CN104330870B - A kind of high-NA image-forming objective lens for photoetching three-dimensional printer - Google Patents
A kind of high-NA image-forming objective lens for photoetching three-dimensional printer Download PDFInfo
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- CN104330870B CN104330870B CN201410614414.3A CN201410614414A CN104330870B CN 104330870 B CN104330870 B CN 104330870B CN 201410614414 A CN201410614414 A CN 201410614414A CN 104330870 B CN104330870 B CN 104330870B
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- eyeglass
- image
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- photoetching
- objective lens
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
Abstract
The invention discloses a kind of high-NA image-forming objective lens for photoetching three-dimensional printer, these object lens have employed double telecentric structure, totally 10 eyeglasses, and service band is 365nm ± 10nm.Object lens optics object-image conjugate is away from for L=350mm, and wherein thing side's working distance is 85.2mm, and image space working distance is about 79.5mm.Wu Fang available field of view is 20mm × 20mm, object-side numerical aperture NA=0.19, and resolution is σ ＜ 100 μm.
Description
Technical field
The present invention is a kind of high-NA image-forming objective lens for photoetching three-dimensional printer, belongs to three-dimensional microstructures and adds
Research on Optical System field in construction equipment.
Background technology
At present, three dimensional structure printer has become engineering field research and the focus of application.Most three dimensional structure printers
It is mainly used in the making of macroscopic view components and parts, such as, substitutes traditional mechanical machine component with 3 D-printing element.But at CONSTRUCTED SPECIFICATION
The microscopic three-dimensional components and parts making aspect of (resolving power) σ ＜ 20um, the achievement of research is the most few.Lack a kind of reliable fine knot
Structure 3 D-printing equipment is to hinder its major reason developed to finer node.
Chinese Academy of Sciences's photoelectric technology institute propose a kind of photoetching 3D printer (number of patent application:
201310676063.4).This 3D printer, combines mask-free photolithography technology and three-dimensional curing technology, Ke Yiyou
Effect realizes.
The time that the process exposed owing to there is a rotation causes each subdivision face to expose is the shortest, and this photoetching is three-dimensional
Printer needs bigger instantaneous exposure energy.At present, most projection lens of lithography machine focus on image quality, number of lenses
The hugest, thus cause transmitance relatively low.In Practical Project, generally utilize replacing greater power light source to solve this and ask
Topic.But this type of solution can be significantly increased volume and the cost of equipment, mini-plant this for photoetching three-dimensional printer
It is difficult to accept.Taking into account cost, volume and exposure efficiency is that photoetching three-dimensional printer optical system needs asking of solution badly
Topic.
Summary of the invention
In order to solve problem mentioned above, the present invention devises a kind of high-NA for photoetching three-dimensional printer
Image-forming objective lens.Designing compared to like product, these object lens only have 10 pieces of eyeglasses, and numerical aperture is relatively big, can preferably balance each
Class aberration.
The technical solution used in the present invention is: a kind of high-NA image-forming objective lens for photoetching three-dimensional printer,
It is characterized in that this projection objective image conjugate distance L=350mm；
Wherein thing side's working distance is 85.2mm, and image space working distance is 79.5mm；
Wherein operating central wavelength is 365nm, and effective service band is 360nm～370nm；
These object lens are doubly telecentric symmetrical structure, altogether 10 pieces of eyeglasses；
Starting before diaphragm from object plane light direction is first group of eyeglass, and first group of eyeglass includes the first eyeglass L1,
Second eyeglass L2, the 3rd eyeglass L3, the 4th eyeglass L4, the 5th eyeglass L5, wherein the 5th eyeglass L5 is minus lens, and remaining eyeglass is
Plus lens；To being second group of eyeglass before image planes after diaphragm, second group of eyeglass includes the 6th eyeglass L6, the 7th eyeglass L7, the 8th
Eyeglass L8, the 9th eyeglass L9, the tenth eyeglass L10；Second group of eyeglass and first group of eyeglass are symmetrical about diaphragm, the i.e. the 6th eyeglass L6
Identical with the 5th eyeglass L5, the 7th eyeglass L7 and the 4th eyeglass L4 is identical, and so on；
Further, the thing side of object lens, image space telecentricity control within ± 0.5 ° simultaneously, telecentricity control described in these object lens
System so can ensure that within ± 0.5 ° object lens when there is a certain amount of skew in image planes or object plane, image quality and enlargement ratio
Will not be much affected.
Further, these object lens become-1 times of inverted image, i.e. enlargement ratio be-1 ×.
Further, Wu Fang available field of view is 20mm × 20mm, and object-side numerical aperture is NAThing=0.19.
Further, all glass for lenses materials all use the material of domestic Chengdu light photoelectricity company, and the trade mark is respectively
For: H-K9L, H-QK3L, F2；These three kinds of materials have good transmitance in 356nm wave band is surveyed.
The principle of the present invention is:
A kind of high-NA image-forming objective lens for photoetching three-dimensional printer, its image conjugate distance L=350mm.Its
Middle thing side working distance LThing=85.2mm, image space working distance LPicture=79.5mm.These object lens Wu Fang available field of view 20mm × 20mm, thing side
Numerical aperture NAThing=0.19.Object lens enlargement ratio β=-1 ×, therefore image space available field of view is similarly 20mm × 20mm, image-side numerical
Aperture NAPicture=0.19.This objective lens design centre wavelength is i line, i.e. 365nm, and effective service band is 360nm～370nm.This
The image-forming objective lens for photoetching three-dimensional printer proposed in bright, has 10 pieces of eyeglasses.Start to diaphragm from incident direction
Before, it is sequentially provided with L1～L5 totally 5 pieces of eyeglasses, is the first mirror group.Wherein L5 is minus lens, and remaining eyeglass is plus lens.From light
Door screen starts to image planes, is sequentially provided with L6～L10 totally 5 pieces of eyeglasses, is the second mirror group.Second mirror group optical parametric and the first mirror group light
Learning parameter and be mirrored into symmetry about diaphragm, center air interval can be finely adjusted to balance picture element.Whole image-forming objective lens optics
Structure is double telecentric structure.The advantage of this structure is: when object plane or image planes generation minor shifts, the times magnification of camera lens
Rate, image quality will not have greatly changed.
A kind of high-NA image-forming objective lens initial optimization structural parameters for photoetching three-dimensional printer of the present invention are such as
Shown in following table:
| Radius | Centre-to-centre spacing | The glass trade mark | |
| Object plane | 85.20 | ||
| 1 | 2151 | 14.00 | H-K9L |
| 2 | -83 | 12.20 | |
| 3 | 45 | 8.30 | H-K9L |
| 4 | 100 | 24.50 | |
| 5 | 61 | 10.00 | H-QK3L |
| 6 | -931 | 0.20 | |
| 7 | 32 | 10.00 | H-QK3L |
| 8 | 95 | 2.00 | |
| 9 | -120 | 6.00 | F2 |
| 10 | 23 | 2.80 | |
| Diaphragm | 6.40 | ||
| 11 | -23 | 6.00 | F2 |
| 12 | 120 | 2.00 | |
| 13 | -95 | 10.00 | H-QK3L |
| 14 | -32 | 0.20 | |
| 15 | 931 | 10.00 | H-QK3L |
| 16 | -61 | 24.50 | |
| 17 | -100 | 8.30 | H-K9L |
| 18 | -45 | 13.00 | |
| 19 | 83 | 14.00 | H-K9L |
| 20 | -2151 | 79.48 | |
| Image planes | 0.00 |
According to Rayleigh criterionUnderstanding, numerical aperture NA is directly proportional to the resolving power of optical system, i.e. imaging thing
The numerical aperture of mirror is the biggest, and the minimum feature of its imaging is the narrowest.The numerical aperture 0.19 of this image-forming objective lens, if process factor k
=0.8, can guarantee that this image-forming objective lens resolving power is less than 30 μm the most in theory.It is fully able to meet and makes characteristic size less than hundred
The demand of micron order three-dimensional micro-nano structure.
These object lens use domestic Chengdu Guangming Photoelectricity Joint-stock Co., Ltd produce glass material, the trade mark is H-K9L, F2,
H-QK3L.These three trade mark glass is better performances in the actual test of i line, and transmitance is higher.
| Refractive index (n365) | Abbe number (ν) | |
| H-K9L | 1.53622 | 500.7057 |
| F2 | 1.66623 | 228.6286 |
| H-QK3L | 1.50405 | 555.9296 |
Wherein Abbe number is mainly used to the degree of dispersion weighing a certain glass material or medium in corresponding wave band.Its value with
Glass dispersive power is inversely proportional to, and flint glass (F2) dispersive power is more than crown glass (H-K9L, H-QK3L).The meter of Abbe number
Calculation formula isn365、n362、n368It is respectively on exposure center wavelength and wave band the corresponding refractive index that rolls off the production line.
Present invention advantage compared with prior art is:
(1) numerical aperture of object lens of the present invention is relatively big, and resolving power is higher, and all kinds of aberrations have obtained effectively balancing.
(2) the eyeglass number that object lens of the present invention use is less, and optical energy loss is less, and lens materials all uses domestic glass,
Cost is relatively low.
Accompanying drawing explanation
Fig. 1 is a kind of high-NA image-forming objective lens optical structure chart for photoetching three-dimensional printer of the present invention；
Fig. 2 is a kind of high-NA image-forming objective lens MTF curve for photoetching three-dimensional printer of the present invention；
Fig. 3 is the some disc of confusion figure of a kind of high-NA image-forming objective lens for photoetching three-dimensional printer of the present invention；
Fig. 4 is a kind of high-NA image-forming objective lens for photoetching three-dimensional printer of the present invention.
Detailed description of the invention
Specific embodiments of the present invention is described in detail below in conjunction with the accompanying drawings.
Optical texture of the present invention is as it is shown in figure 1, purple LED array emergent ray result illuminator is flat after collimating even light
Row incides on digital micromirror array (DMD), i.e. on the object plane of these object lens.Wherein the maximum effectively working size of DMD is less than
20mm×20mm.The pattern formed on DMD to ultraviolet glue, makes the instantaneous solidification of ultraviolet glue through the imaging of these object lens, forms solid
Structure.
As it is shown in figure 1, this image-forming objective lens is first with first piece of eyeglass L1 towards the plane of incidence of object plane, along optical axis with
This analogizes, altogether 20 optical surfaces, 10 pieces of eyeglasses, and image conjugate distance is L=350mm.Wherein numbering L5, L6 are minus lens,
Remaining eyeglass is plus lens.The optical parametric of all eyeglasses is mirrored into symmetry, double telecentric structure, Ke Yibao centered by diaphragm
In the case of exhibit, image planes have trace deviation, image quality and enlargement ratio are all without changing.
As it is shown in figure 1, the high-NA lithographic objective optical material being similar in the present invention all uses domestic Chengdu
Bright photoelectricity Products, this most still lacks use case.Through after strict experiment test, Chengdu light photoelectricity
The glass of tri-kinds of trades mark of H-K9L, H-QK3L, F2 of company is functional in 365nm wave band imaging, transmitance of a relatively high and
Price is the cheapest, therefore this camera lens uses these three sections of glass to be optimized design.
After applying above-mentioned three kinds of glass materials, the transmitance of these object lens estimates substantially about 55% in ZEMAX software,
So object lens have good transmitance in this example.
When optical element and mechanical organ assemble, need the centre-to-centre spacing between each eyeglass to be carried out trace adjustment, with more
Mend the picture element deviation produced because of the processing of face type, to ensure that object lens image quality reaches optimum.In this example, after centre-to-centre spacing fine setting,
Optic structure parameter is:
| Radius | Centre-to-centre spacing | Glass material | |
| Image planes | 85.20 | ||
| 1 | 2151 | 14.00 | H-K9L |
| 2 | -83 | 12.17 | |
| 3 | 45 | 8.32 | H-K9L |
| 4 | 100 | 25.57 | |
| 5 | 61 | 10.00 | H-QK3L |
| 6 | -931 | 0.20 | |
| 7 | 32 | 10.00 | H-QK3L |
| 8 | 95 | 1.74 | |
| 9 | -120 | 6.00 | F2 |
| 10 | 23 | 2.63 | |
| Diaphragm | 5.64 | ||
| 11 | -23 | 6.00 | F2 |
| 12 | 120 | 2.07 | |
| 13 | -95 | 10.00 | H-QK3L |
| 14 | -32 | 0.20 | |
| 15 | 931 | 10.00 | H-QK3L |
| 16 | -61 | 24.83 | |
| 17 | -100 | 8.32 | H-K9L |
| 18 | -45 | 16.92 | |
| 19 | 83 | 14.00 | H-K9L |
| 20 | -2151 | 79.49 | |
| Image planes |
According to the image-forming objective lens after parameter adjustment in upper table, can count the most truly in optical simulation software ZEMAX
Calculate its image quality, as shown in Figure 2,3, 4.In this example, object lens 50 lines right/spatial frequency spectrum of mm in, peripheral field contrasts
Degree is more than 0.7；RMS (root-mean-square) radius value ＜ 3 μm of object lens point spread function and GEO (geometry) radius value ＜ 14 μm, best
Resolving power is less than 30 μm；Meanwhile, the object lens maximum curvature of field 70 μm, peripheral field maximum distortion ＜ 10 μm, meet distortion for design point
Distinguish powerRequirement.
Above-mentioned detailed description of the invention and result are not the preferably embodiment of imaging performance of the present invention, but its every evaluation index
It is superior to design requirement, there is preferable imaging effect.If work can be reduced in mirror finish and mechanical-optical setup when assembling further
The skill factor, a step is got a promotion by the image quality of object lens.Additionally, this image-forming objective lens small volume and conjugate distance are shorter, permissible
Preferably it is integrated in photoetching three-dimensional printer.
Claims (4)
1. for a high-NA image-forming objective lens for photoetching three-dimensional printer, it is characterized in that: this image-forming objective lens image is altogether
Yoke is away from for L=350mm；
Wherein thing side's working distance of object lens is 85.2mm, and image space working distance is 79.5mm, and object lens operating central wavelength is 365nm,
Effectively service band is 360nm～370nm；
These object lens have 10 pieces of eyeglasses, constitute doubly telecentric symmetrical structure, start before diaphragm from object plane light direction be
First group of eyeglass, first group of eyeglass includes the first eyeglass L1, the second eyeglass L2, the 3rd eyeglass L3, the 4th eyeglass L4, the 5th eyeglass
L5, wherein the 5th eyeglass L5 is minus lens, and remaining eyeglass is plus lens；To being second group of eyeglass before image planes after diaphragm, second
Group eyeglass includes the 6th eyeglass L6, the 7th eyeglass L7, the 8th eyeglass L8, the 9th eyeglass L9, the tenth eyeglass L10；Second group of eyeglass
Symmetrical about diaphragm with first group of eyeglass, the i.e. the 6th eyeglass L6 and the 5th eyeglass L5 is identical, the 7th eyeglass L7 and the 4th eyeglass L4
Identical, the 8th eyeglass L8 and the 3rd eyeglass L3 is identical, and the 9th eyeglass L9 and the second eyeglass L2 is identical, the tenth eyeglass L10 and first
Eyeglass L1 is identical.
A kind of high-NA image-forming objective lens for photoetching three-dimensional printer the most according to claim 1, its feature
It is: the thing side of object lens, image space telecentricity control within ± 0.5 °.
A kind of high-NA image-forming objective lens for photoetching three-dimensional printer the most according to claim 1, its feature
Be: these object lens become-1 times of inverted image, i.e. enlargement ratio be-1 ×.
A kind of high-NA image-forming objective lens for photoetching three-dimensional printer the most according to claim 1, its feature
Being: Wu Fang available field of view is 20mm × 20mm, object-side numerical aperture is NAThing=0.19.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410614414.3A CN104330870B (en) | 2014-11-04 | 2014-11-04 | A kind of high-NA image-forming objective lens for photoetching three-dimensional printer |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410614414.3A CN104330870B (en) | 2014-11-04 | 2014-11-04 | A kind of high-NA image-forming objective lens for photoetching three-dimensional printer |
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| CN104330870A CN104330870A (en) | 2015-02-04 |
| CN104330870B true CN104330870B (en) | 2016-11-30 |
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Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109541782B (en) * | 2018-12-24 | 2020-08-28 | 中国科学院福建物质结构研究所 | Full-frame imaging double telecentric optical system, full-frame imaging device and optical lens |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4650295A (en) * | 1984-04-03 | 1987-03-17 | Nippon Kogaku K. K. | Wide angle and variable magnification lens system for finite distance |
| CN102346291A (en) * | 2010-08-02 | 2012-02-08 | 上海微电子装备有限公司 | Coaxial double-telecentric imaging optics system |
| CN103631002A (en) * | 2013-11-14 | 2014-03-12 | 中国科学院上海光学精密机械研究所 | Compact photolithographic projection lens |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2537353B2 (en) * | 1987-01-29 | 1996-09-25 | 株式会社リコー | Large aperture lens for copying |
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2014
- 2014-11-04 CN CN201410614414.3A patent/CN104330870B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4650295A (en) * | 1984-04-03 | 1987-03-17 | Nippon Kogaku K. K. | Wide angle and variable magnification lens system for finite distance |
| CN102346291A (en) * | 2010-08-02 | 2012-02-08 | 上海微电子装备有限公司 | Coaxial double-telecentric imaging optics system |
| CN103631002A (en) * | 2013-11-14 | 2014-03-12 | 中国科学院上海光学精密机械研究所 | Compact photolithographic projection lens |
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