CN104390605A - Vertical adjustment device - Google Patents
Vertical adjustment device Download PDFInfo
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- CN104390605A CN104390605A CN201410718598.8A CN201410718598A CN104390605A CN 104390605 A CN104390605 A CN 104390605A CN 201410718598 A CN201410718598 A CN 201410718598A CN 104390605 A CN104390605 A CN 104390605A
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- tighten
- catoptron
- vertical
- tightens
- adjusting gear
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Abstract
The invention relates to the technical field of semiconductor manufacturing and detection, in particular to a vertical adjustment device. The vertical adjustment device comprises a reflector, a vertical movement mechanism, a supporting bottom plate and at least three fastening and mounting mechanisms, wherein the reflector is used for reflecting a measuring light beam of a projective optical part of a height and shape detection device to a detecting optical part, and is arranged on the upper surface of the vertical movement mechanism; the vertical movement mechanism is used for carrying the reflector to move reciprocally up and down in the vertical direction; the vertical movement mechanism is arranged on the supporting bottom plate; certain ends of the fastening and mounting mechanisms are fixedly arranged on the supporting bottom plate, and the other ends of the fastening and mounting mechanisms are fixedly connected with a metering frame of a silicon slice height and shape detection device; the fastening and mounting mechanisms keep that the upper surface of the reflector is parallel to the reference plane of the metering frame. A height signal obtained by measurement is corrected and calibrated by using a position feedback signal of the vertical movement mechanism, so that adjustment and correction of the height detection device are realized.
Description
Technical field
The present invention relates to semiconductor manufacturing and detection technique field, particularly relate to a kind of vertical adjusting gear.
Background technology
The present age semiconductor manufacturing of main flow and testing process in, need silicon chip to be processed to carry out surface elevation topography measurement.The projection optics of sniffer and detecting optical part, must carry out adjustment and measurement, measuring-signal must be calibrated, and just can realize the function measuring silicon chip height pattern.
Current general silicon wafer stage adjusts height detecting device and calibrates, but silicon wafer stage complex structure and involving great expense, and service condition is harsh, is not suitable for using in the experiment and debug process of sniffer.Conventional catenary motion instrument, can not ensure the measured object surface of height detecting device and the parallel relation of gage frame; And conventional catenary motion tool movement only can make measured object carry out catenary motion in the measurement range of height detecting device, can not reflect whether the projection optics of height detecting device itself and detecting optical meet correct spatial relation.
Summary of the invention
The object of the present invention is to provide a kind of vertical adjusting gear, can be used for the installation testing of silicon chip height pattern sniffer, adjustment and calibration.
In order to achieve the above object, the technical solution used in the present invention is:
A kind of vertical adjusting gear, for carrying out adjustment and measurement to the Projection optics portion of silicon chip height pattern sniffer and detecting optical part, described vertical adjusting gear comprises:
Catoptron, for reflexing to detecting optical part by the measuring beam of height pattern sniffer Projection optics portion;
Catenary motion mechanism, described catoptron is arranged on described catenary motion mechanism upper surface, and described catenary motion mechanism carries described catoptron and pumps in the vertical direction;
Support baseboard, described catenary motion organization establishes is on described support baseboard;
At least 3 tighten up installing mechanism, the described installing mechanism one end that tightens up is fixed on support baseboard, the other end is fixedly connected with the metrology frame of described silicon chip height pattern sniffer, described in tighten up installing mechanism and make the upper surface of described catoptron parallel with the reference plane of described metrology frame.
Further, described vertical adjusting gear also comprises mirror unit, and described mirror unit is fixedly installed on described catenary motion mechanism upper surface, and described catoptron is fixed on described mirror unit.
Further, described catoptron is provided with the first spider alignment mark and the second spider alignment mark, and the groove of described first spider alignment mark and described second spider alignment mark is parallel to two limits of described catoptron respectively.
Further, described catenary motion mechanism comprises back-up block and vertical deviation platform, described vertical deviation platform is fixedly installed on described back-up block, described back-up block is fixedly installed on described support baseboard, described mirror unit is arranged on described vertical deviation platform, and described vertical deviation platform carries out round scanning motion in the vertical direction for carrying described catoptron.
Further, the thickness of described back-up block is adjustable.
Further, tighten up described in installing mechanism comprise tighten up mounting blocks, threaded rod, vertically delicate adjusting sleeve, first tighten up ring and second and tighten up ring; The described mounting blocks that tightens up is fixed on described support baseboard, described threaded rod is positioned at described vertically delicate adjusting sleeve, and be connected with described vertically delicate adjusting bush whorl, the upper end of described threaded rod is threaded with described metrology frame, makes the upper surface of described vertically delicate adjusting sleeve and the lower surface close contact of described metrology frame; Tighten up in the through hole on mounting blocks described in described vertically delicate adjusting sleeve is arranged on, described vertically delicate adjusting sleeve two ends are provided with external thread, tighten up ring and described second respectively tighten up ring and be threaded with described first; Described first tightens up the relative height that ring and described second tightens up vertically delicate adjusting sleeve upper surface described in ring adjustable and described catoptron upper surface, and is fixed on described fastening mounting blocks by described vertically delicate adjusting sleeve.
Further, described in tighten up installing mechanism and also comprise screw, described screw tightens up mounting blocks described in being fixed on by described vertically delicate adjusting sleeve.
Further, described in tighten up installing mechanism and also comprise pad and tighten up nut, described in tighten up the lower end compact siro spinning technology of nut and described threaded rod, described pad tightens up between ring at the described nut and described second that tightens up.
Compared with prior art, the invention has the beneficial effects as follows:
Catenary motion mechanism carrying catoptron in the present invention moves back and forth in vertical direction, because catenary motion mechanism has location and scan function in the vertical direction, the position feed back signal of catenary motion mechanism is utilized to calibrate measuring the altitude signal obtained and demarcate, thus the adjustment realized height detecting device and calibration; The installing mechanism that tightens up in the present invention ensures that the upper surface of catoptron is parallel to the reference plane of metrology frame, make to the adjustment of height detecting device and calibration more accurate.The present invention utilizes two spider alignment marks of catoptron, can adjust the projection optics of silicon chip height detecting device and the spatial relation of detecting optical, ensure correct optical path.
Accompanying drawing explanation
The structural representation of a kind of vertical adjusting gear that Fig. 1 provides for the embodiment of the present invention;
Fig. 2 is the structural representation of catoptron in the embodiment of the present invention;
Fig. 3 is the structural representation tightening up installing mechanism in the embodiment of the present invention;
The assembling schematic diagram of a kind of vertical adjusting gear that Fig. 4 provides for the embodiment of the present invention and metrology frame.
Embodiment
In order to better understand technique scheme, below in conjunction with Figure of description and concrete embodiment, technique scheme is described in detail.
As shown in Figure 1 and Figure 4, the embodiment of the present invention provides a kind of vertical adjusting gear, for carrying out adjustment and measurement to the Projection optics portion of silicon chip height pattern sniffer and detecting optical part, described vertical adjusting gear comprises: catoptron 17, catenary motion mechanism, support baseboard 1 and at least three tighten up installing mechanism.
Wherein, catoptron 17 reflexes to detecting optical part 28 for the measuring beam 29 of the Projection optics portion 27 by height pattern sniffer; Described catoptron 17 is arranged on described catenary motion mechanism upper surface, and described catenary motion mechanism carries described catoptron 17 and pumps in the vertical direction; Described catenary motion organization establishes is on described support baseboard 1; The described installing mechanism one end that tightens up is fixed on support baseboard 1, the other end is fixedly connected with the metrology frame 26 of described silicon chip height pattern sniffer, described in tighten up installing mechanism and make the upper surface of described catoptron 17 parallel with the reference plane of described metrology frame 26.
In the present embodiment, described vertical adjusting gear also comprises mirror unit 16, and described mirror unit 16 is fixedly installed on described catenary motion mechanism upper surface, and described catoptron 17 is bonded on mirror unit 16.Catoptron 17 must meet strict physical dimension tolerance.
In the present embodiment, as shown in Figure 2, described catoptron is provided with the first spider alignment mark 18 and the second spider alignment mark 19, between first spider alignment mark 18 and the second spider alignment mark 19, there is accurate position relation, and the groove of the first spider alignment mark 18 and the second spider alignment mark 19 is parallel to two limits of described catoptron 17 respectively.Adjustment Projection optics portion 27 and the optics of detecting optical part 28 and the position of mechanical part, two spider alignment marks of height pattern sniffer Projection optics portion 27 inside are aimed at the first spider alignment mark 18 and the second spider alignment mark 19 respectively, and two spider alignment marks of height pattern sniffer detecting optical part 28 inside are aimed at the first spider alignment mark 18 and the second spider alignment mark 19 respectively.Now, the spatial relation of catoptron 17, Projection optics portion 27 and detecting optical part 28 meets the installation requirement of optics.
In the present embodiment, described catenary motion mechanism comprises back-up block 14 and vertical deviation platform 15, described vertical deviation platform 15 is fixedly installed on described back-up block 14, described back-up block 14 is fixedly installed on described support baseboard 1, described catoptron 17 is adhesively fixed on mirror unit 16, and mirror unit 16 is fixedly installed on described vertical deviation platform 15.Described vertical deviation platform 15 carries out round scanning motion in the vertical direction for carrying described catoptron 17, and catoptron 17 also can be made to remain on some specific positions.Vertical deviation platform 15, by built-in actuating motor and displacement transducer, forms the real-time feedback control to vertical position.
In the present embodiment, the thickness of described back-up block 14 can adjust according to the vertical deviation platform 15 of different model, and then the height of adjustment vertical deviation platform.
In the present embodiment, as shown in Figure 3, tighten up described in installing mechanism comprise tighten up mounting blocks 2, threaded rod 5, vertically delicate adjusting sleeve 4, first tighten up ring 3 and second and tighten up ring 23; The described mounting blocks 2 that tightens up is fixed on described support baseboard 1 by register pin 22, described threaded rod 5 is positioned at described vertically delicate adjusting sleeve 4, and be threaded with described vertically delicate adjusting sleeve 4, the upper end of described threaded rod 6 is threaded with described metrology frame 26, makes the upper surface of described vertically delicate adjusting sleeve 4 and the lower surface close contact of described metrology frame 26; Tighten up in the through hole on mounting blocks 2 described in described vertically delicate adjusting sleeve 4 is arranged on, described vertically delicate adjusting sleeve 4 two ends are provided with accurate external thread, tighten up ring 3 and described second respectively tighten up ring 23 and be threaded with described first; Described first tightens up the relative height that ring 3 and described second tightens up vertically delicate adjusting sleeve 4 upper surface and described catoptron 27 upper surface described in ring 23 adjustable, and is fixed on described fastening mounting blocks 2 by described vertically delicate adjusting sleeve 4.
In the present embodiment, as shown in Figure 3, tighten up installing mechanism described in and also comprise screw (20,21).When the reference plane of catoptron 17 upper surface and metrology frame meets parallel relation, described screw (20,21) described in being fixed on by described vertically delicate adjusting sleeve 4, tighten up mounting blocks 2, ensure that vertically delicate adjusting sleeve 4 upper surface and catoptron 17 upper surface relative position relation in the vertical direction do not change.
In the present embodiment, as shown in Figure 3, described in tighten up installing mechanism and also comprise pad 24 and tighten up nut 25, described in tighten up the lower end compact siro spinning technology of nut 25 and described threaded rod 5, described pad 24 tightens up between ring 23 at the described nut 25 and described second that tightens up.Bottom threaded rod 5 and pad 24, tighten up nut 25 compact siro spinning technology, provide the vertical force of lifting required for whole vertical adjusting gear.
Adopt three to tighten up installing mechanism for the embodiment of the present invention below, describe the course of work of the embodiment of the present invention:
The upper surface of the vertically delicate adjusting sleeve (4,8,12) in the embodiment of the present invention has strict tolerance, and the plane they formed is as the reference plane of whole vertical adjusting gear.Tighten up by first the relative height relation that ring (3,7,11) and second tightens up ring adjustment vertically delicate adjusting sleeve (4,8,12) upper surface and catoptron 17 upper surface, make vertical adjusting gear mounting plane be parallel to the upper surface of catoptron 17.After meeting this parallel relation, utilize screw (20,21) to be fixed on by vertically delicate adjusting sleeve (4,8,12) and tighten up on mounting blocks (2,6,10).The vertical adjusting gear embodiment of the present invention provided is by threaded rod (5,9,13) be lifted on metrology frame 26, when vertically delicate adjusting sleeve (4,8,12), when upper surface and the corresponding installed surface close contact of metrology frame 26, can ensure that the upper surface of catoptron 17 is parallel to the reference plane of metrology frame 26.Next, first align Projection optics portion 27 and catoptron 17, by Projection optics portion 27 inside two spider alignment marks respectively with the spider alignment mark of two on catoptron 17; Alignment detection opticator 28 and catoptron 17 again, by detecting optical part 28 inside two spider alignment marks respectively with the spider alignment mark of two on catoptron 17, after having aimed at, can think that whole light path is all correct.The measuring beam 29 of height pattern sniffer Projection optics portion 27 is reflexed to detecting optical part 28 by catoptron 17.Vertical deviation platform 15 carries catoptron 17 and pumps in the vertical direction, utilize the position feedback quantity of vertical deviation platform 15, the height measurement signal of silicon chip height pattern sniffer is calibrated and demarcated, thus the adjustment realized silicon chip height detecting device and calibration function.
The vertical adjusting gear tool that the embodiment of the present invention provides has the following advantages:
1, the catenary motion mechanism carrying catoptron in the present invention moves back and forth in vertical direction, because catenary motion mechanism has location and scan function in the vertical direction, the position feed back signal of catenary motion mechanism is utilized to calibrate measuring the altitude signal obtained and demarcate, thus the adjustment realized height detecting device and calibration;
2, the installing mechanism that tightens up in the present invention ensures that the upper surface of catoptron is parallel to the reference plane of metrology frame, make to the adjustment of height detecting device and calibration more accurate;
3, the present invention utilizes two spider alignment marks of catoptron, can adjust the projection optics of silicon chip height pattern sniffer and the spatial relation of detecting optical, ensure correct optical path.
Above-described specific embodiment; object of the present invention, technical scheme and beneficial effect are further described; be understood that; the foregoing is only specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any amendment made, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (8)
1. a vertical adjusting gear, for carrying out adjustment and measurement to the Projection optics portion of silicon chip height pattern sniffer and detecting optical part, it is characterized in that, described vertical adjusting gear comprises:
Catoptron, for reflexing to detecting optical part by the measuring beam of height pattern sniffer Projection optics portion;
Catenary motion mechanism, described catoptron is arranged on described catenary motion mechanism upper surface, and described catenary motion mechanism carries described catoptron and pumps in the vertical direction;
Support baseboard, described catenary motion organization establishes is on described support baseboard;
At least 3 tighten up installing mechanism, the described installing mechanism one end that tightens up is fixed on support baseboard, the other end is fixedly connected with the metrology frame of described silicon chip height pattern sniffer, described in tighten up installing mechanism and make the upper surface of described catoptron parallel with the reference plane of described metrology frame.
2. vertical adjusting gear as claimed in claim 1, is characterized in that, described vertical adjusting gear also comprises mirror unit, and described mirror unit is fixedly installed on described catenary motion mechanism upper surface, and described catoptron is fixed on described mirror unit.
3. vertical adjusting gear as claimed in claim 1, it is characterized in that, described catoptron is provided with the first spider alignment mark and the second spider alignment mark, and the groove of described first spider alignment mark and described second spider alignment mark is parallel to two limits of described catoptron respectively.
4. vertical adjusting gear as claimed in claim 2, it is characterized in that, described catenary motion mechanism comprises back-up block and vertical deviation platform, described vertical deviation platform is fixedly installed on described back-up block, described back-up block is fixedly installed on described support baseboard, described mirror unit is arranged on described vertical deviation platform, and described vertical deviation platform carries out round scanning motion in the vertical direction for carrying described catoptron.
5. vertical adjusting gear as claimed in claim 4, is characterized in that, the thickness of described back-up block is adjustable.
6. vertical adjusting gear as claimed in claim 1, is characterized in that, described in tighten up installing mechanism comprise tighten up mounting blocks, threaded rod, vertically delicate adjusting sleeve, first tighten up ring and second and tighten up ring; The described mounting blocks that tightens up is fixed on described support baseboard, described threaded rod is positioned at described vertically delicate adjusting sleeve, and be connected with described vertically delicate adjusting bush whorl, the upper end of described threaded rod is threaded with described metrology frame, makes the upper surface of described vertically delicate adjusting sleeve and the lower surface close contact of described metrology frame; Tighten up in the through hole on mounting blocks described in described vertically delicate adjusting sleeve is arranged on, described vertically delicate adjusting sleeve two ends are provided with external thread, tighten up ring and described second respectively tighten up ring and be threaded with described first; Described first tightens up the relative height that ring and described second tightens up vertically delicate adjusting sleeve upper surface described in ring adjustable and described catoptron upper surface, and is fixed on described fastening mounting blocks by described vertically delicate adjusting sleeve.
7. vertical adjusting gear as claimed in claim 6, is characterized in that, described in tighten up installing mechanism and also comprise screw, described screw tightens up mounting blocks described in being fixed on by described vertically delicate adjusting sleeve.
8. vertical adjusting gear as claimed in claim 6, it is characterized in that, the described installing mechanism that tightens up also comprises pad and tighten up nut, described in tighten up the lower end compact siro spinning technology of nut and described threaded rod, described pad tightens up between ring at the described nut and described second that tightens up.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410718598.8A CN104390605B (en) | 2014-12-01 | 2014-12-01 | A kind of vertical adjusting apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410718598.8A CN104390605B (en) | 2014-12-01 | 2014-12-01 | A kind of vertical adjusting apparatus |
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| Publication Number | Publication Date |
|---|---|
| CN104390605A true CN104390605A (en) | 2015-03-04 |
| CN104390605B CN104390605B (en) | 2017-05-31 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201410718598.8A Active CN104390605B (en) | 2014-12-01 | 2014-12-01 | A kind of vertical adjusting apparatus |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06331328A (en) * | 1993-05-26 | 1994-12-02 | Fujitsu Ltd | Height measuring device and method |
| CN102200428A (en) * | 2010-03-23 | 2011-09-28 | 上海微电子装备有限公司 | High-precision vertical position measurement device |
| JP2014106158A (en) * | 2012-11-28 | 2014-06-09 | Canon Inc | Measuring device and manufacturing method for article |
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2014
- 2014-12-01 CN CN201410718598.8A patent/CN104390605B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06331328A (en) * | 1993-05-26 | 1994-12-02 | Fujitsu Ltd | Height measuring device and method |
| CN102200428A (en) * | 2010-03-23 | 2011-09-28 | 上海微电子装备有限公司 | High-precision vertical position measurement device |
| JP2014106158A (en) * | 2012-11-28 | 2014-06-09 | Canon Inc | Measuring device and manufacturing method for article |
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| CN104390605B (en) | 2017-05-31 |
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Effective date of registration: 20160929 Address after: 100176 Beijing Economic Development Zone, Beijing, No. four, sea road, building two, floor 10, No. 201, 156 Applicant after: Beijing science and Technology Co., Ltd. Address before: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3 Applicant before: Institute of Microelectronics, Chinese Academy of Sciences |
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