CN104236535A - Dual-mass decoupling silicon microgyroscope based on flexible connection - Google Patents
Dual-mass decoupling silicon microgyroscope based on flexible connection Download PDFInfo
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- CN104236535A CN104236535A CN201410449942.8A CN201410449942A CN104236535A CN 104236535 A CN104236535 A CN 104236535A CN 201410449942 A CN201410449942 A CN 201410449942A CN 104236535 A CN104236535 A CN 104236535A
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- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
- G01C19/5684—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators the devices involving a micromechanical structure
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Abstract
The invention discloses a dual-mass decoupling silicon microgyroscope based on flexible connection. The dual-mass decoupling silicon microgyroscope comprises a base which is provided with an electric signal lead-out wire and a microgyroscope mechanical structural layer which is arranged on the base; the microgyroscope mechanical structural layer comprises a first substructure, a second substructure and a substructure connection device, and the first substructure is connected with the second substructure through the substructure connection device; two completely identical substructures are adopted to reduce the influence of the temperature and stress on the entire microgyroscope, the two substructures are symmetrically arranged on left and right sides, and the motion way of each substructure is linear motion in an x-y plane; by adopting the substructure connection device, the left substructure and the right substructure are integrated into a whole body, so that the consistency of the motion frequency of the two substructures can be guaranteed; moreover, the isolation of the drive motion from the detection motion can be guaranteed by adopting the substructure connection device, and the complete decoupling of the structural motion can be realized; the adoption of the substructure connection device ensures that drive parts and detection parts of the two substructure respectively make linear motion in opposite directions when the microgyroscope makes the drive motion and the detection motion.
Description
Technical field
The present invention relates to a kind of two quality decoupling zero silicon micro-gyroscopes based on flexibly connecting, belonging to microelectron-mechanical and micro-inertia measuring field.
Background technology
Silicon micromechanical gyroscope is a kind of novel gyroscope grown up on the basis of micro electro mechanical system (MEMS) technology, the product that micro electro mechanical system (MEMS) technology combines as microelectronics surface manufacturing process and silicon micromachining technique, expanding and extending of microelectric technique, sensing and detecting unit have organically been fused to one, not only inherit the feature of microelectric technique mass production, and the volume of sensor is reduced greatly, silicon micromechanical gyroscope, with advantages such as its volume are little, lightweight, low in energy consumption, integrated level is high, anti-overload ability is strong, is paid close attention to widely.Micromechanical gyro has broad application prospects at military, civil area.Can be applicable to the fields such as vehicle traction control system, driving stability system, camera stabilization system, aircraft systems stabilisation and military affairs.
Late 1980s, along with appearance and the development of micromachining technology, every country significantly carries out the research for silicon micromechanical vibratory gyroscope in the world, wherein the U.S., Britain, Germany, Japan, Korea S etc. in this respect research level walk the prostatitis in the world.Wherein most of mechanism study hotspot concentrates on the development of capacitive micro mechinery gyroscope instrument, and the silicon micro-gyroscope of research and development adopts the version of simple substance amount and the design proposal of not decoupling zero or half decoupling zero.Due to the reason such as mismachining tolerance and structural design, there is shortcomings such as being subject to mechanical couplings and axial acceleration impact, Detection capacitance amount is low, sensitivity is not high in condenser type vibrating micromechanical gyroscope.
Summary of the invention
Goal of the invention: for overcoming prior art deficiency, purport of the present invention in providing that a kind of volume is little, lightweight, precision is high, dynamic property is good, less energy consumption, cost are low, reliability is high, integrated based on the two quality decoupling zero silicon micro-gyroscopes flexibly connected.
Technical scheme: for solving the problems of the technologies described above, the present invention adopts following technical scheme:
Based on the two quality decoupling zero silicon micro-gyroscopes flexibly connected, comprise the pedestal being provided with electric signal extension line and the microthrust test physical construction layer be placed on pedestal;
Microthrust test physical construction layer comprises the first minor structure, the second minor structure and minor structure coupling arrangement, and the first minor structure is connected by minor structure coupling arrangement with the second minor structure;
First minor structure and the second minor structure are the angular velocity measurement minor structure that structure is identical, and described angular velocity measurement minor structure is axially symmetric structure, comprise mass, driving mechanism, testing agency and minor structure fixed pedestal; Driving mechanism has two, is located at the two ends up and down of mass respectively and is connected with the two ends up and down of mass respectively by affixed U-shaped folded beam; Testing agency has four, wherein two are located at the left and right sides of mass upper end and are connected with the left and right sides of mass upper end respectively by affixed U-shaped folded beam, and two other is located at the left and right sides of mass lower end and is connected with the left and right sides of mass lower end respectively by affixed U-shaped folded beam; Driving mechanism and testing agency are all fixed on pedestal by fixed pedestal.
Preferably, minor structure coupling arrangement is axially symmetric structure, to comprise between the first coupling arrangement fixed pedestal, the second coupling arrangement fixed pedestal, the 3rd coupling arrangement fixed pedestal, the first beam between contiguous block, the second beam between contiguous block, the 3rd beam contiguous block between contiguous block, the 4th beam;
Between the second beam, between contiguous block and the 4th beam, one end of contiguous block is connected to the two ends of the 3rd coupling arrangement fixed pedestal respectively by affixed parallel girder; Between the second beam, between contiguous block with the 4th beam, the other end of contiguous block is connected with the side in the middle part of the first minor structure and the second minor structure respectively by the U-shaped folded beam of activity; First minor structure and the opposite side in the middle part of the second minor structure respectively with contiguous block between the first beam and between the 3rd beam one end of contiguous block be connected, between the first beam, between contiguous block with the 3rd beam, the other end of contiguous block is connected with the first coupling arrangement fixed pedestal and the second coupling arrangement fixed pedestal respectively by the U-shaped folded beam of activity, can ensure stability and the sensitivity of double quality oscillatory type silicon micro-gyroscopes so further.
Preferably, affixed parallel girder has four, is respectively the first affixed parallel girder, the second affixed parallel girder, the 3rd affixed parallel girder and the 4th affixed parallel girder;
Between the second beam, one end of contiguous block is connected with the second affixed parallel girder one end with the 3rd coupling arrangement fixed pedestal by the first affixed parallel girder; Between the 4th beam, one end of contiguous block is connected with the other end of the 4th affixed parallel girder with the 3rd coupling arrangement fixed pedestal by the 3rd affixed parallel girder; The movable end of the two ends of the first parallel girder connecting link parallel girder affixed with first and the 3rd affixed parallel girder is respectively connected, and the movable end of the two ends of the second parallel girder connecting link parallel girder affixed with second and the 4th affixed parallel girder is respectively connected.
Preferably, described driving mechanism is micro drives capacitor mechanism, and described micro drives capacitor mechanism comprises driving movable comb braces, driving activity comb, drives fixed fingers and drive feedback fixed fingers;
Driving activity comb has two or more, is equidistantly vertically located at and drives on movable comb braces; Fixed fingers and drive feedback is driven to fix all equal with the quantity of movable comb, the both sides of each driving activity comb are combined with one respectively and drive fixed fingers and a drive feedback fixed fingers, each driving fixed fingers and drive feedback fixed fingers are all fixed on pedestal, and all drive feedback fixed fingers are connected as a single entity structure; Movable comb braces is driven to be connected with mass by affixed U-shaped folded beam.
Described testing agency is miniature Detection capacitance mechanism, and described miniature Detection capacitance mechanism comprises detected activity comb frame, detected activity comb, detects fixed fingers positive pole and detect fixed fingers negative pole;
Detected activity comb has two or more, is equidistantly vertically located on detected activity comb frame; Detect fixed fingers positive pole and detect fixed fingers negative pole all equal with the quantity of detected activity comb, the both sides of each detected activity comb are combined with one respectively and detect fixed fingers positive pole and a detection fixed fingers negative pole, each detection fixed fingers positive pole and detect fixed fingers negative pole and be all fixed on pedestal, detects fixed fingers positive pole and to be connected as a single entity structure; Detected activity comb frame is connected with mass by affixed U-shaped folded beam.
Described pedestal is provided with and drives input lead, drive feedback lead-in wire, detection signal lead-in wire positive pole and detection signal lead-in wire negative pole;
Drive input lead to be communicated to driving fixed fingers, drive feedback lead-in wire is communicated to drive feedback fixed fingers; Detection signal lead-in wire positive pole is communicated to and detects fixed fingers positive pole, and detection signal lead-in wire negative pole is communicated to and detects fixed fingers negative pole.
The NM technology of the present invention is prior art.
Compared with prior art, its beneficial effect is in the present invention:
(1) for reduction temperature and stress are on the impact of whole microthrust test, have employed identical two minor structures, two minor structures are symmetrically arranged, and mode of motion is the line motion in x-y plane;
(2) minor structure coupling arrangement is adopted, two minor structures in left and right are made to become an entirety, ensure that the consistance of two the sub-structure motion frequencies in left and right, and the design of minor structure coupling arrangement ensure that actuation movement and detects the isolation of motion, achieves the full decoupling of structure motion;
(3) when minor structure coupling arrangement ensure that gyroscope actuation movement and detects motion, the drive part of two minor structures and detecting portion are respectively line motion in opposite directions;
(4) minor structure inside adopts U-shaped folded beam to isolate drive part and detecting portion, achieve the motion of minor structure internal drive and detect the full decoupling of moving, and effectively can reduce the unrelieved stress of processing introducing, microthrust test is made to be operated within the scope of the linear elastic deformation of beam, vibration steadily, increase motion amplitude, improve detection sensitivity;
(5) by suitable gage system, formed and detect differential output, not only can eliminate pedestal along detection axis to acceleration noise signal, because the impact of the factors such as temperature is also reduced to bottom line by differential output, thus improve the signal to noise ratio (S/N ratio) of whole gyro;
(6) become the pivotal quantity of overlapping area and the design of Detection capacitance, can space be made full use of, enlarge markedly the quality factor of driving and sensed-mode, and improve the sensitivity of gyroscope.
Accompanying drawing explanation
Fig. 1 the present invention is based on the two quality decoupling zero silicon micro-gyroscope schematic diagram flexibly connected;
Fig. 2 the present invention is based on the two quality decoupling zero silicon micro-gyroscope minor structure schematic diagram flexibly connected;
Fig. 3 the present invention is based on the two quality decoupling zero silicon micro-gyroscope minor structure coupling arrangement schematic diagram flexibly connected;
Fig. 4 is the driving mechanism schematic diagram that the present invention is based on the two quality decoupling zero silicon micro-gyroscopes flexibly connected;
Fig. 5 is the testing agency's schematic diagram that the present invention is based on the two quality decoupling zero silicon micro-gyroscopes flexibly connected;
Fig. 6 the present invention is based on the signal lead schematic diagram on two quality decoupling zero silicon micro-gyroscope pedestals of flexibly connecting.
Embodiment
In order to understand the present invention better, illustrate content of the present invention further below in conjunction with embodiment, but content of the present invention is not only confined to the following examples.
Composition graphs 1,2, the present invention is based on the two quality decoupling zero silicon micro-gyroscopes flexibly connected, for measuring the input angular velocity perpendicular to microthrust test structural plan.Gyroscope one-piece construction is made up of two parts, comprises the glass pedestal being manufactured with electric signal extension line and the microthrust test physical construction layer be placed in glass pedestal.Gyroscope upper strata physical construction is made up of a pair identical first minor structure 1a, the second minor structure 1b, the first minor structure 1a, the symmetrical distribution of the second minor structure 1b, and is connected by minor structure coupling arrangement 2, first minor structure 1a is connected with the first fixed pedestal 6a1 with the second affixed U-shaped beam 7a2 by the first affixed U-shaped beam 7a1, be connected with the 3rd fixed pedestal 6a3 by the 6th affixed U-shaped beam 7a6, be connected with the 5th fixed pedestal 6a5 by the 7th affixed U-shaped beam 7a7, be connected with the 7th fixed pedestal 6a7 with the 11 affixed U-shaped beam 7a11 by the tenth affixed U-shaped beam 7a10, be connected with the 8th fixed pedestal 6a8 with the 15 affixed U-shaped beam 7a15 by the 14 affixed U-shaped beam 7a14, be connected with the 4th fixed pedestal 6a4 by the 19 affixed U-shaped beam 7a19, be connected with the 6th fixed pedestal 6a6 by the 18 affixed U-shaped beam 7a18, be connected with the second fixed pedestal 6a2 with the 23 affixed U-shaped beam 7a23 by the 22 affixed U-shaped beam 7a22,
Second minor structure 1b and the first minor structure 1a as shown in the figure simultaneously, structure is identical, the same first affixed U-shaped beam 7b1 that passes through is connected with the first fixed pedestal 6b1 with the second affixed U-shaped beam 7b2, be connected with the 3rd fixed pedestal 6b3 by the 6th affixed U-shaped beam 7b6, be connected with the 5th fixed pedestal 6b5 by the 7th affixed U-shaped beam 7b7, be connected with the 7th fixed pedestal 6b7 with the 11 affixed U-shaped beam 7b11 by the tenth affixed U-shaped beam 7b10, be connected with the 8th fixed pedestal 6b8 with the 15 affixed U-shaped beam 7b15 by the 14 affixed U-shaped beam 7b14, be connected with the 4th fixed pedestal 6b4 by the 19 affixed U-shaped beam 7b19, be connected with the 6th fixed pedestal 6b6 by the 18 affixed U-shaped beam 7b18, be connected with the second fixed pedestal 6b2 with the 23 affixed U-shaped beam 7b23 by the 22 affixed U-shaped beam 7b22, its annexation is identical with the first minor structure.The substrate used in the present embodiment is substrate of glass, also other base material such as silicon, polymkeric substance can be used, all fixed pedestals are all installed on fixed pedestal bonding point on the glass substrate, make the mechanical structure portion on upper strata unsettled on the glass substrate part of lower floor.
Composition graphs 2, is described for the first minor structure 1a below.First minor structure 1a is by mass 5a, be fixed on the first fixed pedestal 6a1 on pedestal, be fixed on the second fixed pedestal 6a2 on pedestal, be fixed on the 3rd fixed pedestal 6a3 on pedestal, be fixed on the 4th fixed pedestal 6a4 on pedestal, be fixed on the 5th fixed pedestal 6a5 on pedestal, be fixed on the 6th fixed pedestal 6a6 on pedestal, be fixed on the 7th fixed pedestal 6a7 on pedestal, be fixed on the 8th fixed pedestal 6a8 on pedestal, first driving mechanism 3a1, second driving mechanism 3a2, first testing agency 4a1, second testing agency 4a2, 3rd testing agency 4a3, 4th testing agency 4a4, first affixed U-shaped folded beam 7a1, second affixed U-shaped folded beam 7a2, 3rd movable U-shaped folded beam 7a3, 4th movable U-shaped folded beam 7a4, 5th movable U-shaped folded beam 7a5, 6th affixed U-shaped folded beam 7a6, 7th affixed U-shaped folded beam 7a7, 8th movable U-shaped folded beam 7a8, 9th movable U-shaped folded beam 7a9, tenth affixed U-shaped folded beam 7a10, 11 affixed U-shaped folded beam 7a11, 12 movable U-shaped folded beam 7a12, 13 movable U-shaped folded beam 7a13, 14 affixed U-shaped folded beam 7a14, 15 affixed U-shaped folded beam 7a15, 16 movable U-shaped folded beam 7a16, 17 movable U-shaped folded beam 7a17, 18 affixed U-shaped folded beam 7a18, 19 affixed U-shaped folded beam 7a19, 20 movable U-shaped folded beam 7a20, 21 movable U-shaped folded beam 7a21, 22 affixed U-shaped folded beam 7a22, 23 affixed U-shaped folded beam 7a23, 24 movable U-shaped folded beam 7a24 forms, first driving mechanism 3a1 is arranged on the side of mass 5a, second driving mechanism 3a2 is arranged on the relative opposite side of mass 5a, first driving mechanism 3a1 is connected by the 3rd movable U-shaped folded beam 7a3 and the 24 movable U-shaped folded beam 7a24 with between mass 5a, 3rd movable U-shaped folded beam 7a3 and the 24 movable U-shaped folded beam 7a24 is arranged on the two ends of the first driving mechanism 3a1, second driving mechanism 3a2 is connected by the 12 movable U-shaped folded beam 7a12 and the 13 movable U-shaped folded beam 7a13 with between mass 5a, 12 movable U-shaped folded beam 7a12 and the 13 movable U-shaped folded beam 7a13 is arranged on the two ends of the first driving mechanism 3a1, to drive this mass 5a in side-to-side vibrations from a driving direction, first testing agency 4a1 and the 3rd testing agency 4a3 is arranged on the side of mass 5a, second testing agency 4a2 is arranged on the relative opposite side of mass 5a with the 4th testing agency 4a4, corresponding with the first testing agency 4a1 and the 3rd testing agency 4a3 respectively, first testing agency 4a1 is connected by the 4th movable U-shaped folded beam 7a4 and the 5th movable U-shaped folded beam 7a5 with between mass 5a, 4th movable U-shaped folded beam 7a4 and the 5th movable U-shaped folded beam 7a5 is arranged on the two ends of the first testing agency 4a1, second testing agency 4a2 is connected by the 20 movable U-shaped folded beam 7a20 and the 21 movable U-shaped folded beam 7a21 with between mass 5a, 20 movable U-shaped folded beam 7a20 and the 21 movable U-shaped folded beam 7a21 is arranged on the two ends of the second testing agency 4a2,3rd testing agency 4a3 is connected by the 8th movable U-shaped folded beam 7a8 and the 9th movable U-shaped folded beam 7a9 with between mass 5a, 8th movable U-shaped folded beam 7a8 and the 9th movable U-shaped folded beam 7a9 is arranged on the two ends of the 3rd testing agency 4a3,4th testing agency 4a4 is connected by the 16 movable U-shaped folded beam 7a16 and the 17 movable U-shaped folded beam 7a17 with between mass 5a, 16 movable U-shaped folded beam 7a16 and the 17 movable U-shaped folded beam 7a17 is arranged on the two ends of the 4th testing agency 4a4, with Detection job block 5a in the vibration perpendicular to the mass 5a on driving direction.The first driving mechanism 3a1 in minor structure, the second driving mechanism 3a2 are limited in X-direction motion, and the first testing agency 4a1 in minor structure, the second testing agency 4a2, the 3rd testing agency 4a3, the 4th testing agency 4a4 are limited in Y direction motion.
Similarly, have equally for the second minor structure 1b, the second minor structure 1b is by mass 5b, be fixed on the first fixed pedestal 6b1 on pedestal, be fixed on the second fixed pedestal 6b2 on pedestal, be fixed on the 3rd fixed pedestal 6b3 on pedestal, be fixed on the 4th fixed pedestal 6b4 on pedestal, be fixed on the 5th fixed pedestal 6b5 on pedestal, be fixed on the 6th fixed pedestal 6b6 on pedestal, be fixed on the 7th fixed pedestal 6b7 on pedestal, be fixed on the 8th fixed pedestal 6b8 on pedestal, first driving mechanism 3b1, second driving mechanism 3b2, first testing agency 4b1, second testing agency 4b2, 3rd testing agency 4b3, 4th testing agency 4b4, first affixed U-shaped folded beam 7b1, second affixed U-shaped folded beam 7b2, 3rd movable U-shaped folded beam 7b3, 4th movable U-shaped folded beam 7b4, 5th movable U-shaped folded beam 7b5, 6th affixed U-shaped folded beam 7b6, 7th affixed U-shaped folded beam 7b7, 8th movable U-shaped folded beam 7b8, 9th movable U-shaped folded beam 7b9, tenth affixed U-shaped folded beam 7b10, 11 affixed U-shaped folded beam 7b11, 12 movable U-shaped folded beam 7b12, 13 movable U-shaped folded beam 7b13, 14 affixed U-shaped folded beam 7b14, 15 affixed U-shaped folded beam 7b15, 16 movable U-shaped folded beam 7b16, 17 movable U-shaped folded beam 7b17, 18 affixed U-shaped folded beam 7b18, 19 affixed U-shaped folded beam 7b19, 20 movable U-shaped folded beam 7b20, 21 movable U-shaped folded beam 7b21, 22 affixed U-shaped folded beam 7b22, 23 affixed U-shaped folded beam 7b23, 24 movable U-shaped folded beam 7b24 forms, first driving mechanism 3b1 is arranged on the side of mass 5b, second driving mechanism 3b2 is arranged on the relative opposite side of mass 5b, first driving mechanism 3b1 is connected by the 3rd movable U-shaped folded beam 7b3 and the 24 movable U-shaped folded beam 7b24 with between mass 5b, 3rd movable U-shaped folded beam 7b3 and the 24 movable U-shaped folded beam 7b24 is arranged on the two ends of the first driving mechanism 3b1, second driving mechanism 3b2 is connected by the 12 movable U-shaped folded beam 7b12 and the 13 movable U-shaped folded beam 7b13 with between mass 5b, 12 movable U-shaped folded beam 7b12 and the 13 movable U-shaped folded beam 7b13 is arranged on the two ends of the first driving mechanism 3b1, to drive this mass 5b in side-to-side vibrations from a driving direction, first testing agency 4b1 and the 3rd testing agency 4b3 is arranged on the side of mass 5b, second testing agency 4b2 is arranged on the relative opposite side of mass 5b with the 4th testing agency 4b4, corresponding with the first testing agency 4b1 and the 3rd testing agency 4b3 respectively, first testing agency 4b1 is connected by the 4th movable U-shaped folded beam 7b4 and the 5th movable U-shaped folded beam 7b5 with between mass 5b, 4th movable U-shaped folded beam 7b4 and the 5th movable U-shaped folded beam 7b5 is arranged on the two ends of the first testing agency 4b1, second testing agency 4b2 is connected by the 20 movable U-shaped folded beam 7b20 and the 21 movable U-shaped folded beam 7b21 with between mass 5b, 20 movable U-shaped folded beam 7b20 and the 21 movable U-shaped folded beam 7b21 is arranged on the two ends of the second testing agency 4b2,3rd testing agency 4b3 is connected by the 8th movable U-shaped folded beam 7b8 and the 9th movable U-shaped folded beam 7b9 with between mass 5b, 8th movable U-shaped folded beam 7b8 and the 9th movable U-shaped folded beam 7b9 is arranged on the two ends of the 3rd testing agency 4b3,4th testing agency 4b4 is connected by the 16 movable U-shaped folded beam 7b16 and the 17 movable U-shaped folded beam 7b17 with between mass 5b, 16 movable U-shaped folded beam 7b16 and the 17 movable U-shaped folded beam 7b17 is arranged on the two ends of the 4th testing agency 4b4, with Detection job block 5b in the vibration perpendicular to the mass 5b on driving direction.The first driving mechanism 3b1 in minor structure, the second driving mechanism 3b2 are limited in X-direction motion, and the first testing agency 4b1 in minor structure, the second testing agency 4b2, the 3rd testing agency 4b3, the 4th testing agency 4b4 are limited in Y direction motion.
Composition graphs 3, minor structure coupling arrangement 2 comprises the first coupling arrangement fixed pedestal 6c1 be fixed on pedestal, be fixed on the second coupling arrangement fixed pedestal 6c2 on pedestal, be fixed on the 3rd coupling arrangement fixed pedestal 6c3 on pedestal, first is fixedly connected with U-shaped folded beam 7c1, second is fixedly connected with U-shaped folded beam 7c2, 3rd movable U-shaped folded beam 7c3, 4th movable U-shaped folded beam 7c4, 5th movable U-shaped folded beam 7c5, 6th movable U-shaped folded beam 7c6, 7th is fixedly connected with U-shaped folded beam 7c7, 8th is fixedly connected with U-shaped folded beam 7c8, 9th movable U-shaped folded beam 7c9, tenth movable U-shaped folded beam 7c10, 11 movable U-shaped folded beam 7c11, 12 movable U-shaped folded beam 7c12, contiguous block 9c1 between the first beam, contiguous block 9c2 between the second beam, contiguous block 9c3 between the 3rd beam, contiguous block 9c4 between the 4th beam, first affixed parallel girder 11c1, second affixed parallel girder 11c2, 3rd affixed parallel girder 11c3, 4th affixed parallel girder 11c4, first parallel girder connecting link 12c1, second parallel girder connecting link 12c2, between the first beam, contiguous block 9c1 is fixedly connected with U-shaped folded beam 7c1 and second by first and is fixedly connected with U-shaped folded beam 7c2 and is connected with the first fixed pedestal 6c1, between the first beam, one end of contiguous block 9c1 U-shaped folded beam 7c3 movable with the 3rd and the 4th movable U-shaped folded beam 7c4 is respectively connected, 3rd movable U-shaped folded beam 7c3 is connected with mass 5a respectively with the other end of the 4th movable U-shaped folded beam 7c4, between the second beam, one end of contiguous block 9c2 U-shaped folded beam 7c5 movable with the 5th and the 6th movable U-shaped folded beam 7c6 is respectively connected, 5th movable U-shaped folded beam 7c5 is connected with mass 5a respectively with the other end of the 6th movable U-shaped folded beam 7c6, between the second beam, contiguous block 9c2 is connected with the 3rd fixed pedestal 6c3 with the second affixed parallel girder 11c2 by the first affixed parallel girder 11c1, between the 3rd beam, contiguous block 9c3 is fixedly connected with U-shaped folded beam 7c7 and the 8th by the 7th and is fixedly connected with U-shaped folded beam 7c8 and is connected with the second fixed pedestal 6c2, between the 3rd beam, one end of contiguous block 9c3 U-shaped folded beam 7c9 movable with the 9th and the tenth movable U-shaped folded beam 7c10 is respectively connected, 9th movable U-shaped folded beam 7c9 is connected with mass 5b respectively with the other end of the tenth movable U-shaped folded beam 7c10, between the 4th beam, one end of contiguous block 9c4 U-shaped folded beam 7c11 movable with the 11 and the 12 movable U-shaped folded beam 7c12 is respectively connected, 11 movable U-shaped folded beam 7c11 is connected with mass 5b respectively with the other end of the 12 movable U-shaped folded beam 7c12, between the 4th beam, contiguous block 9c4 is connected with the 3rd fixed pedestal 6c3 with the 4th affixed parallel girder 11c4 by the 3rd affixed parallel girder 11c3, the movable end of the two ends of the first parallel girder connecting link 12c1 parallel girder 11c1 affixed with first and the 3rd affixed parallel girder 11c3 is respectively connected, the movable end of the two ends of the second parallel girder connecting link 12c2 parallel girder 11c2 affixed with second and the 4th affixed parallel girder 11c4 respectively connects the first minor structure 1a and the second minor structure 1b.Minor structure coupling arrangement, the first minor structure 1a is made to become as a whole with the second minor structure 1b, ensure that the consistance of two sub-structure motion frequencies, the line that the drive part of two minor structures when gyroscope actuation movement and detection motion and detecting portion are respectively in opposite directions moves, and the design of minor structure coupling arrangement ensure that actuation movement and detects the isolation of motion, achieves the full decoupling of structure motion.
When operating, first driving mechanism 3a1, the second driving mechanism 3a2 by the 3rd movable U-shaped folded beam 7a3, the 12 movable U-shaped folded beam 7a12, the 13 movable U-shaped folded beam 7a13, the 24 movable U-shaped folded beam 7a24, drive mass 5a to vibrate back and forth in the X-axis direction under the effect of input drive signal.Now, if having turning rate input in the Z-axis direction, so mass 5a forced vibration that the Coriolis force produced when being subject to X axis vibration is in the Y-axis direction produced in the Y direction.When the vibration in X-direction is constant, in Y-direction, the Coriolis force of forced vibration is proportional to the input angular velocity in Z-direction, thus the amplitude of the first testing agency 4a1, the second testing agency 4a2, the 3rd testing agency 4a3, the 4th forced vibration of testing agency 4a4 measurement quality block 5a in Y-axis can be passed through, thus learn the input angular velocity size in Z-direction.
Microthrust test first minor structure driving mechanism, as shown in Fig. 4 left-half, is made up of the first driving mechanism 3a1, the second driving mechanism 3a2; First driving mechanism 3a1 comprises and is arranged at first on pedestal and drives fixed pedestal and fixed fingers 13a1, be arranged at the first drive feedback fixed pedestal on pedestal and drive feedback fixed fingers 13a2, first and drive movable comb braces and movable comb 14a1, the second driving mechanism 3a2 to comprise to be arranged at second on pedestal to drive fixed pedestal and fixed fingers 13a3, be arranged at the second drive feedback fixed pedestal on pedestal and drive feedback fixed fingers 13a4, second drives movable comb braces and movable comb 14a2; First driving mechanism and the second driving mechanism are symmetrical arranged, but because two driving mechanisms will to mass generation driving force in the same way, therefore in the first driving mechanism arranged as shown in Figure 4 and the second driving mechanism, be the comb structure on right side as driving comb, regulate driving signal frequency in the circuit that the comb structure in left side generates as drive feedback comb feedback signal to drive singal, be in optimum Working to make whole device.Illustrate for the first driving mechanism 3a1 below, in the present embodiment, the movable comb braces of the first driving mechanism 3a1 and movable comb 14a1 comprise five groups of identical comb structures from left to right, but also only can arrange one group of comb structure and can not affect realization of the present invention.By driving first alternating voltage fixed pedestal and fixed fingers 13a1 applying band direct current biasing, adopt electrostatic type of drive to drive mass 5a to do intermittent control shaking, detect actuation movement condition feedback by the first drive feedback fixed pedestal and drive feedback fixed fingers 13a2 and regulate driving circuit.To the second driving mechanism 3a2, same by driving second alternating voltage fixed pedestal and fixed fingers 13a3 applying band direct current biasing, adopt electrostatic type of drive to drive mass 5a to do intermittent control shaking, detect actuation movement condition feedback by the second drive feedback fixed pedestal and drive feedback fixed fingers 13a4 and regulate driving circuit.
Microthrust test second minor structure driving mechanism, as shown in Fig. 4 right half part, is made up of the first driving mechanism 3b1, the second driving mechanism 3b2; First driving mechanism 3b1 comprises and is arranged at first on pedestal and drives fixed pedestal and fixed fingers 13b1, be arranged at the first drive feedback fixed pedestal on pedestal and drive feedback fixed fingers 13b2, first and drive movable comb braces and movable comb 14b1, the second driving mechanism 3b2 to comprise to be arranged at second on pedestal to drive fixed pedestal and fixed fingers 13b3, be arranged at the second drive feedback fixed pedestal on pedestal and drive feedback fixed fingers 13b4, second drives movable comb braces and movable comb 14b2; First driving mechanism and the second driving mechanism are symmetrical arranged, but because two driving mechanisms will to mass generation driving force in the same way, therefore in the first driving mechanism arranged as shown in Figure 4 and the second driving mechanism, be the comb structure in left side as driving comb, regulate driving signal frequency in the circuit that the comb structure on right side generates as drive feedback comb feedback signal to drive singal, be in optimum Working to make whole device.Illustrate for the first driving mechanism 3b1 below, in the present embodiment, the movable comb braces of the first driving mechanism 3b1 and movable comb 14b1 comprise five groups of identical comb structures from left to right, but also only can arrange one group of comb structure and can not affect realization of the present invention.By driving first alternating voltage fixed pedestal and fixed fingers 13b1 applying band direct current biasing, adopt electrostatic type of drive to drive mass 5b to do intermittent control shaking, detect actuation movement condition feedback by the first drive feedback fixed pedestal and drive feedback fixed fingers 13b2 and regulate driving circuit.To the second driving mechanism 3b2, same by driving second alternating voltage fixed pedestal and fixed fingers 13b3 applying band direct current biasing, adopt electrostatic type of drive to drive mass 5b to do intermittent control shaking, detect actuation movement condition feedback by the second drive feedback fixed pedestal and drive feedback fixed fingers 13b4 and regulate driving circuit.
The testing agency of microthrust test first minor structure, as shown in Fig. 5 left-half, is made up of the first testing agency 4a1, the second testing agency 4a2, the 3rd testing agency 4a3, the 4th testing agency 4a4, first testing agency 4a1 comprises the first detection fixed pedestal and the fixed fingers positive pole 15a1 be arranged on pedestal, be arranged at first on pedestal and detect fixed pedestal and fixed fingers negative pole 15a2, first detected activity comb frame and movable comb 16a1, second testing agency 4a2 comprises the second detection fixed pedestal and the fixed fingers positive pole 15a3 be arranged on pedestal, be arranged at second on pedestal and detect fixed pedestal and fixed fingers negative pole 15a4, second detected activity comb frame and movable comb 16a2, 3rd testing agency 4a3 comprises the 3rd detection fixed pedestal and the fixed fingers positive pole 15a5 be arranged on pedestal, be arranged at the 3rd on pedestal and detect fixed pedestal and fixed fingers negative pole 15a6, 3rd detected activity comb frame and movable comb 16a3, 4th testing agency 4a4 comprises the 4th detection fixed pedestal and the fixed fingers positive pole 15a7 be arranged on pedestal, be arranged at the 4th on pedestal and detect fixed pedestal and fixed fingers negative pole 15a8, 4th detected activity comb frame and movable comb 16a4.Illustrate for the first testing agency 4a1 below, in the present embodiment, the movable comb braces of the first testing agency 4a1 and movable comb 16a1 comprise three groups of identical comb structures from top to bottom, but also only can arrange one group of comb structure and can not affect realization of the present invention.When microthrust test works, when there is turning rate input in Z axis, mass 5a will at Y direction intermittent control shaking, drive the first testing agency 4a1 equally at Y direction intermittent control shaking by U-shaped folded beam, first detected activity comb frame and movable comb 16a1 make the electric capacity on fixed fingers positive pole 15a1 and fixed fingers negative pole 15a2 change at the intermittent control shaking of Y direction, the variable quantity of electric capacity is directly proportional to the amplitude of the forced vibration of mass 5a in Y-axis, and the variable quantity of measurement Detection capacitance can learn the input angular velocity size in Z-direction.
The testing agency of microthrust test second minor structure, as shown in Fig. 5 right half part, is made up of the first testing agency 4b1, the second testing agency 4b2, the 3rd testing agency 4b3, the 4th testing agency 4b4, first testing agency 4b1 comprises the first detection fixed pedestal and the fixed fingers positive pole 15b1 be arranged on pedestal, be arranged at first on pedestal and detect fixed pedestal and fixed fingers negative pole 15b2, first detected activity comb frame and movable comb 16b1, second testing agency 4b2 comprises the second detection fixed pedestal and the fixed fingers positive pole 15b3 be arranged on pedestal, be arranged at second on pedestal and detect fixed pedestal and fixed fingers negative pole 15b4, second detected activity comb frame and movable comb 16b2, 3rd testing agency 4b3 comprises the 3rd detection fixed pedestal and the fixed fingers positive pole 15b5 be arranged on pedestal, be arranged at the 3rd on pedestal and detect fixed pedestal and fixed fingers negative pole 15b6, 3rd detected activity comb frame and movable comb 16b3, 4th testing agency 4b4 comprises the 4th detection fixed pedestal and the fixed fingers positive pole 15b7 be arranged on pedestal, be arranged at the 4th on pedestal and detect fixed pedestal and fixed fingers negative pole 15b8, 4th detected activity comb frame and movable comb 16b4.Illustrate for the first testing agency 4b1 below, in the present embodiment, the movable comb braces of the first testing agency 4b1 and movable comb 16b1 comprise three groups of identical comb structures from top to bottom, but also only can arrange one group of comb structure and can not affect realization of the present invention.When microthrust test works, when there is turning rate input in Z axis, mass 5b will at Y direction intermittent control shaking, drive the first testing agency 4b1 equally at Y direction intermittent control shaking by U-shaped folded beam, first detected activity comb frame and movable comb 16b1 make the electric capacity on fixed fingers positive pole 15b1 and fixed fingers negative pole 15b2 change at the intermittent control shaking of Y direction, the variable quantity of electric capacity is directly proportional to the amplitude of the forced vibration of mass 5b in Y-axis, and the variable quantity of measurement Detection capacitance can learn the input angular velocity size in Z-direction.
Glass pedestal as shown in Figure 6, comprises signal lead and metallic silicon/bond glass point.Wherein the signal lead of the first minor structure 1a comprises public electrode lead-in wire 17a3, first and drives input lead 17a1, second to drive input lead 17a9, the first drive feedback lead-in wire 17a2, the second drive feedback lead-in wire 17a8, the first detection signal lead-in wire positive pole 17a4, the second detection signal lead-in wire positive pole 17a6, the first detection signal lead-in wire negative pole 17a5, the second detection signal lead-in wire negative pole 17a7, wherein public electrode 17a3 lead-in wire is communicated to the first fixed pedestal 18a1, first drives input lead 17a1 to be communicated to the first driving fixed pedestal and fixed fingers 13a1, second drives input lead 17a9 to be communicated to the second driving fixed pedestal and fixed fingers 13a3, first drive feedback lead-in wire 17a2 is communicated to the first drive feedback fixed pedestal and drive feedback fixed fingers 13a2, and the second drive feedback lead-in wire 17a8 is communicated to the second drive feedback fixed pedestal and drive feedback fixed fingers 13a4, first detection signal lead-in wire positive pole 17a4 is communicated to the first detection fixed pedestal and fixed fingers positive pole 15a1 and second detects fixed pedestal and fixed fingers positive pole 15a3, second detection signal lead-in wire positive pole 17a6 is communicated to the 3rd detection fixed pedestal and fixed fingers positive pole 15a5 and the 4th detects fixed pedestal and fixed fingers positive pole 15a7, first detection signal lead-in wire negative pole 17a5 is communicated to the first detection fixed pedestal and fixed fingers negative pole 15a2 and second detects fixed pedestal and fixed fingers negative pole 15a4, second detection signal lead-in wire negative pole 17a7 is communicated to the 3rd detection fixed pedestal and fixed fingers negative pole 15a6 and the 4th detects fixed pedestal and fixed fingers negative pole 15a8.Metallic silicon/bond glass point comprises the first fixed pedestal bonding point 18a1, second fixed pedestal bonding point 18a2, 3rd fixed pedestal bonding point 18a3, 4th fixed pedestal bonding point 18a4, 5th fixed pedestal bonding point 18a5, 6th fixed pedestal bonding point 18a6, 7th fixed pedestal bonding point 18a7, 8th fixed pedestal bonding point 18a8, first drives fixed pedestal bonding point 18d1, first drive feedback fixed pedestal bonding point 18d2, second drives fixed pedestal bonding point 18d3, second drive feedback fixed pedestal bonding point 18d4, first detects fixed pedestal positive pole bonding point 18e1, first detects fixed pedestal negative pole bonding point 18e2, second detects fixed pedestal positive pole bonding point 18e3, second detects fixed pedestal negative pole bonding point 18e4, 3rd detects fixed pedestal positive pole bonding point 18e5, 3rd detects fixed pedestal negative pole bonding point 18e6, 4th detects fixed pedestal positive pole bonding point 18e7, 4th detects fixed pedestal negative pole bonding point 18e8.
The signal lead of the second minor structure 1b comprises public electrode lead-in wire 17b3, first and drives input lead 17b1, second to drive input lead 17b9, the first drive feedback lead-in wire 17b2, the second drive feedback lead-in wire 17b8, the first detection signal lead-in wire positive pole 17b4, the second detection signal lead-in wire positive pole 17b6, the first detection signal lead-in wire negative pole 17b5, the second detection signal lead-in wire negative pole 17b7, wherein public electrode 17b3 lead-in wire is communicated to the first fixed pedestal 18b1, first drives input lead 17b1 to be communicated to the first driving fixed pedestal and fixed fingers 13b1, second drives input lead 17b9 to be communicated to the second driving fixed pedestal and fixed fingers 13b3, first drive feedback lead-in wire 17b2 is communicated to the first drive feedback fixed pedestal and drive feedback fixed fingers 13b2, and the second drive feedback lead-in wire 17b8 is communicated to the second drive feedback fixed pedestal and drive feedback fixed fingers 13b4, first detection signal lead-in wire positive pole 17b4 is communicated to the first detection fixed pedestal and fixed fingers positive pole 15b1 and second detects fixed pedestal and fixed fingers positive pole 15b3, second detection signal lead-in wire positive pole 17b6 is communicated to the 3rd detection fixed pedestal and fixed fingers positive pole 15b5 and the 4th detects fixed pedestal and fixed fingers positive pole 15b7, first detection signal lead-in wire negative pole 17b5 is communicated to the first detection fixed pedestal and fixed fingers negative pole 15b2 and second detects fixed pedestal and fixed fingers negative pole 15b4, second detection signal lead-in wire negative pole 17b7 is communicated to the 3rd detection fixed pedestal and fixed fingers negative pole 15b6 and the 4th detects fixed pedestal and fixed fingers negative pole 15b8.Metallic silicon/bond glass point comprises the first fixed pedestal bonding point 18b1, second fixed pedestal bonding point 18b2, 3rd fixed pedestal bonding point 18b3, 4th fixed pedestal bonding point 18b4, 5th fixed pedestal bonding point 18b5, 6th fixed pedestal bonding point 18b6, 7th fixed pedestal bonding point 18b7, 8th fixed pedestal bonding point 18b8, first drives fixed pedestal bonding point 18f1, first drive feedback fixed pedestal bonding point 18f2, second drives fixed pedestal bonding point 18f3, second drive feedback fixed pedestal bonding point 18f4, first detects fixed pedestal positive pole bonding point 18g1, first detects fixed pedestal negative pole bonding point 18g2, second detects fixed pedestal positive pole bonding point 18g3, second detects fixed pedestal negative pole bonding point 18g4, 3rd detects fixed pedestal positive pole bonding point 18g5, 3rd detects fixed pedestal negative pole bonding point 18g6, 4th detects fixed pedestal positive pole bonding point 18g7, 4th detects fixed pedestal negative pole bonding point 18g8.
Minor structure coupling arrangement bonding point comprises the first fixed pedestal bonding point 18c1, the second fixed pedestal bonding point 18c2, the 3rd fixed pedestal bonding point 18c3.
Each fixed pedestal: 6a1, 6a2, 6a3, 6a4, 6a5, 6a6, 6a7, 6a8, 6b1, 6b2, 6b3, 6b4, 6b5, 6b6, 6b7, 6b8, 6c1, 6c2, 6c3, 13a1, 13a2, 13a3, 13a4, 13b1, 13b2, 13b3, 13b4, 15a1, 15a2, 15a3, 15a4, 15a5, 15a6, 15a7, 15a8, 15b1, 15b2, 15b3, 15b4, 15b5, 15b6, 15b7, 15b8 is corresponding keys chalaza 18a1 respectively, 18a2, 18a3, 18a4, 18a5, 18a6, 18a7, 18a8, 18b1, 18b2, 18b3, 18b4, 18b5, 18b6, 18b7, 18b8, 18c1, 18c2, 18c3, 18d1, 18d2, 18d3, 18d4, 18f1, 18f2, 18f3, 18f4, 18e1, 18e2, 18e3, 18e4, 18e5, 18e6, 18e7, 18e8, 18g1, 18g2, 18g3, 18g4, 18g5, 18g6, 18g7, 18g8 is connected.
The present invention is based on the two quality decoupling zero silicon micro-gyroscopes flexibly connected, monolateral electrostatic is adopted to drive, the working method that differential capacitor detects, after the fixed drive comb of driving mechanism applies the AC drive voltage of band direct current biasing, produce alternation driving force, under the effect of alternation driving force, drive the first driving mechanism 3a1, second driving mechanism 3a2 is by the 3rd movable U-shaped folded beam 7a3, 12 movable U-shaped folded beam 7a12, 13 movable U-shaped folded beam 7a13, 24 movable U-shaped folded beam 7a24, mass 5a is driven to vibrate back and forth in the X-axis direction, drive the first driving mechanism 3b1 simultaneously, second driving mechanism 3b2 is by the 3rd movable U-shaped folded beam 7b3, 12 movable U-shaped folded beam 7b12, 13 movable U-shaped folded beam 7b13, 24 movable U-shaped folded beam 7b24, mass 5b is driven to vibrate back and forth in the X-axis direction, mass 5a and mass 5b moves through the simple harmonic quantity linearly coupled that minor structure coupling arrangement 2 does in opposite directions, and now the first testing agency 4a1, second testing agency 4a2, 3rd testing agency 4a3, 4th testing agency 4a4, first testing agency 4b1, second testing agency 4b2, 3rd testing agency 4b3, 4th testing agency 4b4 is due to the second affixed U-shaped beam 7a2, 6th affixed U-shaped beam 7a6, 22 affixed U-shaped beam 7a22, 19 affixed U-shaped beam 7a19, 7th affixed U-shaped beam 7a7, tenth affixed U-shaped beam 7a10, 15 affixed U-shaped beam 7a15, 18 affixed U-shaped beam 7a18, second affixed U-shaped beam 7b2, 6th affixed U-shaped beam 7b6, 22 affixed U-shaped beam 7b22, 19 affixed U-shaped beam 7b19, 7th affixed U-shaped beam 7b7, tenth affixed U-shaped beam 7b10, 15 affixed U-shaped beam 7b15, 18 affixed U-shaped beam 7b18 is strapped in driving direction and keeps static, achieve the decoupling zero driven detecting, when gyroscope has the extraneous input angle speed ω z around Z axis, according to the right-hand rule, mass 5a is subject to the effect of Corioli's acceleration in output shaft Y-axis, under the effect of Corioli inertial force, mass 5a makes simple harmonic quantity linearly coupled in opposite directions along sensitive axes Y-axis, and mass 5b makes contrary simple harmonic quantity linearly coupled along sensitive axes Y-axis with mass 5a, by the 4th movable U-shaped folded beam 7a4, 5th movable U-shaped folded beam 7a5, 20 movable U-shaped folded beam 7a20, 21 movable U-shaped folded beam 7a21, 8th movable U-shaped folded beam 7a8, 9th movable U-shaped folded beam 7a9, 16 movable U-shaped folded beam 7a16, 17 movable U-shaped folded beam 7a17, 4th movable U-shaped folded beam 7b4, 5th movable U-shaped folded beam 7b5, 20 movable U-shaped folded beam 7b20, 21 movable U-shaped folded beam 7b21, 8th movable U-shaped folded beam 7b8, 9th movable U-shaped folded beam 7b9, 16 movable U-shaped folded beam 7b16, 17 movable U-shaped folded beam 7b17, drive the first testing agency 4a1, second testing agency 4a2, 3rd testing agency 4a3, 4th testing agency 4a4, first testing agency 4b1, second testing agency 4b2, 3rd testing agency 4b3, 4th testing agency 4b4 makes simple harmonic quantity linearly coupled in opposite directions along Y-direction, and now the first driving mechanism 3a1, second driving mechanism 3a2, first driving mechanism 3b1, second driving mechanism 3b2 is owing to being subject to the first driving mechanism 3a1 by the first affixed U-shaped beam 7a1, 23 affixed U-shaped beam 7a23, 11 affixed U-shaped beam 7a11, 14 affixed U-shaped beam 7a14, first affixed U-shaped beam 7b1, 23 affixed U-shaped beam 7b23, 11 affixed U-shaped beam 7b11, the constraint of the 14 affixed U-shaped beam 7b14 and keep static, achieves the decoupling zero detected driving, fixed fingers positive pole 15a1 is detected by first of the first testing agency 4a1, first detects fixed fingers negative pole 15a2, second of second testing agency 4a1 detects fixed fingers positive pole 15a3, second detects fixed fingers negative pole 15a4, the 3rd of 3rd testing agency 4a1 detects fixed fingers positive pole 15a5, 3rd detects fixed fingers negative pole 15a6, the 4th of 4th testing agency 4a4 detects fixed fingers positive pole 15a7, 4th detects fixed pedestal and fixed fingers negative pole 15a8, first of first testing agency 4b1 detects fixed fingers positive pole 15b1, first detects fixed fingers negative pole 15b2, second of second testing agency 4b1 detects fixed fingers positive pole 15b3, second detects fixed fingers negative pole 15b4, the 3rd of 3rd testing agency 4b1 detects fixed fingers positive pole 15b5, 3rd detects fixed fingers negative pole 15b6, the 4th of 4th testing agency 4b4 detects fixed fingers positive pole 15b7, 4th detects fixed pedestal and fixed fingers negative pole 15b8, by this simple harmonic quantity linearly coupled after electronic circuit process, voltage signal can be obtained.The principle of the second minor structure 1b is also identical.
Output voltage signal is the difference of minor structure 5a and 5b output voltage signal, and the size of output voltage signal is proportional to the size of input angle speed.Compared the phase relation of output voltage signal and pumping signal by follow-up phase detector, then can distinguish the direction of input angle speed.
As mentioned above, although represented with reference to specific preferred embodiment and described the present invention, it shall not be construed as the restriction to the present invention self.Under the spirit and scope of the present invention prerequisite not departing from claims definition, various change can be made in the form and details to it.
Claims (6)
1. based on the two quality decoupling zero silicon micro-gyroscopes flexibly connected, it is characterized in that, comprise the pedestal being provided with electric signal extension line and the microthrust test physical construction layer be placed on pedestal;
Microthrust test physical construction layer comprises the first minor structure, the second minor structure and minor structure coupling arrangement, and the first minor structure is connected by minor structure coupling arrangement with the second minor structure;
First minor structure and the second minor structure are the angular velocity measurement minor structure that structure is identical, and described angular velocity measurement minor structure is axially symmetric structure, comprise mass, driving mechanism, testing agency and minor structure fixed pedestal; Driving mechanism has two, is located at the two ends up and down of mass respectively and is connected with the two ends up and down of mass respectively by affixed U-shaped folded beam; Testing agency has four, wherein two are located at the left and right sides of mass upper end and are connected with the left and right sides of mass upper end respectively by affixed U-shaped folded beam, and two other is located at the left and right sides of mass lower end and is connected with the left and right sides of mass lower end respectively by affixed U-shaped folded beam; Driving mechanism and testing agency are all fixed on pedestal by fixed pedestal.
2. the two quality decoupling zero silicon micro-gyroscopes based on flexibly connecting according to claim 1, it is characterized in that, minor structure coupling arrangement is axially symmetric structure, to comprise between the first coupling arrangement fixed pedestal, the second coupling arrangement fixed pedestal, the 3rd coupling arrangement fixed pedestal, the first beam between contiguous block, the second beam between contiguous block, the 3rd beam contiguous block between contiguous block, the 4th beam;
Between the second beam, between contiguous block and the 4th beam, one end of contiguous block is connected to the two ends of the 3rd coupling arrangement fixed pedestal respectively by affixed parallel girder; Between the second beam, between contiguous block with the 4th beam, the other end of contiguous block is connected with the side in the middle part of the first minor structure and the second minor structure respectively by the U-shaped folded beam of activity; First minor structure and the opposite side in the middle part of the second minor structure respectively with contiguous block between the first beam and between the 3rd beam one end of contiguous block be connected, between the first beam, between contiguous block with the 3rd beam, the other end of contiguous block is connected with the first coupling arrangement fixed pedestal and the second coupling arrangement fixed pedestal respectively by the U-shaped folded beam of activity.
3. the two quality decoupling zero silicon micro-gyroscopes based on flexibly connecting according to claim 2, it is characterized in that, affixed parallel girder has four, is respectively the first affixed parallel girder, the second affixed parallel girder, the 3rd affixed parallel girder and the 4th affixed parallel girder;
Between the second beam, one end of contiguous block is connected with the second affixed parallel girder one end with the 3rd coupling arrangement fixed pedestal by the first affixed parallel girder; Between the 4th beam, one end of contiguous block is connected with the other end of the 4th affixed parallel girder with the 3rd coupling arrangement fixed pedestal by the 3rd affixed parallel girder; The movable end of the two ends of the first parallel girder connecting link parallel girder affixed with first and the 3rd affixed parallel girder is respectively connected, and the movable end of the two ends of the second parallel girder connecting link parallel girder affixed with second and the 4th affixed parallel girder is respectively connected.
4. according to claim 1-3 any one based on the two quality decoupling zero silicon micro-gyroscopes flexibly connected, it is characterized in that, described driving mechanism is micro drives capacitor mechanism, and described micro drives capacitor mechanism comprises driving movable comb braces, driving activity comb, drives fixed fingers and drive feedback fixed fingers;
Driving activity comb has two or more, is equidistantly vertically located at and drives on movable comb braces; Fixed fingers and drive feedback is driven to fix all equal with the quantity of movable comb, the both sides of each driving activity comb are combined with one respectively and drive fixed fingers and a drive feedback fixed fingers, each driving fixed fingers and drive feedback fixed fingers are all fixed on pedestal, and all drive feedback fixed fingers are connected as a single entity structure; Movable comb braces is driven to be connected with mass by affixed U-shaped folded beam.
5. the two quality decoupling zero silicon micro-gyroscopes based on flexibly connecting according to claim 4, it is characterized in that, described testing agency is miniature Detection capacitance mechanism, and described miniature Detection capacitance mechanism comprises detected activity comb frame, detected activity comb, detects fixed fingers positive pole and detect fixed fingers negative pole;
Detected activity comb has two or more, is equidistantly vertically located on detected activity comb frame; Detect fixed fingers positive pole and detect fixed fingers negative pole all equal with the quantity of detected activity comb, the both sides of each detected activity comb are combined with one respectively and detect fixed fingers positive pole and a detection fixed fingers negative pole, each detection fixed fingers positive pole and detect fixed fingers negative pole and be all fixed on pedestal, detects fixed fingers positive pole and to be connected as a single entity structure; Detected activity comb frame is connected with mass by affixed U-shaped folded beam.
6. the two quality decoupling zero silicon micro-gyroscopes based on flexibly connecting according to claim 5, is characterized in that, described pedestal is provided with and drives input lead, drive feedback lead-in wire, detection signal lead-in wire positive pole and detection signal lead-in wire negative pole;
Drive input lead to be communicated to driving fixed fingers, drive feedback lead-in wire is communicated to drive feedback fixed fingers; Detection signal lead-in wire positive pole is communicated to and detects fixed fingers positive pole, and detection signal lead-in wire negative pole is communicated to and detects fixed fingers negative pole.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106871887A (en) * | 2015-12-10 | 2017-06-20 | 上海矽睿科技有限公司 | Vibration module and gyroscope |
| CN108204807A (en) * | 2016-12-19 | 2018-06-26 | 美国亚德诺半导体公司 | For the bending connector of MEMS (MEMS) device |
| CN110595455A (en) * | 2019-09-04 | 2019-12-20 | 东南大学 | High-precision double-mass silicon micro gyroscope device based on tunnel magnetoresistance effect |
| CN112284368A (en) * | 2020-09-21 | 2021-01-29 | 北京航天控制仪器研究所 | Fully-differential high-precision X-axis silicon micro-gyroscope |
| CN112833869A (en) * | 2021-01-06 | 2021-05-25 | 南京理工大学 | Decoupling type double-mass silicon micromechanical vibration gyroscope structure |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201909632U (en) * | 2010-11-23 | 2011-07-27 | 东南大学 | Micro electro mechanical system (MEMS) gyroscope |
| CN103245340A (en) * | 2012-02-01 | 2013-08-14 | 苏州敏芯微电子技术有限公司 | Single-chip tri-axial gyroscope |
| US20130270659A1 (en) * | 2012-03-30 | 2013-10-17 | Kyoto University | Angular velocity sensor |
| CN103900548A (en) * | 2014-04-22 | 2014-07-02 | 东南大学 | Silicon micro full-decoupling dual-mass dual-line vibratory gyroscope |
-
2014
- 2014-09-04 CN CN201410449942.8A patent/CN104236535B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201909632U (en) * | 2010-11-23 | 2011-07-27 | 东南大学 | Micro electro mechanical system (MEMS) gyroscope |
| CN103245340A (en) * | 2012-02-01 | 2013-08-14 | 苏州敏芯微电子技术有限公司 | Single-chip tri-axial gyroscope |
| US20130270659A1 (en) * | 2012-03-30 | 2013-10-17 | Kyoto University | Angular velocity sensor |
| CN103900548A (en) * | 2014-04-22 | 2014-07-02 | 东南大学 | Silicon micro full-decoupling dual-mass dual-line vibratory gyroscope |
Non-Patent Citations (1)
| Title |
|---|
| 殷勇等: "《一种双质量硅微陀螺仪》", 《中国惯性技术学报》 * |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106871887A (en) * | 2015-12-10 | 2017-06-20 | 上海矽睿科技有限公司 | Vibration module and gyroscope |
| CN108204807A (en) * | 2016-12-19 | 2018-06-26 | 美国亚德诺半导体公司 | For the bending connector of MEMS (MEMS) device |
| CN110595455A (en) * | 2019-09-04 | 2019-12-20 | 东南大学 | High-precision double-mass silicon micro gyroscope device based on tunnel magnetoresistance effect |
| CN112284368A (en) * | 2020-09-21 | 2021-01-29 | 北京航天控制仪器研究所 | Fully-differential high-precision X-axis silicon micro-gyroscope |
| CN112833869A (en) * | 2021-01-06 | 2021-05-25 | 南京理工大学 | Decoupling type double-mass silicon micromechanical vibration gyroscope structure |
| CN112833869B (en) * | 2021-01-06 | 2022-04-19 | 南京理工大学 | Decoupling type double-mass silicon micromechanical vibration gyroscope structure |
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