CN104236591A - Sensing device based on friction generating technology and preparing and using method of sensing device - Google Patents
Sensing device based on friction generating technology and preparing and using method of sensing device Download PDFInfo
- Publication number
- CN104236591A CN104236591A CN201410214880.2A CN201410214880A CN104236591A CN 104236591 A CN104236591 A CN 104236591A CN 201410214880 A CN201410214880 A CN 201410214880A CN 104236591 A CN104236591 A CN 104236591A
- Authority
- CN
- China
- Prior art keywords
- unit
- module
- array
- electrode unit
- sensing device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Force Measurement Appropriate To Specific Purposes (AREA)
- Geophysics And Detection Of Objects (AREA)
Abstract
The invention provides a sensing device based on the friction generating technology and a preparing and using method of the sensing device. A self-driven working mode in which a power source does not need to be additionally arranged and monitoring can be carried out anytime is achieved in the sensing device through the friction generating technology. The sensing device comprises two arrays. Each array is composed of a plurality of independent units which intersect with one another in an insulated mode to form a net structure. An independent sensing pixel point is arranged between every two adjacent intersections. Electrical signals of all the sensing units are independently output. By means of the net structures, the resolution ratio of the sensing device is greatly improved, the wiring number of circuit connection is reduced, and large-scale industrial application is greatly facilitated.
Description
Technical field
The present invention relates to a kind of sensing device and preparation and application thereof, particularly a kind of sensing device based on triboelectricity technology and preparation and application thereof.
Background technology
Tracing sensor is more and more applied in smart mobile phone and human body tracing system, but current sensor is all based on electric capacity or optical effect and magnetic effect.In general, the power supply of these sensors all directly or indirectly comes from battery.This causes very large power-off hidden danger for some situations that needs stand ready, signal monitoring is carried out in not timing; And in monitoring cell electricity quantity and battery altering etc., need a large amount of maintenance works when widespread adoption; Meanwhile, volume, the quality of conventional batteries and electric power system are comparatively large, and sensor is restricted in the application in some field; Moreover there is potential harm in the poisonous chemical confrontation environment contained in battery and human body.Therefore, develop and can be extremely important by self-driven sensing technology.
From 2012, the friction generator development based on frictional static effect was rapid, and with its output efficiently, simple technique, stable performance, for mechanical energy is that electric energy provides a kind of approach having prospect.Some triboelectricity devices and the device utilizing triboelectricity to carry out sensing are developed in succession.But, all there is the defects such as resolution is low, positioning circuit is complicated based on the sensor designed by existing friction generator, be unfavorable for practical application.
Summary of the invention
The present invention is namely for the above-mentioned defect of prior art, design a kind of novel sensing device based on triboelectricity technology, work that can be self-driven, not only can realize very high resolution, and greatly can also simplify testing circuit, there is boundless application prospect.
For achieving the above object, first the present invention provides a kind of sensing device based on triboelectricity technology, comprise the electrical signal of the first array, the second array and one end ground connection, wherein said first array is made up of n separate first module, and described first module comprises the first electrode unit; Described second array is made up of m separate second unit, and described second unit comprises the second electrode unit; Described first array and the second array intersect to form netted by the insulation of certain angle, and the surface at described first array and the second array non-crossing place forms sensing surface; Described electrical signal is electrically connected with n described first electrode unit and m described second electrode unit respectively, and monitors separately the signal that each electrode unit exports, and wherein n and m is natural number;
Preferably, each described first module is only intersected once with a second unit;
Preferably, each described first module is formed with m second unit and intersects;
Preferably, at all point of crossing place, described first module is identical with the relative position up and down of second unit;
Preferably, described first array and the second array on the surface at point of crossing place lower than the sensing surface at non crossover point place;
Preferably, also comprise substrate with holes, the point of crossing of described first module and second unit sinks in the hole of described substrate;
Preferably, at non crossover point place, the surface of described first array and the second array is positioned at same plane;
Preferably, on the bearing of trend of described first module and second unit, any two adjacent point of crossing places, the relative position up and down of first module and second unit is contrary;
Preferably, all described first modules are parallel to each other, and/or all described second units are parallel to each other;
Preferably, all described first module equidistant arrangement, and/or, all described second unit equidistant arrangement;
Preferably, the shape and size of all described first electrode units are all identical, and/or the shape and size of all described second electrode units are all identical;
Preferably, described first electrode unit is all identical with the shape and size of described second electrode unit;
Preferably, the width of described first electrode unit is identical with the spacing of adjacent two the first electrode units;
Preferably, described certain angle is right angle;
Preferably, at point of crossing place, described first module and second unit are separated by space, or are separated by insulation course;
Preferably, described first module is only made up of the first electrode unit, and/or described second unit is only made up of the second electrode unit;
Preferably, also comprise separation layer, on the surface being fitted in described first array and the second array;
Preferably, described separation layer is insulating material;
Preferably, the outside surface of described first electrode unit, and/or the outside surface of described second electrode unit is fitted with non-conductive frictional layer;
Preferably, described frictional layer is organic polymer material;
Preferably, the material composition of described first module and second unit, shape and/or consistent size.
The present invention also provides a kind of method for making of above-mentioned sensing device, comprises the following steps:
(1) provide substrate, described substrate is distributed with several holes;
(2) the first array including the individual separate first module of n is laid in insulation on the substrate, makes each first module at least through a described hole;
(3) part of first module through described hole is absorbed in hole and forms depression;
(4) the second array including the individual separate second unit of m is laid in insulation on the substrate, makes each second unit at least intersect to form netted with a first module at described hole place;
(5) part of second unit through point of crossing place is absorbed in hole and forms depression, and keep insulating between recess first module and second unit;
(6) electrical signal of several one end ground connection is provided, is electrically connected with n the first electrode unit and m the second electrode unit respectively, and monitors the output signal of each electrode unit separately;
Preferably, described suprabasil each Kong Jun becomes the point of crossing of described first module and second unit;
Preferably, the quantity in described hole is more than or equal to n × m;
Preferably, described hole is in the determinant array distribution of rule;
Preferably, also comprise step (7) and remove described substrate;
Preferably, the mutually insulated in described step (5) realizes by forming space between two unit.
Preferably, also comprise after described step (3) in the first module of step (3-1) in each described hole and lay one deck insulation course.
The present invention also provides a kind of method for making of above-mentioned sensing device, comprises the following steps:
(1) line that n+m root inside is conductor, outside is coated with insulating material is provided, and the electrical signal of several one end ground connection;
(2) using line described in n root as warp, described in m root, line is as parallel, and described warp and parallel intersect to form reticulate texture mutually, and each root warp is a first module, and each root parallel is a second unit;
(3) n root warp and m root parallel are electrically connected respectively by the conductor of inside and described electrical signal, to monitor separately the output signal of each unit;
Preferably, by the method for braiding, described warp and parallel are intersected to form netted;
Preferably, on the bearing of trend of described first module and second unit, any two adjacent intersections places, the relative position up and down of first module and second unit is contrary;
Preferably, also comprise step (4) and the insulating material at first module and non crossover point place, second unit surface is removed, described sensing surface is made up of the material of the first electrode unit and the second electrode unit;
Preferably, by mechanical polishing technology, described insulating material is removed in described step (4).
The present invention also provides a kind of using method of above-mentioned sensing device, comprise and detect the speed of single moving object, acceleration and movement locus with described sensing device, described single moving object is slided at the sensing surface of described sensing device, records electric signal that each unit exports over time;
Preferably, described first array and the second array are reticulated by orthorhombic form.
The advantage the most outstanding based on the sensing device of triboelectricity technology provided by the invention is that resolution is high, output signal wiring is simple.Network structure is intersected to form by two arrays, and carry out insulation processing at point of crossing place, the fritter surface between every two point of crossing is made all to form a sensing pixels point, overcome the process technology limit that small size friction generator is difficult to prepare, substantially increase the resolution of whole sensing device, the area that the present invention can accomplish every square centimeter forms thousands of pixels.Meanwhile, each unit only in pair array instead of the electric signal for each pixel are monitored, and make the quantity of electric signal monitoring point reduce to n+m from n × m, greatly reduce the wiring amount of output signal.On this basis, make use of cleverly two arrays at one time in produce the intersection of electric signal, achieve the object localization in two dimensional surface; If add the dimension of time, can also follow the trail of the moving process of object.
In addition, sensing device of the present invention is without the need to externally fed, as long as moving object contacts with sensing surface, just has electric signal and automatically outwards exports, and is self-driven sensing.For on a large scale, the tracking of random targets and monitoring have especially significantly advantage.
Sensor of the present invention is cheap, manufacturing process simple, is very applicable to extensive commercial application.
Accompanying drawing explanation
Shown in accompanying drawing, above-mentioned and other object of the present invention, Characteristics and advantages will be more clear.Reference numeral identical in whole accompanying drawing indicates identical part.Deliberately do not draw accompanying drawing according to physical size equal proportion convergent-divergent, focus on demonstrating purport of the present invention.In addition, although herein can providing package containing the demonstration of the parameter of particular value, parameter without the need to definitely equaling corresponding value, but can be similar to corresponding value in acceptable error margin or design constraint.In addition, the direction term mentioned in following examples, such as " on ", D score, "front", "rear", "left", "right" etc., be only the direction with reference to accompanying drawing.Therefore, the direction term of use is used to illustrate and is not used for limiting the present invention.
Fig. 1 is a kind of typical structure schematic diagram of the sensing device that the present invention is based on triboelectricity technology;
Fig. 2 is the electric signal output principle schematic diagram of sensing device of the present invention;
Fig. 3 (a)-(b) is the first module of sensing device of the present invention and two kinds of typical structure schematic diagram of second unit;
Fig. 4 is the another kind of typical structure schematic diagram of sensing device of the present invention;
Fig. 5 (a)-(b) is two kinds of typical structure schematic diagram of sensing device of the present invention;
Fig. 6 (a)-(d) is a kind of exemplary manufacturing process schematic diagram of sensing device of the present invention;
Fig. 7 is the Directional Decomposition schematic diagram of sensing device monitoring object of the present invention motion;
Fig. 8 (a)-(d) is the principle of work schematic diagram of sensing device monitoring object of the present invention motion;
Fig. 9 (a)-(c) is that embodiment 1 sensing device structural representation and electric signal export spectrogram;
Figure 10 (a)-(c) is that embodiment 1 sensing device is to the trace signals figure of object of which movement; And
Figure 11 (a)-(c) is structural representation and the electric signal output spectrogram of embodiment 2 sensing device.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is clearly and completely described.Obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
Secondly, the present invention is described in detail in conjunction with schematic diagram, and when describing the embodiment of the present invention in detail, for ease of illustrating, described schematic diagram is example, and it should not limit the scope of protection of the invention at this.
Fig. 1 is a kind of typical structure of the sensing device that the present invention is based on triboelectricity technology, comprise the electrical signal 30 of the first array, the second array and one end ground connection, wherein the first array is made up of several separate first modules 10, and first module 10 comprises the first electrode unit 101 (not marking in figure); Second array is made up of several separate second units 20, and second unit 20 comprises the second electrode unit 201 (not marking in figure); First array and the second array intersect to form netted by the insulation of certain angle, the surface (being the dash area in figure) at the first array and the second array non-crossing place forms sensing surface, and the sensing surface between any two adjacent intersections forms a sensing pixels point; 2 multichannel electrical signal output terminals 30 are electrically connected with each first electrode unit 101 and each second electrode unit respectively, monitor separately the signal that each electrode unit exports.
Sensing surface is formed so that the principle of work of sensing device of the present invention to be described for the first electrode unit 101 and the second electrode unit 201, specifically see Fig. 2, wherein x
1, x
2and x
3represent the diverse location of 3 sensing pixels points on sensing device of the present invention, A
1, A
2and A
3for the electrical signal 30 be connected separately with each sensing pixels point.When a moving object A to be monitored and sensing device of the present invention with non-conducting surfaces is positioned at x
1when the sensing pixels point surface of position contacts, because the triboelectricity matter of object A surfacing to be monitored is different from the triboelectricity matter of sensing surface material, electrically contrary surface charge can be formed on the surface of the two contact; When moving object A leaves this sensing pixels point because continuing to move, form the first electrode unit 101 of this sensing pixels point for keeping electric neutrality, by by be attached thereto, the electrical signal 30 of one end ground connection carrys out metastatic electron, thus can detect that electric current exports at this electrical signal; When surface with triboelectric charge moving object A continue move and contact another sensing pixels point time, electrode material corresponding to this pixel is in order to reach electrobalance, also by by be attached thereto, the electrical signal 30 of one end ground connection carrys out metastatic electron, thus also can electric signal be detected at this electrical signal.Thus, need not by external power supply, sensor of the present invention gets final product the actions such as entering, move and leave of perceive motion object.
The material friction electrical property related in the present invention refers to that a kind of material, with other materials, the receiving and losing electrons ability that shows in the process rubbing or contact is occurring, namely positively charged when two kinds of different materials contact or rub, one electronegative, what this bi-material was described obtains electronic capability difference, that is the triboelectricity matter of the two is different.Such as, time polymer nylon contacts with aluminium foil, its surface band positive electricity, namely betatopic ability is comparatively strong, and time polymer poly tetrafluoroethene contacts with aluminium foil, its surface band negative electricity, obtains electronic capability stronger.
In order to realize extensive, high sensitivity, high-resolution sensing, present invention employs the reticulate texture that two arrays intersect, first module 10 and second unit 20 are parts the most basic, to contact for providing and to export sensing surface and the electrode unit of transducing signal with moving object.Wherein, sensing surface is used for directly contacting with moving object to be monitored and passing through to rub forming surface charge, and its Material selec-tion is identical with the friction surface of general friction generator, can be selected from insulating material, semiconductor material and conductor material.Wherein, insulator can be selected from some conventional organic polymer material and natural materials, comprising: teflon, dimethyl silicone polymer, polyimide, poly-diphenyl propane carbonic ester, polyethylene terephthalate, aniline formaldehyde resin, polyoxymethylene, ethyl cellulose, polyamide, melamino-formaldehyde, polyglycol succinate, cellulose, cellulose ethanoate, polyethylene glycol adipate, polydiallyl phthalate, regenerated cellulosic sponge, polyurethane elastomer, styrene-acrylonitrile copolymer multipolymer, styrene-acrylonitrile copolymer, styrene-butadiene-copolymer, polyamide nylon 11, polyamide nylon 66, wool and fabric thereof, silk and fabric thereof, paper, regenerated fiber, cotton and fabric thereof, wood, rubberite, polymethacrylate, polyvinyl alcohol (PVA), polyester, polyisobutylene, polyurethane elastomer, polyurethane flexible sponge, polyethylene terephthalate, polyvinyl butyral, phenolics, neoprene, butadiene-propylene copolymer, natural rubber, polyacrylonitrile, poly-(vinylidene chloride-co-vinyl cyanide), tygon third diphenol carbonate, polystyrene, polymethylmethacrylate, polycarbonate, polymeric liquid crystal copolymer, polychlorobutadiene, polyacrylonitrile, acetate, poly-biphenol carbonic ester, CPPG, polychlorotrifluoroethylene, polyvinylidene chloride, tygon, polypropylene, Polyvinylchloride and Parylene, comprise Parylene C, Parylene N, Parylene D, Parylene HT or Parylene AF4.
Conventional semiconductor comprises silicon, germanium; IIIth and the Vth compounds of group, such as gallium arsenide, gallium phosphide etc.; IIth and the VIth compounds of group, such as cadmium sulfide, zinc sulphide etc.; And the solid solution to be made up of III-V compounds of group and II-VI compounds of group, such as gallium aluminum arsenide, gallium arsenic phosphide etc.Except above-mentioned Crystalline Semiconductors, also have amorphous glass semiconductor, organic semiconductor etc.Non-conductive oxide, conductor oxidate and complex oxide also have triboelectric characteristics, surface charge can be formed at friction process, therefore also frictional layer of the present invention can be used as, the such as oxide of manganese, chromium, iron, copper, also comprises monox, manganese oxide, chromium oxide, iron oxide, cupric oxide, zinc paste, BiO
2and Y
2o
3.
Conventional conductor material comprises the nonmetallic materials etc. of metal and conduction, such as: metal, comprises gold, silver, platinum, aluminium, nickel, copper, titanium, chromium or selenium; By one or more alloys formed be selected from gold, silver, platinum, aluminium, nickel, copper, titanium, chromium and selenium; Conductive oxide, such as tin indium oxide ITO; Organism conductor is generally conducting polymer, comprises from polypyrrole, polyphenylene sulfide, poly-phthalocyanine-like compound, polyaniline and/or polythiophene.Reason as space is limited; can not carry out exhaustive to all possible material; only list some concrete materials herein for people's reference; but obviously these concrete materials can not become the restrictive factor of scope; because under the enlightenment of invention, those skilled in the art is easy to the material selecting other similar according to the triboelectric characteristics that these materials have.
Physics or chemical modification can also be carried out to sensing surface, make the micro structure array it being distributed with micron or secondary micron dimension, to increase the contact area between sensing surface and object to be monitored, thus increase the contact quantity of electric charge.Concrete method of modifying comprises photoengraving, chemical etching and plasma etching etc.Also can by nano material intersperse or the mode of coating realizes this object, or chemical modification is carried out to sensing surface, improves the transfer amount of electric charge at Contact further, thus improve the output power of contact electric density and generator.
The Material selec-tion of sensing surface is mainly considered to coordinate with the material of object to be monitored in actual applications, two that should make to contact with each other surperficial triboelectricity matter difference are as far as possible large, such as, the surface in contact of object to be monitored is conductor material, and so sensing surface selects insulating material or semiconductor material can obtain better output performance; If the surface in contact of object to be monitored is insulating material, so sensing surface then can consider insulating material, semiconductor material or conductor material that triboelectricity matter difference is larger, makes the two in the process that friction occurs, easily produce surface contact electric charge.
The triboelectric charge that sensing surface produces needs could realize outwards exporting by electrode unit, and therefore electrode unit is the necessary parts in each unit.General conductive material all can be used for preparing electrode unit, comprises the nonmetallic materials etc. of metal and conduction, such as: metal, comprises gold, silver, platinum, aluminium, nickel, copper, titanium, chromium or selenium; By one or more alloys formed be selected from gold, silver, platinum, aluminium, nickel, copper, titanium, chromium and selenium; Conductive oxide, such as tin indium oxide ITO; Organism conductor is generally conducting polymer, comprises polypyrrole, polyphenylene sulfide, poly-phthalocyanine-like compound, polyaniline and/or polythiophene.
Because sensing surface also can be made up of conductive material, in this case, the surface of electrode unit also can use as sensing surface simultaneously.This situation is shown in Fig. 2.If sensing surface is formed by insulating material or semiconductor material, in order to ensure that surface charge can export smoothly, should make to be formed between sensing surface and corresponding electrode unit to fit tightly.This laminating can have two kinds of generation types: one is before intersecting to form reticulate texture, such as each first module and second unit formed by the frictional layer 40 of electrode unit with the part or all of surface being fitted in electrode unit, final sensing surface is provided by this frictional layer 40, specifically can see Fig. 3 (a)-(b).Wherein Fig. 3 (a) is the situation that all surfaces of the first electrode unit 101 is all fitted with frictional layer 40, and the upper surface that Fig. 3 (b) is the first electrode unit 101 is fitted with the situation of frictional layer 40.Second unit 20 is similar with first module 10, repeats no more herein.When using two kinds of unit as shown in Fig. 3 (a)-(b) to intersect to form reticulate texture, due to the existence of frictional layer 40, first module 10 and second unit 20 is made to be easy to form insulation system at infall.Another kind of mode is after formation reticulate texture, and one deck frictional layer 40 of fitting again on the surface of electrode unit, form sensing surface, concrete structure can see Fig. 4.In Fig. 4, first module 101 and second unit 201 first intersect to form reticulate texture by insulation, and frictional layer 40 is fitted in this cancellated surface.
In order to form reticulate texture, need some independently first modules 10 and some independently second units 20, generally can select n first module 10 and m second unit 20, wherein n and m is natural number, and preferred n and m is all greater than 2.Composition, the shape and size of each unit can be the same or different.Under regular situation, the composition of the composition of each unit, shape and size, particularly electrode unit, shape and size are all the same, and the electric signal exported when object to be monitored like this enters each position is consistent.Sometimes in order to meet the emphasis monitoring needs of respective location, the first module of this position and second unit can be arranged to different materials or size, make object to be monitored can send the signal different from other positions, to identify through this position.
Relative position between each first module 10 and/or second unit 20 can arbitrarily be arranged as required, generally speaking can be arranged to parallel, and the spacing between adjacent two unit also can be arranged to equal, is equidistant arrangement.In order to raise the efficiency, can also the spacing between adjacent two unit be arranged to equal with cell width.Wherein said " cell width " for this cell projection on the sensing surface, with the perpendicular width of bearing of trend.
Sensing device of the present invention is reticulate texture, and this reticulate texture is intersected by the insulation of first module 10 and second unit 20 and formed.Relative position between point of crossing place first module 10 and second unit 20 does not generally limit, but in order to easy to process, can preferred two kinds of structures (see Fig. 5): a kind of is identical with the relative position up and down of second unit 20 in all point of crossing place first module 10, see Fig. 5 (a), all such as that first module 10 is upper, or be all first module 10 under, this structure is particularly suitable for the first array and the second array separates the situation of laying, and in order to form the sensing pixels point mutually separated, preferably the first array and the second array on the surface at point of crossing place not higher than the sensing surface at point of crossing place, more preferably less than sensing surface, adjacent like this two sensing pixels points have just been separated by point of crossing.In order to form the lower structure in surface, point of crossing place, substrate with holes can be used as auxiliary, specifically can see the step shown in Fig. 6 (a)-(d): the substrate 50 first providing with holes 60, lay first module 10 thereon, and the first module 10 through via hole 60 place is sunk in hole 60, form damascene structures, then in hole, first module 10 is laid an insulation course 70, and then lay second unit 20 according to certain intersecting angle, through via hole 60 place, second unit 20 forms damascene structures equally, first module 10 and second unit 20 is made to form the lower intersection in surface at hole 60 place.In order to ensure the insulation between two unit, in hole 60, also can leave certain space between first module 10 and second unit 20 as insulation course.If certainly also include nonconducting frictional layer 40 in first module 10 and/or second unit 20, dielectric relationship so between first module 10 and second unit 20 also realizes by the isolation of this frictional layer 40, and must not leave space therebetween or lay insulation course separately.Although it should be noted that the hole 60 shown in Fig. 5 is square, the shape of practical application mesopore 60 can adjust as required, and namely square is not the restriction of the present invention for hole 60.
Another kind of reticulate texture is, see Fig. 5 (b): on the direction that first module 10 and second unit 20 extend, and any two adjacent point of crossing places, the relative position up and down of first module 10 and second unit 20 is contrary.This structure is more suitable for being made by the method for braiding, such as using the first array as warp, the second array, as parallel, intersects mutually pressure by warp and weft, forms the reticulate texture with These characteristics.Although this structure also can have been come by perforated plate 50, be more suitable for direct braiding.First module 10 and second unit 20 all can be made centre is that the fine rule of electrode unit weaves, simultaneously in order to the infall at two unit forms insulation, the nonconducting frictional layer 40 of one deck can be formed or dielectric isolation layer is isolated at the outside surface of fine rule, again the separation layer at non crossover point place be removed after having woven.The sensing device obtained like this have be easy to processing, the extra high advantage of resolution.
The preferred each first module 10 of sensing device of the present invention only can be intersected once with a second unit 20, guarantees so only can determine an intersection point by the signal cross analysis of two unit.More preferably each second unit 20 of each first module 10 all intersects once, to improve the location efficiency of sensor.The intersecting angle of two unit does not have particular determination, can select according to actual needs, and conventional can be arranged to square crossing, and namely intersecting angle is right angle, and x-y orthogonal coordinate system easy to use like this positions the object to be monitored on it.
In order to protect sensing surface; can also to fit on the surface of the first array and the second array one deck separation layer; this separation layer is preferably insulating material; this is a bit similar with the method to set up of frictional layer 40 described before; but the Material selec-tion of frictional layer 40 is mainly considered from triboelectric characteristics, the selection of separation layer then mainly considers protective value.The sensing device comprising separation layer is more suitable for the object to be monitored with non-conducting surfaces, in this case, the surface of object to be monitored is easily directly charged by the friction with surrounding environment, and must not depend on the accumulation realizing surface charge with the contact of sensing surface, the output of electric current be then by the electrode unit in sensing device between electrostatic induction be used for.
One end ground connection of electrical signal 30, the other end is electrically connected with each first electrode unit 101 and the second electrode unit 201 respectively, and monitors separately its output signal.In order to realize this object, multiple single pass electrical signal 30 can be used, such as n first module 10 and m second unit 20 are formed to the situation of n × m point of crossing, can use n+m single pass electrical signal 30, each unit all has an electrical signal to carry out independent monitoring; Also can use several multichannel electrical signal output terminals 30, each electrical signal monitors the output situation of multiple unit simultaneously.Generally speaking electrical signal 30 all has certain internal resistance, and in order to regulate and control output signal, also can introduce external resistor therein, the resistance of resistance is not specifically limited, and 10M Ω is a kind of passable selection as an example.The monitor signal of electrical signal 30 can be electric current and/or voltage.Signal Analysis System can also be comprised, to analyze the electric signal monitored.These are all the ordinary skill in the art, do not elaborate at this.
Although sensing device of the present invention can adopt various method to prepare, inventor still proposes two kinds of fairly simple, to be easy to large-scale industrial application methods, is more suitable for the preparation of the above-mentioned sensing device of the present invention.Wherein need a cooperation for substrate, be more suitable for, in all point of crossing place first module 10 situation identical with the relative position of second unit 20, specifically comprising the following steps (can refer to Fig. 6):
(1) substrate 50 is provided, this substrate 50 is distributed with several holes 60;
(2) the first array including the individual separate first module 10 of n is laid in insulation on this base substrate 50, makes each first module 10 at least through a hole 60;
(3) first module 10 is absorbed in formation depression in hole through the part of via hole 60;
(4) first module 10 in each hole lays one deck insulation course 70;
(5) the second array including the individual separate second unit 20 of m is laid in insulation on this base substrate 50, makes each second unit 20 at least intersect to form netted with a first module at hole 60 place;
(6) part of second unit 20 through point of crossing place is absorbed in hole and forms depression, and keep insulating by insulation course between recess first module 10 and second unit 20;
(7) electrical signal 30 of several one end ground connection is provided, is electrically connected with n the first electrode unit 101 and m the second electrode unit 201 respectively, and monitors the output signal of each electrode unit separately.
Substrate 50 in step (1) can be the various base materials of this area routine, such as organic glass, rubber slab etc., be preferably insulating material, can be hard also can have certain flexibility and elasticity.The effect of substrate 50 is to provide hole 60 and forms sagging formula structure to make two unit at point of crossing place.So the cross network structure that the distribution in hole 60 can be formed as required is arranged, preferably apertures 60 is the periodic distribution of rule on this base substrate 50, especially determinant array distribution.The quantity in hole 60 should with the quantity Matching that will form point of crossing, and for improving the utilization factor in hole 60, each hole in preferred substrate 50 becomes the point of crossing of first module 10 and second unit 20.Simultaneously, consider that substrate can also have certain versatility, the quantity in hole 60 can be made to be more than or equal to the quantity that will form point of crossing, such as the situation of n first module 10 and m second unit 20, the quantity in hole 60, more preferably greater than equaling n × m, is that quantity and the position adjustment of point of crossing leaves certain space like this.60, hole need have certain degree of depth, need not limit and be necessary for through hole.The size in hole 60 should match with the size of first module 10 and second unit 20, can admit two unit forming damascene structures therein.In hole 60 kinds, the insulation between two unit can pass through insulator separation, also can be realized by airspace.If arrange insulation course to isolate, a step (3-1) can be increased afterwards in step (3), the first module 10 in each hole lay one deck insulation course 70, and then carries out step (4).
Some sensing device is in use without the need to the support of substrate 50, and this method can also comprise step (6) removing substrate 50, namely after use substrate 50 forms said structure and this structure is fixing, just can remove substrate 50.
Another kind of sensing device preparation method provided by the invention is more suitable on any two adjacent point of crossing, and first module 10 and second unit 20 all have the situation of contrary relative position up and down.Specifically comprise the steps:
(1) line that n+m root inside is conductor, outside is coated with insulating material is provided, and the electrical signal of several one end ground connection;
(2) using line described in n root as warp, described in m root, line is as parallel, and described warp and parallel intersect to form reticulate texture mutually, and each root warp is a first module, and each root parallel is a second unit;
(3) n root warp and m root parallel are electrically connected respectively by the conductor of inside and described electrical signal, to monitor separately the output signal of each unit.
Wherein form the one-tenth network method that reticulate texture can adopt this area routine in step (2), it is netted that the method preferably by braiding makes described warp and parallel intersect to form.For various braiding structure, the structure that the present invention preferably finally obtains is: on the bearing of trend of first module 10 and second unit 20, and any two adjacent intersections places, the relative position up and down of first module 10 and second unit 20 is contrary.
For the situation needing the sensing surface using conduction, the method also comprises step (4) and is removed by the insulating material at first module 10 and the surperficial non crossover point place of second unit 20, and sensing surface is made up of the material of the first electrode unit 101 and the second electrode unit 201.Concrete, by mechanical polishing technology, described insulating material is removed.
Sensing device of the present invention can not only detect entering of object to be monitored, can also monitor the speed and acceleration of carrying out the single moving object of sliding on its surface, and follow the trail of its movement locus.The electric signal that its method mainly exports each unit records and analyzes it over time.Concrete principle following (see Fig. 7 and Fig. 8):
As shown in Figure 7, the motion on two dimensional surface all can resolve into x and y two one-dimensional squares to motion, therefore first introduce sensing device of the present invention to one-dimensional square to motion monitoring principle.With the bearing of trend of the first array be x direction, the bearing of trend of the second array for y direction, when object to be monitored linearly slides into D point from A point, this track can resolve into x direction A → C motion and y direction A → B move.For x direction illustrate one-dimensional square to motion monitoring principle.
See Fig. 7, (spacing is d) form, then the corresponding fixed position x of each second electrode unit 201 to suppose that the second electrode unit 201 parallel equidistant that the second array is l by some width arranges
n, and independently export electric signal by the electrical signal 30 of one end ground connection.This sentences object to be monitored at the pilot process that sensing surface slides is example, now the surface of object to be monitored by the contact with sensing surface with negative charge.Concrete observation process can be divided into two kinds of situations:
The first situation, the width w of object A to be monitored equals electrode width (Fig. 8 (a)).When object A to be monitored from contact first electrode unit x
1to when sliding in the middle of this electrode unit, due to electrostatic induction effect, electronics will flow to the earth from electrode unit, form a reverse current pulses peak; When object A to be monitored continues to slide, to just skidding off x
1during the edge of electrode unit, equally due to electrostatic induction, electronics will flow to electrode from the earth, form positive current impulse peak.The electric signal spectrogram of whole the output of process is see Fig. 8 (b).
Can find out, the electrode unit producing a pair pulse-reverse signal be exactly object A to be monitored the electrode unit of process.
Object A to be monitored just contacts x
1electrode unit and the time point just left completely are t respectively
11and t
22, the starting point at current impulse peak and terminal are recorded by this.Therefore object A to be monitored is through x
1the average velocity of electrode unit is
Wherein x
11and x
12for x
1the position corresponding to two outer side edges of electrode, x here
11-x
12equal the width l of electrode unit.In like manner, when object A to be monitored slides past second electrode unit, will same pulse peak be produced, its speed v
2computing formula is
Can calculate thus, object A to be monitored is through x
1electrode unit and x
2acceleration during electrode unit is
The second situation, the width w of object A to be monitored is not equal to electrode width (shown in Fig. 8 (c) is the situation that w is less).Now, the less object A to be monitored of size may only an electrode unit along the x-axis direction advance, and can not through the electrode unit in y-axis direction, in this case have a time interval (as Fig. 8 (d)) between two formed pulse peaks, but above-mentioned formula is applicable equally.Because an electrode unit is connected with electrical signal by means of only a wire, so according to the principle of friction generator, the pulse peak of interruption can be formed equally, thus also reflect object and move on which electrode unit.
Known by analysis above, no matter object A to be monitored only moves along an electrode unit, still simultaneously through different electrode units, by sensing device of the present invention, all can monitor its position and the information such as speed, acceleration and analyze.Thus, according to the exploded relationship that the motion on two dimensional surface and x and y direction are moved, object A to be monitored is the kinematic parameter in direction from A to D in the figure 7, can be obtained by along x direction with along two components in y direction by following combinatorial operation:
Wherein,
represent average velocity, v represents instantaneous velocity, and a represents acceleration, and subscript x and y represents component that x direction records and the component that y direction records respectively.
In addition, according to its electric impulse signal in x-axis and y-axis, the angle theta of itself and x-axis can also be drawn:
Embodiment 1
Preparation is of a size of the organic glass with holes of 20cm × 20cm as substrate, be 6mm by 9 width, length is the parallel x direction being laid in this substrate surface of aluminum strip of 20cm, distance d between adjacent aluminum strip is 14mm, and the lower surface of each aluminum strip is through the holes of suprabasil 9 even arrangements, through the part of via hole by extruding in embedded hole.Other 9 aluminum strips preparing same size are laid in the surface of above-mentioned substrate in a comparable manner in the y-direction, and formed with the aluminum strip in x direction at hole place and intersect, also damascene structures is made, but control insert depth to ensure not contact between two aluminum strips, thus form the reticulate texture (see Fig. 9 (a)) of 9 × 9 sensing pixels points.The end of each aluminum strip is electrically connected the electrical signal of one end ground connection, is connected to the resistance of 10M Ω between this output terminal and ground.Using the teflon plate of 13mm × 13mm as object to be monitored, make it at the surface sliding of sensing device, the electric signal of sensing device exports as shown in Fig. 9 (b) He Fig. 9 (c), the motion of object to be monitored makes sensing device achieve the open-circuit voltage of nearly 70V and the short-circuit current output of 6 μ A, such output is enough to lightening LED lamp, to realize the real-time directly monitoring treating monitoring object motion.In addition, the average movement velocity also calculating this object according to formula (4) is above 2.8cm/s.
When object to be monitored slides into B point from A with the path of serpentine, the time dependent spectrogram of electric signal that the electrical signal that Figure 10 (a) and Figure 10 (b) give x direction and y direction monitors, and according to the x-y plane path curve (Figure 10 (c)) of the signal syntheses of two width spectrograms above.Based on formula given above, the angle in the real-time speed of B point object to be monitored, acceleration and direction of motion and x-axis can be calculated, be respectively 22.5cm/s, 0.2cm/s
2with 137 °.If the output signal of x-axis and y-axis be coupled together according to the time, we can obtain the movement locus of a serpentine, and this demonstrates the location tracking function of this sensing device.
Embodiment 2
Be that the enameled wire of about 120 μm is woven into reticulate texture by diameter, mesh spacing is 250 μm, and the number of electrodes in 1cm length in size is 41, at 1cm
2area have 41 x output terminals and 41 y output terminals, form 41 × 41=1681 pixel resolution, as shown in Figure 11 (a).When the object that a diameter is 1.2mm slides along " G " track on device, its x output terminal and y output terminal individual signals export as shown in Figure 11 (b), and its electric current signal to noise ratio (S/N ratio) reaches 50.If Figure 11 (c) is x-y output current peak-to-peak signal variation relation in time in slide block movement process, its movement locus can be found out from x-y coordinate axis is clear, and its movement velocity, acceleration can be calculated by x-t, y-t relation.
The above is only preferred embodiment of the present invention, not does any pro forma restriction to the present invention.Any those of ordinary skill in the art, do not departing under technical solution of the present invention ambit, the Method and Technology content of above-mentioned announcement all can be utilized to make many possible variations and modification to technical solution of the present invention, or be revised as the Equivalent embodiments of equivalent variations.Therefore, every content not departing from technical solution of the present invention, according to technical spirit of the present invention to any simple modification made for any of the above embodiments, equivalent variations and modification, all still belongs in the scope of technical solution of the present invention protection.
Claims (33)
1. the sensing device based on triboelectricity technology, comprise the electrical signal of the first array, the second array and one end ground connection, it is characterized in that described first array is made up of n separate first module, described first module comprises the first electrode unit; Described second array is made up of m separate second unit, and described second unit comprises the second electrode unit; Described first array and the second array intersect to form netted by the insulation of certain angle, and the surface at described first array and the second array non-crossing place forms sensing surface; Described electrical signal is electrically connected with n described first electrode unit and m described second electrode unit respectively, and monitors separately the signal that each electrode unit exports, and wherein n and m is natural number.
2. device as claimed in claim 1, it is characterized in that, each described first module is only intersected once with a second unit.
3. device as claimed in claim 2, it is characterized in that, each described first module is formed with m second unit intersects.
4. device as claimed in claim 3, it is characterized in that, at all point of crossing place, described first module is identical with the relative position up and down of second unit.
5. device as claimed in claim 4, is characterized in that, described first array and the second array on the surface at point of crossing place lower than the sensing surface at non crossover point place.
6. device as claimed in claim 5, it is characterized in that, also comprise substrate with holes, the point of crossing of described first module and second unit sinks in the hole of described substrate.
7. the device as described in any one of claim 4-6, is characterized in that, at non crossover point place, the surface of described first array and the second array is positioned at same plane.
8. device as claimed in claim 3, is characterized in that, on the bearing of trend of described first module and second unit, any two adjacent point of crossing places, the relative position up and down of first module and second unit is contrary.
9. the device as described in any one of claim 1-8, is characterized in that, all described first modules are parallel to each other, and/or all described second units are parallel to each other.
10. device as claimed in claim 9, is characterized in that, all described first module equidistant arrangement, and/or, all described second unit equidistant arrangement.
11. devices as described in any one of claim 1-10, it is characterized in that, the shape and size of all described first electrode units are all identical, and/or the shape and size of all described second electrode units are all identical.
12. devices as claimed in claim 11, is characterized in that, described first electrode unit is all identical with the shape and size of described second electrode unit.
13. devices as claimed in claim 12, is characterized in that, the width of described first electrode unit is identical with the spacing of adjacent two the first electrode units.
14. devices as described in any one of claim 1-13, it is characterized in that, described certain angle is right angle.
15. devices as described in any one of claim 1-14, it is characterized in that, at point of crossing place, described first module and second unit are separated by space, or are separated by insulation course.
16. devices as described in any one of claim 1-15, it is characterized in that, described first module is only made up of the first electrode unit, and/or described second unit is only made up of the second electrode unit.
17. devices as claimed in claim 16, is characterized in that, also comprise separation layer, on the surface being fitted in described first array and the second array.
18. devices as claimed in claim 17, it is characterized in that, described separation layer is insulating material.
19. devices as described in any one of claim 1-15, it is characterized in that, the outside surface of described first electrode unit, and/or the outside surface of described second electrode unit are fitted with non-conductive frictional layer.
20. devices as claimed in claim 19, it is characterized in that, described frictional layer is organic polymer material.
21. devices as described in any one of claim 1-20, is characterized in that, the material composition of described first module and second unit, shape and/or consistent size.
22. 1 kinds of methods making sensing device described in claim 1-7, any one of 9-21, is characterized in that comprising the following steps:
1) provide substrate, described substrate is distributed with several holes;
2) the first array including the individual separate first module of n is laid in insulation on the substrate, makes each first module at least through a described hole;
3) part of first module through described hole is absorbed in hole and forms depression;
4) the second array including the individual separate second unit of m is laid in insulation on the substrate, makes each second unit at least intersect to form netted with a first module at described hole place;
5) part of second unit through point of crossing place is absorbed in hole and forms depression, and keep insulating between recess first module and second unit;
6) electrical signal of several one end ground connection is provided, is electrically connected with n the first electrode unit and m the second electrode unit respectively, and monitors the output signal of each electrode unit separately.
23. methods as claimed in claim 22, it is characterized in that, described suprabasil each Kong Jun becomes the point of crossing of described first module and second unit.
24. methods as claimed in claim 22, is characterized in that, the quantity in described hole is more than or equal to n × m.
25. methods as claimed in claim 24, is characterized in that, described hole is in the determinant array distribution of rule.
26. methods as described in any one of claim 22-25, is characterized in that, also comprise step (7) and remove described substrate.
27. methods as described in any one of claim 22-26, is characterized in that, described step 5) in mutually insulated realize by forming space between two unit.
28. methods as described in any one of claim 22-26, is characterized in that, described step 3) after also comprise step 3-1) first module in each described hole lays one deck insulation course.
29. 1 kinds of methods making sensing device described in claim 1-3,8-21, is characterized in that comprising the following steps:
1) line that n+m root inside is conductor, outside is coated with insulating material is provided, and the electrical signal of several one end ground connection;
2) using line described in n root as warp, described in m root, line is as parallel, and described warp and parallel intersect to form reticulate texture mutually, and each root warp is a first module, and each root parallel is a second unit;
3) n root warp and m root parallel are electrically connected respectively by the conductor of inside and described electrical signal, to monitor separately the output signal of each unit.
30. methods as claimed in claim 29, is characterized in that, by the method for braiding, described warp and parallel are intersected to form netted.
31. methods as claimed in claim 30, is characterized in that, on the bearing of trend of described first module and second unit, any two adjacent intersections places, the relative position up and down of first module and second unit is contrary.
32. methods as claimed in claim 31, is characterized in that, also comprise step 4) insulating material at first module and non crossover point place, second unit surface is removed, described sensing surface is made up of the material of the first electrode unit and the second electrode unit.
33. methods as claimed in claim 32, is characterized in that, described step 4) in by mechanical polishing technology, described insulating material is removed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410214880.2A CN104236591B (en) | 2014-05-20 | 2014-05-20 | A kind of sensing device based on triboelectricity technology and preparation and application thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410214880.2A CN104236591B (en) | 2014-05-20 | 2014-05-20 | A kind of sensing device based on triboelectricity technology and preparation and application thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104236591A true CN104236591A (en) | 2014-12-24 |
| CN104236591B CN104236591B (en) | 2016-11-16 |
Family
ID=52225134
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410214880.2A Active CN104236591B (en) | 2014-05-20 | 2014-05-20 | A kind of sensing device based on triboelectricity technology and preparation and application thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104236591B (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105181203A (en) * | 2015-07-31 | 2015-12-23 | 北京微能高芯科技有限公司 | Flexible tactile sensing array structure |
| CN105266779A (en) * | 2015-09-30 | 2016-01-27 | 纳智源科技（唐山）有限责任公司 | Medical monitoring belt and medical monitoring mattress |
| CN105471314A (en) * | 2015-12-21 | 2016-04-06 | 宁夏大学 | Direct-current type charged particle flow generator |
| CN105796095A (en) * | 2016-01-22 | 2016-07-27 | 纳智源科技（唐山）有限责任公司 | Fetal heart and fetal movement monitoring belt and monitoring device and system |
| CN106655438A (en) * | 2015-10-16 | 2017-05-10 | 北京纳米能源与系统研究所 | Self-charging cloth and method for power generation by use of the self-charging cloth |
| CN108796755A (en) * | 2017-05-02 | 2018-11-13 | 北京纳米能源与系统研究所 | Power generation cloth based on electrostatic friction effect and power generation clothing |
| CN109468722A (en) * | 2018-12-21 | 2019-03-15 | 东华大学 | A kind of multifunctional bio mechanics collection of energy textile and its preparation method and application |
| WO2020081007A1 (en) * | 2018-10-15 | 2020-04-23 | National University Of Singapore | Triboelectric sensor and control system |
| CN113203348A (en) * | 2021-04-30 | 2021-08-03 | 中国科学院物理研究所 | Fiber type thermoelectric module multi-region recognizer and preparation method thereof |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103368453A (en) * | 2013-03-12 | 2013-10-23 | 国家纳米科学中心 | Nanometer electric generator utilizing sliding friction and electricity generating method |
| CN103411710A (en) * | 2013-08-12 | 2013-11-27 | 国家纳米科学中心 | Pressure sensor, electronic skin and touch screen equipment |
| WO2013152695A8 (en) * | 2012-04-13 | 2014-03-06 | 纳米新能源（唐山）有限责任公司 | Triboelectricity apparatus for generating electrical energy |
| CN103780123A (en) * | 2013-02-01 | 2014-05-07 | 国家纳米科学中心 | Sliding friction nanometer generating set and generating set |
| CN103791927A (en) * | 2013-11-12 | 2014-05-14 | 国家纳米科学中心 | Self-drive displacement and velocity sensing method, sensor and manufacture method of sensor |
-
2014
- 2014-05-20 CN CN201410214880.2A patent/CN104236591B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013152695A8 (en) * | 2012-04-13 | 2014-03-06 | 纳米新能源（唐山）有限责任公司 | Triboelectricity apparatus for generating electrical energy |
| CN103780123A (en) * | 2013-02-01 | 2014-05-07 | 国家纳米科学中心 | Sliding friction nanometer generating set and generating set |
| CN103368453A (en) * | 2013-03-12 | 2013-10-23 | 国家纳米科学中心 | Nanometer electric generator utilizing sliding friction and electricity generating method |
| CN103411710A (en) * | 2013-08-12 | 2013-11-27 | 国家纳米科学中心 | Pressure sensor, electronic skin and touch screen equipment |
| CN103791927A (en) * | 2013-11-12 | 2014-05-14 | 国家纳米科学中心 | Self-drive displacement and velocity sensing method, sensor and manufacture method of sensor |
Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105181203A (en) * | 2015-07-31 | 2015-12-23 | 北京微能高芯科技有限公司 | Flexible tactile sensing array structure |
| CN105266779A (en) * | 2015-09-30 | 2016-01-27 | 纳智源科技（唐山）有限责任公司 | Medical monitoring belt and medical monitoring mattress |
| WO2017054306A1 (en) * | 2015-09-30 | 2017-04-06 | 纳智源科技（唐山）有限责任公司 | Treatment monitoring belt and treatment monitoring mattress |
| CN105266779B (en) * | 2015-09-30 | 2018-04-17 | 纳智源科技（唐山）有限责任公司 | Medical monitoring band and medical monitoring mattress |
| CN106655438A (en) * | 2015-10-16 | 2017-05-10 | 北京纳米能源与系统研究所 | Self-charging cloth and method for power generation by use of the self-charging cloth |
| CN105471314A (en) * | 2015-12-21 | 2016-04-06 | 宁夏大学 | Direct-current type charged particle flow generator |
| CN105471314B (en) * | 2015-12-21 | 2019-01-22 | 宁夏大学 | Single flow charged particle stream generator |
| CN105796095B (en) * | 2016-01-22 | 2018-12-25 | 纳智源科技（唐山）有限责任公司 | Fetal rhythm movement of the foetus monitoring band, fetal rhythm monitoring device of fetal movement and system |
| CN105796095A (en) * | 2016-01-22 | 2016-07-27 | 纳智源科技（唐山）有限责任公司 | Fetal heart and fetal movement monitoring belt and monitoring device and system |
| CN108796755A (en) * | 2017-05-02 | 2018-11-13 | 北京纳米能源与系统研究所 | Power generation cloth based on electrostatic friction effect and power generation clothing |
| WO2020081007A1 (en) * | 2018-10-15 | 2020-04-23 | National University Of Singapore | Triboelectric sensor and control system |
| CN112840552A (en) * | 2018-10-15 | 2021-05-25 | 新加坡国立大学 | Triboelectric sensor and control system |
| CN112840552B (en) * | 2018-10-15 | 2024-04-05 | 新加坡国立大学 | Friction electric sensor and control system |
| US11965755B2 (en) | 2018-10-15 | 2024-04-23 | National University Of Singapore | Triboelectric sensor and control system |
| CN109468722A (en) * | 2018-12-21 | 2019-03-15 | 东华大学 | A kind of multifunctional bio mechanics collection of energy textile and its preparation method and application |
| CN109468722B (en) * | 2018-12-21 | 2020-06-09 | 东华大学 | Multifunctional biomechanical energy collection textile and preparation method and application thereof |
| CN113203348A (en) * | 2021-04-30 | 2021-08-03 | 中国科学院物理研究所 | Fiber type thermoelectric module multi-region recognizer and preparation method thereof |
| CN113203348B (en) * | 2021-04-30 | 2022-07-12 | 中国科学院物理研究所 | Fiber type thermoelectric module multi-region recognizer and preparation method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104236591B (en) | 2016-11-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104236591A (en) | Sensing device based on friction generating technology and preparing and using method of sensing device | |
| CN106382997B (en) | A kind of frictional static induction type electronic skin | |
| CN104868778B (en) | A kind of driving transient stress sensing device certainly | |
| CN104242723B (en) | Single electrode friction nanometer power generator, electricity-generating method and from driving follow-up mechanism | |
| KR200479189Y1 (en) | Touch screen and manufacturing method of the same | |
| CN103411710B (en) | A kind of pressure transducer, electronic skin and touch-screen equipment | |
| CN103391020B (en) | A kind of multi-freedom-degreeenergy energy acquisition device based on friction nanometer power generator | |
| JP6353535B2 (en) | Single electrode touch sensor | |
| CN103412668B (en) | Touch screen induction module and manufacturing method thereof, and displayer | |
| CN104682766B (en) | Nano generator, generating set and electricity-generating method based on independent frictional layer | |
| CN105490578B (en) | A kind of contact separation formula composite nano generator | |
| CN104426412A (en) | Electric-signal output device and electric-signal output method based on skin | |
| CN105071685A (en) | Three-dimensional friction nanogenerator with independent friction structure | |
| CN105091913A (en) | Sensor and sensing method based on electrostatic induction | |
| CN104980060A (en) | Triboelectric nanometer generator capable of collecting liquid mechanical energy and power generating method thereof | |
| CN105099256A (en) | Generator and power generation method based on electrostatic induction | |
| CN106208800A (en) | A kind of slidingtype composite nano generator | |
| CN104253562B (en) | Enclosed single electrode friction nanometer power generator, electricity-generating method and follow-up mechanism | |
| CN109474200A (en) | The friction generator of piezoelectricity enhancement effect is folded and had based on miura-ori | |
| CN110147016B (en) | Local erasing electromagnetic positioning system and method thereof | |
| CN103780135A (en) | DC frictional electricity generator | |
| CN104748769A (en) | Sensor and sensing method based on electrostatic induction | |
| CN107276495B (en) | Composite generator and composite power generation system based on wind energy and solar energy | |
| CN105181203A (en) | Flexible tactile sensing array structure | |
| CN209267471U (en) | The friction generator of piezoelectricity enhancement effect is folded and had based on miura-ori |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| ASS | Succession or assignment of patent right |
Owner name: BEIJING INSTITUTE OF NANOENERGY AND NANOSYSTEMS Free format text: FORMER OWNER: STATE NANOMETER SCIENCE CENTER Effective date: 20150225 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 100190 HAIDIAN, BEIJING TO: 100083 HAIDIAN, BEIJING |
|
| TA01 | Transfer of patent application right |
Effective date of registration: 20150225 Address after: 100083 Haidian District, Xueyuan Road, No. 30, building C, block Applicant after: BEIJING INSTITUTE OF NANOENERGY AND NANOSYSTEMS Address before: 100190 Beijing, Zhongguancun, north of a No. 11, No. Applicant before: State Nanometer Science Center |
|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |