CN104316002B - The detection means and method of laser tracker optical axis and mechanical rotating shaft translational movement - Google Patents

The detection means and method of laser tracker optical axis and mechanical rotating shaft translational movement Download PDF

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Publication number
CN104316002B
CN104316002B CN201410531483.8A CN201410531483A CN104316002B CN 104316002 B CN104316002 B CN 104316002B CN 201410531483 A CN201410531483 A CN 201410531483A CN 104316002 B CN104316002 B CN 104316002B
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rotating shaft
laser tracker
mechanical rotating
optical axis
translational movement
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CN104316002A (en
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劳达宝
周维虎
纪荣祎
张滋黎
袁江
刘鑫
崔成君
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Institute of Microelectronics of CAS
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Academy of Opto Electronics of CAS
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Abstract

A kind of detection means of laser tracker optical axis and mechanical rotating shaft translational movement, including sleeve (12), microscopic system (01), photodetector (17) and imaging system (19), wherein the microscopic system (01) can coordinate the laser for launching the laser tracker to amplify relative to the offset of optical axis with imaging system (19).And the detection method of a kind of laser tracker optical axis and mechanical rotating shaft translational movement.The detection means and method of the present invention can carry out high precision test to translational movement, and the result of measurement can be used for laser tracker optical axis to adjust and error correction, it can also be used to improve the angle measurement error precision of laser tracker.The device of the present invention have design succinct, simple in construction, measurement accuracy it is high, with low cost, the features such as be easy to carry.

Description

The detection means and method of laser tracker optical axis and mechanical rotating shaft translational movement
Technical field
Translated the present invention relates to apparatus measures and calibration field, more particularly to a kind of laser tracker optical axis with mechanical rotating shaft The detection means and method of amount.
Background technology
Laser tracker is the new large scale 3 d space coordinate measuring instrument that last decade grows up in the world, can be right Moving target carries out real-time follow-up, has the advantages that easy installation operation, measurement accuracy and efficiency high, is large scale industry Measurement and the Main Means of scientific measurement.The basic functional principle of laser tracking measurement system is:Disposed first on target point One reflector, after the laser beam that follower head is sent reflects through target reflector, parallel to backtracking, when the object moves, Follower head adjustment beam direction carrys out alignment target.Meanwhile, the light beam of return is received by detecting system, for calculating the sky of target Between position.Briefly, the problem to be solved of laser tracking measurement system is statically or dynamically to track one in space The point of middle motion, while determining the space coordinate of target point.
In order to improve measurement and the pointing accuracy of laser tracker, first have to guarantee is the optical axis and machinery turn of tracker Axiality requirement between axle, but among existing optical instrumentation, typically ensure by processing installation accuracy The axiality of optical axis and mechanical rotating shaft, this mode requires higher to processing and mounting process;Or judge to adjust by human eye Section, this mode general precision is relatively low.Because the laser beam center line of tracker is difficult to direct measurement, cause tracker Optical axis and mechanical rotating shaft between translational movement also more difficult directly accurate measurement, so that accurate regulation can not be realized.Therefore it is urgent A kind of method of simple possible is needed to carry out the consistency detection between optical axis and mechanical rotating shaft to laser tracker.
The content of the invention
In view of this, the invention provides the detection means and side of a kind of laser tracker optical axis and mechanical rotating shaft translational movement Method, for detecting the migration result between optical axis and rotary shaft, can be used for mechanical debugging and error correction, to improve laser The angle measurement accuracy and space measurement precision of tracker.
To achieve these goals, as one aspect of the present invention, the invention provides a kind of laser tracker optical axis With the detection means of mechanical rotating shaft translational movement, including:
Sleeve 12, is hollow cylinder, and one end is provided with what can removably be connected with laser tracker mechanical rotating shaft The interface 07 of sleeve and laser tracker mechanical rotating shaft, the other end is removably connected with photodetector 17;
Microscopic system 01, installed in sleeve 12 close to one end of the sleeve and laser tracker mechanical rotating shaft interface 07, For coordinating the laser for launching the laser tracker to amplify relative to the offset of optical axis with imaging system 19;
Photodetector 17, the size of the laser facula for detecting the laser tracker transmitting;And
Imaging system 19, installed in sleeve 12 close to one end of the photodetector 17, for the laser to be tracked The laser of instrument transmitting is converged on the target surface of the photodetector 17.
Wherein, the sleeve 12 is made up of rigid material, and its length depends on the focal length of the imaging system 19.
Wherein described imaging system 19 includes imaging len 16, and focal length is less than 500mm.
Wherein, the microscopic system 01 and imaging system 19 include attenuator 09,14, for reducing laser beam in institute State the energy size of the hot spot formed on photodetector 17.
Wherein, the microscopic system includes the first microlens 11 and the second microlens 08.
Wherein, the photodetector 17 is CCD or cmos detector.
Wherein, the sleeve and laser tracker mechanical rotating shaft interface 07 are a circular Baltimore groove, in the back of the body of Baltimore groove Portion's uniform circular distributed three counter sinks 02, using shaft hole matching position and be connected to by the way of being screwed laser with Track instrument mechanical rotating shaft is fastened.
As another aspect of the present invention, translated present invention also offers a kind of laser tracker optical axis and mechanical rotating shaft The detection method of amount, comprises the following steps:
Step 1:The detection means of laser tracker optical axis and mechanical rotating shaft angle as described in any one is installed to The mechanical rotating shaft of laser tracker is fastened;
Step 2:The mechanical rotating shaft and detection means of tracker are rotated a circle, by computer in uniform N number of position The N width images that collection shoot laser beam is formed after microscopic system on CCD target surfaces, the center for extracting hot spot in image is sat Mark, wherein N is positive integer;
Step 3:N number of picture centre coordinate fitting that step 2 is obtained is flat circle, and the radius for trying to achieve the flat circle is P pixel, thus obtains the translational movement d of rotary shaft and laser beam.
The detection method of the laser tracker optical axis and mechanical rotating shaft translational movement also includes:
Step 4:Other structures identical laser tracker optical axis and machinery using lens object distance, length sleeve difference The detection means of rotating shaft translational movement, is detected again according to step 1-3.
Wherein, it is described obtain rotary shaft and laser beam translational movement d the step of further comprise:If CCD pixel is big Small is a μm, then the radius of the flat circle is
X=(a × p) μm
The translational movement d of rotary shaft and laser beam is obtained thus according to following formula:
D=d1/ k=fx/k (v-f)
Wherein, d1For the offset after the amplification of microscopic system 01, k is the multiplication factor of microscopic system 01, and v is imaging Lens 16 arrive the distance of photodetector 17, and f is the focal length of imaging len 16.
Understood based on above-mentioned technical proposal, laser tracker optical axis of the invention and the detection means of mechanical rotating shaft translational movement And method is amplified by microscopic system to the translational movement between laser tracker optical axis and mechanical rotating shaft, so as to be carried out to translational movement High precision test, the result of measurement can be used for the adjustment of laser tracker optical axis and error correction, can be used for improving laser The angle measurement error precision of tracker.All parts are integrated into sleeve by the device of the present invention, with design is succinct, knot Structure is simple, measurement accuracy is high, it is with low cost, the features such as be easy to carry.
Brief description of the drawings
Fig. 1 is the detection laser tracker optical axis and the structure chart of the detection means of mechanical rotating shaft translational movement of the present invention;
Fig. 2 a, 2b be the present invention laser tracker optical axis and mechanical rotating shaft translational movement detection method general principle Figure, situation when wherein Fig. 2 a represent the center line of laser beam 22 with tracker mechanical rotating shaft 21 without angle, Fig. 2 b represent to focus on There is offset d situation away from center in the facula position on to the photosurface of photodetector 24;
Fig. 3 is based on micro- and imaging system translation detection principle diagram.
Description of reference numerals:
01- microscopic systems;02- counter sinks;The mounting groove of 03- microscopic systems;04- the first eyeglass necks;The eyeglasses of 05- second Neck;The trim rings of 06- first;The interface of 07- sleeves and laser tracker mechanical rotating shaft;The microlenses of 08- second;09- first declines Subtract piece;The plastic washers of 10- first;The microlenses of 11- first;12- sleeves;The trim rings of 13- second;The attenuators of 14- second;15- Two plastic washers;16- imaging lens;17- photodetectors;The eyeglass necks of 18- the 3rd;19- imaging systems;21- laser is tracked Instrument mechanical rotating shaft;22- optical axises;23- laser beams section;24- optical lenses;25- photodetectors;31- laser tracker machines Tool rotating shaft;32 optical axises;33- laser beams section;34- microscopic systems;35- imaging systems;36- photodetectors.
Embodiment
For the object, technical solutions and advantages of the present invention are more clearly understood, below in conjunction with specific embodiment, and reference Accompanying drawing, the present invention is described in further detail.
The concrete structure of the detection means of laser tracker optical axis and the mechanical rotating shaft translational movement of the present invention as shown in figure 1, Including:Microscopic system 01, counter sink 02, the interface 07 of sleeve and laser tracker mechanical rotating shaft, sleeve 12, photodetection Device 17 and imaging system 19.Microscopic system 01 includes again:The mounting groove 03 of microscopic system, the first eyeglass neck 04, the second eyeglass Neck 05, the first trim ring 06, the second microlens 08, the first attenuator 09, the first plastic washer 10 and the first microlens 11. Imaging system 19 includes again:Second trim ring 13, the second attenuator 14, the second plastic washer 15 and imaging len 16.Microscopic system Mainly it is made up of two panels lens, in the cylindrical microscopic system of machinery rotation axial interface 07 one end design close to connection tracker Mounting groove 03 is installed to the first microlens 11 in the mounting groove 03 of microscopic system, and external screw thread is passed through by the first eyeglass neck 04 Form compress the first microlens 11, between the first microlens 11 and the first eyeglass neck 04 use the first plastic washer 10 It is separated by.The first attenuator 09 is mounted with inside the first eyeglass neck 04, the first attenuator 09 is adopted by the second eyeglass neck 05 Compressed with externally threaded form.The structure of second eyeglass neck 05 is similar with the first eyeglass neck 04, is mounted with that second shows inside it Lenticule 08, then compressed by the first trim ring 06 by externally threaded form.The focal length of first microlens 11 is second micro- K times of mirror 08, characterizes the multiplication factor of microscopic system.First eyeglass neck 04 and the second eyeglass neck 05 are using metal or just The stronger plastics of property are made.The left end interface of sleeve 12 is used to install imaging system 19, using externally threaded form and the 3rd mirror Piece neck 18 is connected.The right-hand member of sleeve 12 is designed to a circular Baltimore groove, then in the back uniform circular distribution of its Baltimore groove Three counter sinks 02, are used as the sleeve and the interface of laser tracker mechanical rotating shaft for being installed to laser tracker mechanical rotating shaft 07, it can be connected by the way of shaft hole matching positions and is screwed with laser tracker mechanical rotating shaft.Sleeve 12 is by rigid material Material, such as metal or engineering plastics are made, and its length depends primarily on the focal length of imaging system 19.Photodetector 17 can be CCD or cmos sensor, the pixel size and pixel dimension size of sensor influence the resolution ratio of detecting system.Pixel it is bigger and Pixel dimension is smaller, then system detectio resolution ratio is higher, can select resolution ratio and pixel chi according to accuracy of detection requirement and cost It is very little.The imaging len 16 of imaging system 19, the selection of tool focal length can directly influence object distance, because detection means can not be long, Generally select lens of the object distance within 500mm.Optical filter is mainly used in removing the veiling glare beyond laser beam, it is to avoid other Light enters imaging system and influences testing result.Attenuator is mainly used in reducing the energy of laser, it is to avoid cause photodetector Excessively saturation so that spot size is excessive, is unfavorable for the extraction of light spot image center, or even can defective detector.Attenuator Use the image quality of raising system that can be larger.
Based on said structure, laser tracker optical axis of the invention and the original substantially of the detection method of mechanical rotating shaft translational movement Reason figure is as shown in Figure 2.Optical lens 24 and photodetector 25, optical lens 24 are installed on laser tracker mechanical rotating shaft 21 Optical axis 22 and mechanical rotating shaft 21 it is coaxial.As shown in Figure 2 a, when optical axis 22 and coaxial mechanical rotating shaft 21, light is rotated around axis Lens are learned, position of the laser facula on photodetector does not change.As shown in Figure 2 b, when optical axis 22 exists with mechanical rotating shaft 21 During certain offset d, around axis rotary optical lens 24, track of the laser facula on photodetector is circle.When When horizontally rotating tracking table, the track of hot spot forms the locus circle that radius is x on the detector.Existed by extract real-time hot spot Track on detector, obtains the radius of spot tracks circle, then according to the image-forming principle of lens, can calculate emergent shaft 22 and machinery The offset d of rotating shaft 21 is:
D=xu/v (1)
Wherein, u is the distance of institute's exploring laser light hot spot to optical lens 24, and v is that optical lens 24 arrives photodetector (25) distance.
And because
1/f=1/v+1/u (2)
Wherein, f is the focal length of optical lens 24.
Simultaneous formula (1) and (2), can be obtained:
D=xu/v=fx/ (v-f) (3)
From formula, the resolution ratio of the detection method depends primarily on the resolution ratio of photodetector 25.
In order to improve detection resolution, the present invention is combined with optical microscope system, aobvious in the design of the front of imaging system 35 The translational movement of micro-system 34, amplification optical axis and mechanical rotating shaft.As shown in figure 3, when optical axis 32 and mechanical rotating shaft 31 are present necessarily During offset d, by microscopic system 34, offset d is enlarged into d1, on this basis, then it is imaged, while being rotated into as system System 35 and microscopic system 34, the locus circle of record now, calculate radius of circle x.d1It can be calculated and obtained by formula (3).Make micro- The multiplication factor of system 34 is k, then the optical axis 32 and actual translational movement d of mechanical rotating shaft 31 is by d1Divided by the amplification of microscopic system 34 Multiple is tried to achieve.
D=d1/ k=fx/k (v-f) (4)
The detection method of the laser tracker optical axis of the present invention and the translational movement of mechanical rotating shaft, its specific works step is such as Under:
Step 1:According to above-mentioned mounting means by after device installation, carried out by the interface and rotary shaft of sleeve right-hand member Interference fit, it is ensured that device central shaft and rotating shaft coaxle, then be fixedly connected by three fixed screw threads with axle.
Step 2:Imaging system is opened, computer is connected to, is passed through by shoot laser beam in computer acquisition rotary shaft The image formed after microscopic system on CCD target surfaces, the center of hot spot in image is extracted by centroid method image procossing, is schemed As coordinate.The mechanical rotating shaft of tracker, detection means are rotated a circle, in uniform N number of station acquisition N width images, carried respectively Take the image coordinate of spot center in each image.Wherein N is bigger, and effect is better, for example, can choose N=8,12,16 ....
Step 3:N number of image coordinate that step 2 is obtained is fitted to the locus circle of flat circle, as laser facula, obtains The radius of the circle is p pixel.If CCD Pixel size is a μm, then the radius of the circle is
X=(a × p) μm
The translational movement of rotary shaft and laser beam can be obtained by formula (4).
Step 4:In order to examine measurement result, it is to avoid laser tracker optical axis has angle influence translation inspection with mechanical rotating shaft Result is surveyed, different using lens object distance, length sleeve, other structures identical device is detected again by step 1-3 again, if As a result consistent, then testing result is credible.
Particular embodiments described above, has been carried out further in detail to the purpose of the present invention, technical scheme and beneficial effect Describe in detail bright, it should be understood that the foregoing is only the present invention specific embodiment, be not intended to limit the invention, it is all Within the spirit and principles in the present invention, any modification, equivalent substitution and improvements done etc. should be included in the protection of the present invention Within the scope of.

Claims (10)

1. the detection means of a kind of laser tracker optical axis and mechanical rotating shaft translational movement, including:
Sleeve (12), is hollow cylinder, and one end is provided with the set that can be removably connected with laser tracker mechanical rotating shaft The interface (07) of cylinder and laser tracker mechanical rotating shaft, the other end is removably connected with photodetector (17);
Microscopic system (01), installed in sleeve (12) close to the sleeve and the one of laser tracker mechanical rotating shaft interface (07) End, for coordinating the laser for launching the laser tracker to amplify relative to the offset of optical axis with imaging system (19);
Photodetector (17), the size and location of the laser facula for detecting the laser tracker transmitting;And
Imaging system (19), installed in sleeve (12) close to the photodetector (17) one end, for by the laser with The laser of track instrument transmitting is converged on the target surface of the photodetector (17).
2. the detection means of laser tracker optical axis as claimed in claim 1 and mechanical rotating shaft translational movement, wherein the sleeve (12) it is made up of rigid material, its length depends on the focal length of the imaging system (19).
3. the detection means of laser tracker optical axis as claimed in claim 1 and mechanical rotating shaft translational movement, wherein the imaging System (19) includes imaging len (16), and focal length is less than 500mm.
4. the detection means of laser tracker optical axis as claimed in claim 1 and mechanical rotating shaft translational movement, wherein described micro- System (01) and imaging system (19) include attenuator (09,14), for reducing laser beam in the photodetector (17) the energy size of the hot spot formed on.
5. the detection means of laser tracker optical axis as claimed in claim 1 and mechanical rotating shaft translational movement, wherein described micro- System includes the first microlens (11) and the second microlens (08).
6. the detection means of laser tracker optical axis as claimed in claim 1 and mechanical rotating shaft translational movement, wherein the photoelectricity Detector (17) is CCD or cmos detector.
7. the detection means of laser tracker optical axis as claimed in claim 1 and mechanical rotating shaft translational movement, wherein the sleeve It is a circular Baltimore groove with laser tracker mechanical rotating shaft interface (07), three is distributed in the back uniform circular of Baltimore groove Counter sink (02), is connected to laser tracker mechanical rotating shaft using shaft hole matching positioning and by the way of being screwed and fastens.
8. the detection method of a kind of laser tracker optical axis and mechanical rotating shaft translational movement, comprises the following steps:
Step 1:By the detection of the laser tracker optical axis as described in claim 1 to 7 any one and mechanical rotating shaft translational movement The mechanical rotating shaft that device is installed to laser tracker is fastened;
Step 2:The mechanical rotating shaft and detection means of tracker are rotated a circle, by computer in uniform N number of station acquisition The N width images that shoot laser beam is formed after microscopic system on CCD target surfaces, extract the centre coordinate of hot spot in image, its Middle N is positive integer;
Step 3:N number of picture centre coordinate fitting that step 2 is obtained is flat circle, and it is p to try to achieve the radius of the flat circle Pixel, thus obtains the translational movement d of rotary shaft and laser beam;Wherein, translational movement d is calculated according to following formula:
X=a × p;
D=xu/v;
Wherein, x is the radius of the flat circle, and unit is micron;A is the size of pixel on CCD target surfaces, and unit is micron;U is Hot spot is to the distance of optical lens on target surface, and v is distance of the optical lens to photodetector.
9. the detection method of laser tracker optical axis as claimed in claim 8 and mechanical rotating shaft translational movement, wherein also including:
Step 4:Other structures identical laser tracker optical axis and mechanical rotating shaft using lens object distance, length sleeve difference The detection means of translational movement, is detected again according to step 1-3.
10. the detection method of laser tracker optical axis as claimed in claim 8 and mechanical rotating shaft translational movement, wherein the translation Amount d is calculated according to following formula and obtained:
D=d1/ k=fx/k (v-f);
Wherein, d1For the offset after microscopic system is amplified, k is the multiplication factor of microscopic system, and f is Jiao of imaging len Away from.
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CN105091791B (en) * 2015-05-09 2017-11-24 国家电网公司 The detection method of optical lens optical axis and mechanical axis angle
CN106249222B (en) * 2016-07-07 2019-03-08 中国科学院光电研究院 A kind of femtosecond laser tracker optical axis geometric error caliberating device
CN107917691A (en) * 2016-08-03 2018-04-17 中国人民解放军海军大连舰艇学院 Emitron camera optical axis and mechanical axis uniformity rotary detecting method and equipment
CN108007394B (en) * 2017-11-30 2020-06-19 南京理工大学 Remote high-precision centering debugging device and debugging method thereof
CN109668512A (en) * 2018-12-21 2019-04-23 清华大学深圳研究生院 The beam directing mechanisms and alignment methods for the laser displacement sensor being arranged symmetrically
CN112729777A (en) * 2020-12-16 2021-04-30 中国科学院上海光学精密机械研究所 High-precision reproduction device of digital optical axis
CN113624451B (en) * 2021-07-08 2023-10-24 中国电子科技集团公司第十一研究所 Buchner prism optical axis consistency detection assembly and method

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CN2869777Y (en) * 2006-01-24 2007-02-14 中国科学院长春光学精密机械与物理研究所 Optical axis detection device of wide-band multi-sensor puotoelectric instrument
CN201096611Y (en) * 2007-11-08 2008-08-06 西安工业大学 Aspheric lens eccentric measuring apparatus
JP6055179B2 (en) * 2011-12-19 2016-12-27 株式会社トプコン Rotation angle detection device and surveying device
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