CN104154158A - Low-frequency air spring vibration isolator provided with magnetic damping motion converter - Google Patents
Low-frequency air spring vibration isolator provided with magnetic damping motion converter Download PDFInfo
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- CN104154158A CN104154158A CN201410429470.XA CN201410429470A CN104154158A CN 104154158 A CN104154158 A CN 104154158A CN 201410429470 A CN201410429470 A CN 201410429470A CN 104154158 A CN104154158 A CN 104154158A
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- plane bearing
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Abstract
The invention provides a low-frequency air spring vibration isolator provided with a magnetic damping motion converter and belongs to the field of precise measurement and precise mechanical/optical machining. The magnetic damping motion converter is installed inside a traditional air spring vibration isolator and is composed of a top permanent magnet, a middle permanent magnet, a bottom permanent magnet, an upper plane bearing, a lower plane bearing, a flywheel mass block, a nut and a base. The magnetic damping motion converter converts vertical vibration of load into relative motion of the permanent magnets in the load vibration process and provides certain magnetic damping and mechanical damping to enable vibration signals to be quickly and stably attenuated. In addition, due to the fact that on the basis that the permanent magnets are introduced while the rigidity of an air spring is not changed, the inherent frequency of the vibration isolator can be further reduced, and the stability of a large-bearing lower vibration isolation system is remarkably improved.
Description
Technical field
The invention belongs to precision measuremnt and precision optical machinery/optics manufacture field, relate generally to a kind of low frequency air cushion shock absorber of equipped magnetic damping converter.
Background technique
In research fields such as photo-electron, life science, nanometer technology and microelectronic, to the requirement of ambient vibration, be very harsh, particularly relatively low frequency vibration is the key issue that need to face every damping technology.In laboratory, particularly the frequency ratio often of the precision measurement equipment in super Clean Operating Lab and Experiments of Optics systems face is lower, and amplitude is lower oscillating signal also.The feature of common air cushion shock absorber is that vibration isolator self system stiffness index is low as much as possible, if rigidity is enough low, air cushion shock absorber can be to isolating lower than the vibration noise below 1Hz in environment, and certain frequency is that vibration noise more than 1Hz can be realized isolation completely.Air cushion shock absorber reaches two kinds of vibration isolating effects conventionally: a kind of impact of avoiding load to be subject to external environment vibration noise, isolation extraneous vibration noise; Be load this as thering is motion or a vibrational state, the air cushion shock absorber vibration of load that will decay fast, and prevent from vibrating environment to external world and exert an influence.Such as the detectable nanoscale of atom force microscope, but must isolate ambient vibration noise, this is the first vibration isolating effect; In field of semiconductor processing, wafer needs the motion of the high acceleration-deceleration of high speed, the work stage of carrying wafer will produce larger outbreak firmly, the vibrational perturbation that just need to produce work stage as air cushion shock absorber has the ability of quick decay, otherwise cannot carry out the photoetching of nano-precision, so vibration isolator will provide damping characteristic.
The structure of existing normal air spring vibration isolation device forms and comprises main gas tank, accessory air-space and rubber bag tank etc., and provides limited damping by the aperture between major and minor air chamber, and this structure continues up to also to be used today.If the air cushion shock absorber rigidity based on this structure is lower, under supported load weight effect, will make air cushion shock absorber produce larger amount of deformation so, and the amount of deformation that the oscillating signal that frequency is lower produces air cushion shock absorber is larger, such amount of deformation makes system easily occur Large Amplitude Motion, this motion comprises catenary motion, translation and swing etc., namely because the low rigidity of air cushion shock absorber will cause the unstable of system.
Summary of the invention
The object of the invention is exactly to realize taking into account of the low rigidity of air cushion shock absorber and air cushion shock absorber small deformation amount in passive vibration isolation mode, introduce " empty inertance element ", design provides a kind of low frequency air cushion shock absorber of equipped magnetic damping converter, the system in passive vibration isolation mode of reaching has and is less than the object that natural frequency that 1.5Hz is lower and system there will not be unstability working state, when particularly in vibrating isolation system, load is dynamic load, make the pneumatic spring vibrating isolation system with converter there is lower natural frequency, the vibration that the load that can decay rapidly causes, and the displacement variable of vibration isolator is less.
Technological scheme of the present invention is: a kind of low frequency air cushion shock absorber of equipped magnetic damping converter, and described low frequency air cushion shock absorber consists of upper cover plate, air spring rubber capsule, lower cover plate and cylinder, wherein, on cylinder upper end portion, by lower cover plate, seal and be fixedly mounted with air spring rubber capsule, accessory air-space in described cylinder is communicated with the main gas tank in air spring rubber capsule, on described air spring rubber capsule upper end portion, sealing is fixedly mounted with upper cover plate, compressed air inlet port is set on cylinder sidewall, throttle orifice is arranged in the accessory air-space of cylinder, and accessory air-space is separated into upper and lower air chamber, the structure of converter is: in flywheel mass piece central through bore, be fixedly mounted with nut, upper plane bearing and lower plane bearing are configured in respectively the place, upper and lower end of flywheel mass piece, are contact and coordinate, and form converter, by base, coordinate converter integral installation on cylinder upper end portion with contacting of lower plane bearing, and be positioned at the main gas tank of air spring rubber capsule, on described, periphery face and the cylinder of lower plane bearing are affixed, leading screw is arranged in nut thread hole, permanent magnet in the middle of installing on described leading screw upper end portion, by the top permanent magnet being packed on upper cover plate, form magnetic force closing structure with the bottom permanent magnet being packed on upper plane bearing, middle permanent magnet is suspended between top permanent magnet and bottom permanent magnet, in the middle of described, the corresponding segment polarity of permanent magnet and top permanent magnet and bottom permanent magnet is identical, the rotating support inserting in leading screw underpart is in base holes.
The good result of technological innovation of the present invention and generation is: this invention is on passive vibration isolation basis, by at the inner magnetic damping converter that increases of pneumatic spring, make air cushion shock absorber anti-vibration performance increase by four new features: 1. natural frequency further reduces; 2. the disturbance bringing for load, can suppress fast; 3. do not increase extra active member, the dependable with function advantage of former air cushion shock absorber does not change; 4. adopt magnetic damping structure to make converter and the isolation of air spring upper cover plate, so converter does not affect the rigidity of air spring rubber capsule.This vibration isolator has that compact structure is reasonable, vibration isolating effect good, durable reliable feature.
Accompanying drawing explanation:
Fig. 1 is existing air cushion shock absorber structural representation;
Fig. 2 is a kind of low frequency air cushion shock absorber structural representation of equipped magnetic damping converter;
Fig. 3 is converter structural representation;
Fig. 4 is force diagram between permanent magnet;
Piece number in figure: 1-air spring rubber capsule; 2-cylinder; 3-main gas tank; 4-accessory air-space; 5-throttle orifice; 6-upper cover plate; 7-lower cover plate; 8-converter; The upper plane bearing of 8a-; 8b-flywheel mass piece; 8c-lower plane bearing; 8d-nut; 8e-base; 9-top permanent magnet; 10-leading screw; 11-compressed air inlet port; Permanent magnet in the middle of 12-; 13-bottom permanent magnet
Embodiment
Below in conjunction with accompanying drawing, embodiment of the present invention is described in further detail:
A kind of low frequency air cushion shock absorber of equipped magnetic damping converter, described air cushion shock absorber is by a kind of low frequency air cushion shock absorber of equipped magnetic damping converter, and described low frequency air cushion shock absorber consists of upper cover plate 6, air spring rubber capsule 1, lower cover plate 7 and cylinder 2, wherein, on cylinder 2 upper end portions, by lower cover plate 7 sealings, be fixedly mounted with air spring rubber capsule 1, accessory air-space 4 in described cylinder 2 is communicated with the main gas tank 3 in air spring rubber capsule 1, on described air spring rubber capsule 1 upper end portion, sealing is fixedly mounted with upper cover plate 6, on cylinder 2 sidewalls, compressed air inlet port 11 is set, throttle orifice 5 is arranged in the accessory air-space 4 of cylinder 2, and accessory air-space 4 is separated into upper and lower air chamber, the structure of converter 8 is: in flywheel mass piece 8b central through bore, be fixedly mounted with nut 8d, upper plane bearing 8a and lower plane bearing 8c are configured in respectively the place, upper and lower end of flywheel mass piece 8b, are contact and coordinate, and form converter 8, by base 8e, coordinate converter 8 integral installations on cylinder 2 upper end portions with contacting of lower plane bearing 8c, and be positioned at the main gas tank 3 of air spring rubber capsule 1, on described, lower plane bearing 8a, periphery face and the cylinder 2 of 8c are affixed, leading screw 10 is arranged in nut 8d tapped hole, permanent magnet 12 in the middle of installing on described leading screw 10 upper end portions, by the top permanent magnet 9 being packed on upper cover plate 6, form magnetic force closing structure with the bottom permanent magnet 13 being packed on upper plane bearing 8a, middle permanent magnet 12 is suspended between top permanent magnet 9 and bottom permanent magnet 13, in the middle of described, the corresponding segment polarity of permanent magnet 12 and top permanent magnet 9 and bottom permanent magnet 13 is identical, the leading screw 10 rotating support insertings in underpart are in base 8e hole.
During work, because top permanent magnet 9, middle permanent magnet 12 and bottom permanent magnet 13 are homopolar magnet, interaction force between three is repulsion, so middle permanent magnet 12 is suspended between top permanent magnet 9 and bottom permanent magnet 13, make bottom permanent magnet 13 magnetic intensities be greater than top permanent magnet 9 magnetic intensities, for the gravity of permanent magnet 12 in the middle of overcoming and leading screw 10.When air cushion shock absorber is during in original state, the interior non-compressed air of air spring rubber capsule 1,12 of middle permanent magnets are stressed is F
1; When air cushion shock absorber is in running order, air spring rubber capsule 1 contains the pressurized air of certain pressure, and top permanent magnet 9 is away from middle permanent magnet 12, when top permanent magnet 9 positions are higher than S
1after, 12 of middle permanent magnets are stressed is 0, now air cushion shock absorber is in passive vibration isolation state; When the external world produces high vibration, top permanent magnet 9 positions move down, when lower than S
1after, the stressed increase of middle permanent magnet 12, when power increases to F
maxrear top permanent magnet 9 drives leading screw 10 motions, and flywheel mass piece 8b does high speed rotary motion, offsets extraneous vibration.
Claims (1)
1. a low frequency air cushion shock absorber for equipped magnetic damping converter, described low frequency air cushion shock absorber consists of upper cover plate (6), air spring rubber capsule (1), lower cover plate (7) and cylinder (2), wherein, on cylinder (2) upper end portion, by lower cover plate (7) sealing, be fixedly mounted with air spring rubber capsule (1), accessory air-space (4) in described cylinder (2) is communicated with the main gas tank (3) in air spring rubber capsule (1), on described air spring rubber capsule (1) upper end portion, sealing is fixedly mounted with upper cover plate (6), on cylinder (2) sidewall, compressed air inlet port (11) is set, throttle orifice (5) is arranged in the accessory air-space (4) of cylinder (2), and accessory air-space (4) is separated into upper and lower air chamber, it is characterized in that: the structure of converter (8) is: in flywheel mass piece (8b) central through bore, be fixedly mounted with nut (8d), upper plane bearing (8a) and lower plane bearing (8c) are configured in respectively the place, upper and lower end of flywheel mass piece (8b), be contact and coordinate, form converter (8), by base (8e), coordinate converter (8) integral installation on cylinder (2) upper end portion with contacting of lower plane bearing (8c), and be positioned at the main gas tank (3) of air spring rubber capsule (1), on described, lower plane bearing (8a, periphery face 8c) and cylinder (2) are affixed, leading screw (10) is arranged in nut (8d) tapped hole, permanent magnet (12) in the middle of installing on described leading screw (10) upper end portion, by the top permanent magnet (9) being packed on upper cover plate (6), form magnetic force closing structure with the bottom permanent magnet (13) being packed on upper plane bearing (8a), middle permanent magnet (12) is suspended between top permanent magnet (9) and bottom permanent magnet (13), in the middle of described, permanent magnet (12) is identical with the corresponding segment polarity of bottom permanent magnet (13) with top permanent magnet (9), the rotating support inserting in leading screw (10) underpart is in base (8e) hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410429470.XA CN104154158A (en) | 2014-08-28 | 2014-08-28 | Low-frequency air spring vibration isolator provided with magnetic damping motion converter |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410429470.XA CN104154158A (en) | 2014-08-28 | 2014-08-28 | Low-frequency air spring vibration isolator provided with magnetic damping motion converter |
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| CN104154158A true CN104154158A (en) | 2014-11-19 |
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| CN201410429470.XA Pending CN104154158A (en) | 2014-08-28 | 2014-08-28 | Low-frequency air spring vibration isolator provided with magnetic damping motion converter |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111677797A (en) * | 2020-05-20 | 2020-09-18 | 杭州电子科技大学 | Air spring damping device and damping method thereof |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001260880A (en) * | 2000-03-14 | 2001-09-26 | Hitachi Ltd | Rolling stock |
| CN102072275A (en) * | 2010-11-30 | 2011-05-25 | 哈尔滨工业大学 | Pneumatic spring vibration isolator of air flotation type forward and backward swing concatenation mechanism based on ball head connecting rod |
| CN102494080A (en) * | 2011-11-15 | 2012-06-13 | 江苏大学 | Integral shock absorber device of inertial container and damper in coaxial parallel connection |
| KR20120101864A (en) * | 2011-03-07 | 2012-09-17 | 한국생산기술연구원 | Duplex magnetic bearing type vibration damper |
| CN102937159A (en) * | 2012-10-31 | 2013-02-20 | 江苏大学 | Integrated hydro-pneumatic spring device |
-
2014
- 2014-08-28 CN CN201410429470.XA patent/CN104154158A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001260880A (en) * | 2000-03-14 | 2001-09-26 | Hitachi Ltd | Rolling stock |
| CN102072275A (en) * | 2010-11-30 | 2011-05-25 | 哈尔滨工业大学 | Pneumatic spring vibration isolator of air flotation type forward and backward swing concatenation mechanism based on ball head connecting rod |
| KR20120101864A (en) * | 2011-03-07 | 2012-09-17 | 한국생산기술연구원 | Duplex magnetic bearing type vibration damper |
| CN102494080A (en) * | 2011-11-15 | 2012-06-13 | 江苏大学 | Integral shock absorber device of inertial container and damper in coaxial parallel connection |
| CN102937159A (en) * | 2012-10-31 | 2013-02-20 | 江苏大学 | Integrated hydro-pneumatic spring device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111677797A (en) * | 2020-05-20 | 2020-09-18 | 杭州电子科技大学 | Air spring damping device and damping method thereof |
| CN111677797B (en) * | 2020-05-20 | 2021-11-16 | 杭州电子科技大学 | Air spring damping device and damping method thereof |
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Application publication date: 20141119 |
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