CN105091913B - Sensor and method for sensing based on electrostatic induction - Google Patents

Sensor and method for sensing based on electrostatic induction Download PDF

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CN105091913B
CN105091913B CN201410158431.0A CN201410158431A CN105091913B CN 105091913 B CN105091913 B CN 105091913B CN 201410158431 A CN201410158431 A CN 201410158431A CN 105091913 B CN105091913 B CN 105091913B
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electrode layer
detected object
layer
electrode
sensor
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CN105091913A (en
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朱光
王中林
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Beijing Institute of Nanoenergy and Nanosystems
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Beijing Institute of Nanoenergy and Nanosystems
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Priority to CN201410158431.0A priority Critical patent/CN105091913B/en
Priority to JP2017505698A priority patent/JP6581181B2/en
Priority to PCT/CN2015/076872 priority patent/WO2015158302A1/en
Priority to EP15779244.1A priority patent/EP3133375B1/en
Priority to KR1020167032262A priority patent/KR101939607B1/en
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Abstract

The present invention provides a kind of sensor and method for sensing based on electrostatic induction, the sensor includes sensing element, wherein, the sensing element is made up of a first electrode layer and matched the second electrode lay, and the first electrode layer and the second electrode lay separate setting and be electrically connected to each other.Moved when being detected first electrode layer of the object relative to the sensing element, change potential of the electric charge of sensing element institute band in the first electrode layer, electric charge flows between first electrode layer and the second electrode lay under electrostatic induction effect forms electric current.Sensor of the invention, it is simple in construction, the movement of the detected object of various materials can be sensed without providing external power supply.

Description

Sensor and method for sensing based on electrostatic induction
Technical field
The present invention relates to a kind of sensor, more particularly to the sensing detected using movement of the electrostatic induction to object Device and method for sensing.
Background technology
It is a large amount of new micro- with multiple functions and Highgrade integration in today of microelectronics and material technology high speed development Type electronic device is continuously developed out, and shows unprecedented application prospect in the every field of people's daily life. Although there are a variety of methods, such as the method for sensing such as laser sensing, existing biography for the sensing of powered or not charged object movement Sensing method is required to provide the power supply of matching for microsensor, to drive working sensor.It is, in general, that these micro sensings The power supply of device is all directly or indirectly to come from battery, and not only volume is larger for battery, heavier mass, and having of containing is poisoned Material exists potentially hazardous to environment and human body.These by probe power are limited, the application of corresponding method for sensing Scope is narrower, it is impossible to is useful under conditions of bad environments, it is also difficult to long-term to work independently；And the work for occurring at random Make demand, it is also desirable to switch on power for a long time for sensor, be unsatisfactory for saving the requirement of the energy.
The content of the invention
The present invention provides a kind of sensor simple in construction based on electrostatic induction, without setting power supply, utilizes electrostatic sense Principle is answered, the movement of sense object that can be autonomous.
To achieve the above object, the present invention provides a kind of sensor based on electrostatic induction, including for being detected thing The sensing element that the movement of body is sensed,
The sensing element is made up of a first electrode layer and matched the second electrode lay, first electricity Pole layer and the second electrode lay, which separate, to be set and is electrically connected to each other；
When the detected object relative to the sensing element first electrode layer move, make the detected object institute band Potential of the electric charge in the first electrode layer change, electric charge is in first electrode layer and second electrode under electrostatic induction effect Flowing forms electric current between layer；
Wherein, the detected object carries electric charge in advance, or, by with sensor contacts and separating and making described visited Survey object and carry electric charge.
Preferably, the detected object is made by the friction that separates or slide over each other after being contacted with the first electrode layer Contact area changes and carries electric charge.
Preferably, the first electrode layer can be suitable with the shape and size on the surface that detected object contacts with each other.
Preferably, the surface that the first electrode layer of the sensing element slides over each other with detected object is smooth table Face, or the out-of-flatness surface for concaveconvex structure.
Preferably, the concaveconvex structure of the first electrode layer surface is periodicity concaveconvex structure.
Preferably, some or all of surface distributed on the surface that the first electrode layer can contact with detected object There is the micro-structural of micron or secondary micron dimension；Or the surface that the first electrode layer can contact with detected object is passed through Chemical modification processing.
Preferably, in addition to frictional layer, the first electrode layer of the sensing element are fitted in the lower surface of the frictional layer；
Wherein, the detected object carries electric charge in advance, or, by being separated after being contacted with the frictional layer or mutually Phase sliding friction makes contact area change and carries electric charge.
Preferably, the material of the frictional layer is insulating materials or semiconductor；The thickness range of the frictional layer exists Between 10nm to 5mm.
Preferably, the frictional layer is suitable with the shape and size on the surface that the detected object can contact with each other.
Preferably, the surface that the frictional layer slides over each other with detected object is smooth planar surface, or is bumps The out-of-flatness surface of structure.
Preferably, some or all of surface distributed on the surface that the frictional layer can contact with detected object has The micro-structural of micron or secondary micron dimension；Or the surface that the frictional layer can contact with detected object changes by chemistry Property processing..
Preferably, the detected object does not contact with the sensing element, and the detected object is charged object.
Preferably, in addition to separation layer, the separation layer is used for the first electrode layer for isolating the sensing element and the Two electrode layers, keep apart the two and keep the relative position of setting.
Preferably, the material of the separation layer is insulating material.
Preferably, the first electrode layer of the sensing element and the second electrode lay are embedded in the separation layer, at least Expose the separation layer in the upper surface of first electrode layer；
Or the separation layer all wraps the first electrode layer and/or the second electrode lay；
Or two electrode layers of the separation layer and the sensing element are set according to overlapped way, sensing element First electrode layer and the second electrode lay are separately positioned on the upper and lower surface of separation layer.
Preferably, the insulating materials can be the one or more in llowing group of materials：Polytetrafluoroethylene (PTFE), poly dimethyl silicon Oxygen alkane, polyimides, poly- diphenyl propane carbonic ester, polyethylene terephthalate, aniline-formaldehyde resin, polyformaldehyde, second Base cellulose, polyamide, melamino-formaldehyde, polyethylene glycol succinate, cellulose, cellulose ethanoate, polyadipate second Diol ester, polydiallyl phthalate, regenerated fiber sponge, polyurethane elastomer, styrene-acrylonitrile copolymer copolymer, styrene It is butadiene copolymer, staple fibre, polymethacrylates, polyvinyl alcohol, polyester, polyisobutene, polyurethane flexible sponge, poly- Ethylene glycol terephthalate, polyvinyl butyral resin, phenolic resin, neoprene, butadiene-propylene copolymer, natural rubber Glue, polyacrylonitrile, poly- (vinylidene chloride-co- acrylonitrile), polyethylene the third diphenol carbonate, polystyrene, poly-methyl methacrylate Ester, makrolon, polymeric liquid crystal copolymer, polychlorobutadiene, polyacrylonitrile, poly bis phenol carbonate, CPPG, poly- trifluoro Vinyl chloride, polyvinylidene chloride, polyethylene, polypropylene, polyvinyl chloride, Parylene, wool and its fabric, silk and its fabric, Paper, cotton and its fabric, polyurethane elastomer, wood, hard rubber and acetate.
Preferably, the semi-conducting material is the one or more in llowing group of materials：Silicon, germanium, the IIIth and the Vth race's chemical combination The compounds of group of thing, the IIth and the VIth and the solid solution being made up of III-V compounds of group and II-VI compounds of group, amorphous state Glass semiconductor, organic semiconductor, and non-conductive oxide, conductor oxidate and complex oxide semiconductor.
Preferably, the material of the first electrode layer and the second electrode lay is metal or indium tin oxide ITO, FTO or led Electric high polymer material.
Preferably, the first electrode layer and/or the second electrode lay are flexible material.
Preferably, the first electrode layer, the second electrode lay and/or frictional layer are flexible material.
Preferably, the separation layer is flexible material.
Accordingly, the present invention also provides a kind of method for sensing based on electrostatic induction, using the biography described in any of the above-described Sensor, including step：
The detected object moves relative to first electrode layer, makes the electric charge of detected object institute band in first electrode layer On potential change；Electric charge is produced between the first electrode layer and the second electrode lay to flow to form electric current.
Preferably, the detected object moves relative to first electrode layer, specially detected object and first electrode The surface of layer separates after being in contact, and detected object is carried electric charge；
Or the detected object moves relative to first electrode layer, specially detected object and first electrode layer Surface slide over each other friction, and contact area is changed in sliding process, make what detected body surface carried Electric charge；
Or the detected object moves relative to first electrode layer, specially detected object is relative to the first electricity Pole layer movement, and do not contacted all the time with first electrode layer, the detected object itself carries electric charge.
Compared with prior art, the present invention has following beneficial effect：
1st, in sensor provided by the invention, the first electrode layer of detected object and sensing element or it is attached to first The surface of frictional layer on electrode layer contacts with each other friction either sliding friction, detected body surface is carried electric charge, so Two kinds of relative motion moulds of contact separation or sliding friction in detected object relative to first electrode layer either frictional layer afterwards Under formula so that potential of the electric charge that detected object carries in first electrode layer changes, and causes two of sensing element There is electric charge flowing between electrode layer, form electric current.Or detected object is per se with electric charge, it is not necessary to in sensing element Any part is contacted and changed with the relative position of first electrode layer, can also be caused to sense under electrostatic induction effect There is electric charge flowing between two electrode layers of part, form electric current.Therefore, detected object relative to first electrode layer or When frictional layer moves, two electrode layers of sensing element need not follow detected motion, the distance between two electrode layers or The conditions such as convenience or working environment that relative position can connect according to external circuit are easily set, biography of the invention Sensor use range is extensive, overcomes the shortcomings that needing to provide external power supply for sensor in the prior art, especially for not side Just the situation of battery is often changed, sensor of the invention can prolonged steady operation.
2nd, it can be semiconductor, insulator to be detected object, or even conductor, and only object to be probed contacts with sensing element Surface, such as first electrode layer or frictional layer, the receiving and losing electrons capacity variance of material surface be present, detected object with Separation or during relative sliding friction after sensing element contact, sensor can sense to the movement for being detected object.It is right The detected object of electric charge, potential of the electric charge that only object to be probed carries to sensing element first electrode layer are carried in itself Change, sensor can moves to it to be sensed.Therefore, sensor provided by the invention has a wide range of application, can To adapt to the detected object of different materials.
3rd, frictional layer is set in the first electrode layer of sensor, in sensing process first electrode layer not with detected thing Body is directly contacted and slided over each other, and avoids the abrasion of electrode layer in sensing element, and the use for greatly improving sensor is resistance to Long property.
4th, separation layer can be included in the sensor, two electrode layers of lamelliform are separately positioned on the upper and lower of separation layer Surface, this sandwich construction can not only make the structure of sensor compacter, and may be easy to being integrated with other devices.
Brief description of the drawings
By the way that shown in accompanying drawing, above and other purpose of the invention, feature and advantage will become apparent from.In whole accompanying drawings Identical reference instruction identical part.Deliberately accompanying drawing is not drawn by actual size equal proportion scaling, it is preferred that emphasis is show Go out the purport of the present invention.In addition, though the application provides the demonstration of the parameter comprising particular value, but parameter is without being definitely equal to phase The value answered, but be similar to be worth accordingly in acceptable error margin or design constraint.In addition, mentioned in all embodiments Direction term, such as " on ", " under ", "front", "rear", "left", "right" etc., be only refer to the attached drawing direction.Therefore, use Direction term is intended to be illustrative and not intended to limit the present invention.
Fig. 1 is the typical structure schematic diagram of the sensor embodiment one based on electrostatic induction；
Fig. 2 is that detected object separates the schematic diagram sensed with the sensor contacts of embodiment one；
The schematic diagram that Fig. 3 is sensed for the sensor sliding friction of detected object and embodiment one；
It is uneven knot that Fig. 4, which is that first electrode layer contacts surface with detected object in inventive sensor embodiment one, The schematic diagram of structure；
Fig. 5 is that detected object does not contact with the sensor of embodiment one, and the distance of its charge-site and sensor changes The schematic diagram sensed；
Fig. 6 is the structure of inventive sensor embodiment two and the schematic diagram sensed；
Fig. 7 and Fig. 8 is the structural representation that inventive sensor includes separation layer；
Fig. 9 is that sensor of the invention is layer structure schematic diagram；And
Figure 10 is the output voltage collection of illustrative plates detected during the work of specific sensor.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete Site preparation describes.Obviously, described embodiment is only part of the embodiment of the present invention, rather than whole embodiments.Based on this Embodiment in invention, the every other reality that those of ordinary skill in the art are obtained under the premise of creative work is not made Example is applied, belongs to the scope of protection of the invention.
Secondly, combination schematic diagram of the present invention is described in detail, when the embodiment of the present invention is described in detail, for purposes of illustration only, institute It is example to state schematic diagram, and it should not limit the scope of protection of the invention herein.
The existing sensor to object movement is required to set the power supplys such as battery, and the moment is that sensor connects electricity Source, this application for sensor propose many requirements, it is impossible to are useful under conditions of bad environments, it is also difficult to long-term Work independently.The present invention provides a kind of sensor based on electrostatic induction, and technical scheme is the detected object phase with electric charge To the change in location of a conducting element of sensing element, the conducting element is electrically connected to another conducting element of sensing element, Make the electrically charged potential change caused on the conducting element of detected object institute, because electrostatic induction is acted on so as to be led at two Electric charge flowing is formed between electric device, the load being connected between two conducting elements or has electric current to flow through in detection means. During working sensor, detected object can directly contact with the conducting element of sensing element, sliding friction from each other Or periodically it separate；Detected object can not also contact with the conducting element of sensing element, only change the two it Between distance, this pattern needs detected object itself carry electric charge, and during distance is changed, it is powered to be detected object Potential of the lotus on conducting element changes.Sensor of the invention can have multiple-working mode, can adapt to be detected The collection of energy of object Different Exercise Mode, is with a wide range of applications.
The concrete structure based on electrostatic induction sensor of the present invention is discussed in detail below in conjunction with the accompanying drawings.
Embodiment one：
Referring to Fig. 1, sensor includes being used for the typical structure of the sensor based on electrostatic induction provided in the present embodiment The sensing element that is sensed of movement to being detected object, wherein, sensing element is by a first electrode layer 1 and matched A second electrode lay 2 form, first electrode layer 1 and the second electrode lay 2, which separate, to be set and electrically connects, and is detected object 4 Separated after being contacted with each other with the first electrode layer 1 of sensing element, as shown by the arrows in Figure 1, the motion of detected object 4 makes Potential of the electric charge of 4 bands of detected object in first electrode layer 1 changes, and electric charge is in first electrode under electrostatic induction effect Flowed between layer and the second electrode lay, form electric current.Connecting detection device 3 can between first electrode layer 1 and the second electrode lay 2 To detect the electric current in sensing element, or connection load applies electric energy caused by sensor to load supplying.
In the case of detected object 4 is not charged object, to be detected the table that object 4 contacts with first electrode layer 1 Exemplified by face is insulator or semi-conducting material, first electrode layer 1 be conductive material, the operation principle of sensor, ginseng are illustrated Fig. 2 is seen, when detected object 4 contacts with the generation of first electrode layer in sensing element 1 surface, due to the two surface receiving and losing electrons energy Power is different, and first electrode layer 1 easily loses electronics, and the detected surface of object 4 is readily obtained electronics, produced on the two surface etc. The electric charge of contrary sign is measured, is schemed referring to a in Fig. 2.After detected object 4 separates with first electrode layer 1, scheme referring to b in Fig. 2, be detected Constraint of the negative electrical charge that the surface of object 4 is carried to positive charge in first electrode layer 1 weakens, because electrostatic induction acts on, first Positive charge in electrode layer 1 flows towards the second electrode lay 2, forms first electrode layer 1 to the electric current of the second electrode lay 2.Work as quilt When the distance of detecting object 4 and first electrode layer 1 is remote enough, negative electrical charge that the detected surface of object 4 carries is not enough to influence the Electric charge in one electrode layer 1, therefore no current produces between first electrode layer 1 and the second electrode lay 2, schemes referring to c in Fig. 2.Surface When detected object 4 with negative electrical charge is close to first electrode layer 1, electrostatic induction effect makes the negative electricity on the detected surface of object 4 Lotus attracts to strengthen to the positive charge in first electrode layer 1, and the positive charge in the second electrode lay 2 flows towards first electrode layer 1, joins See that d schemes in Fig. 2, it is in opposite direction with the electronics flowing of b figures in Fig. 2, the second electrode lay 2 is formed to the electric current of first electrode layer 1.Directly When being contacted again with the surface of first electrode layer 1 to detected object 4, the surface charge equivalent contrary sign of the two, referring to a in Fig. 2 Figure, electric charge flowing will not be produced in first electrode layer 1 and the second electrode lay 2.When detected object 4 can periodically with biography When the first electrode layer 2 of sense part is contacting and separating, it will be produced in sensing element between first electrode layer 1 and the second electrode lay 2 Pulse ac current signal.Above procedure shows, is separate in detected object with the first electrode layer 1 in sensing element Afterwards, without providing external power supply, the sensing element of sensor can detect to the movement of uncharged detected object 4. If detected object 4 occurs multiple-contact with the sensing element of sensor and separated, multiple exchanges can be produced in sensing element Pulse electrical signal.
In the present embodiment, detected object 4 can also carry electric charge in advance before being contacted with first electrode layer 1, be detected When object carries electric charge, when being contacted with first electrode layer, electric charge can occur again detected between object and first electrode layer Distribution, because different materials are to the difference of charge confinement ability, two contact surfaces can still have the difference of charge density, when the two After disconnected from each other, object is detected still with certain electric charge, when the distance between detected object 4 and first electrode layer 1 change During change, because electrostatic induction acts on, electric charge flowing is formed between first electrode layer and the second electrode lay, has electricity in detection means Stream output.The electric charge that detected object 4 carries can be obtained by other modes such as chargings, and the access approaches of electric charge are for this The sensing process of invention does not influence.
In the present embodiment, two electrode layers in sensing element, it is only necessary to which an electrode layer produces quiet with detected object Electro ultrafiltration, the position of two electrode layers can exchange.The material of first electrode layer 1 and the second electrode lay 2 can with identical, Can be different.The material of first electrode layer 1 or the second electrode lay 2 may be selected from metal, indium tin oxide or organic matter conductor, commonly use Metal include gold, silver, platinum, aluminium, nickel, copper, titanium, chromium or selenium, and the alloy formed by above-mentioned metal；Organic matter conductor is general For conducting polymer, including from polypyrrole, polyphenylene sulfide, poly- phthalocyanine-like compound, polyaniline and/or polythiophene.
According to the operation principle of sensor can be seen that the detected surface of object 4 with electric charge number be sensor work The key of work, the receiving and losing electrons ability being preferably detected between the surface that object 4 contacts with each other with first electrode layer 1, which differs, gets over Greatly, it is more to be detected the electric charge that the surface of object 4 carries.The material on the surface that detected object 4 contacts with first electrode layer 1 can be with For insulating material.In insulating material, preferred polymers insulating materials, it can specifically select：Polytetrafluoroethylene (PTFE), poly dimethyl Siloxanes, polyimides, poly- diphenyl propane carbonic ester, polyethylene terephthalate, aniline-formaldehyde resin, polyformaldehyde, Ethyl cellulose, polyamide, melamino-formaldehyde, polyethylene glycol succinate, cellulose, cellulose ethanoate, polyadipate Glycol ester, polydiallyl phthalate, regenerated fiber sponge, polyurethane elastomer, styrene-acrylonitrile copolymer copolymer, benzene second Alkene butadiene copolymer, staple fibre, polymethacrylates, polyvinyl alcohol, polyester, polyisobutene, polyurethane flexible sponge, Polyethylene terephthalate, polyvinyl butyral resin, phenolic resin, neoprene, butadiene-propylene copolymer, natural rubber Glue, polyacrylonitrile, poly- (vinylidene chloride-co- acrylonitrile), polyethylene the third diphenol carbonate, polystyrene, poly-methyl methacrylate Ester, makrolon, polymeric liquid crystal copolymer, polychlorobutadiene, polyacrylonitrile, poly bis phenol carbonate, CPPG, poly- trifluoro Vinyl chloride, polyvinylidene chloride, polyethylene, polypropylene, polyvinyl chloride and Parylene etc..
In addition, the surfacing that other insulating materials can also contact as detected object 4 with first electrode layer 1, example Such as common wool and its fabric, silk and its fabric, paper, cotton and its fabric, polyurethane elastomer, wood, hard rubber and vinegar Acid esters etc..
First electrode layer is conductive material, and semi-conducting material has differences with conductive material in terms of receiving and losing electrons ability, Therefore, the material on the surface that detected object can contact with first electrode layer can select semiconductor, including：Silicon, germanium；IIIth With the Vth compounds of group, such as GaAs, gallium phosphide etc.；IIth and the VIth compounds of group, such as cadmium sulfide, zinc sulphide etc.；With And the solid solution being made up of III-V compounds of group and II-VI compounds of group, such as gallium aluminum arsenide, gallium arsenic phosphide etc..Except above-mentioned crystalline state half Outside conductor, also amorphous glass semiconductor, organic semiconductor etc..Non-conductive oxide, conductor oxidate and complexity Oxide also has triboelectric characteristics, can form surface charge in friction process, therefore the material of detected object 4 can also For manganese, chromium, iron, copper oxide, in addition to silica, manganese oxide, chromium oxide, iron oxide, cupric oxide, zinc oxide, BiO2With Y2O3。
As space is limited the reason for, can not be exhaustive to being detected the possibility material progress of object 4, therefore first electrode layer The material on the surface that material can contact according to detected object 4 with first electrode layer is selected, and preferably the two is contacted with each other Surfacing receiving and losing electrons ability difference be the bigger the better.Several detected objects and first electrode layer are only listed in the application Specific material for technical staff refer to, but it is clear that these specific materials can not turn into the scope of the present invention limit Sexual factor processed, because under the enlightenment of invention, triboelectric characteristics are very according to possessed by these materials by those skilled in the art Easily select other similar materials.
In in the sensor, work of the only detected object 4 with the surface that first electrode layer 1 can contact with each other to sensor Have an impact as performance, it is only necessary to which limiting first electrode layer 1 can be with the surface that detected object 4 contacts as above-mentioned conductive material , do not limited for the other parts of first electrode layer 1, therefore, first electrode layer 1 all can integrally use uniform material Material, or sandwich construction or core shell structure.
Be found through experiments that, when between the material on the surface that detected object 4 and first electrode layer 1 contact with each other electronics Ability difference is bigger, and the quantity of electric charge that the detected surface of object 1 carries is more, and the electric signal of sensor output is stronger.So can be with According to material listed above by simple contrast experiment, suitable material is selected as first electrode layer 1 and detected thing The surfacing that body 4 contacts, to obtain optimal electric signal output performance.
In addition, two surfaces that first electrode layer 1 contacts with each other with detected object 4 both can be hard material, also may be used To be flexible material, the hardness of material has not significant impact to the sensing capabilities of sensor, but can extend biography of the present invention The application of sensor.
During working sensor, the workability except being detected how many pairs sensors of the surface of object 4 with electric charge Outside having an impact, first electrode layer 1 also has an impact with the distance that detected object 4 separates to the service behaviour of sensor, separates Distance is about big, and the electric signal in sensing element between first electrode layer and the second electrode lay is stronger.Found in research process, point Open apart from when being more than first electrode layer size, particularly greater than first electrode layer 1 contacts with each other surface most with detected object 4 During long length, the change of separated distance influences less on the output signal of sensor.Preferably, object and the first electricity are detected The separated distance of pole layer 1 is more than 1 μm, more preferably 1 μm to 10cm scopes, more preferably 1mm to 2cm.
Heretofore described " maximum length on surface ", refers specifically to the maximum length in a surface all directions, example , can also by specifically measuring for irregular surface such as the length of rectangular long side, or the diameter length of circular surface Determine the maximum length on surface.
During sensor actual use in the present embodiment, relative motion of the object 4 relative to sensing element is detected, can be with It is accomplished in several ways, such as sensing element is fixed, the first electrode layer 1 particularly in sensing element is fixed, and is detected Object 4 is fixed on a reciprocating part, and reciprocating part drives detected object 4 to move reciprocatingly, and realizes Detected being contacting and separating relative to first electrode layer 1 of object 4.In other embodiments can also be in detected object 4 Flexible Connector is set to realize that detected object 4 is close or is moved back and forth away from first electrode layer 1 between first electrode layer 1 Purpose.Realizing the technological means of above-mentioned purpose has a lot, can use this area in command range conventional components, such as It is detected that the parts such as insulated spring are connected between object 4 and first electrode layer 1, it should be noted that the spring used should not limit Detected relative motion between object 4 and first electrode layer 1.In addition, sensor of the invention, being detected object 4 can also It is the object of free movement, such as sole for walking about of people etc..
In the present embodiment, the object that object 4 is opposing sense part self-movement is detected, need not be set thereon Electrode layer, therefore thickness, the size and dimension of detected object 4 are not specially limited.In order to improve detected object 4 and The surface charge amount that one electrode layer 1 respectively comes with when contacting, overall first electrode layer 1 can be block, flat board, thin slice or thin Film, it is preferred that the shape and size on the surface that first electrode layer 1 contacts with each other with detected object 4 are suitable, preferably phase Together, there is the contact area of maximum when detected object 4 is contacted with the surface of first electrode layer 2, reach raising and visited The purpose of the surface charge amount of object 4 is surveyed, so as to improve the service behaviour of sensing element.
In the present invention, according to the shape of detected object 4, first electrode layer 1 can be flexibly selected to be connect with detected object 4 The shape on tactile surface, can be plane, or curved surface.The surface that detected object 4 contacts with each other with first electrode layer 1 It is curved surface, can similarly realizes and contact with each other, it is preferred that the surface that detected object 4 contacts with each other with first electrode layer 1 It is all plane or curved-surface structure, at the time of with guarantee, the two contact area maximum can occur in contact.Preferably, it is detected The surface that object 4 contacts with each other with first electrode layer 1 is the complementary curved surface of shape, and for example, curvature is identical, area identical is bent Face, to ensure when contacting with each other, the surface that detected object 4 contacts with each other with first electrode layer 2 can completely attach to.
In addition to the mode of operation that the first electrode layer of above-mentioned detected object and sensing element is separate, sensing element There can also be the mode of operation of sliding friction with detected object.The course of work is sensed referring to Fig. 3, with detected object 11 Exemplified by surface and the upper surface of first electrode layer 1 contact with each other friction, describe for convenience, set detected object 11 here The shape and size all same of lower surface and the upper surface of first electrode layer 1, in practice not in considered critical first electrode layer 2 The shape and area on surface and the lower surface of detected object 11, be able to can also be differed with identical.It is detected during original state The lower surface of object 11 can contact with the upper surface of first electrode layer 1 or not in contact with after being contacted under external force F effects（See A schemes in Fig. 3）, because electrode sequence difference be present in the material of the upper surface and the lower surface of detected object 11 of first electrode layer 1, Therebetween exist electronic capability difference, obtain that electronic capability is strong and first electrode layer 1 to be detected the lower surface of object 11 Upper surface be easier exemplified by losing electronics, when the lower surface of detected object 11 during 1 upper surface of first electrode layer with sending out Raw surface charge transfer, the upper surface of first electrode layer 1 is set to carry positive charge, and the lower surface of detected object 11 is then negatively charged Lotus（As shown in a figures in Fig. 3）, the electricity size of two kinds of electric charges is identical, therefore between first electrode layer 1 and the second electrode lay 2 There is no electrical potential difference, just flowed without electric charge yet.In external force F（The power that the detected object of driving moves relative to sensing element）Effect The detected lower surface of object 11 is relative with the upper surface of first electrode layer 1 down slides and contact area is changed（Reduce） Afterwards, the balance in the upper surface of first electrode layer 1 and the following table surface charge of detected object 11 is destroyed, is detected negative on object 11 Electric charge is acted on the positive charge constraint in first electrode layer 1 and reduced, and therefore, electrons are from the second electrode lay 2 to first electrode layer 1 Flowing, as shown in Figure 3 b, so that the detection means 3 being connected between first electrode layer 1 and the second electrode lay 2 is for example electric Flow table has electric current to flow through.Under external force, when the detected lower surface of object 11 and the upper surface of first electrode layer 1 are kept completely separate, The negative electrical charge of the detected lower surface institute band of object 11 is not enough to cause first electrode for the repulsion with electric charge in first electrode layer 1 The flowing of electric charge, detection means 3 can't detect electric current between layer 1 and the second electrode lay 2, as shown in Figure 3c.Work as opposite direction External force F make the detected lower surface of object 11 and the upper surface of first electrode layer 1 occur it is relative slide, and become contact area Change（Increase）, due to repulsive interaction of the negative electrical charge to positive charge in first electrode layer 1 on detected object 11, will cause electronics from First electrode layer 1 flows to the second electrode lay 2, and the contact device 3 between first electrode layer 1 and the second electrode lay 2 has electric current Flow through, as shown in Figure 3d.After the detected lower surface of object 11 and the upper surface of first electrode layer 1 completely attach to, it is detected The positive and negative charge of the lower surface of object 11 and the upper surface of first electrode layer 1 balance, now, not electronics first electrode layer 1 with Flowed between the second electrode lay 2, as shown in a figures in Fig. 3, the detection means 3 between first electrode layer 1 and the second electrode lay 2 On do not observe current signal.Back and forth carried out according to a in Fig. 3 to d process, between first electrode layer 2 and the second electrode lay 3 Form pulse current.If detected object 11 only has unidirectional motion relative to first electrode layer, as long as contacting with each other The area of friction changes, the electric current that can also be detected in detection means 3.
The surface that first electrode layer 1 and detected object 11 can contact with each other slip can be plane or curved surface, excellent Choosing, the surface configuration that first electrode layer 1 can contact with each other slip with detected object 11 matches, first electrode layer 1 and Detected object 11 can contact with each other slip surface configuration and size it is suitable, it is preferably identical, during sliding over each other At the time of can there is contact area maximum.Such as first electrode layer 1 can contact with each other the table of slip with detected object 11 Face is curvature identical cambered surface.
If the surface that first electrode layer 1 and detected object 11 contact with each other is smooth planar surface, such structure Need first electrode layer 1 and the relative sliding space of detected object 11 larger, and for first electrode layer 1 and detected thing Situation when the surface size difference that body 11 contacts with each other is larger is, it is necessary to which larger sliding distance could meet first electrode layer 1 Change with detected object 11 contact area in friction process that slides over each other and produce the requirement of electric signal.Therefore, for quilt The lower surface of detecting object 11 is the situation on out-of-flatness surface, in sensor of the invention, first electrode layer 1 and detected object 11 surfaces that can be contacted mutually can be out-of-flatness surface, when first electrode layer 1 slides over each other with detected object 11, two Surface incomplete contact between, referring to Fig. 4, the surface that first electrode layer 1 can contact with each other with detected object 11 is concavo-convex knot The out-of-flatness surface of structure, when first electrode layer 1 and detected object 11 occur with respect to slip, as long as less under external force Sliding distance can produces larger contact area change, the detection being connected between first electrode layer 1 and the second electrode lay 2 Device 3 has electric current to flow through.In the present embodiment, the table that detected object 11 can contact with each other with first electrode layer can be useful in The relatively small situation of any surface among face, contact with each other two surfaces are prepared as out-of-flatness surface, used in outer masterpiece It just disclosure satisfy that and rub in less moving range during the surface rubs mutually that lower first electrode layer 1 contacts with detected object 11 The change of area is wiped, so as to which the mechanical energy of external force is changed into electric energy, realizes the sensing to being detected object movement.
Preferably, the concaveconvex structure on the surface that first electrode layer 1 contacts with detected object 11 is periodicity concaveconvex structure, Optional periodicity concaveconvex structure can have the ribbon structure that equidistant parallel arranges, checkerboard configuration quasi-periodic structure.
In the sensor of the present embodiment, the surface that can also be contacted to first electrode layer with detected object 11 is carried out Physically or chemically modification.Physical modification, which is specifically as follows, makes part or all of surface distributed have micron or secondary micron dimension Micro-structural, to increase the contact area between first electrode layer 1 and detected object 11, so as to increase detected body surface band Some quantities of electric charge.The micro-structural is preferably nano wire, nanotube, nano particle, nanometer rods, nano flower, nanometer channel, micron Groove, nanocone, micron cone, nanosphere and micron chondritic, and the array formed by foregoing one or more structures, The nano-array being particularly made up of nano wire, nanotube, nanocone or nanometer rods, can be carved by photoengraving, plasma The array of wire, cube or rectangular pyramid shape prepared by the methods of erosion, the size of each this unit is in nanometer in array To micron dimension, unit size, the shape of specific micro nano structure should not limit the scope of this invention.Nanometer can also be passed through Material intersperse or the mode of coating realizes the purpose.Chemical modification can also be carried out to the surface of first electrode layer, can Transfer amount of the electric charge in Contact is further improved, so as to improve the power output of contact charge density and sensor.Chemistry It is modified to be divided into the following two kinds type again：
A kind of method is for the first electrode layer 1 that contacts with each other and the detected material of object 11, according to two materials Polarity, if the polarity of the material of first electrode layer 1 is just, the functional group for being more easy to betatopic is introduced in material surface（It is i.e. strong to electricity Son group）；Or if the polarity of the material of first electrode layer 1 is negative, the functional group for the electronics that is more easy to get is introduced in material surface（By force Electrophilic group）, transfer amount of the electric charge when contacting with each other or sliding can be further improved, so as to improve detected object Surface carries charge density and sensing sensitivity.Strong electron group includes：Amino, hydroxyl, alkoxy etc.；Strong electrophilic group bag Include：Acyl group, carboxyl, nitro, sulfonic group etc..The introducing of functional group can be with conventional methods such as using plasma surface modifications.Example The gaseous mixture of oxygen and nitrogen can be such as set to produce plasma under certain power, so as to introduce amino in material surface.
Another method is to introduce positive charge in polarity for positive material surface, and is drawn in polarity for negative material surface Enter negative electrical charge.It can specifically be realized by way of chemical bonding.For example, sol-gel can be utilized on PDMS surfaces（English It is abbreviated as sol-gel）The upper tetraethyl orthosilicate of method modification（English is abbreviated as TEOS）, and make its negatively charged.Can also be in gold Contain cetyl trimethylammonium bromide using the bond modification upper surface of gold-sulphur on category gold thin film layer（CTAB）Jenner's grain of rice Son, because cetyl trimethylammonium bromide is cation, therefore whole material can be made to become positively charged.Those skilled in the art Member can select suitable decorative material and its key according to the receiving and losing electrons property of selected materials and the species of surface chemistry key Close, to reach the purpose of the present invention, therefore such deformation is all within protection scope of the present invention.
The sensor of the present embodiment, the work that can be separate or slide over each other with sensing element except being detected object , can also be in the case where detected object itself carry electric charge outside operation mode, detected object being capable of relative and sensing element First electrode layer 1 move, but in motion process be detected object do not contacted with any one electrode layer of sensing element, such as In Fig. 5 shown in arrow, set detected object 42 and carry negative electrical charge in advance, be particularly detected object 42 towards first electrode layer 1 surface carries negative electrical charge, when detected object 42 is close to first electrode layer 1, due to detected object 42 and first electrode Electrostatic induction between layer 1, the negative electrical charge that detected object 42 carries have repulsive interaction to the negative electrical charge in first electrode layer 1, Therefore, between the first electrode layer 1 of sensing element and the second electrode lay 2 formed electric charge flowing, be connected to first electrode layer 1 with Detection means 3 between the second electrode lay 2 can detect that the second electrode lay 2 flows to the electric current of first electrode layer 1 referring in Fig. 5 A schemes.When detected object 42 is away from first electrode layer, the negative electrical charge that detected object 42 carries is in first electrode layer 1 Negative electrical charge has repulsive interaction decrease, and reverse electric charge stream is formed between the first electrode layer 1 of sensing element and the second electrode lay 2 Dynamic, the detection means 3 being connected between first electrode layer and the second electrode lay can detect that first electrode layer 1 flows to the second electricity The electric current of pole layer 2, referring to scheming b in Fig. 5.Object 42 is detected in the sensing course of work shown in Fig. 5 relative to first electrode Layer in the vertical direction motion, its operation principle are also applied between detected object 42 and the relative surface of first electrode layer 1 Distance it is constant（I.e. detected object 42 moves along the direction parallel to first electrode layer）Situation.In addition, this this work In operation mode, sensing element can also be without electric charge, even if two electrode layers itself of sensing element are with electric charge With electric charge, object 42 is detected when being moved relative to first electrode layer, and the electric charge that the detected surface of object 42 carries is the Caused potential can also change on one electrode layer, so as to cause the electric charge between first electrode layer and the second electrode lay to flow.
The electric charge that detected object 42 carries can be obtained by being rubbed with other objects beyond sensing element, can also Obtained, can also be obtained by other modes such as chargings, the access approaches pair of electric charge by being rubbed before work with sensing element Do not influenceed in the sensing process of the present invention, also do not form the limitation to inventive sensor.
The motion mode changed for being detected the distance between surface relative with first electrode layer 1 of object 42, first Minimum range scope between electrode layer 1 and detected object 42 is 0.01 times of first electrode layer 1 towards detected object 42 Surface maximum length, ultimate range scope is the maximum of 10 times of first electrode layers 1 towards the surface of detected object 42 Length.
For being detected the distance between the surface relative with first electrode layer 2 of object 42 constant motion mode, visited It is 0.1-10 times of first electrode layer 1 towards detected object 42 to survey the distance between object 42 and first electrode layer 1 scope The maximum length on surface.In the present embodiment, the shape and chi on preferably detected object 42 surface relative with first electrode layer It is very little suitable, it is more preferably identical, to ensure the movement of detected object 42, under electrostatic induction effect, it can be made detected The electric charge of object 42 causes the electric charge between first electrode layer 1 and the second electrode lay 2 to flow.
The actual sensor based on electrostatic induction, be detected movement of the object relative to first electrode layer, can be on The combination of three kinds of relative movements is stated, a kind of single motion side can only be had relative to first electrode layer by not limiting detected object Formula.
Embodiment two：
In sensor, frictional layer can also be included, the first electrode layer of sensing element is fitted in the lower surface of frictional layer, Make the not direct sensing element for being contacted with detected object or other objects, sensor being protected of first electrode layer.Sensing The frictional layer of device can carry electric charge or neutral, because the relative position of frictional layer and first electrode layer is constant, so, When the detected object with electric charge moves relative to first electrode layer, frictional layer will not be to first electrode layer in sensing element Electric charge movement between the second electrode lay has an impact.
In the present embodiment, the typical structure of sensor is referring to Fig. 6, and the sensing element that sensor includes is by first electrode layer 1 It is electrically connected to form with the second electrode lay 2, frictional layer 5 is arranged on the upper surface of first electrode layer 1, when in use, frictional layer 5 Upper surface towards detected object 43, wherein, sensing element can be identical with embodiment one.Detected object 43 can be with friction The upper surface of layer 5 is in contact the relative motion of separation, detected object 43 and the distance of first electrode layer is changed；Quilt With the upper surface of frictional layer sliding friction can also occur for detecting object 43, and contact area is changed；Detected thing Body 43 itself can also carry electric charge, in relative to first electrode layer motion process, not contacted all the time with frictional layer.
The motor pattern separated can be in contact with the upper surface of frictional layer with detected object below, introducing includes rubbing Wipe the operation principle of the sensor of layer.The lower surface of detected object 43 and the upper surface of frictional layer 5 are set as different materials, two Electrode sequence difference be present in the material of person.The sensor operating principles of the present embodiment are discussed in detail by taking Fig. 6 structure as an example below, just Be detected during beginning state object 43 and frictional layer 5 not in contact with（See that a schemes in Fig. 6）, due to upper surface and the detected thing of frictional layer 5 Electrode sequence difference be present in the material of the lower surface of body 43, therebetween exist electronic capability difference, with the upper table of frictional layer 5 Face obtains electronic capability by force and the lower surface of detected object 43 is easier exemplified by losing electronics, when the lower surface of detected object 43 With surface charge transfer occurs during the upper surface of frictional layer 5, the upper surface of frictional layer 5 is carried negative electrical charge, and be detected The lower surface of object 43 is then positively charged（As shown in b figures in Fig. 6）, the electricity size of two kinds of electric charges is identical, therefore in the first electricity There is no electrical potential difference between pole layer 1 and the second electrode lay 2, just flowed without electric charge yet.Under external force be detected object 43 with The upper surface of frictional layer 5 separates（As shown in c figures in Fig. 6）, the entirety being now made up of frictional layer 5 and first electrode layer 1 has Only surplus negative electrical charge, the detected lower surface of object 43 has positive charge, with detected object 43 with frictional layer 5 apart from increase, quilt Coulomb repulsion of the negative electrical charge of the upper surface of detecting object 43 to negative electrical charge in first electrode layer 1 gradually increases, so that the first electricity Electronics in pole layer 1 flows to the second electrode lay 2 by external circuit, therefore is connected between first electrode layer 1 and the second electrode lay 2 Detection means 3 in there is electric current to flow through.When the distance between detected object 43 and the upper surface of frictional layer 5 return to initial position When, detected spacing between object 43 and the upper surface of frictional layer 5 reaches maximum, frictional layer 5, the electricity of first electrode layer 1 and second Total negative electrical charge that pole layer 2 carries and the positive charge of the detected lower surface of object 43 reach balance, in first electrode layer 1 and second There is no electric current generation between electrode layer 2（As shown in d figures in Fig. 6）.When detected object 43 once again close to frictional layer 5 when, due to Detected spacing between object 43 and the upper surface of frictional layer 5 diminishes, and is detected the positive charge of the lower surface of object 43 to the first electricity The electrostatic repulsion enhancing of positive charge, causes electronics to flow into first electrode layer by the second electrode lay 2 by external circuit in pole layer 1 1, so as to be produced and transient current in opposite direction for the first time in external circuit（As shown in e figures in Fig. 6）.When external force continues to make to be visited After survey object 43 is in contact with the upper surface of frictional layer 5, the process in b-e figures above is just repeated again.Detected object 43 is with rubbing Wipe layer 5 to be contacting and separating repeatedly, alternating pulsing current is formed between first electrode layer 1 and the second electrode lay 2.
Although it can be seen that frictional layer 5 from the operation principle of the sensor shown in Fig. 6 to be connect with detected object 43 After touching and separating, its surface carries negative electrical charge, and these negative electrical charges can retain or retain always the long period, and The detected opposite first pole layer 1 of object 43 away from and close to when, the electric charge that the surface of frictional layer 5 carries can't influence the first electricity Electric charge flowing between pole layer 1 and the second electrode lay 2.
Same principle, sliding friction can occur with the upper surface of frictional layer for being detected object, and make contact surface The situation that product changes, the presence of frictional layer do not interfere with the work of sensor yet.In such a situation it is preferred to, friction The upper surface of layer is suitable with the underside shape and size of detected object, preferably identical.Frictional layer and detected object are mutual The surface mutually slided can all be smooth planar surface, certainly, be prepared into relative to the upper surface of first electrode layer in Fig. 4 concavo-convex The situation of structure, accordingly, the upper surface of frictional layer are also prepared into the surface of concaveconvex structure accordingly.
For detected object not with electrode layer contacts in sensing element in the case of, can also make to be visited in the present embodiment Survey object do not contacted with frictional layer, while also not with sensing element（That is first electrode layer or the second electrode lay）Contact, due to rubbing The relative position for wiping layer and first electrode layer is fixed, thus the presence of frictional layer do not interfere with sensing element first electrode layer with Electric charge movement between the second electrode lay, as long as detected object of the control with electric charge does not contact with frictional layer.
Contact with each other and separate with frictional layer for detected object, or situation about sliding over each other, it is suitable by selecting Rub layer material, is detected object in addition to the insulating material and semi-conducting material mentioned in embodiment one, or lead Electric material, such as metal or indium tin oxide ITO, conventional metal include gold, silver, platinum, aluminium, nickel, copper, titanium, chromium or selenium, and The alloy formed by above-mentioned metal.As long as meet that the material on two surfaces that detected object can contact mutually with frictional layer is deposited In friction electrode sequence difference, electric charge can be formed on surface when the two is contacted with each other, electric charge is still protected when disconnected from each other Stay in the surface of material.Equally, the upper surface of frictional layer can also pass through physics or chemical modification, make frictional layer with being detected Object can produce more electric charges when contacting on the surface of detected object.
Carry electric charge for detected object itself, in relative to first electrode layer motion process, all the time not with friction The situation of layer contact, because frictional layer 5 is not with first electrode layer relative motion, therefore, whether the layer surface that no matter rubs is with electricity Lotus, all without first electrode layer and the flowing of electric charge in the second electrode lay in influence sensing element.And detected object itself band Some electric charges, can by with beyond sensor other objects rub obtain, can also by before work with sensor sheet The frictional layer friction of body obtains, and can also be obtained by other modes such as chargings.
The material of frictional layer can be non-conducting material, preferred insulative material, object can be detected from embodiment one It can be selected in material selection.The presence of frictional layer can form preferable protective effect, therefore its table for first electrode layer 1 Face size and dimension is preferably at least and first electrode layer 1 is completely covered.Preferably, frictional layer can also cover the second electrode lay 2. But because frictional layer can increase the vertical distance of separation between detected object and sensing element, its thickness also should not be blocked up, Preferably flake or film-form, are typically chosen between 10nm to 5cm, preferably 100nm to 500 μm of m, more preferably 1 μm is arrived 500μm。
Due to the electrode layer that first electrode layer 1 is sensor, it is preferred to use existing magnetron sputtering, evaporation and printing Etc. technology first electrode layer is prepared in the lower surface of frictional layer.It is of course also possible to use thicker first electrode layer 1, such as Cu or Al paper tinsels, the material of frictional layer 5 is prepared on its surface, realize that the contact with frictional layer 5 of first electrode layer 1 is set.
Frictional layer can be separate structure, such as is made up of the part of 2 separation, and one of part is covered in the first electricity The surface of pole layer 1, another part are covered in the surface of the second electrode lay 2.The specific structure of frictional layer and shape can bases The needs of first electrode layer are set in sensing element, protect in the case where not influenceing working sensor first electrode layer not by Abrasion.
In all embodiments of the present invention, sensing element and frictional layer can be hard material or flexible material. Because the hardness of material has no effect on sliding friction or contact friction effect therebetween, such as need first electrode layer or rub The surface for wiping layer maintains plane, can also be realized by the support of miscellaneous part.
Embodiment three：
The sensor that the embodiment of the present invention one and embodiment two provide, can also include separation layer, for isolating detecting means The first electrode layer and the second electrode lay of part, keep apart the two and keep the relative position of setting, and biography can be made Sense part and other device isolations and isolate.
Referring to Fig. 7, the first electrode layer 1 and the second electrode lay 2 of sensing element are embedded in separation layer 6, make the first electricity Pole layer 1 and the second electrode lay 2, which separate, to be set and relative position is fixed, and the upper surface of at least first electrode layer 1 expose every Absciss layer 6.Separation layer 6 can be exposed or not exposed in the upper surface of the second electrode lay 2.First electrode layer 1 can with the second electrode lay 2 To be electrically connected by wire or conductive film.
In other embodiments, separation layer can also all wrap first electrode layer 1 and/or the second electrode lay 2, join See Fig. 8, all surface of first electrode layer 1 and the second electrode lay 2 is isolated layer 61 and covered.The sensing element of this spline structure, The separation layer 61 being covered on the upper surface of first electrode layer 1 has functioned simultaneously as the effect of the frictional layer in embodiment two.First electricity Pole layer 1 can be electrically connected with the second electrode lay 2 by wire or conductive film.
In other embodiments, two electrode layers of separation layer and sensing element can be set according to overlapped way, referring to Fig. 9, the first electrode layer 1 and the second electrode lay 2 of sensing element are separately positioned on the upper and lower surface of separation layer 62, form Fig. 9 institutes The sandwich construction shown, first electrode layer 1 can be electrically connected with the second electrode lay 2 by wire or conductive film.This reality Apply in example, it is preferred that first electrode layer 1, the second electrode lay 2 and separation layer 62 are laminate structure, help to reduce detecting means Part overall structure, can be by device miniaturization.The sandwich construction can also set frictional layer in the upper surface of first electrode layer 1 5, can separate or slide over each other with detected object 4 while for protecting first electrode layer friction, make to be detected The surface of object 4 carries electric charge.In addition, the sandwich construction can also include protective layer 7, the following table of the second electrode lay is arranged on Face, for protecting the second electrode lay.The sandwich construction of this stratiform can be carried out by the semiconductor device fabrication processes of routine Make.
In sandwich construction shown in Fig. 9, first electrode layer 1 and the second electrode lay 2 are conductive film, film thickness can It is 10nm-5mm, preferably 100nm-500 μm to select scope.First electrode layer 1 and the second electrode lay 2 are preferably metal film layer, The upper and lower surface of separation layer 62 can be produced on using technologies such as existing magnetron sputtering, evaporation and printings.For thickness Bigger first electrode layer 1 and the second electrode lay 2 are spent, the modes such as stickup can be used to be arranged on the upper following table of separation layer 62 Face.
The material of separation layer and protective layer is preferably insulating materials or semi-conducting material, and separation layer is with protective layer in this hair In bright and the course of work of sensor is not involved in, so the range of choice of material is wider, existing insulating materials or semiconductor Material can be chosen, such as organic matter insulating material PDMS, rubber or glass plate etc., and specific material can also be from embodiment Chosen in insulating materials or semiconductor that a kind of detected object enumerated can use.
Separation layer and protective layer can be that hard material can also be flexible structure.For first electrode layer 1, second electrode Layer 2, separation layer 6, frictional layer 5 and protective layer 7 are the sensor of flexible structure, sensor is turned into a flexible device, It can be used in combination with other flexible devices.Using sensor made of flexible material it is advantageous that soft frivolous friction table Face will be deformed upon by slight external force effect, and this deformation can cause two friction material layers（Detected object and First electrode layer 1 or frictional layer 5）Relative displacement, so as to export telecommunications to detection means by sliding friction and electrostatic induction Number.The use of flexible material allows sensor of the invention to be widely used in biological and medical field.Using During can also do substrate with ultra-thin, soft, flexible and/or transparent high polymer material, be packaged with Convenient use simultaneously improves intensity.Obviously, all structures disclosed by the invention can use corresponding ultra-soft and flexible material Material is made, so as to form the sensor of flexibility.
In the present invention, first electrode layer 1 and the second electrode lay 2 need to electrically connect, could be in first electrode layer 1 and second Electric current is produced between electrode layer 2, first electrode layer 1 can be electrically connected directly by detection means with the second electrode lay 2, described Detection means can be ammeter, or miniaturized electronic devices such as LED bulb etc., or more complicated circuit（It is such as multiple The series-parallel circuit of electronic component）, it is not specially limited herein, as long as first electrode layer 1 and the second electrode lay 2 can be entered Row electrical connection.
Example IV：
Accordingly, the present invention also provides a kind of method for sensing, using any one above-mentioned sensor, including step：
Detected object moves relative to first electrode layer 1, makes the electric charge of detected object institute band in first electrode layer 1 Potential change；
Electric charge is produced between first electrode layer 1 and the second electrode lay 2 to flow to form electric current.
Detected object moves relative to first electrode layer 1, can be that detected object and the surface of first electrode layer 1 are sent out Separated after raw contact, detected object is carried electric charge.In detected object and first electrode layer 1 away from each other or close to mistake Cheng Zhong, change potential of the electric charge of detected object institute band in first electrode layer 1, be detected object and first electrode layer 1 Between the electrostatic induction detection means that makes to be connected between first electrode layer 1 and the second electrode lay 2 on there is electric current to flow through.
Detected object moves relative to first electrode layer 1, or detected object and the surface of first electrode layer 1 Slide over each other friction, and contact area is changed in sliding process, and detected body surface carries electric charge.Visited During survey object slides over each other with first electrode layer 1, make potential of the electric charge of detected object institute band in first electrode layer 1 Change, detected electrostatic induction between object and first electrode layer 1 make to be connected to first electrode layer 1 and the second electrode lay 2 it Between detection means on there is electric current to flow through.
Detected object moves relative to first electrode layer 1, or detected object moves relative to first electrode layer 1 It is dynamic, and do not contacted all the time with first electrode layer 1, detected object itself carries electric charge.In detected object relative to first In the moving process of electrode layer 1, be detected potential of the electric charge of object institute band in first electrode layer 1 and change, be detected object with There is electricity in the detection means that electrostatic induction between first electrode layer 1 makes to be connected between first electrode layer 1 and the second electrode lay 2 Stream flows through.The electric charge that detected object is carried can be carried to be separated after being contacted with each other with first electrode layer, or Carry by other means.
Wherein, the material and structure of the first electrode layer and the second electrode lay can use the biography that the present invention is previously mentioned The material and structure of each several part in sensor, do not repeating herein.
Embodiment five：
A long 10cm × wide 10cm × thick 1mm polymethyl methacrylate thin plate is cut as substrate（Separation layer）； Copper film is deposited as first electrode layer in the one side of polyimides thin plate, and one side deposition copper film is as the second electrode lay in addition；With Copper conductor links copper film and accesses voltmeter；In the poly- of one layer of long 10cm of first electrode layer surface bonding × 75 μm of wide 10cm × thickness Tetrafluoroethene film is as frictional layer；It is thin in the nylon of one layer of long 10cm of the second electrode lay surface bonding × 50 μm of wide 10cm × thickness Film is as protective layer；Polytetrafluoroethylene film is positioned over ground upward, with being separated after sole and its periodic contact, connected Voltmeter between two copper films has the electric signal output of respective change, and referring to Figure 10, voltmeter is measured between two copper films Voltage signal the maximum moon non-650V, illustrate that sensor can sense to mobile object sole, utilize external force Mechanical energy is converted into electric energy and carries out object mobile sensor, it is not necessary to extra power supply is provided for sensor.
The above described is only a preferred embodiment of the present invention, any formal limitation not is made to the present invention.Appoint What those skilled in the art, without departing from the scope of the technical proposal of the invention, all using the side of the disclosure above Method and technology contents make many possible changes and modifications to technical solution of the present invention, or are revised as the equivalent reality of equivalent variations Apply example.Therefore, every content without departing from technical solution of the present invention, the technical spirit according to the present invention are done to above example Any simple modifications, equivalents, and modifications, still fall within technical solution of the present invention protection in the range of.

Claims (22)

1. a kind of sensor based on electrostatic induction, it is characterised in that including for being sensed to the movement for being detected object Sensing element,
The sensing element is made up of a first electrode layer and matched the second electrode lay, the first electrode layer Separate with the second electrode lay and set and be electrically connected to each other；
When the detected object moves relative to the first electrode layer of the sensing element, make the electricity of the detected object institute band Potential of the lotus in the first electrode layer changes, under electrostatic induction effect electric charge first electrode layer and the second electrode lay it Between flowing form electric current；
Wherein, the detected object carries electric charge in advance, or, by with sensor contacts and separating and making the detected thing Body carries electric charge,
Wherein, the sensor also includes separation layer, the separation layer be used for the first electrode layer for isolating the sensing element and The second electrode lay, isolate the two and keep the relative position of setting.
2. sensor according to claim 1, it is characterised in that the detected object by with the first electrode layer The friction that separates or slide over each other after contact makes contact area change and carries electric charge.
3. sensor according to claim 2, it is characterised in that the first electrode layer can be mutual with detected object The shape and size on the surface of contact are suitable.
4. sensor according to claim 3, it is characterised in that the first electrode layer of the sensing element and detected thing The surface that body slides over each other is smooth planar surface, or the out-of-flatness surface for concaveconvex structure.
5. sensor according to claim 4, it is characterised in that the concaveconvex structure of the first electrode layer surface is the cycle Property concaveconvex structure.
6. according to the sensor any one of claim 2-4, it is characterised in that the first electrode layer can be with being visited Surveying some or all of surface distributed on the surface of object contact has the micro-structural of micron or secondary micron dimension；Or described The surface that one electrode layer can contact with detected object is handled by chemical modification.
7. sensor according to claim 1, it is characterised in that also including frictional layer, the first electricity of the sensing element Pole layer is fitted in the lower surface of the frictional layer；
Wherein, the detected object carries electric charge in advance, or, by separating or sliding mutually after being contacted with the frictional layer Dynamic friction makes contact area change and carries electric charge.
8. sensor according to claim 7, it is characterised in that the material of the frictional layer is insulating materials or partly led Body；The thickness range of the frictional layer is between 10nm to 5mm.
9. sensor according to claim 7, it is characterised in that the frictional layer can be mutual with the detected object The shape and size on the surface of contact are suitable.
10. according to the sensor any one of claim 7-9, it is characterised in that the frictional layer and detected object The surface to slide over each other is smooth planar surface, or the out-of-flatness surface for concaveconvex structure.
11. sensor according to claim 10, it is characterised in that what the frictional layer can contact with detected object The some or all of surface distributed on surface has the micro-structural of micron or secondary micron dimension；Or the frictional layer can be with quilt The surface of detecting object contact is handled by chemical modification.
12. the sensor according to claim 1 or 7, it is characterised in that the detected object not with the sensing element Contact, the detected object is charged object.
13. sensor according to claim 1, it is characterised in that the material of the separation layer is insulating material.
14. the sensor according to claim 1 or 13, it is characterised in that the first electrode layer of the sensing element and Two electrode layers are embedded in the separation layer, and the separation layer is exposed in the upper surface of at least first electrode layer；
Or the separation layer all wraps the first electrode layer and/or the second electrode lay；
Or two electrode layers of the separation layer and the sensing element are set according to overlapped way, the first of sensing element Electrode layer and the second electrode lay are separately positioned on the upper and lower surface of separation layer.
15. the sensor according to claim 8 or 13, it is characterised in that the insulating materials is one in llowing group of materials Kind is several：Polytetrafluoroethylene (PTFE), dimethyl silicone polymer, polyimides, poly- diphenyl propane carbonic ester, poly terephthalic acid second Diol ester, aniline-formaldehyde resin, polyformaldehyde, ethyl cellulose, polyamide, melamino-formaldehyde, polyethylene glycol succinate, fibre Tie up element, cellulose ethanoate, polyethylene glycol adipate, polydiallyl phthalate, regenerated fiber sponge, polyurethane bullet Property body, styrene-acrylonitrile copolymer copolymer, styrene-butadiene-copolymer, staple fibre, polymethacrylates, polyvinyl alcohol, poly- Ester, polyisobutene, polyurethane flexible sponge, polyethylene terephthalate, polyvinyl butyral resin, phenolic resin, neoprene Rubber, butadiene-propylene copolymer, natural rubber, polyacrylonitrile, poly- (vinylidene chloride-co- acrylonitrile), polyethylene the third diphenol carbon Hydrochlorate, polystyrene, polymethyl methacrylate, makrolon, polymeric liquid crystal copolymer, polychlorobutadiene, polyacrylonitrile, Poly bis phenol carbonate, CPPG, polytrifluorochloroethylene, polyvinylidene chloride, polyethylene, polypropylene, polyvinyl chloride, send it is auspicious Woods, wool and its fabric, silk and its fabric, paper, cotton and its fabric, polyurethane elastomer, wood, hard rubber and acetate.
16. sensor according to claim 8, it is characterised in that the semi-conducting material is one kind in llowing group of materials It is or several：The compounds of group of silicon, germanium, the IIIth and the Vth compounds of group, the IIth and the VIth and by III-V compounds of group and II-VI Solid solution, amorphous glass semiconductor, the organic semiconductor of compounds of group composition, and non-conductive oxide, semiconductor Oxide and complex oxide semiconductor.
17. the sensor according to any one of claim 1 or 16, it is characterised in that the first electrode layer and second The material of electrode layer is metal or indium tin oxide ITO, FTO or conducting polymer composite.
18. according to the sensor any one of claim 1-5, it is characterised in that the first electrode layer and/or second Electrode layer is flexible material.
19. the sensor according to any one of claim 7 or 8, it is characterised in that the first electrode layer, the second electricity Pole layer and/or frictional layer are flexible material.
20. sensor according to claim 13, it is characterised in that the separation layer is flexible material.
21. a kind of method for sensing based on electrostatic induction, it is characterised in that using the sensing described in claim any one of 1-20 Device, including step：
The detected object moves relative to first electrode layer, makes the electric charge of detected object institute band in first electrode layer Potential changes；Electric charge is produced between the first electrode layer and the second electrode lay to flow to form electric current.
22. method for sensing according to claim 21, it is characterised in that
The detected object moves relative to first electrode layer, and the surface of specially detected object and first electrode layer occurs Separated after contact, detected object is carried electric charge；
Or the detected object moves relative to first electrode layer, the table of specially detected object and first electrode layer Face slides over each other friction, and contact area is changed in sliding process, the electric charge for carrying detected body surface；
Or the detected object moves relative to first electrode layer, specially detected object is relative to first electrode layer It is mobile, and do not contacted all the time with first electrode layer, the detected object itself carries electric charge.
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PCT/CN2015/076872 WO2015158302A1 (en) 2014-04-18 2015-04-17 Sensor and power generator based on electrostatic induction, and sensing method and power generation method
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Families Citing this family (12)

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Publication number Priority date Publication date Assignee Title
CN107026046A (en) * 2016-01-29 2017-08-08 北京纳米能源与系统研究所 A kind of button energy collecting device, method and button and keyboard
CN105784205B (en) * 2016-03-08 2019-01-29 南京航空航天大学 Motor behavior, counter-force and contact-the friction amount of sending a telegraph synchronized measurement system and method
KR102018839B1 (en) * 2016-08-09 2019-09-05 최홍천 Friction detection system and sensor for external motion
CN109120180A (en) * 2017-06-22 2019-01-01 北京纳米能源与系统研究所 Rub nanometer generating device and float
DE102018204305A1 (en) * 2018-03-21 2019-09-26 Robert Bosch Gmbh Textile-plastic composite, sensor and method for producing the textile-plastic composite
US11353425B2 (en) * 2019-08-20 2022-06-07 Ascend Performance Materials Operations Llc Method for measuring static attraction propensity
CN110793570B (en) * 2019-10-12 2021-11-30 北京纳米能源与系统研究所 Sensor and speed and amplitude detection method
CN114142790A (en) * 2021-10-11 2022-03-04 苏州腾晖光伏技术有限公司 Knapsack and power generation mechanism
CN114251999B (en) * 2021-12-16 2023-10-20 重庆大学 Triboelectric position sensor based on high-resistivity material and preparation method thereof
CN115176582B (en) * 2022-09-14 2022-11-22 陕西耕辰科技有限公司 Grain flow measuring device, grain flow measuring method, conveying equipment and harvester
CN115682895B (en) * 2022-12-29 2023-04-07 中国电子科技集团公司信息科学研究院 Self-driven sensor and preparation method thereof
CN116753832B (en) * 2023-08-21 2023-10-27 电子科技大学 Ion gradient power generation type tensile strain sensor and preparation method thereof

Family Cites Families (7)

* Cited by examiner, † Cited by third party
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US7449811B2 (en) * 2004-11-26 2008-11-11 The University Of Tokyo Electrostatic induction conversion device
JP5081832B2 (en) * 2006-10-30 2012-11-28 三洋電機株式会社 Electrostatic operation device
CN102640411B (en) * 2010-01-14 2014-12-31 欧姆龙株式会社 Electrostatic induction power generator
JP2012138514A (en) * 2010-12-27 2012-07-19 Asahi Glass Co Ltd Portable device
CN103368458B (en) * 2012-11-30 2016-01-20 北京纳米能源与系统研究所 Impulse generator and generating set
CN103368450B (en) * 2013-01-28 2016-02-03 北京纳米能源与系统研究所 Utilize the shoe-pad of the electric nano generator of friction
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