CN104253376B - 表面发射激光器及使用其的光学相干层析测量设备 - Google Patents

表面发射激光器及使用其的光学相干层析测量设备 Download PDF

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Publication number
CN104253376B
CN104253376B CN201410302248.3A CN201410302248A CN104253376B CN 104253376 B CN104253376 B CN 104253376B CN 201410302248 A CN201410302248 A CN 201410302248A CN 104253376 B CN104253376 B CN 104253376B
Authority
CN
China
Prior art keywords
wavelength
emitting laser
surface emitting
light
speculum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201410302248.3A
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English (en)
Chinese (zh)
Other versions
CN104253376A (zh
Inventor
长友靖浩
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of CN104253376A publication Critical patent/CN104253376A/zh
Application granted granted Critical
Publication of CN104253376B publication Critical patent/CN104253376B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G01B9/02091—Tomographic interferometers, e.g. based on optical coherence
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/14—External cavity lasers
    • H01S5/141—External cavity lasers using a wavelength selective device, e.g. a grating or etalon
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
    • H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
    • H01S5/18361—Structure of the reflectors, e.g. hybrid mirrors
    • H01S5/18363—Structure of the reflectors, e.g. hybrid mirrors comprising air layers
    • H01S5/18366—Membrane DBR, i.e. a movable DBR on top of the VCSEL
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/022—Mountings; Housings
    • H01S5/02218—Material of the housings; Filling of the housings
    • H01S5/0222—Gas-filled housings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Semiconductor Lasers (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Lasers (AREA)
CN201410302248.3A 2013-06-27 2014-06-27 表面发射激光器及使用其的光学相干层析测量设备 Expired - Fee Related CN104253376B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013-135559 2013-06-27
JP2013135559 2013-06-27

Publications (2)

Publication Number Publication Date
CN104253376A CN104253376A (zh) 2014-12-31
CN104253376B true CN104253376B (zh) 2017-10-13

Family

ID=50980247

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201410302248.3A Expired - Fee Related CN104253376B (zh) 2013-06-27 2014-06-27 表面发射激光器及使用其的光学相干层析测量设备

Country Status (4)

Country Link
US (1) US9360298B2 (https=)
EP (1) EP2822114B1 (https=)
JP (1) JP6463012B2 (https=)
CN (1) CN104253376B (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017205144B4 (de) * 2017-03-27 2019-03-14 Jenoptik Laser Gmbh Oberflächenemittierender Halbleiterlaser mit veränderlicher Wellenzahl

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1408073A (zh) * 2000-03-03 2003-04-02 国家科研中心 具有电可调传递功能的半导体光电装置
US6711203B1 (en) * 2000-09-22 2004-03-23 Blueleaf, Inc. Optical transmitter comprising a stepwise tunable laser
CN101682169A (zh) * 2007-05-07 2010-03-24 皇家飞利浦电子股份有限公司 用于探测距离增加的自混合干涉测量术的激光传感器

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5727016A (en) * 1996-03-26 1998-03-10 The United States Of America As Represented By The Secretary Of The Air Force Spatially coherent diode laser with lenslike media and feedback from straight-toothed gratings
JPH09270556A (ja) 1996-03-29 1997-10-14 Furukawa Electric Co Ltd:The 波長可変面発光半導体レーザ素子
US6347104B1 (en) * 1999-02-04 2002-02-12 Genoa Corporation Optical signal power monitor and regulator
US6549687B1 (en) 2001-10-26 2003-04-15 Lake Shore Cryotronics, Inc. System and method for measuring physical, chemical and biological stimuli using vertical cavity surface emitting lasers with integrated tuner
DE10318767B4 (de) * 2003-04-25 2008-09-04 Universität Kassel Mikromechanisch aktuierbares, optoelektronisches Bauelement
JP4916647B2 (ja) * 2003-05-23 2012-04-18 サムスン エレクトロニクス カンパニー リミテッド 外部共振器半導体レーザーおよびその製造方法
JP2005222968A (ja) 2004-02-03 2005-08-18 Yokogawa Electric Corp 面発光レーザ、この面発光レーザを用いた波長可変面発光レーザ装置および面発光レーザの発振波長制御方法
JP2006216722A (ja) * 2005-02-02 2006-08-17 Tokyo Institute Of Technology 変調器集積面発光レーザ
JP2007109734A (ja) * 2005-10-11 2007-04-26 Ntt Electornics Corp 光モジュール用基板及び光モジュール
US7468997B2 (en) 2006-01-20 2008-12-23 Praevium Research, Inc. System for swept source optical coherence tomography
JP4898263B2 (ja) * 2006-04-07 2012-03-14 サンテック株式会社 光干渉断層画像表示システム
JP2011238852A (ja) * 2010-05-12 2011-11-24 Furukawa Electric Co Ltd:The 面発光レーザ素子およびその製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1408073A (zh) * 2000-03-03 2003-04-02 国家科研中心 具有电可调传递功能的半导体光电装置
US6711203B1 (en) * 2000-09-22 2004-03-23 Blueleaf, Inc. Optical transmitter comprising a stepwise tunable laser
CN101682169A (zh) * 2007-05-07 2010-03-24 皇家飞利浦电子股份有限公司 用于探测距离增加的自混合干涉测量术的激光传感器

Also Published As

Publication number Publication date
US9360298B2 (en) 2016-06-07
EP2822114B1 (en) 2018-05-09
EP2822114A3 (en) 2015-03-11
CN104253376A (zh) 2014-12-31
JP2015029085A (ja) 2015-02-12
EP2822114A2 (en) 2015-01-07
JP6463012B2 (ja) 2019-01-30
US20150002849A1 (en) 2015-01-01

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Granted publication date: 20171013