey unit to be described further, in present embodiment, the polarizer 14 is the infrared polarization piece of 794.9nm wave band.
Specific embodiment nine：Present embodiment is visits sensitive to the magnetic resonance gyroscope instrument described in specific embodiment one
Survey unit to be described further, in present embodiment, quarter wave plate 16 being capable of 360 ° of rotations in polarizer draw-in groove 2.
Specific embodiment ten：Present embodiment is visits sensitive to the magnetic resonance gyroscope instrument described in specific embodiment one
Survey unit to be described further, in present embodiment, upper heating plate 11 and lower heating plate 12 are ITO heating film.
Specific embodiment 11：Present embodiment is sensitive to the magnetic resonance gyroscope instrument described in specific embodiment one
Probe unit is described further, and in present embodiment, photodetector 21 is 794.9nm band detector.
Specific embodiment 12：The manufacture method of the magnetic resonance gyroscope instrument sensitive detection unit described in present embodiment
As follows：
Support is integrally printed initially with 3D printing technique, then respectively by the VCSEL laser instrument 13, polarizer
14th, collimation lens 15, quarter wave plate 16, nuclear magnetic resonance air chamber 19 and photodetector 21 are respectively embedded in corresponding draw-in groove, most
Magnetic resonance gyroscope instrument sensitive detection unit is obtained afterwards.
The manufacture method overall structure unit of the magnetic resonance gyroscope instrument sensitive detection unit described in present embodiment is by 3D
Printing and making is completed, and can realize the quick assembling of required device.Structure-integrated degree is high, overcomes each little structure member not
Just the problem installed, it is to avoid the error that assembling brings.
Claims (9)
1. magnetic resonance gyroscope instrument sensitive detection unit, it is characterised in that it includes：VCSEL laser instrument (13), the polarizer
(14), collimation lens (15), quarter wave plate (16), nuclear magnetic resonance air chamber (19), photodetector (21) and support；
Support includes：Column (22), base (23), laser instrument draw-in groove (1), polarizer draw-in groove (2), collimation lens draw-in groove (3), 1/
Fixture (6) below fixture (5), air chamber above 4 wave plate draw-in grooves (4), air chamber；
Column (22) is vertically fixed on base (23), has photodetector light hole (9), laser instrument draw-in groove on base (23)
(1), press from both sides below fixture (5) and air chamber above polarizer draw-in groove (2), collimation lens draw-in groove (3), quarter wave plate draw-in groove (4), air chamber
Tool (6) is sequentially fixed on column (22) from top to bottom, and laser instrument draw-in groove (1), polarizer draw-in groove (2), collimation lens draw-in groove
(3), above quarter wave plate draw-in groove (4), air chamber, below fixture (5), air chamber, fixture (6) and photodetector light hole (9) are coaxial；
Above air chamber, the outer surface of fixture (5) is provided with magnetic field line ring recess (7), and below air chamber, the outer surface of fixture (6) is provided with down
Field coil (17) is wound with magnetic field line ring recess (8), and upper magnetic field line ring recess (7), is wound with lower magnetic field line ring recess (8)
Lower field coil (18), are provided with heating plate (11) inside fixture (5) above air chamber, are provided with down below air chamber inside fixture (6)
Heating plate (12)；
VCSEL laser instrument (13) is located in laser instrument draw-in groove (1), and the polarizer (14) is located in polarizer draw-in groove (2), collimation lens
Draw-in groove (3) is located in collimation lens draw-in groove (3), and quarter wave plate draw-in groove (4) is located in quarter wave plate draw-in groove (4), nuclear magnetic resonance air chamber
(19) it is located above air chamber below fixture (5), air chamber between fixture (6), photodetector (21) is located at below base (23), and
The sensitive chip of photodetector (21) is located at the center of photodetector light hole (9).
2. magnetic resonance gyroscope instrument sensitive detection unit according to claim 1, it is characterised in that support is integral type knot
Structure.
3. magnetic resonance gyroscope instrument sensitive detection unit according to claim 1, it is characterised in that the material of support is light
Quick resin.
4. magnetic resonance gyroscope instrument sensitive detection unit according to claim 1, it is characterised in that nuclear magnetic resonance air chamber
(19) be shaped as spheroid or cylinder.
5. magnetic resonance gyroscope instrument sensitive detection unit according to claim 1, it is characterised in that fixture above air chamber
(5) identical with the structure of fixture below air chamber (6), above air chamber, fixture (5) is opening annulus, at the opening of the annulus
Two ends are equipped with bolt hole (10), and the bolt hole (10) can change the diameter of annulus by bolt (20).
6. magnetic resonance gyroscope instrument sensitive detection unit according to claim 1, it is characterised in that nuclear magnetic resonance air chamber
(19) it is glass air chamber.
7. magnetic resonance gyroscope instrument sensitive detection unit according to claim 1, it is characterised in that VCSEL laser instrument
(13) wave band is 794.9nm.
8. magnetic resonance gyroscope instrument sensitive detection unit according to claim 1, it is characterised in that the polarizer (14) is
The infrared polarization piece of 794.9nm wave band.
9. magnetic resonance gyroscope instrument sensitive detection unit according to claim 1, it is characterised in that photodetector (21)
For 794.9nm band detector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410850404.XA CN104457729B (en) | 2014-12-31 | 2014-12-31 | Magnetic resonance gyroscope instrument sensitive detection unit and the manufacture method of the unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410850404.XA CN104457729B (en) | 2014-12-31 | 2014-12-31 | Magnetic resonance gyroscope instrument sensitive detection unit and the manufacture method of the unit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104457729A CN104457729A (en) | 2015-03-25 |
| CN104457729B true CN104457729B (en) | 2017-03-08 |
Family
ID=52904165
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410850404.XA Expired - Fee Related CN104457729B (en) | 2014-12-31 | 2014-12-31 | Magnetic resonance gyroscope instrument sensitive detection unit and the manufacture method of the unit |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104457729B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10375813B2 (en) * | 2015-11-27 | 2019-08-06 | Thales | On-chip trapped ultracold atom sensor allowing rotational velocity to be measured |
| CN112180302B (en) * | 2020-09-28 | 2023-04-11 | 中国电子科技集团公司第四十九研究所 | Atomic magnetometer probe based on optical virtual magnetic field technology |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103900549A (en) * | 2014-04-09 | 2014-07-02 | 成都天奥电子股份有限公司 | Nuclear magnetic resonance atomic gyroscope head |
| CN104048657A (en) * | 2014-07-08 | 2014-09-17 | 中国科学院武汉物理与数学研究所 | Physical unit device of chip nuclear magnetic resonance gyroscope |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7359059B2 (en) * | 2006-05-18 | 2008-04-15 | Honeywell International Inc. | Chip scale atomic gyroscope |
| US7728587B2 (en) * | 2007-07-31 | 2010-06-01 | Northrop Grumman Guidance And Electronics Company, Inc. | Self-calibrating nuclear magnetic resonance gyro |
| US7863894B2 (en) * | 2008-11-17 | 2011-01-04 | Northrop Grumman Guidance and Electronic Co., Inc | Small optics cell for miniature nuclear magnetic resonance gyroscope |
-
2014
- 2014-12-31 CN CN201410850404.XA patent/CN104457729B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103900549A (en) * | 2014-04-09 | 2014-07-02 | 成都天奥电子股份有限公司 | Nuclear magnetic resonance atomic gyroscope head |
| CN104048657A (en) * | 2014-07-08 | 2014-09-17 | 中国科学院武汉物理与数学研究所 | Physical unit device of chip nuclear magnetic resonance gyroscope |
Non-Patent Citations (3)
| Title |
|---|
| Nuclear Magnetic Resonance Gyroscopes;E.A.Donley;《IEEE SENSORS 2010 Conference》;20101231;第17-22页 * |
| 导航级微型核磁共振陀螺仪技术综述;龚云鹏 等;《现代防御技术》;20120430;第40卷(第2期);第1-4页 * |
| 核磁共振陀螺仪分析及发展方向;程向红 等;《中国惯性技术学报》;20061231;第14卷(第6期);第86-90页 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104457729A (en) | 2015-03-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108844532A (en) | It is a kind of to use oblique incidence sounding optical path microminiature magnetic resonance gyroscope instrument | |
| CN107797080A (en) | The apparatus and method of Hall sensor calibration demarcation are realized using NMR equipment | |
| CN109186579B (en) | Portable spin-exchange-relaxation-free atomic gyroscope structure | |
| CN104457729B (en) | Magnetic resonance gyroscope instrument sensitive detection unit and the manufacture method of the unit | |
| CN108761370A (en) | A kind of cyclotron magnetic survey hall probe calibrating installation | |
| CN102033124A (en) | Immunofluorescence detection device and detection method | |
| CN106052570A (en) | Nanometer-displacement-bench six-degree-of-freedom calibrating device | |
| CN102629872B (en) | Integrating sphere cooling and microwave integrating cavity | |
| CN103604751B (en) | The device of property measuring period chiral structure transparent membrane optical activity and corresponding method | |
| CN102788565B (en) | A kind of support plate right alignment adjustment measuring system and measuring method | |
| CN108318842B (en) | Non-blind area laser optical pump magnetometer probe | |
| CN201917571U (en) | Immunofluorescence detector | |
| CN202092950U (en) | Scaling gas sample cell device in spectral measurement | |
| CN206113868U (en) | Nanometer displacement table 6 -degree of freedom calibrating device | |
| CN110631955B (en) | Integrated alkali metal gas density detection device based on Faraday effect | |
| CN115727936A (en) | Magnetic Johnson noise testing device based on atomic sensing | |
| CN104296739A (en) | Chip-level nuclear magnetic resonance atomic gyroscope gauge head | |
| CN114894126B (en) | Coaxial measurement tool for realizing high-precision magnetic field output, superconducting magnet structure and assembling and adjusting method thereof | |
| CN114001724B (en) | Method for three-dimensional orthogonal superposition of optical path and magnetic field of SERF atomic spin gyroscope | |
| CN103900512B (en) | Micrometric displacement marking apparatus and using method thereof | |
| CN108061547B (en) | Air chamber nuclear spin relaxation testing device | |
| CN103900549B (en) | Nuclear magnetic resonance atomic gyroscope head | |
| CN110285798B (en) | Miniaturized foldable nuclear magnetic resonance gyro instrument head | |
| CN210268668U (en) | Miniaturized foldable nuclear magnetic resonance gyroscope gauge head | |
| CN107843247B (en) | Small-size integrated double-shaft spin-exchange-free relaxation gyroscope structure |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20170314 Address after: 150001 Nantong street, Nangang District, Heilongjiang, No. 145, No. Patentee after: Harbin Engineering Univ. Patentee after: The 49th Research Institute of CECT Address before: Nangang District of Heilongjiang city in Harbin province 150001 Yiman Street No. 29 Patentee before: The 49th Research Institute of CECT |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170308 Termination date: 20171231 |