CN105181203A - Flexible tactile sensing array structure - Google Patents

Flexible tactile sensing array structure Download PDF

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Publication number
CN105181203A
CN105181203A CN201510463245.2A CN201510463245A CN105181203A CN 105181203 A CN105181203 A CN 105181203A CN 201510463245 A CN201510463245 A CN 201510463245A CN 105181203 A CN105181203 A CN 105181203A
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induction electrode
electrode
dielectric base
array structure
sensor array
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CN201510463245.2A
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CN105181203B (en
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孟博
程晓亮
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Beijing Micron Technology Co ltd
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Beijing Micron Technology Co ltd
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  • Measurement And Recording Of Electrical Phenomena And Electrical Characteristics Of The Living Body (AREA)

Abstract

The invention discloses a flexible tactile sensing array structure, belonging to the technical field of flexible tactile sensing arrays. The flexible tactile sensing array structure achieves acquisition of tactile signals through an integrated frictional electricity tactile sensing array. The flexible tactile sensing array structure comprises the frictional electricity tactile sensing array composed of a plurality of frictional electricity sensing units, an upper grounding electrode and a lower grounding electrode. Each sensing unit is composed of an upper friction layer, an upper insulating substrate, a lower friction layer, a lower insulating substrate, an upper induction electrode and a lower induction electrode. The upper insulating substrates and the lower insulating substrates are made of polyimide thin films. A micrometer array structure with a gold-plated surface serves as each upper friction layer and is arranged on the back surface of each upper insulating substrate, and the lower insulating substrates serve as the lower friction layers. The flexible tactile sensing array structure provides active sensing signals through the frictional electricity sensing units, and has the functions of energy acquisition and self-powering. The grounding electrodes achieve the double/single electrode signal acquisition mode, can effectively simplify the device structure, reduce signal interference between adjacent units, and effectively improve the resolution.

Description

A kind of softness haptic perception sensor array structure
Technical field
The present invention relates to a kind of softness haptic perception sensor array structure, belong to the softness haptic perception sensor array technical field based on electrification by friction and electrostatic induction principle.
Background technology
Rely on vision, the sense of hearing, sense of touch etc., people are experienced the excellence of world around.For the disabled, the exploitation of the bionical devices such as artificial cochlea, artificial retina, artificial electron's skin can help recovered part or complete motion or perception.By electronic skin sensed pressure, the information such as shape, size, hardness of judgment object is the potential approach reproducing sensitive sense of touch.
Summary of the invention
In order to overcome the deficiencies in the prior art, the invention provides a kind of softness haptic perception sensor array structure.
A kind of softness haptic perception sensor array structure, by integrated friction electric touch sensor array, realizes the collection to haptic signal.
A kind of softness haptic perception sensor array structure, comprises the friction electricity sensor array and upper ground-electrode, lower ground-electrode that are made up of the electric sensing unit of multiple friction.Wherein sensing unit is made up of upper frictional layer, upper dielectric base, lower frictional layer, lower dielectric base and upper induction electrode, lower induction electrode.
Dielectric base described in such scheme is flexible insulating material, as polyethylene terephthalate (polyethyleneterephthalate, PET), polyimide (Polyimide, PI), Polyvinylchloride (polyvinylchloride, PVC), tygon (polyethylene, or polystyrene (Polystyrene, PS) etc. PE).
Described in such scheme, upper induction electrode, lower induction electrode and upper ground-electrode, lower ground-electrode are the material of good conductivity, as the metal such as copper, gold, and indium tin oxide semiconductor (ITO) etc.; Also comprise the conducting polymers such as PEDOT.
Upper frictional layer, lower frictional layer described in such scheme, be preferably the bi-material attracting charge capability to differ greatly, or possess different surfaces structure and produce the same material of charged difference.As dimethyl silicone polymer (polydimethylsiloxane, PDMS) and PET (polyethyleneterephthalate, PET), or polyimide (Polyimide, PI) and gold etc.
Advantage of the present invention is:
1, softness haptic perception sensor array provided by the invention utilizes the simple structural design of structure, cheap processing cost, realizes highly sensitive haptic signal collection.
2, softness haptic perception sensor array provided by the invention utilizes the electric sensing unit of friction to provide active sensing signal, can possess collecting energy simultaneously and complete self-powered ability.
3, by the design of ground-electrode, realize two unipolar signals collecting pattern, effectively can not only simplify device architecture, greatly reduce the signal disturbing between adjacent cells simultaneously, effectively improve resolution.
Accompanying drawing explanation
When considered in conjunction with the accompanying drawings, by referring to detailed description below, more completely can understand the present invention better and easily learn wherein many adjoint advantages, but accompanying drawing described herein is used to provide a further understanding of the present invention, form a part of the present invention, schematic description and description of the present invention, for explaining the present invention, does not form inappropriate limitation of the present invention, as schemed wherein:
Fig. 1 is the cross section structure schematic diagram of upper dielectric base of the present invention.
Fig. 2 is the cross section structure schematic diagram of lower dielectric base of the present invention.
Fig. 3 is top electrode array and the grounding electrode structure schematic diagram of softness haptic perception sensor array of the present invention.
Fig. 4 is bottom electrode array and the grounding electrode structure schematic diagram of softness haptic perception sensor array of the present invention.
Below in conjunction with drawings and Examples, the present invention is further described.
Embodiment
Obviously, the many modifications and variations that those skilled in the art do based on aim of the present invention belong to protection scope of the present invention.
Embodiment 1: as shown in Figure 1, Figure 2, Figure 3 and Figure 4, a kind of softness haptic perception sensor array structure, comprising: upper dielectric base 1, lower dielectric base 2, upper frictional layer 3, upper induction electrode array 40, upper induction electrode array 50.Wherein go up ground-electrode, lower ground-electrode does not indicate in the drawings.
Upper dielectric base 1, lower dielectric base 2 are Kapton.
The micrometre array structure of surface gold-plating, as upper frictional layer 3, is positioned at dielectric base 1 back side, and lower dielectric base 2 is simultaneously double does lower frictional layer.
Figure 3 shows that the structural representation of induction electrode array 40, lower induction electrode array 50 and upper ground-electrode 41 and lower ground-electrode 51.
Upper induction electrode array 40, upper ground-electrode 41 are positioned at dielectric base 1 front, are graphically formed by same layer metal copper film.
Lower induction electrode array 50, lower ground-electrode 51 are positioned at lower dielectric base 2 back side, are graphically formed by same layer metal copper film.
Upper induction electrode array 40, lower induction electrode array 50 form horizontal stroke, vertical array respectively, corresponding to each sensing unit, upper ground-electrode 41, lower ground-electrode 51 and upper induction electrode array 40, lower induction electrode array 50 insulate, and be filled in induction electrode array 40, lower induction electrode array 50 gap, form the encirclement to upper induction electrode array 40, lower induction electrode array 50.
Above to principle of the present invention and embodiment, concrete annotation is carried out by example to the present invention, to help central principle and the method for understanding this aspect.The present invention is not limited to above-mentioned embodiment, and this description should not be construed as limitation of the present invention, and those skilled in the art are under the prerequisite not deviating from flesh and blood of the present invention, and any improvement, replacement etc. done all belong in the scope of the invention.

Claims (10)

1. a softness haptic perception sensor array structure, is characterized in that, by integrated friction electric touch sensor array, realizing the collection to haptic signal.
2. a kind of softness haptic perception sensor array structure according to claim 1, is characterized in that comprising the friction electricity sensor array that is made up of the electric sensing unit of multiple friction and upper ground-electrode, lower ground-electrode forms.
3. a kind of softness haptic perception sensor array structure according to claim 1, is characterized in that sensing unit is made up of dielectric base, upper frictional layer, lower frictional layer and upper induction electrode, lower induction electrode, and dielectric base is upper dielectric base and lower dielectric base.
4. a kind of softness haptic perception sensor array structure according to claim 2, is characterized in that having upper dielectric base, lower dielectric base, upper frictional layer, upper induction electrode array, upper induction electrode array;
Upper dielectric base, lower dielectric base are Kapton;
The micrometre array structure of surface gold-plating, as upper frictional layer, is positioned at the dielectric base back side, and lower dielectric base is simultaneously double does lower frictional layer.
5. a kind of softness haptic perception sensor array structure according to claim 4, is characterized in that induction electrode array, upper ground-electrode is positioned at dielectric base front, graphically formed by same layer metal copper film,
Lower induction electrode array, lower ground-electrode are positioned at the lower dielectric base back side, are graphically formed by same layer metal copper film.
6. a kind of softness haptic perception sensor array structure according to claim 5, it is characterized in that induction electrode array, lower induction electrode array forms horizontal stroke respectively, indulge array, corresponding to each sensing unit, upper ground-electrode, lower ground-electrode then insulate with upper induction electrode array, lower induction electrode array, and be filled in induction electrode array, lower induction electrode array gap, form the encirclement to upper induction electrode array, lower induction electrode array.
7. a kind of softness haptic perception sensor array structure according to claim 3, is characterized in that dielectric base is flexible insulating material, is polyethylene terephthalate, polyimide, Polyvinylchloride, tygon or polystyrene.
8. a kind of softness haptic perception sensor array structure according to claim 3, is characterized in that induction electrode, lower induction electrode and upper ground-electrode, lower ground-electrode is the material of good conductivity, is copper, metal or indium tin oxide semiconductor.
9. a kind of softness haptic perception sensor array structure according to claim 3, is characterized in that induction electrode, lower induction electrode and upper ground-electrode, lower ground-electrode is the material of good conductivity, comprise PEDOT conducting polymer.
10. a kind of softness haptic perception sensor array structure according to claim 3, it is characterized in that frictional layer, lower frictional layer, be preferably the bi-material attracting charge capability to differ greatly, dimethyl silicone polymer and PET, polyimide and gold;
Upper frictional layer, lower frictional layer or produce the same material of charged difference for possessing different surfaces structure; Dimethyl silicone polymer and PET, polyimide and gold.
CN201510463245.2A 2015-07-31 2015-07-31 A kind of softness haptic perception sensor array structure Expired - Fee Related CN105181203B (en)

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CN108762525A (en) * 2018-05-14 2018-11-06 苏州大学 Six axle sensor of self-powered and its manufacturing method
CN110383215A (en) * 2017-01-06 2019-10-25 沙特基础工业全球技术公司 Friction electric transducer with touch feedback
CN111273823A (en) * 2020-03-17 2020-06-12 东南大学 Flexible self-powered sign board based on triboelectricity
CN111595491A (en) * 2020-05-18 2020-08-28 重庆大学 Low-crosstalk matrix type touch sensing unit capable of being infinitely subdivided
WO2021147454A1 (en) * 2020-01-20 2021-07-29 腾讯科技(深圳)有限公司 Flexible capacitive tactile sensor, preparation method therefor, and tactile sensing system

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CN204214475U (en) * 2014-11-11 2015-03-18 浙江大学 A kind of prosthetic hand Wearable flexible touch sensation sensor and sense of touch pick-up unit thereof
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CN103973154A (en) * 2013-01-28 2014-08-06 北京大学 Mini-type generator with single friction surface and manufacturing method thereof
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110383215A (en) * 2017-01-06 2019-10-25 沙特基础工业全球技术公司 Friction electric transducer with touch feedback
CN108762525A (en) * 2018-05-14 2018-11-06 苏州大学 Six axle sensor of self-powered and its manufacturing method
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WO2021147454A1 (en) * 2020-01-20 2021-07-29 腾讯科技(深圳)有限公司 Flexible capacitive tactile sensor, preparation method therefor, and tactile sensing system
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CN111273823A (en) * 2020-03-17 2020-06-12 东南大学 Flexible self-powered sign board based on triboelectricity
CN111595491A (en) * 2020-05-18 2020-08-28 重庆大学 Low-crosstalk matrix type touch sensing unit capable of being infinitely subdivided

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