CN104198764A - Three-axis micro mechanical accelerometer - Google Patents
Three-axis micro mechanical accelerometer Download PDFInfo
- Publication number
- CN104198764A CN104198764A CN201410481613.1A CN201410481613A CN104198764A CN 104198764 A CN104198764 A CN 104198764A CN 201410481613 A CN201410481613 A CN 201410481613A CN 104198764 A CN104198764 A CN 104198764A
- Authority
- CN
- China
- Prior art keywords
- mass
- substrate
- plane
- movable electrode
- brace summer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Pressure Sensors (AREA)
Abstract
The invention relates to a three-axis micro mechanical accelerometer comprising a base plate and an accelerometer body fixedly mounted on the base plate. The accelerometer body comprises a mass block, a Z-axis detection electrode plate and a planar detection unit; the planar detection unit comprises movable electrodes and fixed electrodes and are connected to the mass block; the mass block is fixed to the base plate through a supporting beam; the Z-axis detection electrode plate is fixedly arranged on the base plate corresponding to the mass block. According to the three-axis micro mechanical accelerometer, acceleration measurement is achieved by a variable capacitance method, interference signal resistance capacity is high, the wiring manner is simple, signal coupling is low, and the signal to noise ratio is high. The three-axis micro mechanical accelerometer has the advantages of high integration, simple process, adaptability to mass production, low cost and the like, and further has high measurement precision and flexibility.
Description
Technical field
The present invention relates to a kind of micro-mechanical accelerometer, relate in particular to a kind of single structure three axle micro-mechanical accelerometers.Belong to micro mechanical system (MEMS) field.
Background technology
As a kind of inertia device, accelerometer is widely used in the fields such as Aero-Space, automatic control and vibration-testing, along with the development of MEMS technology, adopt the micro-mechanical accelerometer of MEMS technical design and making to have advantages of that volume is little, integrated level is high, reliability is high and cost is low, have broad application prospects in military and civilian field, as automobile, navigation, biology and medical instruments field.
Tradition three axis accelerometer is that this array mode is unfavorable for the microminiaturization degree of three axis accelerometer by three orthogonal combination units that form three-axis measurement that fit together of discrete single-axis accelerometer three axles.The patent No. is that 200710061738 and 201110319018.4 Chinese patent discloses two kinds of single structure three-axis micro accelerometers based on piezoresistive effect, this accelerometer supports mass by elastic supporting beams, and the variation of vibrating the voltage dependent resistor (VDR) causing by measurement quality piece carrys out the size of sense acceleration.Owing to adopting pressure drag to detect, in the time that processing, signal first needs resistance variations signal to be converted to current signal, and in the time that accelerometer size further diminishes, be easily subject to signal and disturb, thereby be unfavorable for improving the measuring accuracy of accelerometer.The patent No. is that the Chinese patent of CN101133332A has been announced a kind of three axis accelerometer based on capacitance detecting, but this kind of arrangements of accelerometers complexity, and therefore processing technology complexity, is unfavorable for reducing its processing cost.
The present invention adopts and becomes capacitance method and realize acceleration analysis, and anti-jamming signal ability is strong, has that volume is little, integrated level is high, power consumption is little simultaneously, is applicable to producing in enormous quantities and low cost and other advantages; Can realize good measuring accuracy and sensitivity.
Summary of the invention
The invention provides a kind of single structure three axle micro-mechanical accelerometers, this accelerometer is realized acceleration analysis by becoming capacitance method, there is anti-jamming signal ability strong, volume is little, integrated level is high, power consumption is little, be applicable to production in enormous quantities and low cost and other advantages, can realize good measuring accuracy and sensitivity.
The present invention is achieved through the following technical solutions:
A kind of three axle micro-mechanical accelerometers, comprise substrate and are fixedly mounted on the accelerometer main body on substrate.Described accelerometer main body comprises mass, z repacking survey battery lead plate and plane detecting unit; Described plane detecting unit is connected with mass; Described mass is fixed on substrate by brace summer; Described z repacking is surveyed battery lead plate and is installed with the position corresponding to mass on substrate.
In above-mentioned single-axis accelerometer, described mass comprises mass 1 and mass 2, and described brace summer comprises brace summer 1 and brace summer 2; Described brace summer 1 and brace summer 2 are distributed on same straight line, and one end is fixed on substrate respectively, and one end is connected with mass in addition; Described mass 1 and 2 is distributed in the both sides of brace summer, and mass 1 is connected with brace summer with 2 junction.
In above-mentioned single-axis accelerometer, described z repacking is surveyed battery lead plate and is comprised that battery lead plate 1 is surveyed in z repacking and battery lead plate 2 is surveyed in z repacking, and described z repacking is surveyed battery lead plate 1 and 2 and is distributed in respectively the position corresponding to mass 1 and mass 2 on substrate.
In above-mentioned single-axis accelerometer, described plane detecting unit comprises movable electrode, fixed electorde and framework; Described movable electrode comprises movable electrode 1 and movable electrode 2, and movable electrode 1 and movable electrode 2 are fixed on framework; Described movable electrode 1 is along x direction of principal axis layout in the plane that is parallel to substrate, and described movable electrode 2 is arranged along y direction of principal axis in the plane that is parallel to substrate; Described fixed electorde comprises fixed electorde 1 and fixed electorde 2; Described fixing moving electrode 1 is along x direction of principal axis layout in the plane that is parallel to substrate, and described fixed electorde 2 is arranged along y direction of principal axis in the plane that is parallel to substrate; Described fixed electorde is installed with on substrate.
The present invention compared with prior art has following beneficial effect:
(1) three-axis gyroscope of the present invention adopts and becomes capacitance method and realize acceleration analysis, measures highly sensitively, and antijamming capability is strong; Wire laying mode is simple simultaneously, and signal coupling is little, has improved signal to noise ratio (S/N ratio), can realize higher measuring accuracy;
(2) three axis accelerometer compact conformation of the present invention, volume is little, integrated level is high, can significantly reduce accelerometer volume and weight, is with a wide range of applications;
(3) gyroscope manufacture craft of the present invention simple, with low cost, there is superior performance, be applicable to producing in enormous quantities.
Brief description of the drawings
Fig. 1 is the perspective view of the present invention's three axle micro-mechanical accelerometers.
Fig. 2 is the present invention's three axle micro-mechanical accelerometer spatial structure side views.
Fig. 3 is the present invention's three axle micro-mechanical accelerometer structural sheet schematic diagram.
Fig. 4 is the front view of the present invention's three axle micro-mechanical accelerometer substrates.
Embodiment
Below in conjunction with the drawings and specific embodiments, the present invention is described in further detail:
Be perspective view and the side view thereof of single structure micromechanics three axis accelerometer of the present invention as depicted in figs. 1 and 2, three axle micro-mechanical accelerometers comprise substrate 1 and are fixedly mounted on the accelerometer main body 2 on substrate 1.Accelerometer main body 2 comprises mass 3, z repacking survey battery lead plate 4 and plane detecting unit, and its midplane detecting unit comprises the x repacking survey capacitor that the y repacking being made up of movable electrode 6a and fixed electorde 7a is surveyed capacitor and is made up of movable electrode 6b and fixed electorde 7b.Plane detecting unit is connected with mass 3, and is fixed on substrate by brace summer 5.Z axis detecting electrode plate 4 is fixed on the position corresponding to mass 3 on substrate 1.
If Fig. 3 is single structure micromechanics three axis accelerometer structural sheet schematic diagram of the present invention, mass 3 comprises mass 3a and mass 3b as seen from the figure, and brace summer 5 comprises brace summer 5a and brace summer 5b, and brace summer 5a and 5b are distributed on same straight line; Brace summer 5a and 5b are fixed on substrate 1 by one end respectively, and the other end is connected with mass 3.Mass 3a and 3b are distributed in the both sides of brace summer 5, and its junction is connected with brace summer 5.Plane detecting unit comprises movable electrode 6, fixed electorde 7 and framework 9; Movable electrode 6 comprises movable electrode 6a and movable electrode 6b, and movable electrode 6a and 6b are fixed on framework 9; Described movable electrode 6a is along x direction of principal axis layout in the plane that is parallel to substrate 1, and described movable electrode 6b arranges along y direction of principal axis in the plane that is parallel to substrate 1; Fixed electorde 7 comprises fixed electorde 7a and fixed electorde 7b, and described fixing moving electrode 7a is along x direction of principal axis layout in the plane that is parallel to substrate 1, and described fixed electorde 7b arranges along y direction of principal axis in the plane that is parallel to substrate 1; Described fixed electorde 7 is installed with on substrate 1.
As shown in Figure 4, the position corresponding to mass 3 on substrate 1 makes metal level, forms z repacking and surveys battery lead plate 4.Z axis detecting electrode comprises detecting electrode 4a and detecting electrode 4b, is distributed in respectively the position corresponding to mass 3a and 3b on substrate 1.
The above; be only the embodiment of the best of the present invention, but protection scope of the present invention is not limited to this, is anyly familiar with in technical scope that those skilled in the art disclose in the present invention; the variation that can expect easily or replacement, within all should being encompassed in protection scope of the present invention.
The content not being described in detail in instructions of the present invention belongs to professional and technical personnel in the field's known technology.
Claims (4)
1. three axle micro-mechanical accelerometers, is characterized in that: comprise substrate (1) and be fixedly mounted on the accelerometer main body (2) on substrate (1); Described accelerometer main body (2) comprises mass (3), z repacking survey battery lead plate (4) and plane detecting unit, comprises plane x repacking measurement unit and plane y repacking measurement unit; Described plane detecting unit is connected with mass (3); Described mass (3) is fixed on substrate by brace summer (5); Described z repacking is surveyed battery lead plate (4) and is installed with in the upper position corresponding to mass (3) of substrate (1).
2. a kind of three axle micro-mechanical accelerometers according to claim 1, is characterized in that: described mass (3) comprises mass 1(3a) and mass 2(3b), described brace summer (5) comprises brace summer 1(5a) and brace summer 2(5b); Described brace summer 1(5a) and brace summer 2(5b) be distributed on same straight line, and it is upper to be fixed on substrate (1) by its one end respectively, and one end is connected with mass (3) in addition; Described mass 1(3a) and 2(3b) be distributed in the both sides of brace summer (5) and interconnect, mass 1(3a) with 2(3b) junction be connected with brace summer (5).
3. according to claim 1 and a kind of three axle micro-mechanical accelerometers claimed in claim 2, it is characterized in that: described z repacking is surveyed battery lead plate (4) and comprised that z repacking surveys battery lead plate 1(4a) and z repacking survey battery lead plate 2(4b), battery lead plate 1(4a is surveyed in described z repacking) and 2(4b) be distributed in respectively substrate (1) above corresponding to mass 1(3a) and mass 2(3b) position.
4. according to claim 1 and a kind of three axle micro-mechanical accelerometers claimed in claim 2, it is characterized in that: described plane detecting unit comprises movable electrode (6), fixed electorde (7) and framework (9); Described movable electrode (6) comprises movable electrode 1(6a) and movable electrode 2(6b), and movable electrode 1(6a) and movable electrode 2(6b) be fixed on framework (9); Described movable electrode 1(6a) normal direction in the plane that is parallel to substrate (1) is parallel to y direction of principal axis, described movable electrode 2(6b) normal direction in the plane that is parallel to substrate (1) is parallel to x direction of principal axis; Described fixed electorde (7) comprises fixed electorde 1(7a) and fixed electorde 2(7b); Described fixing moving electrode 1(7a) normal direction in the plane that is parallel to substrate (1) is parallel to y direction of principal axis, described fixed electorde 2(7b) method phase direction in the plane that is parallel to substrate (1) is parallel to x direction of principal axis; Described fixed electorde (7) is installed with on substrate (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410481613.1A CN104198764A (en) | 2014-09-20 | 2014-09-20 | Three-axis micro mechanical accelerometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410481613.1A CN104198764A (en) | 2014-09-20 | 2014-09-20 | Three-axis micro mechanical accelerometer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104198764A true CN104198764A (en) | 2014-12-10 |
Family
ID=52084079
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410481613.1A Pending CN104198764A (en) | 2014-09-20 | 2014-09-20 | Three-axis micro mechanical accelerometer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104198764A (en) |
-
2014
- 2014-09-20 CN CN201410481613.1A patent/CN104198764A/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US10330471B2 (en) | Triaxial micro-electromechanical gyroscope | |
| CN102590555A (en) | Resonance-force balance capacitance type three-axis acceleration transducer and manufacture method | |
| CN102608355A (en) | Resonance-equilibrium tunnel current type three-axis acceleration transducer and manufacturing method thereof | |
| CN102364311A (en) | Six-degree of freedom vibration absolute measuring method based on triaxial acceleration sensor array | |
| US20130042686A1 (en) | Inertia sensing apparatus | |
| CN105698661A (en) | Contact type scanning probe for micro-nano three-coordinate measuring machine | |
| CN103438878A (en) | Triaxial micromechanical gyroscope | |
| US20200081029A1 (en) | Increased sensitivity z-axis accelerometer | |
| CN103543292A (en) | Composite accelerometer based on capacitance effect and tunnel effect | |
| CN108089027A (en) | Sensor and navigation attitude instrument based on MEMS capacitive micro-acceleration gauge | |
| CN102636162A (en) | Three-axis micro-mechanical gyroscope | |
| CN103454449A (en) | Three-axis micro-mechanical accelerometer | |
| CN104296746A (en) | Novel minitype inertial measurement unit assembly | |
| CN100449316C (en) | Arrangement structure of sensing elements of six-axle acceleration transducer | |
| CN102680738B (en) | Transverse-interference-resistant silicon nanobelt giant-piezoresistive-effect micro-accelerometer | |
| Dalola et al. | Micromachined piezoresistive inclinometer with oscillator-based integrated interface circuit and temperature readout | |
| CN108872637B (en) | Two-axis flexible pendulum accelerometer | |
| CN104764904B (en) | A kind of three axle piezoelectric accelerometers | |
| CN113624995A (en) | Three-axis accelerometer | |
| US20190135612A1 (en) | Micromechanical z-inertial sensor | |
| CN201327390Y (en) | Micromechanics inertial measuring instrument based on CAN bus | |
| CN105627949A (en) | Optical sensing-type three-dimensional high-precision contact scanning measurement probe | |
| CN113466491A (en) | Sensitive structure of satellite accelerometer | |
| CN210572371U (en) | Three-axis capacitive micro accelerometer | |
| US9689933B2 (en) | Magnetic field sensor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20141210 |