CN104451860A - Upper furnace body of single crystal furnace - Google Patents
Upper furnace body of single crystal furnace Download PDFInfo
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- CN104451860A CN104451860A CN201410687683.2A CN201410687683A CN104451860A CN 104451860 A CN104451860 A CN 104451860A CN 201410687683 A CN201410687683 A CN 201410687683A CN 104451860 A CN104451860 A CN 104451860A
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- furnace body
- single crystal
- furnace
- crystal growing
- upper furnace
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Abstract
The invention relates to an upper furnace body of a single crystal furnace. The upper furnace body comprises an upper furnace body; an upper connecting part and a lower connecting part are respectively arranged at the upper end and the lower end of the upper furnace body; the upper furnace body comprises an inner furnace body and an outer furnace body; a cooling cavity is formed between the outer furnace body and the inner furnace body; the inner furnace body adopts an arc-shaped structure, and is double-bracket-shaped; a screw-type cooling fin winding the inner furnace body is arranged in the cooling cavity; the inner wall of the outer furnace body is connected with the cooling fin; a water inlet and a water outlet which are connected with the cooling cavity are formed in the outer wall of the outer furnace body. The upper furnace body provided by the invention has the characteristics of being simple in structure, long in service life, and capable of realizing heat dissipation.
Description
Technical field
The present invention relates to monocrystalline silicon production equipment technical field, particularly a kind of upper furnace body of single crystal growing furnace.
Background technology
Silicon single crystal is the crystal with complete lattice structure, is a kind of good semiconductor material, is widely used in the manufacture of semiconducter device and solar cell at present.Silicon single crystal uses highly purified polysilicon to draw in single crystal growing furnace, commercially has very wide prospect.The drawing device of current silicon single crystal is single crystal growing furnace, it is made up of upper furnace body, lower furnace chamber, upper furnace chamber, bell, perble range, concubine six major part, the upper furnace body of the single crystal growing furnace generally adopted at present only has individual layer furnace wall, owing to being in the condition of high temperature for a long time in the working process of single crystal growing furnace, upper furnace body can be burnt out, cause very large loss.
Summary of the invention
For the problems referred to above, the object of this invention is to provide a kind of structure simple, long service life, the upper furnace body of the single crystal growing furnace that can dispel the heat.
Realize technical scheme of the present invention as follows:
A kind of upper furnace body of single crystal growing furnace, comprise upper furnace body, described upper furnace body upper/lower terminal is respectively equipped with upper and lower web member, upper furnace body comprises Inner body of heater and external furnace body, cooling cavities is formed between external furnace body and Inner body of heater, described Inner body of heater is set to arcuate structure, in " () " type structure, the spiral cooling fins of winding on inner furnace body is provided with in cooling cavities, the inwall of external furnace body is connected with cooling fins, and the outer wall of external furnace body is provided with the water-in and water outlet that are connected with cooling cavities.
Described water-in is arranged at next-door neighbour upper connector place, and water outlet is arranged at the lower web member place of next-door neighbour.
Described water-in and water outlet are arranged on the same side of external furnace body, and advantage is convenient to add water and draining.
Described upper and lower web member is upper and lower flange, and advantage is that structure is simple, is convenient to connect other devices.
Described cooling fins is wave structure or is straight slice structure, and advantage is heat absorption, conducts heat, good heat dissipation effect.
Have employed above-mentioned scheme, during single crystal growing furnace work, furnace body temperature is higher, heat absorption heat transfer is carried out by the radiating fin on inner furnace body, such heat accumulation is in cooling cavities, greatly reduce the temperature of inner furnace body, can be cooled upper furnace body water filling in cooling cavities by water-in, current flow along fin, in flowing, the heat in cooling cavities is taken away, sample can absorb the temperature in body of heater fully, improve cooling efficiency, reach the temperature reducing furnace wall, improve the work-ing life of upper furnace body, inner furnace body is set to arcuate structure and increases contact area on the one hand, temperature dispersion can be made, radiating effect is better, also add the space in inner furnace body on the other hand, that capacity reaches maximum.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention;
Fig. 2 is the connection diagram of inner furnace body and cooling fins in the present invention;
Embodiment
Below in conjunction with the drawings and specific embodiments, the present invention is further described.
As Fig. 1 and Fig. 2, a kind of upper furnace body of single crystal growing furnace, comprise upper furnace body, described upper furnace body upper/lower terminal is respectively equipped with upper and lower web member 1,2, upper furnace body comprises Inner body of heater 4 and external furnace body 3, cooling cavities 5 is formed between external furnace body 3 and Inner body of heater 4, described Inner body of heater 4 is set to arcuate structure, in " () " type structure, the spiral cooling fins 8 of winding on inner furnace body 4 is provided with in cooling cavities 5, the inwall of external furnace body 3 is connected with cooling fins 8, and the outer wall of external furnace body 3 is provided with the water-in 6 and water outlet 7 that are connected with cooling cavities 5.
Described water-in 6 is arranged at next-door neighbour upper connector place, and water outlet 7 is arranged at the lower web member place of next-door neighbour.
Described water-in 6 and water outlet 7 are arranged on the same side of external furnace body, and advantage is convenient to add water and draining.
Described upper and lower web member 1,2 is upper and lower flange, and advantage is that structure is simple, is convenient to connect other devices.
Described cooling fins 8 is wave structure or is straight slice structure, and advantage is heat absorption, conducts heat, good heat dissipation effect.
Claims (5)
1. the upper furnace body of a single crystal growing furnace, comprise upper furnace body, it is characterized in that: described upper furnace body upper/lower terminal is respectively equipped with upper and lower web member, upper furnace body comprises Inner body of heater and external furnace body, cooling cavities is formed between external furnace body and Inner body of heater, described Inner body of heater is set to arcuate structure, in " () " type structure, the spiral cooling fins of winding on inner furnace body is provided with in cooling cavities, the inwall of external furnace body is connected with cooling fins, and the outer wall of external furnace body is provided with the water-in and water outlet that are connected with cooling cavities.
2. the upper furnace body of a kind of single crystal growing furnace according to claim 1, is characterized in that: described water-in is arranged at next-door neighbour upper connector place, and water outlet is arranged at the lower web member place of next-door neighbour.
3. the upper furnace body of a kind of single crystal growing furnace according to claim 2, is characterized in that: described water-in and water outlet are arranged on the same side of external furnace body.
4. the upper furnace body of a kind of single crystal growing furnace according to claim 1, is characterized in that: described upper and lower web member is upper and lower flange.
5. the upper furnace body of a kind of single crystal growing furnace according to claim 1, is characterized in that: described cooling fins is wave structure or is straight slice structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410687683.2A CN104451860A (en) | 2014-11-25 | 2014-11-25 | Upper furnace body of single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410687683.2A CN104451860A (en) | 2014-11-25 | 2014-11-25 | Upper furnace body of single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104451860A true CN104451860A (en) | 2015-03-25 |
Family
ID=52898587
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410687683.2A Pending CN104451860A (en) | 2014-11-25 | 2014-11-25 | Upper furnace body of single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104451860A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116575113A (en) * | 2023-07-14 | 2023-08-11 | 常州市乐萌压力容器有限公司 | Gem furnace upper furnace chamber and processing technology thereof |
-
2014
- 2014-11-25 CN CN201410687683.2A patent/CN104451860A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116575113A (en) * | 2023-07-14 | 2023-08-11 | 常州市乐萌压力容器有限公司 | Gem furnace upper furnace chamber and processing technology thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20150325 |