CN104317034A - F-theta optical lens - Google Patents
F-theta optical lens Download PDFInfo
- Publication number
- CN104317034A CN104317034A CN201410457580.7A CN201410457580A CN104317034A CN 104317034 A CN104317034 A CN 104317034A CN 201410457580 A CN201410457580 A CN 201410457580A CN 104317034 A CN104317034 A CN 104317034A
- Authority
- CN
- China
- Prior art keywords
- lens
- curved surface
- curvature
- radius
- theta
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/0005—Optical objectives specially designed for the purposes specified below having F-Theta characteristic
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/001—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras
- G02B13/0015—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras characterised by the lens design
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/22—Telecentric objectives or lens systems
Abstract
The invention brings forward an f-theta optical lens comprising a first lens, a second lens, a third lens, a fourth lens, a fifth lens. The lenses are arranged along the light incidence direction. The first lens is a concave-convex positive lens; the second lens is a dual-concave concave lens; the third lens is a concave-convex positive lens; the fourth lens is a concave-convex positive lens; and the fifth lens is a plano-convex positive lens. According to the f-theta optical lens, an accurate linear mapping relation between an angle change of 355-nm-wavelength ultraviolet laser beam at an X/Y direction in a semi-view-field incidence angle range with the angel of 0 to 11 degrees and a photoetching direction of the laser beam on the substrate in a range from 0 to 50 mm can be realized, so that the laser beam focus positioning becomes precise, the energy distribution becomes uniform and centralized, and the precision requirement of the photoetching process can be met. Moreover, the structure is compact and the cost is low.
Description
Technical field
The present invention relates to optical lens design field, particularly a kind of F-theta optical lens.
Background technology
Traditional contact photolithography technique and projection lithography technique all need to make mask, realize litho pattern and turn over quarter by mask to substrate, be applicable to the production technology of the large semiconductor product of batch, but it is large to manufacture experimently then input cost for integrated circuit (IC) products research and development, expends the cycle long.
Laser direct-writing formula photoetching process does not need to make mask plate, laser beam after focusing is directly projected the relevant position of substrate, photosensitive to realize this place's photoresist, be combined with X/Y galvanometer scanning system, realize by the swing of laser beam focus to complete full wafer photoetching process in the movement of workplace, above-mentioned laser direct-writing formula photoetching process is mainly used in the write-through photoetching process of travelling-wave tube sphere aperture plate.F-theta camera lens is the core component realizing the photoetching of laser direct-writing formula, and it is accurately irradiated to the relevant position of substrate for realizing laser beam foucing, to complete the photoetching process of travelling-wave tube grids pattern.But along with the development of photoetching process, existing f-theta camera lens cannot meet the accuracy requirement of photoetching process.
Summary of the invention
The object of the invention is to propose a kind of F-theta optical lens, achieve the accurate linear mapping relation of laser beam photoetching position in the change of X/Y axial direction ± 11 ° angle and ± 50mm, make the location of laser beam foucing more accurate, energy distribution is evenly with concentrated, meet the accuracy requirement of photoetching process, and compact conformation, cost are lower.
For achieving the above object, the present invention proposes a kind of F-theta optical lens, comprise the first lens arranged along light direction, second lens, 3rd lens, 4th lens and the 5th lens, wherein, described first lens are concave-convex type positive lens, described second lens are double concave type negative lens, described 3rd lens are concave-convex type positive lens, described 4th lens are concave-convex type positive lens, described 5th lens are planoconvex positive lens, the focal length of this camera lens is 257mm, Entry pupil diameters is 15mm, lambda1-wavelength is 355nm, field angle is 11 °, working (finishing) area is 100 × 100mm.
Further, in above-mentioned F-theta optical lens, described first lens comprise relative first surface and the second curved surface, and wherein, the radius-of-curvature of described first surface is-485mm, and the radius-of-curvature of described second curved surface is-155mm; The optical axis center thickness of described first lens is 10mm, and the material of described first lens is quartz glass, and the refractive index of described first lens is 1.46.
Further, in above-mentioned F-theta optical lens, described second lens comprise the 3rd relative curved surface and the 4th curved surface, and wherein, the radius-of-curvature of described 3rd curved surface is-73mm, and the radius-of-curvature of described 4th curved surface is 197mm; The optical axis center thickness of described second lens is 10mm, and the material of described second lens is K9 glass, and the refractive index of described second lens is 1.53.
Further, in above-mentioned F-theta optical lens, described 3rd lens comprise the 5th relative curved surface and the 6th curved surface, and wherein, the radius-of-curvature of described 5th curved surface is-133mm, and the radius-of-curvature of described 6th curved surface is-90mm; The optical axis center thickness of described 3rd lens is 15mm, and the material of described 3rd lens is quartz glass, and the refractive index of described 3rd lens is 1.46.
Further, in above-mentioned F-theta optical lens, described 4th lens comprise the 7th relative curved surface and the 8th curved surface, and wherein, the radius-of-curvature of described 7th curved surface is-534mm, and the radius-of-curvature of described 8th curved surface is-159mm; The optical axis center thickness of described 4th lens is 20mm, and the material of described 4th lens is K9 glass, and the refractive index of described 4th lens is 1.53.
Further, in above-mentioned F-theta optical lens, described 5th lens comprise relative zigzag face and the tenth curved surface, and wherein, the radius-of-curvature in described zigzag face is infinitely great, and the radius-of-curvature of described tenth curved surface is 133mm; The optical axis center thickness of described 5th lens is 30mm, and the material of described 5th lens is K9 glass, and the refractive index of described 5th lens is 1.53.
Further, in above-mentioned F-theta optical lens, the distance of described first lens and laser scanning galvanometer is between 30-50mm.
Further, in above-mentioned F-theta optical lens, the first described lens and the distance of the second lens on optical axis are 50mm, described second lens and the distance of the 3rd lens on optical axis are 15mm, described 3rd lens and the distance of the 4th lens on optical axis are 12mm, and described 4th lens and the distance of the 5th lens on optical axis are 30mm.
Further, in above-mentioned F-theta optical lens, positioned by multiple spacer ring between described first lens, the second lens, the 3rd lens, the 4th lens and the 5th lens.
F-theta optical lens of the present invention is by being combined with X/Y galvanometer scanning system, the UV laser beam achieving 355nm wavelength accurate linear mapping relation of photoetching position within the scope of 0 ~ 50mm on Angular measures substrate in half field-of-view's incident angle range in 0 ~ 11 °, X/Y direction, make the location of laser beam foucing more accurate, energy distribution is evenly with concentrated, meet the accuracy requirement of photoetching process, and compact conformation, cost are lower.
Accompanying drawing explanation
Fig. 1 is the structural representation of F-theta optical lens of the present invention.
Fig. 2 is the disc of confusion schematic diagram of F-theta optical lens preferred embodiment of the present invention.
Fig. 3 is the distortion correction figure of F-theta optical lens preferred embodiment of the present invention.
Fig. 4 is the MTF transport function figure of F-theta optical lens preferred embodiment of the present invention.
Fig. 5 is the MTF transport function figure of laser direct-writing formula etching system under 345mm operating distance of dynamic of the present invention focusing.
Fig. 6 is the MTF transport function figure of laser direct-writing formula etching system under 350mm operating distance of dynamic of the present invention focusing.
Fig. 7 is the MTF transport function figure of laser direct-writing formula etching system under 355mm operating distance of dynamic of the present invention focusing.
Embodiment
The preferred embodiments of the present invention are described in detail below in conjunction with accompanying drawing.
Refer to Fig. 1, F-theta optical lens of the present invention comprise arrange along light direction the first lens L1, the second lens L2, the 3rd lens L3, the 4th lens L4 and the 5th lens L5, wherein, described first lens L1 is concave-convex type positive lens, described second lens L2 is double concave type negative lens, described 3rd lens L3 is concave-convex type positive lens, and described 4th lens L4 is concave-convex type positive lens, and described 5th lens L5 is planoconvex positive lens.
Wherein, described first lens L1 comprises relative first surface S1 and the second curved surface S2, and wherein, the radius-of-curvature of described first surface S1 is-485mm, and the radius-of-curvature of described second curved surface S2 is-155mm; The optical axis center thickness d 2 of described first lens L1 is 10mm, and the material of described first lens L1 is quartz glass, and the refractive index of described first lens L1 is 1.46.
Described second lens L2 comprises the 3rd relative curved surface S3 and the 4th curved surface S4, and wherein, the radius-of-curvature of described 3rd curved surface S3 is-73mm, and the radius-of-curvature of described 4th curved surface S4 is 197mm; The optical axis center thickness d 4 of described second lens L2 is 10mm, and the material of described second lens L2 is K9 glass, and the refractive index of described second lens L2 is 1.53.
Described 3rd lens L3 comprises the 5th relative curved surface S5 and the 6th curved surface S6, and wherein, the radius-of-curvature of described 5th curved surface S5 is-133mm, and the radius-of-curvature of described 6th curved surface S6 is-90mm; The optical axis center thickness d 6 of described 3rd lens L3 is 15mm, and the material of described 3rd lens L3 is quartz glass, and the refractive index of described 3rd lens L3 is 1.46.
Described 4th lens L4 comprises the 7th relative curved surface S7 and the 8th curved surface S8, and wherein, the radius-of-curvature of described 7th curved surface S7 is-534mm, and the radius-of-curvature of described 8th curved surface S8 is-159mm; The optical axis center thickness d 8 of described 4th lens L4 is 20mm, and the material of described 4th lens L4 is K9 glass, and the refractive index of described 4th lens L4 is 1.53.
Described 5th lens L5 comprises relative zigzag face S9 and the tenth curved surface S10, and wherein, the radius-of-curvature of described zigzag face S9 is infinitely great, and the radius-of-curvature of described tenth curved surface S10 is 133mm; The optical axis center thickness d 10 of described 5th lens L5 is 30mm, and the material of described 5th lens L5 is K9 glass, and the refractive index of described 5th lens L5 is 1.53.
Described F-theta optical lens swashs that the diaphragm diameter of light inlet side is maximum reaches 15mm, the distance d1 of described first lens L1 and laser scanning galvanometer is between 30-50mm, the first described lens L1 and the second distance d3 of lens L2 on optical axis is 50mm, described second lens L2 and the 3rd distance d5 of lens L3 on optical axis is 15mm, described 3rd lens L3 and the 4th distance d7 of lens L4 on optical axis is 12mm, and described 4th lens L4 and the 5th distance d9 of lens L5 on optical axis is 30mm.
Accurately located by multiple spacer ring between described first lens L1, the second lens L2, the 3rd lens L3, the 4th lens L4 and the 5th lens L5, and the clear aperture of the inner ring of the plurality of spacer ring strains greatly mutually according to the increase gradually of laser beam hunting range, to ensure passing through smoothly of laser beam, microscope base internal diameter coordinates with lens small―gap suture, ensures that the right alignment of each lens and site error meet request for utilization.The tolerance strict guarantee of the clearance fit of the external diameter of the alignment lens of lens and the internal diameter of f-theta lens microscope base.
The focal length of F-theta optical lens of the present invention is 257mm, and Entry pupil diameters is 15mm, and incident wavelength is 355nm, and field angle is 11 °, and working (finishing) area is 100 × 100mm
2.
Refer to Fig. 2, Fig. 3 and Fig. 4, it is respectively the disc of confusion schematic diagram of F-theta optical lens preferred embodiment of the present invention, distortion correction figure, optical transfer function MTF scheme.
Compared to prior art, F-theta optical lens tool of the present invention has the following advantages:
The accurate linear mapping relation of the change 1, achieving the angle of X/Y axial direction ± 11 ° and photoetching position in ± 50mm, anchor point error is less than ± and 5
m.
2, laser is less than 20 by the focus point disc of confusion size after f-theta lens
m, meets the precision needs of laser direct-writing formula photoetching.
3, Optical System Design is telecentric beam path, and laser beam impinges perpendicularly on workplace, makes the location of laser beam foucing more accurate, and energy distribution is evenly and concentrate.
4, in system, the optical material of large lens is K9 glass, and effectively provide cost savings, cost performance is high.
To sum up, F-theta optical lens of the present invention is by being combined with X/Y galvanometer scanning system, the UV laser beam achieving 355nm wavelength accurate linear mapping relation of photoetching position within the scope of 0 ~ 50mm on Angular measures substrate in half field-of-view's incident angle range in 0 ~ 11 °, X/Y direction, make the location of laser beam foucing more accurate, energy distribution is evenly with concentrated, meet the accuracy requirement of photoetching process, and compact conformation, cost are lower.
Here description of the invention and application is illustrative, not wants by scope restriction of the present invention in the above-described embodiments.Distortion and the change of embodiment disclosed are here possible, are known for the replacement of embodiment those those of ordinary skill in the art and the various parts of equivalence.Those skilled in the art are noted that when not departing from spirit of the present invention or essential characteristic, the present invention can in other forms, structure, layout, ratio, and to realize with other assembly, material and parts.When not departing from the scope of the invention and spirit, can other distortion be carried out here to disclosed embodiment and change.
Claims (9)
1. a F-theta optical lens, it is characterized in that, comprise the first lens, the second lens, the 3rd lens, the 4th lens and the 5th lens that arrange along light direction, wherein, described first lens are concave-convex type positive lens, described second lens are double concave type negative lens, described 3rd lens are concave-convex type positive lens, described 4th lens are concave-convex type positive lens, and described 5th lens are planoconvex positive lens, and the focal length of this camera lens is 257mm, Entry pupil diameters is 15mm, lambda1-wavelength is 355nm, and field angle is 11 °, and working (finishing) area is 100 × 100mm.
2. F-theta optical lens according to claim 1, is characterized in that, described first lens comprise relative first surface and the second curved surface, and wherein, the radius-of-curvature of described first surface is-485mm, and the radius-of-curvature of described second curved surface is-155mm; The optical axis center thickness of described first lens is 10mm, and the material of described first lens is quartz glass, and the refractive index of described first lens is 1.46.
3. F-theta optical lens according to claim 1, is characterized in that, described second lens comprise the 3rd relative curved surface and the 4th curved surface, and wherein, the radius-of-curvature of described 3rd curved surface is-73mm, and the radius-of-curvature of described 4th curved surface is 197mm; The optical axis center thickness of described second lens is 10mm, and the material of described second lens is K9 glass, and the refractive index of described second lens is 1.53.
4. F-theta optical lens according to claim 1, is characterized in that, described 3rd lens comprise the 5th relative curved surface and the 6th curved surface, and wherein, the radius-of-curvature of described 5th curved surface is-133mm, and the radius-of-curvature of described 6th curved surface is-90mm; The optical axis center thickness of described 3rd lens is 15mm, and the material of described 3rd lens is quartz glass, and the refractive index of described 3rd lens is 1.46.
5. F-theta optical lens according to claim 1, is characterized in that, described 4th lens comprise the 7th relative curved surface and the 8th curved surface, and wherein, the radius-of-curvature of described 7th curved surface is-534mm, and the radius-of-curvature of described 8th curved surface is-159mm; The optical axis center thickness of described 4th lens is 20mm, and the material of described 4th lens is K9 glass, and the refractive index of described 4th lens is 1.53.
6. F-theta optical lens according to claim 1, is characterized in that, described 5th lens comprise relative zigzag face and the tenth curved surface, and wherein, the radius-of-curvature in described zigzag face is infinitely great, and the radius-of-curvature of described tenth curved surface is 133mm; The optical axis center thickness of described 5th lens is 30mm, and the material of described 5th lens is K9 glass, and the refractive index of described 5th lens is 1.53.
7. F-theta optical lens according to claim 1, is characterized in that, the distance of described first lens and laser scanning galvanometer is between 30-50mm.
8. F-theta optical lens according to claim 7, it is characterized in that, the first described lens and the distance of the second lens on optical axis are 50mm, described second lens and the distance of the 3rd lens on optical axis are 15mm, described 3rd lens and the distance of the 4th lens on optical axis are 12mm, and described 4th lens and the distance of the 5th lens on optical axis are 30mm.
9. F-theta optical lens according to claim 1, is characterized in that, is positioned between described first lens, the second lens, the 3rd lens, the 4th lens and the 5th lens by multiple spacer ring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410457580.7A CN104317034B (en) | 2014-09-10 | 2014-09-10 | f-theta optical lens |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410457580.7A CN104317034B (en) | 2014-09-10 | 2014-09-10 | f-theta optical lens |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104317034A true CN104317034A (en) | 2015-01-28 |
| CN104317034B CN104317034B (en) | 2017-04-19 |
Family
ID=52372283
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410457580.7A Expired - Fee Related CN104317034B (en) | 2014-09-10 | 2014-09-10 | f-theta optical lens |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104317034B (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108873265A (en) * | 2018-08-23 | 2018-11-23 | 安徽大学 | A kind of alignment camera lens for laser direct imaging photoetching |
| WO2019042339A1 (en) * | 2017-08-30 | 2019-03-07 | 上海微电子装备（集团）股份有限公司 | F-theta lens suitable for use in laser processing |
| CN110146968A (en) * | 2019-04-04 | 2019-08-20 | 南京波长光电科技股份有限公司 | One kind disappears the curvature of field and the ultraviolet telecentricity f-theta camera lens of anastigmatic 355nm |
| WO2020010538A1 (en) * | 2018-07-11 | 2020-01-16 | 大族激光科技产业集团股份有限公司 | Telecentric lens and laser processing equipment |
| DE102022105366A1 (en) | 2022-03-08 | 2023-09-14 | Trumpf Laser Gmbh | F-theta lens and scanner device therewith |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5817408A (en) * | 1981-07-24 | 1983-02-01 | Olympus Optical Co Ltd | Uniform-velocity scanning lens |
| US4925279A (en) * | 1988-09-20 | 1990-05-15 | Dainippon Screen Mfg. Co., Ltd. | Telecentric f-θ lens system |
| CN103323932A (en) * | 2012-03-21 | 2013-09-25 | 业纳光学系统有限公司 | Color-corrected F-theta objective for laser material processing |
| CN203786376U (en) * | 2013-07-16 | 2014-08-20 | 业纳光学系统有限公司 | F-theta objective lens |
-
2014
- 2014-09-10 CN CN201410457580.7A patent/CN104317034B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5817408A (en) * | 1981-07-24 | 1983-02-01 | Olympus Optical Co Ltd | Uniform-velocity scanning lens |
| US4925279A (en) * | 1988-09-20 | 1990-05-15 | Dainippon Screen Mfg. Co., Ltd. | Telecentric f-θ lens system |
| CN103323932A (en) * | 2012-03-21 | 2013-09-25 | 业纳光学系统有限公司 | Color-corrected F-theta objective for laser material processing |
| US20130279027A1 (en) * | 2012-03-21 | 2013-10-24 | Jenoptik Optical Systems Gmbh | Color-corrected f-theta objective for laser material processing |
| CN203786376U (en) * | 2013-07-16 | 2014-08-20 | 业纳光学系统有限公司 | F-theta objective lens |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019042339A1 (en) * | 2017-08-30 | 2019-03-07 | 上海微电子装备（集团）股份有限公司 | F-theta lens suitable for use in laser processing |
| TWI664044B (en) * | 2017-08-30 | 2019-07-01 | 大陸商上海微電子裝備（集團）股份有限公司 | F-theta lens suitable for use in laser processing |
| WO2020010538A1 (en) * | 2018-07-11 | 2020-01-16 | 大族激光科技产业集团股份有限公司 | Telecentric lens and laser processing equipment |
| CN108873265A (en) * | 2018-08-23 | 2018-11-23 | 安徽大学 | A kind of alignment camera lens for laser direct imaging photoetching |
| CN110146968A (en) * | 2019-04-04 | 2019-08-20 | 南京波长光电科技股份有限公司 | One kind disappears the curvature of field and the ultraviolet telecentricity f-theta camera lens of anastigmatic 355nm |
| CN110146968B (en) * | 2019-04-04 | 2023-11-28 | 南京波长光电科技股份有限公司 | 355nm ultraviolet telecentric f-theta lens capable of eliminating field curvature and astigmatism |
| DE102022105366A1 (en) | 2022-03-08 | 2023-09-14 | Trumpf Laser Gmbh | F-theta lens and scanner device therewith |
| WO2023169890A1 (en) | 2022-03-08 | 2023-09-14 | Trumpf Laser Gmbh | F-theta objective and scanner device equipped therewith |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104317034B (en) | 2017-04-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104317034A (en) | F-theta optical lens | |
| CN103499877B (en) | A kind of projection optical system of large-numerical aperture | |
| CN103926683B (en) | A kind of varifocal optical system | |
| CN102629082B (en) | Design method of extreme ultra-violet lithography compound eye lighting system | |
| CN104199173B (en) | A kind of single multiplying power symmetrical expression projection exposure object lens | |
| CN104238285A (en) | Laser direct writing type photoetching system capable of dynamically focusing | |
| CN102645749B (en) | Magnification regulating method of projection optical system | |
| JP7273162B2 (en) | Lithography projection objective lens | |
| WO2019062941A1 (en) | Projection objective | |
| CN103499876B (en) | A kind of pure refractive projection optics system of large-numerical aperture | |
| TW201807510A (en) | Double-layered micro-lens array optical device which generally comprises a substrate having a surface on which a plurality of pinhole structures arranged in an array and two surfaces of the substrate are each provided with an optical micro-lens array | |
| CN102662307B (en) | High-resolution projection optical system | |
| CN103293863B (en) | A kind of lithography illuminating system | |
| CN104035187B (en) | Pure reflecting dry type projection optical system with large numerical aperture | |
| CN103353669B (en) | High-numerical aperture immersion projection objective lens | |
| CN103837967B (en) | The i-line projection lens of lithography machine of a kind of large visual field high-NA | |
| CN102981375B (en) | Method for designing relay lens group in extreme ultra-violet lithography lighting system | |
| CN104950427A (en) | Large-field-of-view and full-spherical-surface type mask aligner projection objective with high numerical aperture | |
| CN106681093B (en) | Ultraviolet laser projection lens | |
| CN106292189A (en) | A kind of illuminator | |
| CN101221280B (en) | Full reflection projection optical system | |
| US10459343B2 (en) | Illumination device | |
| JP5360529B2 (en) | Projection optical system, exposure apparatus, and device manufacturing method | |
| CN108873265B (en) | Alignment lens for laser direct imaging photoetching | |
| CN102508353A (en) | High-resolution Forbes aspherical photoetching objective lens |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170419 Termination date: 20170910 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |