CN104457729A - Nuclear magnetic resonance gyroscope sensitivity detection unit and manufacturing method thereof - Google Patents
Nuclear magnetic resonance gyroscope sensitivity detection unit and manufacturing method thereof Download PDFInfo
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- 238000005481 NMR spectroscopy Methods 0.000 title claims abstract description 59
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 10
- 238000001514 detection method Methods 0.000 title abstract description 4
- 230000035945 sensitivity Effects 0.000 title 1
- 238000011896 sensitive detection Methods 0.000 claims abstract description 41
- 238000010146 3D printing Methods 0.000 claims abstract description 6
- 230000010287 polarization Effects 0.000 claims abstract description 3
- 238000010438 heat treatment Methods 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 6
- 239000011521 glass Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- 239000011347 resin Substances 0.000 claims description 2
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- 239000007789 gas Substances 0.000 abstract description 49
- 238000005516 engineering process Methods 0.000 abstract description 4
- 150000001340 alkali metals Chemical group 0.000 abstract description 2
- 230000005281 excited state Effects 0.000 abstract description 2
- 239000011261 inert gas Chemical group 0.000 abstract description 2
- 239000002585 base Substances 0.000 description 6
- 239000000306 component Substances 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 230000010354 integration Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000008358 core component Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
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- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/58—Turn-sensitive devices without moving masses
- G01C19/60—Electronic or nuclear magnetic resonance gyrometers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
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Abstract
核磁共振陀螺仪敏感探测单元及该单元的制造方法，涉及属于原子传感器领域。本发明是为了解决现有的敏感探测单元精度低，不能满足核磁共振陀螺仪要求的问题。本发明所述的核磁共振陀螺仪敏感探测单元及该单元的制造方法，主体结构由3D打印技术打印完成，直接限定了各个元件的位置，VCSEL激光器发出的激光经起偏器起偏，然后经小焦距准直透镜准直，再经过1/4波片调整偏振态后射入核磁共振气室中，原子气室中的碱金属原子与惰性气体原子首先由泵浦光抽运至激发态，核磁共振气室的出射光射向光电探测器的光敏面，完成核磁共振信号的探测。适用于研制微结构核磁共振陀螺仪系统。
A nuclear magnetic resonance gyroscope sensitive detection unit and a manufacturing method of the unit relate to the field of atomic sensors. The invention aims to solve the problem that the existing sensitive detection unit has low precision and cannot meet the requirements of the nuclear magnetic resonance gyroscope. In the NMR gyroscope sensitive detection unit and the manufacturing method of the unit described in the present invention, the main structure is printed by 3D printing technology, and the position of each component is directly defined. The laser light emitted by the VCSEL laser is polarized by the polarizer, and then passed through the The small focal length collimator lens is collimated, and then the polarization state is adjusted by a 1/4 wave plate, and then injected into the nuclear magnetic resonance gas chamber. The alkali metal atoms and inert gas atoms in the atomic gas chamber are first pumped to the excited state by the pump light, The outgoing light of the nuclear magnetic resonance gas chamber shoots to the photosensitive surface of the photodetector to complete the detection of the nuclear magnetic resonance signal. It is suitable for the development of microstructure nuclear magnetic resonance gyroscope system.
Description
技术领域technical field
本发明属于原子传感器领域。The invention belongs to the field of atomic sensors.
背景技术Background technique
核磁共振原子陀螺仪是利用原子的核磁共振频率变化来检测角度变化的传感器，其中的敏感探测单元是整个陀螺仪的核心部件，它的稳定性和精度决定了系统的整体核磁共振原子陀螺仪的检测精度，然而现有的敏感探测单元精度低、功耗大、体积大，不能满足核磁共振陀螺仪要求，因此，如何设计一种高精度、低功耗、小体积的敏感探测单元成为了制造核磁共振陀螺仪的关键。The nuclear magnetic resonance atomic gyroscope is a sensor that uses the atomic nuclear magnetic resonance frequency change to detect the angle change. The sensitive detection unit is the core component of the entire gyroscope. Its stability and accuracy determine the overall nuclear magnetic resonance atomic gyroscope of the system. Detection accuracy, however, the existing sensitive detection unit has low precision, high power consumption, and large volume, which cannot meet the requirements of nuclear magnetic resonance gyroscopes. Therefore, how to design a sensitive detection unit with high precision, low power consumption, and small size has become a manufacturing The key to an MRI gyroscope.
发明内容Contents of the invention
本发明是为了解决现有的敏感探测单元精度低，不能满足核磁共振陀螺仪要求的问题，现提供核磁共振陀螺仪敏感探测单元及该单元的制造方法。The present invention aims to solve the problem that the existing sensitive detection unit has low precision and cannot meet the requirements of the nuclear magnetic resonance gyroscope, and now provides a sensitive detection unit of the nuclear magnetic resonance gyroscope and a manufacturing method of the unit.
核磁共振陀螺仪敏感探测单元，它包括：VCSEL激光器、起偏器、准直透镜、1/4波片、核磁共振气室、光电探测器和支架；NMR gyroscope sensitive detection unit, which includes: VCSEL laser, polarizer, collimator lens, 1/4 wave plate, NMR gas chamber, photodetector and bracket;
支架包括：立柱、底座、激光器卡槽、起偏器卡槽、准直透镜卡槽、1/4波片卡槽、气室上方夹具、气室下方夹具；The bracket includes: column, base, laser card slot, polarizer card slot, collimator lens card slot, 1/4 wave plate card slot, clamp above the gas chamber, clamp below the gas chamber;
立柱垂直固定在底座上，底座上开有光电探测器通光孔，激光器卡槽、起偏器卡槽、准直透镜卡槽、1/4波片卡槽、气室上方夹具和气室下方夹具从上至下依次固定在立柱上，且激光器卡槽、起偏器卡槽、准直透镜卡槽、1/4波片卡槽、气室上方夹具、气室下方夹具和光电探测器通光孔同轴；The column is vertically fixed on the base, and the base is provided with a photodetector light hole, a laser slot, a polarizer slot, a collimator slot, a 1/4 wave plate slot, a clamp above the gas chamber and a clamp below the gas chamber Fix it on the column from top to bottom, and the laser card slot, polarizer card slot, collimator lens card slot, 1/4 wave plate card slot, clamp above the gas chamber, clamp below the gas chamber and photodetector pass through the light Hole coaxial;
气室上方夹具和气室下方夹具的外表面分别设有上磁场线圈槽和下磁场线圈槽，且上磁场线圈槽和下磁场线圈槽中分别缠绕有上磁场线圈和下磁场线圈，气室上方夹具和气室下方夹具内部分别设有上加热片和下加热片；The outer surfaces of the fixture above the gas chamber and the fixture below the gas chamber are respectively provided with an upper magnetic field coil groove and a lower magnetic field coil groove, and the upper magnetic field coil groove and the lower magnetic field coil groove are respectively wound with an upper magnetic field coil and a lower magnetic field coil. An upper heating sheet and a lower heating sheet are respectively arranged inside the fixture below the air chamber;
VCSEL激光器位于激光器卡槽中，起偏器位于起偏器卡槽中，准直透镜卡槽位于准直透镜卡槽中，1/4波片卡槽位于1/4波片卡槽中，核磁共振气室位于气室上方夹具、气室下方夹具之间，光电探测器位于底座下方，且光电探测器的敏感芯片位于光电探测器通光孔的中心位置。The VCSEL laser is located in the laser slot, the polarizer is located in the polarizer slot, the collimator lens slot is located in the collimator slot, the 1/4 wave plate slot is located in the 1/4 wave plate slot, and the NMR The resonant gas chamber is located between the clamps above the gas chamber and the clamps below the gas chamber, the photodetector is located below the base, and the sensitive chip of the photodetector is located at the center of the light hole of the photodetector.
上述核磁共振陀螺仪敏感探测单元的制造方法如下：The manufacturing method of the above-mentioned nuclear magnetic resonance gyroscope sensitive detection unit is as follows:
首先采用3D打印技术将支架整体打印出来，然后分别将VCSEL激光器、起偏器、准直透镜、1/4波片、核磁共振气室和光电探测器分别嵌入在相应的卡槽中，最后获得核磁共振陀螺仪敏感探测单元。First, 3D printing technology is used to print out the bracket as a whole, and then the VCSEL laser, polarizer, collimator lens, 1/4 wave plate, nuclear magnetic resonance gas chamber and photodetector are respectively embedded in the corresponding card slots, and finally the NMR gyroscope sensitive detection unit.
本发明所述的核磁共振陀螺仪敏感探测单元及该单元的制造方法，主体结构由3D打印技术打印完成，结构一体化程度高，直接限定了各个元件的位置，便于装配，节约空间，避免了装配过程中带来的误差，提高了核磁共振陀螺仪敏感探测单元的精度；同时，高精度3D打印的光路结构框架使得核磁共振陀螺仪敏感探测单元的光路稳定性高于由各部分元件单独装配后的光路系统，提高了系统的整体精度；加热片和磁场线圈能够实现对气室内原子的精确温控和磁控；另外在本结构中如果采用不同种类的原子气室可实现多种功能的原子传感器。本发明达到了结构稳定、性能可靠的目的，可满足高精度核磁共振陀螺仪的要求，具有很高的实用价值，适用于研制微结构核磁共振陀螺仪系统。In the NMR gyroscope sensitive detection unit and the manufacturing method of the unit described in the present invention, the main structure is printed by 3D printing technology, the degree of structural integration is high, and the position of each component is directly limited, which is convenient for assembly, saves space, and avoids The errors brought about in the assembly process improve the accuracy of the sensitive detection unit of the nuclear magnetic resonance gyroscope; at the same time, the high-precision 3D printed optical path structure frame makes the optical path stability of the sensitive detection unit of the nuclear magnetic resonance gyroscope higher than that of the components assembled separately The final optical path system improves the overall accuracy of the system; the heating plate and the magnetic field coil can realize the precise temperature control and magnetic control of the atoms in the gas chamber; in addition, if different types of atomic gas chambers are used in this structure, multiple functions can be realized. atomic sensor. The invention achieves the purpose of stable structure and reliable performance, can meet the requirements of high-precision nuclear magnetic resonance gyroscope, has high practical value, and is suitable for developing a microstructure nuclear magnetic resonance gyroscope system.
附图说明Description of drawings
图1为本发明所述的核磁共振陀螺仪敏感探测单元的支架的结构示意图；Fig. 1 is the structural representation of the support of the nuclear magnetic resonance gyroscope sensitive detection unit of the present invention;
图2为本发明所述的核磁共振陀螺仪敏感探测单元装配在支架上的整体结构示意图。FIG. 2 is a schematic diagram of the overall structure of the NMR gyroscope sensitive detection unit assembled on the bracket according to the present invention.
具体实施方式Detailed ways
具体实施方式一：参照图1和图2具体说明本实施方式，本实施方式所述的核磁共振陀螺仪敏感探测单元，它包括：VCSEL激光器13、起偏器14、准直透镜15、1/4波片16、核磁共振气室19、光电探测器21和支架；Specific embodiment one: with reference to Fig. 1 and Fig. 2, illustrate this embodiment in detail, the NMR gyroscope sensitive detection unit described in this embodiment, it comprises: VCSEL laser device 13, polarizer 14, collimating lens 15,1/ 4 wave plate 16, nuclear magnetic resonance gas chamber 19, photodetector 21 and support;
支架包括：立柱22、底座23、激光器卡槽1、起偏器卡槽2、准直透镜卡槽3、1/4波片卡槽4、气室上方夹具5、气室下方夹具6；The bracket includes: column 22, base 23, laser slot 1, polarizer slot 2, collimator lens slot 3, 1/4 wave plate slot 4, clamp 5 above the gas chamber, and clamp 6 below the gas chamber;
立柱22垂直固定在底座23上，底座23上开有光电探测器通光孔9，激光器卡槽1、起偏器卡槽2、准直透镜卡槽3、1/4波片卡槽4、气室上方夹具5和气室下方夹具6从上至下依次固定在立柱22上，且激光器卡槽1、起偏器卡槽2、准直透镜卡槽3、1/4波片卡槽4、气室上方夹具5、气室下方夹具6和光电探测器通光孔9同轴；The column 22 is vertically fixed on the base 23, and the base 23 is provided with a photodetector light hole 9, a laser slot 1, a polarizer slot 2, a collimator lens slot 3, a 1/4 wave plate slot 4, Fixture 5 above the gas chamber and fixture 6 below the gas chamber are sequentially fixed on the column 22 from top to bottom, and laser slot 1, polarizer slot 2, collimator lens slot 3, 1/4 wave plate slot 4, The fixture 5 above the gas chamber, the fixture 6 below the gas chamber and the photodetector light hole 9 are coaxial;
气室上方夹具5和气室下方夹具6的外表面分别设有上磁场线圈槽7和下磁场线圈槽8，且上磁场线圈槽7和下磁场线圈槽8中分别缠绕有上磁场线圈17和下磁场线圈18，气室上方夹具5和气室下方夹具6内部分别设有上加热片11和下加热片12；The outer surfaces of the clamp 5 above the gas chamber and the clamp 6 below the gas chamber are respectively provided with an upper magnetic field coil slot 7 and a lower magnetic field coil slot 8, and the upper magnetic field coil slot 7 and the lower magnetic field coil slot 8 are wound with an upper magnetic field coil 17 and a lower magnetic field coil respectively. The magnetic field coil 18, the fixture 5 above the gas chamber and the fixture 6 below the gas chamber are respectively provided with an upper heating plate 11 and a lower heating plate 12;
VCSEL激光器13位于激光器卡槽1中，起偏器14位于起偏器卡槽2中，准直透镜卡槽3位于准直透镜卡槽3中，1/4波片卡槽4位于1/4波片卡槽4中，核磁共振气室19位于气室上方夹具5、气室下方夹具6之间，光电探测器21位于底座23下方，且光电探测器21的敏感芯片位于光电探测器通光孔9的中心位置。The VCSEL laser 13 is located in the laser slot 1, the polarizer 14 is located in the polarizer slot 2, the collimator lens slot 3 is located in the collimator slot 3, and the 1/4 wave plate slot 4 is located in 1/4 In the wave plate slot 4, the nuclear magnetic resonance gas chamber 19 is located between the clamp 5 above the gas chamber and the clamp 6 below the gas chamber, the photodetector 21 is located below the base 23, and the sensitive chip of the photodetector 21 is located Center of hole 9.
本实施方式中，VCSEL激光器13发出的激光依次经过起偏器14、准直透镜15和1/4波片16透射至核磁共振气室19中，核磁共振气室19的出射光入射至光电探测器21的光敏面上。In this embodiment, the laser light emitted by the VCSEL laser 13 is transmitted into the nuclear magnetic resonance gas chamber 19 through the polarizer 14, the collimator lens 15 and the 1/4 wave plate 16 in sequence, and the outgoing light of the nuclear magnetic resonance gas chamber 19 is incident on the photodetector The photosensitive surface of device 21.
原理：VCSEL激光器13发出的激光经起偏器14起偏，然后经小焦距准直透镜15准直，再经过1/4波片16调整偏振态后射入核磁共振气室19中，原子气室19中的碱金属原子与惰性气体原子首先由泵浦光抽运至激发态，核磁共振气室19的出射光射向光电探测器21的光敏面，完成核磁共振信号的探测。当陀螺仪系统发生角度变化时，探测器信号发生相应变化从而实现对角度变化的测量。Principle: The laser light emitted by the VCSEL laser 13 is polarized by the polarizer 14, then collimated by the collimator lens 15 with a small focal length, and then injected into the NMR gas chamber 19 after the polarization state is adjusted by the 1/4 wave plate 16. The alkali metal atoms and inert gas atoms in the chamber 19 are first pumped to the excited state by the pump light, and the emitted light from the nuclear magnetic resonance gas chamber 19 is directed to the photosensitive surface of the photodetector 21 to complete the detection of nuclear magnetic resonance signals. When the angle of the gyroscope system changes, the detector signal changes accordingly to realize the measurement of the angle change.
上加热片11和下加热片12能够对气室的温度进行控制；上磁场线圈17和下磁场线圈18能够对气室所在的稳恒磁场进行控制。所有卡槽和夹具的中心都在同一轴线上，能够保证各器件安装好后整体系统的光路是沿同一轴线，以实现核磁共振陀螺信号的测量。上磁场线圈17和下磁场线圈18均为细漆包线。The upper heating sheet 11 and the lower heating sheet 12 can control the temperature of the air chamber; the upper magnetic field coil 17 and the lower magnetic field coil 18 can control the stable magnetic field where the air chamber is located. The centers of all slots and fixtures are on the same axis, which can ensure that the optical path of the overall system is along the same axis after the components are installed, so as to realize the measurement of NMR gyro signals. The upper magnetic field coil 17 and the lower magnetic field coil 18 are fine enameled wires.
具体实施方式二：本实施方式是对具体实施方式一所述的核磁共振陀螺仪敏感探测单元作进一步说明，本实施方式中，支架为一体式结构。Embodiment 2: This embodiment is a further description of the NMR gyroscope sensitive detection unit described in Embodiment 1. In this embodiment, the bracket is an integrated structure.
具体实施方式三：本实施方式是对具体实施方式一所述的核磁共振陀螺仪敏感探测单元作进一步说明，本实施方式中，支架的材料为光敏树脂。Embodiment 3: This embodiment is a further description of the NMR gyroscope sensitive detection unit described in Embodiment 1. In this embodiment, the material of the bracket is photosensitive resin.
具体实施方式四：本实施方式是对具体实施方式一所述的核磁共振陀螺仪敏感探测单元作进一步说明，本实施方式中，核磁共振气室19的形状为球体或圆柱体。Embodiment 4: This embodiment is a further description of the NMR gyroscope sensitive detection unit described in Embodiment 1. In this embodiment, the shape of the NMR gas chamber 19 is a sphere or a cylinder.
具体实施方式五：本实施方式是对具体实施方式一所述的核磁共振陀螺仪敏感探测单元作进一步说明，本实施方式中，气室上方夹具5和气室下方夹具6的结构完全相同，气室上方夹具5为开口圆环，该圆环的开口处的两端均设有螺栓孔10，该螺栓孔10能够通过螺栓20改变圆环的直径。Specific embodiment five: this embodiment is to further illustrate the sensitive detection unit of the nuclear magnetic resonance gyroscope described in specific embodiment one. In this embodiment, the structure of the clamp 5 above the air chamber and the clamp 6 below the air chamber are exactly the same, and the gas chamber The upper clamp 5 is an open ring, and the two ends of the opening of the ring are provided with bolt holes 10, and the bolt holes 10 can change the diameter of the ring through bolts 20.
本实施方式所述的气室上方夹具5和气室下方夹具6，即通过螺栓20来调节夹具圆环的直径，并通过改变圆环直径来承载各种型号的核磁共振气室。所述的核磁共振气室19位于气室上方夹具5和气室下方夹具6之间，气室安放好后，拧紧螺栓孔10中的螺栓20，将气室夹紧固定。The clamp 5 above the gas chamber and the clamp 6 below the gas chamber in this embodiment adjust the diameter of the clamp ring through the bolt 20, and carry various types of nuclear magnetic resonance gas chambers by changing the diameter of the ring. The nuclear magnetic resonance gas chamber 19 is located between the clamp 5 above the gas chamber and the clamp 6 below the gas chamber. After the gas chamber is placed, the bolts 20 in the bolt holes 10 are tightened to clamp and fix the gas chamber.
具体实施方式六：本实施方式是对具体实施方式一所述的核磁共振陀螺仪敏感探测单元作进一步说明，本实施方式中，核磁共振气室19为玻璃气室。Embodiment 6: This embodiment is a further description of the NMR gyroscope sensitive detection unit described in Embodiment 1. In this embodiment, the NMR gas chamber 19 is a glass gas chamber.
具体实施方式七：本实施方式是对具体实施方式一所述的核磁共振陀螺仪敏感探测单元作进一步说明，本实施方式中，VCSEL激光器13的波段为794.9nm。Embodiment 7: This embodiment further describes the NMR gyroscope sensitive detection unit described in Embodiment 1. In this embodiment, the wavelength band of the VCSEL laser 13 is 794.9 nm.
具体实施方式八：本实施方式是对具体实施方式一所述的核磁共振陀螺仪敏感探测单元作进一步说明，本实施方式中，起偏器14为794.9nm波段的红外偏振片。Embodiment 8: This embodiment is a further description of the NMR gyroscope sensitive detection unit described in Embodiment 1. In this embodiment, the polarizer 14 is an infrared polarizer with a wavelength of 794.9 nm.
具体实施方式九：本实施方式是对具体实施方式一所述的核磁共振陀螺仪敏感探测单元作进一步说明，本实施方式中，1/4波片16在起偏器卡槽2中能够360°旋转。Specific embodiment nine: this embodiment is a further description of the sensitive detection unit of the nuclear magnetic resonance gyroscope described in specific embodiment one. In this embodiment, the 1/4 wave plate 16 can be 360 ° rotate.
具体实施方式十：本实施方式是对具体实施方式一所述的核磁共振陀螺仪敏感探测单元作进一步说明，本实施方式中，上加热片11和下加热片12均为ITO加热膜。Embodiment 10: This embodiment further describes the NMR gyroscope sensitive detection unit described in Embodiment 1. In this embodiment, both the upper heating plate 11 and the lower heating plate 12 are ITO heating films.
具体实施方式十一：本实施方式是对具体实施方式一所述的核磁共振陀螺仪敏感探测单元作进一步说明，本实施方式中，光电探测器21为794.9nm波段探测器。Embodiment 11: This embodiment is a further description of the NMR gyroscope sensitive detection unit described in Embodiment 1. In this embodiment, the photodetector 21 is a 794.9nm band detector.
具体实施方式十二：本实施方式所述的核磁共振陀螺仪敏感探测单元的制造方法如下：Specific Embodiment Twelve: The manufacturing method of the NMR gyroscope sensitive detection unit described in this embodiment is as follows:
首先采用3D打印技术将支架整体打印出来，然后分别将VCSEL激光器13、起偏器14、准直透镜15、1/4波片16、核磁共振气室19和光电探测器21分别嵌入在相应的卡槽中，最后获得核磁共振陀螺仪敏感探测单元。First, 3D printing technology is used to print out the whole bracket, and then the VCSEL laser 13, polarizer 14, collimator lens 15, 1/4 wave plate 16, nuclear magnetic resonance gas chamber 19 and photodetector 21 are respectively embedded in the corresponding In the card slot, the NMR gyroscope sensitive detection unit is finally obtained.
本实施方式所述的核磁共振陀螺仪敏感探测单元的制造方法整体结构单元由3D打印制作完成，能够实现所需器件的快捷装配。结构一体化程度高，克服了各小结构部件不便安装的问题，避免了装配带来的误差。The manufacturing method of the nuclear magnetic resonance gyroscope sensitive detection unit described in this embodiment mode has an overall structural unit made by 3D printing, which can realize quick assembly of required devices. The high degree of structural integration overcomes the problem of inconvenient installation of small structural components and avoids errors caused by assembly.
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