CN104233221B - 一种碳化硅化学气相沉积设备及方法 - Google Patents
一种碳化硅化学气相沉积设备及方法 Download PDFInfo
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CN106435527B (zh) * | 2016-12-19 | 2019-02-05 | 湖南顶立科技有限公司 | 一种碳化硅沉积设备及其进气装置 |
CN106756872B (zh) * | 2016-12-21 | 2019-05-10 | 电子科技大学 | 一种高通量cvd制备硅碳氧薄膜的装置 |
CN109402604A (zh) * | 2019-01-05 | 2019-03-01 | 泰科天润半导体科技(北京)有限公司 | 一种用于生产碳化硅外延片的化学气相沉积装置 |
CN110184652A (zh) * | 2019-05-23 | 2019-08-30 | 上海申和热磁电子有限公司 | 一种改善硅片翘曲度的化学气相沉积装置及方法 |
CN110529736B (zh) * | 2019-09-05 | 2021-09-14 | 安徽光智科技有限公司 | 一种化学气相沉积系统及供气装置和供气方法 |
CN112126912B (zh) * | 2020-09-07 | 2023-02-17 | 广东先导微电子科技有限公司 | 制备热解氮化硼的供气系统及其供气方法 |
CN114134485A (zh) * | 2021-12-07 | 2022-03-04 | 航天特种材料及工艺技术研究所 | 一种气相沉积设备 |
CN115505899A (zh) * | 2022-08-16 | 2022-12-23 | 湖南顶立科技有限公司 | 一种沉积设备的工艺气源输入装置及其使用方法 |
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CN203360573U (zh) * | 2013-07-22 | 2013-12-25 | 湖南顶立科技有限公司 | 一种化学气相沉积系统 |
CN103343332A (zh) * | 2013-07-22 | 2013-10-09 | 湖南顶立科技有限公司 | 一种化学气相沉积方法 |
CN204097561U (zh) * | 2014-09-17 | 2015-01-14 | 湖南顶立科技有限公司 | 一种碳化硅化学气相沉积设备 |
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Address after: 410199 No. 1271, liangtang East Road, Xingsha industrial base (Changlong Street), Changsha area, China (Hunan) pilot Free Trade Zone, Changsha, Hunan Province Patentee after: Hunan Dingli Technology Co.,Ltd. Address before: 410199 No. 1271, liangtang East Road, Xingsha industrial base (Changlong Street), Changsha area, China (Hunan) pilot Free Trade Zone, Changsha, Hunan Province Patentee before: ADVANCED CORPORATION FOR MATERIALS & EQUIPMENTS Co.,Ltd. |
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