CN104178750A - Suspension-type heating system - Google Patents
Suspension-type heating system Download PDFInfo
- Publication number
- CN104178750A CN104178750A CN201310189320.1A CN201310189320A CN104178750A CN 104178750 A CN104178750 A CN 104178750A CN 201310189320 A CN201310189320 A CN 201310189320A CN 104178750 A CN104178750 A CN 104178750A
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- Prior art keywords
- heating
- film
- suspension
- heating system
- substrate
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Chemical Vapour Deposition (AREA)
Abstract
Description
Claims (7)
- High purity material chamber for heat treated, be particularly useful for the structural scheme of the substrate heating system of film growth, have that Heating temperature is high, homogeneous heating, feature that film forming homogeneous quality is high, it is characterized in that: adopt sample is hung to the method for placing, can farthest discharge the deformation causing due to high-temperature expansion, be conducive to grow high-quality thin-film material.
- 2. heating system according to claim 1, is characterized in that: at least comprise heater block, heat insulating member and hang hold assembly.
- 3. heater block according to claim 2 further comprises again: be heated sample, hot-plate and heating thermal resistance; Being heated sample, hot-plate, heating thermal resistance three fits tightly; Heater block at least also comprises three groups of wires and organizes temperature control device more.
- 4. heat insulating member according to claim 2 further comprises again: at least three layers of tubbiness thermal baffle, wherein in two-layer employing high temperature material molybdenum, outermost layer can adopt stainless material at utmost to reduce costs.
- 5. suspension gripping element according to claim 2 further comprises again: at least three group spring assemblies support heated sample; One group of suspension supporting frame hangs heater block to place; One group of stationary installation is used for supporting whole heating cavity, and is fixed on flanged plate.
- 6. the sample that is heated according to claim 3, it is the substrate of film growth, it is characterized in that: any substrate that can be used for film growth, this type of substrate comprises: a kind of or two or more combination arbitrarily in copper (Cu), aluminium (Al), nickel (Ni), cobalt (Co), iron (Fe), platinum (Pt), gold (Au), chromium (Cr), magnesium (Mg), manganese (Mn), molybdenum (Mo), ruthenium (Rh), tantalum (Ta), titanium (Ti), rhodium (Rh), tungsten (W), silicon (Si), silicon carbide (SiC).
- 7. heating thermal resistance according to claim 3, is characterized in that: do not adopt conventional heater strip, and adopt tungsten sheet or molybdenum sheet, farthest to improve heating uniformity.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201310189320.1A CN104178750A (en) | 2013-05-21 | 2013-05-21 | Suspension-type heating system |
Applications Claiming Priority (1)
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CN201310189320.1A CN104178750A (en) | 2013-05-21 | 2013-05-21 | Suspension-type heating system |
Publications (1)
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CN104178750A true CN104178750A (en) | 2014-12-03 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201310189320.1A Pending CN104178750A (en) | 2013-05-21 | 2013-05-21 | Suspension-type heating system |
Country Status (1)
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CN (1) | CN104178750A (en) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN86105600A (en) * | 1985-07-25 | 1987-02-04 | 日电阿尼尔瓦株式会社 | Vacuum chemical reaction apparatus |
CN1793413A (en) * | 2005-12-19 | 2006-06-28 | 广东工业大学 | Process for colouring martensite stainless steel piston ring |
CN101654769A (en) * | 2009-08-26 | 2010-02-24 | 杭州泛亚水暖器材有限公司 | Vacuum ion plating method |
CN101849032A (en) * | 2007-11-05 | 2010-09-29 | 株式会社爱发科 | Vacuum-evaporation source, and organic EL element manufacturing apparatus |
-
2013
- 2013-05-21 CN CN201310189320.1A patent/CN104178750A/en active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN86105600A (en) * | 1985-07-25 | 1987-02-04 | 日电阿尼尔瓦株式会社 | Vacuum chemical reaction apparatus |
CN1793413A (en) * | 2005-12-19 | 2006-06-28 | 广东工业大学 | Process for colouring martensite stainless steel piston ring |
CN101849032A (en) * | 2007-11-05 | 2010-09-29 | 株式会社爱发科 | Vacuum-evaporation source, and organic EL element manufacturing apparatus |
CN101654769A (en) * | 2009-08-26 | 2010-02-24 | 杭州泛亚水暖器材有限公司 | Vacuum ion plating method |
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Legal Events
Date | Code | Title | Description |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: CHANGZHOU GUOCHENG NEW MATERIAL TECHNOLOGY CO., LT Free format text: FORMER OWNER: JIANGNAN GRAPHENE RESEARCH INSTITUTE Effective date: 20150908 |
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C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20150908 Address after: 213149 No. 6 Xiangyun Road, Wujin Economic Development Zone, Jiangsu, Changzhou Applicant after: Changzhou Tan Wei nanosecond science and technology company limited Applicant after: Changzhou into a new Mstar Technology Ltd Address before: 213149 No. 6 Xiangyun Road, Wujin Economic Development Zone, Jiangsu, Changzhou Applicant before: Changzhou Tan Wei nanosecond science and technology company limited Applicant before: JiangNan Graphene Research Institute |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20160505 Address after: West Taihu science and Technology Industrial Park Road, Wujin District 213000 auspicious clouds in Jiangsu province Changzhou City No. 6 Applicant after: Changzhou into a new Mstar Technology Ltd Address before: 213149 No. 6 Xiangyun Road, Wujin Economic Development Zone, Jiangsu, Changzhou Applicant before: Changzhou Tan Wei nanosecond science and technology company limited Applicant before: Changzhou into a new Mstar Technology Ltd |
|
WD01 | Invention patent application deemed withdrawn after publication | ||
WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20141203 |