CN110146968A - One kind disappears the curvature of field and the ultraviolet telecentricity f-theta camera lens of anastigmatic 355nm - Google Patents
One kind disappears the curvature of field and the ultraviolet telecentricity f-theta camera lens of anastigmatic 355nm Download PDFInfo
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- CN110146968A CN110146968A CN201910268787.2A CN201910268787A CN110146968A CN 110146968 A CN110146968 A CN 110146968A CN 201910268787 A CN201910268787 A CN 201910268787A CN 110146968 A CN110146968 A CN 110146968A
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- 201000009310 astigmatism Diseases 0.000 claims abstract description 27
- 230000005540 biological transmission Effects 0.000 claims abstract description 8
- 230000003287 optical effect Effects 0.000 claims abstract description 8
- 230000005499 meniscus Effects 0.000 claims abstract description 3
- 239000000463 material Substances 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 238000012512 characterization method Methods 0.000 claims description 3
- 238000010606 normalization Methods 0.000 claims description 3
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 claims description 2
- 230000008018 melting Effects 0.000 claims 1
- 238000002844 melting Methods 0.000 claims 1
- 238000013461 design Methods 0.000 abstract description 6
- 238000005553 drilling Methods 0.000 abstract description 4
- 239000005350 fused silica glass Substances 0.000 description 4
- 238000009738 saturating Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 239000004753 textile Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/0005—Optical objectives specially designed for the purposes specified below having F-Theta characteristic
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/22—Telecentric objectives or lens systems
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- Optics & Photonics (AREA)
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Abstract
Disappear the curvature of field and the ultraviolet telecentricity f-theta camera lens of anastigmatic 355nm the invention discloses one kind, including the first lens, the second lens, the third lens, the 4th lens, the 5th lens and the 6th lens set gradually along incident ray transmission direction；First lens are negative meniscus, and the second lens are curved month type positive lens, and the third lens are plano-convex positive lens, and the 4th lens are curved month type positive lens, and the 5th lens are biconvex positive lens, and the 6th lens are biplane protecting window piece.The present invention passes through the setting of specific structure optical system, so that the curvature of field of telecentricity F-theta camera lens and astigmatism reduce highly significant；Further, by the reasonable distribution of the higher design freedom of free form surface and flexible space layout and lens group focal power, astigmatism is less than 0.04mm, and the curvature of field controls in 0.02mm；Telecentricity is less than 1 °；Suitable for requiring flat field harsh field to the micro- retrofit of the more demanding ultraviolet laser of flat field and astigmatism or ultraviolet laser drilling etc..
Description
Technical field
Disappear the curvature of field and the ultraviolet telecentricity f-theta camera lens of anastigmatic 355nm the present invention relates to one kind, it is ultraviolet to belong to 355nm
Telecentricity f-theta camera lens field.
Background technique
355nm ultraviolet laser f-theta camera lens is mainly used for various glass, liquid crystal display, textile, thin slice ceramics, partly leads
Mark, cutting, drilling, microfabrication and the surface treatments of materials such as body silicon wafer, IC crystal grain, sapphire or thin polymer film etc..
The ultraviolet telecentricity f-theta camera lens of 355nm requires whole field smooth, and the curvature of field will lead to the bending of best effort face, astigmatism meeting
It causes X, Y both direction line width inconsistent or drilling becomes oval, in the micro- retrofit of laser, laser drill processing etc. to flat
Field requires harsher occasion, it is desirable that used telecentricity F-theta camera lens eliminates the curvature of field, the adverse effect of astigmatism as far as possible.
However the astigmatism and the curvature of field of existing ultraviolet f-theta camera lens are still larger, and then influence processing quality.Such as it is public
The number of opening is the patent application of CN 101846790A, can be seen that astigmatism is about 0.3mm from its Fig. 4；Publication No. CN
105527706A patent application can be seen that the curvature of field is about 0.08mm from its Fig. 4.Therefore, it is highly desirable to further decrease ultraviolet
The curvature of field and astigmatism of telecentric scan lens remnants.
And since common optical glass in ultraviolet 355nm wave band has strong absorption, the ultraviolet telecentricity f-theta of 355nm is saturating
The material of mirror generally selects ultraviolet fused silica glass, the f-theta lens of 355nm wave band cannot as 532nm, 1064nm,
The f-theta lens of 10.6um wave band equally select a variety of different refractivity materials to carry out collocation design, otherwise can seriously affect function
Rate, in addition the refractive index of fused silica glass is lower, factors above causes to further decrease the ultraviolet telecentricity f-theta of 355nm saturating
The curvature of field of mirror and the difficulty of astigmatism are larger.
Summary of the invention
In order to further decrease the curvature of field and astigmatism of ultraviolet telecentric scan lens remnants, the present invention provide one kind disappear the curvature of field and
The anastigmatic ultraviolet telecentricity f-theta camera lens of 355nm, so that the curvature of field and astigmatism are significantly reduced.
In order to solve the above technical problems, the technical solution adopted in the present invention is as follows:
One kind disappears the curvature of field and the ultraviolet telecentricity f-theta camera lens of anastigmatic 355nm, including along incident ray transmission direction according to
The first lens, the second lens, the third lens, the 4th lens, the 5th lens and the 6th lens of secondary setting；First lens are bent moon
Shape negative lens, the second lens are curved month type positive lens, and the third lens are plano-convex positive lens, and the 4th lens are curved month type positive lens,
5th lens are biconvex positive lens, and the 6th lens are biplane protecting window piece.
The curvature of field in the prior art and astigmatism are lowered into bottleneck period, and the reduction of every 0.01mm is all extremely difficult, especially
It is that the reduction of the curvature of field is extremely difficult, and applicant it has been investigated that, the setting of above-mentioned specific structure optical system, so that telecentricity
The curvature of field and astigmatism of F-theta camera lens obtain the reduction of highly significant simultaneously, and astigmatism reduces an order of magnitude, and the curvature of field reduces
4 times or so.
In order to further decrease the curvature of field and astigmatism, along incident ray transmission direction, the two sides of the first lens is followed successively by first
Object side and the first image side surface, the first image side surface are using the free form surface of extension multinomial characterization, and used extension is multinomial
Formula formula are as follows:
Wherein, j=[(m+n)2+ m+3n]/2+1, z is free form surface rise, and x and y are each face local coordinate, and c is vertex
Curvature, k are circular cone coefficient, Cj xmynMultinomial coefficient, r are apart from optical axis mirror surface bore, m value range 0~10, n value model
0~10 is enclosed, normalization coefficient 1.
The selection of the application the first optics of lens free form surface, so that the curvature of field and astigmatism have further significant reduction,
The relatively traditional spherical lens of free form surface or non-spherical lens design freedom with higher and flexible space layout.
The first lens of reasonable distribution can further decrease the curvature of field and astigmatism, it is preferable that -0.8 to the 5th power of lens
<f1/f0<-0.4；2.0<f2/f0<2.5；1.0<f3/f0<2.0；2.0<f4/f0<3.0；2.0 < f5/f0 < 2.5, wherein f1 is
First focal length of lens, f2 are second focal length of lens, and f3 is the third lens focal length, and f4 is the 4th focal length of lens, and f5 is the 5th lens
Focal length, f0 are system total focal length.
The astigmatism of above-mentioned the disappear curvature of field and the ultraviolet telecentricity f-theta camera lens of anastigmatic 355nm is less than 0.04mm, and the curvature of field exists
In 0.02mm, it is significantly better than existing equipment and existing published related registration.
In order to further decrease the curvature of field and astigmatism, the center thickness of the first lens is 10 ± 0.2mm, the center of the second lens
With a thickness of 15 ± 0.2mm, the center thickness of the third lens is 24 ± 0.2mm, and the center thickness of the 4th lens is 20 ± 0.2mm,
The center thickness of 5th lens is 20 ± 0.2mm, and the center thickness of the 6th lens is 3 ± 0.2mm.
In order to guarantee transmitance, the outer diameter of the first lens is 50-68mm, and the outer diameter of the second lens is 72-85mm, and third is saturating
The outer diameter of mirror is 100-108mm, and the outer diameter of the 4th lens is 120-125mm, and the outer diameter of the 5th lens is 135mm, the 6th lens
Outer diameter be 135mm.
Along incident ray transmission direction, the two sides of the first lens is followed successively by the first object side and the first image side surface, and second thoroughly
The two sides of mirror is followed successively by the second object side and the second image side surface, and the two sides of the third lens is followed successively by third object side and third image side
Face, the two sides of the 4th lens are followed successively by the 4th object side and the 4th image side surface, and the two sides of the 5th lens is followed successively by the 5th object side
The 6th object side and the 6th image side surface are followed successively by with the two sides of the 5th image side surface, the 6th lens；In order to further decrease the curvature of field and
Astigmatism, the first object side are spherical surface, and the first image side surface is free form surface；Second object side is spherical surface, and the second image side surface is spherical surface；
Third object side is spherical surface, and third image side surface is spherical surface；4th object side is spherical surface, and the 4th image side surface is spherical surface；5th object side
Face is spherical surface, and the 5th image side surface is spherical surface；6th object side is plane, and the 6th image side surface is plane.
In order to improve transmitance and working efficiency, while the curvature of field and astigmatism are further decreased, the curvature half of the first object side
Diameter is -41.729 ± 2mm, and the radius of curvature of the first image side surface is 776.55 ± 2mm；The radius of curvature of second object side be-
168.30 ± 2mm, the radius of curvature of the second image side surface are -86.40 ± 2mm；The radius of curvature of third object side is infinity, the
The radius of curvature of three image side surfaces is -98.55 ± 2mm；The radius of curvature of 4th object side is -363.33 ± 2mm, the 4th image side surface
Radius of curvature be -142.14 ± 2mm；The radius of curvature of 5th object side is 682.42 ± 2mm, the curvature half of the 5th image side surface
Diameter is -217.33 ± 2mm.
Further preferably, the distance at the first image side surface center to the second object center side is 6.3 ± 0.02mm, the second image side
Face center to third object center side distance be 2.45 ± 0.02mm, third image side surface center to the 4th object center side away from
It is 7.50 ± 0.02mm, the 5th image side from the distance for 7.40 ± 0.02mm, the 4th image side surface center to the 5th object center side
The distance of face center to the 6th object center side is 6 ± 0.02mm.
Material used in first lens, the second lens, the third lens, the 4th lens, the 5th lens and the 6th lens is purple
Outer fused silica glass is 1.476 in the refractive index of 355nm.
The disappear astigmatism of the curvature of field and the ultraviolet telecentricity f-theta camera lens of anastigmatic 355nm of the application is less than 0.04mm, and the curvature of field is not
Greater than 0.02mm, telecentricity is less than 1 °.
The unmentioned technology of the present invention is referring to the prior art.
The present invention disappears the curvature of field and the ultraviolet telecentricity f-theta camera lens of anastigmatic 355nm, passes through specific structure optical system
Setting, so that the curvature of field of telecentricity F-theta camera lens and astigmatism reduce highly significant；Further, by the higher of free form surface
The reasonable distribution of design freedom and flexible space layout and lens group focal power, astigmatism are less than 0.04mm, curvature of field control
In 0.02mm；Telecentricity is less than 1 °；Suitable for the micro- retrofit of the more demanding ultraviolet laser of flat field and astigmatism or purple
Outer laser drill etc. requires flat field harsh field.
Detailed description of the invention
Fig. 1 is the optical texture of the curvature of field and the ultraviolet telecentricity f-theta camera lens of anastigmatic 355nm of disappearing in the embodiment of the present invention
Figure；
Fig. 2 is the index path in the embodiment of the present invention；
Fig. 3 is the optical transfer function figure in the embodiment of the present invention；
Fig. 4 is the curvature of field and f-theta distortion figure in the embodiment of the present invention.
Specific embodiment
For a better understanding of the present invention, below with reference to the embodiment content that the present invention is furture elucidated, but it is of the invention
Content is not limited solely to the following examples.
As shown in Figure 1, the disappear curvature of field and the ultraviolet telecentricity f-theta camera lens of anastigmatic 355nm, including transmitted along incident ray
The first lens G1 that direction is set gradually, the second lens G2, the third lens G3, the 4th lens G4, the 5th lens G5 and the 6th are saturating
Mirror G6；First lens be negative meniscus, the second lens be curved month type positive lens, the third lens be plano-convex positive lens, the 4th
Lens are curved month type positive lens, and the 5th lens are biconvex positive lens, and the 6th lens are biplane protecting window piece.
Along incident ray transmission direction, the two sides of the first lens is followed successively by the first object side S2 and the first image side surface S3, the
The two sides of two lens is followed successively by the second object side S4 and the second image side surface S5, and the two sides of the third lens is followed successively by third object side S6
With third image side surface S7, the two sides of the 4th lens is followed successively by the 4th object side S8 and the 4th image side surface S9, the two sides of the 5th lens
It is followed successively by the 5th object side S10 and the 5th image side surface S11, the two sides of the 6th lens is followed successively by the 6th object side S12 and the 6th picture
Side S13.
Table 1 is the design parameter of the curvature of field and the ultraviolet telecentricity f-theta camera lens of anastigmatic 355nm of disappearing in the present embodiment,
SILICA is ultraviolet fused quartz glass code name.
Table 1 disappears the design parameter of the curvature of field and the ultraviolet telecentricity f-theta camera lens of anastigmatic 355nm
In upper table, S1 is incident diaphragm, and S14 is working face or image planes, and S1 is corresponding with a thickness of diaphragm to the first object side
The distance at center, the corresponding center thickness with a thickness of the first lens of S2, S3 are corresponding with a thickness of the first image side surface center to
The distance of two object center sides, the corresponding center thickness with a thickness of the second lens of S4, S5 are corresponding with a thickness of the second image side surface
Distance of the center to third object center side, the corresponding center thickness with a thickness of the third lens of S6, S7 correspond to the thickness of image side surface
Degree is distance of the third image side surface center to the 4th object center side, the corresponding center thickness with a thickness of the 4th lens of S8, S9
The corresponding distance with a thickness of the 4th image side surface center to the 5th object center side, S10 are corresponding with a thickness of in the 5th lens
Heart thickness, the corresponding distance with a thickness of the 5th image side surface center to the 6th object center side of S11, S12 are corresponding with a thickness of
The center thickness of six lens, the corresponding distance with a thickness of the 6th image side surface to working face of S13；Outer diameter be each lens object side and
The outer diameter of the effective working face of image side surface.
First image side surface is using the free form surface of extension multinomial characterization, used extension polynomial equation are as follows:
Wherein, j=[(m+n)2+ m+3n]/2+1, z is free form surface rise, and x and y are each face local coordinate, and c is vertex
Curvature, k are circular cone coefficient, Cj xmynMultinomial coefficient, r are apart from optical axis mirror surface bore, m value range 0~10, n value model
0~10 is enclosed, normalization coefficient 1, the present embodiment Cj takes 21.Specific coefficient is shown in Table 2.
2 free form surface coefficient of table
F1/f0=-0.5；F2/f0=2.14；F3/f0=1.3；F4/f0=2.9；F5/f0=2.13；Wherein, f1
One focal length of lens, f2 are second focal length of lens, and f3 is the third lens focal length, and f4 is the 4th focal length of lens, and f5 is that the 5th lens are burnt
Away from f0 is system total focal length, f0 163mm.
The scanning range 90mmx90mm of above-mentioned the disappear curvature of field and the ultraviolet telecentricity f-theta camera lens of anastigmatic 355nm, telecentricity
Degree is less than 1 °.Fig. 3 shows that the image quality of the ultraviolet telecentricity f-theta camera lens of the present embodiment 355nm corrects, and reaches diffraction limit；Fig. 4
Show that the astigmatic correction of the ultraviolet telecentricity f-theta camera lens of the present embodiment 355nm is less than 0.04mm, the curvature of field is about 0.02mm, work
Face is smooth；Suitable for the micro- retrofit of the more demanding ultraviolet laser of flat field and astigmatism or ultraviolet laser drilling etc. to flat field
It is required that harsh field.
Claims (10)
- The curvature of field and the ultraviolet telecentricity f-theta camera lens of anastigmatic 355nm 1. one kind disappears, it is characterised in that: including along incident ray The first lens, the second lens, the third lens, the 4th lens, the 5th lens and the 6th lens that transmission direction is set gradually；First Lens are negative meniscus, and the second lens are curved month type positive lens, and the third lens are plano-convex positive lens, and the 4th lens are bent moon Type positive lens, the 5th lens are biconvex positive lens, and the 6th lens are biplane protecting window piece.
- 2. disappear the curvature of field and the ultraviolet telecentricity f-theta camera lens of anastigmatic 355nm as described in claim 1, it is characterised in that: edge Incident ray transmission direction, the two sides of the first lens are followed successively by the first object side and the first image side surface, and the first image side surface is to use Extend the free form surface of multinomial characterization, used extension polynomial equation are as follows:Wherein, j=[(m+n)2+ m+3n]/2+1, z is free form surface rise, and x and y are each face local coordinate, and c is vertex curvature, k For circular cone coefficient, Cj xmynMultinomial coefficient, r are the m value range 0~10 apart from optical axis mirror surface bore, n value range 0~ 10, normalization coefficient 1.
- 3. the curvature of field that disappears as claimed in claim 1 or 2 and the ultraviolet telecentricity f-theta camera lens of anastigmatic 355nm, feature exist In: -0.8 < f1/f0 < -0.4；2.0<f2/f0<2.5；1.0<f3/f0<2.0；2.0<f4/f0<3.0；2.0 < f5/f0 < 2.5, In, f1 is first focal length of lens, and f2 is second focal length of lens, and f3 is the third lens focal length, and f4 is the 4th focal length of lens, f5 the Five focal lengths of lens, f0 are system total focal length.
- 4. the curvature of field that disappears as claimed in claim 1 or 2 and the ultraviolet telecentricity f-theta camera lens of anastigmatic 355nm, feature exist In: the center thickness of the first lens is 10 ± 0.2mm, and the center thickness of the second lens is 15 ± 0.2mm, the center of the third lens With a thickness of 24 ± 0.2mm, the center thickness of the 4th lens is 20 ± 0.2mm, and the center thickness of the 5th lens is 20 ± 0.2mm, The center thickness of 6th lens is 3 ± 0.2mm.
- 5. the curvature of field that disappears as claimed in claim 1 or 2 and the ultraviolet telecentricity f-theta camera lens of anastigmatic 355nm, feature exist In: the outer diameter of the first lens is 50-68mm, and the outer diameter of the second lens is 72-85mm, and the outer diameter of the third lens is 100-108mm, The outer diameter of 4th lens is 120-125mm, and the outer diameter of the 5th lens is 135mm, and the outer diameter of the 6th lens is 135mm.
- 6. the curvature of field that disappears as claimed in claim 1 or 2 and the ultraviolet telecentricity f-theta camera lens of anastigmatic 355nm, feature exist In: along incident ray transmission direction, the two sides of the first lens is followed successively by the first object side and the first image side surface, and the two of the second lens Face is followed successively by the second object side and the second image side surface, and the two sides of the third lens is followed successively by third object side and third image side surface, the The two sides of four lens is followed successively by the 4th object side and the 4th image side surface, and the two sides of the 5th lens is followed successively by the 5th object side and the 5th The two sides of image side surface, the 6th lens is followed successively by the 6th object side and the 6th image side surface；First object side is spherical surface, the first image side surface For free form surface；Second object side is spherical surface, and the second image side surface is spherical surface；Third object side is spherical surface, and third image side surface is ball Face；4th object side is spherical surface, and the 4th image side surface is spherical surface；5th object side is spherical surface, and the 5th image side surface is spherical surface；6th object Side is plane, and the 6th image side surface is plane.
- 7. disappear the curvature of field and the ultraviolet telecentricity f-theta camera lens of anastigmatic 355nm as claimed in claim 6, it is characterised in that: the The radius of curvature of one object side is -41.729 ± 2mm, and the radius of curvature of the first image side surface is 776.55 ± 2mm；Second object side Radius of curvature be -168.30 ± 2mm, the radius of curvature of the second image side surface is -86.40 ± 2mm；The curvature of third object side half Diameter is infinity, and the radius of curvature of third image side surface is -98.55 ± 2mm；The radius of curvature of 4th object side be -363.33 ± 2mm, the radius of curvature of the 4th image side surface are -142.14 ± 2mm；The radius of curvature of 5th object side be 682.42 ± 2mm, the 5th The radius of curvature of image side surface is -217.33 ± 2mm.
- 8. disappear the curvature of field and the ultraviolet telecentricity f-theta camera lens of anastigmatic 355nm as claimed in claim 6, it is characterised in that: the The distance at one image side surface center to the second object center side is 6.3 ± 0.02mm, and the second image side surface center is into third object side The distance of the heart is 2.45 ± 0.02mm, and the distance at third image side surface center to the 4th object center side is 7.40 ± 0.02mm, the The distance at four image side surface centers to the 5th object center side is 7.50 ± 0.02mm, and the 5th image side surface center is into the 6th object side The distance of the heart is 6 ± 0.02mm.
- 9. the curvature of field that disappears as claimed in claim 1 or 2 and the ultraviolet telecentricity f-theta camera lens of anastigmatic 355nm, feature exist In: material used in the first lens, the second lens, the third lens, the 4th lens, the 5th lens and the 6th lens is ultraviolet melting Quartz glass.
- 10. the curvature of field that disappears as claimed in claim 1 or 2 and the ultraviolet telecentricity f-theta camera lens of anastigmatic 355nm, feature exist In: astigmatism is less than 0.04mm, and the curvature of field is not more than 0.02mm, and telecentricity is less than 1 °.
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| CN201910268787.2A CN110146968B (en) | 2019-04-04 | 2019-04-04 | 355nm ultraviolet telecentric f-theta lens capable of eliminating field curvature and astigmatism |
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| CN201910268787.2A CN110146968B (en) | 2019-04-04 | 2019-04-04 | 355nm ultraviolet telecentric f-theta lens capable of eliminating field curvature and astigmatism |
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Cited By (4)
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| CN112415739A (en) * | 2020-11-17 | 2021-02-26 | 南京波长光电科技股份有限公司 | Laser scanning optical system with variable working distance |
| CN112578538A (en) * | 2020-12-30 | 2021-03-30 | 青岛海泰新光科技股份有限公司 | Telecentric F-Theta scanning lens for blue laser processing |
| WO2021168881A1 (en) * | 2020-02-24 | 2021-09-02 | 诚瑞光学(常州)股份有限公司 | Camera optical lens |
| CN113721353A (en) * | 2021-08-11 | 2021-11-30 | 苏州中科行智智能科技有限公司 | Image space telecentric objective lens with large numerical aperture and flying spot scanning interferometer |
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