CN104406543A - Optical axis parallelity device of double optical axis system and method - Google Patents
Optical axis parallelity device of double optical axis system and method Download PDFInfo
- Publication number
- CN104406543A CN104406543A CN201410665912.0A CN201410665912A CN104406543A CN 104406543 A CN104406543 A CN 104406543A CN 201410665912 A CN201410665912 A CN 201410665912A CN 104406543 A CN104406543 A CN 104406543A
- Authority
- CN
- China
- Prior art keywords
- optical system
- optical axis
- catoptron
- optical
- calibration apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
Abstract
The invention discloses an optical axis parallelity adjusting device of a double optical axis system. The optical axis parallelity adjusting device includes two reflectors and two support structures, and two reflectors are the same in size and are mutual perpendicular. Each support structure includes two metal support arms, a bottom plate, a rotating shaft, a support rod and a bottom base. In the process of adjustment of optical axis parallelism, a optical system first enters a bunch of indicator light and regulates incident angle to make the indicator light reflect vertically, at the moment, the optical axis of the indicator light is perpendicular to the reflective surface. Then the device is rotated to a certain angle around the rotating shaft perpendicular to the bottom plate, making the indicator light to reflect on two pieces of reflector in turn. According to the principle of geometrical optics, the indicator light after two reflexes will be reflected back in parallel. Another optical system is equipped with a screen with a joint spider; by adjusting the optical axis direction of the optical system, reflected indicator light enters the screen of the optical system and overlaps with the center of the joint spider. At this point, the direction of the optical axes of two optical systems is parallel.
Description
Technical field
The invention belongs to two optical axis optical field, more specifically, relate to plain shaft parallelism calibration apparatus and the method for a kind of pair of optical axis system.
Background technology
The depth of parallelism of optical axis is an important parameter of the precise laser process equipment with two optical axis optical system.In the laser-processing system possessing video frequency monitoring system and laser ranging module, the depth of parallelism of the optical axis of video frequency monitoring system, the optical axis of range finder module and Laser emission optical axis ensures that main laser bundle is accurately applied to the key on editing objective along tracking measurement axle, is must preferentially to ensure in designing, process, debug and using.Before equipment dispatches from the factory, precision be carried out to it and debug and detect debuging workshop, make parallelism of optical axis control errors in the scope that machining precision allows.But after equipment dispatches from the factory, mobile and Long-Time Service etc. all can cause the relative movement of ray machine part position, makes parallelism of optical axis depart from normal technical indicator, thus after realizing dispatching from the factory and outfield work before quick detection be very important.
The parallelism of optical axis adjusting process mainly heavy caliber collimator method that current industry is conventional, this method error link is few, adjusting accuracy is high, the parallelism of optical axis being widely used in large photoelectric equipment detects, but heavy caliber parallel light tube cost is high, not easily make and heavy, can not outfield be transported to, indoor use can only be confined to.
Summary of the invention
For the defect of prior art, the invention provides the plain shaft parallelism calibration apparatus of a kind of pair of optical axis system, its object is to for the limitation of heavy caliber parallel light tube at line, the light path adjustment for precise laser system of processing provides a kind of assistant resetting device of simple and easy, low cost.
The invention provides the plain shaft parallelism calibration apparatus of a kind of pair of optical axis system, comprise supporting construction, the first catoptron and the second catoptron; Described supporting construction comprises sway brace, base plate, rotating shaft, support bar and base; Described first catoptron and described second catoptron all fit tightly on described sway brace, and described first catoptron is arranged with described second catoptron is mutually vertical, and all vertical with described base plate; One end connection rotating shaft of described support bar, the other end connects base.
Further, the instruction light source be arranged in the first optical system and the optical screen with spider be arranged in the second optical system is also comprised.
Further, during work, the height adjusting described plain shaft parallelism calibration apparatus makes the illumination of described instruction light source be mapped to the middle position of the first catoptron in described plain shaft parallelism calibration apparatus or the second catoptron; Regulate the optical axis direction of the first optical system that reflection ray is overlapped with incident ray; The direction of described plain shaft parallelism calibration apparatus along rotating shaft to the second catoptron or the first catoptron is rotated to an angle, make to indicate the light of light source to reflect successively on two orthogonal reflectings surface, reflection ray in twice reflection process and incident ray all in same plane, second time reflection light and original incident light ray parallel; Regulate the optical axis direction of the second optical system, make reflection ray be irradiated to the center of the spider of optical screen; Described second optical system is coaxial with reflection ray, and parallel with incident ray; Because incident ray is coaxial with first optical system, so the optical axis of the optical axis of the first optical system and described second optical system is parallel to each other.
Further, described first catoptron and the second catoptron are the rectangular configuration that size is equal.
Further, described sway brace is metallic support arm, and metallic support arm is connected with base plate by screw, two, the left and right of sway brace and base plate vertical between two.
Further, described rotating shaft is arranged on the middle position of described base plate, and vertical with described base plate, and is connected with one end of support bar by screw thread.
Further, the other end of described support bar is fixed on described base, described base has four M5 threaded holes, for being fixedly connected with optics table.
Present invention also offers a kind of instruction method based on above-mentioned plain shaft parallelism calibration apparatus, comprise the steps:
(1) instruction light source is installed in the first optical system, and is made the light shaft coaxle of the optical axis of described first optical system and described instruction light source by adjustment; Optical screen with spider is installed in the second optical system, and makes described optical screen perpendicular to the optical axis of described second optical system by adjustment, and the center of spider is on the optical axis of described second optical system;
(2) illumination of described instruction light source is made to be mapped to the middle position of the first catoptron in described plain shaft parallelism calibration apparatus or the second catoptron by adjusting the height of described plain shaft parallelism calibration apparatus;
(3) by the optical axis direction of adjustment first optical system, reflection ray is overlapped with incident ray;
(4) direction of described plain shaft parallelism calibration apparatus along rotating shaft to the second catoptron or the first catoptron is rotated to an angle, make to indicate the light of light source to reflect successively on two orthogonal reflectings surface, reflection ray in twice reflection process and incident ray all in same plane, second time reflection light and original incident light ray parallel;
(5) by the optical axis direction of adjustment second optical system, reflection ray is made to be irradiated to the center of the spider of optical screen; Described second optical system is coaxial with reflection ray, and parallel with incident ray; Because incident ray is coaxial with first optical system, so the optical axis of the optical axis of the first optical system and described second optical system is parallel to each other.
Further, the spacing between the optical axis of described first optical system and the optical axis of described second optical system is less than or equal to the bore of described plain shaft parallelism calibration apparatus.
Further, the bore of described plain shaft parallelism calibration apparatus is the eyeglass length of the first catoptron
doubly.
Structure of the present invention is simple, compact, lightweight, manufactures, maintenance cost is low, can either use, also can adapt to outdoor environment in laboratory.In using method, the degree of accuracy of heavy caliber parallel light tube instruction is often relevant with the experience of user, technical merit, and using method of the present invention is simple, clear and definite, requires relatively low to the professional technique of operator.Therefore, the present invention can provide a kind of assistant resetting solution of simple and easy, low cost for the light path adjustment of precise laser system of processing, has significant economic benefit and social benefit.
Accompanying drawing explanation
Fig. 1 is the structural representation of the plain shaft parallelism calibration apparatus of two optical axis systems that the embodiment of the present invention provides:
Fig. 2 is the structure vertical view of the plain shaft parallelism calibration apparatus of two optical axis systems that the embodiment of the present invention provides;
In FIG, 1 is sway brace, and 2 is the first catoptron, and 3 is the second catoptron, and 4 is base plate, and 5 is rotating shaft, and 6 is support bar, and 7 is base;
In fig. 2,1 for sway brace 2 to be the first catoptron 3 be the second catoptron 4 for base plate 5 is the second optical system 10 for rotating shaft 8 is the first optical system 9 for instruction light source 11 is optical screen.
Embodiment
In order to make object of the present invention, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the present invention, be not intended to limit the present invention.
The plain shaft parallelism adjustment that the embodiment of the present invention is two optical axis optical system provide a kind of easy, look after and guide method fast.It is the assistant resetting instrument of simple and easy, the low cost of carrying out light path adjustment in laser industry.
The plain shaft parallelism calibration apparatus of provided by the invention pair of optical axis system is a kind of structure plain shaft parallelism calibration apparatus simple, easy to use; Comprise the orthogonal catoptron of two panels and related support structure, two panels catoptron has identical physical dimension, increases anti-film process, have higher reflectivity at visible ray and near-infrared band by plating.Eyeglass is fitted on metallic support arm closely, keeps the direction of two reflectings surface mutually vertical, keeps vertical simultaneously with base plate.
Supporting construction comprises sway brace 1, base plate 4, rotating shaft 5, support bar 6 and base 7, and sway brace, base plate and base are aluminum alloy material, and rotating shaft and support bar are stainless steel.Each structural member ensures two, the left and right of sway brace and the vertical between two of base plate by Precision Machining, base has four M5 threaded holes, can be arranged on easily on optics table.
In light path calibration procedures, also need by convenient instruction light source 10 (as he-ne laser tube or semiconductor laser pen etc.) and an optical screen 11 with spider observed.Instruction light source 10 is arranged on to be treated, in the first optical system 8 of adjustment, to represent the optical axis of this system with the optical axis of pilot light, and optical screen 11 is arranged in the second optical system 9, and perpendicular to optical axis direction, and the center of spider is on optical axis.During light path adjustment, first sending a branch of pilot light is irradiated on the reflecting surface of the first catoptron 2 of calibration apparatus, observe the direction of reflection ray, regulate the incident direction of pilot light that reflection ray is overlapped with incident ray, now pilot light optical axis is vertical with the reflecting surface of the first catoptron 2, parallel with base plate 4 place plane.Then rotated to an angle by calibration apparatus, pilot light is reflected successively on two orthogonal reflectings surface, according to geometric optical theory, now reflection ray is parallel with incident ray and separate certain distance.The optical axis direction of the second optical system 9 is regulated to make reflection ray be irradiated on optical screen 11 by the second optical system 9, until hot spot drops on the center of spider, now the optical axis of the second optical system 9 is coaxial with reflection ray, and reflection ray is parallel with incident ray, incident ray is coaxial with the first optical system 8, so the second optical system 9 optical axis is parallel with the optical axis of the first optical system 8.
Double light path collimation adjustment system and the industry that the present invention relates to are commonly used compared with large mouth parallel light tube has many advantages.Heavy caliber parallel light tube volume is large, and complex structure, generally all uses in laboratory, and the manufacture maintenance cost of the object lens of its inside or non-spherical reflector is all higher.And the apparatus structure that the present invention relates to is simple, compact, lightweight, manufacture, maintenance cost is low, can either use in laboratory, also can adapt to outdoor environment.In using method, the degree of accuracy of heavy caliber parallel light tube instruction is often relevant with the experience of user, technical merit, and the using method of the device of the present invention's design is simple, clear and definite, requires relatively low to the professional technique of operator.Therefore, the present invention can provide a kind of assistant resetting solution of simple and easy, low cost for the light path adjustment of precise laser system of processing, has significant economic benefit and social benefit.
Below in conjunction with Fig. 1 and Fig. 2 and embodiment, the present invention is described in further detail.
(1) first select two to need optical axis to be adjusted to parallel optical system, the spacing between the optical axis of these two systems is no more than the bore of calibration apparatus, and install instruction light source 10 in the first optical system 8 wherein, keeping system optical axis is coaxial with pilot light.In the second optical system 9, install the optical screen 11 with spider, and make optical screen 11 perpendicular to the optical axis of the second optical system 9, the center of spider is on optical axis.
(2) be arranged on by calibration apparatus on optics table or lifting table, the height of adjusting gear makes pilot light be irradiated to the middle position of the first catoptron 2.
(3) regulate the optical axis direction (i.e. the incident direction of pilot light) of the first optical system 8, observe the facula position reflected, until reflection ray overlaps with incident ray.According to geometric optical theory, now pilot light is perpendicular to the reflecting surface of the first catoptron 2, and namely the optical axis of the first optical system 8 is perpendicular to the reflecting surface of the first catoptron 2, is parallel to base plate 4 place plane.
(4) direction of calibration apparatus along rotating shaft to the reflecting surface of another the second catoptron 3 is rotated to an angle, pilot light is reflected successively on two orthogonal reflectings surface, according to geometric optical theory, reflection ray in twice reflection process and incident ray all in same plane, second time reflection light and original incident light ray parallel.Regulate the optical axis direction of the second optical system 9, make reflection ray be irradiated on optical screen 11 by the second optical system 9, continue fine setting direction and make reflection ray be irradiated to the center of spider.Now the second optical system 9 is coaxial with reflection ray, parallel with incident ray.Because incident ray is coaxial with the first optical system 8, so the optical axis of two optical systems is parallel to each other.
Those skilled in the art will readily understand; the foregoing is only preferred embodiment of the present invention; not in order to limit the present invention, all any amendments done within the spirit and principles in the present invention, equivalent replacement and improvement etc., all should be included within protection scope of the present invention.
Claims (10)
1. a plain shaft parallelism calibration apparatus for two optical axis system, is characterized in that, comprise supporting construction, the first catoptron (2) and the second catoptron (3); Described supporting construction comprises sway brace (1), base plate (4), rotating shaft (5), support bar (6) and base (7); Described first catoptron (2) and described second catoptron (3) all fit tightly on described sway brace (1), described first catoptron (2) is arranged with described second catoptron (3) is mutually vertical, and all vertical with described base plate (4); One end connection rotating shaft (5) of described support bar (6), the other end connects base (7).
2. plain shaft parallelism calibration apparatus as claimed in claim 1, is characterized in that, also comprises the instruction light source be arranged in the first optical system and the optical screen with spider be arranged in the second optical system.
3. plain shaft parallelism calibration apparatus as claimed in claim 2, it is characterized in that, during work, the height adjusting described plain shaft parallelism calibration apparatus makes the illumination of described instruction light source be mapped to the middle position of the first catoptron in described plain shaft parallelism calibration apparatus or the second catoptron; Regulate the optical axis direction of the first optical system that reflection ray is overlapped with incident ray; The direction of described plain shaft parallelism calibration apparatus along rotating shaft to the second catoptron or the first catoptron is rotated to an angle, make to indicate the light of light source to reflect successively on two orthogonal reflectings surface, reflection ray in twice reflection process and incident ray all in same plane, second time reflection light and original incident light ray parallel; Regulate the optical axis direction of the second optical system, make reflection ray be irradiated to the center of the spider of optical screen; Described second optical system is coaxial with reflection ray, and parallel with incident ray; Because incident ray is coaxial with first optical system, so the optical axis of the optical axis of the first optical system and described second optical system is parallel to each other.
4. plain shaft parallelism calibration apparatus as claimed in claim 1, is characterized in that, described first catoptron (2) and the second catoptron (3) are the equal rectangular configuration of size.
5. plain shaft parallelism calibration apparatus as claimed in claim 1, it is characterized in that, described sway brace (1) is metallic support arm, and metallic support arm is connected with base plate by screw, two, the left and right of sway brace and base plate vertical between two.
6. plain shaft parallelism calibration apparatus as claimed in claim 1, it is characterized in that, described rotating shaft (5) is arranged on the middle position of described base plate (4), and vertical with described base plate (4), and is connected by screw thread one end with support bar (6).
7. plain shaft parallelism calibration apparatus as claimed in claim 1, it is characterized in that, the other end of described support bar (6) is fixed on described base (7), described base (7) has four M5 threaded holes, for being fixedly connected with optics table.
8., based on an instruction method for the plain shaft parallelism calibration apparatus described in any one of claim 1-7, it is characterized in that, comprise the steps:
(1) instruction light source is installed in the first optical system, and is made the light shaft coaxle of the optical axis of described first optical system and described instruction light source by adjustment; Optical screen with spider is installed in the second optical system, and makes described optical screen perpendicular to the optical axis of described second optical system by adjustment, and the center of spider is on the optical axis of described second optical system;
(2) illumination of described instruction light source is made to be mapped to the middle position of the first catoptron in described plain shaft parallelism calibration apparatus or the second catoptron by adjusting the height of described plain shaft parallelism calibration apparatus;
(3) by the optical axis direction of adjustment first optical system, reflection ray is overlapped with incident ray;
(4) direction of described plain shaft parallelism calibration apparatus along rotating shaft to the second catoptron or the first catoptron is rotated to an angle, make to indicate the light of light source to reflect successively on two orthogonal reflectings surface, reflection ray in twice reflection process and incident ray all in same plane, second time reflection light and original incident light ray parallel;
(5) by the optical axis direction of adjustment second optical system, reflection ray is made to be irradiated to the center of the spider of optical screen; Described second optical system is coaxial with reflection ray, and parallel with incident ray; Because incident ray is coaxial with first optical system, so the optical axis of the optical axis of the first optical system and described second optical system is parallel to each other.
9. look after and guide method as claimed in claim 8, it is characterized in that, the spacing between the optical axis of described first optical system and the optical axis of described second optical system is less than or equal to the bore of described plain shaft parallelism calibration apparatus.
10. look after and guide method as claimed in claim 8 or 9, it is characterized in that, the bore of described plain shaft parallelism calibration apparatus is the eyeglass length of the first catoptron
doubly.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201410665912.0A CN104406543B (en) | 2014-11-19 | 2014-11-19 | A kind of the plain shaft parallelism calibration apparatus and method of double optical axis systems |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201410665912.0A CN104406543B (en) | 2014-11-19 | 2014-11-19 | A kind of the plain shaft parallelism calibration apparatus and method of double optical axis systems |
Publications (2)
Publication Number | Publication Date |
---|---|
CN104406543A true CN104406543A (en) | 2015-03-11 |
CN104406543B CN104406543B (en) | 2018-02-23 |
Family
ID=52644191
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201410665912.0A Active CN104406543B (en) | 2014-11-19 | 2014-11-19 | A kind of the plain shaft parallelism calibration apparatus and method of double optical axis systems |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN104406543B (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105004285A (en) * | 2015-05-08 | 2015-10-28 | 中冶赛迪工程技术股份有限公司 | Laser ray position adjusting device |
CN109642791A (en) * | 2016-08-24 | 2019-04-16 | 柯巴股份公司 | For being directed at the device of Angle Measuring Equipment |
CN110332908A (en) * | 2019-07-20 | 2019-10-15 | 大连理工大学 | A kind of high-precision laser is reflective to survey the device and method that inclines |
CN110375658A (en) * | 2019-07-23 | 2019-10-25 | 中铁二局集团有限公司 | A kind of installation of displacement lasers measuring appliance quick correcting mechanism and method |
CN114326137A (en) * | 2021-12-30 | 2022-04-12 | 浙江华威型钢科技有限公司 | High-precision optical axis and multi-optical axis parallelism adjusting method |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0419916A2 (en) * | 1989-09-26 | 1991-04-03 | Krauss-Maffei Aktiengesellschaft | Device to examine the parallelism of two axes |
CN1173632A (en) * | 1997-04-10 | 1998-02-18 | 萧宁华 | Laser axial centering instrument |
JP2000193440A (en) * | 1998-12-28 | 2000-07-14 | Hitachi Zosen Corp | Laser angle measuring device |
US20040085655A1 (en) * | 2001-03-29 | 2004-05-06 | Fuminori Takahashi | Optical system |
CN101464143A (en) * | 2009-01-15 | 2009-06-24 | 中国人民解放军92854部队军械修理厂 | Method and equipment for digitized detection of double-plain shaft parallelism of optical instrument |
CN102901467A (en) * | 2012-11-07 | 2013-01-30 | 中国科学院长春光学精密机械与物理研究所 | Device for correcting parallelism degree of laser emission optical axis and capturing and tracking visual axis |
CN103278933A (en) * | 2013-06-05 | 2013-09-04 | 中国科学院半导体研究所 | Portable adjustable H type light path parallel calibrating device |
CN103308002A (en) * | 2013-06-05 | 2013-09-18 | 中国科学院半导体研究所 | Simple adjustable X-type light path parallel debugging detection device |
-
2014
- 2014-11-19 CN CN201410665912.0A patent/CN104406543B/en active Active
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0419916A2 (en) * | 1989-09-26 | 1991-04-03 | Krauss-Maffei Aktiengesellschaft | Device to examine the parallelism of two axes |
EP0419916A3 (en) * | 1989-09-26 | 1991-10-02 | Krauss-Maffei Aktiengesellschaft | Device to examine the parallelism of two axes |
CN1173632A (en) * | 1997-04-10 | 1998-02-18 | 萧宁华 | Laser axial centering instrument |
JP2000193440A (en) * | 1998-12-28 | 2000-07-14 | Hitachi Zosen Corp | Laser angle measuring device |
US20040085655A1 (en) * | 2001-03-29 | 2004-05-06 | Fuminori Takahashi | Optical system |
CN101464143A (en) * | 2009-01-15 | 2009-06-24 | 中国人民解放军92854部队军械修理厂 | Method and equipment for digitized detection of double-plain shaft parallelism of optical instrument |
CN102901467A (en) * | 2012-11-07 | 2013-01-30 | 中国科学院长春光学精密机械与物理研究所 | Device for correcting parallelism degree of laser emission optical axis and capturing and tracking visual axis |
CN103278933A (en) * | 2013-06-05 | 2013-09-04 | 中国科学院半导体研究所 | Portable adjustable H type light path parallel calibrating device |
CN103308002A (en) * | 2013-06-05 | 2013-09-18 | 中国科学院半导体研究所 | Simple adjustable X-type light path parallel debugging detection device |
Non-Patent Citations (1)
Title |
---|
金彬: "《两垂直平面镜对光线的作用》", 《中学理科》 * |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105004285A (en) * | 2015-05-08 | 2015-10-28 | 中冶赛迪工程技术股份有限公司 | Laser ray position adjusting device |
CN105004285B (en) * | 2015-05-08 | 2017-10-03 | 中冶赛迪工程技术股份有限公司 | Laser rays apparatus for adjusting position |
CN109642791A (en) * | 2016-08-24 | 2019-04-16 | 柯巴股份公司 | For being directed at the device of Angle Measuring Equipment |
CN110332908A (en) * | 2019-07-20 | 2019-10-15 | 大连理工大学 | A kind of high-precision laser is reflective to survey the device and method that inclines |
CN110375658A (en) * | 2019-07-23 | 2019-10-25 | 中铁二局集团有限公司 | A kind of installation of displacement lasers measuring appliance quick correcting mechanism and method |
CN114326137A (en) * | 2021-12-30 | 2022-04-12 | 浙江华威型钢科技有限公司 | High-precision optical axis and multi-optical axis parallelism adjusting method |
Also Published As
Publication number | Publication date |
---|---|
CN104406543B (en) | 2018-02-23 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN106873122B (en) | A kind of device and method for large-diameter non-spherical reflecting mirror centering adjustment | |
CN104406543A (en) | Optical axis parallelity device of double optical axis system and method | |
CN103983214B (en) | A kind of device utilizing diffraction light-free to measure guide rail four-degree-of-freedom kinematic error | |
CN102937738B (en) | System and method for accurately positioning optical axis of off-axis aspheric reflector | |
CN204018961U (en) | A kind of coaxial confocal light path realizes the device of field lens locating focal plane | |
CN107132636A (en) | A kind of aspherical primary mirror reflecting surface debugs benchmark calibration method and its system | |
CN105424322A (en) | Self-calibration optical axis parallelism detector and detection method | |
CN103968858B (en) | A kind of geometric calibration device of ultra-large vision field ultraviolet imager | |
US20140340691A1 (en) | Enhancements to integrated optical assembly | |
US20130329217A1 (en) | Laser System for Aligning a Bed Transport Mechanism in an Imaging System | |
CN101221044A (en) | Device and method for large distance light parallel regulation | |
CN104930988A (en) | Optical fiber array end surface tilt angle measuring instrument and measuring method | |
CN105737759B (en) | A kind of long-range profile measuring device | |
CN107817095B (en) | High-precision homodromous double-optical-axis and multi-optical-axis parallelism adjusting method | |
CN107817094A (en) | A kind of high accuracy double optical axises and more plain shaft parallelism adjusting process in the same direction | |
CN106767403A (en) | A kind of optical axis position error detection method of many optical axis optical systems | |
CN111426449A (en) | Method for calibrating parallelism of optical axes of multiple autocollimators | |
CN204255353U (en) | A kind of locator structure of accurate instruction shooting center | |
CN202372144U (en) | Tiny length measuring device based on imaging light reflecting and converging lever system | |
CN109544637B (en) | Double-target fixed verification device | |
KR101536684B1 (en) | Aligning System for Large Optical Apparatus | |
CN110425987A (en) | A kind of penetrability laser thickness gauge | |
CN105758333A (en) | Long-trace optical surface profile detector | |
CN103968859B (en) | A kind of ultra-large vision field ultraviolet faces the geometric calibration method of limit imager | |
CN102042990B (en) | Method and device for positioning normal direction of curve of workpiece in optical system |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant |