CN104362064B - A kind of electrode structure of vacuum arc discharge - Google Patents
A kind of electrode structure of vacuum arc discharge Download PDFInfo
- Publication number
- CN104362064B CN104362064B CN201410671576.0A CN201410671576A CN104362064B CN 104362064 B CN104362064 B CN 104362064B CN 201410671576 A CN201410671576 A CN 201410671576A CN 104362064 B CN104362064 B CN 104362064B
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- Prior art keywords
- anode
- rod
- discharge
- minus plate
- pole
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- 238000010891 electric arc Methods 0.000 title claims abstract description 24
- 230000000712 assembly Effects 0.000 claims abstract description 14
- 238000000429 assembly Methods 0.000 claims abstract description 14
- 238000009413 insulation Methods 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 239000000463 material Substances 0.000 description 11
- 238000000034 method Methods 0.000 description 6
- XMWRBQBLMFGWIX-UHFFFAOYSA-N C60 fullerene Chemical compound C12=C3C(C4=C56)=C7C8=C5C5=C9C%10=C6C6=C4C1=C1C4=C6C6=C%10C%10=C9C9=C%11C5=C8C5=C8C7=C3C3=C7C2=C1C1=C2C4=C6C4=C%10C6=C9C9=C%11C5=C5C8=C3C3=C7C1=C1C2=C4C6=C2C9=C5C3=C12 XMWRBQBLMFGWIX-UHFFFAOYSA-N 0.000 description 5
- 229910003472 fullerene Inorganic materials 0.000 description 5
- 239000010405 anode material Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000011265 semifinished product Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Discharge Heating (AREA)
Abstract
The present invention relates to the production equipment of production equipment, especially vacuum arc discharge, the electrode structure of a kind of vacuum arc discharge.The present invention proposes the electrode structure of a kind of vacuum arc discharge, including a cathode assembly and an anode assemblies.This cathode assembly includes a cathode rod, a minus plate and a cathodic discharge pole, this anode assemblies includes an anode rod, wherein, this cathode rod and this anode rod parallel interval are arranged, this minus plate is fitted vertically the one end being connected to this cathode rod, this cathodic discharge pole is fitted vertically and is connected on this minus plate, and the end of the end of this cathodic discharge pole and this anode rod has a spacing, and this cathodic discharge pole and this anode rod is arranged in parallel and between there is a difference in height.The present invention, in vacuum arc furnace ignition, carries out electrode arc electric discharge.
Description
Technical field
The present invention relates to the production equipment of production equipment, especially vacuum arc discharge, the electrode structure of a kind of vacuum arc discharge.
Background technology
Arc process is used to prepare some materials, if the materials such as fullerene, magnesia crystal, CNT are a kind of commonly used technology.Utilizing arc process to prepare in the production equipment of material, vacuum discharge stove is main device, and one of its core component is sparking electrode.Discharge electrode structure for vacuum DC arc discharge, use negative electrode exotic material at present, anode uses consumable material or exotic material directly to discharge, the anode overwhelming majority consumed during electric discharge is transferred directly on negative electrode pole, cathodic discharge electrode is caused to move forward, arc column, arc root shift, and affect arc discharge effect, it is most important that make the arc column length of most critical in arc discharge control to become extremely difficult.
When collecting power applications produced by arc discharge post consumption anode for needs (as arc process generates fullerene), the existing electrode structure anode overwhelming majority is transferred on negative electrode form negative electrode pole, and the powder that can collect is considerably less.
Summary of the invention
Therefore, the present invention proposes the electrode structure of a kind of vacuum arc discharge.The anode that this electrode structure can make the overwhelming majority be consumed is non-cohesive on negative electrode, and arc column length, and arc column, arc root position are easily controlled.This electrode structure is applied in arc process generates fullerene, and the semi-finished product can collected in the case of same raw material are significantly increased, and productivity is also substantially improved.
The present invention adopts the following technical scheme that realization:
The electrode structure of a kind of vacuum arc discharge, including a cathode assembly and an anode assemblies.This cathode assembly includes a cathode rod, a minus plate and a cathodic discharge pole, this anode assemblies includes an anode rod, wherein, this cathode rod and this anode rod parallel interval are arranged, this minus plate is fitted vertically the one end being connected to this cathode rod, this cathodic discharge pole is fitted vertically and is connected on this minus plate, and the end of the end of this cathodic discharge pole and this anode rod has a spacing, and this cathodic discharge pole and this anode rod is arranged in parallel and between there is a difference in height.
The present invention uses as above technical scheme, it is achieved that a kind of applicable arc process generates the electrode structure of the vacuum arc discharge of fullerene.The anode that this electrode structure can make the overwhelming majority be consumed is non-cohesive on negative electrode, and arc column length, and arc column, arc root position are easily controlled.This electrode structure is applied and is being closed arc process generation fullerene, and the semi-finished product can collected in the case of same raw material are significantly increased, and productivity is also substantially improved.
Accompanying drawing explanation
Fig. 1 is the electrode structure schematic diagram of the vacuum arc discharge of one embodiment of the invention；
Fig. 2 is minus plate and the perspective view of cathodic discharge pole of this embodiment.
Detailed description of the invention
In conjunction with the drawings and specific embodiments, the present invention is further described.
Refering to shown in Fig. 1, electrode structure as the vacuum arc discharge of a preferred embodiment of the present invention, can be arranged in the body of heater of vacuum arc furnace ignition by a furnace wall fixed flange 30 including cathode assembly 10 and an anode assemblies 20, this cathode assembly 10 and anode assemblies 20.This cathode assembly 10 includes cathode rod 101, minus plate 102 and a cathodic discharge pole 103, and this anode assemblies 20 includes an anode rod 201.Wherein, this cathode rod 101 and this anode rod 201 are that parallel interval is arranged, this minus plate 102 is fitted vertically the one end being connected to this cathode rod 101, this cathodic discharge pole 103 is fitted vertically and is connected on this minus plate 102, and the end of the end of this cathodic discharge pole 103 and this anode rod 201 has a spacing, and this cathodic discharge pole 103 and this anode rod 201 is arranged in parallel and between there is a difference in height.So, when passing through to be installed on vacuum arc furnace ignition by furnace wall fixed flange 30 at this cathode assembly 10 and anode assemblies 20, this anode rod 201 is positioned at this cathodic discharge pole 103 lower position.
Supplementary notes be, the fixing connection of above-mentioned each parts, as this minus plate 102 and this cathode rod 101 fixing be connected, this cathodic discharge pole 103 and the fixing connected mode of this minus plate 102 can including, but not limited to threaded, weld, rivet, one-body molded be connected.This embodiment such as it is by the screw 1021 on minus plate 102 and utilize bolt 1011 to be locked in the end of cathode rod 101, and cathodic discharge pole 103 is integrated with this minus plate 102.
In this embodiment, this cathodic discharge pole 103 uses and can make by exotic material, if the materials such as tungsten, molybdenum, graphite are when 3000 DEG C of temperatures above, can show good electric conductivity, each to stability.This anode rod 201 is according to application demand, and available multiple material is made, and anode predominantly consumes pole.
The main part of this cathode rod 101 and this anode rod 201 is all made with band cooling structure stainless steel bar, and the minus plate 102 on cathode rod 101 is resistant to elevated temperatures minus plate, and anode rod 201 fills consumable anode discharge material.
Preferably; in addition to filling consumable anode discharge material on this anode rod 201; the also other end at anode rod fills a fixing connection one anode thermal insulation protection set 202; this anode thermal insulation protection set 202 can be a graphite thermal insulation protection set, thus protects the main body of the anode rod 201 of stainless steel not deformed by high arc temperature radiation or melt.
On the minus plate 102 of this embodiment, the fixing protruding part connected is this cathodic discharge pole 103 perpendicularly thereto.Preferably, distal end faces 103A of this cathodic discharge pole 103 has an inclined-plane, and this inclined-plane is cathodic discharge arc butt face.The cylinder height of this cathodic discharge pole 103 of this embodiment with diameter be according to discharge current and voltage depending on, and the cathodic discharge arc root face area of its distal end faces 103A and angle be also according to discharge current and whole electrode structure size depending on；Discharge current is the biggest, and corresponding arc root face area is the biggest.
It is then preferred that, this cathodic discharge pole 103 is to have a height apart from the bottom 1021 of this minus plate 102 and be fitted vertically and be connected on this minus plate 102, thus the region 102A that this minus plate 102 is between its bottom 1021 and this cathodic discharge pole 102 are attached thereto is as a preheating contact area.That is, area below 102A of the cathodic discharge pole 103 that this minus plate 102 is positioned at projection in the drawings is preheating contact area.Of course, in actual production, if the concrete application of equipment need not preheating, this preheating contact area can be cancelled, and directly this cathodic discharge pole 103 is fixedly connected on the bottom 1021 of this minus plate 102.
Owing to this cathode assembly 10 and anode assemblies 20 constitute back-shaped structure, cathodic discharge pole 103 and this anode rod 201 form the difference in height of.This cathode assembly 10 and anode assemblies 20 are being contained on a vacuum arc furnace ignition, by vacuum arc stove evacuation, are utilizing the electrode structure of this embodiment to carry out arc discharge under vacuum conditions.During energising, negative electrode produces a Lorentz force longitudinal relative to arc column, and this Lorentz force produces a downward active force to arc column.Cathodic discharge pole 103 and the difference in level of anode rod 201, make arc column be ultimately formed into one under the effect of negative electrode Lorentz force from anode discharge pole to cathodic discharge arc root inclined ellipse arc column simultaneously.
The electronics of negative electrode is got on anode, the atom transient evaporation making the extreme face of the anode discharge on anode rod 201 ionizes and departs from anode discharge pole and flies to towards cathodic discharge pole, at arc column district B1, the cation of anode rod 201 injection deviates cathodic discharge pole 103 under the effect of longitudinal Lorentz force, the gaseous state anode material of final overwhelming majority anode rod 201 injection is all without striking on cathodic discharge pole 103, but the arc column district B1 that flies out, cooling returns to solid state powder state and is attached on vacuum arc furnace wall rapidly.
By the electrode structure of this embodiment, after arc discharge being made, negative electrode adheres to the anode material being consumed the most in a large number, it is thus possible to make arc discharge arc column, arc root more stable, overwhelming majority anode material is all attached on vacuum furnace wall with powdered form simultaneously, and the required product yield making arc discharge generate is greatly improved.
Although specifically showing in conjunction with preferred embodiment and describing the present invention; but those skilled in the art should be understood that; in the spirit and scope of the present invention limited without departing from appended claims; the present invention can be made a variety of changes in the form and details, be protection scope of the present invention.
Claims (4)
1. the electrode structure of a vacuum arc discharge, including a cathode assembly and an anode assemblies, it is characterized in that: this cathode assembly includes a cathode rod, one minus plate and a cathodic discharge pole, this anode assemblies includes an anode rod, wherein, this cathode rod and this anode rod parallel interval are arranged, this minus plate is fitted vertically the one end being connected to this cathode rod, this cathodic discharge pole is fitted vertically and is connected on this minus plate, and the end of this cathodic discharge pole has a spacing with the end of this anode rod, and this cathodic discharge pole and this anode rod is arranged in parallel and between there is a difference in height；When this cathode assembly and anode assemblies are installed on vacuum arc furnace ignition, this anode rod is positioned at this cathodic discharge pole lower position.
The electrode structure of vacuum arc discharge the most according to claim 1, it is characterised in that: the distal end faces of this cathodic discharge pole has an inclined-plane.
The electrode structure of vacuum arc discharge the most according to claim 1, it is characterized in that: this cathodic discharge pole is to have a height apart from the bottom of this minus plate and be fitted vertically and be connected on this minus plate, thus the region that this minus plate is between its bottom and this cathodic discharge pole are attached thereto is as a preheating contact area.
The electrode structure of vacuum arc discharge the most according to claim 1, it is characterised in that: this anode assemblies includes an anode thermal insulation protection set, and this anode rod is fixing with this anode thermal insulation protection set is connected setting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410671576.0A CN104362064B (en) | 2014-11-21 | 2014-11-21 | A kind of electrode structure of vacuum arc discharge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410671576.0A CN104362064B (en) | 2014-11-21 | 2014-11-21 | A kind of electrode structure of vacuum arc discharge |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104362064A CN104362064A (en) | 2015-02-18 |
| CN104362064B true CN104362064B (en) | 2016-08-17 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410671576.0A Active CN104362064B (en) | 2014-11-21 | 2014-11-21 | A kind of electrode structure of vacuum arc discharge |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111195732A (en) * | 2018-11-16 | 2020-05-26 | 安世亚太科技股份有限公司 | System and method for preparing metal powder |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103466593A (en) * | 2013-08-27 | 2013-12-25 | 西北工业大学 | Improved temperature control electric arc furnace and method for preparing semiconductor single wall carbon nano tubes |
| CN203620620U (en) * | 2013-11-12 | 2014-06-04 | 厦门福纳新材料科技有限公司 | High-efficiency fullerene production device with electric arc process |
| CN203620619U (en) * | 2013-11-12 | 2014-06-04 | 厦门福纳新材料科技有限公司 | Fullerene electric arc device |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3998241B2 (en) * | 2002-10-18 | 2007-10-24 | キヤノン株式会社 | Manufacturing method of substrate on which carbon fiber is fixed |
| EP2031085A1 (en) * | 2006-06-22 | 2009-03-04 | Shinmaywa Industries, Ltd. | Arc evaporation source and vacuum evaporation system |
| US7816619B2 (en) * | 2007-03-21 | 2010-10-19 | Nebojsa Jaksic | Methods and apparatus for manufacturing carbon nanotubes |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103466593A (en) * | 2013-08-27 | 2013-12-25 | 西北工业大学 | Improved temperature control electric arc furnace and method for preparing semiconductor single wall carbon nano tubes |
| CN203620620U (en) * | 2013-11-12 | 2014-06-04 | 厦门福纳新材料科技有限公司 | High-efficiency fullerene production device with electric arc process |
| CN203620619U (en) * | 2013-11-12 | 2014-06-04 | 厦门福纳新材料科技有限公司 | Fullerene electric arc device |
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| CN104362064A (en) | 2015-02-18 |
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Denomination of invention: An electrode structure for vacuum arc discharge Effective date of registration: 20221009 Granted publication date: 20160817 Pledgee: China Everbright Bank Limited by Share Ltd. Xiamen branch Pledgor: XIAMEN FUNA NEW MATERIAL TECHNOLOGY Co.,Ltd. Registration number: Y2022980017689 |