CN104303282A - Table device and conveyance device - Google Patents

Table device and conveyance device Download PDF

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Publication number
CN104303282A
CN104303282A CN201380003203.XA CN201380003203A CN104303282A CN 104303282 A CN104303282 A CN 104303282A CN 201380003203 A CN201380003203 A CN 201380003203A CN 104303282 A CN104303282 A CN 104303282A
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China
Prior art keywords
component
mentioned
workbench
bearing components
bearing
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Granted
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CN201380003203.XA
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Chinese (zh)
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CN104303282B (en
Inventor
佐藤俊德
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NSK Ltd
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NSK Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68792—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the construction of the shaft

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Machine Tool Units (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

This table device (100) is provided with: a first member (1) that can move in a horizontal plane; a second member (2) that can move relative to the first member; a first guide device (4) of which at least a portion is disposed at the first member and that guides the second member in a manner so that the second member moves in a direction parallel to a first axis perpendicular to the horizontal plane by means of the motion of the first member; a table (10) that is supported by the second member; a third member (3) of which at least a portion at the top surface side is connected to the table; a bearing member (5) that has a first supply opening (15) that can supply a gas to the gap with respect to the lateral surface of the third member, forms a gas bearing at the gap to the lateral surface of the third member by means of the gas supplied from the first supply opening, and supports the third member in a manner able to move in a direction parallel to the first axis; an actuator (7) that generates motive force for moving the first member; and a gravity compensation device (60) that has a second supply opening that is disposed in a manner so as to face a space that the bottom surface of the third member faces and that supplies a gas to the space.

Description

Table device and conveying device
Technical field
The present invention relates to table device and conveying device.
Background technology
In conveying device, employ such as disclosed in Patent Document 1, having can the table device of workbench of movement.
prior art document
patent documentation
Patent documentation 1: No. 2004-195620, Japanese Unexamined Patent Publication
Summary of the invention
the problem that invention will solve
In table device, due to the weight of such as workbench, likely to the actuator applying load for making movable workbench.Making this actuator adstante febre applying load to actuator, the component thermal deformation of surrounding can be made, thus likely make the positioning precision of workbench reduce.
The object of the present invention is to provide the load that can reduce and put on actuator and the table device suppressing positioning precision to reduce and conveying device.
for the scheme of dealing with problems
Table device of the present invention for achieving the above object comprises: the 1st component, and it can move in horizontal plane; 2nd component, it can relative to above-mentioned 1st component relative movement; 1st guiding device, it is configured at above-mentioned 1st component at least partially, and to be made above-mentioned 2nd component guide above-mentioned 2nd component along with the mode of the direction movement with orthogonal the 1st axis being parallel of above-mentioned horizontal plane by the movement of above-mentioned 1st component; Workbench, it is supported on above-mentioned 2nd component; 3rd component, its side that there is upper surface, lower surface and link above-mentioned upper surface and above-mentioned lower surface, above-mentioned upper surface side be connected to above-mentioned workbench at least partially; Bearing components, it has can to the 1st supply port of supply gas between this bearing components and the side of above-mentioned 3rd component, utilize and between this bearing components and the side of above-mentioned 3rd component, form gas bearing from the gas of above-mentioned 1st supply port supply, and so that above-mentioned 3rd component can be made along supporting above-mentioned 3rd component with the mode of the direction movement of above-mentioned 1st axis being parallel; Actuator, it produces the power for making above-mentioned 1st component movement; And gravity-compensated device, its be configured to the lower surface of above-mentioned 3rd component faced by space facing, and to have for the 2nd supply port to above-mentioned space supply gas.
Thus, by the gas be supplied to from the 2nd supply port in the space facing with the lower surface of the 3rd component, the weight of workbench is reduced to the effect of actuator.That is, to be delivered to the power of actuator from workbench in order to reduce effect because of gravity, gravity-compensated device, from the 2nd supply port to space supply gas, therefore makes the load putting on actuator reduce.Therefore, the heating of actuator is inhibited, the thermal deformation of the component of the surrounding of actuator is inhibited.In addition, because the thermal deformation of the component of table device is inhibited, therefore make the reduction of the positioning precision of workbench be inhibited, the reduction of the performance of table device is inhibited.In addition, according to the present invention, by being formed at the 3rd gas bearing between component and bearing components, the workbench being connected with the 3rd component can move on target track.Such as, in order to make the 3rd component with the direction of the 1st axis being parallel on move as the crow flies, bearing components supports (guiding) the 3rd component can make the mode of the 3rd component movement, thus the workbench enabling to be connected with the 3rd component with the direction of the 1st axis being parallel on move as the crow flies.That is, utilize the bearing components that can form gas bearing, suppress the linear reduction in the movement of the 3rd component and workbench.That is, by forming gas bearing the 3rd between component and bearing components, bearing components is made to support the 3rd component in a non contact fashion.Thus, the 3rd component can swimmingly along moving with the direction of the 1st axis being parallel.When bearing components contacts with the 3rd component, likely resistance is produced to the mobile of the 3rd component.Its result, workbench and the 3rd component will be made to move as the crow flies although be set to, workbench and the 3rd component likely do not move as the crow flies.In addition, when bearing components contacts with the 3rd component, likely vibration is produced because of the movement of the 3rd component.When the 3rd component produces vibration, workbench also vibrates, its result, and the positioning precision of workbench likely reduces.In the present invention, because bearing components supports the 3rd component non-contactly can make the mode of the 3rd component movement, therefore workbench and the 3rd component can move as the crow flies.In addition, the generation of vibration can be inhibited.Its result, the reduction of the positioning precision of workbench is inhibited, and workbench and the object being supported on this workbench can be configured in target location.
In table device of the present invention, above-mentioned 3rd component be with longer bar-shaped component on the direction of above-mentioned 1st axis being parallel, above-mentioned bearing components is the component of the tubular of the surrounding of the side being configured at above-mentioned 3rd component, above-mentioned 1st supply port is configured to relative with the side of above-mentioned 3rd component, at above-mentioned 3rd component with in the moving range on the direction of above-mentioned 1st axis being parallel, the side of above-mentioned 1st supply port and above-mentioned 3rd component continues relative.
Thus, in the moving range of the 3rd component, can continue between component and bearing components to form gas bearing the 3rd, the 3rd contactless state between component and bearing components can be maintained.
In table device of the present invention, with on the direction of above-mentioned 1st axis being parallel, the size of above-mentioned 3rd component is greater than the size of above-mentioned bearing components.
Thus, can connecting working table and 3rd component outstanding from the upper end of bearing components swimmingly.In addition, the 3rd component is also given prominence to than the bottom of bearing components, thus the balance of the quality (weight) between the side, upper end of bearing components and side, bottom is improved.Thus, the 3rd component can move as the crow flies.
In table device of the present invention, this table device comprises supporting member, it is for supporting above-mentioned bearing components, this supporting member be configured at around above-mentioned 3rd component and above-mentioned bearing components at least partially, above-mentioned 2nd supply port is to supply gas in the space limited by the above-mentioned lower surface of the 3rd component and the inner surface of above-mentioned supporting member.
Thus, due to by the lower surface of the 3rd component and the inner surface of supporting member supply gas in the space closed, therefore, it is possible to utilize the pressure adjusting space from the gas of the 2nd supply port supply well.
In table device of the present invention, above-mentioned gravity-compensated device from above-mentioned 2nd supply port supply gas, with make above-mentioned lower surface faced by the pressure in space higher than the pressure in the space in the outside of above-mentioned supporting member.
Thus, the power that gravity-compensated device can apply upward to the 3rd component and workbench, to eliminate the power acted on below vertical because of the deadweight of workbench.Therefore, the load putting on actuator is reduced.
In table device of the present invention, above-mentioned 3rd component be circular with the profile in the cross section of above-mentioned plane-parallel.
Thus, in the manufacture of the 3rd component, can easily obtain higher machining accuracy, easily can obtain target shape.Therefore, the uneven situation of the size in the gap be formed between the side of the 3rd component and bearing components is made to be inhibited.Thus, the reduction making to be formed at the performance of the 3rd gas bearing between component and bearing components is inhibited, and the situation making the 3rd component depart from movement from target track is inhibited.
In table device of the present invention, above-mentioned 3rd component is at least configured with two, and is connected to the 2nd position of the 1st position of above-mentioned workbench and the different from above-mentioned 1st position of above-mentioned workbench.
Thus, multiple 3rd components being connected to workbench are utilized to suppress the rotation of such as workbench.Thus, the positioning precision of workbench improves.
In table device of the present invention, in the moving range of above-mentioned 3rd component, with on the direction of above-mentioned 1st axis being parallel, the center of above-mentioned 3rd component continues to be configured between an end of above-mentioned bearing components and the other end.
Thus, even if in the movement of the 3rd component, because the balance of the quality (weight) between the side, upper end of bearing components and side, bottom improves, therefore the 3rd component also can move as the crow flies.
In table device of the present invention, by above-mentioned actuator, above-mentioned 1st component along moving with the direction of the 2nd axis being parallel in above-mentioned horizontal plane, this table device comprise for suppress above-mentioned 2nd component with the suppression component of the movement on the direction of above-mentioned 2nd axis being parallel.
Thus, even if the 1st component is along moving with the direction of the 2nd axis being parallel, the 2nd component is along being also inhibited with the situation of the direction movement of the 2nd axis being parallel.Thus, the 1st component with the movement on the direction of the 2nd axis being parallel by be converted to the 2nd component efficiently with the movement on the direction of the 1st axis being parallel.
In table device of the present invention, this table device has the 2nd guiding device, the 2nd guiding device be configured at above-mentioned suppression component at least partially, and the 2nd guiding device is used for along guiding above-mentioned 2nd component with the direction of above-mentioned 1st axis being parallel.
Thus, the 2nd component also can be moved along the direction with the 1st axis being parallel by the 2nd guide means guide.By the 2nd component along moving with the direction of the 1st axis being parallel, the workbench making to be supported on the 2nd component also together with the 2nd component along moving with the direction of the 1st axis being parallel.
In table device of the present invention, this table device comprises supporting arrangement, and this supporting arrangement is configured between above-mentioned 2nd component and above-mentioned workbench, and for flexibly supporting above-mentioned workbench.
Thus, even if make the 2nd component carry out less desirable movement (vibration) owing to suppressing the contact between component (the 2nd guiding device) and the 2nd component, supporting arrangement also can be utilized to suppress this less desirable movement (vibration) to workbench transmission.
In table device of the present invention, above-mentioned supporting arrangement comprises spherical bearing.
Thus, even if make the 2nd component carry out vibrating owing to suppressing the contact between component (the 2nd guiding device) and the 2nd component or the 2nd component departs from movement from target track, also can absorb this less desirable movement (vibration) by the relative movement taken turns in spherical bearing between component and foreign steamer component, and suppress it to transmit to workbench 10.
Conveying device of the present invention for achieving the above object comprises above-mentioned table device.
Thus, the object being supported on workbench can be transported to target location by conveying device.In addition, the thermal deformation of the object making the thermal deformation of the component of conveying device and carried by conveying device is inhibited.
Semiconductor-fabricating device of the present invention for achieving the above object comprises above-mentioned table device.
Thus, semiconductor-fabricating device can process the object being configured in target location, in addition, the thermal deformation of the component of semiconductor-fabricating device and the thermal deformation of object is inhibited.Thus, the situation producing bad product from this object is inhibited.
the effect of invention
According to table device of the present invention and conveying device, the load putting on actuator is reduced, and the reduction of positioning precision is inhibited.
Accompanying drawing explanation
Fig. 1 is the front view of an example of the table device representing present embodiment.
Fig. 2 is the A-A alignment view of Fig. 1.
Fig. 3 is the end view of an example of the table device representing present embodiment.
Fig. 4 is the end view of an example of the table device representing present embodiment.
Fig. 5 is the figure after a part of Fig. 1 being amplified.
Fig. 6 is the figure of an example of the guiding device representing present embodiment.
Fig. 7 is the figure of an example of the gas bearing representing present embodiment.
Fig. 8 is the cutaway view of an example of the gas bearing representing present embodiment.
Fig. 9 is the figure of an example of the action of the table device representing present embodiment.
Figure 10 is the cutaway view of an example of the gas bearing representing present embodiment.
Figure 11 is the figure representing the conveying device of present embodiment and an example of semiconductor-fabricating device.
Figure 12 is the figure representing the conveying device of present embodiment and an example of testing fixture.
Embodiment
Hereinafter, with reference to the accompanying drawings of embodiments of the present invention, but the present invention is not limited thereto.The important document of each illustrated below execution mode can suitably combine.In addition, also there is the situation not using a part of inscape.In the following description, setting XYZ orthogonal coordinate system, illustrates the position relationship in each portion with reference to this XYZ orthogonal coordinate system.In horizontal plane one direction is set to X-direction, direction orthogonal with X-direction in horizontal plane is set to Y direction, direction (i.e. vertical) orthogonal with X-direction and Y direction is respectively set to Z-direction.In addition, rotation (inclination) direction around X-axis, Y-axis and Z axis is set to θ X-direction, θ Y-direction and θ Z-direction respectively.X-axis is orthogonal with YZ plane.Y-axis is orthogonal with XZ plane.Z axis is orthogonal with XY plane.
Fig. 1 is the figure of an example of the table device 100 representing present embodiment.Fig. 2 is the A-A alignment view of Fig. 1.Fig. 3 is the figure that the table device 100 observing Fig. 1 from-X side obtains.Fig. 4 is the figure that the table device 100 observing Fig. 1 from+X side obtains.Fig. 5 is the figure after a part of Fig. 1 being amplified.
Table device 100 comprises: workbench 10, and it can bearing objects S; 1st component 1, it (in horizontal plane) can move in XY plane; 2nd component 2, it can relative to the 1st component 1 relative movement; Guiding device 4, it is configured at the 1st component 1 at least partially, and to be made the 2nd component 2 guide the 2nd component 2 along the mode of Z-direction movement by the movement of the 1st component 1; 3rd component 3, it is connected to workbench 10 at least partially; Bearing components 5, forms gas bearing 5G between itself and the 3rd component 3, and so that the 3rd component 3 can be made to support the 3rd component 3 along the mode of Z-direction movement; Supporting member 6, it is for block bearing component 5; And actuator 7, it moves for making the 1st component 1.Bearing components 5 has can to the supply port 15 of supply gas between this bearing components 5 and the 3rd component 3.Bearing components 5 utilizes the gas supplied from this supply port 15, forms gas bearing 5G, and support the 3rd component 3 in a non contact fashion between the 3rd component 3.
In addition, table device 100 comprises the gravity-compensated device 60 of the weight for reducing workbench 10 to the effect of actuator 7.Gravity-compensated device 60 has can the supply port 62 of supply gas, and from this supply port 62 supply gas, thus the weight reducing workbench 10 is to the effect of actuator 7.
In addition, table device 100 comprises base component 8.In the present embodiment, base component 8 comprises the 1st base component 81 and the 2nd base component 82 for supporting the 1st base component 81.Base component 8 is configured on ground of the facility (such as factory) such as arranging table device 100 etc.
Workbench 10 is supported on the 2nd component 2.3rd component 3 is connected to workbench 10 at least partially.Workbench 10 has the lower surface 10B towards the+upper surface 10A of Z-direction and the rightabout (-Z-direction) towards upper surface 10A.Object S is placed in the upper surface 10A of workbench 10.Upper surface 10A can bearing objects S.
1st component 1, the 2nd component 2 and the 3rd component 3 are configured at the lower surface 10B side (-Z side) of workbench 10 respectively.2nd component 2 is at the lower surface 10B side bearing workbench 10 of workbench 10.3rd component 3 is connected to the lower surface 10B of workbench 10.
1st component 1, the 2nd component 2 and the 3rd component 3 are movable link respectively.1st component 1, the 2nd component 2 and the 3rd component 3 are mobile in the space (space of-Z side) of the below of workbench 10 respectively.Mobile in 1st component 1, the 2nd component 2 and the 3rd space of component 3 respectively above base component 8 (space of+Z side).
1st component 1 can move in XY plane.In the present embodiment, the 1st component 1 can move along X-direction.The profile of 1st component 1 in XZ plane is general triangular (wedge shape).As shown in Figure 1 and Figure 5, the 1st component 1 has lower surface 1B parallel plane with XY, relative to the inclined-plane 1G of XY planar tilt and the side 1S parallel with Z axis.Inclined-plane 1G and side 1S is configured at the position of side (+Z side) more top than lower surface 1B.Inclined-plane 1G towards+X-direction upward (+Z-direction) tilt.The end of the bottom of inclined-plane 1G and the-X side of lower surface 1B links together.The upper end of inclined-plane 1G and the upper end of side 1S link together.The end of the bottom of side 1S and the+X side of lower surface 1B links together.
2nd component 2 is the mode of movement can be supported on the 1st component 1.1st component 1 and the 2nd component 2 can relative movements.2nd component 2 (+Z side) above the 1st component 1 carries out relative movement relative to the 1st component 1.
2nd component 2 can move along at least Z-direction.In the present embodiment, by the movement in the X-direction of the 1st component 1, the 2nd component 2 moves along Z-direction.The profile of 2nd component 2 in XZ plane is general triangular (wedge shape).As shown in Figure 1 and Figure 5, the 2nd component 2 has upper surface 2A parallel plane with XY, relative to the inclined-plane 2G of XY planar tilt and the side 2S parallel with Z axis.Upper surface 2A is configured in the position of side (+Z side) more top than side 2S and inclined-plane 2G.Inclined-plane 2G towards+X-direction upward (+Z-direction) tilt.In the present embodiment, inclined-plane 1G is parallel with inclined-plane 2G.The end of the upper end of inclined-plane 2G and the+X side of upper surface 2A links together.The bottom of inclined-plane 2G and the bottom of side 2S link together.The end of the upper end of side 2S and the-X side of upper surface 2A links together.
Guiding device 4 makes the 2nd component 2 guide the 2nd component 2 along the mode of Z-direction movement with the movement in the X-direction by the 1st component 1.Guiding device 4 be configured at the 1st component 1 at least partially.In the present embodiment, guiding device 4 comprises the guide rail 41 that is configured at the 1st component 1 and is configured at the 2nd component 2 and can the sliding part 42 of movement on guide rail 41.Guide rail 41 is configured at the inclined-plane 1G of the 1st component 1.Sliding part 42 is configured at the inclined-plane 2G of the 2nd component 2.
Guiding device 4 comprises the bearing of direct acting type.In the present embodiment, guiding device 4 comprises rolling bearing.Rolling bearing has rotor.Rotor comprises the one or both in ball and roller bearing.That is, rolling bearing comprises the one or both in ball bearing and roller bearing.In the present embodiment, guiding device 4 comprises direct acting type ball bearing (linear ball bearing).
Fig. 6 is the figure of an example of the guiding device 4 representing present embodiment.Guide rail 41 has surperficial 41A upward, is configured at the side 41B of the both sides of surperficial 41A and is formed at the groove 41C of side 41B respectively.Sliding part 42 have can be relative with the surperficial 41A of guide rail 41 the 1st opposite face 42A, can be relative with the side 41B of guide rail 41 the 2nd opposite face 42B and rotor (ball) 42T that is configured at least partially in the groove 41C of guide rail 41.Ball 42T contacts the inner surface of groove 41C and rotates.Rotated along groove 41C by ball 42T, sliding part 42 can move swimmingly on guide rail 41.
In the present embodiment, guide rail 41 is to be configured at the 1st component 1(inclined-plane 1G relative to the mode of XY planar tilt).Guide rail 41 is configured to the surperficial 41A of guide rail 41 relative to XY planar tilt.As shown in Figure 5, in the present embodiment, guide rail 41(surface 41A) be θ relative to the angle of inclination of XY plane.Angle θ is greater than 0 degree, and is less than 90 degree.Sliding part 42 is configured at the 2nd component 2(inclined-plane 2G in the mode that the 1st opposite face 42A is parallel with the surperficial 41A of guide rail 41).In the present embodiment, sliding part 42 is configured with two on the inclined-plane 2G of the 2nd component 2.In addition, sliding part 42 also can configure one on the 2nd component 2.Also can be that multiple sliding parts 42 of more than three are configured on the 2nd component 2.
2nd component 2 guides with the directed device 4 of mode of the movement in the X-direction by the 1st component 1 along Z-direction movement.When the 1st component 1 moves to-X-direction, the 2nd component 2 moves (rising) to+Z-direction.When the 1st component 1 moves to+X-direction, the 2nd component 2 moves (decline) to-Z-direction.Workbench 10 is supported on the 2nd component 2.Therefore, by the movement (lifting) in the Z-direction of the 2nd component 2, workbench 10 also carries out moving (lifting) together with the 2nd component 2.That is, when the 2nd component 2 moves (rising) to+Z-direction, workbench 10 moves to+Z-direction together with the 2nd component 2.When the 2nd component 2 moves (decline) to-Z-direction, workbench 10 moves to-Z-direction together with the 2nd component 2.
In addition, in guiding device 4, also can be configured with sliding part 42 on the inclined-plane 1G of the 1st component 1, the inclined-plane 2G of the 2nd component 2 is configured with guide rail 41.
The profile of the 1st component 1 is general triangular (wedge shape).The profile of the 2nd component 2 is also in general triangular (wedge shape).That is, in the present embodiment, table device 100 comprises so-called wedge type lowering or hoisting gear.Also the 1st component 1 can be called wedge component (the 1st wedge component) 1.Also the 2nd component 2 can be called wedge component (the 2nd wedge component) 2.
Actuator 7 can make the 1st component 1 move in XY plane.Actuator 7 produces the power for making the 1st component 1 movement.Actuator 7 produce power with make the 1st component 1 in XY plane on move.In the present embodiment, by the work of actuator 7, the 1st component 1 moves along X-direction.Actuator 7 comprises electric rotating machine, utilizes the electric power of supply to carry out work.As depicted in figs. 1 and 2, actuator 7 is connected by power transmission 11 with the 1st component 1.The power (actuating force) of actuator 7 is delivered to the 1st component 1 via power transmission 11.
In the present embodiment, the rotary motion of actuator 7 is converted to rectilinear motion by power transmission 11.In the present embodiment, the axle of actuator (electric rotating machine) 7 rotates in θ X-direction.The rotary motion of θ X-direction is converted to the rectilinear motion of X-direction by power transmission 11, and is delivered to the 1st component 1.1st component 1 utilizes the power (actuating force) of the actuator 7 come via power transmission 11 transmission to move along X-direction.
In the present embodiment, power transmission 11 comprises ball-screw 11B.Ball-screw 11B comprise rotated by the work of actuator 7 leading screw, be connected to the 1st component 1 and the nut being configured at the surrounding of leading screw and the ball be configured between leading screw and nut.The leading screw of ball-screw 11B is supported by block bearing 12 in the mode that can rotate.In the present embodiment, ball-screw 11B rotates in θ X-direction.Rotated in θ X-direction by ball-screw 11B, thus nut moves (rectilinear movement) along X-direction with the 1st component 1 being connected with this nut.
When actuator 7 makes the leading screw of ball-screw 11B rotate in one direction, by the rotation of this leading screw, the 1st component 1 moves to+X-direction.When actuator 7 makes the leading screw of ball-screw 11B rotate in the reverse direction, by the rotation of this leading screw, the 1st component 1 moves to-X-direction.That is, according to the direction of rotation (direction of rotation of the leading screw of ball-screw 11B) of actuator 7, moving direction in the X-direction of the 1st component 1 (any one direction in+X-direction and-X-direction) is determined.According to the moving direction of the 1st component 1, determine the 2nd component 2(workbench 10) Z-direction on moving direction (-Z-direction and+Z-direction in any one direction).
As shown in Figure 1 and Figure 5, table device 100 has the guiding device 9 for guiding the 1st component 1.Guiding device 9 guides the 1st component 1 along X-direction.Guiding device 9 guides the 1st component 1 to be made the 1st component 1 by the work of actuator 7 along the mode of X-direction movement.Guiding device 9 be configured at base component 8 at least partially.In the present embodiment, guiding device 9 comprises the guide rail 91 that is configured at base component 8 and is configured at the 1st component 1 and can the sliding part 92 of movement on guide rail 91.Guide rail 91 is configured at the upper surface of base component 8.Sliding part 92 is configured at the lower surface 1B of the 1st component 1.
Guiding device 9 comprises the bearing of direct acting type.In the present embodiment, guiding device 9 comprises direct acting type ball bearing (linear ball bearing).1st component 1 is so that by the work of actuator 7, the directed device 9 of mode along X-direction movement guides.Guiding device 9 is structures identical with the guiding device 4 illustrated with reference to Fig. 6.Omit the detailed description about guiding device 9.
In addition, in guiding device 9, also can be configured with sliding part 92 on the upper surface of base component 8, the lower surface 1B of the 1st component 1 is configured with guide rail 91.
Table device 100 comprises the suppression component 13 of the movement in the X-direction for suppressing the 2nd component 2.Component 13 is suppressed to be configured in the position leaning on-X side than the 1st component 1 and the 2nd component 2.In the X-axis direction, being configured in the 1st component 1 at least partially and suppressing between component 13 of the 2nd component 2.Component 13 is suppressed to be fixed on base component 8.
Such as by the movement to-X-direction of the 1st component 1, the 2nd component 2 likely moves to-X-direction together with the 1st component 1.In addition, by the movement to+X-direction of the 1st component 1, the 2nd component 2 likely moves to+X-direction together with the 1st component 1.In the present embodiment, suppression component 13 is utilized to suppress the 2nd component 2 to move along X-direction.Thus, the movement in the X-direction of the 1st component 1 is by the movement be converted to efficiently in the Z-direction of the 2nd component 2.
In addition, component 13 is suppressed to bear the power from the 2nd component 2 acted in the X-axis direction.Therefore, the power acted on the X-direction of the 3rd component 3 and bearing components 5 from the 2nd component 2 is inhibited.Thus, maintain the size in the gap between the 3rd component 3 and bearing components 5, gas bearing 5G can guide the 3rd component 3 along Z-direction.
In the present embodiment, table device 100 has to be configured at least partially and suppresses component 13 for guiding the guiding device 14 of the 2nd component 2.Guiding device 14 guides the 2nd component 2 along Z-direction.As shown in Figure 1 and Figure 5, in the present embodiment, guiding device 14 comprises being configured at and suppresses the guide rail 141 of component 13 and be configured at the 2nd component 2 and can the sliding part 142 of movement on guide rail 141.Sliding part 142 is configured at the side 2S of the 2nd component 2.Guide rail 141 is configured at the side 13S suppressing component 13 in the mode relative with sliding part 142.
Guiding device 14 comprises the bearing of direct acting type.In the present embodiment, guiding device 14 comprises the rolling bearing of direct acting type.Guiding device 14 also can comprise illustrated by reference Fig. 6, direct acting type ball bearing (linear ball bearing).
In addition, in guiding device 14, also can be configured with sliding part 142 on the side 13S suppressing component 13, the side 2S of the 2nd component 2 is configured with guide rail 141.
In addition, in the present embodiment, be set to guiding device 4 and comprise the rolling bearing with rotor.Guiding device 4 both can comprise the sliding bearing of the direct acting type not having rotor, also can comprise the gas bearing of direct acting type.In addition, guiding device 4 can not have sliding part yet.Such as, also can be that the inclined-plane 2G of the 2nd component 2 moves along the guide rail being located at the 1st component 1, move along Z-direction to make the 2nd component 2.In this case, the guide rail being located at the 1st component 1 plays a role as the guiding device of guiding the 2nd component 2.Similarly, guiding device 9 both can comprise the sliding bearing of direct acting type, also can comprise the gas bearing of direct acting type.In addition, guiding device 9 can not have sliding part yet.Similarly, guiding device 14 both can comprise the sliding bearing of direct acting type, also can comprise the gas bearing of direct acting type.In addition, guiding device 14 can not have sliding part yet.
3rd component 3 can move along Z-direction.3rd component 3 is the mode of movement can be supported on the bearing components 5 that can form gas bearing 5G.Bearing components 5 supports the 3rd component 3 can make the 3rd component 3 along the mode of Z-direction movement.By to supply gas between the 3rd component 3 and bearing components 5, thus form gas bearing 5G between the 3rd component 3 and bearing components 5.By forming gas bearing 5G between the 3rd component 3 and bearing components 5, thus the 3rd component 3 is supported on bearing components 5 in a non contact fashion.
Fig. 7 is the cutaway view parallel plane with XZ of the 3rd component 3, bearing components 5 and supporting member 6.Fig. 8 is the cutaway view parallel plane with XY of the 3rd component 3, bearing components 5 and supporting member 6.In the present embodiment, the 3rd component 3 is bar-shaped components longer in the Z-axis direction.3rd component 3 have towards the upper surface 3A of+Z-direction, towards-Z-direction lower surface 3B and link side (outer surface) 3C of upper surface 3A and lower surface 3B.As shown in Figure 8, in the present embodiment, the 3rd component 3 is circular with the profile in the parallel plane cross section of XY.That is, the 3rd component 3 is columned components longer in the Z-axis direction.The axis of the 3rd component 3 is parallel with Z axis.In addition, the inside of the 3rd component 3 also can be cavity.Such as, the 3rd component 3 also can be the component of cylindrical shape longer in the Z-axis direction.
Bearing components 5 is components of the tubular of the surrounding of the side 3C being configured at the 3rd component 3.Bearing components 5 is cylindric components.The axis of bearing components 5 is parallel with Z axis.In the present embodiment, the axis of the 3rd component 3 is consistent with the axis of bearing components 5.In other words, the axis of the 3rd component 3 is identical axis with the axis of bearing components 5.Bearing components 5 has inner surface 5C that can be relative with the side 3C of the 3rd component 3.Also inner surface 5C can be called bearing surface 5C.In the present embodiment, bearing components 5 is configured with two in the Z-direction of the axis being parallel with bearing components 5.In the following description, suitably being called the 1st bearing components 51 by being configured in two bearing components 5 of Z-direction, to be configured at+Z side bearing components 5, leaning on the bearing components 5 of-Z side to be suitably called the 2nd bearing components 52 by being configured at than the 1st bearing components 51.
Supporting member 6 block bearing component 5.Bearing components 5 is fixed on supporting member 6.Supporting member 6 supports the 3rd component 3 by bearing components 5 can make the mode of the 3rd component 3 movement.In the present embodiment, supporting member 6 is components of the tubular of the surrounding being configured at the 3rd component 3 and bearing components 5 at least partially.The axis of supporting member 6 is parallel with Z axis.In the present embodiment, the axis of the axis of the 3rd component 3, the axis of bearing components 5 and supporting member 6 is consistent.In other words, the axis of the axis of the 3rd component 3, the axis of bearing components 5 and supporting member 6 is identical axis.As shown in Fig. 3 and Fig. 4 etc., supporting member 6 is supported on supporting arrangement 14S.Supporting arrangement 14S is fixed on base component 8.In the present embodiment, supporting member 6 is supported on base component 8 by supporting arrangement 14S.Supporting member 6 is fixed on supporting arrangement 14S.In the present embodiment, supporting member 6 is fixed relative to the position of base component 8.
In the present embodiment, the lower surface that supporting member 6 is configured to supporting member 6 contacts with the upper surface of base component 8.
As shown in Figure 7 and Figure 8, bearing components 5 is configured at the inner surface of supporting member 6.Bearing components 5 is configured at around the side 3C of the 3rd component 3.The inner surface 5C of bearing components 5 is relative with side (outer surface) 3C of the 3rd component 3.The inner surface 5C of bearing components 5 is relative with the side 3C of the 3rd component 3 across gap.
Bearing components 5 supports the 3rd component 3 in a non contact fashion.Bearing components 5 has can to the supply port 15 of supply gas between this bearing components 5 and the side 3C of the 3rd component 3.In the present embodiment, supply port 15 is configured to relative with the side 3C of the 3rd component 3.Supply port 15 is configured at the inner surface 5C of bearing components 5.Utilize the gas supplied from supply port 15, between the side 3C and the inner surface 5C of bearing components 5 of the 3rd component 3, form gas bearing 5G.Utilize gas bearing 5G, between the side 3C and the inner surface 5C of bearing components 5 of the 3rd component 3, form gap.In the present embodiment, supply port 15 air supply (compressed air).
Utilize and be formed at the gas bearing 5G of the surrounding of the side 3C of the 3rd component 3, the movement in the X-direction of restriction the 3rd component 3 and Y direction.Utilize gas bearing 5G, suppress the movement in the X-direction of the 3rd component 3 and Y direction, allow the movement in the Z-direction of the 3rd component 3.
In the present embodiment, bearing components 5 comprises porous body (porous member).Porous body also can be graphite (graphitic carbon) system such as No. 5093056th, Japanese Patent, No. 2007-120527, Japanese Unexamined Patent Publication etc. Suo Gongkai.In addition, porous body also can be pottery system.Supply port 15 comprises the hole of porous body.In the present embodiment, from hole (supply port) 15 supply gas of porous body.As shown in Figure 7, in the present embodiment, between bearing components 5 and supporting member 6, cavity 16 is formed with.From gas supply device 17 to supply gas in cavity 16.Be supplied to the gas in cavity 16 arrives bearing components 5 inner surface 5C by the inside (hole of porous body) of bearing components 5, and supply to the space between inner surface 5C and outer surface 3C from the supply port 15 being configured at this inner surface 5C.Thus, between inner surface 5C and outer surface 3C, gas bearing 5G is formed.Inner surface 5C and outer surface 3C becomes contactless state.
In the present embodiment, the exhaust outlet 18 of discharging at least partially of the gas be supplied between bearing components 5 and the 3rd component 3 is provided with.Exhaust outlet 18 is configured at supporting member 6.Exhaust outlet 18 is configured between the 1st bearing components 51 and the 2nd bearing components 52.
3rd component 3 is connected to workbench 10.3rd component 3 is connected to workbench 10 in the mode that the upper surface 3A of the 3rd component 3 is relative with the lower surface 10B of workbench 10.In the present embodiment, the 3rd component 3 upper surface 3A side be connected to workbench 10 at least partially.In other words, the 3rd component 3 upper end be connected to workbench 10 at least partially.Both can contact between the upper surface 3A of the 3rd the component 3 and lower surface 10B of workbench 10, also can not contact.3rd component 3 is fixed on workbench 10.By the fixed component that bolt is such, the 3rd component 3 is fixed on workbench 10.
As mentioned above, by the work of actuator 7, the 1st component 1 moves along X-direction.By the movement in the X-direction of the 1st component 1, the 2nd component 2 moves along Z-direction with the workbench 10 being supported on the 2nd component 2.In the present embodiment, by the movement in the Z-direction of workbench 10, the 3rd component 3 being connected to this workbench 10 moves along Z-direction together with workbench 10.3rd component 3 is by bearing components 5(gas bearing 5G) guide and move along Z-direction.In the present embodiment, bearing components 5 is as to make the 3rd component 3 guide the guiding device of the 3rd component 3 to play a role along the mode of Z-direction movement.Also the inner surface 5C relative with the side 3C of the 3rd component 3 of bearing components 5 can be called guide surface 5C.In the present embodiment, side 3C is parallel with Z axis respectively with inner surface 5C.
In the Z-axis direction, the size of the 3rd component 3 is greater than the size of (being longer than) bearing components 5.In the present embodiment, in the Z-axis direction, the distance between the upper surface 3A of the 3rd component 3 and lower surface 3B is greater than the distance between the end (bottom) of the end (upper end) of+Z side of the 1st bearing components 51 and the-Z side of the 2nd bearing components 52.
As shown in Fig. 7 etc., under center G3 in the Z-direction of the 3rd component 3 is in consistent state with the center G5 in the Z-direction of bearing components 5, the end (upper end) comprising+Z side of the 3rd component 3 of upper surface 3A is configured in than bearing components 5(the 1st bearing components 51) the end (upper end) of+Z side by the position of+Z side, the end (bottom) comprising-Z side of the 3rd component 3 of lower surface 3B is configured in than bearing components 5(the 2nd bearing components 52) the end (bottom) of-Z side by the position of-Z side.In other words, under center G3 in the Z-direction of the 3rd component 3 is in consistent state with the center G5 in the Z-direction of bearing components 5, the upper end of the 3rd component 3 and bottom are configured in bearing components 5(the 1st bearing components 51 and the 2nd bearing components 52 respectively) outside.
In addition, in the present embodiment, the center G5 in the Z-direction of bearing components 5 is the center between the upper end of the 1st bearing components 51 and the bottom of the 2nd bearing components 52.When bearing components 5 is one, the center G5 in the Z-direction of bearing components 5 is the center between the upper end of this bearing components 5 and bottom.When being configured with multiple bearing components 5 of more than three in the Z-axis direction, the center G5 in the Z-direction of bearing components 5 be in multiple bearing components being configured at by the bearing components of+Z side upper end and be configured at by the bearing components of-Z side bottom between center.
In addition, as shown in Fig. 7 etc., under center G3 in the Z-direction of the 3rd component 3 is in consistent state with the center G5 in the Z-direction of bearing components 5, the end (upper end) comprising+Z side of the 3rd component 3 of upper surface 3A is configured in the position leaning on+Z side than the end (upper end) of+Z side of supporting member 6.In other words, under the center G3 in the Z-direction of the 3rd component 3 is in consistent state with the center G5 in the Z-direction of bearing components 5, the upper end of the 3rd component 3 is configured in the outside of supporting member 6.
Fig. 9 is the figure representing workbench 10 and the 3rd component 3 example of the state of movement in the Z-axis direction.In the present embodiment, workbench 10 and the 3rd component 3 can the moving range (amount of movement, stroke) of movement in the Z-axis direction be determined.In the present embodiment, according to the workload (rotation amount) of actuator 7, the moving range in the X-direction of the 1st component 1 is determined.In addition, according to the moving range in the X-direction of the 1st component 1, determine the 2nd component 2(workbench 10) Z-direction on moving range.In addition, the 3rd component 3 is connected to workbench 10, and the moving range in the Z-direction of the 3rd component 3 is determined according to the moving range in the Z-direction of workbench 10.As shown in Figure 9, in the Z-axis direction, workbench 10 and the 3rd component 3 can position Z1 and than the position Z2 of position Z1 by+Z side between move.That is, workbench 10 and the 3rd component 3 can the moving range of movement in the Z-axis direction be scopes between position Z1 and position Z2.
In the present embodiment, in the moving range in the Z-direction of the 3rd component 3, the upper end of the 3rd component 3 continues the outside being configured in supporting member 6.In moving range in the Z-direction of the 3rd component 3, the upper end of the 3rd component 3 and bottom continue to be configured in bearing components 5(the 1st bearing components 51 and the 2nd bearing components 52 respectively) outside.
In moving range in the Z-direction of the 3rd component 3, the inner surface 5C of bearing components 5 continues relative with the side 3C of the 3rd component 3.In moving range in the Z-direction of the 3rd component 3, supply port 15 continues relative with the side 3C of the 3rd component 3.In other words, in the moving range in the Z-direction of the 3rd component 3, even if be configured at the state depending on the position Z1 of-Z side most at the 3rd component 3 under, the supply port 15 of bearing components 5 is also relative with the side 3C of the 3rd component 3.In moving range in the Z-direction of the 3rd component 3, even if be configured at the state depending on the position Z2 of+Z side most at workbench 10 under, the supply port 15 of bearing components 5 is also relative with the side 3C of the 3rd component 3.That is, in the whole moving range in the Z-direction of the 3rd component 3, the supply port 15 of bearing components 5 continues relative with the side 3C of the 3rd component 3.Thus, in the moving range of the 3rd component 3, continue to be formed with gas bearing 5G between the 3rd component 3 and bearing components 5.
In addition, in the present embodiment, in the moving range in the Z-direction of the 3rd component 3, between the upper end that the center G3 in the Z-direction of the 3rd component 3 continues to be configured in bearing components 5 and bottom.In other words, in the moving range in the Z-direction of the 3rd component 3, center G3 is not configured in the outside of bearing components 5.In the present embodiment, the mode not being configured in the outside of bearing components 5 with center G3 determines the moving range in the Z-direction of the 3rd component 3.
In addition, in the present embodiment, the upper end of bearing components 5 is upper ends of the 1st bearing components 51.The bottom of bearing components 5 is bottoms of the 2nd bearing components 52.When bearing components 5 is one, the upper end of bearing components 5 is upper ends of this bearing components 5, and the bottom of bearing components 5 is bottoms of this bearing components 5.In addition, when being configured with multiple bearing components 5 of more than three in the Z-axis direction, the upper end of bearing components 5 is being configured at by the upper end of the bearing components of+Z side in multiple bearing components.The bottom of bearing components 5 is being configured at by the bottom of the bearing components of-Z side in multiple bearing components.
As shown in Fig. 1, Fig. 3, Fig. 4, Fig. 7 and Fig. 9 etc., in the present embodiment, the lower surface 3B of the 3rd component 3 is away from base component 8.In the present embodiment, the 3rd component 3 is connected with workbench 10, and is not connected with the component except workbench 10.In the present embodiment, be connected with workbench 10 at the upper surface 3A of the 3rd component 3, around the 3C of side, be configured with bearing components 5 and supporting member 6 with contactless state, be not connected with component at the lower surface 3B of the 3rd component 3.
In the present embodiment, the lower surface that supporting member 6 is configured to supporting member 6 contacts with the upper surface of base component 8.The bottom of supporting member 6 is configured in the position of the bottom (-Z side) on the lower than the 3rd component 3.The lower surface 3B of the 3rd component 3 and the inner surface of supporting member 6 is utilized to be limited with space 63.Lower surface 3B and the space 63 of the 3rd component 3 are facing.In the present embodiment, space 63 comprises the space surrounded by the upper surface of the lower surface 3B of the 3rd component 3, the inner surface of supporting member 6 and base component 8.
Gravity-compensated device 60 have can to the lower surface 3B of the 3rd component 3 faced by the supply port 62 of space 63 supply gas.Gravity-compensated device 60 in order to reduce workbench 10 weight to the effect of actuator 7 from supply port 62 supply gas.Both can gravity-compensated device 60 be called from weight compensating device 60, also can call it as deadweight canceller 60.
Gravity-compensated device 60 have can supply gas gas supply device 61 and for from the stream 64 of the gas flow of gas supply device 61.In the present embodiment, the inside being formed at base component 8 at least partially of stream 64.Stream 64 links gas supply device 61 and supply port 62.Supply port 62 is configured with in an end of stream 64.In the present embodiment, supply port 62 comprises the opening of an end of stream 64.The other end of stream 64 is connected with gas supply device 61.The gas supplied from gas supply device 61 is transported to supply port 62 via stream 64.Gas from gas supply device 61 is supplied to space 63 by supply port 62.
Supply port 62 is configured to space 63 facing.In the present embodiment, supply port 62 is configured at the upper surface of base component 8.Supply port 62 is configured to relative with the lower surface 3B of the 3rd component 3.In addition, supply port 62 also can be configured at the inner surface of supporting member 6 with the mode of space 63 opposite face.
Gas supply device 61 comprises the flow adjuster of the gas delivery volume that can adjust time per unit.Flow adjuster comprises adjuster.The gas delivery volume of the time per unit that gas supply device 61 supplies from supply port 62 to space 63 can be adjusted by use traffic adjusting device.By the gas delivery volume of adjustment from supply port 62, adjust the pressure in space 63.When more from the gas delivery volume of supply port 62, the pressure in space 63 raises.When less from the gas delivery volume of supply port 62, the pressure in space 63 reduces.By adjusting the gas delivery volume supplied to space 63 from supply port 62, gas supply device 61 can adjust the pressure in space 63.In the present embodiment, from supply port 62 air supply (compressed air).
In order to reduce the weight of workbench 10 to the effect of actuator 7, gravity-compensated device 60 is from supply port 62 supply gas.Under gravity, workbench 10 produces the-power of Z-direction.The power of this workbench 10 is delivered to actuator 7 via the 2nd component 2, the 1st component 1 and power transmission 11.In order to reduce the power being delivered to actuator 7 from workbench 10, gravity-compensated device 60 is from supply port 62 supply gas.In order to suppress the power that workbench 10 and the 3rd component 3 produce under gravity to be delivered to actuator 7, gravity-compensated device 60 is from supply port 62 supply gas.
In the present embodiment, in order to reduce the weight of workbench 10 and the 3rd component 3 to the effect of actuator 7, gravity-compensated device 60 is from supply port 62 supply gas.In order to reduce the power being delivered to actuator 7 under gravity from workbench 10 and the 3rd component 3, gravity-compensated device 60 is from supply port 62 supply gas.In order to eliminate deadweight because of workbench 10 and the 3rd component 3 to the power of-Z-direction effect, gravity-compensated device 60 applies power to the 3rd component 3 and workbench 10 along+Z-direction.In other words, in order to offset the power because of the effect of gravity to-Z-direction effect, gravity-compensated device 60 applies the+power of Z-direction to the 3rd component 3 and workbench 10.That is, in order on push away workbench 10 and the 3rd component 3, gravity-compensated device 60 is to space 63 supply gas of the below of workbench 10 and the 3rd component 3.In the present embodiment, gravity-compensated device 60 from supply port 62 supply gas, to make the pressure in space 63 higher than the pressure in the space in the outside of supporting member 6.Space 65 comprises the space of the surrounding of workbench 10.Space 65 comprises the space of the surrounding of the upper surface 3A of the 3rd component 3.Space 65 is the space outerpaces relative to space 63.In the present embodiment, the pressure in space 65 is atmospheric pressure.Gravity-compensated device 60 from supply port 62 to space 63 supply gas, to make the pressure in space 63 higher than atmospheric pressure.
Consider the weight of the object S being placed in workbench 10, gravity-compensated device 60 also can to space 63 supply gas.That is, in order to reduce the weight of workbench 10, the 3rd component 3 and object S to the effect of actuator 7, gravity-compensated device 60 also can from supply port 62 supply gas.In other words, in order to reduce the power being delivered to actuator 7 under gravity from workbench 10, the 3rd component 3 and object S, gravity-compensated device 60 also can from supply port 62 supply gas.
In the present embodiment, the 3rd component 3 is circular with the profile in the parallel plane cross section of XY.In addition, in the present embodiment, the 3rd component 3 is at least configured with two.That is, table device 100 has multiple 3rd component 3.In the present embodiment, multiple 3rd component 3 is connected to different multiple positions of workbench 10 in XY plane.Bearing components 5, supporting member 6 and supply port 62 configure accordingly with multiple 3rd component 3 respectively.By connecting multiple 3rd component 3 on workbench 10, and the plurality of 3rd component 3 is supported on bearing components 5 and supporting member 6, suppresses the movement of workbench 10 in XY plane.That is, multiple 3rd component 3 is connected to different multiple positions of workbench 10 in XY plane.Be supported on bearing components 5 and supporting member 6 by the plurality of 3rd component 3, thus suppress the movement (rotation) in the θ Z-direction of workbench 10.
Such as, when two (two) the 3rd component 3 be connected to workbench 10, these the 3rd components 3 are connected to the 2nd position of the 1st position of workbench 10 and the different from the 1st position of workbench 10.When three (three) the 3rd component 3 be connected to workbench 10, these the 3rd components 3 are connected to the 3rd position of the 1st position of workbench 10, the 2nd position of the different from the 1st position of workbench 10 and the different with the 2nd position with the 1st position of workbench 10.
As shown in Figure 1, Figure 2, shown in Fig. 3 and Fig. 4 etc., in the present embodiment, four (four) the 3rd component 3 be connected to workbench 10.These the 3rd components 3 are connected to the 1st position of the lower surface 10B of workbench 10,2nd position different from the 1st position of the lower surface 10B of workbench 10,3rd position different with the 2nd position with the 1st position of lower surface 10B of workbench 10 and 4th position different with the 1st position, the 2nd position and the 3rd position of the lower surface 10B of workbench 10.1st position, the 2nd position, the 3rd position and the 4th position are configured at around the center of lower surface 10B.In the present embodiment, multiple 3rd component 3 is configured at the surrounding of the 1st component 1 and the 2nd component 2 at least partially.Bearing components 5 and supporting member 6 respectively with four (four) the 3rd component 3 configure accordingly.
In addition, table device 100 also can have any number of 3rd components 3 of more than five (five).Bearing components 5 and supporting member 6 configure accordingly with multiple 3rd component 3 respectively.By being connected with multiple 3rd component 3 on workbench 10, and the plurality of 3rd component 3 is supported on bearing components 5 and supporting member 6, suppresses the movement of workbench 10 in XY plane.
As shown in Fig. 1 etc., in the present embodiment, table device 100 has supporting arrangement 19, and this supporting arrangement 19 is configured between the 2nd component 2 and workbench 10, and for flexibly supporting table 10.2nd component 2 is by supporting arrangement 19 supporting table 10.In the present embodiment, supporting arrangement 19 comprises spherical bearing 23.Spherical bearing 23 is configured to the load of bearing in Z-direction.Supporting arrangement 19 comprises interior wheel component 20 that outer surface is sphere and has and interior foreign steamer component 21 of taking turns the bearing-surface of the outer surface sphere-contact of component 20.In the present embodiment, foreign steamer component 21 is configured at the upper surface 2A of the 2nd component 2.Inside take turns component 20 is connected to workbench 10 lower surface 10B by connecting elements 22.Because workbench 10 is supported on the 2nd component 2 by supporting arrangement 19, therefore workbench 10 and the 2nd component 2 can relative movements.In the present embodiment, relative movement in the Z-direction utilizing supporting arrangement 19 to suppress between (restriction) workbench the 10 and the 2nd component 2, allows the relative movement on the direction (X-direction, Y direction, θ X-direction, θ Y-direction and θ Z-direction) except Z-direction between workbench 10 and the 2nd component 2.
In the present embodiment, connecting elements 22(supporting arrangement 19) be connected to the central portion of the lower surface 10B of workbench 10.Multiple (four) the 3rd component 3 configure in the mode of surrounding connecting elements 22.Multiple 3rd components 3 are connected to the circumference of the lower surface 10B of workbench 10.
In the present embodiment, suppress component 13(guiding device 14) contact with the 2nd component 2 at least partially.Therefore, by suppressing the relative movement between component 13 and the 2nd component 2, there is the 2nd component 2 and carrying out vibrating or the 2nd component 2 departs from the possibility of movement from target track.In the present embodiment, because workbench 10 is supported on the 2nd component 2 by supporting arrangement 19, even if therefore owing to suppressing component 13(guiding device 14) and the 2nd component 2 between contact and make the 2nd component 2 carry out vibrating or the 2nd component 2 departs from mobile from target track, also take turns component 20 by workbench 10(is interior) and the 2nd component 2(foreign steamer component 21) between relative movement absorb this less desirable movement (vibration).Thus, the situation making workbench 10 transmit to workbench 10 from target track disengaging vibration that is mobile or the 2nd component 2 is inhibited.
Then, an example of the action of above-mentioned table device 100 is described.By the work of actuator 7, the power of actuator 7 is delivered to the 1st component 1 via power transmission 11.By the work of actuator 7, the 1st component 1 moves along X-direction.The directed device 9 of 1st component 1 guides and moves along X-direction.By guiding device 9, the 1st component 1 is upper mobile at target track (track of expectation) along X-direction.In the present embodiment, by guiding device 9, the 1st component 1 can move in the X-axis direction as the crow flies.
By the movement in the X-direction of the 1st component 1, the 2nd component 2 moves along Z-direction.The directed device 4 of 2nd component 2 guides and moves along Z-direction.In addition, move along Z-direction by while the movement suppressing component the 13,2nd component 2 in suppressed X-direction.In addition, the directed device 14 of the 2nd component 2 guides and moves along Z-direction.Moved along Z-direction by the 2nd component 2, the workbench 10 being supported on the 2nd component 2 is also moved along Z-direction together with the 2nd component 2.
In the present embodiment, be connected to workbench 10 the 3rd component 3 and with the bearing components 5 that the mode of the 3rd component 3 movement can be made to support the 3rd component 3 between be formed with gas bearing 5G.Gas bearing 5G allows that the 3rd component 3 moves along Z-direction at suppression the 3rd component 3 while X-direction and Y direction movement.In addition, by gas bearing 5G, bearing components 5 supports the 3rd component 3 in a non contact fashion.That is, the bearing components 5 forming gas bearing 5G between the 3rd component 3 suppression the 3rd component 3 along while X-direction and Y direction movement so that the 3rd component 3 can be made to support the 3rd component 3 non-contactly along the mode of this Z-direction movement.Bearing components 5 guides the 3rd component 3 along Z-direction in a non contact fashion.Thus, the 3rd component 3 is upper mobile at target track (track of expectation) along Z-direction with the workbench 10 being connected to the 3rd component 3.In the present embodiment, can move as the crow flies in the Z-axis direction with the workbench 10 being connected to the 3rd component 3 by bearing components the 5,3rd component 3 that can form gas bearing 5G between the 3rd component 3.
Actuator 7 carries out work, is configured in target location to make the object S being supported on workbench 10.In the present embodiment, the bearing components 5 that can form the gas bearing 5G guiding the 3rd component 3 in a non contact fashion along Z-direction is provided with.Therefore, it is possible to make workbench 10 upper mobile at target track (track of expectation).Therefore, object S can be configured in target location by table device 100.
Such as, when using the power of actuator 7 to make workbench 10 move to+Z-direction, or when position in the Z-direction of power maintenance workbench 10 using actuator 7, likely on this actuator 7, effect has load.That is, in order to make workbench 10 rise, or in order to the position of maintenance work platform 10, actuator 7 must continue the power (torque) producing regulation.In this case, the electric power (electric current) that must specify actuator 7 sustainable supply.Its result, actuator 7 likely generates heat.At actuator 7 adstante febre, component likely thermal deformation around., there is the possibility that positioning precision reduces or workbench 10 makes the performance of table device 100 reduce from target track disengaging movement etc. of workbench 10 in its result.In addition, there is the possibility making to be supported on the object S thermal deformation of workbench 10 because of the heating of actuator 7.
In the present embodiment, gravity-compensated device 60 is provided with.Therefore, when making workbench 10 move to+Z-direction, or when position in the Z-direction of maintenance work platform 10, the power (torque) that actuator 7 produces is less.That is, the electric power (electric current) being supplied to actuator 7 is less.Therefore, the heating of actuator 7 is made to be inhibited.Its result, makes the thermal deformation of the thermal deformation of the component of surrounding and object S be inhibited.
In addition, owing to being provided with gravity-compensated device 60, even if the quality (weight) being therefore equipped on the object S of workbench 10 is comparatively large, the load putting on actuator 7 also reduces.In addition, owing to being provided with gravity-compensated device 60, therefore the power that produces of actuator 7 is less.Therefore, the miniaturization of actuator 7 can be sought.
In addition, due to the pressure utilizing gravity-compensated device 60 to improve space 63, even if therefore produce abnormal (improper stoppings) such as having a power failure, cause actuator 7 not produce power, workbench 10 situation of (falling) of sharply declining also can be inhibited.Such as, the electromagnetic brake for preventing workbench 10 from falling can being omitted, therefore also not having the heating (thermal deformation) caused by this electromagnetic brake.
As mentioned above, according to the present embodiment, between the 3rd component 3, gas bearing 5G is formed and so that the 3rd component 3 can be made to support (guiding) the 3rd bearing components 5 of component 3 along the mode of Z-direction movement, the workbench 10 being therefore connected with the 3rd component 3 can be upper mobile at target track (track of expectation) owing to being provided with.In the present embodiment, bearing components 5 supports the 3rd component 3 can make the mode of the 3rd component 3 movement, moves as the crow flies in the Z-axis direction to make the 3rd component 3.Thus, the workbench 10 being connected with the 3rd component 3 can move in the Z-axis direction as the crow flies.That is, utilize the bearing components 5 that can form gas bearing 5G, suppress the linear reduction in the movement of the 3rd component 3 and workbench 10.Thus, the object S being supported on workbench 10 is configured in target location.
In the present embodiment, between the 3rd component 3 and bearing components 5, be formed with gas bearing 5G, bearing components 5 supports the 3rd component 3 in a non contact fashion.Thus, the 3rd component 3 can move in the Z-axis direction swimmingly.When bearing components contacts with the 3rd component 3, likely resistance is produced to the mobile of the 3rd component 3.Its result, workbench 10 and the 3rd component 3 will be made to move as the crow flies although be set to, workbench 10 and the 3rd component 3 likely do not move as the crow flies.In addition, when bearing components contacts with the 3rd component 3, also vibration may be produced because of the movement of the 3rd component 3.When the 3rd component 3 produces vibration, workbench 10 also vibrates, its result, and the positioning precision of workbench 10 likely reduces.In the present embodiment, because bearing components 5 supports the 3rd component 3 non-contactly can make the mode of the 3rd component 3 movement, therefore workbench 10 and the 3rd component 3 can move as the crow flies.In addition, the generation of vibration is made to be inhibited.Its result, makes the reduction of the positioning precision of workbench 10 be inhibited, and workbench 10 and the object S being supported on this workbench 10 can be configured in target location.
In addition, in the present embodiment, table device 100 comprises the wedge type lowering or hoisting gear utilizing the relative movement of the 1st component 1 and the 2nd component 2 to make workbench 10 movement.Therefore, the ratio (speed reducing ratio, capacity of decomposition) of the amount of movement in the X-direction of the 1st component 1 and the amount of movement in the Z-direction of the 2nd component 2 can be adjusted by adjustment angle θ.
In addition, in the present embodiment, owing to being provided with gravity-compensated device 60, the load therefore putting on actuator 7 reduces.Therefore, the heating of actuator 7 is inhibited, in table device 100, the thermal deformation of the component of the surrounding of actuator 7 is inhibited.The component of the surrounding of actuator 7 comprises at least one in the component of guiding device 4, the component of guiding device 9, the component of guiding device 14, the 1st component 1, the 2nd component 2, the 3rd component 3, supporting member 6 and workbench 10.Therefore, the situation that the positioning precision of workbench 10 reduces or workbench 10 departs from movement from target track is made to be inhibited.Its result, makes the reduction of the performance of table device 100 be inhibited.
In addition, in the present embodiment, in the moving range in the Z-direction of the 3rd component 3, supply port 15 continues relative with the side 3C of the 3rd component 3.Thus, in the moving range of the 3rd component 3, can continue to form gas bearing 5G between the 3rd component 3 and bearing components 5, the contactless state between the 3rd component 3 and bearing components 5 can be maintained.
In addition, in the present embodiment, in the Z-axis direction, the size of the 3rd component 3 is greater than the size of bearing components 5.Thereby, it is possible to connecting working table 10 and 3rd component 3 outstanding from the upper end of bearing components 5 swimmingly.In addition, given prominence to than the bottom of bearing components 5 by the 3rd component 3, the balance of the quality (weight) between the side, upper end of bearing components 5 and side, bottom is improved.Thus, the 3rd component 3 can move as the crow flies.
In addition, in the present embodiment, in the moving range of the 3rd component 3, the center G3 of the 3rd component 3 continues to be configured between the upper end (end) of bearing components 5 and bottom (the other end).Thus, even if in the movement of the 3rd component 3, because the balance of the quality (weight) between the side, upper end of bearing components 5 and side, bottom improves, therefore the 3rd component 3 also can move as the crow flies.
In addition, in the present embodiment, the profile in the cross section of the 3rd component 3 is circular.Bearing components 5 is components of the cylindrical shape of the surrounding of the side 3C being configured at the 3rd component 3.The profile in cross section be circular the 3rd component 3 processing with such as the 3rd square component processing compared with, the possibility that easily can obtain higher machining accuracy is higher.In other words, compared with when being the 3rd square component 3 with manufacture profile when manufacture profile is the 3rd circular component 3, the possibility that easily can obtain target shape is higher.In addition, manufacturing cross section is that compared with the circular bearing components 5 with inner surface 5C is the square bearing components with inner surface with manufacture cross section, the possibility that easily can obtain higher machining accuracy (target shape) is higher.Such as, when manufacturing the 3rd square component and bearing components, with the size in the bight with the gap between bearing components that are formed at the 3rd component be formed at the planar portions of the 3rd component mode equal with the size in the gap between bearing components and manufacture the 3rd component and bearing components is likely difficult.According to the present embodiment, by using the 3rd circular component 3 and bearing components 5, the uneven situation of the size in the gap be formed between the side 3C of the 3rd the component 3 and inner surface 5C of bearing components 5 is inhibited.Thus, the situation that in the gap between the side 3C being formed at the 3rd the component 3 and inner surface 5C of bearing components 5, pressure is uneven is inhibited.Therefore, the reduction of the performance of gas bearing 5G is inhibited, the situation making the 3rd component 3 depart from movement from target track is inhibited.
In addition, in the present embodiment, the 3rd component 3 is at least configured with two, and is connected to the different parts of workbench 10.Thus, multiple 3rd components 3 being connected to workbench are utilized to suppress the rotation of such as workbench 10.Thus, the positioning precision of workbench 10 improves.That is, in the present embodiment, the profile in the cross section of the 3rd component 3 is circular.Bearing components 5 is components of the cylindrical shape of the surrounding of the side 3C being configured at the 3rd component 3.Therefore, in the inner side of bearing components 5, the 3rd component 3 likely moves (rotation) in θ Z-direction.When the 3rd component 3 being connected to workbench 10 is one, by the rotation of the 3rd component 3 relative to bearing components 5, this workbench 10 also likely rotates.In the present embodiment, the 3rd component 3 is configured with multiple.Thus, be supported on bearing components 5 and supporting member 6 by the plurality of 3rd component 3, suppress the movement (rotation) in the θ Z-direction of workbench 10.
In addition, in the present embodiment, suppression component 13 is provided with.Therefore, even if the 1st component 1 moves along X-direction, the 2nd component 2 also can be suppressed to move along X-direction.Thus, the movement in the X-direction of the 1st component 1 is by the movement be converted to efficiently in the Z-direction of the 2nd component 2.
In addition, in the present embodiment, workbench 10 is supported on the 2nd component 2 by supporting arrangement 19.Therefore, even if owing to suppressing component 13(guiding device 14) and the 2nd component 2 between contact and make the 2nd component 2 carry out less desirable movement (vibration), supporting arrangement 19 also can be utilized to suppress this less desirable movement (vibration) to be transmitted to workbench 10.
In addition, in the present embodiment, suppression component 13 can also be omitted.2nd component 2 is connected to workbench 10, and this workbench 10 is connected with the 3rd component 3.Gas bearing 5G is utilized to inhibit movement in the X-direction of the 3rd component 3 and Y direction.Therefore, component the 13,2nd component 2 and workbench 10 is suppressed also to be inhibited along the situation of X-direction movement even if eliminate.
In addition, in the present embodiment, also supporting arrangement 19 can be omitted.2nd component 2 also can be fixed on workbench 10.2nd component 2 also can be fixed on workbench 10 by connecting elements.
In addition, in the present embodiment, comprise porous body for bearing components 5 and utilize gas formation gas bearing 5G supply from the hole of this porous body, so-called porous restriction mode is illustrated.Throttle style for the formation of the bearing components 5 of gas bearing 5G is not limited to porous restriction.Such as, also can be do not use the annular cellular type throttling of porous body (from becoming Twisted り) mode, can also be cellular type throttle style, can also be the surface throttle mode via the groove supply gas being located at bearing surface (guide surface).Such as when bearing components 5 of cellular type throttle style, the supply port 15 of supply gas comprises the opening of cellular type.
In addition, in the present embodiment, what be set to the 3rd component 3 is circle with the profile in the parallel plane cross section of XY.As shown in Figure 10, the 3rd component 30 also can be polygon with the profile in the parallel plane cross section of XY.In the example shown in Figure 10, the profile in the cross section of the 3rd component 30 is quadrangle.In addition, the profile in the cross section of the 3rd component 30 is not limited to quadrangle, also can be other polygons.Bearing components 50 also can be defined as being formed with constant gap between the side of the 3rd component 30 according to the shape in the cross section of the 3rd component 30.In the example shown in Figure 10, the situation making the 3rd component 30 move (rotation) in the inner side of bearing components 50 in θ Z-direction is inhibited.3rd component 30 also can be connected with one (one) on workbench 10.Also can be that multiple 3rd components 30 of more than two (two) are connected to workbench 10.
Figure 11 is the figure of an example of the semiconductor-fabricating device 200 representing the table device 100 with present embodiment.Semiconductor-fabricating device 200 comprises the semiconductor equipment manufacturing installation that can manufacture semiconductor equipment.Semiconductor-fabricating device 200 comprises the conveying device 300 of the object S that can carry for the manufacture of semiconductor equipment.Conveying device 300 comprises the table device 100 of present embodiment.In addition, in fig. 11, simplify table device 100 to illustrate.
In the present embodiment, object S is the substrate for the manufacture of semiconductor equipment.Semiconductor equipment is produced from object S.Object S both can comprise semiconductor crystal wafer, also can comprise glass plate.By forming device pattern (wiring pattern) on object S, produce semiconductor equipment.
Semiconductor-fabricating device 200 carries out the process for the formation of equipment pattern to the object S being configured at process position PJ1.The object S being supported on workbench 10 is configured in process position PJ1 by table device 100.Conveying device 300 comprises can carry the input unit 301 of (input) object S to the workbench 10 of table device 100 and can carry the output device 302 of (output) object S from workbench 10.Utilize input unit 301, object S before treatment is carried (input) to workbench 10.Utilize table device 100, the object S being supported on workbench 10 is delivered to process position PJ1.Utilize output device 302, the object S after carrying (output) to process from workbench 10.
Table device 100 makes workbench 10 move, and makes the object S being supported on workbench 10 move to process position PJ1.As illustrated by above-mentioned execution mode, workbench 10 is connected with the 3rd component 3.3rd component 3 is guided in a non contact fashion by bearing components 5.Therefore, table device 100 can make workbench 10 move on target track, the object S being supported on workbench 10 can be configured in process position (target location) PJ1.
Such as, when semiconductor-fabricating device 200 comprises the measurement mechanism of equipment pattern measuring object S by optical system 201, process position PJ1 comprises the position (measuring position) of the focus of optical system 201.By object S being configured in process position PJ1, make semiconductor-fabricating device 200 can obtain the image of the equipment pattern be formed on object S by optical system 201.When semiconductor-fabricating device 200 is included in film formation device object S being formed film, process position PJ1 is the position of the material that can supply for the formation of film.By object S being configured in process position PJ1, the film being used in forming device pattern is formed on object S.
After process PJ1 place, position has carried out processing to object S, output device 302 has been utilized to carry the object S after this process from workbench 10.The processing unit of an operation after utilizing output device 302 to carry the object S of (output) to be transported to carry out.
In the present embodiment, object S can be configured in process position (target location) PJ1 by table device 100.Therefore, the situation producing bad product is inhibited.That is, utilize table device 100, suppress the reduction of the positioning precision of the object S in semiconductor-fabricating device 200, therefore suppress the generation of bad product.
In addition, in the present embodiment, by gravity-compensated device 60, the load putting on actuator 7 of table device 100 is reduced, thus the heating of actuator 7 is inhibited.Therefore, the thermal deformation of object S is made to be inhibited.In addition, the thermal deformation of the component of the surrounding of actuator 7 is made to be inhibited.The component of the surrounding of actuator 7 comprises the component of table device 100.Therefore, the situation that the positioning precision of workbench 10 reduces or workbench 10 departs from movement from target track is made to be inhibited.Thus, object S can be configured in process position (target location) PJ1 by table device 100.The component of the surrounding of actuator 7 not only comprises the component of table device 100, also comprises conveying device 300(input unit 301 and output device 302) component.By suppressing the thermal deformation of conveying device 300, the reduction of the performance of conveying device 300 is inhibited.Thus, object S can be transported to target location by conveying device 300.The component of the surrounding of actuator 7 also comprises the component of semiconductor-fabricating device 200.Such as, by suppressing the thermal deformation of optical system 201, the reduction of the performance of semiconductor-fabricating device 200 is inhibited.In addition, by suppressing the heating of actuator 7, the situation that direct of travel changes or refractive index changes in the space that light passes through of the light to optical system 201 incidence is inhibited.
Figure 12 is the figure of an example of the testing fixture 400 representing the table device 100 with present embodiment.Testing fixture 400 checks the object utilizing semiconductor-fabricating device 200 to manufacture (semiconductor equipment) S2.Testing fixture 400 comprises can the conveying device 300B of conveying object S2.Conveying device 300B comprises the table device 100 of present embodiment.In addition, in fig. 12, simplify table device 100 to illustrate.
Testing fixture 400 is configured the inspection at the object S2 checking position PJ2.The object S2 being supported on workbench 10 is configured in and checks position PJ2 by table device 100.Conveying device 300B comprises and can carry the input unit 301B of (input) object S2 to the workbench 10 of table device 100 and can carry the output device 302B of (output) object S2 from workbench 10.Utilize input unit 301B, carry (input) to workbench 10 the object S2 before checking.Utilize table device 100, the object S2 being supported on workbench 10 is delivered to and checks position PJ2.Utilize output device 302B, the object S2 after carrying (output) to check from workbench 10.
Table device 100 makes workbench 10 move, and the object S2 being supported on workbench 10 is moved to and checks position PJ2.As illustrated by above-mentioned execution mode, workbench 10 is connected with the 3rd component 3.3rd component 3 is guided in a non contact fashion by bearing components 5.Therefore, table device 100 can make workbench 10 move on target track, the object S2 being supported on workbench 10 can be configured in and check position (target location) PJ2.
In the present embodiment, testing fixture 400 uses and detects the inspection that light optically carries out object S2.Testing fixture 400 comprises the irradiation unit 401 that can penetrate and detect light and can be received from irradiation unit 401 and penetrates and the infrared rays receiver 402 at least partially of the detection light reflected by object S2.In the present embodiment, check that position PJ2 comprises the irradiation position detecting light.Checking position PJ2 by being configured in by object S2, optically checking the state of object S2.
After inspection PJ2 place, position has carried out the inspection of object S2, output device 302B has been utilized to carry the object S2 after this inspection from workbench 10.
In the present embodiment, object S2 can be configured in and check position (target location) PJ2 by table device 100, therefore, it is possible to suppress to check bad generation.That is, whether testing fixture 400 can be bad and judge well to object S2.Thus, after making such as bad object S2 be transported to, an operation or the situation of dispatching from the factory are inhibited.
In addition, in the present embodiment, by gravity-compensated device 60, the load putting on actuator 7 of table device 100 is reduced, thus the heating of actuator 7 is inhibited.Therefore, the thermal deformation of object S2 is made to be inhibited.In addition, the thermal deformation of the component of the surrounding of actuator 7 is made to be inhibited.The component of the surrounding of actuator 7 comprises the component of table device 100.Therefore, the situation that the positioning precision of workbench 10 reduces or workbench 10 departs from movement from target track is made to be inhibited.Thus, object S2 can be configured in and check position (target location) PJ2 by table device 100.Thus, the generation that inhibit inspection bad.The component of the surrounding of actuator 7 not only comprises the component of table device 100, also comprises conveying device 300(input unit 301B and output device 302B) component.By suppressing the thermal deformation of conveying device 300B, the reduction of the performance of conveying device 300B is inhibited.Thus, object S2 can be transported to target location by conveying device 300.The component of the surrounding of actuator 7 also comprises the component of testing fixture 400.Such as, by suppressing the thermal deformation of irradiation unit 401 and infrared rays receiver 402, the reduction of the performance of testing fixture 400 is inhibited.In addition, by suppressing the heating of actuator 7, make to be inhibited from the situation that the direct of travel of the detection light of irradiation unit 401 injection changes or refractive index changes in the space that detection light passes through.Thus, testing fixture 400 can suppress to check bad generation.
In addition, in the present embodiment, be set to workbench 10 to move along Z-direction.In the present embodiment, workbench 10 also can move along the direction tilted relative to Z axis.Both can move along the 1st component 1 relative to the direction of XY planar tilt, the direction that also can tilt along the 2nd component 2 relative to Z axis is moved.The direction that the 3rd component 3 being supported on bearing components 5 in a non contact fashion can tilt along it guides workbench 10.By the 3rd component 3 being supported on bearing components 5 in a non contact fashion, the direction that workbench 10 can tilt along it is moved as the crow flies.
description of reference numerals
1 the 1st component; 2 the 2nd components; 3 the 3rd components; 4 guiding devices; 5 bearing components; 5G gas bearing; 6 supporting members; 7 actuators; 8 base components; 9 guiding devices; 10 workbench; 11 power transmissions; 12 block bearings; 13 suppress component; 14 guiding devices; 15 supply ports; 16 cavitys; 17 gas supply devices; 18 exhaust outlets; 19 supporting arrangements; 23 spherical bearings; 60 gravity-compensated devices; 61 gas supply devices; 62 supply ports; 63 spaces; 64 streams; 65 spaces; 100 table devices; 200 semiconductor-fabricating devices; 300 conveying devices; 400 testing fixtures.

Claims (13)

1. a table device, wherein, this table device comprises:
1st component, it can move in horizontal plane;
2nd component, it can relative to above-mentioned 1st component relative movement;
1st guiding device, it is configured at above-mentioned 1st component at least partially, and to be made above-mentioned 2nd component guide above-mentioned 2nd component along with the mode of the direction movement with orthogonal the 1st axis being parallel of above-mentioned horizontal plane by the movement of above-mentioned 1st component;
Workbench, it is supported on above-mentioned 2nd component;
3rd component, its side that there is upper surface, lower surface and link above-mentioned upper surface and above-mentioned lower surface, above-mentioned upper surface side be connected to above-mentioned workbench at least partially;
Bearing components, it has can to the 1st supply port of supply gas between this bearing components and the side of above-mentioned 3rd component, utilize and between this bearing components and the side of above-mentioned 3rd component, form gas bearing from the gas of above-mentioned 1st supply port supply, and so that above-mentioned 3rd component can be made along supporting above-mentioned 3rd component with the mode of the direction movement of above-mentioned 1st axis being parallel;
Actuator, it produces the power for making above-mentioned 1st component movement; And
Gravity-compensated device, its be configured to the lower surface of above-mentioned 3rd component faced by space facing, and to have for the 2nd supply port to above-mentioned space supply gas.
2. table device according to claim 1, wherein,
Above-mentioned 3rd component be with longer bar-shaped component on the direction of above-mentioned 1st axis being parallel,
Above-mentioned bearing components is the component of the tubular of the surrounding of the side being configured at above-mentioned 3rd component,
Above-mentioned 1st supply port is configured to relative with the side of above-mentioned 3rd component,
At above-mentioned 3rd component with in the moving range on the direction of above-mentioned 1st axis being parallel, the side of above-mentioned 1st supply port and above-mentioned 3rd component continues relative.
3. table device according to claim 2, wherein,
With on the direction of above-mentioned 1st axis being parallel, the size of above-mentioned 3rd component is greater than the size of above-mentioned bearing components.
4. the table device according to Claims 2 or 3, wherein,
This table device comprises supporting member, and it is for supporting above-mentioned bearing components, this supporting member be configured at around above-mentioned 3rd component and above-mentioned bearing components at least partially,
Above-mentioned 2nd supply port is to supply gas in the space limited by the above-mentioned lower surface of the 3rd component and the inner surface of above-mentioned supporting member.
5. table device according to claim 4, wherein,
Above-mentioned gravity-compensated device from above-mentioned 2nd supply port supply gas, with make above-mentioned lower surface faced by the pressure in space higher than the pressure in the space in the outside of above-mentioned supporting member.
6. the table device according to any one of claim 2 to 5, wherein,
Above-mentioned 3rd component be circular with the profile in the cross section of above-mentioned plane-parallel.
7. table device according to claim 6, wherein,
Above-mentioned 3rd component is at least configured with two, and is connected to the 2nd position of the 1st position of above-mentioned workbench and the different from above-mentioned 1st position of above-mentioned workbench.
8. the table device according to any one of claim 2 to 7, wherein,
In the moving range of above-mentioned 3rd component, with on the direction of above-mentioned 1st axis being parallel, the center of above-mentioned 3rd component continues to be configured between an end of above-mentioned bearing components and the other end.
9. table device according to any one of claim 1 to 8, wherein,
By above-mentioned actuator, above-mentioned 1st component along moving with the direction of the 2nd axis being parallel in above-mentioned horizontal plane,
This table device comprise for suppress above-mentioned 2nd component with the suppression component of the movement on the direction of above-mentioned 2nd axis being parallel.
10. table device according to claim 9, wherein,
This table device has the 2nd guiding device, the 2nd guiding device be configured at above-mentioned suppression component at least partially, and the 2nd guiding device is used for along guiding above-mentioned 2nd component with the direction of above-mentioned 1st axis being parallel.
11. table devices according to claim 9 or 10, wherein,
This table device comprises supporting arrangement, and this supporting arrangement is configured between above-mentioned 2nd component and above-mentioned workbench, and for flexibly supporting above-mentioned workbench.
12. table devices according to claim 11, wherein,
Above-mentioned supporting arrangement comprises spherical bearing.
13. 1 kinds of conveying devices, wherein, this conveying device comprises the table device according to any one of claim 1 to 12.
CN201380003203.XA 2013-05-20 2013-12-18 Table device and conveyance device Active CN104303282B (en)

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CN107851599B (en) * 2015-07-30 2022-02-08 日本精工株式会社 Stage device, positioning device, flat panel display manufacturing device, and precision machine
CN113504763A (en) * 2021-07-12 2021-10-15 武汉武重机床有限公司 Method, device and equipment for controlling load weight of workbench and storage medium
CN113504763B (en) * 2021-07-12 2022-08-09 武汉武重机床有限公司 Method, device and equipment for controlling load weight of workbench and storage medium

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