CN110007434A - A kind of the disappear curvature of field and anastigmatic CO based on free form surface2Telecentricity f-theta camera lens - Google Patents

A kind of the disappear curvature of field and anastigmatic CO based on free form surface2Telecentricity f-theta camera lens Download PDF

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Publication number
CN110007434A
CN110007434A CN201910268722.8A CN201910268722A CN110007434A CN 110007434 A CN110007434 A CN 110007434A CN 201910268722 A CN201910268722 A CN 201910268722A CN 110007434 A CN110007434 A CN 110007434A
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lens
curvature
image side
free form
field
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CN110007434B (en
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梁思远
王国力
吴玉堂
朱敏
刘建芬
刘旭东
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Nanjing Wavelength Optoelectronics Technology Co Ltd
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Nanjing Wavelength Optoelectronics Technology Co Ltd
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00Optical objectives specially designed for the purposes specified below
    • G02B13/0005Optical objectives specially designed for the purposes specified below having F-Theta characteristic
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00Optical objectives specially designed for the purposes specified below
    • G02B13/22Telecentric objectives or lens systems
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0025Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration

Abstract

The invention discloses a kind of the disappear curvature of field and anastigmatic CO based on free form surface2Telecentricity f-theta camera lens, including the first lens, the second lens, the third lens and the 4th lens set gradually along incident ray transmission direction;First lens are negative meniscus, and the second lens are curved month type positive lens, and the third lens are plano-convex positive lens, and the 4th lens are biplane protecting window piece;Along incident ray transmission direction, the two sides of the first lens is followed successively by the first object side and the first image side surface, and the first image side surface is free form surface.The present invention is based on the disappear curvature of field and the anastigmatic CO of free form surface2Telecentricity f-theta camera lens, so that the curvature of field and astigmatism at least reduce an order of magnitude, is dissipated by the design of free form surface and the curvature of field is respectively less than 0.02mm.

Description

A kind of the disappear curvature of field and anastigmatic CO based on free form surface2Telecentricity f-theta camera lens
Technical field
The present invention relates to a kind of the disappear curvature of field and anastigmatic CO based on free form surface2Telecentricity f-theta camera lens, belongs to CO2 Telecentricity f-theta camera lens field.
Background technique
The advantages of mirror-vibrating laser scanning technique is with its high speed, accurate scan, is widely used in laser marking, laser drilling In the technologies such as hole, laser scanning display, laser issue high energy laser beam successively pass through the mutually perpendicular X of direction of vibration and Y vibration lens is incident on f-theta scanning mirror, reaches workpiece surface after being focused by f-theta scanning mirror;It is swept by rotating X and Y Galvanometer is retouched, laser beam is can control and is moved on the X and Y-direction and any direction of workpiece surface, realizes vector mark or punching.
The whole field of f-theta scanning mirror design requirement is smooth, and the curvature of field will lead to the bending of best effort face, and astigmatism will cause X, Y Both direction line width is inconsistent or drilling becomes oval, in the micro- retrofit of laser, laser drill processing etc. to flat field requirement In harsher application, it is desirable that used telecentricity F-theta camera lens eliminates the curvature of field, the adverse effect of astigmatism as far as possible.
However, existing telecentricity F-theta camera lens still has the curvature of field and the biggish defect of astigmatism, and then influence work essence Degree.Such as the patent application of publication number CN 101236291A, it can be seen that astigmatism is about 0.3mm from its Fig. 4;Publication number CN The patent application of 101846791A can be seen that astigmatism is about 0.3mm from its Fig. 4;The patent Shen of publication number CN 101881875A Please, it can be seen that from its Fig. 4 and dissipate about 0.5mm;The curvature of field of the patent application of publication number CN 108415147A is about 0.2mm.Cause This, the remaining curvature of field and astigmatism have the necessity further decreased very much.
Summary of the invention
In order to further decrease CO2The curvature of field and astigmatism of telecentricity f-theta camera lens, the present invention provide a kind of based on freely bent The disappear curvature of field and the anastigmatic CO in face2Telecentricity f-theta camera lens, so that the curvature of field and astigmatism reduce an order of magnitude.
In order to solve the above technical problems, the technical solution adopted in the present invention is as follows:
A kind of the disappear curvature of field and anastigmatic CO based on free form surface2Telecentricity f-theta camera lens, including passed along incident ray The first lens, the second lens, the third lens and the 4th lens that defeated direction is set gradually;First lens are negative meniscus, Second lens are curved month type positive lens, and the third lens are plano-convex positive lens, and the 4th lens are biplane protecting window piece;Along incident Light transmission direction, the two sides of the first lens are followed successively by the first object side and the first image side surface, and the first image side surface is free form surface.
In conventional optical systems application, what is generallyd use is by rotationally symmetrical surfs such as spherical lens or non-spherical lenses The optical system of composition, the difficulty for further decreasing the curvature of field and astigmatism is larger, enters bottleneck period, the reduction of every 0.01mm, all Extremely difficult, the reduction of the especially curvature of field is extremely difficult, and applicant it has been investigated that, by by the first image side surface be designed as from By curved surface so that the curvature of field and astigmatism at least reduce an order of magnitude, due to the relatively traditional spherical lens of free form surface or Non-spherical lens design freedom with higher and flexible space layout.
In order to further decrease the curvature of field and astigmatism, along incident ray transmission direction, the two sides of the first lens is followed successively by first Object side and the first image side surface, the first image side surface are using the free form surface of extension multinomial characterization, and used extension is multinomial Formula formula are as follows:
Wherein, j=[(m+n)2+ m+3n]/2+1, z is free form surface rise, and x and y are each face local coordinate, and c is vertex Curvature, k are circular cone coefficient, Cj xmynMultinomial coefficient, r are apart from optical axis mirror surface bore, m value range 0~10, n value model 0~10 is enclosed, normalization coefficient 1.
The first lens of reasonable distribution, the second lens, the third lens focal power, the curvature of field and astigmatism can be further decreased, It is preferred that -2.5 < f1/f0 < -1.90;1.80<f2/f0<2.5;1.0 < f3/f0 < 2.0, wherein f1 is first focal length of lens, and f2 is Second focal length of lens, f3 are the third lens focal length, and f0 is system total focal length.
Above-mentioned first lens, the second lens, the third lens and the 4th lens material therefor are zinc selenide or germanium etc..
As a kind of preferred embodiment of the application, the first lens material therefor is zinc selenide, the second lens, the third lens and 4th lens material therefor is germanium.
As another preferred embodiment of the application, material used in the first lens, the second lens, the third lens and the 4th lens Material is selenizing Zinc material, can take into account the instruction of 650nm feux rouges in this way.
In order to improve CO2The power of telecentricity f-theta camera lens, while the curvature of field and astigmatism are reduced, one kind as the application Preferred embodiment, the center thickness of the first lens are 7 ± 0.2mm, and the center thickness of the second lens is 8 ± 0.2mm, the third lens Center thickness is 9 ± 0.2mm, and the center thickness of the 4th lens is 3 ± 0.2mm.
As another preferred embodiment of the application, the center thickness of the first lens is 7 ± 0.2mm, in the second lens For the heart with a thickness of 11 ± 0.2mm, the center thickness of the third lens is 11 ± 0.2mm, and the center thickness of the 4th lens is 3 ± 0.2mm.
In order to guarantee transmitance, while the curvature of field and astigmatism are reduced, as a kind of preferred embodiment of the application, the first lens Outer diameter is 60-70mm, and the outer diameter of the second lens is 100-104mm, and the outer diameter of the third lens is 112mm, the outer diameter of the 4th lens For 115mm.
As another preferred embodiment of the application, the outer diameter of the first lens is 60-65mm, and the outer diameter of the second lens is 96-102mm, the outer diameter of the third lens are 112mm, and the outer diameter of the 4th lens is 115mm.
Along incident ray transmission direction, the two sides of the first lens is followed successively by the first object side and the first image side surface, and second thoroughly The two sides of mirror is followed successively by the second object side and the second image side surface, and the two sides of the third lens is followed successively by third object side and third image side The two sides in face, the 4th lens is followed successively by the 4th object side and the 4th image side surface;In order to further decrease the curvature of field and astigmatism, the first object Side is spherical surface, and the first image side surface is free form surface, and the second object side is spherical surface, and the second image side surface is spherical surface, third object side For spherical surface, third image side surface is spherical surface, and the 4th object side is plane, and the 4th image side surface is plane.
In order to improve transmitance and working efficiency, while the curvature of field and astigmatism are further decreased, one kind as the application is excellent Scheme is selected, the radius of curvature of the first object side is -57.494 ± 2mm, and the radius of curvature of the first image side surface is -72.861 ± 2mm, The radius of curvature of second object side is -137.666 ± 2mm, and the radius of curvature of the second image side surface is -120.535 ± 2mm, third The radius of curvature of object side is 446.391 ± 2mm, and the radius of curvature of third image side surface is infinity, the curvature of the 4th object side Radius is infinity, and the radius of curvature of the 4th image side surface is infinity.
As another preferred embodiment of the application, the radius of curvature of the first object side is -72.341 ± 2mm, the first picture The radius of curvature of side is -108.329 ± 2mm, and the radius of curvature of the second object side is -102.112 ± 2mm, the second image side surface Radius of curvature be -89.595 ± 2mm, the radius of curvature of third object side is 235.633 ± 2mm, the curvature of third image side surface Radius is 989.327 ± 2mm, and the radius of curvature of the 4th object side is infinity, and the radius of curvature of the 4th image side surface is infinity.
In order to improve transmitance and working efficiency, while the curvature of field and astigmatism are further decreased, one kind as the application is excellent Select scheme, the distance at the first image side surface center to the second object center side is 35.71 ± 0.02mm, the second image side surface center to the The distance of three object center sides is 1 ± 0.02mm, the distance at third image side surface center to the 4th object center side is 5 ± 0.02mm。
As another preferred embodiment of the application, the distance of the first image side surface center to the second object center side is 38.71 ± 0.02mm, the distance at the second image side surface center to third object center side are 1 ± 0.02mm, third image side surface center Distance to the 4th object center side is 5 ± 0.02mm.
The disappear curvature of field and anastigmatic CO of the application based on free form surface2The astigmatism and the curvature of field of telecentricity f-theta camera lens are equal Less than 0.02mm.
The unmentioned technology of the present invention is referring to the prior art.
The present invention is based on the disappear curvature of field and the anastigmatic CO of free form surface2Telecentricity f-theta camera lens, passes through free form surface Design dissipates so that the curvature of field and astigmatism at least reduce an order of magnitude and the curvature of field is respectively less than 0.02mm.
Detailed description of the invention
Fig. 1 is the disappear curvature of field and anastigmatic CO based on free form surface in embodiment 12The optics of telecentricity f-theta camera lens Structure chart;
Fig. 2 is the index path of embodiment 1;
Fig. 3 is the optical transfer function figure of embodiment 1;
Fig. 4 is the curvature of field and f-theta distortion figure of embodiment 1;
Fig. 5 is the disappear curvature of field and anastigmatic CO of the embodiment 2 based on free form surface2The optics knot of telecentricity f-theta camera lens Composition;
Fig. 6 is the index path of embodiment 2;
Fig. 7 is the optical transfer function figure of embodiment 2;
Fig. 8 is the curvature of field and f-theta distortion figure of embodiment 2.
Specific embodiment
For a better understanding of the present invention, below with reference to the embodiment content that the present invention is furture elucidated, but it is of the invention Content is not limited solely to the following examples.
Embodiment 1
As shown in Figure 1, the disappear curvature of field and anastigmatic CO based on free form surface2Telecentricity f-theta camera lens, including along incidence The first lens G1, the second lens G2, the third lens G3 and the 4th lens G4 that light transmission direction is set gradually;Described first thoroughly Mirror is negative meniscus, second lens be curved month type positive lens, the third lens be plano-convex positive lens, the described 4th Lens are biplane protecting window piece.
Along incident ray transmission direction, the two sides of the first lens is followed successively by the first object side S2 and the first image side surface S3, the The two sides of two lens is followed successively by the second object side S4 and the second image side surface S5, and the two sides of the third lens is followed successively by third object side S6 With third image side surface S7, the two sides of the 4th lens is followed successively by the 4th object side S8 and the 4th image side surface S9.
In this example, f1/f0=-2.29, f2/f0=2.24, f3/f0=1.45, wherein f1 is first focal length of lens, f2 For second focal length of lens, f3 is the third lens focal length, and f0 is system total focal length.
The disappear curvature of field and anastigmatic CO of 1 embodiment 1 of table based on free form surface2The design parameter of telecentricity f-theta camera lens
In upper table, S1 is incident diaphragm, and S10 is working face or image planes, and S1 is corresponding with a thickness of diaphragm to the first object side The distance at center, the corresponding center thickness with a thickness of the first lens of S2, S3 are corresponding with a thickness of the first image side surface center to The distance of two object center sides, the corresponding center thickness with a thickness of the second lens of S4, S5 are corresponding with a thickness of the second image side surface Distance of the center to third object center side, the corresponding center thickness with a thickness of the third lens of S6, S7 correspond to the thickness of image side surface Degree is distance of the third image side surface center to the 4th object center side, the corresponding center thickness with a thickness of the 4th lens of S8, S9 The corresponding distance with a thickness of the 4th image side surface center to working face;Outer diameter is each lens object side and the effective working face of image side surface Outer diameter.
First image side surface is using the free form surface of extension multinomial characterization, used extension polynomial equation are as follows:
Wherein, j=[(m+n)2+ m+3n]/2+1, z is free form surface rise, and x and y are each face local coordinate, and c is vertex Curvature, k are circular cone coefficient, Cj xmynMultinomial coefficient, r are apart from optical axis mirror surface bore, m value range 0~10, n value model 0~10 is enclosed, normalization coefficient 1, the present embodiment Cj takes 21.Specific coefficient is shown in Table 2.
2 embodiment of table, 1 free form surface coefficient
From figure 3, it can be seen that the disappear curvature of field and anastigmatic CO in this example based on free form surface2Telecentricity f-theta camera lens Image quality corrects, and reaches diffraction limit;As can be seen from Figure 4, the disappear curvature of field and the anastigmatic CO in this example based on free form surface2Far The curvature of field and astigmatic correction of heart f-theta camera lens are respectively less than 0.02mm, and working face is very smooth;The scanning range of this example 65mmx65mm, focal length 115mm, telecentricity is less than 3 °.
Embodiment 2
As shown in figure 5, the disappear curvature of field and anastigmatic CO based on free form surface2Telecentricity f-theta camera lens, including along incidence The first lens G1, the second lens G2, the third lens G3 and the 4th lens G4 that light transmission direction is set gradually;Described first thoroughly Mirror is negative meniscus, second lens be curved month type positive lens, the third lens be plano-convex positive lens, the described 4th Lens are biplane protecting window piece.
Along incident ray transmission direction, the two sides of the first lens is followed successively by the first object side S2 and the first image side surface S3, the The two sides of two lens is followed successively by the second object side S4 and the second image side surface S5, and the two sides of the third lens is followed successively by third object side S6 With third image side surface S7, the two sides of the 4th lens is followed successively by the 4th object side S8 and the 4th image side surface S9.
In this example, f1/f0=-1.94, f2/f0=1.85, f3/f0=1.58, wherein f1 is first focal length of lens, f2 For second focal length of lens, f3 is the third lens focal length, and f0 is system total focal length.
The disappear curvature of field and anastigmatic CO of 3 embodiment 2 of table based on free form surface2The design parameter of telecentricity f-theta camera lens
In upper table, S1 is incident diaphragm, and S10 is working face or image planes, and S1 is corresponding with a thickness of diaphragm to the first object side The distance at center, the corresponding center thickness with a thickness of the first lens of S2, S3 are corresponding with a thickness of the first image side surface center to The distance of two object center sides, the corresponding center thickness with a thickness of the second lens of S4, S5 are corresponding with a thickness of the second image side surface Distance of the center to third object center side, the corresponding center thickness with a thickness of the third lens of S6, S7 correspond to the thickness of image side surface Degree is distance of the third image side surface center to the 4th object center side, the corresponding center thickness with a thickness of the 4th lens of S8, S9 The corresponding distance with a thickness of the 4th image side surface center to working face;Outer diameter is each lens object side and the effective working face of image side surface Outer diameter.
First image side surface is using the free form surface of extension multinomial characterization, used extension polynomial equation are as follows:
Wherein, j=[(m+n)2+ m+3n]/2+1, z is free form surface rise, and x and y are each face local coordinate, and c is vertex Curvature, k are circular cone coefficient, Cj xmynMultinomial coefficient, r are apart from optical axis mirror surface bore, m value range 0~10, n value model 0~10 is enclosed, normalization coefficient 1, the present embodiment Cj takes 21.Specific coefficient is shown in Table 4.
4 embodiment of table, 2 free form surface coefficient
As can be seen from Figure 7, the disappear curvature of field and the anastigmatic CO in this example based on free form surface2Telecentricity f-theta camera lens Image quality corrects, and reaches diffraction limit;As can be seen from Figure 8, the disappear curvature of field and the anastigmatic CO in this example based on free form surface2Far The curvature of field and astigmatic correction of heart f-theta camera lens are respectively less than 0.02mm, and working face is very smooth;The scanning range of this example 60mmx60mm, focal length 130mm, telecentricity is less than 2 °.

Claims (10)

1. a kind of the disappear curvature of field and anastigmatic CO based on free form surface2Telecentricity f-theta camera lens, it is characterised in that: enter including edge Penetrate the first lens, the second lens, the third lens and the 4th lens that light transmission direction is set gradually;First lens are falcate Negative lens, the second lens are curved month type positive lens, and the third lens are plano-convex positive lens, and the 4th lens are biplane protecting window Piece;Along incident ray transmission direction, the two sides of the first lens is followed successively by the first object side and the first image side surface, and the first image side surface is Free form surface.
2. the disappear curvature of field and anastigmatic CO based on free form surface as described in claim 12Telecentricity f-theta camera lens, feature Be: the first image side surface is using the free form surface of extension multinomial characterization, used extension polynomial equation are as follows:
Wherein, j=[(m+n)2+ m+3n]/2+1, z is free form surface rise, and x and y are face local coordinate, and c is vertex curvature, and k is Circular cone coefficient, CjFor xmynMultinomial coefficient, r are the m value range 0~10 apart from optical axis mirror surface bore, n value range 0~10, Normalization coefficient is 1.
3. the disappear curvature of field and anastigmatic CO based on free form surface as claimed in claim 1 or 22Telecentricity f-theta camera lens, It is characterized in that: -2.5 < f1/f0 < -1.90;1.80<f2/f0<2.5;1.0 < f3/f0 < 2.0, wherein f1 is first focal length of lens, F2 is second focal length of lens, and f3 is the third lens focal length, and f0 is system total focal length.
4. the disappear curvature of field and anastigmatic CO based on free form surface as claimed in claim 1 or 22Telecentricity f-theta camera lens, Be characterized in that: the first lens, the second lens, the third lens and the 4th lens material therefor are zinc selenide or germanium.
5. the disappear curvature of field and anastigmatic CO based on free form surface as claimed in claim 42Telecentricity f-theta camera lens, feature Be: the first lens material therefor is zinc selenide, and the second lens, the third lens and the 4th lens material therefor are germanium;Alternatively, First lens, the second lens, the third lens and the 4th lens material therefor are selenizing Zinc material.
6. the disappear curvature of field and anastigmatic CO based on free form surface as claimed in claim 1 or 22Telecentricity f-theta camera lens, Be characterized in that: the center thickness of the first lens is 7 ± 0.2mm, and the center thickness of the second lens is 8 ± 0.2mm, the third lens Center thickness is 9 ± 0.2mm, and the center thickness of the 4th lens is 3 ± 0.2mm;Alternatively, the center thickness of the first lens be 7 ± 0.2mm, the center thickness of the second lens are 11 ± 0.2mm, and the center thickness of the third lens is 11 ± 0.2mm, the 4th lens Center thickness is 3 ± 0.2mm.
7. the disappear curvature of field and anastigmatic CO based on free form surface as claimed in claim 1 or 22Telecentricity f-theta camera lens, Be characterized in that: the outer diameter of the first lens is 60-70mm, and the outer diameter of the second lens is 100-104mm, and the outer diameter of the third lens is 112mm, the outer diameter of the 4th lens are 115mm;Alternatively, the outer diameter of the first lens is 60-65mm, the outer diameter of the second lens is 96- 102mm, the outer diameter of the third lens are 112mm, and the outer diameter of the 4th lens is 115mm.
8. the disappear curvature of field and anastigmatic CO based on free form surface as claimed in claim 1 or 22Telecentricity f-theta camera lens, Be characterized in that: along incident ray transmission direction, the two sides of the first lens is followed successively by the first object side and the first image side surface, and second thoroughly The two sides of mirror is followed successively by the second object side and the second image side surface, and the two sides of the third lens is followed successively by third object side and third image side The two sides in face, the 4th lens is followed successively by the 4th object side and the 4th image side surface;First object side is spherical surface, and the first image side surface is certainly By curved surface, the second object side is spherical surface, and the second image side surface is spherical surface, and third object side is spherical surface, and third image side surface is spherical surface, the Four object sides are plane, and the 4th image side surface is plane.
9. the disappear curvature of field and anastigmatic CO based on free form surface as claimed in claim 82Telecentricity f-theta camera lens, feature Be: the radius of curvature of the first object side is -57.494 ± 2mm, and the radius of curvature of the first image side surface is -72.861 ± 2mm, the The radius of curvature of two object sides is -137.666 ± 2mm, and the radius of curvature of the second image side surface is -120.535 ± 2mm, third object The radius of curvature of side is 446.391 ± 2mm, and the radius of curvature of third image side surface is infinity, the curvature half of the 4th object side Diameter is infinity, and the radius of curvature of the 4th image side surface is infinity;Alternatively, the radius of curvature of the first object side be -72.341 ± 2mm, the radius of curvature of the first image side surface are -108.329 ± 2mm, and the radius of curvature of the second object side is -102.112 ± 2mm, The radius of curvature of second image side surface is -89.595 ± 2mm, and the radius of curvature of third object side is 235.633 ± 2mm, third picture The radius of curvature of side is 989.327 ± 2mm, and the radius of curvature of the 4th object side is infinity, the curvature half of the 4th image side surface Diameter is infinity.
10. the disappear curvature of field and anastigmatic CO based on free form surface as claimed in claim 82Telecentricity f-theta camera lens, it is special Sign is: the distance at the first image side surface center to the second object center side is 35.71 ± 0.02mm, the second image side surface center to the The distance of three object center sides is 1 ± 0.02mm, the distance at third image side surface center to the 4th object center side is 5 ± 0.02mm;Alternatively, the distance at the first image side surface center to the second object center side is 38.71 ± 0.02mm, in the second image side surface The distance of the heart to third object center side is 1 ± 0.02mm, the distance at third image side surface center to the 4th object center side is 5 ± 0.02mm;The astigmatism and the curvature of field of the disappear curvature of field and anastigmatic CO2 telecentricity f-theta camera lens based on free form surface are respectively less than 0.02mm。
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