CN113310412B - Full-automatic displacement and strain sensor calibrating device - Google Patents
Full-automatic displacement and strain sensor calibrating device Download PDFInfo
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- CN113310412B CN113310412B CN202110596924.2A CN202110596924A CN113310412B CN 113310412 B CN113310412 B CN 113310412B CN 202110596924 A CN202110596924 A CN 202110596924A CN 113310412 B CN113310412 B CN 113310412B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/042—Calibration or calibration artifacts
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
- G01B11/161—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
- G01B11/18—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge using photoelastic elements
Abstract
The invention discloses a full-automatic displacement and strain sensor calibration device, and belongs to the field of test and measurement. The device comprises a laser, a spectroscope mounting plate, a spectroscope, a measuring mirror mounting plate, a measuring mirror, a clamp connecting piece, a movable clamp, a microscope, a positioning strip, a sensor clamping block, a sensor clamping upper cover, a precision positioning table and a precision positioning table housing. The laser, the spectroscope mounting plate, the spectroscope, the measuring mirror mounting plate and the measuring mirror form a precise displacement measuring system and are fixed on one side of the device. The movable clamp is fixed on the measuring mirror mounting plate through the clamp connecting piece. The sensor clamping block and the sensor clamping upper cover form a fixing clamp, and the fixing clamp is fixed on the precise positioning table housing through a positioning strip. The microscope is fixed on one side of the shell of the precision positioning table. The precision positioning table is covered and protected by a precision positioning table cover. The invention can realize full-automatic, high-precision and quick calibration of the displacement and strain sensor.
Description
Technical Field
The invention relates to the technical field of test and measurement, in particular to a full-automatic displacement and strain sensor calibration device.
Background
The displacement sensor is also called as a linear sensor, and belongs to a metal induction linear device, which can convert a measured physical quantity into an electric signal for output and is often used for measuring the length dimension. The displacement sensor is widely applied to the industries of machine tool machining, transportation, bridge construction and the like. However, in the course of using the displacement sensor, the characteristics of the displacement sensor may change with the passage of time or the change of temperature, and zero drift or the like may occur, thereby degrading the measurement accuracy.
The strain is an object with geometric structural characteristics, and is influenced by factors such as external force and non-uniform temperature field, so that the object or the geometric structure thereof is displaced and deformed relative to the object. The unit epsilon of strain is the ratio of deformation quantity to original size L, and epsilon is delta L/L and has no dimension. The strain sensor can accurately measure the strain generated by the material structure after being stressed, and therefore, the strain sensor has wide application in the aspect of health monitoring.
At present, the calibration of a high-precision displacement sensor mainly uses a laser interferometer as a standard tracing instrument, and the calibration of the displacement sensor is realized by comparing output values of the displacement sensor and the laser interferometer. Most of the existing displacement and strain sensor calibration devices can only aim at displacement sensors with specific types and specific sizes, have single functions, cannot be completely and effectively utilized, and are troublesome to assemble and disassemble. In the measurement calibration, it is difficult to adjust.
In order to perfect and improve the detection capability of a laboratory and meet the calibration of displacement and strain sensors with common use and wide measuring range, a set of calibration device with high automation degree, convenient assembly and disassembly, simple adjustment, high measurement precision and large measurement range is urgently needed.
Disclosure of Invention
The invention aims to provide a full-automatic displacement and strain sensor calibration device to solve the problems in the prior art.
In order to achieve the purpose, the invention provides the following scheme: the invention provides a full-automatic displacement and strain sensor calibration device, which comprises a laser, a spectroscope mounting plate, a spectroscope, a measuring mirror mounting plate, a measuring mirror, a clamp connecting piece, a movable clamp, a microscope, a positioning strip, a sensor clamping block, a sensor clamping upper cover, a precision positioning table and a precision positioning table housing, wherein the spectroscope mounting plate is arranged on the laser; the precise positioning table housing is covered on the outer side of the precise positioning table; the laser is arranged at one end of the precision positioning table; the spectroscope mounting plate is mounted at the top end of the precision positioning table housing, and the spectroscope is mounted on the spectroscope mounting plate; the measuring mirror mounting plate is mounted at the top end of the precision positioning table, and the measuring mirror is mounted on the measuring mirror mounting plate; the laser, the spectroscope mounting plate, the spectroscope, the measuring mirror mounting plate and the measuring mirror form a precise displacement measuring system; the spectroscope mounting plate, the measuring mirror mounting plate and the movable clamp are sequentially arranged along the laser emitting direction of the laser; the movable clamp is fixed on the measuring mirror mounting plate through the clamp connecting piece; the sensor clamping block and the sensor clamping upper cover form a fixing clamp, the fixing clamp is positioned at one end, far away from the laser, of the precision positioning table, and the fixing clamp is fixed to the top end of the precision positioning table housing through the positioning strip; the microscope is located between the fixing clamp and the precision displacement measuring system, and the microscope is fixed on the precision positioning table housing.
Preferably, the movable clamp comprises a movable clamp upper cover and a movable clamp fixing piece; the movable clamp fixing piece is embedded with a magnet and is fixedly adsorbed on the clamp connecting piece; the width of the upper cover of the movable clamp is smaller than that of the fixed part of the movable clamp.
Preferably, the working face of the clamp connecting piece is a grinding face, a blind threaded hole is formed in the fixing face of the clamp connecting piece, and the clamp connecting piece is fixed on the measuring mirror mounting plate through threads.
Preferably, the microscope comprises a left microscope and a right microscope, and the left microscope and the right microscope are both fixed on the top end face of the precise positioning table housing.
Preferably, the sensor clamping block comprises a front sensor clamping block and a rear sensor clamping block, the front sensor clamping block and the rear sensor clamping block are respectively provided with a countersunk hole and a threaded hole, and the middle parts of the front sensor clamping block and the rear sensor clamping block are respectively provided with arc grooves with different diameters.
Preferably, the sensor clamping upper cover comprises a front sensor clamping upper cover and a rear sensor clamping upper cover, arc grooves with different diameters are formed in the middle of the front sensor clamping upper cover and the middle of the rear sensor clamping upper cover, two U-shaped grooves are formed in the front sensor clamping upper cover and the rear sensor clamping upper cover respectively, and the two U-shaped grooves are symmetrically arranged about the arc grooves.
Preferably, the precise positioning table housing is integrated, a rectangular groove is formed in one side wall of the precise positioning table housing, and a threaded hole and the rectangular groove are formed in the top surface of the precise positioning table housing.
Preferably, the measuring mirror mounting plate is L-shaped, and the side surface of the measuring mirror mounting plate is provided with an O-shaped countersunk groove and a threaded hole; the spectroscope mounting plate is L-shaped, and an O-shaped countersunk groove is formed in the side surface of the spectroscope mounting plate; the positioning strip is provided with a counter bore.
The invention discloses the following technical effects:
1. a full-automatic calibration device for displacement and strain sensors is an integrated instrument, and the problem that the displacement and strain sensors do not have special calibration devices is solved.
2. The microscope reading is designed, the strain is measured, the influence of nonuniform strain at the pasting position on the measurement and calibration of the strain sensor is avoided, and the measurement precision is high.
3. The movable clamp and the fixed clamp with the magnets are designed, the structure is simple, the clamping and the dismounting are convenient, the adjustment is simple, and the clamping problems of displacement and strain sensors with different diameters, different lengths and different types can be solved.
4. The spectroscope and the measuring mirror can be finely adjusted, so that the calibration optical axis of the laser interferometer is coaxial with the measurement axis of the calibrated displacement and strain sensor, and Abbe errors caused by different axes are avoided.
5. The precise positioning table can be controlled by a computer in a full-automatic manner, so that multi-position continuous and rapid measurement can be realized, the working efficiency of measurement is improved, and the labor force of operators is reduced.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without inventive exercise.
FIG. 1 is a schematic structural diagram of a full-automatic displacement and strain sensor calibration apparatus according to the present invention;
FIG. 2 is a schematic view of a movable clamp;
FIG. 3 is a schematic view of a sensor clamp block structure;
FIG. 4 is a schematic diagram of a sensor clamping upper cover structure;
FIG. 5 is a schematic diagram of a measuring mirror mounting plate structure;
FIG. 6 is a schematic view of a spectroscope mounting plate;
the device comprises a laser 1, a spectroscope mounting plate 2, a spectroscope 3, a measuring mirror mounting plate 4, a measuring mirror 5, a clamp connecting piece 6, a movable clamp 7, a movable clamp upper cover 7-1, a movable clamp fixing piece 7-2, a microscope 8, a left microscope 8-1, a right microscope 8-2, a positioning strip 9, a sensor clamping block 10, a rear sensor clamping block 10-1, a front sensor clamping block 10-2, a sensor clamping upper cover 11, a rear sensor clamping upper cover 11-1, a front sensor clamping upper cover 11-2, a precision positioning table 12 and a precision positioning table housing 13.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
Example 1
The invention provides a full-automatic displacement and strain sensor calibration device which comprises a laser 1, a spectroscope mounting plate 2, a spectroscope 3, a measuring mirror mounting plate 4, a measuring mirror 5, a clamp connecting piece 6, a movable clamp 7, a microscope 8, a positioning strip 9, a sensor clamping block 10, a sensor clamping upper cover 11, a precision positioning table 12 and a precision positioning table housing 13.
In this embodiment, adopt marble horizontal work platform, precision positioning platform 12 passes through the screw fixation on marble horizontal work platform, and precision positioning platform encloser 13 passes through the screw fixation on marble horizontal work platform to cover the protection with precision positioning platform 12. The motion platform of the precision positioning table 12 is positioned in the middle of the rectangular groove at the top end of the precision positioning table housing 13.
In this embodiment, the laser 1 is fixed on one side of the housing 13 of the precision positioning stage, and is used as a source tracing standard device. The measuring mirror mounting plate 4 is fixed on the precision positioning table 12 through screws, the measuring mirror mounting plate 4 is L-shaped, an O-shaped countersunk groove and a threaded hole are machined in the side face of the measuring mirror mounting plate, the length of the hole formed in the left direction and the right direction of the O-shaped countersunk groove is large, and the measuring mirror can be adjusted in the left direction and the right direction. The spectroscope mounting plate 2 is fixed on the precision positioning table 12 through screws, the spectroscope mounting plate 2 is L-shaped, an O-shaped countersunk groove is processed on the side surface, the length of the hole of the O-shaped countersunk groove in the up-down direction is larger, and the spectroscope can be adjusted in the up-down direction. The laser 1, the spectroscope mounting plate 2, the spectroscope 3, the measuring mirror mounting plate 4 and the measuring mirror 5 are combined to form a precise displacement measuring system for precisely measuring micro displacement.
In this embodiment, the positioning strip 9 is fixed to the precise positioning table housing 13 by screws, and the plane with the longest length of the positioning strip 9 is parallel to the front end face of the precise positioning table housing 13, so as to indirectly ensure the positioning accuracy of the displacement sensor. The side surfaces of the front sensor clamping block 10-2 and the rear sensor clamping block 10-1 are respectively attached to the other plane with the longest length of the positioning strip 9 and fixed by screws, and at the moment, the front sensor clamping block 10-2 and the rear sensor clamping block 10-1 are parallel to each other. The distance between the front sensor clamping block 10-2 and the rear sensor clamping block 10-1 can be adjusted through threaded holes with different intervals on the precise positioning table housing 13, and arc grooves with different diameters are machined between the front sensor clamping block 10-2 and the rear sensor clamping block 10-1, so that the clamping requirements of displacement sensors with different lengths and different diameters can be met. The calibrated displacement sensor is arranged in the arc grooves on the front sensor clamping block 10-2 and the rear sensor clamping block 10-1 which are parallel to each other, the calibrated displacement sensor is clamped by the cooperation of the arc grooves on the front sensor clamping upper cover 11-2 and the rear sensor clamping upper cover 11-1 and is firmly fixed under the cooperation of hand-screwed screws, if the diameter of the measured displacement sensor is smaller, the front sensor clamping upper cover 11-2 and the rear sensor clamping upper cover 11-1 can be overturned to use the plane of the middle part to be matched with the arc grooves on the front sensor clamping block 10-2 and the rear sensor clamping block 10-1 and be firmly fixed under the cooperation of the hand-screwed screws. The clamp connecting piece 6 is fixed on the measuring mirror mounting plate 4 through screws, can be disassembled and replaced, and the working surface is the surface without threaded holes in the two surfaces with the largest area and is ground. When the right end of the displacement sensor to be measured is fixed through the fixing clamp and the left end is not fixed, the displacement sensor is propped against the working surface of the clamp connecting piece 6 and measurement and calibration are carried out. When the right end of the displacement sensor to be measured is fixed through a fixed clamp, and the left end of the displacement sensor to be measured needs to be fixed, the movable clamp fixing piece 7-2 is adsorbed on the working surface of the clamp connecting piece 6 through a magnet, and then the movable clamp upper cover 7-1 is matched to fix the left end of the displacement sensor. The movable clamp is fixed by adopting magnet adsorption, and is convenient to adjust so as to reduce Abbe errors.
In this embodiment, the microscope 8 includes a left microscope 8-1 and a right microscope 8-2, the two microscopes are fixed on a housing 13 of a precision positioning stage, and a distance L between the left microscope 8-1 and the right microscope 8-2 is determined by precision measurement.
In this embodiment, the precision positioning table 12 can be controlled by a computer in a fully automatic manner, so that the measurement speed is high, and the labor force of operators is reduced. And the computer controls the motion platform of the precision positioning table 12 to carry out precision movement, and simultaneously collects the reading of the laser interferometer as standard displacement and the reading of the displacement sensor as measured reading. For the calibration measurement of the linear ruler, the readings of two microscopes are collected, and then the calculated result of the readings is used as the measured displacement. After a certain distance and a certain number of times of measurement, the standard displacement is compared with the measured displacement, and the basic error, the linearity error, the repeatability error, the return error, the full-scale output and the sensitivity of the measured displacement sensor can be calculated. And (4) measuring and calibrating displacement measuring instruments such as the displacement sensor and the linear ruler.
Example 2
In this embodiment, the measured sensor is an optical fiber strain sensor, and the optical fiber of the optical fiber strain sensor is marked. And fixing one end of the optical fiber strain sensor on the fixed clamp, and fixing the other end of the optical fiber strain sensor on the movable clamp. And allows the markings on the optical fiber to be viewed separately on the two microscopes.
In this embodiment, the fine positioning stage 12 can be fully automatically controlled by a computer. The computer controls the motion platform of the precision positioning table 12 to precisely move, the moving distance of the optical fiber marks on the two microscopes is simultaneously collected, the difference result is used as the optical fiber stretching displacement delta L, and the strain of the optical fiber strain sensor is calculated by the formula epsilon to delta L/L and used as the standard strain. The readings measured by the fiber strain sensor are collected as the measured strain. After a certain distance and a certain number of times of measurement, the standard strain is compared with the measurement strain, and the basic error, the linearity error, the repeatability error, the return error, the full-scale output and the sensitivity of the measured optical fiber strain sensor can be calculated. And measuring and calibrating the optical fiber strain sensor.
In the description of the present invention, it is to be understood that the terms "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on those shown in the drawings, are merely for convenience of description of the present invention, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention.
The above-described embodiments are merely illustrative of the preferred embodiments of the present invention, and do not limit the scope of the present invention, and various modifications and improvements of the technical solutions of the present invention can be made by those skilled in the art without departing from the spirit of the present invention, and the technical solutions of the present invention are within the scope of the present invention defined by the claims.
Claims (8)
1. A full-automatic displacement and strain sensor calibration device is characterized by comprising a laser (1), a spectroscope mounting plate (2), a spectroscope (3), a measuring mirror mounting plate (4), a measuring mirror (5), a clamp connecting piece (6), a movable clamp (7), a microscope (8), a positioning strip (9), a sensor clamping block (10), a sensor clamping upper cover (11), a precision positioning table (12) and a precision positioning table housing (13); the precise positioning table cover shell (13) is covered on the outer side of the precise positioning table (12); the laser (1) is arranged at one end of the precision positioning table (12); the spectroscope mounting plate (2) is mounted at the top end of the precise positioning table cover shell (13), and the spectroscope (3) is mounted on the spectroscope mounting plate (2); the measuring mirror mounting plate (4) is mounted at the top end of the precision positioning table (12), and the measuring mirror (5) is mounted on the measuring mirror mounting plate (4); the laser (1), the spectroscope mounting plate (2), the spectroscope (3), the measuring mirror mounting plate (4) and the measuring mirror (5) jointly form a precise displacement measuring system; the spectroscope mounting plate (2), the measuring mirror mounting plate (4) and the movable clamp (7) are sequentially arranged along the laser emitting direction of the laser (1); the movable clamp (7) is fixed on the measuring mirror mounting plate (4) through the clamp connecting piece (6); the sensor clamping block (10) and the sensor clamping upper cover (11) form a fixing clamp, the fixing clamp is positioned at one end, far away from the laser (1), of the precision positioning table (12), and the fixing clamp is fixed to the top end of the precision positioning table housing (13) through the positioning strip (9); the microscope (8) is located between the fixing clamp and the precision displacement measuring system, and the microscope (8) is fixed on the precision positioning table cover shell (13).
2. The fully automatic displacement, strain sensor calibration device according to claim 1, wherein the movable clamp (7) comprises a movable clamp upper cover (7-1) and a movable clamp fixture (7-2); the movable clamp fixing piece (7-2) is embedded with a magnet, and the movable clamp fixing piece (7-2) is fixedly adsorbed on the clamp connecting piece (6); the width of the movable clamp upper cover (7-1) is smaller than that of the movable clamp fixing piece (7-2).
3. The full-automatic displacement and strain sensor calibrating device according to claim 1, wherein the working surface of the clamp connecting piece (6) is a grinding surface, the fixing surface of the clamp connecting piece (6) is provided with a blind threaded hole, and the clamp connecting piece (6) is fixed on the measuring mirror mounting plate (4) in a threaded manner.
4. The fully automated displacement, strain sensor calibration device according to claim 1, wherein the microscope (8) comprises a left microscope (8-1) and a right microscope (8-2), the left microscope (8-1) and the right microscope (8-2) each being fixed on the top end face of the fine positioning stage housing (13).
5. The full-automatic displacement and strain sensor calibrating device according to claim 1, wherein the sensor clamping block (10) comprises a front sensor clamping block (10-2) and a rear sensor clamping block (10-1), the front sensor clamping block (10-2) and the rear sensor clamping block (10-1) are respectively provided with a countersunk hole and a threaded hole, and the middle parts of the front sensor clamping block (10-2) and the rear sensor clamping block (10-1) are respectively provided with arc grooves with different diameters.
6. The full-automatic displacement and strain sensor calibrating device according to claim 5, wherein the sensor clamping upper cover (11) comprises a front sensor clamping upper cover (11-2) and a rear sensor clamping upper cover (11-1), arc grooves with different diameters are formed in the middle of the front sensor clamping upper cover (11-2) and the middle of the rear sensor clamping upper cover (11-1), two U-shaped grooves are formed in the front sensor clamping upper cover (11-2) and the rear sensor clamping upper cover (11-1), and the two U-shaped grooves are symmetrically arranged around the arc grooves.
7. The full-automatic displacement and strain sensor calibrating device according to claim 1, wherein the precise positioning table housing (13) is a one-piece housing, a side wall of the precise positioning table housing (13) is provided with a rectangular groove, and a top surface of the precise positioning table housing (13) is provided with a threaded hole and a rectangular groove.
8. The full-automatic displacement and strain sensor calibrating device according to claim 1, wherein the measuring mirror mounting plate (4) is L-shaped, and an O-shaped countersunk groove and a threaded hole are formed in the side surface of the measuring mirror mounting plate (4); the spectroscope mounting plate (2) is L-shaped, and an O-shaped countersunk groove is formed in the side surface of the spectroscope mounting plate (2); the positioning strip (9) is provided with a counter bore.
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| CN202110596924.2A CN113310412B (en) | 2021-05-31 | 2021-05-31 | Full-automatic displacement and strain sensor calibrating device |
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| CN202110596924.2A CN113310412B (en) | 2021-05-31 | 2021-05-31 | Full-automatic displacement and strain sensor calibrating device |
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