CN104296799B - 微型传感器本体及其制造方法、微型传感器 - Google Patents

微型传感器本体及其制造方法、微型传感器 Download PDF

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CN104296799B
CN104296799B CN201410601932.1A CN201410601932A CN104296799B CN 104296799 B CN104296799 B CN 104296799B CN 201410601932 A CN201410601932 A CN 201410601932A CN 104296799 B CN104296799 B CN 104296799B
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microsensor
colloid
manufacture method
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line film
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CN104296799A (zh
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季春燕
杨添
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BOE Technology Group Co Ltd
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Abstract

本发明涉及传感器制造技术领域，公开了一种微型传感器本体及其制造方法，包括以下步骤：S1：在基板上涂布湿润胶体材料形成胶体层，在胶体层的表面覆盖一层一维纳米线膜，形成传感器胚体；S2：干燥传感器胚体的胶体层，使胶体层开裂形成多个胶体岛，一维纳米线膜一部分收缩形成粘附在胶体岛表面的收缩膜片，另一部分拉伸形成连接在相邻收缩膜片之间的连接结构。本发明的传感器本体中，收缩膜片与连接结构由一维纳米线膜抻拉而成，两者连接稳定性好，提高传感器件的稳定性；使用裂化的方法，容易获得大规模稳定悬浮的连接结构阵列传感器本体。本发明还提供一种传感器。

Description

微型传感器本体及其制造方法、微型传感器
技术领域
本发明涉及传感器制造技术领域，特别是涉及一种微型传感器本体及其制造方法、微型传感器。
背景技术
近年来随着微纳米技术的迅速发展，微尺度环境下的微小值测量逐渐受到重视，基于微机电系统技术制备的微型传感器作为一种重要的测试工具，在微型机器人、微装配系统等方面开始越来越广泛的应用。
目前基于碳纳米管、金属/半导体纳米线的器件主要包括电子器件和传感器等，其中，一种传感器本体采用的是纳米材料一维定向批量组装。如图1所示，是现有技术中以碳纳米管制成的传感器本体，其制造方法是在基板1上加工出多个凸起2，在凸起2的上表面粘附电极片3，在相邻的凸起2上的电极片3之间连接多根谐振梁，一般采用纳米管4，使纳米管4悬浮在凸起2之间的沟槽上方。或者是先在基板1上设置多个电极片3，在电极片3之间先连接多根纳米管4然后通过刻蚀等方法在纳米管4的下方刻蚀出沟槽。但是该种方法制靠的传感器本体，纳米管5仅仅依赖表面氧化层或者金属电极对一维纳米材料制成的纳米管的末端粘附力，可能发生滑脱，常常不足以激发共振或者承载重物，器件结构缺乏稳定性。此外，通过现有方法获得大规模稳定的谐振梁阵列悬浮的传感器本体更是困难。
发明内容
(一)要解决的技术问题
本发明的目的是提供一种传感器本体及其制造方法，提高传感器件的稳定性，且容易获得大规模稳定的连接结构阵列悬浮的传感器本体；同时，本发明还提供一种微型传感器。
(二)技术方案
为了解决上述技术问题，本发明提供一种微型传感器本体的制造方法，包括以下步骤：
S1：在基板上涂布湿润胶体材料形成胶体层，在胶体层的表面覆盖一层一维纳米线膜，形成传感器胚体；
S2：干燥传感器胚体的胶体层，使胶体层开裂形成多个胶体岛，一维纳米线膜一部分收缩形成粘附在胶体岛表面的收缩膜片，另一部分拉伸形成连接在相邻收缩膜片之间的连接结构。
其中，所述步骤S2包括：将传感器胚体放置在干燥器中，调节干燥温度和干燥压力，使干燥温度保持在0～260℃，干燥压力保持在0～10MPa。
其中，步骤S1之前还包括步骤S10，在基板的表面上刻蚀出所需要的凹槽图案。
其中，所述湿润胶体材料包括胶粒和溶剂。
其中，所述胶粒采用宽带隙半导体材料。
其中，所述宽带隙半导体材料为二氧化钛、硫化铋或硫化镉。
其中，所述溶剂采用有机溶剂。
其中，其特征在于，所述一维纳米线膜由纤维状、管状的金属材料或半导体材料制成。
其中，所述半导体材料为碳纳米纤维、纳米碳带、碳纳米管或GaP、InP半导体纳米线；所述金属材料为铂、银金属纳米线。
其中，所述一维纳米线膜通过化学气相反应、真空蒸发、溅射、离子镀或纳米半导体生长工艺制成。
本发明还提供一种微型传感器本体，由上述所述的微型传感器本体的制造方法制成，其包括：基板，贴附在所述基板上的多个胶体岛和贴附在多个所述胶体岛上的触发网，所述触发网包括多个粘附在所述胶体岛表面的收缩膜片以及连接在相邻收缩膜片之间的连接结构；所述触发网由一维纳米线膜裂化形成。
其中，所述触发网由纤维状、管状的金属材料或半导体材料制成。
其中，所述胶体岛由二氧化钛、硫化铋或硫化镉材料制成。
其中，所述基板为硅片、玻璃板或者印刷电路板。
其中，所述基板设有凹槽图案。
本发明还提供一种微型传感器，该微型传感器包括上述所述的微型传感器本体。
(三)有益效果
本发明提供的微型传感器本体及其制造方法，本发明的传感器本体中，收缩膜片与连接结构由一维纳米线膜抻拉而成，两者连接稳定性好，提高传感器件的稳定性；使用裂化的方法，容易获得大规模稳定悬浮的连接结构阵列传感器本体。进一步的，通过选用一维纳米线膜和胶体材料可以制成光、温度、气流传感器。
附图说明
图1为现有技术的传感器本体的立体结构示意图；
图2为本发明实施例的传感器本体的制造方法的实施例1的传感器胚体的示意图；
图3为本发明实施例的传感器本体的制造方法的实施例1的传感器本体的示意图；
图4为本发明实施例的传感器本体的制造方法的实施例2的基板的示意图；
图5为本发明实施例的传感器本体的制造方法的实施例2的传感器本体的示意图。
图中，1：基板；2：凸起；3：电极片；4：纳米管；10：基板；11：凹槽；20：胶体层；21：胶体岛；30：一维纳米线膜；31：触发网；32：收缩膜片；33：连接结构。
具体实施方式
下面结合附图和实施例，对本发明的具体实施方式作进一步详细描述。以下实例用于说明本发明，但不用来限制本发明的范围。
实施例1
本发明的微型传感器本体的制造方法，包括以下步骤：
步骤S1：在光滑的基板10上涂布湿润胶体材料形成胶体层20；在胶体层20的表面覆盖一层一维纳米线膜30，形成传感器胚体。参照图2所示，基板10采用硅片、玻璃板或者印刷电路板，基板的上表面为平滑的表面，在基板10的表面涂布湿润胶体材料，形成胶体层20，将一整块平整的一维纳米线膜30铺设在胶体层20的表面，形成传感器胚体。湿润胶体材料可以采用任何在干燥后形成裂块的胶体材料制成。优选的，湿润胶体材料包括胶粒和溶剂，本实施例中，将胶粒与溶剂混合浸润后形成湿润胶体材料。采用二氧化钛、硫化铋或硫化镉等宽带隙半导体材料制成，溶剂采用有机溶剂，如采用甲醇、乙醇、异丙醇等。一维纳米线膜30采用纤维状、管状的金属材料或半导体材料制成。具体的，半导体材料为碳纳米纤维、纳米碳带、碳纳米管或GaP、InP半导体纳米线；金属材料为铂、银金属纳米线。本实施例中，一维纳米线膜30采用碳纳米管材料制成，并通过化学气相反应、真空蒸发、溅射、水热合成、离子镀或纳米半导体生长工艺制成。
步骤S2：干燥传感器胚体的胶体层20，使胶体层20开裂形成多个胶体岛21，一维纳米线膜30一部分收缩形成粘附在胶体岛21表面的收缩膜片32，另一部分拉伸形成连接在相邻收缩膜片32之间的连接结构33，形成传感器本体。干燥传感器胚体的胶体层20可以采用自然干燥，也可以在干燥器中进行干燥。具体的，本实施例的具体步骤如下：将传感器胚体放置在干燥器中，调节干燥温度和干燥压力，使干燥温度保持在0～260℃，干燥压力保持在0～10MPa，干燥2～5小时。在干燥的过程中，湿润胶体材料中的有机溶剂会浸润到一维纳米线膜30中，并渗入它的网络中。当溶剂挥发，胶体层20随即分裂成众多的小裂块，每个小裂块继续收缩形成胶体岛21。胶体层20表面上的一维纳米线膜30在胶体层20分裂的过程中，一部分粘附在小裂块的表面，随着小裂块收缩，收缩形成粘附在胶体岛21表面的收缩膜片32；另一部分连接在相邻小裂块之间，受到小裂块之间收缩的拉伸作用，该部分一维纳米线膜30被拉伸抻直，形成连接结构33，连接结构33连接在相邻的收缩膜片32之间，悬浮于胶体岛21之间。即如图3所示，整个一维纳米线膜30裂化成包括多个收缩膜片32和连接结构33的触发网31。
上述步骤S1和步骤S2生产出来的传感器本体，具有多个收缩膜片，在使用过程中，可以将相邻的胶体岛上的收缩膜片连接作为传感器本体，也可以将整个触发网上两端上的收缩膜片连接作为传感器本体。
在不同的使用使用条件下，需要调节胶体岛21之间的沟槽的宽度，此时，可以通过调节一维纳米线膜30的厚度来进行调节，一维纳米线膜30与胶体层20的厚度比为1/30～1/200。连接结构悬浮阵列密度过大，彼此间会产生屏蔽效应，降低场增强因子，连接结构过于稀疏则场发射面积小，也不利于增大场发射电流。因此，需要通过调节一维纳米膜30的厚度、干燥温度、干燥压力等参数，从而控制胶体层的开裂程度，调节胶体岛21之间的距离。
实施例2
本实施例与实施例1基本相同，所不同之处在于：在步骤S1之前，还包括步骤S10，在基板10的表面上事先刻蚀出所需的凹槽图案。如图4所示，在基板10的表面上刻蚀出9个凹槽11，并设定相邻凹槽之间的距离D。在基板10上涂布胶体材料形成胶体层20，在胶体层20上粘附一层一维纳米线膜30，制成传感器胚体。在胚体干燥的过程中，凹槽上的胶体层20的厚度较大，收缩较慢，其他部分收缩较快，胶体层20沿着凹槽图案开裂，如图5所示，胶体层20开裂形成9个胶体岛21，一维纳米线膜30随之分裂成9个收缩膜片。通过设置凹槽图案，使得胶体岛21的数量、位置以及胶体岛距离进一步可控，能够有效提高制作效率，降低制作成本。凹槽的深度很小，优选为微米级或者纳米级深度。同时，凹槽的面积不能过大，避免在凹槽内形成多个开裂的胶体岛。凹槽的深度和面积的临界大小由具体所采用的材料以及干燥环境决定，可以通过有限次实验获得，在此不再一一赘述。
本发明利用胶体收缩形成胶体岛，胶体岛将原本无序缠绕的一维纳米线膜抻直形成触发网，触发网具有多个收缩膜片和连接在收缩膜片之间的连接结构，连接结构悬浮在胶体岛之间的沟槽之上，且连接结构在整个基板上呈现阵列排布，保证了整体结构的稳定。本方法可以大规模制备连接结构阵列悬浮的传感器本体。本发明的溶剂采用有机溶剂，使一维纳米线膜30更好地被有机溶剂浸润，干燥后能与胶体岛21的表面牢固结合。
以下提供几种具体制造实施方式：
采用上述实施例1或2所述的微型传感器本体的制造方法制造传感器本体。如果一维纳米线膜本身对光吸收较强，那么连接结构自然也具有较强的光响应；反之，若一维纳米线膜本身光吸收较弱，则利用光吸收强的胶体材料来增强光响应。优先选用本身在可见光波段有较宽吸收区的宽带隙半导体材料制备胶体，二氧化钛、硫化铋或硫化镉等等。将宽带隙半导体材料制成量子点，量子点的表面效应和量子尺寸效应使纳米粒子具有同种材质的本体材料和单个分子所不具备的新的光学、电学特性，能够制成光传感器。
采用上述实施例1或2所述的微型传感器本体的制造方法制造传感器本体。其中，一维纳米线膜采用碳纳米管制成，胶体材料采用普通材质。在通电流时，一维纳米材料的轴向导热系数较高，焦耳热效应导致电阻变化，触发网传输的电信号发生变化，实时响应温度变化，可以制成温度传感器。
采用上述实施例1或2所述的微型传感器本体的制造方法制造传感器本体。一维纳米线膜使用碳纳米线制成，悬浮的连接结构的两端连接在收缩膜片上，收缩膜片粘附在胶体岛的表面，十分牢固，不会滑脱。悬浮的连接结构在气流作用下会发生弹性形变，形变拉伸过程中受到较强的轴向应力。一维纳米材料受到拉伸时电阻会有一定程度的变化，由触发网传输的电信号产生相应的变化，因此，可以制成气流传感器。
由此可知，选择不同材料制成微型传感器本体，甚至可以制成具有对光、力、热三重响应的复合传感器。
如图3所示，本发明还提供微型传感器本体，该传感器本体由上述所述的微型传感器本体的制造方法制成，其包括：基板10、贴附在基板10上的多个胶体岛21和贴附在多个胶体岛21上的触发网31。触发网31包括多个粘附在胶体岛21表面的收缩膜片32以及连接在相邻收缩膜片32之间的连接结构33。
如前述的微型传感器本体的制造方法所述，触发网31优选由纤维状、管状的金属材料或半导体材料制成。胶体岛21优选由二氧化钛、硫化铋或硫化镉材料制成。基板10优选为硅片、玻璃板或者印刷电路板。基板10设有凹槽图案，每个凹槽图案具有多个凹槽，每个凹槽中具有一个胶体岛21。
本发明的微型传感器本体，收缩膜片32作为电极，连接结构33作为谐振梁，收缩膜片32和连接结构33为一体结构，且收缩膜片32粘附在胶体岛21的表面，稳定性好。
本发明还提供一种微型传感器，该微型传感器使用上述所述的传感器本体制成。
以上所述仅为本发明的较佳实施例而已，并不用以限制本发明，凡在本发明的精神和原则之内，所作的任何修改、等同替换、改进等，均应包含在本发明的保护范围之内。

Claims (16)

1.一种微型传感器本体的制造方法，其特征在于，包括以下步骤：
S1：在基板上涂布湿润胶体材料形成胶体层，在胶体层的表面覆盖一层一维纳米线膜，形成传感器胚体；
S2：干燥传感器胚体的胶体层，使胶体层开裂形成多个胶体岛，一维纳米线膜一部分收缩形成粘附在胶体岛表面的收缩膜片，另一部分拉伸形成连接在相邻收缩膜片之间的连接结构。
2.如权利要求1所述的微型传感器本体的制造方法，其特征在于，所述步骤S2包括：将传感器胚体放置在干燥器中，调节干燥温度和干燥压力，使干燥温度保持在0～260℃，干燥压力保持在0～10MPa。
3.如权利要求1所述的微型传感器本体的制造方法，其特征在于，步骤S1之前还包括步骤S10，在基板的表面上刻蚀出所需要的凹槽图案。
4.如权利要求1至3任一项所述的微型传感器本体的制造方法，其特征在于，所述湿润胶体材料包括胶粒和溶剂。
5.如权利要求4所述的微型传感器本体的制造方法，其特征在于，所述胶粒采用宽带隙半导体材料。
6.如权利要求5所述的微型传感器本体的制造方法，其特征在于，所述宽带隙半导体材料为二氧化钛、硫化铋或硫化镉。
7.如权利要求4所述的微型传感器本体的制造方法，其特征在于，所述溶剂采用有机溶剂。
8.如权利要求1至3任一项所述的微型传感器本体的制造方法，其特征在于，所述一维纳米线膜由纤维状、管状的金属材料或半导体材料制成。
9.如权利要求8所述的微型传感器本体的制造方法，其特征在于，所述半导体材料为碳纳米纤维、纳米碳带、碳纳米管或GaP、InP半导体纳米线；所述金属材料为铂、银金属纳米线。
10.如权利要求1至3任一项所述的微型传感器本体的制造方法，其特征在于，所述一维纳米线膜通过化学气相反应、真空蒸发、溅射、离子镀或纳米半导体生长工艺制成。
11.一种微型传感器本体，其特征在于，包括：基板，贴附在所述基板上的多个胶体岛和贴附在多个所述胶体岛上的触发网，所述触发网包括多个粘附在所述胶体岛表面的收缩膜片以及连接在相邻收缩膜片之间的连接结构；所述触发网由一维纳米线膜裂化形成。
12.如权利要求11所述的微型传感器本体，其特征在于，所述触发网由纤维状、管状的金属材料或半导体材料制成。
13.如权利要求11所述的微型传感器本体，其特征在于，所述胶体岛由二氧化钛、硫化铋或硫化镉材料制成。
14.如权利要求11所述的微型传感器本体，其特征在于，所述基板为硅片、玻璃板或者印刷电路板。
15.如权利要求11所述的微型传感器本体，其特征在于，所述基板设有凹槽图案。
16.一种微型传感器，其特征在于，该微型传感器包括权利要求11至15任一项所述的微型传感器本体。
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CN103698846A (zh) * 2013-11-28 2014-04-02 北京工业大学 一种柔性金属光子晶体的制备方法
CN104045054A (zh) * 2014-05-14 2014-09-17 中国科学院合肥物质科学研究院 利用湿法刻蚀法和反转印法制备高粘附性微纳米阵列结构薄膜的方法
CN104112544A (zh) * 2014-05-14 2014-10-22 中国科学院合肥物质科学研究院 一种防硫化氢气体腐蚀的银纳米线透明导电薄膜的制备方法

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