CN104362593A - Quick arc extinguishing circuit of direct-current magnetron sputtering film coating power supply - Google Patents
Quick arc extinguishing circuit of direct-current magnetron sputtering film coating power supply Download PDFInfo
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- CN104362593A CN104362593A CN201410530034.1A CN201410530034A CN104362593A CN 104362593 A CN104362593 A CN 104362593A CN 201410530034 A CN201410530034 A CN 201410530034A CN 104362593 A CN104362593 A CN 104362593A
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- power switch
- switch pipe
- power supply
- switch tube
- circuit
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Abstract
The invention discloses a quick arc extinguishing circuit of a direct-current magnetron sputtering film coating power supply. The circuit comprises a first power switch tube and a second power switch tube; the first power switch tube is connected to the output end of the direct-current power supply serially, the second power switch tube is connected to the output end of the direct-current power supply parallelly, and one end of the second power switch tube is connected between the first power switch tube and the input end of the direct-current power supply parallelly; the second power switch tube is connected to a buffering energy storage circuit parallelly; the control electrodes of the first power switch tube and second power switch tube are connected to a control drive. The quick arc extinguishing circuit is simple in structure, small in size and high in real time performance, and an existing power supply can be optimized conveniently; the power supply is capable of operating on the process condition of generating arcs frequently, the energy of arc is reduced greatly, and the quality of the magnetron sputtering film is improved.
Description
Technical field
The present invention relates to magnetically controlled DC sputtering plated film field, particularly a kind of magnetically controlled DC sputtering plated film power supply fast arc extinction circuit.
Background technology
Usually can observe in vacuum coating cavity in each stage of coating process and beat arc phenomenon, because current ratio running current when beating arc is many greatly, the peak value of strong arc current is often several times as much as running current, the output of power supply close to short-circuit condition, the serious threat safe operation of power supply.Therefore current existing power supply is all beat for arc chamber the operating characteristic that arc is normality; the output series connection Large Copacity inductance of designing power supply carrys out the impact of restrain arc electric current to power supply; design arc stream testing circuit simultaneously; the high-power switch tube of inverter is turned off, with the safety of protection power source when arc stream produces.But the stray inductance of circuit, the leakage inductance of transformer, the accumulators such as output current limiting inductance can produce stronger arc light at its backward energy of moment that inverter switching device pipe turns off to arc chamber release, so existing power supply does not possess the function of arc extinguishing in design, the almost cisco unity malfunction when beating arc and frequently occurring, receives very large impact in the quality of beating film under arc operating state.
Summary of the invention
Technical problem to be solved by this invention is, not enough for prior art, provides a kind of magnetically controlled DC sputtering plated film power supply fast arc extinction circuit, reduces the energy beating arc, thus improves the quality of sputter-deposited thin films.
For solving the problems of the technologies described above, the technical solution adopted in the present invention is: a kind of magnetically controlled DC sputtering plated film power supply fast arc extinction circuit, comprise the first power switch pipe and the second power switch pipe, described first power switch pipe is connected on DC power output end, described second power switch pipe is in parallel with the output of described DC power supply, and described second power switch pipe one end be connected between described first power switch pipe and the input of described DC power supply; Described second power switch pipe and buffering accumulated energy circuit in parallel; Described first power switch pipe is extremely all connected with control and drive system with the control of the second power switch pipe; When occurring to beat arc phenomenon, described control and drive system controls the first power switch pipe and turns off, then the energy trasfer that described DC power supply inductance produces opens the second power switch pipe in described buffering accumulated energy circuit, after described buffering accumulated energy circuit discharging terminates, described control and drive system controls described second power switch pipe and turns off, and opens described first power switch pipe.
Described buffering accumulated energy circuit comprises diode and the resistance with described diodes in parallel, the negative electrode of described diode is connected with electric capacity one end, the anode of described diode connects the collector electrode of described second power switch pipe, the emitter of another termination second power switch pipe of described capacitor.
Compared with prior art, the beneficial effect that the present invention has is: circuit structure of the present invention is simple, and volume is little, real-time, facilitates existing power supply add-assembly.The present invention can make power work under the process conditions of arc are beaten in frequent generation, greatly reduces the energy beating arc, thus improves the quality of sputter-deposited thin films.
Accompanying drawing explanation
Fig. 1 is one embodiment of the invention circuit theory diagrams;
Fig. 2 is one embodiment of the invention application schematic diagram.
Embodiment
As shown in Figure 1, one embodiment of the invention comprises the first power switch pipe V1 and the second power switch pipe V2, described first power switch pipe is connected on DC power output end, described second power switch pipe is in parallel with the output of described DC power supply, and described second power switch pipe one end be connected between described first power switch pipe and the input of described DC power supply; Described second power switch pipe and buffering accumulated energy circuit in parallel; Described first power switch pipe is extremely all connected with control and drive system with the control of the second power switch pipe; Described buffering accumulated energy circuit comprises is connected with storage capacitor C1 by diode V3 and current-limiting resistance R1 parallel connection.
In Fig. 1: V1 is IGBT module or power field effect pipe, make electronic arc eliminating switch; V2 is IGBT module or power field effect pipe, to release switch as electronics; V3 is fast recovery diode, makes the quick charge path of C1; R1 is high-power current-limiting resistance, when the discharging current of V2 conducting limit C1; C1 is high-voltage capacitance, the energy that memory circuit inductance is released.
In the present invention, power switch pipe can adopt IGBT module or power field effect pipe; Diode V3 is big current high back-pressure fast recovery diode; Current-limiting resistance R1 is high-power current-limiting resistance.
As shown in Figure 2, operation principle of the present invention is as follows:
The operating state that arc does not occur to beat fast arc extinction circuit is: V1 conducting, and V2 ends, and source current flows out from the positive pole of power supply, negative electrode is flowed to through anode (arc chamber shell), flow to the negative pole of power supply again, then by the negative electrode of V1 through inductance L 1 and rectifier bridge, flow back into the secondary of transformer.
When beating arc detection system and judging to occur to beat arc, turn off inverter switching device pipe, turn off V1 again to cut off the loop of arc current, circuit fall apart strays sense, transformer leakage inductance, output current limiting inductance store energy because of V1 turn off do not release by arc chamber, but be stored in C1 by V3 transfer, then V2 is opened, the energy stored in C1 is released by V2 through R1 current limliting again, after C1 electric discharge terminates, turn off V2, open V1, allow the work of inverter switching device pipe, so far complete the work period of once playing arc management.The work period of whole arc-suppression circuit, the switching speed of V1, V2 and inverter, R1, C1 time constant was determined, generally can reach 25 us by controller.Because the speed of arc extinguishing is fast, and energy to arc chamber injection during arc extinguishing is very little, effectively ensures that the quality of film is by the impact of beating arc.
Claims (3)
1. a magnetically controlled DC sputtering plated film power supply fast arc extinction circuit, it is characterized in that, comprise the first power switch pipe and the second power switch pipe, described first power switch pipe is connected on DC power output end, described second power switch pipe is in parallel with the output of described DC power supply, and described second power switch pipe one end be connected between described first power switch pipe and the input of described DC power supply; Described second power switch pipe and buffering accumulated energy circuit in parallel; Described first power switch pipe is extremely all connected with control and drive system with the control of the second power switch pipe; When occurring to beat arc phenomenon, described control and drive system controls the first power switch pipe and turns off, then the energy trasfer that described DC power supply inductance produces opens the second power switch pipe in described buffering accumulated energy circuit, after described buffering accumulated energy circuit discharging terminates, described control and drive system controls described second power switch pipe and turns off, and opens described first power switch pipe.
2. magnetically controlled DC sputtering plated film power supply fast arc extinction circuit according to claim 1, it is characterized in that, described buffering accumulated energy circuit comprises diode and the resistance with described diodes in parallel, the negative electrode of described diode is connected with electric capacity one end, the anode of described diode connects the collector electrode of described second power switch pipe, the emitter of another termination second power switch pipe of described capacitor.
3. magnetically controlled DC sputtering plated film power supply fast arc extinction circuit according to claim 1, it is characterized in that, the work period of described fast arc extinction circuit is 25us.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410530034.1A CN104362593A (en) | 2014-10-10 | 2014-10-10 | Quick arc extinguishing circuit of direct-current magnetron sputtering film coating power supply |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410530034.1A CN104362593A (en) | 2014-10-10 | 2014-10-10 | Quick arc extinguishing circuit of direct-current magnetron sputtering film coating power supply |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104362593A true CN104362593A (en) | 2015-02-18 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410530034.1A Pending CN104362593A (en) | 2014-10-10 | 2014-10-10 | Quick arc extinguishing circuit of direct-current magnetron sputtering film coating power supply |
Country Status (1)
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| CN (1) | CN104362593A (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101682090A (en) * | 2007-05-12 | 2010-03-24 | 许廷格电子有限公司 | Circuit and method for reducing electrical energy stored in a lead inductance for fast extinction of plasma arcs |
| CN103436851A (en) * | 2013-08-13 | 2013-12-11 | 西安理工大学 | Electric arc extinguishing method for magnetron sputtering technology |
-
2014
- 2014-10-10 CN CN201410530034.1A patent/CN104362593A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101682090A (en) * | 2007-05-12 | 2010-03-24 | 许廷格电子有限公司 | Circuit and method for reducing electrical energy stored in a lead inductance for fast extinction of plasma arcs |
| CN103436851A (en) * | 2013-08-13 | 2013-12-11 | 西安理工大学 | Electric arc extinguishing method for magnetron sputtering technology |
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| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20150218 |
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| RJ01 | Rejection of invention patent application after publication |