CN219083997U - Magnetostrictive displacement sensor calibration device - Google Patents
Magnetostrictive displacement sensor calibration device Download PDFInfo
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- CN219083997U CN219083997U CN202223465368.4U CN202223465368U CN219083997U CN 219083997 U CN219083997 U CN 219083997U CN 202223465368 U CN202223465368 U CN 202223465368U CN 219083997 U CN219083997 U CN 219083997U
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- displacement sensor
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- magnetostrictive displacement
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- sensor calibration
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
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Abstract
The utility model provides a magnetostrictive displacement sensor calibration device, which comprises a laser interferometer and a three-coordinate measuring machine, wherein a supporting device is arranged on a workbench of the three-coordinate measuring machine and is used for transversely supporting the magnetostrictive displacement sensor on the workbench, a reflector is fixed on a moving arm of the three-coordinate measuring machine, and a light path is formed between the reflector and the laser interferometer; the movable arm is detachably provided with a measuring head and is also used for being fixed on the magnetic ring of the magnetostrictive displacement sensor through a connecting piece. By adopting the technical scheme, the precise precision requirement on the angle of the guide rail in the prior art is not needed, the measuring efficiency and the measuring accuracy are greatly improved, and the magnetic ring can be very conveniently reset to the position of a certain calibration point accurately so as to be convenient for repeated detection.
Description
Technical Field
The utility model relates to a magnetostrictive displacement sensor calibration device, and belongs to the technical field of precise instruments.
Background
The magnetic ring moves through the ruler body to generate a signal difference formed by relative distance, the magnetostrictive displacement sensor is usually measured and calibrated by a laser interferometer, no specific implementation method is provided for the magnetostrictive displacement sensor in the conventional regulation specification, the laser interferometer cannot be used alone when the laser interferometer is used for detecting and calibrating the equipment, and the linear mirror group can be completed by matching with a corresponding track, so that different measuring mechanisms can design corresponding equipment by themselves to realize the standard with higher track straightness to meet the dimming requirement of a laser light path, for example, a magnetostrictive linear displacement sensor calibrating device disclosed in China patent document CN 210625568U. The conventional track platform is difficult to implement, the clamping displacement sensor and the magnetic ring simultaneously complete the relative displacement change and the dimming light path requirement, and meanwhile, the conventional track platform has the defect that a certain calibration point of the specified displacement cannot be accurately and repeatedly positioned. The moving direction of the magnetic ring arranged on the track can only meet Abbe's principle as far as possible, and a certain included angle is formed between the moving direction of the magnetic ring and the direction of the ruler body (ruler rod) of the displacement ruler in the actual operation process. The uncertainty factors can generate corresponding errors, so that the detection of the magnetostrictive displacement sensor is affected, and errors and inaccurate calibration data can be caused when the magnetostrictive displacement sensor with high precision requirements is detected and calibrated to affect subsequent work.
Disclosure of Invention
Therefore, an object of the present utility model is to provide a magnetostrictive displacement sensor calibration device equipped with a three-coordinate measuring machine, which uses a laser interferometer as a main standard and the three-coordinate measuring machine as an auxiliary device, so as to achieve the purpose of rapid and repeated positioning by achieving the coordinate calibration of a calibration point.
In order to achieve the above object, the magnetostrictive displacement sensor calibration device of the present utility model comprises a laser interferometer and a three-coordinate measuring machine, wherein a supporting device is arranged on a workbench of the three-coordinate measuring machine, the supporting device is used for transversely supporting the magnetostrictive displacement sensor on the workbench, a reflector is fixed on a moving arm of the three-coordinate measuring machine, a light path is formed between the reflector and the laser interferometer, the light path is parallel to a ruler rod of the magnetostrictive displacement sensor, and an interference mirror is also erected on the workbench and is positioned on the light path; the movable arm is detachably provided with a measuring head and is also used for being fixed on the magnetic ring of the magnetostrictive displacement sensor through a connecting piece.
The supporting device comprises two supporting seats, and the two supporting seats are respectively supported at two ends of the ruler rod.
At least one supporting seat is arranged on a sliding table and can slide on the sliding table, and an adjusting device is arranged on the sliding table and used for adjusting the position of the supporting seat on the sliding table.
The adjusting device comprises an adjusting bolt, an installation seat is arranged on the sliding table, an adjusting screw hole is formed in the installation seat, and the end portion of the adjusting bolt penetrates through the adjusting screw hole and then is fixed on the supporting seat.
The end part of the adjusting bolt is inserted into the insertion hole on the supporting seat, and an anti-falling screw is in threaded connection with the screw hole on the supporting seat and then abuts against the adjusting bolt.
An annular groove is formed in the end portion of the adjusting bolt, and the anti-falling screw is inserted into the groove.
The connecting piece comprises a connecting rod, the upper end of the connecting rod is connected with the movable arm in a threaded mode, and the lower end of the connecting rod is connected with the magnetic ring through a fixing screw.
The lower end of the connecting rod is provided with a screw seat, and the fixing screw passes through the through hole on the magnetic ring and is then screwed into the screw hole on the screw seat.
The movable arm is provided with a transverse sliding rod, the reflecting mirror is arranged on the reflecting mirror seat, the sliding rod penetrates through a through hole in the reflecting mirror seat so that the reflecting mirror seat can slide and rotate on the sliding rod, the reflecting mirror seat is further provided with a first locking screw, and the first locking screw is used for locking the reflecting mirror seat on the sliding rod.
The workbench is provided with a telescopic rod, the interference mirror is positioned on the interference mirror seat, the top end of the telescopic rod penetrates through the through hole in the interference mirror seat so that the interference mirror seat can slide and rotate on the telescopic rod, the interference mirror seat is further provided with a second locking screw, and the second locking screw is used for locking the interference mirror seat on the telescopic rod.
By adopting the technical scheme, the magnetostrictive displacement sensor calibration device can calibrate the coordinates of the calibration point of the magnetostrictive displacement sensor through the coordinate positioning function of the three-coordinate measuring machine, so that the magnetic ring can be driven to move along the coordinate path of the calibration point through the moving arm of the three-coordinate measuring machine during calibration detection, and the strict precision requirement on the angle of the guide rail in the prior art is not required, so that the measurement efficiency and precision are greatly improved; in addition, according to the calibration point coordinates calibrated by the three-coordinate measuring machine, the magnetic ring can be very conveniently and accurately reset to the position of a certain calibration point, so that repeated detection can be conveniently carried out.
Drawings
Fig. 1 is a schematic structural view of the present utility model.
Fig. 2 is a partial enlarged view of the portion a in fig. 1.
Fig. 3 is a partial enlarged view of the portion B in fig. 1.
Fig. 4 is a schematic diagram showing a separation state of the connecting rod and the moving arm.
Fig. 5 is a schematic diagram of an assembly structure of the sliding table and the second supporting seat.
Fig. 6 is an exploded view of fig. 5.
Fig. 7 is a schematic view of a mirror mount.
Fig. 8 is a schematic diagram of an installation structure of the interference lens base.
Detailed Description
The utility model is described in further detail below with reference to the drawings and the detailed description.
As shown in fig. 1 to 3, a magnetostrictive displacement sensor calibration device of the present utility model includes a laser interferometer 1 and a three-coordinate measuring machine 2, and a support device is provided on a table 21 of the three-coordinate measuring machine 2, and is used for laterally supporting the magnetostrictive displacement sensor 3 on the table 21. The support device comprises a first support seat 41 and a second support seat 42 with V-shaped grooves, and the two support seats are respectively supported at two ends of the ruler 31. The second support seat 42 is disposed on a sliding table 43 and can slide on the sliding table 43, and an adjusting device is disposed on the sliding table 43 for adjusting the position of the support seat on the sliding table 43. As shown in fig. 5 and 6, in the present embodiment, the adjusting device includes an adjusting bolt 44, a mounting seat 431 is provided on the sliding table 43, an adjusting screw hole 431a is provided on the mounting seat 431, and an end portion of the adjusting bolt 44 passes through the adjusting screw hole 431a and is fixed on the second supporting seat 42. The end of the adjusting bolt 44 is inserted into the insertion hole 421 on the second supporting seat 42, and an anti-drop screw 45 is screwed into the screw hole 422 on the second supporting seat 42 and then abuts against the adjusting bolt 44. An annular groove 441 is provided at an end of the adjusting bolt 44, and the drop-preventing screw 45 is inserted into the groove 441.
A mirror 5 is fixed to a moving arm 22 of the three-coordinate measuring machine 2, an optical path 100 is formed between the mirror 5 and the laser interferometer 1, the optical path 100 is parallel to a ruler 31 of the magnetostrictive displacement sensor 3, an interference mirror 6 is further mounted on the table 21, and the interference mirror 6 is positioned on the optical path 100. As shown in fig. 7, a transverse sliding rod 51 is fixed on the moving arm 22, the reflecting mirror 5 is arranged on a reflecting mirror base 52, the sliding rod 51 passes through a through hole on the reflecting mirror base 52 so that the reflecting mirror base 52 can slide and rotate on the sliding rod 51, and a first locking screw 53 is further arranged on the reflecting mirror base 52, and the first locking screw 53 is used for locking the reflecting mirror base 52 on the sliding rod 51. As shown in fig. 8, a telescopic rod 61 is provided on the table 21, the interference mirror 6 is located on an interference mirror seat 62, the top end of the telescopic rod 61 passes through a through hole on the interference mirror seat 62 so that the interference mirror seat 62 can slide and rotate on the telescopic rod 61, a second locking screw 63 is further provided on the interference mirror seat 62, and the second locking screw 63 is used for locking the interference mirror seat 62 on the telescopic rod 61.
The movable arm 22 is detachably provided with a measuring head (not shown), and when the measuring head is removed, the movable arm 22 can be fixed to the magnetic ring 32 of the magnetostrictive displacement sensor 3 by a connecting member. As shown in fig. 4, the connecting member includes a connecting rod 7, the upper end of the connecting rod 7 is screwed to the moving arm 22, and the lower end is connected to the magnetic ring 32 by a fixing screw 71. A screw seat 72 is arranged at the lower end of the connecting rod 7, and the fixing screw 71 passes through the through hole on the magnetic ring 32 and is then screwed into the screw hole on the screw seat 72.
When the detection is carried out, the measured magnetostrictive displacement sensor 3 is connected to a computer to display the displacement value in real time. The magnetostrictive displacement sensor 3 is fixed to the table 21 such that both ends of the ruler 31 are positioned on the first support base 41 and the second support base 42, respectively. The adjustment bolt 44 on the second support base 42 is adjusted so that the ruler 31 and the machine coordinate system Y-axis of the three-coordinate measuring machine are substantially parallel.
The three-coordinate measuring instrument is operated to measure the ruler 31 of the magnetostrictive displacement sensor 3, and key parts of the ruler 31 are selected as calibration points, such as the minimum displacement position, the maximum displacement position, the zero point value position and the like of the magnetic ring 32 on the ruler 31.
And (3) taking down the measuring head of the three-section coordinate measuring machine on the movable arm 22, connecting the magnetic ring 32 of the magnetostrictive displacement sensor to the movable arm 22, and controlling the movable arm 22 to move along the extending direction of the ruler 31 according to the calibrated calibration point coordinates to detect.
The magnetic ring 32 is moved to the zero point of the measured ruler rod 31, the numerical value of the laser interferometer 1 is cleared, the coordinate calibrated by the three-coordinate measuring instrument is sequentially operated to each detection point, the indication value of the magnetostrictive displacement sensor 3 is compared with the indication value of the laser interferometer 1 for detection, and when the indication value error of the magnetostrictive displacement sensor 3 exceeds the technical index, the magnetostrictive displacement sensor can be calibrated according to the detection numerical value of the laser interferometer 1.
By adopting the technical scheme, the calibration device of the magnetostrictive displacement sensor 3 can calibrate the coordinates of the calibration point of the magnetostrictive displacement sensor 3 through the coordinate positioning function of the three-coordinate measuring machine 2, so that the magnetic ring 32 can be driven to move along the coordinate path of the calibration point through the moving arm 22 of the three-coordinate measuring machine 2 during calibration detection, and the strict precision requirement on the angle of the guide rail in the prior art is not required, so that the measurement efficiency and the measurement precision are greatly improved; in addition, according to the calibration point coordinates calibrated by the three-coordinate measuring machine 2, the magnetic ring 32 can be very conveniently and accurately reset to the position of a certain calibration point, so as to facilitate repeated detection.
It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. While still being apparent from variations or modifications that may be made by those skilled in the art are within the scope of the utility model.
Claims (10)
1. A magnetostrictive displacement sensor calibration device, characterized in that: the device comprises a laser interferometer and a three-coordinate measuring machine, wherein a supporting device is arranged on a workbench of the three-coordinate measuring machine and used for transversely supporting a magnetostrictive displacement sensor on the workbench, a reflecting mirror is fixed on a movable arm of the three-coordinate measuring machine, a light path is formed between the reflecting mirror and the laser interferometer, the light path is parallel to a ruler rod of the magnetostrictive displacement sensor, an interference mirror is also erected on the workbench, and the interference mirror is positioned on the light path; the movable arm is detachably provided with a measuring head and is also used for being fixed on the magnetic ring of the magnetostrictive displacement sensor through a connecting piece.
2. The magnetostrictive displacement sensor calibration apparatus of claim 1, wherein: the supporting device comprises two supporting seats, and the two supporting seats are respectively supported at two ends of the ruler rod.
3. A magnetostrictive displacement sensor calibration apparatus according to claim 2, characterized in that: at least one supporting seat is arranged on a sliding table and can slide on the sliding table, and an adjusting device is arranged on the sliding table and used for adjusting the position of the supporting seat on the sliding table.
4. A magnetostrictive displacement sensor calibration apparatus according to claim 3, characterized in that: the adjusting device comprises an adjusting bolt, an installation seat is arranged on the sliding table, an adjusting screw hole is formed in the installation seat, and the end portion of the adjusting bolt penetrates through the adjusting screw hole and then is fixed on the supporting seat.
5. The magnetostrictive displacement sensor calibration apparatus according to claim 4, wherein: the end part of the adjusting bolt is inserted into the insertion hole on the supporting seat, and an anti-falling screw is in threaded connection with the screw hole on the supporting seat and then abuts against the adjusting bolt.
6. The magnetostrictive displacement sensor calibration apparatus of claim 5, wherein: an annular groove is formed in the end portion of the adjusting bolt, and the anti-falling screw is inserted into the groove.
7. A magnetostrictive displacement sensor calibration apparatus as set forth in any of claims 1-6, characterized in that: the connecting piece comprises a connecting rod, the upper end of the connecting rod is connected with the movable arm in a threaded mode, and the lower end of the connecting rod is connected with the magnetic ring through a fixing screw.
8. The magnetostrictive displacement sensor calibration apparatus of claim 7, wherein: the lower end of the connecting rod is provided with a screw seat, and the fixing screw passes through the through hole on the magnetic ring and is then screwed into the screw hole on the screw seat.
9. A magnetostrictive displacement sensor calibration apparatus as set forth in any of claims 1-6, characterized in that: the movable arm is provided with a transverse sliding rod, the reflecting mirror is arranged on the reflecting mirror seat, the sliding rod penetrates through a through hole in the reflecting mirror seat so that the reflecting mirror seat can slide and rotate on the sliding rod, the reflecting mirror seat is further provided with a first locking screw, and the first locking screw is used for locking the reflecting mirror seat on the sliding rod.
10. A magnetostrictive displacement sensor calibration apparatus as set forth in any of claims 1-6, characterized in that: the workbench is provided with a telescopic rod, the interference mirror is positioned on the interference mirror seat, the top end of the telescopic rod penetrates through the through hole in the interference mirror seat so that the interference mirror seat can slide and rotate on the telescopic rod, the interference mirror seat is further provided with a second locking screw, and the second locking screw is used for locking the interference mirror seat on the telescopic rod.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223465368.4U CN219083997U (en) | 2022-12-23 | 2022-12-23 | Magnetostrictive displacement sensor calibration device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223465368.4U CN219083997U (en) | 2022-12-23 | 2022-12-23 | Magnetostrictive displacement sensor calibration device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219083997U true CN219083997U (en) | 2023-05-26 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223465368.4U Active CN219083997U (en) | 2022-12-23 | 2022-12-23 | Magnetostrictive displacement sensor calibration device |
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| Country | Link |
|---|---|
| CN (1) | CN219083997U (en) |
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2022
- 2022-12-23 CN CN202223465368.4U patent/CN219083997U/en active Active
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