CN104175004A - Laser processing machine - Google Patents

Abstract

The invention discloses a laser processing machine which is capable of carrying out tiny tapping processing. The laser processing machine is characterized in that a processing head (20) is provided with a piezoelectric rack (23), wherein the piezoelectric rack can be used as a component moving on the flat surface which is orthogonal to an optical axis (a). According to the laser processing machine disclosed by the invention, processing control is carried out by externally applying voltage to an electrode of a piezoelectric actuator (23b) (a piezoelectric element) of the piezoelectric rack (23) and bringing an required action, a condenser lens (25) on a lens holding part (24a) is kept moving in the direction which is orthogonal to the optical axis (a) through a lens support (24), thus a focal pint of laser light is enabled to move in an opening part (29a1) of the front end of a spray nozzle (29a), and small holes and the like can be formed.

Description

Laser machine

Technical field

The present invention relates to laser machine.

Background technology

Laser disconnecting device is that the workpiece of metallic plate is irradiated to the laser of optically focused and spray assist gas the laser machine that carries out the fine cut-out of high accuracy, high-quality.Fig. 9 is the cutaway view that represents laser machine 100 in the past.

In this laser machine 100, laser never illustrated laser oscillator to collector lens 102 incidents in processing head 101, laser by these collector lens 102 optically focused is irradiated from the peristome of end sealing (チ ッ プ シ ー Le) parts 110, so that focus is tied on the machined object W of metallic plate.The circumference of machined object W is maintained at not shown workpiece with on the installing frame of workbench, and not shown workpiece can move with workbench and form in XY plane.Thus, with the movement of workbench, machined object W self is relatively moved by the workpiece by not shown with respect to processing head 101, change the range of exposures of laser.

Patent documentation 1: Unexamined Patent 11-254169 communique

Patent documentation 2: JP 2003-215419 communique.

But, making workpiece movable workbench change in the structure of range of exposures of laser as above-mentioned laser machine in the past, have and can not change exactly the range of exposures of laser, the problem points that is difficult to carry out the perforate processing of the very small hundreds of μ m left and right of electronic component etc.

Summary of the invention

The present invention makes in order to address the above problem, and object is to provide a kind of laser machine that can carry out very small perforate processing.

In order to reach this object, the laser machine of the 1st mode of the present invention, possess processing head and machine table, described processing head has the nozzle that makes the collector lens of laser focusing and spray assist gas to the illuminated portion of the above-mentioned laser for machined object, described machine table is disposed in the below of this processing head and keeps above-mentioned machined object, laser by after above-mentioned collector lens optically focused is irradiated above-mentioned machined object and processed from the peristome of the spray nozzle front end of above-mentioned processing head, and described laser machine possesses: support unit; Movable agency, is folded between this support unit and above-mentioned processing head, make above-mentioned processing head with respect to above-mentioned support unit with the plane of the light shaft positive cross of above-mentioned laser on move; By by above-mentioned movable agency, above-mentioned processing head is moved in above-mentioned plane with respect to above-mentioned machined object, above-mentioned machined object is processed.

According to the laser machine of the 1st mode of the present invention, processing head has the nozzle that makes the collector lens of laser focusing and spray assist gas to the illuminated portion of the laser for machined object, by the laser by collector lens optically focused is irradiated the machined object remaining on machine table from the peristome of spray nozzle front end, machined object is cut off to (perforate) processing.

Here, according to the laser machine described in technical scheme 1, processing head can by be folded in a movable agency between support unit and processing head with respect to support unit with the plane of the light shaft positive cross of laser on move.Thus, by make processing head with respect to machined object with the plane of the light shaft positive cross of laser on move, compared with the situation that machine table is moved, can in very narrow scope, change the range of exposures of laser.Thereby, can carry out the processing of high-speed, high precision, so there is the effect of the very small perforate processing that can carry out electronic component etc.

According to the laser machine described in technical scheme 2, except the effect that the laser machine described in technical scheme 1 plays, sleeve has the embedded hole of chimeric optical fiber, and head of a quilt movable agency hangs and holds; Make collector lens with respect to sleeve with the plane of the light shaft positive cross of laser on mobile lens movable agency hang and be held on sleeve.

Thus, by made by lens movable agency collector lens with respect to sleeve with the plane of the light shaft positive cross of laser on move, change the range of exposures of the laser being transmitted by optical fiber in can the very narrow scope in the scope of the peristome of the spray nozzle front end of processing head.Thus, can carry out the processing of high-speed, high precision, so there is the effect of the very small perforate processing that can carry out electronic component etc.

According to the laser machine described in technical scheme 3, except the effect that the laser machine described in technical scheme 2 plays, be formed with through hole at the central portion opening of lens movable agency; Lens carrier with and see through and form gapped state between hole and be installed on lens movable agency; Lens carrier has the lens maintaining part of accommodating collector lens, and the parts that form the lower side in the parts of processing head can move and form with respect to sleeve.

Here, scioptics movable agency make lens carrier with respect to sleeve in the case of with the plane of the light shaft positive cross of laser on mobile, post parts are inserted in above-mentioned gap to do not interfere with lens carrier, by post parts, nozzle is bearing on sleeve, so there is the effect that can utilize through the remaining space configuration post parts that do not configure lens carrier in hole.

Thereby, do not insert compared with the situation (being configured in the situation in the outside of processing head) seeing through in hole with post parts, can make processing head become compact.Therefore, can make the end of processing head closer to machined object, there is the effect of the waste that can reduce material.

According to the laser machine described in technical scheme 4, except the effect that the laser machine described in technical scheme 2 plays, because the lens carrier dismounting of accommodating collector lens is arranged on lens movable agency freely, so there is the effect by lens carrier being pulled down from lens movable agency to the maintenance that can be housed in the collector lens lens carrier.

In addition, after collector lens is safeguarded, the lens carrier of pulling down from lens movable agency or other lens carrier are installed to lens movable agency, but in the situation that lens carrier is installed to lens movable agency, in order to prevent the deviation of irradiation position of laser, carry out as follows the position adjustment of collector lens with respect to optical fiber.

First, after the position (origin position) that machine table is moved to be defined as the position consistency of optical fiber and collector lens is upper, optical fiber is pulled down from the embedded hole of sleeve, after the collector lens that maintenance is completed is accommodated in lens carrier, lens carrier is temporarily anchored on lens movable agency.

And, if replace the optical fiber pulled down from embedded hole, centralizer is inserted to (corresponding to " chimeric " described in technical scheme 4), be formed on the maintenance face in interior week or the periphery of fixture maintaining part with this centralizer maintenance.

If keep the maintenance face of the fixture maintaining part of lens carrier by centralizer, lens carrier is located with respect to sleeve, so lens carrier determines uniquely with respect to the position of embedded hole.Under this state (keeping the state of the maintenance face of the fixture maintaining part of lens carrier with centralizer), after lens carrier is formally fastened on lens movable agency, centralizer is taken out from embedded hole, replace the centralizer taking out and optical fiber is inserted in embedded hole, thus, collector lens completes with respect to the position adjustment of optical fiber.

Thus, by utilizing centralizer, lens carrier is located with respect to sleeve (embedded hole), so can determine uniquely the position of collector lens with respect to optical fiber in the situation that lens carrier being installed on lens movable agency, having and can realize the effect of collector lens for the raising of the assembly precision of optical fiber.

Thereby, have and can not confirm that laser is installed to the effect on lens movable agency to the irradiation position of machined object by lens carrier.Thus, there is following effect: lens carrier can saved in the situation that lens movable agency is installed to the workload of confirming irradiation position, and can eliminate the deviation by the positional precision of bringing in the adjustment operation of confirming to carry out after this irradiation position.As a result, there is following effect: save collector lens installation workload and realize the raising of the efficiency of the installation exercise of collector lens, and can make the positional precision of collector lens become necessarily.

In addition, optical fiber and centralizer are inserted in embedded hole., the hole dual-purpose that inserts optical fiber for hole of centralizer will be inserted.Therefore, do not need the hole (hole that centralizer is special) for inserting centralizer, can omit space and workload for arranging this hole.Thus, there is the effect of cost cutting and the miniaturization that can realize laser machine.

According to the laser machine described in technical scheme 5, except the effect that the laser machine described in technical scheme 2 plays, also play the effect of technical scheme 3 and 4.

According to the laser machine described in technical scheme 6, except the effect that the laser machine described in technical scheme 4 or 5 plays, because maintenance face was formed on the interior week of fixture maintaining part of lens carrier, so compared with being formed on the situation in the periphery of fixture maintaining part of lens carrier with maintenance face, the effect that has the collector lens that can make to be embedded in the embedded hole of lens to maximize.

, because centralizer is formed as and optical fiber same shape, so the maintenance face of the fixture maintaining part of chimeric centralizer is set as the certain size taking optical fiber as benchmark.Here, in the case of maintenance face is formed on interior week of fixture maintaining part of lens carrier, it is upper that centralizer is embedded into interior week of fixture maintaining part, and in the case of maintenance face is formed in the periphery of fixture maintaining part, centralizer is embedded into outward in the periphery of fixture maintaining part.

Thus, be formed on the situation in the periphery of fixture maintaining part with maintenance face compared with, in the case of maintenance face is formed on interior week of fixture maintaining part, can make fixture maintaining part maximize, so can make the embedded hole of lens also maximize.Thereby, have and can make to be embedded into the effect that the collector lens in the embedded hole of lens also maximizes.

According to the laser machine described in technical scheme 7, except the effect that the laser machine described in technical scheme 4 or 5 plays, because fixture maintaining part has and orthogonal the touching to face of maintenance face, so the end face of the inserting side by making centralizer abuts to touching on face of fixture maintaining part, can determine uniquely the chimeric position on the axis direction of centralizer.Thus, do not need the adjustment of centralizer with respect to the chimeric length of lens carrier.Thereby, have the installation exercise that can realize lens carrier efficiency raising and can make the positional precision of collector lens become certain effect.

Brief description of the drawings

Fig. 1 is the side view of the laser disconnecting device of one embodiment of the present invention.

Fig. 2 is from a side stage frame of the arrow II direction observation of Fig. 1 and the enlarged front view of processing head.

Fig. 3 is from a side stage frame of the arrow III direction observation of Fig. 2 and the enlarged side view of processing head.

Fig. 4 (a) is the enlarged side view of processing head, and Fig. 4 (b) is the part enlarged side view of the processing head of the part representing with Y of Fig. 4 (a), and Fig. 4 (c) is the part enlarged front view from the machined object of the arrow IVc direction observation of Fig. 4 (b).

Fig. 5 is the upward view of piezoelectricity stand.

Fig. 6 (a) is the front view of lens carrier, and Fig. 6 (b) is the cutaway view of the lens carrier of the VIb-VIb line of Fig. 3 (a).

Fig. 7 (a) is the side view of centralizer, and Fig. 7 (b) represents lens carrier and the chimeric state of centralizer, is to comprise the lens carrier in axle center separately and the cutaway view of centralizer.

Fig. 8 (a) is the phantom that represents the processing head of the state that lens carrier is installed, and Fig. 8 (b) is the phantom that has represented to pull down the processing head of the state of lens carrier.In addition, Fig. 8 (c) is the phantom that is illustrated in the processing head of the state of chimeric lens carrier on the centralizer being inserted in sleeve, and Fig. 8 (d) is the phantom that represents the processing head of the state after the lens carrier of pulling down is mounted.

Fig. 9 is the side view of laser machine in the past.

Detailed description of the invention

Below, preferred embodiment describe of the present invention with reference to accompanying drawing.First,, with reference to Fig. 1, the structure of laser disconnecting device 1 is described.Fig. 1 is the side view of the laser disconnecting device 1 of one embodiment of the present invention.

As shown in Figure 1, laser disconnecting device 1 is with reference to Fig. 2 to the machined object W(of metallic plate) irradiate the laser of optically focused and spray assist gas and the laser machine that carries out the fine cut-out of high accuracy, high-quality, mainly possess processing head 20, be configured in the below of processing head 20 machine table 40, make the XY stand 50 of machine table 40 parallels, the arm 80 that makes a side stage frame 60 of processing head 20 parallels, forms, extends by flat board fixing XY stand 50 70 with from this flat board 70 by stone material.

Processing head 20 is to irradiate the parts of laser, be arranged on from dull and stereotyped 70 arms 80 that extend, by the laser that irradiates from this processing head 20 by machined object W(with reference to Fig. 2) regulation position cut off (perforate) processing.In addition, about the detailed structure of processing head 20, narrate in the back with reference to Fig. 2 and Fig. 3.

Machine table 40 is belows of being disposed in processing head 20, keeps machined object W(with reference to Fig. 2) parts, for the assist gas that attracts to send here from processing head 20 sides, opposed and be provided with lower bracket (not shown) with processing head 20.In addition, machine table 40 can move up and down, and rises by machine table 40 under the state keeping machined object W, and machined object W is clamped by processing head 20 and machine table 40.In addition, in machine table 40, be provided with and keep fixture 41, by this maintenance fixture 41, the machined object W as processing object is remained in machine table 40 with tensioning state.

XY stand 50 is for making the parts of machine table 40 with respect to processing head 20 planar movements, be fixed on dull and stereotyped 70, machine table 40 laser disconnecting device 1 be arranged under the state on ground (horizontal plane) can with the optical axis a(of laser with reference to Fig. 3) orthogonal plane (XY plane) is upper mobile.

Side stage frame 60 is for making the parts of processing head 20 with respect to arm 80 planar movements, be arranged under the state on ground (horizontal plane) at laser disconnecting device 1, can by a side stage frame 60 make processing head 20 with the optical axis a(of laser with reference to Fig. 3) orthogonal plane (UV plane) is upper mobile.In addition, narrate in the back with reference to Fig. 2 and Fig. 3 about a detailed structure for side stage frame 60.Arm 80 is parts of establishing processing head 20 for hanging, is fixed wtih support unit 2 on its lower surface.

The setting of initial position is undertaken by XY stand 50 and a side stage frame 60.,, after machine table 40 being moved by XY stand 50, by with a side stage frame 60, processing head 20 being moved, machined object W is positioned to initial position with respect to processing head 20.After processed 20 of the machined object W being positioned and machine table 40 clampings, from processing head 20, the machined object W of this clamping is irradiated to laser, cut off (perforate) processing.

Then, describe with reference to the detailed structure of the correct side stage frame 60 of Fig. 2～Fig. 5 and processing head 20.Fig. 2 is from a side stage frame 60 of the arrow II direction observation of Fig. 1 and the enlarged front view of processing head 20, and Fig. 3 is from a side stage frame 60 of the arrow III direction observation of Fig. 2 and the enlarged side view of processing head 20.Fig. 4 (a) is the enlarged side view of processing head 20, and Fig. 4 (b) is the part enlarged side view of the processing head 20 of the part representing with Y of Fig. 4 (a), and Fig. 4 (c) is the part enlarged front view from the machined object of the arrow IVc direction observation of Fig. 4 (b).Fig. 5 is the upward view of piezoelectricity stand 23, illustrates the state that lens carrier 24 described later and post parts 27 are installed.In addition, in Fig. 3, a part for side stage frame 60 and processing head 20 use cross sections are shown, Fig. 4 (a) illustrates the state that the processing head of Fig. 3 20 is amplified, and the machined object W of Fig. 4 (b) is amplified diagram by Fig. 4 (c).In addition, the circle being represented by the double dot dash line of Fig. 4 (c) represents the scope of the peristome 29a1 of the front end of nozzle 29a described later.

As shown in Fig. 2 and 3, side stage frame 60 is the parts for making processing head 20 parallels, be folded between processing head 20 and support unit 2, possess and can move and the 1st parts 5 that form and can moving and the 2nd parts 10 that form with respect to the 1st parts 5 with respect to support unit 2, on the 2nd parts 10, be fixed wtih processing head 20.

Support unit 2 is for the parts from top supporting by the 1st parts 5, is formed as overlooking the tabular of rectangle.Support unit 2 is set as, and makes the side on two groups of relative limits of its rectangle longer than the opposing party, is disposed in circumference and remains on the top of the machined object W on holding device (not shown).Support unit 2 possesses length direction (Fig. 1 left and right directions) both sides (Fig. 1 downside) the outstanding a pair of protuberance 3 downward from lower surface, and this pair of protuberance 3 is formed as spreading all over the ridge shape that the short side direction (Fig. 1 paper vertical direction) of support unit 2 is parallel to each other.Along the length direction of this protuberance 3, be fixed wtih respectively the 1st straight dynamic bearing 4 in the lower end of protuberance 3.

The 1st straight dynamic bearing 4 is the parts for the 1st parts 5 being supported with respect to protuberance 3 and along the length direction (Fig. 1 paper vertical direction) of protuberance 3, the 1st parts 5 being relatively moved with respect to protuberance 3.The 1st straight dynamic bearing 4 possesses track 4a and the slide block 4b that relatively moved by this track 4a guiding and forming, and track 4a is fixed on protuberance 3, and on the other hand, slide block 4b is fixed on the 1st parts 5.

The 1st parts 5 are can on the straight line parallel with the lower surface of support unit 2, move and the parts that form, are carbon-fiber reinforced resins (CFRP) system, are formed as overlooking the tabular of rectangle.Between the upper surface of the 1st parts 5, a pair of the 1st straight dynamic bearing 4, dispose the 1st driving mechanism 6 being formed by linear motor.

The 1st driving mechanism 6 is for making the 1st parts 5 and the 1st straight dynamic bearing 4(slide block 4b) together with along the straight-line mechanism of protuberance 3, possess the fixture 6a of the linearity on the upper surface that is fixed on the 1st parts 5 and the movable piece 6b that can form with respect to this fixture 6a and forming with relatively moving.Fixture 6a configures in the mode parallel with the track 4a of the 1st straight dynamic bearing 4, and on the other hand, movable piece 6b can not be with respect to support unit 2 engagement movably on the lower surface of support unit 2.Thus, by driving the 1st driving mechanism 6, can make the 1st parts 5 move with respect to support unit 2.Specification equal in quality also identical linear motor is arranged two and form by the 1st driving mechanism 6, by the driving force of these two linear motors, the 1st parts 5 moved.

In addition, protuberance 3 is outstanding downward from the lower surface of support unit 2, is fixed wtih the 1st straight dynamic bearing 4 of supporting the 1st parts 5 in the lower end of this protuberance 3.Therefore,, by by protuberance 3 being added to optical axis direction length (Fig. 1 above-below direction) after the 1st linear parts 4 sets slightly greatlyr than the height of the 1st driving mechanism 6, the interval that can configure the 1st driving mechanism 6 can be set between support unit 2 and the 1st parts 5.As a result, can effectively utilize wasted space configuration the 1st driving mechanism 6 between support unit 2 and the 1st parts 5.

On the upper surface of the 1st parts 5 between two linear motors, erect optical fiber 13(aftermentioned) cylindrical portion 7 of the loosening tubular running through.The loosening optical fiber 13 being applied in cylindrical portion 7 runs through loosening the through hole (not shown) on the thickness direction (Fig. 1 above-below direction) being formed through at the 1st parts 5 again.

As shown in Figure 2, the 2nd parts 10 are supported from top by the 1st parts 5.The 1st parts 5 possess short side direction (Fig. 2 left and right directions) both sides from lower surface outstanding a pair of protuberance 8 downward, and this pair of protuberance 8 is formed as spreading all over the ridge shape that the length direction (Fig. 2 paper vertical direction) of the 1st parts 5 is parallel to each other.The protuberance 3 of support unit 2 and the protuberance 8 of the 1st parts 5 are overlooked middle orthogonal configuration.Along the length direction of this protuberance 8, in the lower end of protuberance 8, be fixed wtih respectively the 2nd straight dynamic bearing 9.

The 2nd straight dynamic bearing 9 is the parts for the 2nd parts 10 being supported with respect to protuberance 8 and along the length direction (Fig. 2 paper vertical direction) of protuberance 8, the 2nd parts 10 being relatively moved with respect to protuberance 8.The 2nd straight dynamic bearing 9 possesses track 9a and the slide block 9b that relatively moved by this track 9a guiding and forming, and track 9a is fixed on protuberance 8, and on the other hand, slide block 9b is fixed on the 2nd parts 10.

The 2nd parts 10 are the parts that can form with the orthogonal movement of moving direction of the 1st parts 5 on the straight line parallel with the lower surface of the 1st parts 5, are formed as overlooking the tabular of rectangle, are fixed wtih processing head 20 on lower surface.The 2nd parts 10 and the 1st parts 5 are similarly carbon-fiber reinforced resins system.Between the upper surface of the 2nd parts 10, a pair of the 2nd straight dynamic bearing 9, dispose the 2nd driving mechanism 11 being formed by linear motor.

The 2nd driving mechanism 11 is for making the 2nd parts 10 and the 2nd straight dynamic bearing 9(slide block 9b) together with along the straight-line mechanism of protuberance 8, possess the fixture 11a of the linearity on the upper surface that is fixed on the 2nd parts 10 and the movable piece 11b that can form with respect to fixture 11a and forming with relatively moving.Fixture 11a configures in the mode parallel with the track 9a of the 2nd straight dynamic bearing 9, and on the other hand, movable piece 11b can not be with respect to the 1st parts 5 engagement movably on the lower surface of the 1st parts 5.Thus, by driving the 2nd driving mechanism 11, can make the 2nd parts 10 move with respect to the 1st parts 5.

The 2nd driving mechanism 11 is by forming with 1 linear motor of a same size equal in quality of the linear motor that forms the 1st driving mechanism 6.Due to the part (linear motor) of the 1st driving mechanism 6 and the 2nd driving mechanism 11 use same sizes is formed, so can reduce the kind as the part of stock's keeping.

In addition, be extruded with downward protuberance 8 from the lower surface of the 1st parts 5, on the lower end of this protuberance 8, be fixed wtih the 2nd straight dynamic bearing 9 of supporting the 2nd parts 10.Therefore, by by protuberance 8 being added to optical axis direction length (Fig. 2 above-below direction) after the 2nd straight dynamic bearing 9 sets slightly greatlyr than the height of the 2nd driving mechanism 11, the interval that can configure the 2nd driving mechanism 11 can be set between the 1st parts 5 and the 2nd parts 10.As a result, can effectively utilize wasted space configuration the 2nd driving mechanism 11 between the 1st parts 5 and the 2nd parts 10.

In addition, on the upper surface of the 2nd parts 10 between the 2nd driving mechanism 11 and the 2nd straight dynamic bearing 9, erect the cylindrical portion 12 of the optical fiber 13 loosening tubulars that run through.Optical fiber 13 is the flexible parts that have for propagating the laser that formed by laser oscillator (not shown), extend through in through hole (not shown) and cylindrical portion 7,12 by loosening, described through hole (not shown) is formed through on the 1st parts 5 and the 2nd parts 10, and laser is propagated to processing head 20.Owing to by optical fiber 13, laser being propagated to processing head 20, thus compare to the mechanism of processing head incident with make laser via speculum, easily moving freely corresponding to processing head 20.In addition, owing to can not needing speculum, thus can make the propagation mechanism of laser simplify, and can make to be bearing in mass body (the comprising processing head 20) lightweight on support unit 2.As a result, can make the inertia force of the mass body moving with respect to support unit 2 diminish, so can improve the positional precision for the processing head 20 of the driving control of the 1st driving mechanism 6 and the 2nd driving mechanism 11, can carry out high speed and high-precision Laser Processing.

In addition, optical fiber 13 is in order to become flexible and to extend through in the through hole (not shown) being formed through on the thickness direction (Fig. 2 above-below direction) at the 2nd parts 10 to processing head 20 propagated laser.By by loosening optical fiber 13 extend through in the through hole that is formed through on the 1st parts 5 and the 2nd parts 10 and cylindrical portion 7,12 and avoid the 1st straight dynamic bearing 4, the 2nd straight dynamic bearing 9, the 1st driving mechanism 6 and the 2nd driving mechanism 11 configure optical fiber 13, can prevent make the 1st parts 5 and the 2nd parts 10 with optical axis a orthogonal direction on while moving, more than the bending radius of optical fiber 13 degree with needs diminish.Thus, can prevent the transmission efficiency decline of laser.And then owing to extending through in cylindrical portion 7,12 loosening optical fiber 13, so compare with the situation that there is no cylindrical portion 7,12, the area that can make the periphery of optical fiber 13 expose diminishes.Can protect thus optical fiber 13 to make it not fragile.

Because laser machine 1 forms as described above, thus by the 1st driving mechanism 6 and the 2nd driving mechanism 11 are driven to control individually, can make to be fixed on processing head 20 on the 2nd parts 10 relatively move with the orthogonal plane of the optical axis a of laser on.

In addition, due to two linear motors of the 1st driving mechanism 6() fixture 6a be configured on the 1st parts 5, so the mass body moving by the 1st driving mechanism 6 is the 1st parts the 5, the 2nd parts 10, processing head 20, the 1st driving mechanism 6 and a 2nd driving mechanism 11(3 linear motor).On the other hand, due to a 2nd driving mechanism 11(1 linear motor) fixture 11a be configured on the 2nd parts 10, so the mass body moving by the 2nd driving mechanism 11 is the 2nd parts 10, processing head 20 and a 2nd driving mechanism 11(1 linear motor).

As above, although the quality of the 2nd driving mechanism 11 is the load of the 1st driving mechanism 6 and the 2nd driving mechanism 11, but by making the quality little (quantity that makes linear motor is half) of mass ratio the 1st driving mechanism 6 of the 2nd driving mechanism 11, can make to diminish as the quality of the mass body of the load of the 2nd driving mechanism 11.As a result, can make to diminish as the inertia force of the mass body of the load of the 2nd driving mechanism 11, can improve the positional precision for the driving control of the 2nd driving mechanism 11.

In addition, the 1st driving mechanism 6 is the twice of the 2nd driving mechanism 11 by making the quantity of linear motor, driving force is set as to the approximately twice of the driving force of the 2nd driving mechanism 11.Although the 1st driving mechanism 6 is large as mass ratio the 2nd driving mechanism 11 of the mass body of load, because driving force is set greatlyr than the 2nd driving mechanism 11, makes mass body move so can have more than neededly.As a result, can improve the positional precision for the driving control of the 1st driving mechanism 6.As above, by the 2nd driving mechanism 11 being set as to than the 1st driving mechanism 6 light weights, on the other hand the driving force of the 1st driving mechanism 6 is set greatlyr than the driving force of the 2nd driving mechanism 11, can carry out high speed and high-precision processing.

In addition, the 1st driving mechanism 6 is formed the linear motor of the 2nd driving mechanism 11, is made as twice (increasing the quantity of linear motor) with respect to the quantity of the linear motor of the 2nd driving mechanism 11 by use, makes driving force become the approximately twice of the 2nd driving mechanism 11.In order to make driving force become large, can not make the quantity of linear motor increase and make the driving force of linear motor self become large, but owing to making the specification generalization of linear motor, change driving force by the quantity that changes this linear motor, so can make the kind of the linear motor of guaranteeing as stock become (being reduced to), can make stock's management facilitation.

In addition, in the situation that 1 linear motor of the 1st driving mechanism 6 use is formed, in order to ensure driving force, linear motor maximizes, but because the driving force that the 1st driving mechanism 6 is needed is by separately burden of multiple (two) linear motor, so can make each linear motor miniaturization (low level).The wasted space that as a result, can effectively utilize the 1st parts 5 configures multiple linear motor plane earths.Thus, can make to shorten to the optical axis direction length of the 2nd parts 10 from support unit 2, can realize densification.

In addition, because the 1st parts 5 and the 2nd parts 10 are formed by specific strength compared with steel and carbon-fiber reinforced resins (CFRP) better than spring rate and that coefficient of thermal expansion is less, so with make the 1st parts 5 and the 2nd parts 10 for compared with metal situation, can make the 1st parts 5 and the 2nd parts 10 lightweights.As a result, can make the inertia force of the mass body moving with respect to support unit 2 diminish, so can make to improve for the positional precision of the processing head 20 of the driving control of the 1st driving mechanism 6 and the 2nd driving mechanism 11.And then, owing to can making to diminish for the 1st parts 5 of variations in temperature and the change in size of the 2nd parts 10 compared with metal situation with making the 1st parts 5 and the 2nd parts 10, so can carry out high-precision Laser Processing.

As shown in Figures 3 and 4, processing head 20 is by laser is moved with respect to machined object W while irradiates the parts that machined object W cut off to (perforate) processing, mainly possesses: optical fiber 22, transmits laser; Sleeve 21, the embedded hole 21a hanging with the leading section of chimeric this optical fiber 22 is held on a side stage frame 60; Piezoelectricity stand 23, hangs and is held on this sleeve 21; Lens carrier 24, can be moved and form with respect to sleeve 21 by piezoelectricity stand 23; Collector lens 25, is housed in lens carrier 24, by the laser focusing irradiating from optical fiber 22; Cover stent 26, covers collector lens 25 from below; Post parts 27, are bearing on sleeve 21 cover stent 26; Channel member 28, is entrenched on cover stent 26; Upper bracket 29, has nozzle 29a and is fitted on channel member 28.

Sleeve 21 is to be embedded in embedded hole 21a, by the parts on fixing optical fiber 22 side stage frame 60 to the end with matched in clearance by the leading section of optical fiber 22, be formed with the roughly position cylindraceous of the embedded hole 21a with inner diameter D 2 and from this roughly the periphery at position cylindraceous with flange shape position of stretching out, this position of stretching out is attached on the 2nd parts 10 of a side stage frame 60 by bolt B 1.

In addition, be extended with the wall 21b of ring-type to the optical axis a side of laser from the inner edge of the lower end (Fig. 2 lower end) of sleeve 21, by this wall 21b by optical fiber 22 engagements.Thus, by by optical fiber 22 engagements on wall 21b, can determine the position of optical fiber 22 with respect to the short transverse (Fig. 2 above-below direction) of sleeve 21.

Optical fiber 22 is the parts for transmitting the laser being formed by laser oscillator (not shown), by there being flexible parts to form.Optical fiber 22 on accompanying drawing, represent the size of same position to the outer diameter D 1 of the chimeric part of embedded hole 21a (leading section) and the inner diameter D 2 of embedded hole 21a, but the outer diameter D 1 of optical fiber 22 is set as than the little size value (D1<D2) that can carry out the degree of matched in clearance of the inner diameter D of sleeve 21 2.

As shown in Fig. 3～Fig. 5, piezoelectricity stand 23 be for make collector lens 25 with respect to sleeve 21 with the orthogonal plane of the optical axis a of laser on mobile parts, mainly possess the fixed part 23a that is fitted in sleeve 21 and be fixed to the piezo-activator 23b on this fixed part 23a by bolt B 2.

Fixed part 23a is for by the parts on fixing piezo-activator 23b side stage frame 60 to the end, mainly possesses the cylindrical portion 23a1 of the tubular in the outer periphery that is embedded into sleeve 21 and stretches out from the upper end of cylindrical portion 23a1, is fixed to the flange part 23a2 piezo-activator 23b by bolt B 2.

Piezo-activator 23b is the thickness with regulation, is formed as overlooking roughly tetragonal parts, mainly possesses in length and breadth or the 23b1 of movable stage portion of oblique displacement, be formed through rectangular-shaped in part in the central see through hole 23b2 and be configured in the periphery of the 23b1 of movable stage portion, be fixed to the main part 23b3 of the frame shape on fixed part 23a with quadrangle shape roughly.In addition, piezoelectricity stand 23 after the mobile end of the processing head 20 being undertaken by a side stage frame 60 with the orthogonal plane of the optical axis a of laser on move.

Piezo-activator 23b is because main part 23b3 arranges integratedly with respect to the flange part 23a2 of fixed part 23a, thus the 23b1 of movable stage portion can with respect to by sleeve 21(chimeric the cylindrical portion 23a1 of fixed part 23a by a side stage frame 60 fixing sleeve 21) mobile and form.That is, the top being fixed on a side stage frame 60 of piezo-activator 23b is fixation side, is drawer at movable side by the fixing below of lens carrier 24 described later, is keeping the lens carrier 24 of collector lens 25 to be fixed on the drawer at movable side of piezo-activator 23b.

On piezo-activator 23b, be provided with electrode, by applied voltage, give and be fixed on the lens carrier 24(collector lens 25 of drawer at movable side) action that brings regulation.That is, be configured to, control by applying voltage, the 23b1 of this movable stage portion is with respect to fixed part 23a(sleeve 21) to prescribed direction displacement.In addition, piezoelectricity stand 23 is owing to driven by piezo-activator 23b, so can carry out the movement under micron unit.Thus, by making collector lens 25 small variations (movement) on the optical axis a orthogonal direction with respect to laser, can carry out the very small perforate processing of electronic component etc.

As shown in Figures 4 and 5, lens carrier 24 is for collector lens 25 is installed to the parts on piezoelectricity stand 23, is formed as facing cross shape by 4 recess 24e.Lens carrier 24 mainly possesses: lens maintaining part 24a, is formed as having axle center L(with reference to Fig. 6) roughly cylindric, as keeping the position of collector lens 25; Fixture maintaining part 24b(is with reference to Fig. 6), as remaining to centralizer 30(described later with reference to Fig. 7) on position; Installation portion 24c, has the installing hole 24c1 that bolt B 3 is inserted; The 24d of foot, links this installation portion 24c and lens maintaining part 24a.In addition, with reference to Fig. 6, the detailed structure of the lens maintaining part 24a to lens carrier and fixture maintaining part 24b etc. is narrated in the back.

In addition, on lens carrier 24,4 24d of foot are formed as same shape, and these 4 24d of foot are erected at respectively seeing through on four limits of hole 23b2 of piezo-activator 23b.The width of the 24d of foot is set as narrower than seeing through the A/F of hole 23b2, so on see through hole 23b2 four jiaos of piezo-activator 23b, exist not by the perforation part of lens carrier 24 shutoff.Connect in parts at these 4, and see through between hole 23b2 and lens carrier 24 and form under gapped state, dispose the post parts 27 that sleeve 21 and cover stent 26 are linked.

As shown in Figure 4, cover stent 26 is that the assist gas in order to make to spray from the assist gas path 28a described later of channel member 28 does not flow into collector lens 25 sides and is disposed in the parts of the below (Fig. 4 below) of lens carrier 24, the flange shape part configuring by being opposite to the part of cross shape and from this flange shape part along lens maintaining part 24a(collector lens 25) extend arrange barrel form, in this barrel, be provided with lens cap 26a.The assist gas importing from assist gas path 28a flows to the lower space of lens cap 26a by the surrounding of the barrel of cover stent 26.

As shown in Figures 4 and 5, post parts 27 are to make to be fixed on a side stage frame 60(sleeve 21) on fixed part 23a and the parts that link of the cover stent 26 of below, one end of post parts 27 is fixed on the lower surface of cylindrical portion 23a1 of fixed part 23a, and the other end is fixed on the upper surface of flange shape part of cover stent 26.In addition, which kind of of the connecting members (not shown) such as adhesives or bolt consolidation method use can, but in the situation that using the connecting member such as bolt owing to 27 dismounting of post parts can being fixed in freely on fixed part 23a and cover stent 26, so with compared with the affixed situation of adhesives, can carry out simply the dismounting operation taking the maintenance of collector lens 25 as the lens carrier 24 of object.

In addition, post parts 27 are disposed on four jiaos through hole 23b2 so that not with lens carrier 24 and see through hole 23b2 and interfere, and lens carrier 24 and see through between the 23b2 of hole and be set with gap.It is perforate below 200 μ m processing that piezo-activator 23b is for example used to diameter, thus with lens carrier 24 and post parts 27 between and and see through the gap corresponding with the maximum moving area of processing the lens carrier 24 bringing because of this perforate be set between hole 23b2 and post parts 27.

On post parts 27, with lens carrier 24(recess 24e) be provided with the 1st conical surface 27a on opposed bight, on post parts 27, be also provided with the 2nd conical surface 27b with seeing through on four jiaos of opposed bights of hole 23b2.

As shown in Figure 4, channel member 28 is the parts cylindraceous that are fitted to the top of cover stent 26, arrange along the shape of lens carrier 24, has been formed through assist gas path 28a in this cylindrical portions.If never illustrated gas supply device is supplied with the assist gas of high pressure to assist gas path 28a, the assist gas of this supply is after by assist gas path 28a, in channel member 28, (lower space of lens cap 26a) flows, with nozzle 29a described later throttling, intensively jet to the place of incision of machined object W thus.

Machine table 4 is made up of the cylindrical form of hollow, to can attract assist gas at the downside of machined object W.Assist gas flow in machine table 4 by the cutting portion of workpiece W, is introduced to square tube 30 by vacuumizing.Thereby, being configured to, the scum silica frost that the cut-out processing along with workpiece W is occurred or spatter slag etc. and carry along with flowing of such assist gas, discharges by square tube 30.

Machine table 4 can be provided with adjusting nut parts 22 rotatably with respect to the pedestal 21 that is arranged on such square tube 30 sides, can screw up the axial position adjustment of the up-down adjustment pipe 23 of side therein.Be provided with lower bracket 26 being filled with on the up-down adjustment pipe 23 of spring 24.For the never illustrated air pump supply compressed air of inner space of this lower bracket 26, the cover 27 forming from the sintering metal by Porous or pottery etc. blows out compressed air upward.This is the structure for being avoided following situation: by from cover 27 blow out air and and workpiece W between form the air layer that air brings, make scum silica frost or spatter slag etc. to bite between workpiece W and lower bracket 26, workpiece W is damaged.

Attract hole (not shown) owing to being provided with in lower bracket (not shown), so by attracting hole to become negative pressure with suction device (not shown).Thereby, the assist gas of intensively being jetted on the place of incision of machined object W flow into machine table 40(with reference to Fig. 1 by the cutting portion of machined object W) attraction hole (not shown) in, so the fused mass such as the scum silica frost producing along with the cut-out of machined object W by flowing of such assist gas by from attracting hole (not shown) to being located at machine table 40(with reference to Fig. 1) suction tube (not shown) of side attracts to discharge.

Upper bracket 29 is the parts cylindraceous from top pushing by the cut-off parts of the machined object W of illuminated laser, by be fitted to channel member 28 interior week tubular upper member and form than the lower member of tubular of the large circle of upper member, in the part of the laser focusing of the inside of lower member, dispose nozzle 29a.On the front end of nozzle 29a, be formed with the peristome 29a1 of the diameter of 600 μ m, the focus S of the laser by peristome 29a1 is set to below 30 μ m.

Piezoelectricity stand 23 makes the focus S of laser change in the scope of the peristome 29a1 of the front end of nozzle 29a.Thus, even can by lens carrier 24 with respect to sleeve (upper bracket 29) mobile and form situation, also set the moving area of lens carrier 24 by piezo-activator 23b, so that laser moves in the scope of peristome 29a1 that is no more than nozzle 29a, so can prevent reliably that the burning of peristome of the front end of nozzle 29a is sticky.

By piezoelectricity stand 23, lens carrier 24 can with the orthogonal plane of the optical axis a of laser on move with micron unit with respect to sleeve 21, so change the range of exposures of laser in can the very narrow scope in the scope of the peristome 29a1 of the nozzle 29a of processing head 20 front end.Thus, can carry out high-precision processing, so can carry out the very small perforate processing of electronic component etc.In addition, in upper bracket 29 and lower face side machined object W sliding-contact, be provided with to the protruding circular-arc sliding part 29b of downside (Fig. 4 (a) downside).Such sliding part 29b is configured to, upper by making circular-arc face be connected to machining object W, easily on machining object W, slides and does not bring scar to machining object W.

Post parts 27 link a fixed part 23a of side stage frame 60 sides and cover stent 26, and be configured on four jiaos through hole 23b2 so that not with lens carrier 24 and see through hole 23b2 and interfere, so can make the parts (cover stent 26 of the processing head 20 of the lower side that forms piezoelectricity stand 23, be entrenched in the channel member 28 on this cover stent 26 and be entrenched in the upper bracket 29 on this channel member 28, hereinafter referred to as " the processing head component parts of lower side ") not to be bearing in to carry out the piezoelectricity stand 23 of small variations (movement) with respect to sleeve 21 but be bearing on the sleeve 21 not changing, and by utilizing remaining space, can realize the miniaturization of processing head 20.

,, if the processing head component parts of lower side is bearing on piezoelectricity stand 23, the processing head component parts that the piezo-activator 23b of piezoelectricity stand is not only lens carrier 24, lower side also moves with respect to sleeve 21.Thus, if the processing head component parts of lower side is bearing on piezoelectricity stand 23, the amount of the processing head component parts of the mass penalty lower side of the parts that move by piezo-activator 23b, so piezo-activator 23b maximizes.Thus, in order to reduce the quality of the parts that move by piezo-activator 23b, preferably make the processing head component parts of upper bracket 29(lower side) not to be bearing on lens carrier 24 but to be bearing on a side stage frame 60.

In the case of making the processing head component parts of lower side is bearing on a side stage frame 60, cover stent 26 and a parts that side stage frame 60 links (hereinafter referred to as " supporting parts ") are formed in the mode of the periphery of surrounding piezo-activator 23b.In the case, supporting has been maximized on its width (Fig. 4 (a) left and right directions) with parts and has been surrounded the amount of the periphery of piezo-activator 23b, and thereupon, processing head 20 is also in the upper maximization of width (Fig. 4 (a) left and right directions).

With respect to this, seeing through in the 23b2 of hole of lens carrier 24, become to have remaining space (not being used to the space of the configuration of lens carrier 24) at its quadrangle.Thus, be configured to four jiaos through hole 23b2 by supporting with parts (post parts 27), described for supporting parts (post parts 27) a fixed part 23a of side stage frame 60 sides and cover stent 26 are linked, can utilize the remaining space configuration post parts 27 that see through hole 23b2 of piezo-activator 23b.Thus, need to supporting parts be set in the mode of the periphery of encirclement piezo-activator 23b, so can realize the miniaturization of processing head 20.Thus, the in the situation that of processing processing head 20 self is moved, the end (keep fixture 41) of processing head 20 closer to machined object W can be made, the waste of material can be reduced.

In addition, owing to being provided with the 1st conical surface 27a on post parts 27, thus not only can prevent the interference of lens carrier 24 and post parts 27, owing to being provided with opposed the 2nd conical surface 27b with the 1st conical surface 27a, so can also prevent post parts 27 and the interference that sees through hole 23b2.

Then, get back to Fig. 1～Fig. 4, laser cutting (perforate) processing of the laser disconnecting device 1 that uses present embodiment is described.As shown in Figure 1, first, by machined object W(with reference to Fig. 2) remain on after machine table 40, based on predefined cut-out data, machine table 40 and processing head 20 are moved respectively in XY plane and in UV plane, thus by processing head 20 with respect to machined object W(with reference to Fig. 2) location.Then, rise by machine table 40, by machined object W by the upper bracket 29(of processing head 20 with reference to Fig. 3) and the lower bracket (not shown) of machine table 40 sandwich.

As shown in Figure 2 to 4, the laser of carrying via optical fiber 22 from processing head 20 becomes directional light as illustrated via not shown collimation lens and enters, and is irradiated onto on machined object W by the peristome 29a1 of nozzle 29a by the laser of collector lens 25 optically focused.By the heat input of laser, (perforate) processing is cut off in part and moment melting to machined object W.Now, the assist gas being ejected in processing head 20 with high pressure from assist gas path 28a flows to the lower space of lens cap 26a, by the peristome 29a1 throttling of nozzle 29a, intensively jets to the place of incision of machined object W.

According to above-mentioned laser disconnecting device 1, irradiate laser from processing head 20, cut-out (perforate) processing that machined object W is specified, but operate XY stand 50(with reference to Fig. 1 in cut-out (perforate) processing of larger shape), in the cut-out processing of narrower range, in UV plane, make processing head 20 with respect to sleeve 21 parallels by a side stage frame 60.And then, in the present embodiment, in very small perforate processing of electronic component etc. etc., by the change in location of the focus S of laser being processed by piezoelectricity stand 23.

By to piezo-activator 23b(piezoelectric element) electrode applied voltage bring compulsory exercise to carry out machining control, the 23b1 of movable stage portion moves with respect to sleeve 21, movement by the 23b1 of this movable stage portion with respect to sleeve 21, lens carrier 24(remains on the collector lens 25 on lens maintaining part 24a) with the orthogonal plane of optical axis a on move (variation).Thus, in the peristome 29a1 of nozzle 29a front end (in the scope of the circle of diameter 600 μ m), diameter is that the focus S below 30 μ m moves, and forms thus micro hole h.; by making the position of collector lens 25 move small quantity by piezo-activator 23b; the position of the focus S of the laser that machined object W is irradiated is moved, by machined object W melting, form thus the micro hole h of the circular isotactic setting shape less than the peristome 29a1 of nozzle 29a front end.

According to the laser disconnecting device 1 of present embodiment, only make lens carrier 24(collector lens 25 by the piezo-activator 23b by processing head 20) the mobile perforate processing of carrying out micro hole h, so can carry out the processing of high-speed, high precision.; compared with making processing head 20 integrated movings; in the situation that lens carrier 24 is moved; the quality of mobile parts is less; be not vulnerable to the impact of inertia force; so can carry out the processing of high-speed, high precision, and, do not have the wearing and tearing of processing head 20 and machined object W to be conducive to the processing of high-speed, high precision yet.And then, owing to using the piezo-activator 23b of comparison light weight in order to carry out small processing, so can make more lightweight of processing head 120, the processing that processing head 20 moves also can at a high speed and be carried out accurately.

On the other hand, in the laser cutting processing of the scope larger than the processing of micro hole h etc., carry out making XY stand 50(with reference to Fig. 1) stop after, make processing head 20 with respect to the machined object W that is fixed on machine table on 40 mobile operation in UV plane.In the case, due to optical fiber 22 have flexible, so can the deflection along with the movement of processing head 20, easily moving freely corresponding to processing head 20.

Here, the shape of micro hole h forms the direction of illumination variation of laser by collector lens 25 with respect to the displacement of laser, so in the case of being undertaken by computed numerical operation to the processing of the micro hole h of machined object W, need the center of collector lens 25 of computer identification and the center of actual collector lens 25 consistent in the scope of the precision specifying., need to be by Ear Mucosa Treated by He Ne Laser Irradiation at collector lens 25 center.

This be because, be irradiated onto from collector lens 25 center significantly the locational situation of deviation at laser, even if collector lens 25 carries out positive circular motion with respect to laser, the laser after being reflected by collector lens 25 is described not to be just to justify with respect to machined object W but oval (because the extent of refraction of collector lens 25 is more larger away from center).Because there is thus the undesirable condition of the precise decreasing of the shape of the micro hole h of processing.

With respect to this, in the present embodiment, by utilizing fixture maintaining part 24b and the centralizer 30 of lens carrier 24 described later, carry out the location of collector lens 25 with respect to optical fiber 22, so that laser is irradiated collector lens 25 center.Thus, guaranteed the precision of the shape of the micro hole h of processing.In addition, with reference to Fig. 8, collector lens 25 is narrated in the back with respect to the concrete method of the location of optical fiber 22.

Then,, with reference to Fig. 6, the detailed structure of the lens maintaining part 24a to lens carrier 24 and fixture maintaining part 24b describes.Fig. 6 (a) is the front view of lens carrier 24, and Fig. 6 (b) is the cutaway view of the lens carrier 24 of the VIb-VIb line of Fig. 6 (a).In Fig. 6 (b), a part for lens carrier 24 (lens maintaining part 24a and fixture maintaining part 24b) is amplified to diagram.

Lens maintaining part 24a is the part projecting to lower face side (Fig. 6 (b) downside) from the part of the intersection of the cross shape of lens carrier 24, is formed as having the general cylindrical shape shape of axle center L and inner diameter D 3.On the inner peripheral surface of lens maintaining part 24a, be formed with the embedded hole 24a1 of lens that keeps collector lens 25.

Fixture maintaining part 24b is the part projecting to upper surface side (Fig. 6 (b) upside) from the part of the intersection of the cross shape of lens carrier 24, is formed as the general cylindrical shape shape of axle center L.Fixture maintaining part 24b possess the maintenance face 24b1 being formed by inner circumferential surface, the periphery 24b2 being formed by the outer peripheral face of fixture maintaining part 24b, the fixture bearing surface 24b3 being formed by the end face between the maintenance face of being folded in 24b1 and periphery 24b2 and with keep orthogonal the touching to face 24b4 of face 24b1.

Maintenance face 24b1 has inner diameter D 4, by the snap-latch surface 33a(of centralizer 30 described later with reference to Fig. 7) keep.In addition, keep face 24b1 to there is the axle center L identical with the embedded hole 24a1 of lens.Thus, the center that keeps face 24b1 is with to remain on collector lens 25 center in the embedded hole 24a1 of lens consistent.In addition, fixture maintaining part 24b is owing to being formed as having the general cylindrical shape shape of axle center L, so keep the cross sectional shape with axle center L-orthogonal of face 24b1 to be formed as circular.

Periphery 24b2 is configured to the outer peripheral face of fixture maintaining part 24b, corresponding to " being formed on the maintenance face in periphery " claimed in claim 4., at the periphery 24b2 of fixture maintaining part 24b, corresponding to " maintenance face ", on the periphery 24b2 of fixture maintaining part 24b, interior all 33b(of embedded centralizer 30 described later are with reference to Fig. 7).

Fixture bearing surface 24b3 is that the support bearing surface 32c(of butt centralizer 30 described later is with reference to Fig. 7) position, be configured to the tabular surface continuous with keeping face 24b1 and periphery 24b2.In addition, fixture bearing surface 24b3 is made up of the orthogonal face of the axle center L direction with respect to fixture maintaining part 24b (Fig. 6 (b) above-below direction).

Then, with reference to Fig. 7, the structure of centralizer 30 is described.Fig. 7 (a) is the side view of centralizer 30, and Fig. 7 (b) represents centralizer 30 and the chimeric state of lens carrier 24, is to comprise the centralizer 30 of axle center L, L2 separately and the cutaway view of lens carrier 24.In addition, Fig. 7 (b) illustrates the telescoping part of centralizer 30 and lens carrier 24, and other parts are omitted.

As shown in Fig. 7 (a) and Fig. 7 (b), centralizer 30 is to keep the lens carrier 24 of collector lens 25 and chimeric optical fiber 22(with reference to Fig. 3 with deciding) sleeve 21(with reference to Fig. 3) the parts of relative position so that laser is irradiated to collector lens 25 center, possess and be formed as body cylindraceous portion 31, be formed as than the sleeve insertion portion 32 cylindraceous of the little circle of this body portion 31, be formed as than the support maintaining part 33 cylindraceous of the little circle of this sleeve insertion portion 32 and be attached at the handle portion 34 in body portion 31.

As shown in Figure 7 (a), body portion 31 is embedded in sleeve 21(with reference to Fig. 3 with the state in the gap of gapped cooperate degree) embedded hole 21a(with reference to Fig. 3) in position, what be formed as distolateral (Fig. 7 (a) downside) opening and have an axle center L2 has the roughly cylindric of the end, and its outer diameter D 5 is set as with the outer diameter D 1(of optical fiber 22 with reference to Fig. 4) roughly the same (D1 ≈ D5).

As shown in Figure 7 (a), sleeve insertion portion 32 is formed as the roughly cylindric of outer diameter D 6, and connect on the end of the open side (Fig. 7 (a) downside) in the end that is arranged on body portion 31, with be connected on the end of the opposition side, end (Fig. 7 downside) being arranged in body portion 31, possess support bearing surface 32c, described support bearing surface 32c is configured to the tabular surface of the ring-type orthogonal with axle center L2.In addition, sleeve insertion portion 32 has the axle center L2 identical with body portion 31.

As shown in Figure 7 (a), support maintaining part 33 is formed as the roughly cylindric of outer diameter D 7, and connect be arranged in the end of sleeve insertion portion 32, be connected on the end of a side opposition side (on the left of Fig. 7) that body portion 31 is set, possess be configured to outer peripheral face snap-latch surface 33a, be configured to interior all 33b of inner peripheral surface and be folded in snap-latch surface 33a and interior all 33b between end face 33c.In addition, support maintaining part 33 has the axle center L2 identical with body portion 31.In addition, support maintaining part 33 has the axle center L2 identical with body portion 31, be formed as roughly cylindric, so the snap-latch surface 33a being formed by the outer peripheral face of support maintaining part 33 be formed as circular with the orthogonal cross sectional shape of axle center L2.

As shown in Fig. 7 (a) and Fig. 7 (b), body portion 31 matched in clearance of centralizer 30 at the embedded hole 21a(of sleeve 21 with reference to Fig. 3) in, and support maintaining part 33 matched in clearance are in fixture maintaining part 24b, snap-latch surface 33a is kept face 24b1 and keeps, and embedded hole 21a center is consistent with collector lens 25 center thus.

In addition, the outer diameter D 7 of snap-latch surface 33a be set as than the inner diameter D 4(Fig. 6 (b) that keeps face 24b1 with reference to) size value (D7<D4) of little degree that can matched in clearance.Thus, support maintaining part 33 is embedded in fixture maintaining part 24b, and can keep by the snap-latch surface 33a of centralizer 30 the maintenance face 24b1 of lens carrier 24.

In addition, making the outer diameter D 7 of support maintaining part 33 is the size value (D7<D6) less than the outer diameter D of sleeve insertion portion 32 6, and the outer diameter D 6 that makes sleeve insertion portion 32 is the size value (D6<D5) less than the outer diameter D of body portion 31 5.In addition, body portion 31, sleeve insertion portion 32 and support maintaining part 33 form integratedly.

In addition, with the outer diameter D 7 of support maintaining part 33 and the amount of the difference in size of the outer diameter D 6 of sleeve insertion portion 32, on the end of sleeve insertion portion 32, form support bearing surface 32c, the internal diameter of support bearing surface 32c is identical with the outer diameter D 7 of support maintaining part 33, and the external diameter of support bearing surface 32c is identical with the outer diameter D 6 of sleeve insertion portion 32.Thus, if support maintaining part 33 is embedded in fixture maintaining part 24b, can make support bearing surface 32c be connected on fixture bearing surface 24b3.

Here, in the present embodiment, because the cross sectional shape of the snap-latch surface 33a of centralizer 30 is formed as circular, the cross sectional shape of the maintenance face 24b1 of lens carrier 24 is formed as circular, no matter so centralizer 30 circumferential towards which is towards, can both keep with the snap-latch surface 33a of centralizer 30 the maintenance face 24b1 of lens carrier 24.

; can pay no attention to centralizer 30 circumferential towards and centralizer 30 is inserted into be fixed on a side stage frame 60(with reference to Fig. 3) on sleeve 21(with reference to Fig. 3) embedded hole 21a in, keep the maintenance face 24b1 of lens carrier 24 with the snap-latch surface 33a of centralizer 30.

Therefore, make the support maintaining part 33 of centralizer 30 keep the maintenance face 24b1 of lens carrier 24 to become easily, can save the workload of lens carrier 24 to the installation of laser disconnecting device 1.As a result, can realize the raising of lens carrier 24 to the efficiency of the installation exercise of piezoelectricity stand 23.

In addition, fixture bearing surface 24b3 is configured to and is connected the face arranging with the maintenance face 24b1 of fixture maintaining part 24b, with respect to along embedded hole 21a(with reference to Fig. 3) the virtual plane that arranges to (Fig. 3 above-below direction) of extension setting party orthogonal, so be connected to by making to be inserted in the support bearing surface 32c of the centralizer 30 in embedded hole 21a on the fixture bearing surface 24b3 of fixture maintaining part 24b, centralizer 30 can be fixed with stable state with respect to lens carrier 24.

For example, in the situation that having made fixture bearing surface 24b3 abridged structure, centralizer 30 diminishes with the contact area of lens carrier 24, and generation centralizer 30 is not fixed on operator on lens carrier 24, in the situation that lens carrier 24 use centralizers 30 are kept and must keeps the undesirable condition of lens carrier 24.

With respect to this, in the present embodiment, on centralizer 30, be provided with fixture bearing surface 24b3, the support bearing surface 32c that makes to be inserted in the centralizer 30 in embedded hole 21a is connected to this fixture bearing surface 24b3 above, so operator can not keep centralizer 30, centralizer 30 is fixing with respect to lens carrier 24.Thus, in the time making centralizer 30 and lens carrier 24 chimeric, can save operator's workload and realize collector lens 25(with reference to Fig. 3) the raising of efficiency of installation exercise.

In addition, due to the gauge value (size value of Fig. 6 (b) above-below direction) of lens carrier 24 than embedded hole 21a(with reference to Fig. 3) depth dimensions value (size value of Fig. 3 above-below direction) little, so lens carrier 24 is difficult to fully to guarantee and the size value that the engages surplus (size value (size value of Fig. 7 (b) above-below direction) in the chimeric direction of fixture maintaining part 24b of centralizer 30.

In the case of the body portion 31 by making centralizer 30 is connected on the wall 21b of sleeve 21, centralizer 30 fixing (location) is arrived to sleeve 21(with reference to Fig. 3) on, by make lens carrier 24 with respect to the centralizer 30 that is fixed on sleeve on 21 upward (Fig. 7 (b) top) mobile, lens carrier 24 is fitted on centralizer 30.In the case, owing to being provided with gap between lens carrier 24 and centralizer 30, if so can not fully guarantee lens carrier 24 and the size value that engages surplus centralizer 30, in the time making lens carrier 24 chimeric to centralizer 30, lens carrier 24 easily tilts with respect to centralizer 30, and the undesirable condition of the installation accuracy decline of lens carrier 24 occurs.

With respect to this, in the present embodiment, be configured to, by making the body portion 31 of centralizer 30 be connected to sleeve 21(with reference to Fig. 3) wall 21b on, that centralizer 30 is unfixing with respect to sleeve 21, by making to be inserted in embedded hole 21a(with reference to Fig. 3) in the support bearing surface 32c of centralizer 30 to be connected to the fixture bearing surface 24b3 of lens carrier 24 upper, by lens carrier 24 fixing (location) to centralizer 30.Thus, by the support bearing surface 32c of centralizer 30 and the fixture bearing surface 24b3 butt of lens carrier 24 (gap between said lens support 24 and centralizer 30 is eliminated), can by with the fixture bearing surface 24b3 of axle center L-orthogonal and with the orthogonal support bearing surface 32c of axle center L2, reduce the inclination of lens carrier 24 with respect to centralizer 30.As a result, can realize the raising of the installation accuracy of lens carrier 24.

Handle portion 34 are operators by centralizer 30 to sleeve 21(with reference to Fig. 3) position that grips while inserting, possess the grip part 34a with the external diameter roughly the same with body portion 31.Thus, by the length of holding area (size value of Fig. 7 left and right directions) being set as to the approximately half of the length of body portion 31, in the case of material identical with body portion 31 use grip part 34a is formed, the weight balancing of centralizer 30 becomes well, can stably carry out embedded hole 21a(to sleeve 21 with reference to Fig. 3) insertion.The efficiency that thus, can realize the installation exercise of collector lens 25 improves.

Lens carrier 24 is upper owing to keeping face 24b1 to be formed on interior week of fixture maintaining part 24b, so be formed on compared with the situation of periphery of fixture maintaining part 24b with keeping face 24b1, can make the collector lens 25 remaining on lens maintaining part 24a maximize.

; the body portion 31 of centralizer 30 is owing to being formed as with optical fiber 22(with reference to Fig. 3) same shape (size of centralizer 30 is set as necessarily), so the snap-latch surface 33a of centralizer 30 chimeric the maintenance face 24b1 of fixture maintaining part 24b is set as to the certain size taking optical fiber 22 as benchmark.Here, owing to keeping face 24b1 to be formed on the interior week of fixture maintaining part 24b of lens carrier 24, so the snap-latch surface 33a of centralizer 30 was embedded within the interior week of fixture maintaining part 24b.On the other hand, in the case of keeping face 24b1 is formed in the periphery of fixture maintaining part 24b, the snap-latch surface 33a of centralizer 30 is embedded in outward in the periphery of fixture maintaining part 24b.

Thus, if the size of the snap-latch surface 33a of centralizer 30 is certain, situation and the maintenance face 24b1 that keeps face 24b1 to be formed on the interior week upper (the snap-latch surface 33a of centralizer 30 was embedded in the interior week of fixture maintaining part 24b) of fixture maintaining part 24b is formed on compared with the situation of (the snap-latch surface 33a of centralizer 30 is embedded in outward in the periphery of fixture maintaining part 24b) in the periphery of fixture maintaining part 24b, can make fixture maintaining part 24b maximize, so can the inner diameter D 4 that keep face 24b1 be set greatlyr.Thereby the embedded hole 24a1 of lens also can maximize, so can make the collector lens 25 being embedded in the embedded hole 24a1 of lens also maximize.

Finally, with reference to Fig. 8, to the lens carrier 24 of accommodating collector lens 25 is described the order of laser disconnecting device 1 dismounting.Fig. 8 (a) is the phantom that represents the processing head 20 of the state that lens carrier 24 is installed, and Fig. 8 (b) is the phantom that has represented to pull down the processing head 20 of the state of lens carrier 24.In addition, Fig. 8 (c) is the phantom that is illustrated in the processing head 20 of the state of chimeric lens carrier 24 on the centralizer 30 being inserted in sleeve 21, and Fig. 8 (d) is the phantom that represents to be installed with the processing head 20 of the state of the lens carrier 24 of pulling down.

First, shown in Fig. 8 (a), if by laser disconnecting device 1(with reference to Fig. 1) power switch drop into, piezoelectricity stand 23 moves to origin position (making optical fiber 22 position consistent with collector lens 25 center).Move at piezoelectricity stand 23 under the state of origin position, optical fiber 22 is extracted from the embedded hole 21a of sleeve 21, the processing head component parts of lower side is pulled down from piezoelectricity stand 23.In addition, lens carrier 24 is pulled down from piezoelectricity stand 23.As a result, processing head 20 becomes the state shown in Fig. 8 (b).

Then, in the processing head 20 of the state shown in Fig. 8 (b), the collector lens 25 after safeguarding is accommodated in lens carrier 24, the lens carrier 24 use bolt B 2 of accommodating the collector lens 25 of having safeguarded are temporarily anchored on piezoelectricity stand 23.And, in the embedded hole 21a of sleeve 21, insert centralizer 30, by support maintaining part 33(with reference to Fig. 7) the fixture maintaining part 24b(that is fitted to lens carrier 24 is with reference to Fig. 6 (b)) in.

Then, keep centralizer 30 to be inserted in the state in sleeve 21, lens carrier 24 is formally fastened on piezoelectricity stand 23.As a result, processing head 20 becomes the state shown in Fig. 8 (c).Thus, lens carrier 24 determines the installation site of sleeve 21, result, and collector lens 25 determines the installation site of optical fiber 22.

Then, in the processing head 20 of the state shown in Fig. 8 (c), centralizer 30 is extracted from sleeve 21, optical fiber 22 is inserted to sleeve 21.And, the processing head component parts of lower side is installed on piezoelectricity stand 23.As a result, processing head 20 becomes the state shown in Fig. 8 (d), and the installation exercise of collector lens 25 completes.

In the present embodiment, as shown in Figure 6 to 8, the outer diameter D 1(of optical fiber 22 is with reference to Fig. 2) and the outer diameter D 5(of centralizer 30 with reference to Fig. 4) be set to roughly the same, so can, by inserting the hole dual-purpose that inserts optical fiber 22 for hole of centralizer 30, optical fiber 22 dismounting can be inserted in embedded hole 21a freely.For example, in the case of by being used for inserting the hole and the other setting of embedded hole 21a of centralizer 30, spend the workload to multiple part machining holes for this hole is set, have the surging undesirable condition of manufacturing cost of laser disconnecting device 1.

With respect to this, in the present embodiment, in the embedded hole 21a of optical fiber 22, insert centralizer 30 and position inserting., the hole dual-purpose that inserts optical fiber 22 for hole of centralizer 30 will be inserted.Therefore, can not need the special hole for inserting centralizer 30.Thus, can omit the workload of hole processing and realize the reduction of the manufacturing cost of laser disconnecting device 1.

In addition, in the case of being provided with in addition the hole for inserting centralizer 30 with embedded hole 21a, need to be used for arranging the position in hole, for this position is set, multiple parts maximize, and have the undesirable condition of the maximization that causes laser disconnecting device 1.

With respect to this, in the present embodiment, as described above, the hole dual-purpose that inserts optical fiber 22 for hole of centralizer 30 will be inserted.Therefore, do not need the hole for inserting centralizer 30, can omit the position for arranging this hole.Thus, can realize the miniaturization of laser disconnecting device 1.

In addition, in the case of being provided with in addition the hole for inserting centralizer 30 with embedded hole 21a, because there is the deviation of the mismachining tolerance amount in the hole of centralizer 30 use the position of centralizer 30 with respect to embedded hole 21a, so there is the undesirable condition that collector lens 25 declines for the installation accuracy of embedded hole 21a.

With respect to this, in the present embodiment, carry out the location of collector lens 25 with respect to optical fiber 22 owing to inserting centralizer 30 in the embedded hole 21a that inserts optical fiber 22, so centralizer 30 and optical fiber 22 can be arranged with identical benchmark.Thus, lens carrier 24 is improved, so can realize the raising of collector lens 25 for the assembly precision of optical fiber 22 to the assembly precision of embedded hole 21a.

In addition, the laser disconnecting device 1 of present embodiment possesses fixture maintaining part 24b, and described fixture maintaining part 24b is formed with maintenance face 24b1 on interior week, and described maintenance face 24b1 has the cross sectional shape concentric with the cross sectional shape of the embedded hole 24a1 of lens.Thus, be inserted in the maintenance face 24b1 on the interior week that centralizer in embedded hole 21a 30 keeps the fixture maintaining part 24b that is formed on lens carrier 24 by use, can make the position consistency of the embedded hole 24a1 of embedded hole 21a and lens.

For example, in the case of being used for inserting the hole of centralizer 30 and the embedded hole 24a1 of lens be additionally located on lens carrier 24, due to hole with respect to the position deviation of the embedded hole 24a1 of lens the amount of mismachining tolerance in this hole, so there is the undesirable condition that collector lens 25 declines for the installation accuracy of embedded hole 21a.

With respect to this, in the present embodiment, due to by with the embedded hole 24a1(of lens of embedded collector lens 25 with reference to Fig. 3) concentric fixture maintaining part 24b(is with reference to Fig. 3) keep positioning with centralizer 30, so corresponding to making machining benchmark identical with one heart.

Thus, can reduce the mismachining tolerance of fixture maintaining part 24b with respect to the embedded hole 24a1 of lens.As a result, lens carrier 24 is improved for the assembly precision of embedded hole 21a, can realize the raising of collector lens 25 for the assembly precision of optical fiber 22.

As described above, the position that makes piezoelectricity stand 23 move to regulation with respect to a side stage frame 60 (is defined as the position of the position consistency of optical fiber 22 and collector lens 25, origin position), on the piezoelectricity stand 23 that has moved to this origin position place when mounted lens support 24, the centralizer 30 that makes to insert in the embedded hole 21a of sleeve 21 is fitted on the fixture maintaining part 24b of lens carrier 24, thus, can determine uniquely that lens maintaining part 24a is with respect to sleeve 21(embedded hole 21a) position.

; by centralizer 30 is fitted on the fixture maintaining part 24b of lens carrier 24; can make embedded hole 21a center consistent with the axle center L of lens maintaining part 24a, so can determine uniquely that lens maintaining part 24a is with respect to sleeve 21(embedded hole 21a) position.Thus, by utilizing the chimerism of centralizer 30 and the fixture maintaining part 24b of lens carrier 24, can be at the embedded hole 21a center that makes sleeve 21 (optical axis of optical fiber 22 a) under the state consistent with the axle center L of lens maintaining part 24a on piezoelectricity stand 23 mounted lens support 24.

Thereby, can not confirm that laser is installed to lens carrier 24 on piezoelectricity stand 23 to the irradiation position of machined object W, and can eliminate the deviation of the installation accuracy because bringing in the adjustment operation of confirming to carry out after this irradiation position.As a result, can save collector lens 25(lens carrier 24) installation workload and realize the raising of the efficiency of the installation exercise of collector lens 25, and the installation accuracy of collector lens 25 is become necessarily.

By the 1st conical surface 27a and the 2nd conical surface 27b, in the time that the gap of post parts 27 on to four jiaos that are formed on through hole 23b2 inserted, can prevent the interference that sees through hole 23b2 of post parts 27 and lens carrier, and, in the time making centralizer 30 chimeric to the maintenance face 24b1 of fixture maintaining part 24b, can also prevent the interference of centralizer 30 and post parts 27.Thereby, can improve and make the operation that post parts 27 insert to the gap on four jiaos that are formed on through hole 23b2 and make the workability of centralizer 30 to the chimeric operation of the maintenance face 24b1 of fixture maintaining part 24b.

Above, based on embodiment, the present invention has been described, but the present invention is not subject to any restriction of above-mentioned embodiment, can easily infers and can carry out without departing from the spirit and scope of the invention various improvement distortion.

For example, the numerical value (for example, quantity and the size etc. of each structure) of enumerating in the above-described embodiment represents an example certainly can adopt other numerical value.

In addition, illustrated that being used for making the mechanism of lens carrier 24 small variations of accommodating collector lens 25 is situations of piezo-activator 23b, but said mechanism is not limited to piezo-activator 23b, can be also other movable agencies, for example, can be also voice coil loudspeaker voice coil.

In the above-described embodiment, in the peristome 29a1 of nozzle 29a front end, the focus S of laser is moved, but be not have, the end sealing parts 110 of nozzle 29a, also can in its peristome, make the focus S of laser move like that in past case as shown in Figure 9.

In addition, in the above-described embodiment, by remain on collector lens 25 on lens carrier 24 with the enterprising line position adjustment of optical axis a orthogonal direction of laser, but its position adjustment is not limited to the optical axis a orthogonal direction with laser, also can the enterprising line position adjustment in the direction parallel with the optical axis a of laser.

In addition, can be respectively make processing head 20, make collector lens 25 move (variation) by piezoelectricity stand 23 to form by a side stage frame 60, but can be also one party only.Can be, also processing head 20 is moved but do not make situation that collector lens 25 moves or obstructed excessive side stage frame 60 that processing head 20 is moved by piezo stage frame 23 but the situation that collector lens 25 moved by piezoelectricity stand 23 by a side stage frame 60.Thus, can make simplifying the structure of laser disconnecting device 1.

And then, in the above-described embodiment, illustrate by the snap-latch surface 33a of support maintaining part 33 being remained on as the situation that maintenance face 24b1 is upper, centralizer 30 keeps lens carrier 24 of the inner peripheral surface of fixture maintaining part 24b, but might not be defined in this, also support maintaining part 33 can be configured to and be arranged with the groove arranging in the sleeve insertion portion 32 of centralizer 30, with circular extension.In the case, support maintaining part 33 can keep both of face 24b1 and periphery 24b2.Thus, centralizer 30 can stably keep lens carrier 24.

In the above-described embodiment, illustrated support maintaining part 33 and sleeve insertion portion 32 be configured to have identical axle center general cylindrical shape shape, the outer diameter D of support maintaining part 33 7 is set as to the situation of the size value less than the outer diameter D of sleeve insertion portion 32 6, but might not be defined in this, for example also the snap-latch surface 33a of support maintaining part 33 can be configured to from sleeve insertion portion 32 away from the side of the frustum of a cone that diminishes of direction.

In the case, centralizer 30 can keep fixture maintaining part 24b(matched in clearance to have for chimeric some gaps under the state in gap radially that there is no fixture maintaining part 24b and support maintaining part 33).Thus, in the time that being kept, lens carrier 24 use centralizers 30 there is not gap between fixture maintaining part 24b and support maintaining part 33, so can correspondingly reduce the deviation of lens carrier 24 with respect to the installation of embedded hole 21a.As a result, lens carrier 24 is improved for the assembly precision of embedded hole 21a, can realize the raising of collector lens 25 for the assembly precision of optical fiber 22.

,, as long as the combination of the shape in gap radially does not occur in the time that lens carrier 24 use centralizers 30 are kept between fixture maintaining part 24b and support maintaining part 33, just can realize the raising of collector lens 25 for the assembly precision of optical fiber 22.As long as the face of fixture maintaining part 24b and support maintaining part 33 butts both or become the side view of the frustum of a cone and the axle center of these frustums of a cone is consistent passable once square.

In addition, the maintenance face 24b1 that fixture maintaining part 24b has been described remains on the situation on the snap-latch surface 33a of support maintaining part 33, but might not be defined in this, also can be configured to, by interior all 33b of centralizer 30 being set as to the diameter with respect to the large matched in clearance amount of periphery 24b2 of fixture maintaining part 24b, the periphery 24b2 of fixture maintaining part 24b is kept to just passable by interior all 33b of centralizer 30.

In the case, by be formed as keeping the shape (interior all 33b of centralizer 30 are set as the shape with respect to the diameter of the large matched in clearance amount of periphery 24b2) of the body portion 31 of centralizer 30 on the periphery 24b2 of fixture maintaining part 24b, periphery 24b2 is kept by interior all 33b of centralizer 30.

In the case of the periphery 24b2 of fixture maintaining part 24b is kept by interior all 33b of centralizer 30, even if being in contact with one another, support maintaining part 33 and fixture maintaining part 24b there is wear extent, due to the outer peripheral face side generation abrasion loss at fixture maintaining part 24b, so also can wear prevention amount be attached on the collector lens 25 of the inner peripheral surface side that is disposed in fixture maintaining part 24b.

In the above-described embodiment, illustrate that collector lens 25 is configured to the situation of convex lens, but might not be defined in this, also can be configured to the set of lenses of multiple lens combinations.

In the case, by the shape of lens carrier 24 is changed to the shape corresponding with the shape of set of lenses, can keep set of lenses.In addition,, by the shape of centralizer 30 being made to the shape that can be fitted on lens carrier 24, can carry out the location of lens carrier 24 with respect to sleeve 21.

In the above-described embodiment, be configured to, by making to be inserted in embedded hole 21a(with reference to Fig. 3) in the support bearing surface 32c of centralizer 30 be connected on the fixture bearing surface 24b3 of lens carrier 24, lens carrier 24 is fixed to (location) with respect to centralizer 30, but also can be configured to, upper by making the end face 33c of centralizer 30 be connected to touching to face 24b4 of lens carrier 24, lens carrier 24 is fixed to (location) with respect to centralizer 30.

Due to the end face 33c butt of the inserting side of centralizer 30 touch to face 24b4 with keep face 24b1 orthogonal, so the end face 33c of the inserting side by making centralizer 30 is connected to touching on face 24b4 of fixture maintaining part 24b, the inclination of lens carrier 24 with respect to centralizer 30 can be reduced, the raising of the installation accuracy of lens carrier 24 can be realized.In addition, in the case of make the end face 33c of inserting side of centralizer 30 be connected to fixture maintaining part 24b touch on face 24b4, preferably between the support bearing surface 32c of centralizer 30 and the fixture bearing surface 24b3 of lens carrier 24, set gap.By this gap, can absorb the dimensional tolerance of centralizer 30 and lens carrier 24, so can realize the raising of the installation accuracy of lens carrier 24.Thus, the raising of the installation accuracy of scioptics support 24, do not need the adjustment of centralizer 30 with respect to the installation accuracy of lens carrier 24, thus can realize the installation exercise of lens carrier 24 efficiency raising and the positional precision of collector lens 25 is become necessarily.

Description of reference numerals

1 laser disconnecting device (laser machine)

2 support units

4 the 1st straight dynamic bearings (part for a movable agency)

5 the 1st parts (part for a movable agency)

6 the 1st driving mechanisms (part for a movable agency)

9 the 2nd straight dynamic bearings (part for a movable agency)

10 the 2nd parts (part for a movable agency)

11 the 2nd driving mechanisms (part for a movable agency)

20 processing heads

21 sleeves

21a embedded hole

22 optical fiber

23 piezoelectricity stands (lens movable agency)

23a fixed part (part for lens movable agency)

23b piezo-activator (part for lens movable agency)

23b2 sees through hole

24 lens carriers

24a lens maintaining part

The embedded hole of 24a1 lens

24b fixture maintaining part

24b1 keeps face

24b2 periphery (being formed on the maintenance face in periphery)

24b4 touches to face

25 collector lenses

29 post parts

29a nozzle

29a1 peristome

30 centralizers

40 machine table

60 side stage framves (movable agency)

W machined object

A optical axis

S focus.

Claims (7)

1. a laser machine, possess processing head and machine table, described processing head has the nozzle that makes the collector lens of laser focusing and spray assist gas to the illuminated portion of the above-mentioned laser for machined object, described machine table is disposed in the below of this processing head and keeps above-mentioned machined object, laser by after above-mentioned collector lens optically focused is irradiated above-mentioned machined object and processed from the peristome of the spray nozzle front end of above-mentioned processing head, it is characterized in that

Possess:

Support unit;

Movable agency, is folded between this support unit and above-mentioned processing head, make above-mentioned processing head with respect to above-mentioned support unit with the plane of the light shaft positive cross of above-mentioned laser on move;

By by above-mentioned movable agency, above-mentioned processing head is moved in above-mentioned plane with respect to above-mentioned machined object, above-mentioned machined object is processed.

2. laser machine as claimed in claim 1, is characterized in that,

Above-mentioned processing head possesses:

Optical fiber, transmits above-mentioned laser;

Sleeve, has the embedded hole of chimeric this optical fiber, is hung and holds by above-mentioned movable agency;

Lens movable agency, hangs and is held on this sleeve, make above-mentioned collector lens with respect to above-mentioned sleeve with the plane of the light shaft positive cross of above-mentioned laser on move;

Change in the scope of the peristome of the spray nozzle front end of above-mentioned processing head by the focus that is made above-mentioned laser by said lens movable agency, above-mentioned machined object is processed.

3. laser machine as claimed in claim 2, is characterized in that,

Said lens movable agency possesses opening and is formed on the hole that sees through on central portion;

Above-mentioned processing head possesses:

Said lens support, has the lens maintaining part of accommodating above-mentioned collector lens, with and the above-mentioned state that forms gap between hole that sees through be arranged on said lens movable agency, and can move and form with respect to above-mentioned sleeve by said lens movable agency;

Post parts, make by said lens movable agency said lens support with respect to above-mentioned sleeve in the case of with the plane of the light shaft positive cross of above-mentioned laser on mobile, insert in above-mentioned gap, to do not interfere with said lens support;

By above-mentioned post parts, the parts of the lower side in the parts of the above-mentioned processing head of formation are supported with respect to above-mentioned sleeve.

4. laser machine as claimed in claim 2, is characterized in that,

Above-mentioned processing head possesses lens carrier, and described lens carrier dismounting is arranged on said lens movable agency freely, and accommodates the collector lens that can move with respect to above-mentioned sleeve by said lens movable agency;

Said lens support possesses:

The embedded hole of lens, is configured to the through hole of embedded above-mentioned collector lens;

Fixture maintaining part forms maintenance face in interior week or periphery, and described maintenance mask has the cross sectional shape concentric with the cross sectional shape in this embedded hole of lens;

Above-mentioned optical fiber dismounting is entrenched in the embedded hole of above-mentioned sleeve freely, by above-mentioned optical fiber being pulled down, will be installed to above-mentioned embedded hole with the centralizer of this above-mentioned optical fiber similar shape of pulling down from above-mentioned embedded hole, above-mentioned maintenance face is remained on above-mentioned centralizer, said lens support is located with respect to above-mentioned sleeve.

5. laser machine as claimed in claim 2, is characterized in that,

Above-mentioned processing head possesses:

See through hole, opening is formed on the central portion of said lens movable agency;

Said lens support, there is the lens maintaining part of accommodating above-mentioned collector lens, with and above-mentioned seeing through form gapped state dismounting between hole and be arranged on freely on said lens movable agency, and can move and form with respect to above-mentioned sleeve by said lens movable agency;

Post parts, make by said lens movable agency said lens support with respect to above-mentioned sleeve in the case of with the plane of the light shaft positive cross of above-mentioned laser on mobile, insert in above-mentioned gap, to do not interfere with said lens support;

By above-mentioned post parts, the parts of the lower side in the parts of the above-mentioned processing head of formation are supported with respect to above-mentioned sleeve;

Said lens support possesses:

The embedded hole of lens, is configured to the through hole of embedded above-mentioned collector lens;

Fixture maintaining part forms maintenance face in interior week or periphery, and described maintenance mask has the cross sectional shape concentric with the cross sectional shape in this embedded hole of lens;

Above-mentioned optical fiber dismounting is entrenched in the embedded hole of above-mentioned sleeve freely, by optical fiber being pulled down, will be installed to above-mentioned embedded hole with the centralizer of this above-mentioned optical fiber similar shape of pulling down from above-mentioned embedded hole, above-mentioned maintenance face is remained on above-mentioned centralizer, said lens support is located with respect to above-mentioned sleeve.

6. the laser machine as described in claim 4 or 5, is characterized in that,

Above-mentioned maintenance face was formed on the interior week of above-mentioned fixture maintaining part.

7. the laser machine as described in claim 4 or 5, is characterized in that,

Above-mentioned fixture maintaining part have the inserting side of above-mentioned centralizer end face butt, with orthogonal the touching to face of above-mentioned maintenance face.