CN104163577B - ITO electro-conductive glass and preparation method thereof - Google Patents
ITO electro-conductive glass and preparation method thereof Download PDFInfo
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- CN104163577B CN104163577B CN201410386196.2A CN201410386196A CN104163577B CN 104163577 B CN104163577 B CN 104163577B CN 201410386196 A CN201410386196 A CN 201410386196A CN 104163577 B CN104163577 B CN 104163577B
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Abstract
The invention discloses a kind of reflectance between 27%～55%, the ITO electro-conductive glass self with half-reflection and half-transmission performance, including the glass stacked gradually, the first low-index layer, the first high refractive index layer, the second low-index layer, the second high refractive index layer, the 3rd low-refraction and ITO layer；The material of the first low-index layer is SiO2Or MgF2；The material of the first high refractive index layer is Nb2O5、TiO2、ZrO2Or Si3N4；The material of the second low-index layer is SiO2Or MgF2；The material of the second high refractive index layer is Nb2O5、TiO2、ZrO2Or Si3N4；The material of the 3rd low-index layer is SiO2Or MgF2.The film layer structure that this ITO electro-conductive glass is combined by refractive index height, ITO electro-conductive glass is made self to have the performance of half-reflection and half-transmission, when as touch controllable function sheet or vehicle-mounted inside rear-view mirror, it is not necessary to extra stickup half-reflection and half-transmission blooming, visual effect is preferable in use.The invention also discloses the preparation method of above-mentioned ITO electro-conductive glass.
Description
Technical field
The present invention relates to a kind of ITO electro-conductive glass self possessing half-reflection and half-transmission performance and preparation method thereof.
Background technology
ITO electro-conductive glass is on the basis of sodium calcio sheet or silicon boryl sheet glass, the method utilizing magnetron sputtering
It is sequentially depositing silicon dioxide (SiO2) and tin indium oxide (common name ITO) processing film be fabricated to.
ITO is a kind of metallic compound with good clear electric conductivity, has forbidden band width, visible range
The characteristics such as light transmission height is low with resistivity, ITO electro-conductive glass is widely used in flat-panel display device, the sun
Can battery, specific function window coating and other field of photoelectric devices, be current LCD, PDP, OLED,
The transparency conductive electrode material that the various types of flat panel display devices such as touch screen are widely used.As flat-panel display device
Key foundation material, ITO electro-conductive glass its have more along with continuous renewal and the upgrading of flat-panel display device
Add the wide market space.
The intelligent touch electronic products such as existing panel computer, touch-screen mobile phone, some needs to paste at product surface
Half-reflection and half-transmission blooming, to realize the optical property of half-reflection and half-transmission, can when the product such as mobile phone, flat board is standby
To play mirror reflection effect, can serve as mirror for arranging dressing or combing hair.
When ITO electro-conductive glass is as touch controllable function sheet, generally require at surface mount half-reflection and half-transmission blooming, with
Obtain the optical property of half-reflection and half-transmission.Traditional half-reflection and half-transmission blooming is to be plated on PET flexible parent metal to paste again
To mobile phone, panel computer surface, and there is certain light and absorb in PET film layer, and mobile phone, panel computer use
Time need that backlight is brighter just can be operated, visual effect is poor.
The vehicle-mounted inside rear-view mirror also having partial automobile has half-reflection and half-transmission function, and rearview mirror upper part region is reserved
The window of the information such as display direction, time, weather, thus i.e. can with clear view to traffic conditions below,
When rearview mirror reflects and not all high light is anti-for the light that when avoiding vehicle hypermetropia lamp below to open, irradiation comes
Penetrate, but partially reflective, part passes through, thus enters interference department in driver's eyes when avoiding emergency light reflex
Machine normal driving；Simultaneously can be with information such as display direction, time or weather.At present this have concurrently half-reflection and half-transmission and
The rearview mirror way of display function is patch half-reflection and half-transmission blooming on display module, while realizing display
Reach half-reflection and half-transmission effect.
Summary of the invention
Based on this, it is necessary to provide a kind of resistance between 30～120 ohm, use time visual effect preferably,
ITO electro-conductive glass that may be used for capacitance plate or vehicular rear mirror, that self possess half-reflection and half-transmission performance etc. and
Its preparation method.
A kind of ITO electro-conductive glass, including the glass stacked gradually, the first low-index layer, the first high refraction
Rate layer, the second low-index layer, the second high refractive index layer and ITO layer；
The material of described first low-index layer is SiO2Or MgF2；
The material of described first high refractive index layer is Nb2O5、TiO2、ZrO2Or Si3N4；
The material of described second low-index layer is SiO2Or MgF2；
The material of described second high refractive index layer is Nb2O5、TiO2、ZrO2Or Si3N4；
The material of described 3rd low-index layer is SiO2Or MgF2；
The thickness of described first low-index layer is
The thickness of described first high refractive index layer is
The thickness of described second low-index layer is
The thickness of described second high refractive index layer is
The thickness of described 3rd low-index layer is
In one embodiment, the thickness of described first low-index layer is
In one embodiment, the thickness of described first high refractive index layer is
In one embodiment, the thickness of described second low-index layer is
In one embodiment, the thickness of described second high refractive index layer is
In one embodiment, the thickness of described 3rd high refractive index layer is
In one embodiment, the thickness of described ITO layer is
The preparation method of a kind of ITO electro-conductive glass, comprises the steps:
Glass is provided, is dried after cleaning；
Magnetron sputtering deposition the first low-index layer successively of described glass surface after cleaning, the first high refraction
Rate layer, the second low-index layer, the second high refractive index layer, the 3rd low-index layer and ITO layer, obtain institute
Stating ITO electro-conductive glass, wherein, the material of described first low-index layer is SiO2Or MgF2, described
The material of one high refractive index layer is Nb2O5、TiO2、ZrO2Or Si3N4, the material of described second low-index layer
Material is SiO2Or MgF2, the material of described second high refractive index layer is Nb2O5、TiO2、ZrO2Or Si3N4,
The material of described 3rd low-index layer is SiO2Or MgF2, the thickness of described first low-index layer isThe thickness of described first high refractive index layer isDescribed second low-index layer
Thickness isThe thickness of described second high refractive index layer isDescribed 3rd low refraction
The thickness of rate layer is
In one embodiment, the thickness of described first low-index layer isDescribed first high folding
The thickness penetrating rate layer isThe thickness of described second low-index layer isDescribed
The thickness of the second high refractive index layer isThe thickness of described 3rd high refractive index layer is
In one embodiment, the thickness of described ITO layer is
This ITO electro-conductive glass, including the first low-index layer, the first high refractive index layer, the second low refraction
Rate layer, the second high refractive index layer and the 3rd low-index layer, the film layer of the suitable thickness that refractive index height combines
Structure so that ITO electro-conductive glass self has the performance of half-reflection and half-transmission, touching as intelligent and portable equipment
When control functional sheet or vehicular rear mirror, it is not necessary to extra stickup half-reflection and half-transmission blooming, touch relative to traditional
Control functional sheet, it is to avoid the light of PET film layer absorbs, visual effect is preferable in use, simultaneously durability,
The aspects such as rub resistance have more advantage.
Concrete, this ITO electro-conductive glass is applied to mobile phone, panel computer, vehicular rear mirror or other side
On face.Be used in mobile phone time on mobile phone, panel computer, panel computer standby time can be as mirror use, and point
Time bright, mobile phone, panel computer just can be operated by backlight without the brightest；As vehicular rear mirror then
I.e. can irradiate the high light come by the high beam of vehicle after partially reflective, Journalistic, it is to avoid too strong is anti-
Penetrate luminous reflectance to enter the eyes of driver and affect driving, simultaneously can also display direction, time, the letter of weather
Breath.
Accompanying drawing explanation
Fig. 1 is the structural representation of the ITO electro-conductive glass of an embodiment；
Fig. 2 is the flow chart of the preparation method of ITO electro-conductive glass as shown in Figure 1.
Detailed description of the invention
Understandable for enabling the above-mentioned purpose of the present invention, feature and advantage to become apparent from, the most right
The detailed description of the invention of the present invention is described in detail.Elaborate in the following description a lot of detail with
It is easy to fully understand the present invention.But the present invention can come real to be a lot different from alternate manner described here
Executing, those skilled in the art can do similar improvement in the case of intension of the present invention, therefore this
Bright do not limited by following public being embodied as.
An embodiment ITO electro-conductive glass as shown in Figure 1 is low including the glass 10, first stacked gradually
Index layer the 20, first high refractive index layer the 30, second low-index layer the 40, second high refractive index layer 50,
3rd low-index layer 60 and ITO layer 70.
Glass 10 can select float glass or the glass of other this areas routine.
The material of the first low-index layer 20 is SiO2Or MgF2。SiO2Refractive index be 1.48, MgF2
Refractive index be 1.38.Use SiO2Or MgF2Material as the first low-index layer 20 so that first
The refractive index of low-index layer 20 is of a relatively high.
The thickness of the first low-index layer 20 isIt is said that in general, when to half-reflection and half-transmission conducting film
When color is less demanding, the thickness of the first low-index layer 20 can be 0, i.e. a special embodiment party
In formula, the thickness of the first low-index layer 20 can be 0, say, that the first low-index layer 20 is permissible
Omit.
In one preferably embodiment, the thickness of the first low-index layer 20 is
The material of the first high refractive index layer 30 is Nb2O5、TiO2、ZrO2Or Si3N4。Nb2O5Refractive index
It is 2.3, TiO2Refractive index be 2.3, ZrO2Refractive index be 2.17, Si3N4Refractive index be 2.0.Adopt
Use Nb2O5、TiO2、ZrO2Or Si3N4Material as the first high refractive index layer 30 so that the first high folding
The refractive index penetrating rate layer 30 is relatively low.
The thickness of the first high refractive index layer 30 can beWhen the color to half-reflection and half-transmission conducting film
Time less demanding, the thickness of the first high refractive index layer 30 can be 0, say, that a special reality
Executing in mode, the first high refractive index layer 30 can omit.
In one preferably embodiment, the thickness of the first high refractive index layer 30 can be
The material of the second low-index layer 40 is SiO2Or MgF2。SiO2Refractive index be 1.48, MgF2
Refractive index be 1.38.Use SiO2Or MgF2Material as the second low-index layer 40 so that second
The refractive index of low-index layer 40 is of a relatively high.
The thickness of the second low-index layer 40 isIn a special embodiment, second
The thickness of low-index layer 40 can be 0, say, that the second low-index layer 40 can omit.
In one preferably embodiment, the thickness of the second low-index layer 40 can be
The material of the second high refractive index layer 50 is Nb2O5、TiO2、ZrO2Or Si3N4。Nb2O5Refractive index
It is 2.3, TiO2Refractive index be 2.3, ZrO2Refractive index be 2.17, Si3N4Refractive index be 2.0.Adopt
Use Nb2O5、TiO2、ZrO2Or Si3N4Material as the second high refractive index layer 50 so that the second high folding
The refractive index penetrating rate layer 50 is relatively low.
The thickness of the second high refractive index layer 50 is
In one preferably embodiment, the thickness of the second high refractive index layer 50 can be
The thickness of the 3rd low-index layer 60 isIn a special embodiment, the 3rd
The thickness of low-index layer 60 can be 0, say, that the 3rd low-index layer 60 can omit.
In one preferably embodiment, the thickness of the 3rd low-index layer 60 can be
In present embodiment, the thickness of ITO layer 70 is
This ITO electro-conductive glass is low including first low-index layer the 20, first high refractive index layer 30, second
Index layer the 40, second high refractive index layer 50 and the 3rd low-index layer 60, the conjunction that refractive index height combines
The film layer structure of suitable thickness so that ITO electro-conductive glass self has the performance of half-reflection and half-transmission, as touch-control
During functional sheet, it is not necessary to extra stickup half-reflection and half-transmission blooming, relative to traditional touch controllable function sheet, it is to avoid
The light of PET film layer absorbs, and visual effect is preferable in use, simultaneously in the side such as durability, rub resistance
Face has more advantage.
Concrete, this ITO electro-conductive glass is applied to mobile phone, panel computer, vehicular rear mirror or other side
On face.Be used in mobile phone time on mobile phone, panel computer, panel computer standby time can be as mirror use, and point
Time bright, mobile phone, panel computer just can be operated by backlight without the brightest；As vehicular rear mirror then
I.e. can irradiate the high light come by the high beam of vehicle after partially reflective, Journalistic, it is to avoid too strong is anti-
Penetrate luminous reflectance to enter the eyes of driver and affect driving, simultaneously can also display direction, time, the letter of weather
Breath.
The preparation method of above-mentioned ITO electro-conductive glass as shown in Figure 2, comprises the steps:
S10, offer glass 10, be dried after cleaning.
Glass 10 can select float glass or the glass of other this areas routine.
S20, glass 10 surface magnetron sputtering deposition the first low-index layer 20, first successively after cleaning
High refractive index layer the 30, second low-index layer the 40, second high refractive index layer the 50, the 3rd low-index layer 60
With ITO layer 70, obtain ITO electro-conductive glass.
The material of the first low-index layer 20 is SiO2Or MgF2。SiO2Refractive index be 1.48, MgF2
Refractive index be 1.38.Use SiO2Or MgF2Material as the first low-index layer 20 so that first
The refractive index of low-index layer 20 is of a relatively high.
The thickness of the first low-index layer 20 isWhen half-reflection and half-transmission conducting film color is required not
Gao Shi, the thickness of the first low-index layer 20 can be 0, i.e. in a special embodiment, first
The thickness of low-index layer 20 can be 0, say, that the first low-index layer 20 can omit.
In one preferably embodiment, the thickness of the first low-index layer 20 is
The material of the first high refractive index layer 30 is Nb2O5、TiO2、ZrO2Or Si3N4。Nb2O5Refractive index
It is 2.3, TiO2Refractive index be 2.3, ZrO2Refractive index be 2.17, Si3N4Refractive index be 2.0.Adopt
Use Nb2O5、TiO2、ZrO2Or Si3N4Material as the first high refractive index layer 30 so that the first high folding
The refractive index penetrating rate layer 30 is relatively low.
The thickness of the first high refractive index layer 30 can beWhen the color to half-reflection and half-transmission conducting film
Time less demanding, the thickness of the first high refractive index layer 30 can be 0, say, that a special reality
Executing in mode, the first high refractive index layer 30 can omit.
In one preferably embodiment, the thickness of the first high refractive index layer 30 can be
The material of the second low-index layer 40 is SiO2Or MgF2。SiO2Refractive index be 1.48, MgF2
Refractive index be 1.38.Use SiO2Or MgF2Material as the second low-index layer 40 so that second
The refractive index of low-index layer 40 is of a relatively high.
The thickness of the second low-index layer 40 isIn a special embodiment, second
The thickness of low-index layer 40 can be 0, say, that the second low-index layer 40 can omit.
In one preferably embodiment, the thickness of the second low-index layer 40 can be
The material of the second high refractive index layer 50 is Nb2O5、TiO2、ZrO2Or Si3N4。Nb2O5Refractive index
It is 2.3, TiO2Refractive index be 2.3, ZrO2Refractive index be 2.17, Si3N4Refractive index be 2.0.Adopt
Use Nb2O5、TiO2、ZrO2Or Si3N4Material as the second high refractive index layer 50 so that the second high folding
The refractive index penetrating rate layer 50 is relatively low.
The thickness of the second high refractive index layer 50 is
In one preferably embodiment, the thickness of the second high refractive index layer 50 can be
The thickness of the 3rd low-index layer 60 isIn a special embodiment, the 3rd
The thickness of low-index layer 60 can be 0, say, that the 3rd low-index layer 60 can omit.
In one preferably embodiment, the thickness of the 3rd low-index layer 60 can be
In present embodiment, the thickness of ITO layer 70 is
The ITO electro-conductive glass that this method prepares, including first low-index layer the 20, first high refractive index layer
30, the second low-index layer the 40, second high refractive index layer 50 and the 3rd low-index layer 60, refractive index is high
The film layer structure of the suitable thickness of low combination so that ITO electro-conductive glass self has the performance of half-reflection and half-transmission,
When as touch controllable function sheet, it is not necessary to extra stickup half-reflection and half-transmission blooming, relative to traditional touch-control merit
Can sheet, it is to avoid the light of PET film layer absorbs, and visual effect is preferable in use, simultaneously in durability, resistance to
The aspects such as frictional property have more advantage.
Concrete, this ITO electro-conductive glass is applied to mobile phone, panel computer, vehicular rear mirror or other side
On face.Be used in mobile phone time on mobile phone, panel computer, panel computer standby time can be as mirror use, and point
Time bright, mobile phone, panel computer just can be operated by backlight without the brightest；As vehicular rear mirror then
I.e. can irradiate the high light come by the high beam of vehicle after partially reflective, Journalistic, it is to avoid too strong is anti-
Penetrate luminous reflectance to enter the eyes of driver and affect driving, simultaneously can also display direction, time, the letter of weather
Breath.
It is specific embodiment below.
Embodiment 1
It is dried after float glass is cleaned.
It is 2 × 10 in operating pressure-3Under conditions of mbar, being sequentially depositing thickness at Float Glass Surface is
SiO2Layer, thickness areNb2O5Layer, thickness areSiO2Layer, thickness are
Nb2O5Layer and thickness areITO layer, obtain that required reflectance is (30 ± 3) % half anti-half
ITO electro-conductive glass thoroughly.
Embodiment 2
It is dried after float glass is cleaned.
It is 3 × 10 in operating pressure-3Under conditions of mbar, being sequentially depositing thickness at Float Glass Surface isTiO2Layer, thickness areSiO2Layer, thickness areTiO2Layer and thickness areITO layer, obtain the ITO electro-conductive glass that required reflectance is (40 ± 4) %.
The ITO electro-conductive glass preparing embodiment 1 and embodiment 2 utilizes the SD-6000 of Japan's electricity color to carry out
Reflectance test is tested, and at the 550nm of the ITO electro-conductive glass that embodiment 1 prepares, reflectance is 42.7%,
Reflection a* is 0.65, and reflection b* is 3.18；The peak reflectivity of the ITO electro-conductive glass that embodiment 2 prepares
Being 28.8%, reflection a* is-7.8, and reflection b* is-0.36.
Embodiment 3
It is dried after float glass is cleaned.
It is 8 × 10 in operating pressure-4Under conditions of mbar, being sequentially depositing thickness at Float Glass Surface is
Nb2O5Layer, thickness areSiO2Layer, thickness areNb2O5Layer and thickness are
ITO layer, obtain the ITO electro-conductive glass that required reflectance is (50 ± 5) %.
Embodiment 4
It is dried after float glass is cleaned.
It is 1 × 10 in operating pressure-3Under conditions of mbar, being sequentially depositing thickness at Float Glass Surface is
SiO2Layer, thickness areZrO2Layer, thickness areMgF2Layer, thickness are
Si3N4Layer and thickness areITO layer, obtain the required ITO that reflectance is (30 ± 3) %
Electro-conductive glass.
Embodiment 5
It is dried after float glass is cleaned.
It is 1 × 10 in operating pressure-3Under conditions of mbar, being sequentially depositing thickness at Float Glass Surface is
SiO2Layer, thickness areTiO2Layer, thickness areSiO2Layer, thickness areZrO2
Layer and thickness areITO layer, obtain the ITO electro-conductive glass that required reflectance is (40 ± 4) %.
Embodiment described above only have expressed the several embodiments of the present invention, and it describes more concrete and detailed,
But therefore can not be interpreted as the restriction to the scope of the claims of the present invention.It should be pointed out that, for this area
Those of ordinary skill for, without departing from the inventive concept of the premise, it is also possible to make some deformation and
Improving, these broadly fall into protection scope of the present invention.Therefore, the protection domain of patent of the present invention should be with appended
Claim is as the criterion.
Claims (2)
1. visual effect when using preferably, may be used for capacitance plate or vehicular rear mirror, self tool
The ITO electro-conductive glass of standby half-reflection and half-transmission performance, it is characterised in that the glass that includes stacking gradually, first low
Index layer, the first high refractive index layer, the second low-index layer, the second high refractive index layer and ITO layer；
Described glass is float glass；
The material of described first low-index layer is SiO2, the thickness of described first low-index layer is
The material of described first high refractive index layer is Nb2O5, the thickness of described first high refractive index layer isInstitute
The material stating the second low-index layer is SiO2, the thickness of described second low-index layer isDescribed
The material of the second high refractive index layer is Nb2O5, the thickness of described second high refractive index layer isDescribed
The thickness of ITO layer isThe reflectance of described ITO electro-conductive glass is 27%～33%；
Or, the material of described first low-index layer is SiO2, the thickness of described first low-index layer isThe material of described first high refractive index layer is ZrO2, the thickness of described first high refractive index layer is
The material of described second low-index layer is MgF2, the thickness of described second low-index layer isInstitute
The material stating the second high refractive index layer is Si3N4, the thickness of described second high refractive index layer isDescribed
The thickness of ITO layer isThe reflectance of described ITO electro-conductive glass is 27%～33%.
2. visual effect when using preferably, may be used for capacitance plate or vehicular rear mirror, self tool
The preparation method of the ITO electro-conductive glass of standby half-reflection and half-transmission performance, it is characterised in that comprise the steps:
Float glass is provided, is dried after cleaning；
It is 2 × 10 in operating pressure-3Under conditions of mbar, being sequentially depositing thickness at Float Glass Surface is
SiO2Layer, thickness areNb2O5Layer, thickness areSiO2Layer, thickness are
Nb2O5Layer and thickness areITO layer, obtain the half-reflection and half-transmission ITO that reflectance is 27%～33%
Electro-conductive glass；Or, it is 1 × 10 in operating pressure-3Under conditions of mbar, sink successively at Float Glass Surface
Long-pending thickness isSiO2Layer, thickness areZrO2Layer, thickness areMgF2Layer,
Thickness isSi3N4Layer and thickness areITO layer, obtain the ITO that reflectance is 27%～33%
Electro-conductive glass.
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| CN1807321A (en) * | 2005-12-31 | 2006-07-26 | 中国科学院广州能源研究所 | Highly energy-saving coating glass automatically adjusting light according to environment temperature and multi-layed assembled glass body |
| CN201317743Y (en) * | 2009-03-11 | 2009-09-30 | 深圳市三鑫精美特玻璃有限公司 | One-side coated glass |
| CN102837467A (en) * | 2011-06-22 | 2012-12-26 | 信义光伏产业(安徽)控股有限公司 | Transparent conductive film glass and preparation method thereof |
| CN204079782U (en) * | 2014-08-07 | 2015-01-07 | 宜昌南玻显示器件有限公司 | Ito conductive glass |
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| CN104163577A (en) | 2014-11-26 |
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