CN111121689A - High-precision adjusting device for calibrating linear displacement sensor - Google Patents

High-precision adjusting device for calibrating linear displacement sensor Download PDF

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Publication number
CN111121689A
CN111121689A CN202010047841.3A CN202010047841A CN111121689A CN 111121689 A CN111121689 A CN 111121689A CN 202010047841 A CN202010047841 A CN 202010047841A CN 111121689 A CN111121689 A CN 111121689A
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China
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sensor
displacement sensor
linear displacement
fixing
linear
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CN202010047841.3A
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Chinese (zh)
Inventor
佟晨光
曹洁
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Changzhou Examination Detection Standard Authentication Research Institute
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Changzhou Examination Detection Standard Authentication Research Institute
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Priority to CN202010047841.3A priority Critical patent/CN111121689A/en
Publication of CN111121689A publication Critical patent/CN111121689A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness

Abstract

The invention discloses a high-precision adjusting device for calibrating a linear displacement sensor. The device is fixed comparatively easily, install the linear displacement sensor of various different model specifications, the device's perpendicular adjustment mechanism is used for adjusting the sensor fixed platform vertical direction upward movement, plane rotation adjustment mechanism is used for adjusting the rotation of sensor fixed platform horizontal direction, through perpendicular adjustment mechanism, plane rotation adjustment mechanism and fine setting screw rod, can the efficient diversified regulation of accomplishing the linear displacement sensor, the efficiency of installation regulation is high, abbe's error's influence has been reduced as far as possible, the collineation principle has been realized, work efficiency is greatly improved, simultaneously avoided because the influence of operating personnel installation horizontal factor, can guarantee the measurement accuracy requirement.

Description

High-precision adjusting device for calibrating linear displacement sensor
Technical Field
The invention relates to the field of metrological verification and calibration measurement, in particular to a high-precision adjusting device for calibrating a linear displacement sensor. The high-precision adjusting device is mainly used for arranging, fixing and adjusting different types of linear displacement sensors when calibrating different types of displacement sensors such as an inductive displacement sensor, a laser displacement sensor, a resistance displacement sensor, a stay wire (rope) type displacement sensor and the like.
Background
A linear displacement sensor is a device that senses a change in length dimension and converts it into a usable output signal, and is widely used in various industries of industrial automation. Because of different output signal modes, the types of linear displacement sensors are various, and currently, the more common linear displacement sensors include an inductive displacement sensor, a laser displacement sensor, a resistive displacement sensor, a pull wire (rope) type displacement sensor and the like. However, when the four common types of linear displacement sensors are calibrated, because structural forms of the sensors of different types are different greatly, even though some calibration devices with a high degree of automation are used at present, due to the fact that the detection platform is fixed, the mounting and fixing of the linear displacement sensors of different types with large structural size difference still appears to be inconvenient and simple. At present, the following problems mainly exist in the process of installing a fixed line displacement sensor to carry out calibration on the fixed line displacement sensor: (1) the linear displacement sensors are various in types, and no universal device can be used for fixedly mounting most types of linear displacement sensors; (2) the efficiency of installation regulation is not high, in order to reduce the influence of abbe's error as far as possible, satisfies the collineation principle, often needs the long time to adjust repeatedly, even so also can still not accomplish the effect of higher accuracy.
Disclosure of Invention
The invention aims to provide a high-precision adjusting device for calibrating a linear displacement sensor, which has high universality, can easily fix and install linear displacement sensors with different models and specifications, can efficiently complete multi-directional adjustment of the linear displacement sensor, achieves a collinear principle, greatly improves the working efficiency, avoids the influence of installation level factors of operators, and can ensure the requirement of measurement precision.
The technical scheme of the invention is as follows:
the invention provides a high-precision adjusting device for calibrating a linear displacement sensor, which comprises a sensor mounting part base and a clamp mounting part moving table, wherein the sensor mounting part base is provided with a plurality of linear displacement sensors; the sensor mounting component base is provided with two parallel first linear guide rails and a fine adjustment screw rod, sliding bases are arranged on the two parallel first linear guide rails, the fine adjustment screw rod is connected to one end, close to the fine adjustment screw rod, of the sliding base through a transmission block, and the fine adjustment screw rod controls the sliding bases to perform displacement adjustment on the first linear guide rails through the transmission block; the linear displacement sensor is characterized in that a vertical adjusting mechanism, a plane rotation adjusting mechanism and a sensor fixing platform are sequentially arranged on the sliding base from bottom to top, a plurality of pressing pieces are vertically installed on the sensor fixing platform, and the linear displacement sensor is fixed on the sensor fixing platform through the pressing pieces; the fixture mounting part moving table is sequentially provided with a second linear guide rail, a sliding block and a supporting block from bottom to top, and the supporting block can move on the second linear guide rail along with the sliding block; one end part of the supporting block is vertical to the supporting block and is provided with an adjusting auxiliary ruler, and a sensor is arranged parallel to the supporting block and is connected with a measuring rod; the sensor connecting measuring rod can be on the same straight line with the calibration point of the linear displacement sensor. The vertical adjusting mechanism is used for adjusting the sensor fixing platform to move in the vertical direction, the plane rotation adjusting mechanism is used for adjusting the rotation of the sensor fixing platform in the horizontal direction, the multi-directional adjustment of the line displacement sensor is completed through the vertical adjusting mechanism, the plane rotation adjusting mechanism and the fine adjustment screw rod, the collinear principle is achieved, the working efficiency is greatly improved, meanwhile, the influence of horizontal factors of installation of operators is avoided, and the requirement of measurement accuracy can be guaranteed.
Further, a fine adjustment screw fixing block is arranged on the sensor mounting component base, and the fine adjustment screw is fixed on the fine adjustment screw fixing block.
Furthermore, a plurality of first assembly fixing holes which are arranged in an array mode are formed in the sensor mounting component base, and the first linear guide rail and the fine adjustment screw fixing block are fixed on the sensor mounting component base through the first assembly fixing holes. The first fitting fixing hole can be used for fixing all necessary auxiliary devices.
Furthermore, sliding base's both ends are higher than the middle part, and the middle part forms groove structure, and sliding base's both ends are fixed respectively on two parallel first linear guide rails, perpendicular adjustment mechanism, plane rotation adjustment mechanism and sensor fixed platform from the bottom up set gradually in groove structure.
Furthermore, a sensor cushion block is arranged on the sensor fixing platform, and the linear displacement sensor is fixed between the sensor cushion block and the pressing piece through a pressing piece.
Furthermore, a plurality of second assembling and fixing holes which are arranged in an array manner are formed in the sensor fixing platform; the pressing and fixing piece is used for fixing the linear displacement sensors with various specifications by being installed in the second assembling and fixing hole. Therefore, the sensor fixing platform can be used for fixedly mounting linear displacement sensors with different specifications.
Further, a laser interferometer reflection mirror is arranged at one end part of the clamp mounting part moving table far away from the sensor mounting part base.
Furthermore, a connecting piece is arranged at one end, close to the sensor mounting part base, of the fixture mounting part moving table, and the second linear guide rail is mounted on the fixture mounting part moving table through the connecting piece.
Furthermore, the middle part of the movable table of the fixture mounting part is transversely provided with two bulges, a groove is arranged between the two bulges, the laser interferometer reflection mirror is arranged in the groove, and the connecting piece is arranged on the bulges at the two sides of the groove.
Furthermore, the device also comprises an assembly fixing table, wherein the assembly fixing table is arranged on one side close to the laser interferometer reflection mirror; the laser interferometer and the reflector assembly are arranged on the assembly fixing table, and the laser interferometer and the reflector assembly, the laser interferometer and the center line of the sensor connecting measuring rod are overlapped.
The specification of the sensor connecting measuring rod used by the invention is selected according to the models of different types of linear displacement sensors, such as: the sensor connection measuring rod is mainly used for matching and calibrating a laser type displacement sensor or an inductive type displacement sensor (20-1 in figure 3), is mainly used for matching and calibrating a sensor connection measuring rod of a stay wire (rope) type displacement sensor (20-2 in figure 3), and is mainly used for matching and calibrating a sensor connection measuring rod of a resistive type displacement sensor (20-3 in figure 3).
The invention has the beneficial effects that:
1. the adjusting device can easily fix and install the linear displacement sensors with different models and specifications, can efficiently complete multi-directional adjustment of the linear displacement sensors, has high efficiency of installation and adjustment, reduces the influence of Abbe errors as much as possible, realizes a collinear principle, greatly improves the working efficiency, avoids the influence of horizontal factors of installation of operators, and can ensure the requirement of measurement precision.
2. In the adjusting device, the plurality of second assembling and fixing holes are arranged on the sensor fixing platform in a display mode, so that different types of linear displacement sensors with different structural sizes and large differences can be placed on the sensor cushion block, and the calibrated sensor is fixed through the group of pressing and fixing pieces.
3. In the adjusting device, the movement of the sensor fixing platform in the vertical direction can be accurately adjusted by adjusting the vertical adjusting mechanism, the rotation of the sensor fixing platform in the horizontal direction can be accurately adjusted by adjusting the plane rotation adjusting mechanism, so that the sensor and the connecting measuring rod keep a uniform straight line, and the sensor is finely adjusted by adjusting the fine adjusting screw rod, so that the multi-directional adjustment of the linear displacement sensor is realized, and the sensor can achieve the effect of higher precision.
Drawings
Fig. 1 is a schematic front view showing the structure of a linear displacement sensor calibration high-precision adjusting device of the invention.
Fig. 2 is a schematic top view showing the structure of the linear displacement sensor calibration high-precision adjusting device.
In the figure, 1, a sensor mounting part base, 2, a first assembling and fixing hole, 3, a first linear guide rail, 4, a sensor fixing platform, 5, a sliding base, 6, a vertical adjusting mechanism, 7, a plane rotation adjusting mechanism, 8, a fine adjusting screw fixing block, 9, a fine adjusting screw, 10, a transmission block, 11, a second assembling and fixing hole, 12, a linear displacement sensor, 13, a sensor cushion block, 14, a pressing and fixing piece, 15, a clamp mounting part moving table, 16, a connecting piece, 17, a second linear guide rail, 18, a sliding block, 19, a supporting block, 20, a sensor connecting measuring rod, 21, a laser interferometer anti-interference mirror, 22, an adjusting auxiliary ruler, 23, a component fixing table, 24, a laser interference mirror and a reflecting mirror component.
Fig. 3 shows a schematic structural diagram of three sensor connecting measuring rods with different specifications equipped in the linear displacement sensor calibration high-precision adjusting device.
In the figure, 20-1, a sensor matched with a calibration laser type displacement sensor or an inductive type displacement sensor is connected with a measuring rod, 20-2, a sensor matched with a calibration pull wire (rope) type displacement sensor is connected with the measuring rod, and 20-3, a sensor matched with a calibration resistance type displacement sensor is connected with the measuring rod.
Detailed Description
Example 1
Referring to fig. 1 and 2, a high-precision adjusting device for calibrating a linear displacement sensor is mainly used for installing, fixing and adjusting displacement sensors of different types and specifications, such as an inductive displacement sensor, a laser displacement sensor, a resistance displacement sensor, a pull-wire (rope) displacement sensor and the like. The apparatus includes a sensor mounting member base 1 and a jig mounting member moving stage 15; the sensor mounting component base 1 is provided with two parallel first linear guide rails 3 and a fine adjustment screw 9, the two parallel first linear guide rails 3 are provided with sliding bases 5, the fine adjustment screw 9 is connected to one end, close to the fine adjustment screw 9, of the sliding base 5 through a transmission block 10, and the fine adjustment screw 9 controls the sliding bases 5 to perform displacement adjustment on the first linear guide rails 3 through the transmission block 10; a vertical adjusting mechanism 6, a plane rotation adjusting mechanism 7 and a sensor fixing platform 4 are sequentially arranged on the sliding base 5 from bottom to top, a plurality of pressing pieces 14 are vertically arranged on the sensor fixing platform 4, and a linear displacement sensor 12 is fixed on the sensor fixing platform 4 through the pressing pieces 14; the fixture mounting part moving table 15 is sequentially provided with a second linear guide rail 17, a sliding block 18 and a supporting block 19 from bottom to top, and the supporting block 19 can move on the second linear guide rail 17 along with the sliding block 18; one end of the supporting block 19 is provided with an adjusting auxiliary ruler 22 perpendicular to the supporting block 19, and a sensor connecting measuring rod 20 parallel to the supporting block 19; the sensor connection measuring rod 20 can be aligned with the calibration point of the linear displacement sensor 12. The vertical adjusting mechanism is used for adjusting the sensor fixing platform to move in the vertical direction, the plane rotation adjusting mechanism is used for adjusting the rotation of the sensor fixing platform in the horizontal direction, the multi-directional adjustment of the line displacement sensor is completed through the vertical adjusting mechanism, the plane rotation adjusting mechanism and the fine adjustment screw rod, the collinear principle is achieved, the working efficiency is greatly improved, meanwhile, the influence of horizontal factors of installation of operators is avoided, and the requirement of measurement accuracy can be guaranteed.
The sensor mounting component base 1 is provided with a fine adjustment screw fixing block 8, and the fine adjustment screw 9 is fixed on the fine adjustment screw fixing block 8. The sensor mounting component base 1 is provided with a plurality of first assembly fixing holes 2 which are arranged in an array mode, and the first linear guide rail 3 and the fine adjustment screw fixing block 8 are fixed on the sensor mounting component base 1 through the first assembly fixing holes 2. The two ends of the sliding base 5 are higher than the middle part, the middle part forms a groove structure, the two ends of the sliding base 5 are respectively fixed on the two parallel first linear guide rails 3, and the vertical adjusting mechanism 6, the plane rotation adjusting mechanism 7 and the sensor fixing platform 4 are sequentially arranged in the groove structure from bottom to top. The sensor fixing platform 4 is provided with a sensor cushion block 13, and the linear displacement sensor 12 is fixed between the sensor cushion block 13 and the pressing piece 14 through a pressing and fixing piece 14. A plurality of second assembling and fixing holes 11 which are arranged in an array are formed in the sensor fixing platform 4; the fixing member 14 fixes the linear displacement sensors 12 of various specifications by being mounted in the second mounting fixing hole 11.
The end of the jig mounting member moving stage 15 remote from the sensor mounting member base 1 is provided with a laser interferometer reflection mirror 21. A connector 16 is arranged at one end of the fixture mounting component moving table 15, which is close to the sensor mounting component base 1, and a second linear guide rail 17 is mounted on the fixture mounting component moving table 15 through the connector 16. Two bulges are transversely arranged in the middle of the clamp mounting part moving platform 15, a groove is arranged between the two bulges, the laser interferometer reflection mirror 21 is arranged in the groove, and the connecting piece 16 is arranged on the bulges at the two sides of the groove.
The device also comprises a component fixing table 23, wherein the component fixing table 23 is arranged on one side close to the laser interferometer reflection mirror 21; the assembly fixing table 23 is provided with a laser interference mirror and reflection mirror assembly 24, and the laser interference mirror and reflection mirror assembly 24, the laser interferometer reflection mirror 21 and the center line of the sensor connecting measuring rod 20 are superposed.
Example 21 m-sized guyed wire displacement sensor calibration and high precision adjustment
Firstly, assembling a sensor connecting measuring rod 20-2 matched with a calibration pull wire (rope) type displacement sensor on a supporting block 19; meanwhile, the calibrated pull-wire type linear displacement sensor is placed on the sensor cushion block 13, the two pressing and fixing pieces 14 are vertically arranged on the sensor fixing platform 4 through the second assembling and fixing holes 11, the pressing and fixing pieces 14 are pressed, and the pull-wire type linear displacement sensor placed on the sensor cushion block 13 is fixed between the sensor cushion block 13 and the pressing and fixing pieces 14.
Then, a stay wire of the stay wire type linear displacement sensor is connected with a sensor connecting measuring rod 20-2 matched with the calibration stay wire (rope) type displacement sensor, coarse adjustment in the vertical direction and the horizontal direction is firstly carried out through a vertical adjusting mechanism 6 and a plane rotation adjusting mechanism 7, then fine adjustment is carried out on the installation position of the stay wire type linear displacement sensor through a fine adjustment screw rod 9, the sensor connecting measuring rod 20-2 matched with the calibration stay wire (rope) type displacement sensor is kept in the same straight line through visual measurement, a laser pen is directly placed on the initially fixed stay wire type linear displacement sensor, laser emitted by the laser pen is indicated at a certain scale mark of an adjustment auxiliary ruler 22, a slide block 18 moves on a second linear guide rail 17 to drive the adjustment auxiliary ruler fixed on a supporting block 19 and the sensor connecting measuring rod 20-2 matched with the calibration stay wire (rope) type displacement sensor to carry out linear motion, when the stay wire of the stay wire type linear displacement sensor and the sensor connecting measuring rod 20-2 matched with the calibration stay wire (rope) type displacement sensor deviate in the movement process and are not on the same straight line, the laser indication on the adjustment auxiliary ruler 22 can deviate from the original initial fixed scale, and the stay wire type linear displacement sensor can be secondarily calibrated through the vertical adjusting mechanism 6, the plane rotation adjusting mechanism 7 and the fine adjusting screw rod 9 at the moment. Finally, in the calibration process of the stay wire type linear displacement sensor, the stay wire and the sensor connecting measuring rod 20-2 matched with the calibration stay wire (rope) type displacement sensor always keep the collinear principle.
EXAMPLE 3 calibration and high-precision adjustment of laser-based Displacement Sensors
Firstly, a sensor connecting measuring rod 20-1 matched with a calibrated laser type displacement sensor or an inductive type displacement sensor is selected to be assembled on a supporting block 19, meanwhile, the calibrated stay wire type linear displacement sensor is placed on a sensor cushion block 13, two pressing pieces 14 are vertically arranged on a sensor fixing platform 4 through second assembling and fixing holes 11, the pressing pieces 14 are pressed tightly, and the laser type displacement sensor placed on the sensor cushion block 13 is fixed between the sensor cushion block 13 and the pressing pieces 14.
The laser beam emitted by the laser type displacement sensor is irradiated to the plane end of a sensor connecting measuring rod 20-1 matched with a calibration laser type displacement sensor or an inductive type displacement sensor, coarse adjustment in the vertical direction and the horizontal direction is firstly carried out through a vertical adjusting mechanism 6 and a plane rotation adjusting mechanism 7, then fine adjustment is carried out on the installation position of the laser type displacement sensor through a fine adjustment screw rod 9, the laser beam of the laser type displacement sensor and the sensor connecting measuring rod 20-1 matched with the calibration laser type displacement sensor or the inductive type displacement sensor are kept in the same straight line through visual inspection, a laser pen is directly placed on a line displacement sensor 12 which is initially fixed, the laser indication emitted by the laser pen is at a certain scale mark of an adjustment auxiliary ruler 22, a slide block 18 moves on a second linear guide rail 17 to drive the adjustment auxiliary ruler fixed on a supporting block 19 and the sensor matched with the calibration type displacement sensor or the inductive type displacement sensor to be connected with the measurement auxiliary ruler fixed on The rod 20-1 moves linearly, if the laser beam of the laser displacement sensor is applied to the plane of the end of the measuring rod 20-1 which is matched with the sensor of the calibration laser displacement sensor or the inductive displacement sensor and deviates in the movement process, the laser indication on the adjustment auxiliary ruler 22 can deviate from the original initial fixed scale, and at the moment, the laser displacement sensor can be adjusted and calibrated again through the vertical adjusting mechanism 6, the plane rotation adjusting mechanism 7 and the fine adjustment screw 9. Finally, in the calibration process of the laser type displacement sensor, the laser beam of the laser type displacement sensor and the sensor connecting measuring rod 20-1 which is matched with the calibration laser type displacement sensor or the inductive type displacement sensor always keep the collinear principle.
EXAMPLE 4 calibration and high precision adjustment of inductive Displacement Sensors
The method comprises the steps of calibrating an inductive displacement sensor, namely selecting a sensor matched with the calibration laser displacement sensor or the inductive displacement sensor to be connected with a measuring rod 20-1, assembling the sensor matched with the calibration laser displacement sensor or the inductive displacement sensor to be connected with the measuring rod 20-1 on a supporting block 19, meanwhile, placing the calibrated inductive displacement sensor on a sensor cushion block 13, vertically installing two pressing pieces 14 on a sensor fixing platform 4 through second assembling and fixing holes 11, pressing the pressing pieces 14, and fixing the inductive displacement sensor placed on the sensor cushion block 13 between the sensor cushion block 13 and the pressing pieces 14.
Compressing the plane end of an extension rod of an inductance type displacement sensor by matching with a calibration laser type displacement sensor or a sensor connecting measuring rod 20-1 of the inductance type displacement sensor, roughly adjusting in the vertical direction and the horizontal direction through a vertical adjusting mechanism 6 and a plane rotation adjusting mechanism 7, finely adjusting the installation position of the inductance type displacement sensor by using a fine adjustment screw rod 9, keeping the extension rod of the inductance type displacement sensor and the sensor connecting measuring rod 20-1 matching with the calibration laser type displacement sensor or the inductance type displacement sensor in the same straight line through visual inspection, directly placing a laser pen on the initially fixed inductance type displacement sensor, indicating the laser emitted by the laser pen at a certain scale mark of an adjustment auxiliary ruler 22, moving a slide block 18 on a second linear guide rail 17 to drive the adjustment auxiliary ruler fixed on a supporting block 19 and the connecting measuring rod 20(1) to do linear motion, if the telescopic rod of the inductive displacement sensor and the sensor matched with the calibration laser type displacement sensor or the inductive displacement sensor deviate in the movement stretching process on the plane of the end of the measuring rod 20-1, the laser indication can deviate from the original initial fixed scale on the adjustment auxiliary ruler 22, and at the moment, the inductive displacement sensor can be calibrated again through the vertical adjusting mechanism 6, the plane rotation adjusting mechanism 7 and the fine adjustment screw 9. Finally, in the calibration process of the inductive displacement sensor, the telescopic rod and the sensor connecting measuring rod 20-1 which is matched with the calibration laser type displacement sensor or the inductive displacement sensor always keep the collinear principle.
EXAMPLE 5 calibration and high precision adjustment of resistive Displacement Sensors
Firstly, a sensor connecting measuring rod 20-3 matched with a calibrated resistance displacement sensor is selected to be assembled on a supporting block 19, the calibrated resistance displacement sensor is placed on a sensor cushion block 13, two pressing and fixing pieces 14 are vertically arranged on a sensor fixing platform 4 through second assembling and fixing holes 11, the pressing and fixing pieces 14 are pressed, and the resistance displacement sensor placed on the sensor cushion block 13 is fixed between the sensor cushion block 13 and the pressing and fixing pieces 14.
Connecting a sensor pull rod with a sensor connecting measuring rod 20-3 matched with a calibration resistance type displacement sensor, roughly adjusting in the vertical direction and the horizontal direction through a vertical adjusting mechanism 6 and a plane rotation adjusting mechanism 7, finely adjusting the installation position of the resistance type displacement sensor by using a fine adjusting screw rod 9, enabling the sensor pull rod and the sensor connecting measuring rod 20-3 matched with the calibration resistance type displacement sensor to be kept in the same straight line through visual inspection, directly placing a laser pen on the initially fixed resistance type displacement sensor, indicating laser emitted by the laser pen at a certain scale mark of an adjustment auxiliary ruler 22, moving a slide block 18 on a second linear guide rail 17 to drive the adjustment auxiliary ruler fixed on a supporting block 19 and the sensor connecting measuring rod 20-3 matched with the calibration resistance type displacement sensor to do linear motion, and if a resistance type displacement sensor pull wire and the sensor connecting measuring rod 20-3 matched with the calibration resistance type displacement sensor are in linear motion 3, if the deviation is not on the same straight line in the moving process, the laser indication on the adjusting auxiliary ruler 22 will deviate from the original fixed scale, and at this time, the resistance type displacement sensor can be adjusted again through the vertical adjusting mechanism 6, the plane rotation adjusting mechanism 7 and the fine adjusting screw 9. Finally, in the calibration process of the resistance-type displacement sensor, the stay wire and the sensor connecting measuring rod 20-3 matched with the calibration resistance-type displacement sensor always keep the collinear principle.
Having described embodiments of the present invention, the foregoing description is intended to be exemplary, not exhaustive, and not limited to the embodiments disclosed.

Claims (10)

1. A high-precision adjusting device for calibrating a linear displacement sensor is characterized by comprising a sensor mounting part base (1) and a clamp mounting part moving table (15);
the sensor mounting component comprises a sensor mounting component base (1), wherein two parallel first linear guide rails (3) and a fine adjustment screw rod (9) are arranged on the sensor mounting component base (1), a sliding base (5) is arranged on the two parallel first linear guide rails (3), the fine adjustment screw rod (9) is connected to one end, close to the fine adjustment screw rod (9), of the sliding base (5) through a transmission block (10), and the fine adjustment screw rod (9) controls the sliding base (5) to perform displacement adjustment on the first linear guide rails (3) through the transmission block (10); a vertical adjusting mechanism (6), a plane rotation adjusting mechanism (7) and a sensor fixing platform (4) are sequentially arranged on the sliding base (5) from bottom to top, a plurality of pressing pieces (14) are vertically arranged on the sensor fixing platform (4), and the linear displacement sensor (12) is fixed on the sensor fixing platform (4) through the pressing pieces (14);
the fixture mounting part moving table (15) is sequentially provided with a second linear guide rail (17), a sliding block (18) and a supporting block (19) from bottom to top, and the supporting block (19) can move on the second linear guide rail (17) along with the sliding block (18); an adjusting auxiliary ruler (22) is arranged at one end of the supporting block (19) and is vertical to the supporting block (19), and a sensor connecting measuring rod (20) is arranged parallel to the supporting block (19); the sensor connecting measuring rod (20) can be on the same straight line with the calibration point of the linear displacement sensor (12).
2. The linear displacement sensor calibration high precision adjusting device according to claim 1, characterized in that a fine adjustment screw fixing block (8) is arranged on the sensor mounting component base (1), and the fine adjustment screw (9) is fixed on the fine adjustment screw fixing block (8).
3. The linear displacement sensor calibration high-precision adjusting device according to claim 2, wherein the sensor mounting component base (1) is provided with a plurality of first assembling and fixing holes (2) arranged in an array, and the first linear guide rail (3) and the fine tuning screw fixing block (8) are fixed on the sensor mounting component base (1) through the first assembling and fixing holes (2).
4. The linear displacement sensor calibration high-precision adjusting device according to claim 1, wherein two ends of the sliding base (5) are higher than the middle part, the middle part forms a groove structure, two ends of the sliding base (5) are respectively fixed on two parallel first linear guide rails (3), and the vertical adjusting mechanism (6), the planar rotation adjusting mechanism (7) and the sensor fixing platform (4) are sequentially arranged in the groove structure from bottom to top.
5. The linear displacement sensor calibration high-precision adjusting device is characterized in that a sensor cushion block (13) is arranged on the sensor fixing platform (4), and the linear displacement sensor (12) is fixed between the sensor cushion block (13) and the pressing piece (14) through a pressing and fixing piece (14).
6. The linear displacement sensor calibration high-precision adjusting device according to claim 1, wherein the sensor fixing platform (4) is provided with a plurality of second assembling and fixing holes (11) arranged in an array; the pressing piece (14) is used for fixing the linear displacement sensors (12) with various specifications by being installed in the second assembling and fixing hole (11).
7. The linear displacement sensor calibration high accuracy adjustment apparatus according to claim 1, wherein a laser interferometer reflection mirror (21) is provided at an end portion of the jig mounting member moving stage (15) farther from the sensor mounting member base (1).
8. The linear displacement sensor calibration high accuracy adjustment device of claim 7, further comprising a component mount (23), the component mount (23) being on a side near the laser interferometer anti-interferometer mirror (21); the laser interferometer and reflector assembly (24) is arranged on the assembly fixing table (23), and the laser interferometer and reflector assembly (24), the laser interferometer and reflector (21) and the center line of the sensor connecting measuring rod (20) are coincided.
9. The linear displacement sensor calibration high precision adjusting device according to claim 1, characterized in that a connecting piece (16) is arranged at one end of the clamp mounting part moving table (15) which is closer to the sensor mounting part base (1), and the second linear guide rail (17) is mounted on the clamp mounting part moving table (15) through the connecting piece (16).
10. The linear displacement sensor calibration high precision adjusting device according to claim 9, wherein the clamp mounting part moving stage (15) is provided with two protrusions transversely arranged in the middle, a groove is formed between the two protrusions, the laser interferometer reflection mirror (21) is arranged in the groove, and the connecting piece (16) is arranged on the protrusions on two sides of the groove.
CN202010047841.3A 2020-01-16 2020-01-16 High-precision adjusting device for calibrating linear displacement sensor Pending CN111121689A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112066961A (en) * 2020-09-15 2020-12-11 成都明杰科技有限公司 Abbe error control system for precision measurement
CN112504193A (en) * 2020-12-11 2021-03-16 中国航空工业集团公司北京长城计量测试技术研究所 Variable-angle measuring device and method for stay cord displacement sensor
CN113790690A (en) * 2021-11-17 2021-12-14 陕西省计量科学研究院 Clamping attitude adjusting system and method for linear displacement sensor for calibration
CN114370817A (en) * 2022-01-12 2022-04-19 中国测试技术研究院机械研究所 Device and method for calibrating ball arm instrument

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112066961A (en) * 2020-09-15 2020-12-11 成都明杰科技有限公司 Abbe error control system for precision measurement
CN112504193A (en) * 2020-12-11 2021-03-16 中国航空工业集团公司北京长城计量测试技术研究所 Variable-angle measuring device and method for stay cord displacement sensor
CN113790690A (en) * 2021-11-17 2021-12-14 陕西省计量科学研究院 Clamping attitude adjusting system and method for linear displacement sensor for calibration
CN113790690B (en) * 2021-11-17 2024-04-02 陕西省计量科学研究院 Clamping posture adjusting system and adjusting method for linear displacement sensor for calibration
CN114370817A (en) * 2022-01-12 2022-04-19 中国测试技术研究院机械研究所 Device and method for calibrating ball arm instrument
CN114370817B (en) * 2022-01-12 2023-08-15 中国测试技术研究院机械研究所 Device and method for calibrating club instrument

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