CN104359951A - Plug-in piece for measuring internal humidity and heat flux density distribution of fuel battery - Google Patents

Plug-in piece for measuring internal humidity and heat flux density distribution of fuel battery Download PDF

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Publication number
CN104359951A
CN104359951A CN201410636170.9A CN201410636170A CN104359951A CN 104359951 A CN104359951 A CN 104359951A CN 201410636170 A CN201410636170 A CN 201410636170A CN 104359951 A CN104359951 A CN 104359951A
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layer
humidity
fuel battery
thermal flowmeter
film thermal
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CN104359951B (en
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郭航
王政
叶芳
马重芳
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Beijing University of Technology
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Beijing University of Technology
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Abstract

The invention discloses a plug-in piece for measuring internal humidity and heat flux density distribution of a fuel battery. The plug-in piece is a device for measuring the internal humidity distribution and heat flux density distribution of the fuel battery, wherein a leak and a rib corresponding to a flow field plate passage and a ridge of the fuel battery are arranged on a conductive substrate, and a humidity and heat flux density joint measurement sensor is arranged on the rib; and the humidity and heat flux density joint measurement sensor is manufactured by adopting a vacuum evaporation coating method and comprises eight layers of films. A lead is also manufactured by adopting the vacuum evaporation coating method, is used for transmitting electric signals, and is expanded to form a pin when extending to the edge of a flow field plate so as to facilitate connection between the lead and external data acquisition equipment. By adopting the plug-in piece disclosed by the invention, the internal humidity distribution and heat flux density distribution of the fuel battery can be measured online synchronously; and the plug-in piece can be used as an independent component to be arranged in the fuel battery, is simple in structure and wide in application range, and can be matched to fuel battery flow field plates in the shape of a parallel flow passage, a snakelike flow passage, an alternative form flow passage or other flow passages.

Description

Fuel battery inside humidity-heat flux distribution measures inserted sheet
Technical field
The present invention relates to a kind of fuel battery inside humidity-heat flux distribution and measure inserted sheet, belong to fuel cell detection technique field.
Background technology
The uneven meeting of fuel battery inside membrane electrode electrochemical reaction speed on the surface causes the uneven of internal temperature field, if fuel cell structure design is unreasonable, the heat that fuel cell will be caused to produce in operational process cannot be discharged in time, thus the exception of fuel battery inside temperature can be caused to raise, even make membrane electrode lose efficacy.
And humidity is also fuel battery performance important factor in order, it does not singly affect the proton conduction of fuel battery proton exchange film, but also the number of fuel battery inside resultant of reaction water can be affected, the heat and mass of fuel cell can be affected again simultaneously, if fuel battery inside assembles too much water, will produce water logging phenomenon, cause reactant fully can not contact with membrane electrode, performance reduces.
Therefore by important theoretical foundation can be provided for choosing optimized operation operating mode and optimizing fuel cell structure design to the measurement of fuel battery inside humidity and heat flux distribution.And most researcher has just carried out measuring study for the heat flow density of fuel battery inside or humidity single parameter, the measurement of heat flow density adopts the method at fuel battery inside implanted sensor mostly, but sensor bulk is large, need to carry out special transformation to fuel cell, thus add the complexity of surveying work; For moisture measurement, main method has to be implanted commercial humidity sensor by transforming fuel cell or adopts etching technics making humidity sensor to measure, and which increases the complexity of surveying work, adds cost, all there is certain destruction to fuel cell structure, affect the stable of its performance.
The present invention is furnished with humidity-heat flow density translocation sensor on conductive substrate, and it comprises humicap hygrometric unit and film thermal flowmeter calorimetric stream unit simultaneously, achieves synchronous on-line measurement fuel battery inside moisture distribution and heat flux distribution; This measurement mechanism, independent of tested fuel cell, without the need to carrying out structure of modification to fuel cell, decreases the dismounting number of times to fuel cell, thus ensure that the stable of fuel battery performance.
Summary of the invention
The object of the present invention is to provide the device of a kind of energy synchronous on-line measurement fuel battery inside moisture distribution and heat flux distribution.This device can be used as individual member and is installed on fuel battery inside, and structure is simple, easy to make, without the need to carrying out special transformation to fuel battery inside structure, simplifies the step of fuel battery inside humidity and heat flux distribution measurement.
For realizing above-mentioned technical purpose, technical scheme of the present invention is as follows: fuel battery inside humidity-heat flux distribution measures inserted sheet, comprises conductive substrate 1, crack 2, muscle 3, humidity-heat flow density translocation sensor 4, lead-in wire 5, pilot hole 7; Described crack 2, muscle 3 are arranged on conductive substrate 1, muscle 3 is between two adjacent cracks 2, crack 2 is identical with the shape and size of ridge with fuel cell flow field board upper runner respectively with the shape and size of muscle 3, and crack 2 is corresponding with fuel cell flow field board runner and ridge respectively with the position of muscle 3; Described humidity-heat flow density translocation sensor 4 is arranged on muscle 3; One end of lead-in wire 5 connects with the wiring exit of humidity-heat flow density translocation sensor 4, and the other end extends to the edge of conductive substrate 1 and amplifies formation pin 6; Pilot hole 7 is symmetrical, be evenly arranged on conductive substrate 1 surrounding, in order to be fixed on fuel cell flow field board by conductive substrate 1; During fuel cell assembling, fuel battery inside humidity-heat flux distribution is measured inserted sheet and is arranged in the middle of fuel cell flow field board and membrane electrode, its be provided with humidity-heat flow density translocation sensor 4 facing to membrane electrode side also close contact with it.
Described humidity-heat flow density translocation sensor 4 comprises humicap hygrometric unit and film thermal flowmeter calorimetric stream unit, vacuum evaporation coating film method is adopted to make, comprise eight layer films: ground floor is the thick silicon dioxide insulating layer 16 for 0.08-0.12 μm of evaporation on muscle 3, as dielectric substrate, the second layer is the thick bottom electrode aluminium coat 17 for 1.0-1.2 μm of evaporation on silicon dioxide insulating layer 16, third layer is above bottom electrode aluminium coat 17, apply the high molecular polymer humidity-sensitive medium layer 18 that thick layer is 0.5-1 μm, 4th layer is the thick top electrode aluminium coat 19 for 1.0-1.2 μm of evaporation above high molecular polymer humidity-sensitive medium layer 18, described top electrode aluminium coat 19, high molecular polymer humidity-sensitive medium layer 18 and bottom electrode aluminium coat 17 form humicap, and head end is humicap wiring exit 35, and wherein the shape of top electrode aluminium coat 19 is snakelike, layer 5 is the thick film thermal flowmeter copper coating 20 for 0.1-0.12 μm of evaporation on silicon dioxide insulating layer 16, layer 6 is the thick film thermal flowmeter nickel coating 21 for 0.1-0.12 μm of evaporation on silicon dioxide insulating layer 16, layer 7 is the thick silicon dioxide layer of protection 22 for 0.08-0.12 μm of evaporation on previous coating basis, the 8th layer by evaporation thick layer above the right silicon dioxide coating of node 33 on film thermal flowmeter be the thick thermoresistance layer 23 of silicon dioxide of 1.2-2.0 μm, the shape of described film thermal flowmeter copper coating 20 and film thermal flowmeter nickel coating 21 is respectively the quadrilateral be parallel to each other, head and the tail are overlap joint mutually, lap-joint to form on film thermal flowmeter node 34 under node 33 and film thermal flowmeter, and head end is film thermal flowmeter wiring exit 32.
Described film thermal flowmeter wiring exit 32 and humicap wiring exit 35 are all made into circle, and are all arranged in the same side of silicon dioxide insulating layer 16.
The shape of described conductive substrate 1 can be made into square, circular, polygon, trapezoidal, triangle, irregular figure; On conductive substrate 1, the shape of crack 2 can be snakelike crack, parallel crack, poroid crack, staggered crack.
In described humidity-heat flow density translocation sensor 4, the coat of metal material of upper/lower electrode in humicap, also can select gold, copper, platinum to replace.
The shape of described top electrode aluminium coat 19 sets according to the shape of mask, and its shape also can be zigzag, pectination.
In described film thermal flowmeter coat of metal material, the simple metal coating be made up of copper and mickel can also select tungsten and nickel, copper and cobalt, molybdenum and nickel, antimony and cobalt to substitute, and metal mixture material such as copper and constantan also can be adopted to substitute.
The shape of described film thermal flowmeter copper coating 20 and film thermal flowmeter nickel coating 21 sets according to the shape of mask, and its shape can also be strip, arc, rhombus, and the head and the tail mutually rear shape of overlap joint can be serrate, arc, waveform, zigzag.
The thick thermoresistance layer 23 of described silicon dioxide also can be positioned at the top of node 34 under film thermal flowmeter.
Node 34 under node 33, film thermal flowmeter is at least comprised on a pair film thermal flowmeter in film thermal flowmeter in described humidity-heat flow density translocation sensor 4.
The shape of described film thermal flowmeter wiring exit 32 and humicap wiring exit 35 also can be made as ellipse, rectangle, trapezoidal, triangle, the both sides being arranged in silicon dioxide insulating layer 16 that its position can be relative respectively.
The width of lead-in wire 5 is 0.1-0.2mm, amplifies in the edge of conductive substrate 1, forms pin 6.
Lead-in wire 5 adopts the four-level membrane of vacuum evaporation coating film method evaporation to form: ground floor is the lead-in wire silicon dioxide insulating layer 36 of thick 0.08-0.12 μm, the second layer is the lead-in wire copper coating 37 of thick 0.1-0.12 μm, third layer is the lead-in wire gold plate 38 of thick 0.1-0.12 μm, and most last layer is the lead-in wire silicon dioxide layer of protection 39 of thick 0.05-0.1 μm; Wherein, at pin 6 place not evaporation lead-in wire silicon dioxide layer of protection 39.
Compared with prior art, the present invention has following beneficial effect.
Fuel battery inside humidity of the present invention-heat flux distribution measures inserted sheet, on the muscle of conductive substrate, arrange humidity-heat flow density translocation sensor, crack on its conductive substrate is corresponding with the runner of tested fuel cell flow field board, do not affect reactant to spread to membrane electrode direction, the synchro measure to fuel battery inside moisture distribution and heat flux distribution can be realized in fuel cell operation; When assembling with fuel cell, this contrive equipment is arranged in the middle of fuel cell flow field board and membrane electrode, its structure is independent of tested fuel cell, do not need to carry out special transformation to other structures such as fuel cell flow field board or pole plate, reduce by the impact of the implantation of measurement mechanism on fuel battery performance; Meanwhile, this apparatus structure is simple, easy to make, applied widely, can adapt to the fuel cell flow field board of parallel fluid channels, serpentine flow path, staggered runner or other abnormal flow road shape.
Accompanying drawing explanation
Fig. 1 is that the parallel crack of fuel battery inside humidity-heat flux distribution measures the subjective schematic diagram of inserted sheet;
Fig. 2 is the subjective schematic diagram that fuel battery inside humidity-heat flux distribution measures single humidity-heat flow density translocation sensor on inserted sheet;
Fig. 3 is the Making programme figure that fuel battery inside humidity-heat flux distribution measures single humidity-heat flow density translocation sensor on inserted sheet;
Fig. 4 is the subjective schematic diagram in cross section that fuel battery inside humidity-heat flux distribution measures humidity-heat flow density translocation sensor lead on inserted sheet;
Fig. 5 is that fuel battery inside humidity-heat flux distribution crack that interlocks measures the subjective schematic diagram of inserted sheet;
Fig. 6 is that the snakelike single crack of fuel battery inside humidity-heat flux distribution measures the subjective schematic diagram of inserted sheet;
Fig. 7 is that fuel battery inside humidity-heat flux distribution snakelike pair of crack measures the subjective schematic diagram of inserted sheet;
In figure, 1, conductive substrate, 2, crack, 3, muscle, 4, humidity-heat flow density translocation sensor, 5, lead-in wire, 6, pin, 7, pilot hole;
8-15 is each layer mask of humidity-heat flow density translocation sensor: 8, silicon dioxide insulating layer mask, 9, bottom electrode aluminium coat mask, 10, high molecular polymer humidity-sensitive medium layer mask, 11, top electrode aluminium coat mask, 12, film thermal flowmeter copper coating mask, 13, film thermal flowmeter nickel coating mask, 14, silicon dioxide layer of protection mask, 15, the thick thermoresistance layer mask of silicon dioxide;
16-23 is the humidity-each rete of heat flow density translocation sensor according to mask fabrication: 16, silicon dioxide insulating layer, 17, bottom electrode aluminium coat, 18, high molecular polymer humidity-sensitive medium layer, 19, top electrode aluminium coat, 20, film thermal flowmeter copper coating, 21, film thermal flowmeter nickel coating, 22, silicon dioxide layer of protection, 23, the thick thermoresistance layer of silicon dioxide;
24-31 is the making step of humidity-heat flow density translocation sensor: 24, step one, 25, step 2,26, step 3,27, step 4,28, step 5,29, step 6,30, step 7,31, step 8;
32, film thermal flowmeter wiring exit, 33, node on film thermal flowmeter, 34, node under film thermal flowmeter, 35, humicap wiring exit;
36, go between silicon dioxide insulating layer, 37, lead-in wire copper coating, 38, lead-in wire gold plate, 39, lead-in wire silicon dioxide layer of protection.
Embodiment
Below in conjunction with accompanying drawing, the invention will be further described.
With reference to shown in Fig. 1, fuel battery inside humidity of the present invention-heat flux distribution measures inserted sheet, comprises conductive substrate 1, crack 2, muscle 3, humidity-heat flow density translocation sensor 4, lead-in wire 5, pin 6, pilot hole 7; Crack 2 and muscle 3 are arranged on conductive substrate 1, and it is identical in shape and size with ridge with the runner on tested fuel cell flow field board, and position is mutually corresponding, and muscle 3 is furnished with humidity-heat flow density translocation sensor 4; 5 one end that go between are connected with humidity-heat flow density translocation sensor 4, and the other end extends to the edge of conductive substrate 1, for transmitting the electric signal that humidity-heat flow density translocation sensor 4 produces; Pin 6 is arranged in the edge of conductive substrate 1 and is connected with lead-in wire 5; Be furnished with pilot hole 7 in the surrounding of conductive substrate, facilitate this humidity-heat flux distribution measure the location of inserted sheet and fuel cell flow field board and fix.For the mating shapes with tested fuel cell, the shape of conductive substrate 1 can be made into square, circular, polygon, trapezoidal, triangle etc.During measurement, this measurement inserted sheet is implanted between fuel cell flow field board and membrane electrode assembly, be fixed on fuel cell flow field board by pilot hole 7, be furnished with humidity-heat flow density translocation sensor 4 facing to fuel cell membrane electrode assembly direction, and with membrane electrode assembly close contact, crack 2 is corresponding with the runner on fuel cell flow field board, muscle 3 is corresponding with the ridge on fuel cell flow field board, does not affect the diffusion of reactant to membrane electrode direction to make the implantation of measurement inserted sheet.Simultaneously, the humidity and the heat flow density that are arranged in the humidity-heat flow density translocation sensor 4 pairs of fuel battery insides measured on inserted sheet are measured, the electric signal produced is passed to pin 6 by lead-in wire 5, the data input pin of data acquisition equipment is connected with pin 6 electric signal that can collect and measure inserted sheet and export, and computational analysis goes out fuel battery inside moisture distribution and heat flux distribution.
With reference to shown in Fig. 2, humidity of the present invention-heat flow density translocation sensor 4 comprises hygrometric unit and calorimetric stream unit, and hygrometric unit is made up of humicap, and calorimetric stream unit is made up of film thermal flowmeter; humidity-heat flow density translocation sensor 4 adopts vacuum evaporation coating film method to be made, comprise eight layer films: ground floor is the thick silicon dioxide insulating layer 16 for 0.08-0.12 μm on the muscle 3 of evaporation between the adjacent crack 2 of conductive substrate 1 liang, as dielectric substrate, the second layer is the thick bottom electrode aluminium coat 17 for 1.0-1.2 μm of evaporation on silicon dioxide insulating layer 16, third layer is above bottom electrode aluminium coat 17, apply the high molecular polymer humidity-sensitive medium layer 18 that thick layer is 0.5-1 μm, 4th layer is the thick top electrode aluminium coat 19 for 1.0-1.2 μm of evaporation above high molecular polymer humidity-sensitive medium layer 18, layer 5 is the thick film thermal flowmeter copper coating 20 for 0.1-0.12 μm of evaporation on silicon dioxide insulating layer 16, layer 6 is the thick film thermal flowmeter nickel coating 21 for 0.1-0.12 μm of evaporation on silicon dioxide insulating layer 16, layer 7 for above institute's plating coating evaporation thick be the silicon dioxide layer of protection 22 of 0.08-0.12 μm, 8th layer by evaporation thick layer above the right silicon dioxide coating of node 33 on film thermal flowmeter be the thick thermoresistance layer 23 of silicon dioxide of 1.2-2.0 μm.
Film thermal flowmeter copper coating 20, film thermal flowmeter nickel coating 21, silicon dioxide layer of protection 22 and the thick thermoresistance layer of silicon dioxide 23 constitute complete film thermal flowmeter, to realize the measurement of heat flow density, its measuring principle is: mutually overlapped by film thermal flowmeter copper coating and film thermal flowmeter nickel coating head and the tail and form thermoelectric pile, because node on film thermal flowmeter is different with the silicon dioxide thermoresistance layer thickness on node under film thermal flowmeter, thus make thermoelectric pile produce thermoelectric force, it is relevant to the thickness difference of silicon dioxide thermoresistance layer on upper node and lower node, and heat flow density and the temperature difference, silicon dioxide thermoresistance layer thickness difference and coefficient of heat conductivity are correlated with, because silicon dioxide coefficient of heat conductivity is known, therefore the size of heat flow density can be calculated.
Fig. 3 is Making programme figure: 8-15 of single humidity-heat flow density translocation sensor is each layer mask of humidity-heat flow density translocation sensor, 16-23 is the humidity-each rete of heat flow density translocation sensor according to mask fabrication, and 24-31 is the making step of humidity-heat flow density translocation sensor.First on the muscle 3 of conductive substrate 1 according to silicon dioxide insulating layer mask 8 evaporation layer of silicon dioxide insulation course 16, as the substrate of sensor, fully to insulate with conductive substrate, thus completing steps 1, step 2 25 is according to bottom electrode aluminium coat mask 9 evaporation one deck bottom electrode aluminium coat 17 on silicon dioxide insulating layer 16, step 3 26 for apply one deck high molecular polymer humidity-sensitive medium layer 18 according to high molecular polymer humidity-sensitive medium layer mask 10 above bottom electrode aluminium coat 17, and step 4 27 is according to top electrode aluminium coat mask 11 evaporation one deck top electrode aluminium coat 19 above high molecular polymer humidity-sensitive medium layer 18, wherein, bottom electrode aluminium coat 17, high score polymkeric substance humidity-sensitive medium layer 18 and top electrode aluminium coat 19 constitute humicap, achieve the measurement of humidity, step 5 28 is according to film thermal flowmeter copper coating mask 12 evaporation thin film heat flow meter copper coating 20 on silicon dioxide insulating layer 16, step 6 29 is according to film thermal flowmeter nickel coating mask 13 evaporation thin film heat flow meter nickel coating 21 on silicon dioxide insulating layer 16, film thermal flowmeter copper coating 20 and film thermal flowmeter nickel coating 21 constitute film thermal flowmeter thermoelectric pile, step 7 30 for above institute's plating coating according to silicon dioxide layer of protection mask 14 evaporation layer of silicon dioxide protective seam 22, it is namely as the protective seam of humicap top electrode, again as the thin thermoresistance layer of film thermal flowmeter, step 8 31 for above the silicon dioxide coating on film thermal flowmeter corresponding to node 33 according to the thick thermoresistance layer 23 of silicon dioxide thick thermoresistance layer mask 15 evaporation layer of silicon dioxide, form humidity-heat flow density translocation sensor by above step, external metering circuit and data acquisition equipment can realize the synchro measure to fuel battery inside humidity and heat flow density.
The coat of metal material of the humicap top electrode that step 2 25 and step 4 27 complete and bottom electrode also can select other metal substitutes such as gold, copper, platinum, wherein, it is snakelike that the shape of humicap top electrode aluminium coat 19 not only can be shown in Fig. 3, also can be other shapes such as zigzag, pectination.The film thermal flowmeter copper coating 20 that step 5 28 and step 6 29 complete and the shape of film thermal flowmeter nickel coating 21 are respectively the quadrilateral be parallel to each other, head and the tail are overlap joint mutually, lap-joint forms film thermopile, wherein at least to comprise on a pair film thermal flowmeter node 34 under node 33, film thermal flowmeter; The shape of film thermal flowmeter copper coating 20 and film thermal flowmeter nickel coating 21 sets according to the shape of mask, its shape can also be strip, arc, rhombus etc., and the shape after head and the tail overlap joint can be other shapes such as serrate, arc, waveform, zigzag; The material of the film thermal flowmeter coat of metal also can be tungsten and nickel, copper and cobalt, molybdenum and nickel, antimony and cobalt etc. substitute, and metal mixture material such as copper and constantan also can be adopted to substitute; The position of the thick thermoresistance layer 23 of silicon dioxide also can be positioned at the top of node 34 under film thermal flowmeter.
The head end of film thermal flowmeter is film thermal flowmeter wiring exit 32, and the head end of humicap is humicap wiring exit 35, and it act as and is conveniently connected with lead-in wire 5, carries out the conduction of electric signal.The shape of film thermal flowmeter wiring exit 32 and humicap wiring exit 35 not only can be the shape shown in Fig. 3, also can be ellipse, rectangle, trapezoidal, other shape such as triangle, its position can be arranged in the same side of silicon dioxide insulating layer 16, also the both sides being arranged in silicon dioxide insulating layer 16 that can be relative, namely when film thermal flowmeter wiring exit 32 is positioned at the upside of silicon dioxide insulating layer 16, humicap wiring exit 35 is arranged in the opposite side of the silicon dioxide insulating layer 16 relative with film thermal flowmeter wiring exit 32, to facilitate the layout of sensor lead 5 on conductive substrate.
With reference to shown in Fig. 4, the width of lead-in wire 5 is 0.1-0.2mm, amplifies in the edge of conductive substrate 1, forms pin 6, is connected to facilitate with external metering circuit and equipment.This lead-in wire adopts the four-level membrane of vacuum evaporation coating film method evaporation to form: ground floor is the lead-in wire silicon dioxide insulating layer 36 of thick 0.08-0.12 μm, the second layer is the lead-in wire copper coating 37 of thick 0.1-0.12 μm, third layer is the lead-in wire gold plate 38 of thick 0.1-0.12 μm, and most last layer is the lead-in wire silicon dioxide layer of protection 39 of thick 0.05-0.1 μm; Wherein, at pin 6 place not evaporation lead-in wire silicon dioxide layer of protection.
Fig. 5 is that fuel battery inside humidity-heat flux distribution crack that interlocks measures the subjective schematic diagram of inserted sheet, crack 2 on its conductive substrate 1 and muscle 3 and the runner on staggered fluid flow on channel plate and ridge mutually corresponding, muscle 3 between two adjacent cracks 2 is furnished with humidity-heat flow density translocation sensor 4, one end of lead-in wire 5 connects with the wiring exit of humidity-heat flow density translocation sensor 4, the other end extends to the outward flange of conductive substrate 1 and amplifies formation pin 6, for the transmission of humidity-heat flow density translocation sensor 4 electric signal.
Fig. 6 is that the snakelike single crack of fuel battery inside humidity-heat flux distribution measures the subjective schematic diagram of inserted sheet, crack 2 on its conductive substrate 1 and muscle 3 and the runner on snakelike single channel flow field and ridge mutually corresponding, muscle 3 between two adjacent cracks 2 is furnished with humidity-heat flow density translocation sensor 4, one end of lead-in wire 5 connects with the wiring exit of humidity-heat flow density translocation sensor 4, the other end extends to the outward flange of conductive substrate 1 and amplifies formation pin 6, for the transmission of humidity-heat flow density translocation sensor 4 electric signal.
Fig. 7 is that fuel battery inside humidity-heat flux distribution snakelike pair of crack measures the subjective schematic diagram of inserted sheet, crack 2 on its conductive substrate 1 and muscle 3 and the runner in snakelike binary channels flow-field plate and ridge mutually corresponding, muscle 3 between two adjacent cracks 2 is furnished with humidity-heat flow density translocation sensor 4, one end of lead-in wire 5 connects with the wiring exit of humidity-heat flow density translocation sensor 4, the other end extends to the outward flange of conductive substrate 1 and amplifies formation pin 6, for the transmission of humidity-heat flow density translocation sensor 4 electric signal.
Adopt fuel battery inside of the present invention humidity-heat flux distribution to measure inserted sheet, the distribution situation of synchronous on-line measurement fuel battery inside humidity and heat flow density can be realized easily; This measurement mechanism and tested fuel cell are independently, do not need to carry out special transformation to the structure of fuel cell, structure is simple, easy to make, usable range is wide, the measurement of individual fuel cells interior humidity and heat flux distribution can be realized, also can realize the measurement of fuel cell pack interior humidity and heat flux distribution.

Claims (10)

1. fuel battery inside humidity-heat flux distribution measures inserted sheet, comprises conductive substrate (1), crack (2), muscle (3), humidity-heat flow density translocation sensor (4), lead-in wire (5), pilot hole (7); Described crack (2), muscle (3) are arranged on conductive substrate (1), muscle (3) is positioned between two adjacent cracks (2), crack (2) is identical with the shape and size of ridge with fuel cell flow field board upper runner respectively with the shape and size of muscle (3), and crack (2) is corresponding with fuel cell flow field board runner and ridge respectively with the position of muscle (3); It is characterized in that: described humidity-heat flow density translocation sensor (4) is arranged on muscle (3); One end of lead-in wire (5) connects with the wiring exit of humidity-heat flow density translocation sensor (4), and the other end extends to the edge of conductive substrate (1) and amplifies formation pin (6); Pilot hole (7) is symmetrical, be evenly arranged on conductive substrate (1) surrounding, in order to be fixed on fuel cell flow field board by conductive substrate (1); During fuel cell assembling, fuel battery inside humidity-heat flux distribution is measured inserted sheet and is arranged in the middle of fuel cell flow field board and membrane electrode, its be provided with humidity-heat flow density translocation sensor (4) facing to membrane electrode side also close contact with it;
Described humidity-heat flow density translocation sensor (4) comprises humicap hygrometric unit and film thermal flowmeter calorimetric stream unit, vacuum evaporation coating film method is adopted to make, comprise eight layer films: ground floor is the thick silicon dioxide insulating layer (16) for 0.08-0.12 μm of evaporation on muscle (3), as dielectric substrate, the second layer is the thick bottom electrode aluminium coat (17) for 1.0-1.2 μm at the upper evaporation of silicon dioxide insulating layer (16), the high molecular polymer humidity-sensitive medium layer (18) of third layer at bottom electrode aluminium coat (17) top coating thick layer being 0.5-1 μm, 4th layer is the thick top electrode aluminium coat (19) for 1.0-1.2 μm at high molecular polymer humidity-sensitive medium layer (18) top evaporation, described top electrode aluminium coat (19), high molecular polymer humidity-sensitive medium layer (18) and bottom electrode aluminium coat (17) form humicap, head end is humicap wiring exit (35), and wherein the shape of top electrode aluminium coat (19) is snakelike, layer 5 is the thick film thermal flowmeter copper coating (20) for 0.1-0.12 μm at the upper evaporation of silicon dioxide insulating layer (16), layer 6 is the thick film thermal flowmeter nickel coating (21) for 0.1-0.12 μm at the upper evaporation of silicon dioxide insulating layer (16), layer 7 is the thick silicon dioxide layer of protection (22) for 0.08-0.12 μm of evaporation on previous coating basis, the 8th layer by evaporation thick layer above the right silicon dioxide coating of node (33) on film thermal flowmeter be the thick thermoresistance layer of silicon dioxide (23) of 1.2-2.0 μm, the shape of described film thermal flowmeter copper coating (20) and film thermal flowmeter nickel coating (21) is respectively the quadrilateral be parallel to each other, head and the tail are overlap joint mutually, lap-joint to form on film thermal flowmeter node (34) under node (33) and film thermal flowmeter, and head end is film thermal flowmeter wiring exit (32),
Described film thermal flowmeter wiring exit (32) and humicap wiring exit (35) are all made into circle, and are all arranged in the same side of silicon dioxide insulating layer (16).
2. fuel battery inside humidity according to claim 1-heat flux distribution measures inserted sheet, it is characterized in that: the shape of described conductive substrate (1) can be made into square, circular, polygon, trapezoidal, triangle, irregular figure; The shape of the upper crack (2) of conductive substrate (1) can be snakelike crack, parallel crack, poroid crack, staggered crack.
3. fuel battery inside humidity according to claim 1-heat flux distribution measures inserted sheet, it is characterized in that: the coat of metal material of upper/lower electrode in the middle humicap of described humidity-heat flow density translocation sensor (4), gold, copper, platinum also can be selected to replace.
4. fuel battery inside humidity according to claim 1-heat flux distribution measures inserted sheet, it is characterized in that: the shape of described top electrode aluminium coat (19) sets according to the shape of mask, and its shape also can be zigzag, pectination.
5. fuel battery inside humidity according to claim 1-heat flux distribution measures inserted sheet, it is characterized in that: in described film thermal flowmeter coat of metal material, the simple metal coating be made up of copper and mickel can also select tungsten and nickel, copper and cobalt, molybdenum and nickel, antimony and cobalt to substitute, and metal mixture material such as copper and constantan also can be adopted to substitute.
6. fuel battery inside humidity according to claim 1-heat flux distribution measures inserted sheet, it is characterized in that: the shape of described film thermal flowmeter copper coating (20) and film thermal flowmeter nickel coating (21) sets according to the shape of mask, its shape can also be strip, arc, rhombus, and the head and the tail mutually rear shape of overlap joint can be serrate, arc, waveform, zigzag.
7. fuel battery inside humidity according to claim 1-heat flux distribution measures inserted sheet, it is characterized in that: the thick thermoresistance layer of described silicon dioxide (23) also can be positioned at the top of node (34) under film thermal flowmeter.
8. fuel battery inside humidity according to claim 1-heat flux distribution measures inserted sheet, it is characterized in that: at least to comprise on a pair film thermal flowmeter node (34) under node (33), film thermal flowmeter in the film thermal flowmeter in described humidity-heat flow density translocation sensor (4).
9. fuel battery inside humidity according to claim 1-heat flux distribution measures inserted sheet, it is characterized in that: the shape of described film thermal flowmeter wiring exit (32) and humicap wiring exit (35) also can be made as ellipse, rectangle, trapezoidal, triangle, the both sides being arranged in silicon dioxide insulating layer (16) that its position can be relative respectively.
10. fuel battery inside humidity according to claim 1-heat flux distribution measures inserted sheet, it is characterized in that: the width of lead-in wire (5) is 0.1-0.2mm, amplify in the edge of conductive substrate (1), form pin (6);
Lead-in wire (5) adopts the four-level membrane of vacuum evaporation coating film method evaporation to form: ground floor is the lead-in wire silicon dioxide insulating layer (36) of thick 0.08-0.12 μm, the second layer is the lead-in wire copper coating (37) of thick 0.1-0.12 μm, third layer is the lead-in wire gold plate (38) of thick 0.1-0.12 μm, and most last layer is the lead-in wire silicon dioxide layer of protection (39) of thick 0.05-0.1 μm; Wherein, at pin (6) place not evaporation lead-in wire silicon dioxide layer of protection (39).
CN201410636170.9A 2014-11-05 2014-11-05 Plug-in piece for measuring internal humidity and heat flux density distribution of fuel battery Active CN104359951B (en)

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Citations (5)

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