CN104218160A - Organic electroluminescence device and preparation method thereof - Google Patents
Organic electroluminescence device and preparation method thereof Download PDFInfo
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- CN104218160A CN104218160A CN201310210284.2A CN201310210284A CN104218160A CN 104218160 A CN104218160 A CN 104218160A CN 201310210284 A CN201310210284 A CN 201310210284A CN 104218160 A CN104218160 A CN 104218160A
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/805—Electrodes
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/85—Arrangements for extracting light from the devices
- H10K50/856—Arrangements for extracting light from the devices comprising reflective means
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
Abstract
The invention discloses an organic electroluminescence device, comprising a light-permeating substrate, reflecting layers, transparent electrode layers, an organic light emitting function layer and a semitransparent electrode layer which are sequentially overlapped, wherein the light-permeating substrate comprises a first light outgoing surface and a covered surface which are oppositely arranged, the reflecting layers dispersedly cover the covered surface to form shading areas, and the parts of the covered surface, which have been not covered by the reflecting layers, of the light-permeating substrate are formed into light-permeating areas; the transparent electrode layers cover the shading areas and the light-permeating areas; the organic light emitting function layer covers the surfaces of the transparent electrode layers; and the reflecting layers have rough surfaces for increasing diffuse reflection of light rays at the reflecting layers, and an area ratio of the reflecting layers to the transparent electrode layers is 20%-80%. The two light outgoing surfaces of the organic electroluminescence device are uniform and accordant in luminous intensity. According to the organic electroluminescence device, microcavity effect is weakened, and color rendering index is improved. In addition, the invention also discloses a preparation method of the organic electroluminescence device.
Description
Technical field
The present invention relates to light emitting device field, particularly relate to the preparation method of a kind of organic electroluminescence device and this organic electroluminescence device.
Background technology
Organic electroluminescent (Organic Light Emission Diode, be called for short OLED), there is the characteristics such as brightness is high, material selection range is wide, driving voltage is low, all solidstate active illuminating, have high definition, wide viewing angle simultaneously, and the advantage such as fast response time, be a kind of Display Technique and light source of great potential, meet the development trend of information age mobile communication and information displaying, and the requirement of green lighting technique, be the focal point of current lot of domestic and foreign researcher.
Existing organic electroluminescent technology, the side of light from anode or negative electrode can only be taken out by major part, obtained bottom emitting or top radiation organic EL part.The organic electroluminescence device of the double-side display of some researchers invention, adopt two organic electroluminescence cells to fit together back-to-back, this structure is more complicated, and processing procedure is more.Also there is researcher to adopt transparent anode and negative electrode, obtain the effect of two-sided bright dipping.But the negative electrode usually adopted is sheet metal film, and its transmitance generally can only reach 50-70%.And the anode adopted is transparent oxide film, its transmitance generally can reach more than 80%, and therefore, at the exiting surface place of anode and negative electrode, luminous intensity there are differences, and affects the uniformity of luminance of organic electroluminescence device.
In order to the problem that the exiting surface place luminous intensity improving anode and negative electrode is inconsistent, there is researcher to prepare reflector on transparent electrode layer, for reducing the luminous intensity at transparent electrode layer place, make the luminous intensity of two light-emitting areas consistent.But, owing to have employed reflector and semitransparent electrode layer in organic electroluminescence device inside, there is stronger microcavity effect, cause emission spectrum to narrow, be unfavorable for this color rendering index.
Summary of the invention
Technical problem to be solved by this invention is, provides the preparation method of organic electroluminescence devices and this organic electroluminescence device, and the microcavity effect of described organic electroluminescence device can be made more weak, improves color rendering index.
In order to solve the problems of the technologies described above, embodiments provide a kind of organic electroluminescence device, comprise stack gradually light-transparent substrate, reflector, transparent electrode layer, organic luminescence function layer and semitransparent electrode layer,
Described light-transparent substrate comprises the first exiting surface and coverage rate that are oppositely arranged, and the dispersion of described reflector is covered in described coverage rate and forms shading region, and the described coverage rate that described reflector is not covered in described light-transparent substrate forms transparent area; Described transparent electrode layer is covered in described shading region and described transparent area; Described organic luminescence function layer is covered in described transparent electrode layer surface; Described semitransparent electrode layer is covered in described organic luminescence function layer surface, form the second exiting surface, described reflector is coarse surface, and for increasing the diffuse reflection of light at described reflector place, the area ratio of described reflector and described transparent electrode layer is 20% ~ 80%.
Wherein, described coarse surface is described reflector surface oxidation, the oxide skin(coating) of formation.
Wherein, the material of described transparent electrode layer is one or more in indium tin oxide, indium-zinc oxide, aluminium zinc oxide and gallium zinc oxide, and the thickness of described transparent electrode layer is 70 ~ 200nm.
Wherein, the material in described reflector is selected from the one in silver, aluminium, gold, platinum, nickel, copper or chromium, and the thickness in described reflector is 40 ~ 100nm.
Wherein, described shading region and described transparent area are all in strip, alternately arrange in described shading region and described transparent area.
Wherein, described shading region and described transparent area are square, alternately arrange in described shading region and described transparent area, and fit in the limit of at least two limits of shading region described in each and adjacent described transparent area, at least one angle of shading region described in each and one jiao of shading region described in another abut against.
Wherein, described shading region is square, and multiple described shading region is intervally arranged and does not connect mutually.
Wherein, described organic luminescence function layer comprises hole injection layer, hole transmission layer, luminescent layer, electron transfer layer and electron injecting layer, described hole injection layer is covered in described transparent electrode layer surface, described hole transmission layer is covered in the surface of hole injection layer, described luminescent layer is covered in the surface of described hole transmission layer, described electron transfer layer is covered in the surface of described luminescent layer, described electron injecting layer is covered in the surface of described electron transfer layer, and described semitransparent electrode layer is covered in the surface of described electron injecting layer.
Wherein, the material of described semitransparent electrode layer is selected from the one in silver, aluminium, samarium, ytterbium, aerdentalloy, silver-colored magnesium alloy, almag, and the thickness of described semitransparent electrode layer is 18 ~ 35nm.
Separately, embodiments of the invention additionally provide the preparation method of above-mentioned organic electroluminescence device, comprise step as follows:
There is provided a light-transparent substrate and a mask plate, described mask plate fits in described light-transparent substrate surface;
Adopt evaporation or magnetron sputtering method, in preparation reflector, described mask plate surface, preparation speed is 0.1 ~ 2nm/s;
The described light-transparent substrate in described reflector will be coated with, be placed in oxygen plasma treatment room, make described reflector surface oxidation, form the oxide skin(coating) with coarse surface, wherein, in described oxygen plasma treatment room, the volume ratio of argon gas and oxygen is 5:1 ~ 1:1, pressure is 10 ~ 60Pa, and radio-frequency power supply power is 30 ~ 100W, and oxidization time is 5 ~ 30min;
Take off described mask plate, the dispersion of described reflector is covered in described light-transparent substrate and forms shading region, described reflector is not covered in the formation transparent area, surface of described light-transparent substrate, on described shading region and surface, transparent area, prepare transparent electrode layer by magnetron sputtering method, sputtering rate is 0.1 ~ 2nm/s;
Adopt Vacuum Heat coating method, prepare organic luminescence function layer on described transparent electrode layer surface;
Adopt Vacuum Heat coating method, at the translucent motor layer of described organic luminescence function layer surface preparation, preparation speed is 0.1-1nm/s, thus prepares described organic electroluminescence device.
Described organic electroluminescence device provided by the invention, described reflector is located between described light-transparent substrate and described transparent electrode layer, add the reflection of emergent ray at described first exiting surface, reduce the transmission of emergent ray at described first exiting surface, thus reach the light transmittance reducing described transparent electrode layer, add the light transmittance of described semitransparent electrode layer, thus make the luminous intensity of described first exiting surface and the second exiting surface more even.
In addition, described reflector is coarse surface, and diffuse reflection occurs described coarse surface, thus reduces the microcavity effect of described organic electroluminescence device, avoids the process that narrows of described organic electroluminescence device spectrum.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
The structural representation of the organic electroluminescence device that Fig. 1 provides for the embodiment of the present invention;
The combination schematic diagram of the shading region that Fig. 2 provides for the embodiment of the present invention first execution mode and transparent area;
Preparation method's flow chart of the organic electroluminescence device that Fig. 3 provides for the embodiment of the present invention;
The combination schematic diagram of the shading region that Fig. 4 provides for the embodiment of the present invention second execution mode and transparent area;
The combination schematic diagram of the shading region that Fig. 5 provides for the embodiment of the present invention the 3rd execution mode and transparent area.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
Below with reference to the accompanying drawings embodiments of the invention are described.See Fig. 1, in first embodiment of the invention, the structural representation of organic electroluminescence device (OLED) 100.Described organic electroluminescence device 100 comprise stack gradually light-transparent substrate 10, reflector 20, transparent electrode layer 30, organic luminescence function layer 40, semitransparent electrode layer 50.
Described light-transparent substrate 10 comprises the first exiting surface 11 and coverage rate 12 that are oppositely arranged, and its material is glass.
See Fig. 2, the dispersion of described reflector 20 is covered in described coverage rate 12 and forms shading region 21, and described reflector 20 is in coarse surface, and the described coverage rate 12 that described reflector 20 is not covered in described light-transparent substrate 10 forms transparent area 22.Described " dispersion covers " covers the meaning of the zones of different of described coverage rate 12 for described reflector 20.Described reflector 20 is metal material, concrete, and the material in reflector 20 can be the one in silver (Ag), aluminium (Al), gold (Au), platinum (Pt), nickel (Ni), copper (Cu) or chromium (Cr).The thickness in described reflector 20 is 40 ~ 100nm.Concrete, the coarse surface in described reflector 20 is at described reflector table 20 surface oxidation, the oxide skin(coating) formed, described oxide skin(coating) is for increasing the diffuse reflection of light at described reflector 20 place, thus the microcavity effect of described organic electroluminescence device 100 inside is weakened, and then avoid spectrum narrowing, improve color rendering index.
Described transparent electrode layer 30 is covered in described shading region 21 and described transparent area 22, thus forms a continuous print conductive membrane layer.Its material is one or more in indium tin oxide (ITO), indium-zinc oxide (IZO), aluminium zinc oxide (AZO) and gallium zinc oxide (GZO), and thickness is 70 ~ 200nm.Described reflector 20 is 20% ~ 80% with the area ratio of described transparent electrode layer 30.The light transmittance of described transparent electrode layer 30 is high, and conductivity is good.
Described reflector 20 is located between described light-transparent substrate 10 and described transparent electrode layer 30, to reduce the light transmittance of described organic electroluminescence device 100.By regulating the thickness in described reflector 20, and the area ratio of described reflector 20 and described transparent electrode layer 30, the light transmittance of adjustable described first exiting surface 11.
In present embodiment, described shading region 21 and described transparent area 22 are all in strip, alternately arrange with described transparent area 22 in described shading region 21.And the equal and opposite in direction of transparent area 22 described in described shading region 21.In other embodiments, described shading region 21 is different with large I from the shape of described transparent area 22.
Described organic luminescence function layer 40 is covered in described transparent electrode layer 30 surface.Concrete, described organic luminescence function layer 40 comprises hole injection layer, hole transmission layer, luminescent layer, electron transfer layer and electron injecting layer.Described hole injection layer is covered in described transparent electrode layer 30 surface, described hole transmission layer is covered in the surface of hole injection layer, described luminescent layer is covered in the surface of described hole transmission layer, described electron transfer layer is covered in the surface of described luminescent layer, and described electron injecting layer is covered in the surface of described electron transfer layer.Described organic luminescence function layer 40 is for luminescence.
Described semitransparent electrode layer 50 is covered in described organic luminescence function layer 40 surface, forms the second exiting surface 51.Concrete, described semitransparent electrode layer 50 is covered in the surface of described electron injecting layer.Described semitransparent electrode layer 50 is metal material, concrete one of closing for silver (Ag), aluminium (Al), samarium (Sm), ytterbium (Yb), silver-colored aluminium (Ag-Al) in gold, silver magnesium (Ag-Mg) alloy, magnalium (Al-Mg) alloy.The thickness of described semitransparent electrode layer 50 is 18 ~ 35nm.The light transmittance of described semitransparent electrode layer 50 is 50% ~ 70%, a little less than the light transmittance of more than 80% of described transparent electrode layer 30.
Described reflector 30 is located between described light-transparent substrate 10 and described transparent electrode layer 30, add the reflection of emergent ray at described first exiting surface 11, reduce the transmission of emergent ray at described first exiting surface 11, thus reach the light transmittance reducing described transparent motor layer 30, add the light transmittance of described semitransparent electrode layer 50, thus make the luminous intensity of described first exiting surface 11 and the second exiting surface 51 more even.
In addition, there is diffuse reflection in surface, described reflector 30, thus reduces the microcavity effect of described organic electroluminescence device 100, thus avoids the process that narrows of described organic electroluminescence device 100 spectrum.
See Fig. 3, the embodiment of the present invention additionally provides the preparation method of above-mentioned organic electroluminescence device 100.Its concrete steps comprise:
Step S1, provides light-transparent substrate 10 and a mask plate, and described mask plate fits in described light-transparent substrate 10 surface.
Step S2, adopts evaporation or magnetron sputtering method, and in preparation reflector 20, described mask plate surface, preparation speed is 0.1 ~ 2nm/s.When adopting vapour deposition method to prepare reflector 20, the vacuum degree of described vacuum coating system is 10
-5~ 10
-3pa.
Step S3, adopts Strong oxdiative process, surface coarsening is carried out in reflector 20.Concrete, by being coated with the described light-transparent substrate 10 in described reflector 20, being placed in oxygen plasma treatment room, making described reflector 20 surface oxidation, form the oxide skin(coating) with coarse surface.In described oxygen plasma treatment room, the volume ratio of argon gas and oxygen is 5:1 ~ 1:1, and pressure is 10 ~ 60Pa, and radio-frequency power supply power is 30 ~ 100W, and oxidization time is 5 ~ 30min.
Step S4, take off described mask plate, the dispersion of described reflector 20 is covered in described light-transparent substrate 10 and forms shading region 21, described reflector 20 is not covered in the formation transparent area, surface 22 of described light-transparent substrate 10, on described shading region 21 and surface, transparent area 22, prepare transparent electrode layer 30 by magnetron sputtering method, described transparent electrode layer 30 is a continuous conduction film, and sputtering rate is 0.1 ~ 2nm/s.
Step S5, adopts Vacuum Heat coating method, prepares organic luminescence function layer 40 on described transparent electrode layer 30 surface.
Step S6, adopt Vacuum Heat coating method, prepare semitransparent electrode layer 50 on described organic luminescence function layer 40 surface, preparation speed is 0.1-1nm/s, thus prepares described organic electroluminescence device 100.
Described organic electroluminescence device 100 provided by the invention, described light-transparent substrate 10 is prepared the described reflector 20 of dispersion, and described reflector 20 is in coarse surface, reduces the microcavity effect of described organic electroluminescence device 100, improves color rendering index.In addition, the luminous intensity uniformity of described first exiting surface 11 and the second exiting surface 51 is also achieved.
Refer to Fig. 4, the organic electroluminescence device 200 of second embodiment of the invention, roughly the same with the structure of organic electroluminescence device 100, its difference is: described shading region 121 and described transparent area 122 are square, alternately arrange with described transparent area 122 in described shading region 121, and fit in the limit of at least two limits of shading region 121 described in each and adjacent described transparent area 122, at least one angle of shading region 121 described in each and one jiao of shading region 121 described in another abut against.
Refer to Fig. 5, the organic electroluminescence device 300 of third embodiment of the invention, roughly the same with the structure of organic electroluminescence device 100, its difference is: described shading region 221 is square, multiple described shading region 221 is intervally arranged and does not connect mutually, described transparent area 222 and described shading region 221 shape complementarity.
Above-described execution mode, does not form the restriction to this technical scheme protection range.The amendment done within any spirit at above-mentioned execution mode and principle, equivalently to replace and improvement etc., within the protection range that all should be included in this technical scheme.
Claims (10)
1. an organic electroluminescence device, comprise stack gradually light-transparent substrate, reflector, transparent electrode layer, organic luminescence function layer and semitransparent electrode layer,
Described light-transparent substrate comprises the first exiting surface and coverage rate that are oppositely arranged, and the dispersion of described reflector is covered in described coverage rate and forms shading region, and the described coverage rate that described reflector is not covered in described light-transparent substrate forms transparent area; Described transparent electrode layer is covered in described shading region and described transparent area; Described organic luminescence function layer is covered in described transparent electrode layer surface; Described semitransparent electrode layer is covered in described organic luminescence function layer surface, form the second exiting surface, it is characterized in that, described reflector is coarse surface, for increasing the diffuse reflection of light at described reflector place, the area ratio of described reflector and described transparent electrode layer is 20% ~ 80%.
2. organic electroluminescence device as claimed in claim 1, it is characterized in that, described coarse surface is described reflector surface oxidation, the oxide skin(coating) of formation.
3. organic electroluminescence device as claimed in claim 1, it is characterized in that, the material of described transparent electrode layer is one or more in indium tin oxide, indium-zinc oxide, aluminium zinc oxide and gallium zinc oxide, and the thickness of described transparent electrode layer is 70 ~ 200nm.
4. organic electroluminescence device as claimed in claim 3, it is characterized in that, the material in described reflector is selected from the one in silver, aluminium, gold, platinum, nickel, copper or chromium, and the thickness in described reflector is 40 ~ 100nm.
5. organic electroluminescence device as claimed in claim 1, it is characterized in that, described shading region and described transparent area are all in strip, alternately arrange in described shading region and described transparent area.
6. organic electroluminescence device as claimed in claim 1, it is characterized in that, described shading region and described transparent area are square, alternately arrange in described shading region and described transparent area, and fit in the limit of at least two limits of shading region described in each and adjacent described transparent area, at least one angle of shading region described in each and one jiao of shading region described in another abut against.
7. organic electroluminescence device as claimed in claim 1, is characterized in that, described shading region is square, and multiple described shading region is intervally arranged and does not connect mutually.
8. organic electroluminescence device as claimed in claim 1, it is characterized in that, described organic luminescence function layer comprises hole injection layer, hole transmission layer, luminescent layer, electron transfer layer and electron injecting layer, described hole injection layer is covered in described transparent electrode layer surface, described hole transmission layer is covered in the surface of hole injection layer, described luminescent layer is covered in the surface of described hole transmission layer, described electron transfer layer is covered in the surface of described luminescent layer, described electron injecting layer is covered in the surface of described electron transfer layer, described semitransparent electrode layer is covered in the surface of described electron injecting layer.
9. organic electroluminescence device as claimed in claim 1, it is characterized in that, the material of described semitransparent electrode layer is selected from the one in silver, aluminium, samarium, ytterbium, aerdentalloy, silver-colored magnesium alloy, almag, and the thickness of described semitransparent electrode layer is 18 ~ 35nm.
10. a preparation method for the organic electroluminescence device as described in any one of claim 1 ~ 9, is characterized in that, comprises step as follows:
There is provided a light-transparent substrate and a mask plate, described mask plate fits in described light-transparent substrate surface;
Adopt evaporation or magnetron sputtering method, in preparation reflector, described mask plate surface, preparation speed is 0.1 ~ 2nm/s;
The described light-transparent substrate in described reflector will be coated with, be placed in oxygen plasma treatment room, make described reflector surface oxidation, form the oxide skin(coating) with coarse surface, wherein, in described oxygen plasma treatment room, the volume ratio of argon gas and oxygen is 5:1 ~ 1:1, pressure is 10 ~ 60Pa, and radio-frequency power supply power is 30 ~ 100W, and oxidization time is 5 ~ 30min;
Take off described mask plate, the dispersion of described reflector is covered in described light-transparent substrate and forms shading region, described reflector is not covered in the formation transparent area, surface of described light-transparent substrate, on described shading region and surface, transparent area, prepare transparent electrode layer by magnetron sputtering method, sputtering rate is 0.1 ~ 2nm/s;
Adopt Vacuum Heat coating method, prepare organic luminescence function layer on described transparent electrode layer surface;
Adopt Vacuum Heat coating method, at the translucent motor layer of described organic luminescence function layer surface preparation, preparation speed is 0.1-1nm/s, thus prepares described organic electroluminescence device.
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