CN105091913A

CN105091913A - Sensor and sensing method based on electrostatic induction

Info

Publication number: CN105091913A
Application number: CN201410158431.0A
Authority: CN
Inventors: 朱光; 王中林
Original assignee: Beijing Institute of Nanoenergy and Nanosystems
Current assignee: Beijing Institute of Nanoenergy and Nanosystems
Priority date: 2014-04-18
Filing date: 2014-04-18
Publication date: 2015-11-25
Anticipated expiration: 2034-04-18
Also published as: CN105091913B

Abstract

The invention provides a sensor and a sensing method based on electrostatic induction. The sensor comprises a sensing component, wherein the sensing component is composed of a first electrode layer and a second electrode layer matched with the first electrode layer, and the first electrode layer and the second electrode layer are arranged at an interval and are electrically connected with each other. When a detected object moves relative to the first electrode layer of the sensing component, the electric potential of electric charge carried by the sensing component on the first electrode layer is enabled to be changed, and the electric charge flows between the first electrode layer and the second electrode layer under the effect of the electrostatic induction so as to form current. The sensor provided by the invention is simple in structure, and can sense movement of various materials of detected objects without being provided with an external power supply.

Description

Based on sensor and the method for sensing of electrostatic induction

Technical field

The present invention relates to a kind of sensor, particularly relate to the sensor and method for sensing that utilize the movement of electrostatic induction to object to detect.

Background technology

In today of microelectronics and material technology high speed development, the novel microelectronic device with several functions and Highgrade integration is constantly developed in a large number, and shows unprecedented application prospect in the every field of people's daily life.Such as, although have multiple method, the method for sensing such as laser sensing for sensing that is charged or not charged object movement, existing method for sensing all needs, for microsensor provides the power supply of coupling, to carry out driving sensor work.In general, the power supply of these microsensors is all directly or indirectly come from battery, and not only volume is comparatively large for battery, heavier mass, and the poisonous chemical confrontation environment contained and human body exist potential harm.Be subject to these restrictions of probe power, the range of application of corresponding method for sensing is narrower, under can not being useful in the condition of bad environments, is also difficult to work alone for a long time; And for the random work requirements occurred, also need for a long time for sensor switches on power, the requirement of discontented sufficient economize energy.

Summary of the invention

The invention provides a kind of structure simply based on the sensor of electrostatic induction, without the need to arranging power supply, utilizing electrostatic induction principle, the movement of sense object that can be autonomous.

For achieving the above object, the invention provides a kind of sensor based on electrostatic induction, comprise the sensing element for carrying out sensing to the movement being detected object,

Described sensing element is made up of first electrode layer and a second electrode lay coordinating with it, and described first electrode layer and the second electrode lay are separated and arranged and be electrically connected mutually;

Be detected object relative to the first electrode layer of described sensing element move when described, be detected described in making object with the electromotive force of electric charge on described first electrode layer change, under electrostatic induction effect, electric charge flow formation electric current between the first electrode layer and the second electrode lay;

Wherein, described in be detected object in advance with electric charge, or, by with sensor contacts be separated make described in be detected object with electric charge.

Preferably, object is detected described in by be separated after contacting with described first electrode layer or the friction that slides over each other makes contact area change and with electric charge.

Preferably, described first electrode layer can be suitable with the shape and size being detected the surface that object contacts with each other.

Preferably, the first electrode layer of described sensing element is smooth planar surface with being detected the surface that object slides over each other, or be that the out-of-flatness of concaveconvex structure is surperficial.

Preferably, the concaveconvex structure of described first electrode layer surface is periodicity concaveconvex structure.

Preferably, described first electrode layer can have the microstructure of micron or secondary micron dimension with the some or all of surface distributed on the surface being detected object contact; Or, described first electrode layer can be detected the surface of object contact through chemical modification process.

Preferably, also comprise frictional layer, the first electrode layer of described sensing element is fitted in the lower surface of described frictional layer;

Wherein, described in be detected object in advance with electric charge, or, by be separated after contacting with described frictional layer or the friction that slides over each other makes contact area change and with electric charge.

Preferably, the material of described frictional layer is insulating material or semiconductor; The thickness range of described frictional layer is between 10nm to 5mm.

Preferably, described frictional layer is suitable with the described shape and size being detected the surface that object can contact with each other.

Preferably, described frictional layer is smooth planar surface with being detected the surface that object slides over each other, or be that the out-of-flatness of concaveconvex structure is surperficial.

Preferably, described frictional layer can have the microstructure of micron or secondary micron dimension with the some or all of surface distributed on the surface being detected object contact; Or, described frictional layer can be detected the surface of object contact through chemical modification process.。

Preferably, described in be detected object and do not contact with described sensing element, described in be detected object be charged object.

Preferably, also comprise separation layer, described separation layer for isolating the first electrode layer and the second electrode lay of described sensing element, make the two keep apart and keeps setting relative position.

Preferably, the material of described separation layer is insulating material.

Preferably, the first electrode layer of described sensing element and the second electrode lay are all embedded in described separation layer, and the upper surface of at least the first electrode layer exposes described separation layer;

Or described first electrode layer and/or the second electrode lay all wrap by described separation layer;

Or two electrode layers of described separation layer and described sensing element are arranged according to overlapped way, and the first electrode layer of sensing element and the second electrode lay are separately positioned on the upper and lower surface of separation layer.

Preferably, described insulating material can be one or more in llowing group of materials: teflon, dimethyl silicone polymer, polyimide, poly-diphenyl propane carbonic ester, polyethylene terephthalate, aniline formaldehyde resin, polyoxymethylene, ethyl cellulose, polyamide, melamino-formaldehyde, polyglycol succinate, cellulose, cellulose ethanoate, polyethylene glycol adipate, polydiallyl phthalate, regenerated fibre sponge, polyurethane elastomer, styrene-acrylonitrile copolymer multipolymer, styrene-butadiene-copolymer, regenerated fiber, polymethacrylate, polyvinyl alcohol (PVA), polyester, polyisobutylene, polyurethane flexible sponge, polyethylene terephthalate, polyvinyl butyral, phenolics, neoprene, butadiene-propylene copolymer, natural rubber, polyacrylonitrile, poly-(vinylidene chloride-co-vinyl cyanide), tygon third diphenol carbonate, polystyrene, polymethylmethacrylate, polycarbonate, polymeric liquid crystal copolymer, polychlorobutadiene, polyacrylonitrile, poly-biphenol carbonic ester, CPPG, polychlorotrifluoroethylene, polyvinylidene chloride, tygon, polypropylene, Polyvinylchloride, Parylene, wool and fabric thereof, silk and fabric thereof, paper, cotton and fabric thereof, polyurethane elastomer, wood, rubberite and acetate.

Preferably, described semiconductor material is one or more in llowing group of materials: silicon, germanium, the IIIth and the Vth compounds of group, the IIth and the VIth compounds of group and the solid solution be made up of III-V compounds of group and II-VI compounds of group, amorphous glass semiconductor, organic semiconductor, and non-conductive oxide, conductor oxidate and complex oxide semiconductor.

Preferably, the material of described first electrode layer and the second electrode lay is metal or indium tin oxide ITO, FTO or conducting polymer composite.

Preferably, described first electrode layer and/or the second electrode lay are flexible material.

Preferably, described first electrode layer, the second electrode lay and/or frictional layer are flexible material.

Preferably, described separation layer is flexible material.

Accordingly, the present invention also provides a kind of method for sensing based on electrostatic induction, applies the sensor described in above-mentioned any one, comprises step:

The described object that is detected moves relative to the first electrode layer, make to be detected object with the electromotive force of electric charge on the first electrode layer change; Between described first electrode layer and the second electrode lay, produce flow of charge form electric current.

Preferably, described in be detected object and move relative to the first electrode layer, be specially to be detected after object comes in contact with the surface of the first electrode layer and be separated, make to be detected object with electric charge;

Or, described in be detected object and move relative to the first electrode layer, be specially the surface being detected object and the first electrode layer and slide over each other and rub, and in sliding process, make contact area change, make to be detected body surface with electric charge;

Or, described in be detected object and move relative to the first electrode layer, be specially and be detected object and move relative to the first electrode layer, and do not contact with the first electrode layer all the time, described in be detected object self with electric charge.

Compared with prior art, the present invention has following beneficial effect:

1, in sensor provided by the invention, the first electrode layer being detected object and sensing element or the surface of frictional layer be attached on the first electrode layer contact with each other and rub or sliding friction, make to be detected body surface with electric charge, then object is being detected relative under the contact separation of the first electrode layer or frictional layer or sliding friction two kinds of relative motion modes, make to be detected object with the electromotive force of electric charge on the first electrode layer change, cause there is flow of charge between two of sensing element electrode layers, form electric current.Or, be detected object itself with electric charge, do not need contact with any part in sensing element and change with the relative position of the first electrode layer, also can under electrostatic induction effect, cause there is flow of charge between two of sensing element electrode layers, form electric current.Therefore, when being detected object relative to the first electrode layer or frictional layer motion, two electrode layers of sensing element do not need to follow to be detected motion, the conditions such as the convenience that the distance between two electrode layers or relative position can connect according to external circuit or working environment are arranged easily, sensor usable range of the present invention is extensive, overcome in prior art and need for sensor provides the shortcoming of external power supply, special situation inconvenience often being changed to battery, sensor of the present invention can steady operation for a long time.

2, being detected object can be semiconductor, insulator, even conductor, as long as be detected the surface that object contacts with sensing element, such as the first electrode layer or frictional layer, there is the receiving and losing electrons capacity variance of material surface, be separated after being detected object and contacting with sensing element or relative sliding friction time, sensor can carry out sensing to the movement being detected object.With electric charge, object is detected for self, if be detected object with the electromotive force of electric charge to sensing element first electrode layer change, sensor just can move it and carry out sensing.Therefore, the applied range of sensor provided by the invention, what can adapt to different materials is detected object.

3, frictional layer is set on the first electrode layer of sensor, in sensing process the first electrode layer not be detected object and directly contact and slide over each other, avoid the wearing and tearing of electrode layer in sensing element, greatly improve the useful life longevity of sensor.

4, can comprise separation layer in the sensor, filmated two electrode layers are separately positioned on the upper and lower surface of separation layer, this sandwich construction not only can make the structure of sensor compacter, and can be easy to integrated with other devices.

Accompanying drawing explanation

Shown in accompanying drawing, above-mentioned and other object of the present invention, Characteristics and advantages will be more clear.Reference numeral identical in whole accompanying drawing indicates identical part.Deliberately do not draw accompanying drawing by physical size equal proportion convergent-divergent, focus on purport of the present invention is shown.In addition, although the application's providing package is containing the demonstration of the parameter of particular value, parameter without the need to definitely equaling corresponding value, but is similar to corresponding value in acceptable error margin or design constraint.In addition, the direction term mentioned in all embodiments, such as " on ", D score, "front", "rear", "left", "right" etc., be only the direction with reference to accompanying drawing.Therefore, the direction term of use is used to illustrate and is not used for limiting the present invention.

Fig. 1 is the typical structure schematic diagram of the sensor embodiment one based on electrostatic induction;

Fig. 2 is detected object to be separated with the sensor contacts of embodiment one schematic diagram carrying out sensing;

Fig. 3 is the schematic diagram that sensing is carried out in the sensor sliding friction being detected object and embodiment one;

Fig. 4 is that in sensor embodiment one of the present invention, first electrode layer is the schematic diagram of uneven structure with being detected object contact surface;

Fig. 5 is detected object not contact with the sensor of embodiment one, and the distance of its charge-site and sensor changes the schematic diagram carrying out sensing;

Fig. 6 is the structure of sensor embodiment two of the present invention and the schematic diagram carrying out sensing;

Fig. 7 and Fig. 8 is the structural representation that sensor of the present invention comprises separation layer;

Fig. 9 is sensor of the present invention is layer structure schematic diagram; And

The output voltage collection of illustrative plates that Figure 10 detects when being the work of a concrete sensor.

Embodiment

Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is clearly and completely described.Obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.

Secondly, the present invention is described in detail in conjunction with schematic diagram, and when describing the embodiment of the present invention in detail, for ease of illustrating, described schematic diagram is example, and it should not limit the scope of protection of the invention at this.

The existing sensor to object movement all needs to arrange the power supplys such as battery, and the moment is sensor switches on power, and this application for sensor proposes a lot of requirement, under can not being useful in the condition of bad environments, is also difficult to work alone for a long time.The invention provides a kind of sensor based on electrostatic induction, technical scheme is, with the change in location being detected a conducting element of object opposing sense parts of electric charge, this conducting element is electrically connected to another conducting element of sensing element, make to be detected object the electrically charged potential change produced on this conducting element, between two conducting elements, form flow of charge due to electrostatic induction effect, be connected on load between two conducting elements or pick-up unit and have electric current to flow through.In working sensor process, being detected object directly can contact with the conducting element of sensing element, sliding friction or periodically separate mutually; Be detected object also to contact with the conducting element of sensing element, only change distance therebetween, this pattern needs to be detected object self with electric charge, change distance process in, be detected object electrically charged electromotive force on conducting element change.Sensor of the present invention can have multiple-working mode, can adapt to the collection of energy being detected object Different Exercise Mode, be with a wide range of applications.

The concrete structure based on electrostatic induction sensor of the present invention is introduced in detail below in conjunction with accompanying drawing.

Embodiment one:

The typical structure of the sensor based on electrostatic induction provided in the present embodiment is see Fig. 1, sensor comprises the sensing element for carrying out sensing to the movement being detected object, wherein, sensing element is made up of first electrode layer 1 and a second electrode lay 2 coordinating with it, first electrode layer 1 and the second electrode lay 2 are separated setting and are electrically connected, be detected after object 4 can contact with each other with the first electrode layer 1 of sensing element and be separated, as shown by the arrows in Figure 1, the motion being detected object 4 make to be detected object 4 with the electromotive force of electric charge on the first electrode layer 1 change, under electrostatic induction effect, electric charge flows between the first electrode layer and the second electrode lay, form electric current.The first electrode layer 1 be connected pick-up unit 3 between the second electrode lay 2 and can detect electric current in sensing element, or connect electric energy that load applications sensor produces to load supplying.

For being detected the situation that object 4 is not charged object, to be detected, surface that object 4 contacts with the first electrode layer 1 is insulator or semiconductor material, the first electrode layer 1 is for conductive material, illustrate the principle of work of sensor, see Fig. 2, be detected object 4 when there is surface contact with the first electrode layer 1 in sensing element, because the two surperficial receiving and losing electrons ability is different, first electrode layer 1 easily loses electronics, and be detected object 4 surface and easily obtain electronics, the electric charge of equivalent contrary sign is produced, see a figure in Fig. 2 on the two surface.Be detected after object 4 is separated with the first electrode layer 1, see b figure in Fig. 2, be detected object 4 surface with negative charge the constraint of positive charge in the first electrode layer 1 is weakened, due to electrostatic induction effect, positive charge in first electrode layer 1 flows towards the second electrode lay 2, forms the electric current of the first electrode layer 1 to the second electrode lay 2.When the distance being detected object 4 and the first electrode layer 1 is enough far away, be detected object 4 surface with negative charge be not enough to affect electric charge in the first electrode layer 1, therefore between the first electrode layer 1 and the second electrode lay 2, no current produces, schemes see c in Fig. 2.Surface with negative charge be detected object 4 near the first electrode layer 1 time, electrostatic induction effect makes the negative charge being detected object 4 surface attract to strengthen to the positive charge in the first electrode layer 1, positive charge in the second electrode lay 2 flows towards the first electrode layer 1, see d figure in Fig. 2, contrary with the electron flow direction of b figure in Fig. 2, form the electric current of the second electrode lay 2 to the first electrode layer 1.Until when being detected the surface contact of object 4 again with the first electrode layer 1, the surface charge equivalent contrary sign of the two, see a figure in Fig. 2, can not produce flow of charge in the first electrode layer 1 with the second electrode lay 2.When be detected object 4 can periodically and the first electrode layer 2 of sensing element is contacting and separating time, by the pulse ac current signal between generation first electrode layer 1 and the second electrode lay 2 in sensing element.Above process shows, be detected after the first electrode layer 1 in object and sensing element separate, without the need to providing external power supply, the sensing element of sensor can detect the uncharged movement being detected object 4.If the sensing element generation multiple-contact being detected object 4 and sensor be separated, multiple alternating-current pulse electric signal can be produced in sensing element.

In the present embodiment, being detected object 4 also can in advance with electric charge before contacting with the first electrode layer 1, when being detected object with electric charge, when contacting with the first electrode layer, electric charge can redistribute being detected between object and the first electrode layer, because different materials is to the difference of charge confinement ability, still can there is the difference of electric density in two surface of contact, after the two is disconnected from each other, be detected object still with certain electric charge, when being detected the distance between object 4 and the first electrode layer 1 and changing, due to electrostatic induction effect, flow of charge is formed between the first electrode layer and the second electrode lay, electric current is had to export at pick-up unit.Be detected object 4 with electric charge can be obtained by other modes such as chargings, the access approaches of electric charge does not affect for sensing process of the present invention.

In the present embodiment, two electrode layers in sensing element, only need an electrode layer and be detected object to produce electrostatic interaction, the position of two electrode layers can exchange.First electrode layer 1 can be identical with the material of the second electrode lay 2, also can be different.The material of the first electrode layer 1 or the second electrode lay 2 can be selected from metal, indium tin oxide or organism conductor, and conventional metal comprises gold, silver, platinum, aluminium, nickel, copper, titanium, chromium or selenium, and the alloy formed by above-mentioned metal; Organism conductor is generally conducting polymer, comprises from polypyrrole, polyphenylene sulfide, poly-phthalocyanine-like compound, polyaniline and/or polythiophene.

Principle of work according to sensor can be found out, be detected the key that object 4 surface is working sensor with the number of electric charge, the receiving and losing electrons ability be preferably detected between surface that object 4 and the first electrode layer 1 contact with each other differs larger, be detected object 4 surface with electric charge more.The material being detected the surface that object 4 contacts with the first electrode layer 1 can be insulating material.In insulating material, preferred polymers insulating material, specifically can select: teflon, dimethyl silicone polymer, polyimide, poly-diphenyl propane carbonic ester, polyethylene terephthalate, aniline formaldehyde resin, polyoxymethylene, ethyl cellulose, polyamide, melamino-formaldehyde, polyglycol succinate, cellulose, cellulose ethanoate, polyethylene glycol adipate, polydiallyl phthalate, regenerated fibre sponge, polyurethane elastomer, styrene-acrylonitrile copolymer multipolymer, styrene-butadiene-copolymer, regenerated fiber, polymethacrylate, polyvinyl alcohol (PVA), polyester, polyisobutylene, polyurethane flexible sponge, polyethylene terephthalate, polyvinyl butyral, phenolics, neoprene, butadiene-propylene copolymer, natural rubber, polyacrylonitrile, poly-(vinylidene chloride-co-vinyl cyanide), tygon third diphenol carbonate, polystyrene, polymethylmethacrylate, polycarbonate, polymeric liquid crystal copolymer, polychlorobutadiene, polyacrylonitrile, poly-biphenol carbonic ester, CPPG, polychlorotrifluoroethylene, polyvinylidene chloride, tygon, polypropylene, Polyvinylchloride and Parylene etc.

In addition, other insulating material also can such as, as surfacing, common wool and fabric, silk and fabric thereof, paper, cotton and fabric, polyurethane elastomer, wood, rubberite and the acetate etc. being detected object 4 and contacting with the first electrode layer 1.

First electrode layer is conductive material, and semiconductor material and conductive material there are differences in receiving and losing electrons ability, and therefore, the material being detected the surface that object can contact with the first electrode layer can select semiconductor, comprising: silicon, germanium; IIIth and the Vth compounds of group, such as gallium arsenide, gallium phosphide etc.; IIth and the VIth compounds of group, such as cadmium sulfide, zinc sulphide etc.; And the solid solution to be made up of III-V compounds of group and II-VI compounds of group, such as gallium aluminum arsenide, gallium arsenic phosphide etc.Except above-mentioned Crystalline Semiconductors, also have amorphous glass semiconductor, organic semiconductor etc.Non-conductive oxide, conductor oxidate and complex oxide also have triboelectric characteristics, surface charge can be formed at friction process, therefore the material being detected object 4 can be also the oxide of manganese, chromium, iron, copper, also comprises monox, manganese oxide, chromium oxide, iron oxide, cupric oxide, zinc paste, BiO ₂and Y ₂o ₃.

Reason as space is limited, can not carry out exhaustive to the possible material being detected object 4, therefore the material of the first electrode layer can be selected according to the material being detected the surface that object 4 contacts with the first electrode layer, and preferably the receiving and losing electrons ability difference of the two surfacing contacted with each other is the bigger the better.Only list several concrete material being detected object and the first electrode layer in the application and supply technician's reference; but obviously these concrete materials can not become the restrictive factor of scope; because under the enlightenment of invention, those skilled in the art is easy to the material selecting other similar according to the triboelectric characteristics that these materials have.

In in the sensor, only be detected the serviceability of surface on sensor that object 4 and the first electrode layer 1 can contact with each other and have impact, only need restriction first electrode layer 1 can be above-mentioned conductive material with being detected the surface that object 4 contacts, other parts for the first electrode layer 1 do not limit, therefore, first electrode layer 1 all overallly can adopt homogeneous material, also can be sandwich construction or nucleocapsid structure.

Found through experiments, between the material being detected the surface that object 4 contacts with each other with the first electrode layer 1 electronic capability differ larger, be detected object 1 surface with the quantity of electric charge more, sensor output electric signal stronger.So, can according to material listed above by simple contrast experiment, select suitable material as the first electrode layer 1 and the surfacing being detected object 4 and contacting, to obtain the electric signal output performance of the best.

In addition, first electrode layer 1 both can be hard material with being detected two surfaces that object 4 contacts with each other, also can be flexible material, the sensing capabilities of hardness to sensor of material have a significant effect, but but can expand the range of application of sensor of the present invention.

In working sensor process, except being detected the number of object 4 surface with electric charge and having impact to the serviceability of sensor, first electrode layer 1 be detected the serviceability of distance on sensor that object 4 separates and also have impact, distance of separation is about large, and the electric signal in sensing element between the first electrode layer and the second electrode lay is stronger.Find in research process, when distance of separation is greater than the first electrode layer size, be particularly greater than the first electrode layer 1 be detected object 4 contact with each other the maximum length on surface time, the output signal impact of change on sensor of the distance of separating is little.Preferably, be detected the distance that object and the first electrode layer 1 separate and be greater than 1 μm, be more preferably 1 μm to 10cm scope, be more preferably 1mm to 2cm.

" maximum length on surface " described in the present invention, maximum length in concrete finger surperficial all directions, the such as length on rectangular long limit, or the diameter length of circular surface, for irregular surface, by specifically measuring the maximum length also can determining surface.

During the actual use of the sensor in the present embodiment, be detected the relative motion of object 4 relative to sensing element, can be accomplished in several ways, such as sensing element is fixed, the first electrode layer 1 particularly in sensing element is fixed, being detected object 4 is fixed on reciprocating parts, and reciprocating parts drive is detected object 4 and moves reciprocatingly, and realizes being detected object 4 being contacting and separating relative to the first electrode layer 1.In other embodiments can also be detected to arrange between object 4 and the first electrode layer 1 Flexible Connector realize being detected object 4 near or away from the reciprocating object of the first electrode layer 1.The technological means realizing above-mentioned purpose has a lot, the conventional components of command range in this area can be adopted, such as connect the parts such as insulated spring being detected between object 4 and the first electrode layer 1, but should be noted that the spring of use should not limit the relative motion be detected between object 4 and the first electrode layer 1.In addition, sensor of the present invention, being detected object 4 also can be free-moving object, the sole etc. that such as people walks about.

In the present embodiment, be detected the object that object 4 is the self-movement of opposing sense parts, do not need thereon to arrange electrode layer, the thickness, the size and dimension that are therefore detected object 4 are not particularly limited to.In order to improve the surface charge amount being detected and respectively carrying when object 4 contacts with the first electrode layer 1, first electrode layer 1 entirety can be block, flat board, thin slice or film, preferably, first electrode layer 1 is all suitable with the shape and size being detected the surface that object 4 contacts with each other, preferably identical, can make there is maximum contact area when being detected object 4 and the first electrode layer 2 surface contact like this, reach the object improving and be detected object 4 surface charge amount, thus improve the serviceability of sensing element.

In the present invention, according to the shape being detected object 4, can select the first electrode layer 1 and the shape being detected the surface that object 4 contacts flexibly, can be plane, also can be curved surface.Be detected the surface that object 4 and the first electrode layer 1 contact with each other and be curved surface, can realize too contacting with each other, preferably, be detected the surface that object 4 and the first electrode layer 1 contact with each other and be all plane or curved-surface structure, when to ensure that the two can occur that contact area is maximum when contacting.Preferably, being detected the surface that object 4 and the first electrode layer 1 contact with each other is the curved surface of shape complementarity, be such as the curved surface that curvature is identical, area is identical, ensureing when contacting with each other, be detected object 4 and can contact completely with the surface that the first electrode layer 2 contacts with each other.

Except the mode of operation that above-mentioned the first electrode layer being detected object and sensing element separate, sensing element be detected the mode of operation that object can also have sliding friction.The sensing course of work is see Fig. 3, contact with each other for the upper surface of the lower surface and the first electrode layer 1 that are detected object 11 and rub, for convenience of description, here the lower surface that setting is detected object 11 is all identical with size with the shape of the first electrode layer 1 upper surface, not considered critical first electrode layer 2 upper surface and the shape of lower surface and the area that are detected object 11 in practice, can identical also can not be identical.The lower surface being detected object 11 during original state can contact or not contact with the upper surface of the first electrode layer 1, under external force F effect after contact (in see Fig. 3 a figure), because the upper surface of the first electrode layer 1 exists electrode sequence difference with the material of the lower surface being detected object 11, therebetween there is to obtain the difference of electronic capability, obtain that electronic capability is strong for the lower surface being detected object 11 and the upper surface of the first electrode layer 1 more easily loses electronics, there is surface charge when the lower surface being detected object 11 contacts with the first electrode layer 1 upper surface to shift, make the upper surface of the first electrode layer 1 with positive charge, be detected the lower surface of object 11 then electronegative (as shown in a figure in Fig. 3), the electricity size of two kinds of electric charges is identical, therefore between the first electrode layer 1 and the second electrode lay 2, electric potential difference is not had, just flow of charge is not had yet.Drive at external force F(and be detected the power that object move relative to sensing element) act under be detected object 11 lower surface and the first electrode layer 1 upper surface relative sliding and make contact area change after (reduction), destroy in the first electrode layer 1 upper surface and the balance being detected object 11 lower surface electric charge, the negative charge be detected on object 11 reduces the positive charge constraint effect on the first electrode layer 1, therefore, electrons flows from the second electrode lay 2 to the first electrode layer 1, as shown in Figure 3 b, thus make the pick-up unit 3 such as reometer be connected between the first electrode layer 1 and the second electrode lay 2 have electric current to flow through.Under external force, be separated completely with the first electrode layer 1 upper surface when being detected object 11 lower surface, be detected object 11 lower surface with negative charge the repulsion of electric charge in the first electrode layer 1 is not enough to cause the flowing of electric charge between the first electrode layer 1 and the second electrode lay 2, pick-up unit 3 can't detect electric current, as shown in Figure 3c.When reciprocal external force F makes to be detected object 11 lower surface and the first electrode layer 1 upper surface generation relative sliding, and make contact area change (increase), owing to be detected on object 11 negative charge to the repulsive interaction of positive charge on the first electrode layer 1, electronics will be caused to flow from the first electrode layer 1 to the second electrode lay 2, contact device 3 between the first electrode layer 1 and the second electrode lay 2 has electric current to flow through, as shown in Figure 3d.When being detected after object 11 lower surface contacts completely with the first electrode layer 1 upper surface, be detected the positive and negative charge balance of object 11 lower surface and the first electrode layer 1 upper surface, now, electronics does not flow between the first electrode layer 1 and the second electrode lay 2, as shown in a figure in Fig. 3, the pick-up unit 3 between the first electrode layer 1 and the second electrode lay 2 does not observe current signal.Back and forth carry out according to the process of a to d in Fig. 3, between the first electrode layer 2 and the second electrode lay 3, form pulse current.If be detected object 11 only have unidirectional motion relative to the first electrode layer, as long as the area contacting with each other friction changes, the electric current that also can detect in pick-up unit 3.

First electrode layer 1 can be plane or curved surface with the surface being detected object 11 and can contacting with each other slip, preferably, first electrode layer 1 matches with the surface configuration being detected object 11 and can contacting with each other slip, can to contact with each other the surface configuration of slip suitable with size with being detected object 11 for first electrode layer 1, preferably identical, when can occur that contact area is maximum in the process of sliding over each other.Such as the first electrode layer 1 is the cambered surface that curvature is identical with the surface being detected object 11 and can contacting with each other slip.

If the first electrode layer 1 is smooth planar surface with being detected the surface that object 11 contacts with each other, such structure needs the first electrode layer 1 larger with the relative sliding space being detected object 11, and for the first electrode layer 1 and situation about being detected when surface size that object 11 contacts with each other differs larger, need larger sliding distance could meet the first electrode layer 1 and be detected object 11 contact area in friction process that slides over each other and change and produce the requirement of electric signal.Therefore, for the situation that the lower surface being detected object 11 is out-of-flatness surface, in sensor of the present invention, first electrode layer 1 can be out-of-flatness surface with being detected the surface that object 11 can contact mutually, first electrode layer 1 be detected object 11 slide over each other time, two surfaces not exclusively contact, see Fig. 4, first electrode layer 1 is the out-of-flatness surface of concaveconvex structure with being detected surface that object 11 can contact with each other, when the first electrode layer 1 be detected object 11 and under external force relative sliding occur, as long as less sliding distance just can produce larger contact area change, the pick-up unit 3 be connected between the first electrode layer 1 and the second electrode lay 2 has electric current to flow through.In the present embodiment, can be useful in and be detected the situation that among surface that object 11 can contact with each other with the first electrode layer, arbitrary surface is relatively little, contact with each other two surfaces are prepared as out-of-flatness surface, under external force the first electrode layer 1 be detected the change that just can meet friction area when surface that object 11 contacts rubs mutually in less moving range, thus can be electric energy by the mechanical energy of external force, realize the sensing to being detected object movement.

Preferably, the first electrode layer 1 and the concaveconvex structure that is detected the surface that object 11 contacts are periodically concaveconvex structure, the ribbon structure that optional periodically concaveconvex structure can have equidistant parallel to arrange, the periodic structures such as checkerboard configuration.

In the sensor of the present embodiment, can also can carry out physics or chemical modification process with being detected the surface that object 11 contacts to the first electrode layer.Physical modification is specifically as follows the microstructure making part or all of surface distributed have micron or secondary micron dimension, with the contact area increasing by the first electrode layer 1 and be detected between object 11, thus increase be detected body surface with the quantity of electric charge.Described microstructure is preferably nano wire, nanotube, nano particle, nanometer rods, nano flower, nanometer channel, micron trenches, nanocone, micron cone, nanosphere and micron chondritic, and the array to be formed by one or more structures aforementioned, particularly by nano wire, nanotube, the nano-array of nanocone or nanometer rods composition, can be pass through photoengraving, wire prepared by the methods such as plasma etching, cube, or the array of rectangular pyramid shape, in array the size of each this unit in nanometer to micron dimension, the unit size of concrete micro nano structure, shape should not limit the scope of this invention.Also can by nano material intersperse or the mode of coating realizes this object.Chemical modification can also be carried out to the surface of the first electrode layer, the transfer amount of electric charge at Contact can be improved further, thus improve the output power of contact electric density and sensor.Chemical modification is divided into again the following two kinds type:

Method is for the first electrode layer 1 contacted with each other and is detected object 11 material, according to the polarity of two materials, if the polarity of the first electrode layer 1 material is just, introduces easier betatopic functional group (namely strong to electron cloud) at material surface; Or, if the polarity of the first electrode layer 1 material is negative, introducing the functional group (strong electrophilic group) of the electronics that is more easy to get at material surface, the transfer amount of electric charge when contacting with each other or slide can both being improved further, thus raising is detected body surface with electric density and sensing sensitivity.Comprise to electron cloud by force: amino, hydroxyl, alkoxy etc.; Strong electrophilic group comprises: acyl group, carboxyl, nitro, sulfonic group etc.The introducing of functional group can the conventional method such as using plasma surface modification.The combination gas of oxygen and nitrogen such as can be made under certain power to produce plasma, thus introduce at material surface amino.

Another method is that positive material surface introduces positive charge in polarity, and be that negative material surface introduces negative charge in polarity.Specifically can be realized by the mode of chemical bonding.Such as, the method for sol-gel (English is abbreviated as sol-gel) can be utilized on PDMS surface to modify upper ethyl orthosilicate (English is abbreviated as TEOS), and make it electronegative.Also the bond of gold-sulphur can be utilized on metallic gold thin layer to modify the golden nanometer particle of upper surface containing cetyl trimethyl ammonium bromide (CTAB), because cetyl trimethyl ammonium bromide is kation, therefore whole material can be made to become positively charged.Those skilled in the art can according to the kind of the receiving and losing electrons character of selected materials and surface chemistry key, and select suitable decorative material bonded thereto, to reach object of the present invention, therefore such distortion is all within protection scope of the present invention.

The sensor of the present embodiment, except being detected mode of operation that object can separate with sensing element or slide over each other, can also when being detected object self with electric charge, be detected object to move relative to the first electrode layer 1 with sensing element, but in motion process, be detected object do not contact with any one electrode layer of sensing element, as shown by the arrows in Figure 5, setting is detected object 42 in advance with negative charge, particularly be detected the surface of object 42 towards the first electrode layer 1 with negative charge, when being detected object 42 near the first electrode layer 1, owing to being detected the electrostatic induction between object 42 and the first electrode layer 1, be detected object 42 with negative charge have repulsive interaction to the negative charge in the first electrode layer 1, therefore, flow of charge is formed between first electrode layer 1 and the second electrode lay 2 of sensing element, the pick-up unit 3 be connected between the first electrode layer 1 and the second electrode lay 2 can detect that the electric current that the second electrode lay 2 flows to the first electrode layer 1 is schemed see a in Fig. 5.When being detected object 42 away from the first electrode layer, be detected object 42 with negative charge have repulsive interaction to weaken to the negative charge in the first electrode layer 1, reverse flow of charge is formed between first electrode layer 1 and the second electrode lay 2 of sensing element, the pick-up unit 3 be connected between the first electrode layer and the second electrode lay can detect that the first electrode layer 1 flows to the electric current of the second electrode lay 2, schemes b see in Fig. 5.Be detected object 42 in the sensing course of work shown in Fig. 5 to move relative to the first electrode layer in the vertical direction, its principle of work is also applicable to the situation of the distance constant (being namely detected object 42 to move along the direction being parallel to the first electrode layer) be detected between object 42 surface relative with the first electrode layer 1.In addition, in this this mode of operation, sensing element can also can without electric charge with electric charge, even if two of sensing element electrode layers self are namely with electric charge, be detected object 42 when moving relative to the first electrode layer, be detected object 42 surface with the electromotive force that produces on the first electrode layer of electric charge also can change, thus cause the flow of charge between the first electrode layer and the second electrode lay.

Be detected object 42 with electric charge can by with sensing element beyond other objects rub and obtain, also can obtain by rubbing with sensing element before work, can also be obtained by other modes such as chargings, the access approaches of electric charge does not affect for sensing process of the present invention, does not also form the restriction to sensor of the present invention.

For the mode of motion that the distance be detected between object 42 surface relative with the first electrode layer 1 changes, first electrode layer 1 and the minor increment scope be detected between object 42 be 0.01 times to the first electrode layer 1 towards the maximum length on surface being detected object 42, ultimate range scope be 10 times to the first electrode layer 1 towards the maximum length on surface being detected object 42.

For the mode of motion that the distance be detected between object 42 surface relative with the first electrode layer 2 is constant, the distance range be detected between object 42 and the first electrode layer 1 is that 0.1-10 is doubly to the first electrode layer 1 towards the maximum length on surface being detected object 42.In the present embodiment, the shape and size being preferably detected object 42 surface relative with the first electrode layer are suitable, be more preferably identical, to ensure the movement being detected object 42, under electrostatic induction effect, its electric charge being detected object 42 can be made to cause flow of charge between the first electrode layer 1 and the second electrode lay 2.

The actual sensor based on electrostatic induction, being detected the movement of object relative to the first electrode layer, can be the combination of above-mentioned three kinds of relative movements, does not limit to be detected object and can only to have a kind of single mode of motion relative to the first electrode layer.

Embodiment two:

In sensor, can also frictional layer be comprised, the first electrode layer of sensing element is fitted in the lower surface of frictional layer, make the first electrode layer directly be detected object or other object contacts, the sensing element of sensor can be protected.The frictional layer of sensor can with electric charge or neutral, because the relative position of frictional layer and the first electrode layer is constant, so, with electric charge be detected object move relative to the first electrode layer time, frictional layer can not move impact to the electric charge in sensing element between the first electrode layer and the second electrode lay.

In the present embodiment, the typical structure of sensor is see Fig. 6, the sensing element that sensor comprises is electrically connected by the first electrode layer 1 and the second electrode lay 2 and is formed, frictional layer 5 is arranged on the upper surface of the first electrode layer 1, in use, the upper surface of frictional layer 5 is towards being detected object 43, and wherein, sensing element can be identical with embodiment one.Be detected object 43 and can come in contact with the upper surface of frictional layer 5 relative motion be separated, the distance being detected object 43 and the first electrode layer is changed; Be detected object 43 also can with the upper surface generation sliding friction of frictional layer, and contact area is changed; Be detected object 43 also can self with electric charge, relative in the first electrode layer motion process, do not contact with frictional layer all the time.

Can come in contact with the upper surface of frictional layer the motor pattern be separated to be detected object below, introduce the principle of work comprising the sensor of frictional layer.The upper surface setting the lower surface and frictional layer 5 being detected object 43 is different materials, and the material of the two exists electrode sequence difference.The sensor operating principles of the present embodiment is introduced below in detail for the structure of Fig. 6, be detected object 43 during original state not contact with frictional layer 5 (scheming see a in Fig. 6), because the upper surface of frictional layer 5 exists electrode sequence difference with the material of the lower surface being detected object 43, therebetween there is to obtain the difference of electronic capability, obtain that electronic capability is strong for the upper surface of frictional layer 5 and lower surface that is that be detected object 43 more easily loses electronics, there is surface charge when the lower surface being detected object 43 contacts with the upper surface of frictional layer 5 to shift, make the upper surface of frictional layer 5 with negative charge, be detected the lower surface of object 43 then positively charged (as shown in b figure in Fig. 6), the electricity size of two kinds of electric charges is identical, therefore between the first electrode layer 1 and the second electrode lay 2, electric potential difference is not had, just flow of charge is not had yet.Be detected object 43 to be under external force separated with frictional layer 5 upper surface (as c in Fig. 6 schemes shown), the entirety be now made up of frictional layer 5 and the first electrode layer 1 has clean surplus negative charge, be detected object 43 lower surface and there is positive charge, along with being detected object 43 with frictional layer 5 apart from increase, the negative charge being detected object 43 upper surface increases gradually to the Coulomb repulsion of negative charge in the first electrode layer 1, thus make the electronics in the first electrode layer 1 flow to the second electrode lay 2 by external circuit, therefore electric current is had to flow through in the pick-up unit 3 connected between the first electrode layer 1 and the second electrode lay 2.When being detected the distance between object 43 and frictional layer 5 upper surface and getting back to initial position, the spacing be detected between object 43 and frictional layer 5 upper surface reaches maximum, frictional layer 5, first electrode layer 1 and the second electrode lay 2 with total negative charge reach balance with the positive charge being detected object 43 lower surface, between the first electrode layer 1 and the second electrode lay 2, do not have electric current to produce (in as Fig. 6 shown in d figure).When being detected object 43 once again near frictional layer 5, owing to being detected the pitch smaller between object 43 and frictional layer 5 upper surface, the positive charge being detected object 43 lower surface strengthens the electrostatic repulsion of positive charge in the first electrode layer 1, cause electronics to flow into the first electrode layer 1 by external circuit by the second electrode lay 2, thus produce the momentary current (as Fig. 6 in e scheme shown in) contrary with first time direction at external circuit.When external force continues to make to be detected after object 43 comes in contact with frictional layer 5 upper surface, just repeat again the process in b-e figure above.Be detected object 43 to be repeatedly contacting and separating with frictional layer 5, between the first electrode layer 1 and the second electrode lay 2, form alternating pulsing current.

As can be seen from the principle of work of the sensor shown in Fig. 6, although frictional layer 5 be detected object 43 and carry out contacting and after being separated, its surface is with negative charge, and these negative charges can retain or retain the long period always, and be detected object 43 opposite first pole layer 1 away from near time, frictional layer 5 surface with electric charge can't affect flow of charge between the first electrode layer 1 and the second electrode lay 2.

Same principle, for be detected object can with the upper surface generation sliding friction of frictional layer, and the situation that contact area is changed, the existence of frictional layer also can not affect the work of sensor.In this case, preferably, the upper surface of frictional layer is suitable, preferably identical with the underside shape and size being detected object.Frictional layer can be all smooth planar surface with being detected the surface that object slides over each other, and certainly, be prepared into the situation of concaveconvex structure in Fig. 4 relative to the upper surface of the first electrode layer, accordingly, the upper surface of frictional layer is also prepared into the surface of concaveconvex structure accordingly.

For the situation being detected object and not contacting with electrode layer in sensing element, also can make to be detected object in the present embodiment not contact with frictional layer, also do not contact with sensing element (i.e. the first electrode layer or the second electrode lay) simultaneously, because the relative position of frictional layer and the first electrode layer is fixed, therefore the electric charge that the existence of frictional layer can not affect in sensing element between the first electrode layer and the second electrode lay moves, as long as the object that is detected controlled with electric charge does not contact with frictional layer.

To contact with each other with frictional layer be separated for being detected object, or situation about sliding over each other, by selecting suitable frictional layer material, be detected object except the insulating material mentioned in embodiment one and semiconductor material, also can be conductive material, such as metal or indium tin oxide ITO, conventional metal comprises gold, silver, platinum, aluminium, nickel, copper, titanium, chromium or selenium, and the alloy formed by above-mentioned metal.As long as the material meeting two of being detected that object and frictional layer can contact mutually surperficial exists the electrode sequence difference that rubs, can form electric charge when the two contacts with each other on surface, time disconnected from each other, electric charge is still retained in the surface of material.Equally, the upper surface of frictional layer also through physics or chemical modification, can produce more electric charge on the surface being detected object when enabling frictional layer and be detected object contact.

For being detected object self with electric charge, relative in the first electrode layer motion process, situation about not contacting with frictional layer all the time, due to frictional layer 5 not with the first electrode layer relative motion, therefore, no matter whether frictional layer surface is with electric charge, all can not affect the flowing of electric charge in the first electrode layer and the second electrode lay in sensing element.And be detected object self with electric charge, can by with sensor beyond other objects rub and obtain, also can obtain by rubbing with the frictional layer of sensor itself before work, can also be obtained by other modes such as chargings.

The material of frictional layer can be non-conducting material, and preferred insulative material can be detected in the alternate material of object and select from embodiment one.The existence of frictional layer can form good protective effect for the first electrode layer 1, and therefore its surface size and shape preferably cover the first electrode layer 1 at least completely.Preferably, frictional layer also can cover the second electrode lay 2.But because frictional layer can increase the vertical distance of separation be detected between object and sensing element, its thickness should be not blocked up yet, is preferably flake or film-form, is typically chosen between 10nm to 5cm, preferred 100nm to 500 μm of m, more preferably 1 μm to 500 μm.

Because the first electrode layer 1 is the electrode layer of sensor, the technology such as existing magnetron sputtering, evaporation and printing are preferably adopted to prepare the first electrode layer at the lower surface of frictional layer.Certainly, also can adopt the first thicker electrode layer 1, such as Cu or Al paper tinsel, prepares the material of frictional layer 5 on its surface, realizes the first electrode layer 1 and arranges with the contact of frictional layer 5.

Frictional layer can be separate structure, and the part be such as separated by 2 forms, and one of them part is covered in the surface of the first electrode layer 1, and another part is covered in the surface of the second electrode lay 2.The structure that frictional layer is concrete and shape can be arranged according to the needs of the first electrode layer in sensing element, protect the first electrode layer not to be worn when not affecting working sensor.

In all embodiments of the present invention, sensing element and frictional layer can be all hard material or flexible material.Because the hardness of material does not affect sliding friction therebetween or contact friction effect, as needed the surface of the first electrode layer or frictional layer to maintain plane, can also be realized by the support of miscellaneous part.

Embodiment three:

The sensor that the embodiment of the present invention one and embodiment two provide, separation layer can also be comprised, for isolating the first electrode layer and the second electrode lay of sensing element, making the two keep apart and keeping the relative position of setting, and sensing element and other device isolation and isolation can be made.

See Fig. 7, the first electrode layer 1 of sensing element and the second electrode lay 2 are all embedded in separation layer 6, the first electrode layer 1 and the second electrode lay 2 are separated arrange and relative position is fixed, and the upper surface of at least the first electrode layer 1 exposes separation layer 6.The upper surface of the second electrode lay 2 can expose or not expose separation layer 6.First electrode layer 1 can be electrically connected by wire or conductive film with the second electrode lay 2.

In other embodiments, the first electrode layer 1 and/or the second electrode lay 2 also can all wrap by separation layer, and see Fig. 8, all surface of the first electrode layer 1 and the second electrode lay 2 is all isolated layer 61 and covers.The sensing element of this spline structure, the separation layer 61 covered on the first electrode layer 1 upper surface act as the effect of the frictional layer in embodiment two simultaneously.First electrode layer 1 can be electrically connected by wire or conductive film with the second electrode lay 2.

In other embodiments, two electrode layers of separation layer and sensing element can be arranged according to overlapped way, see Fig. 9, first electrode layer 1 of sensing element and the second electrode lay 2 are separately positioned on the upper and lower surface of separation layer 62, form the sandwich construction shown in Fig. 9, the first electrode layer 1 can be electrically connected by wire or conductive film with the second electrode lay 2.In the present embodiment, preferably, the first electrode layer 1, the second electrode lay 2 and separation layer 62 are laminate structure, contribute to reducing sensing element one-piece construction, can by device miniaturization.Described sandwich construction can also arrange frictional layer 5 at the upper surface of the first electrode layer 1, rubs, make to be detected object 4 surface with electric charge for the protection of separateing with being detected object 4 or sliding over each other while the first electrode layer.In addition, described sandwich construction can also comprise protective seam 7, is arranged on the lower surface of the second electrode lay, for the protection of the second electrode lay.The sandwich construction of this stratiform can be made by conventional semiconductor device fabrication processes.

In sandwich construction shown in Fig. 9, the first electrode layer 1 and the second electrode lay 2 are conductive film, and the range of choices of film thickness is 10nm-5mm, are preferably 100nm-500 μm.First electrode layer 1 and the second electrode lay 2 are preferably metal film layer, and the technology such as existing magnetron sputtering, evaporation and printing can be adopted to be produced on the upper and lower surface of separation layer 62.First electrode layer 1 larger for Thickness Ratio and the second electrode lay 2, can adopt the modes such as stickup to be arranged on the upper and lower surface of separation layer 62.

The material of separation layer and protective seam is preferably insulating material or semiconductor material; separation layer and protective seam do not participate in the course of work of sensor in the present invention; so the range of choice of material is wider; existing insulating material or semiconductor material all can be chosen; such as organism insulating material PDMS, rubber or glass plate etc., concrete material also can from embodiment a kind of enumerate be detected the insulating material or semiconductor that object can adopt and choose.

Separation layer and protective seam can be hard material also can be flexible structure.First electrode layer 1, the second electrode lay 2, separation layer 6, frictional layer 5 and protective seam 7 are to the sensor of flexible structure, make sensor become a flexible device, can be combined with other flexible devices.The sensor adopting flexible material to make it is advantageous that soft frivolous friction surface is subject to slight External Force Acting and deformation will occurs, and this deformation can cause the relative displacement of two friction material layers (being detected object and the first electrode layer 1 or frictional layer 5), thus export electric signal by sliding friction and electrostatic induction to pick-up unit.The use of flexible material makes sensor of the present invention can be widely used in biological and medical field.In the process used can also with have ultra-thin, soft, there is elasticity and/or transparent macromolecular material does substrate, carry out encapsulating with easy to use and improve intensity.Obviously, all structures disclosed by the invention can have flexible material make with corresponding ultra-softs, thus form flexible sensor.

In the present invention, first electrode layer 1 and the second electrode lay 2 need electrical connection, could between the first electrode layer 1 and the second electrode lay 2 generation current, first electrode layer 1 can be directly electrically connected with the second electrode lay 2 by pick-up unit, described pick-up unit can be reometer, or miniaturized electronic devices is as LED bulb etc., also can be more complicated circuit (series-parallel circuit as multiple electronic component), here be not particularly limited to, as long as the first electrode layer 1 and the second electrode lay 2 can be carried out being electrically connected.

Embodiment four:

Accordingly, the present invention also provides a kind of method for sensing, applies any one above-mentioned sensor, comprises step:

Be detected object to move relative to the first electrode layer 1, make to be detected object with the electromotive force of electric charge on the first electrode layer 1 change;

Between the first electrode layer 1 and the second electrode lay 2, produce flow of charge form electric current.

Be detected object to move relative to the first electrode layer 1, be separated after can coming in contact with the surface of the first electrode layer 1 for being detected object, make to be detected object with electric charge.Be detected object and the first electrode layer 1 mutually away from or approach process in, make to be detected object with the electromotive force of electric charge on the first electrode layer 1 change, the electrostatic induction be detected between object and the first electrode layer 1 makes to be connected on the pick-up unit between the first electrode layer 1 and the second electrode lay 2 has electric current to flow through.

Be detected object to move relative to the first electrode layer 1, also can slide over each other for the surface being detected object and the first electrode layer 1 and rub, and in sliding process, make contact area change, be detected body surface with electric charge.Be detected object and the first electrode layer 1 slides over each other in process, make to be detected object with the electromotive force of electric charge on the first electrode layer 1 change, the electrostatic induction be detected between object and the first electrode layer 1 makes to be connected on the pick-up unit between the first electrode layer 1 and the second electrode lay 2 has electric current to flow through.

Be detected object to move relative to the first electrode layer 1, also can move relative to the first electrode layer 1 for being detected object, and not contact with the first electrode layer 1 all the time, be detected object self with electric charge.Be detected object relative in the first electrode layer 1 moving process, be detected object with the electromotive force of electric charge on the first electrode layer 1 change, the electrostatic induction be detected between object and the first electrode layer 1 makes to be connected on the pick-up unit between the first electrode layer 1 and the second electrode lay 2 has electric current to flow through.Be detected object with electric charge can for be separated after contacting with each other with the first electrode layer institute with, also can be by other means with.

Wherein, the materials and structures of described first electrode layer and the second electrode lay can adopt the materials and structures of each several part in the aforementioned sensor mentioned of the present invention, here not in repetition.

Embodiment five:

Cut the polymethylmethacrylate thin plate of a long 10cm × wide 10cm × thick 1mm as substrate (separation layer); At a depositing copper film of polyimide thin plate as the first electrode layer, an other depositing copper film is as the second electrode lay; Link copper film with copper conductor and access voltage table; The polytetrafluoroethylene film of the long 10cm of one deck × wide 10cm × thick 75 μm is bonded as frictional layer in the first electrode layer surface; At the nylon film of the second electrode lay surface adhesive one deck long 10cm × wide 10cm × thick 50 μm as protective seam; Polytetrafluoroethylene film is positioned over ground upward, after periodically contacting with sole and its separately, the voltage table be connected between two copper films has the electric signal of respective change to export, see Figure 10, voltage table records the maximal value moon non-650V of the voltage signal between two copper films, illustrate that sensor can carry out sensing to the object sole of movement, utilize the changes mechanical energy of external force to carry out object mobile sensor for electric energy, do not need for sensor provides extra power supply.

The above is only preferred embodiment of the present invention, not does any pro forma restriction to the present invention.Any those of ordinary skill in the art, do not departing under technical solution of the present invention ambit, the Method and Technology content of above-mentioned announcement all can be utilized to make many possible variations and modification to technical solution of the present invention, or be revised as the Equivalent embodiments of equivalent variations.Therefore, every content not departing from technical solution of the present invention, according to technical spirit of the present invention to any simple modification made for any of the above embodiments, equivalent variations and modification, all still belongs in the scope of technical solution of the present invention protection.

Claims

1. based on a sensor for electrostatic induction, it is characterized in that, comprise the sensing element for carrying out sensing to the movement being detected object,

2. sensor according to claim 1, is characterized in that, described in be detected object by be separated after contacting with described first electrode layer or the friction that slides over each other makes contact area change and with electric charge.

3. sensor according to claim 2, is characterized in that, described first electrode layer can be suitable with the shape and size being detected the surface that object contacts with each other.

4. sensor according to claim 3, is characterized in that, the first electrode layer of described sensing element is smooth planar surface with being detected the surface that object slides over each other, or be that the out-of-flatness of concaveconvex structure is surperficial.

5. sensor according to claim 4, is characterized in that, the concaveconvex structure of described first electrode layer surface is periodicity concaveconvex structure.

6. the sensor according to any one of claim 2-4, is characterized in that, described first electrode layer can have the microstructure of micron or secondary micron dimension with the some or all of surface distributed on the surface being detected object contact; Or, described first electrode layer can be detected the surface of object contact through chemical modification process.

7. sensor according to claim 1, is characterized in that, also comprises frictional layer, and the first electrode layer of described sensing element is fitted in the lower surface of described frictional layer;

8. sensor according to claim 7, is characterized in that, the material of described frictional layer is insulating material or semiconductor; The thickness range of described frictional layer is between 10nm to 5mm.

9. the sensor according to claim 7 or 8, is characterized in that, described frictional layer is suitable with the described shape and size being detected the surface that object can contact with each other.

10. the sensor according to any one of claim 7-9, is characterized in that, described frictional layer is smooth planar surface with being detected the surface that object slides over each other, or be that the out-of-flatness of concaveconvex structure is surperficial.

11. sensors according to claim 12, is characterized in that, described frictional layer can have the microstructure of micron or secondary micron dimension with the some or all of surface distributed on the surface being detected object contact; Or, described frictional layer can be detected the surface of object contact through chemical modification process.。

12. sensors according to claim 1 or 7, is characterized in that, described in be detected object and do not contact with described sensing element, described in be detected object be charged object.

13. sensors according to any one of claim 1-12, is characterized in that, also comprise separation layer, and described separation layer, for isolating the first electrode layer and the second electrode lay of described sensing element, makes the two keep apart and keeps the relative position of setting.

14. sensors according to claim 13, is characterized in that, the material of described separation layer is insulating material.

15. sensors according to claim 13 or 14, it is characterized in that, the first electrode layer of described sensing element and the second electrode lay are all embedded in described separation layer, and the upper surface of at least the first electrode layer exposes described separation layer;

Sensor described in 16. according to Claim 8 or 14, is characterized in that, described insulating material can be one or more in llowing group of materials: teflon, dimethyl silicone polymer, polyimide, poly-diphenyl propane carbonic ester, polyethylene terephthalate, aniline formaldehyde resin, polyoxymethylene, ethyl cellulose, polyamide, melamino-formaldehyde, polyglycol succinate, cellulose, cellulose ethanoate, polyethylene glycol adipate, polydiallyl phthalate, regenerated fibre sponge, polyurethane elastomer, styrene-acrylonitrile copolymer multipolymer, styrene-butadiene-copolymer, regenerated fiber, polymethacrylate, polyvinyl alcohol (PVA), polyester, polyisobutylene, polyurethane flexible sponge, polyethylene terephthalate, polyvinyl butyral, phenolics, neoprene, butadiene-propylene copolymer, natural rubber, polyacrylonitrile, poly-(vinylidene chloride-co-vinyl cyanide), tygon third diphenol carbonate, polystyrene, polymethylmethacrylate, polycarbonate, polymeric liquid crystal copolymer, polychlorobutadiene, polyacrylonitrile, poly-biphenol carbonic ester, CPPG, polychlorotrifluoroethylene, polyvinylidene chloride, tygon, polypropylene, Polyvinylchloride, Parylene, wool and fabric thereof, silk and fabric thereof, paper, cotton and fabric thereof, polyurethane elastomer, wood, rubberite and acetate.

17. sensors according to claim 8, it is characterized in that, described semiconductor material is one or more in llowing group of materials: silicon, germanium, the IIIth and the Vth compounds of group, the IIth and the VIth compounds of group and the solid solution be made up of III-V compounds of group and II-VI compounds of group, amorphous glass semiconductor, organic semiconductor, and non-conductive oxide, conductor oxidate and complex oxide semiconductor.

18. sensors according to any one of claim 1-17, is characterized in that, the material of described first electrode layer and the second electrode lay is metal or indium tin oxide ITO, FTO or conducting polymer composite.

19. sensors according to any one of claim 1-6, it is characterized in that, described first electrode layer and/or the second electrode lay are flexible material.

20. sensors according to any one of claim 7-12, it is characterized in that, described first electrode layer, the second electrode lay and/or frictional layer are flexible material.

21. sensors according to any one of claim 13-15, it is characterized in that, described separation layer is flexible material.

22. 1 kinds, based on the method for sensing of electrostatic induction, is characterized in that, application rights requires the sensor described in any one of 1-21, comprises step:

23. method for sensing according to claim 22, is characterized in that,

The described object that is detected moves relative to the first electrode layer, is specially to be detected after object comes in contact with the surface of the first electrode layer to be separated, and makes to be detected object with electric charge;