CN102506110A - Permanent magnet low frequency single-degree-of-freedom vibration isolation mechanism based on negative stiffness theory - Google Patents
Permanent magnet low frequency single-degree-of-freedom vibration isolation mechanism based on negative stiffness theory Download PDFInfo
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- CN102506110A CN102506110A CN2011103266164A CN201110326616A CN102506110A CN 102506110 A CN102506110 A CN 102506110A CN 2011103266164 A CN2011103266164 A CN 2011103266164A CN 201110326616 A CN201110326616 A CN 201110326616A CN 102506110 A CN102506110 A CN 102506110A
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- permanent magnet
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- sheet rubber
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F6/00—Magnetic springs; Fluid magnetic springs, i.e. magnetic spring combined with a fluid
- F16F6/005—Magnetic springs; Fluid magnetic springs, i.e. magnetic spring combined with a fluid using permanent magnets only
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2228/00—Functional characteristics, e.g. variability, frequency-dependence
- F16F2228/06—Stiffness
- F16F2228/063—Negative stiffness
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Abstract
The invention discloses an annular permanent magnet low frequency vibration isolation mechanism based on a negative stiffness theory. The mechanism comprises an upper rubber sheet, an inner annular permanent magnet fixing mandrel, an upper rubber sheet upper pressing ring, an upper rubber sheet outer pressing ring, an outer annular permanent magnet, a lower rubber sheet, a lower rubber sheet inner pressing sheet, a lower rubber sheet outer pressing ring, an outer annular permanent magnet fixing sleeve and an inner annular permanent magnet, wherein the inner annular permanent magnet is magnetized axially; the outer annular permanent magnet is radially magnetized; a positive stiffness system consists of the inner annular permanent magnet and the outer annular permanent magnet; a negative stiffness system consists of the upper rubber sheet and the lower rubber sheet; and the positive stiffness system and the negative stiffness system are used in parallel to form the low frequency vibration isolation mechanism. Three or four single-degree-of-freedom vibration isolation mechanisms are used in parallel to realize three-degree-of-freedom low frequency vibration isolation. When the vibration isolation mechanism has the largest magnetic force, the stiffness of the vibration isolation mechanism approximates to zero. Without an outside air source, the vibration isolation mechanism has a prospect of being used in vacuum, has the characteristics of simple structure and low cost, is easy to process, and can be applied to the fields of optics, acoustics, biologics, semiconductor manufacturing, precise measurement and the like.
Description
Technical field
The present invention relates to a kind of low frequency vibration isolation mechanism, particularly a kind of annular permanent magnet low frequency vibration isolation mechanism based on the negative stiffness principle is mainly used in optics, acoustics, semiconductor manufacturing, the superlow frequency vibration isolating of the middle-size and small-size instrument and equipment of precision measuremnt and ultraprecise field.
Background technique
In the ultraprecise field, accurate and ultraprecise is processed environment requirement more and more stricter, because the inside and outside vibration interference of machinery is one of key factor that reduces machining accuracy and surface quality.The quality of ultraprecise processing is not only relevant with the amplitude of vibration interference; And it is relevant with the frequency of vibration interference; To the dysgenic vibration frequency of ultraprecise processing generation is the micro breadth oscillation in the 0.5-70Hz scope; To the controlling method of vibration commonly used weakening, vibration isolation and absorbing, most widely usedly in the ultraprecise field surely belong to vibration isolation.At present, vibration isolating mechanism mainly contains following several kinds of forms: rubber, three string pendulums, fall pendulum, X pendulum and wave ball etc.Wherein rubber structure is simple, is difficult for the natural frequency that reaches lower.Falling pendulum and X pendulum can only be in direction vibration isolation of level.In Vertical direction, what vibration isolating effect was best at present is pneumatic spring, needs extraneous source of the gas, can not use in a vacuum.Can know by vibration absorbing theory; Interfering frequency is greater than
of vibrating isolation system natural frequency doubly to external world in tradition passive vibration isolation system; Play damping effect; Can isolate middle and high frequency vibration preferably, especially the ability of superlow frequency vibrating is relatively poor but isolate low-frequency vibration.Ability for the raising system isolates low-frequency vibration has two kinds of methods usually: the one, reduce the rigidity of vibrating isolation system; The 2nd, increase and carry quality.Under identical load, be out of shape stability big and the reduction vibrating isolation system for linear vibration isolator, but bearing capacity is restricted also.Therefore, traditional passive vibration isolation system can't satisfy fields such as ultraprecise processing and measurement to isolating the needs of ultralow frequency wide-band vibration, need carry out the research of novel non-linearity vibration isolator.If adopt ACTIVE CONTROL, can reduce natural frequency, improve anti-vibration performance, but cost is too high.After Platus has proposed the negative stiffness principle, in recent years, domestic and international application the negative stiffness Research on Principle go out various vibration isolators, though anti-vibration performance increases, its bearing capacity is less, it is tuning also need to carry out rigidity according to load during use.
Summary of the invention
The objective of the invention is to propose a kind of low frequency vibration isolation mechanism based on the negative stiffness principle; Existing advantages of high bearing capacity; Lower natural frequency is arranged again; Both can be implemented in the superlow frequency vibration isolating of the single-degree-of-freedom of Vertical direction, and can realize that also use also capable of being combined realized the low frequency vibration isolation of Three Degree Of Freedom, anti-vibration performance is good.
The objective of the invention is to realize through following technological scheme:
A kind of annular permanent magnet low frequency single-degree-of-freedom vibration isolating mechanism based on the negative stiffness principle is characterized in that: described superlow frequency vibration isolating mechanism comprises interior annular permanent magnet, outer ring permanent magnet, goes up sheet rubber, down sheet rubber, go up the sheet rubber inner pressure ring, go up the sheet rubber outer press ring, compressing tablet in the sheet rubber, sheet rubber outer press ring, interior annular permanent magnet stationary spindle and outer ring permanent magnet fixed cover down down; Interior annular permanent magnet axial magnetized, outer ring permanent magnet diametrical magnetization, interior ring and outer ring permanent magnet arranged concentric; Annular permanent magnet is fixed on its axle in described; Described outer ring permanent magnet is bonded on its fixed cover; The described outer rim that goes up sheet rubber is fixed through the end face of last sheet rubber outer press ring and outer ring permanent magnet, and the intermediate portion of last sheet rubber is fixed through the end face of last sheet rubber upper press ring and interior annular permanent magnet; The outer rim of described sheet rubber is down fixed through the bottom surface of following sheet rubber outer press ring and outer ring permanent magnet, and the intermediate portion of following sheet rubber is fixed through the bottom surface of compressing tablet and interior annular permanent magnet stationary spindle in the following sheet rubber.
The annular permanent magnet stationary spindle is provided with the shaft shoulder and the following shaft shoulder in described, and the last shaft shoulder flushes with the end face of interior annular permanent magnet, and the following shaft shoulder flushes with the bottom surface of interior annular permanent magnet.
The described sheet rubber of going up all can adopt industrial rubber or natural rubber with following sheet rubber.
A kind of annular permanent magnet low frequency Three Degree Of Freedom vibration isolating mechanism provided by the invention based on the negative stiffness principle; It is characterized in that: this mechanism is made up of three or four described low frequency single-degree-of-freedom vibration isolating mechanisms, and described three low frequency single-degree-of-freedom vibration isolating mechanisms are evenly distributed on the same circumference; Described four low frequency single-degree-of-freedom vibration isolating mechanisms are formed square structure; Described Three Degree Of Freedom is around x axle direction and the Three Degree Of Freedom that rotates and move along the z direction around the y axle direction.
The present invention compared with prior art, effect with high-lighting has the following advantages: the 1. low frequency vibration isolation mechanism that proposes of the present invention, do not need the outside energy input, therefore have in a vacuum and use prospect preferably.When 2. the magnetic force between permanent magnet was maximum, its rigidity approached zero, so can realize low frequency vibration isolation, compared with the vibration isolator of existing negative stiffness system, and existing advantages of high bearing capacity has lower natural frequency again, and has good anti-vibration performance.3. low frequency vibration isolation of the present invention mechanism is made up of inside-and-outside ring permanent magnet, rubber and annex thereof, and it is simple in structure, and cost is quite cheap, and is easy to manufacturing.
Description of drawings
Fig. 1 is the principal section figure of the annular permanent magnet low frequency single-degree-of-freedom vibration isolating mechanism based on the negative stiffness principle provided by the invention.
Fig. 2 is the plan view of Fig. 1.
Fig. 3 provides the schematic diagram based on the annular permanent magnet low frequency single-degree-of-freedom vibration isolating mechanism of negative stiffness principle for the present invention.
Fig. 4 is the External view (being distributed by four low frequency single-degree-of-freedom vibration isolating mechanism squarelys) of the annular permanent magnet low frequency Three Degree Of Freedom vibration isolating mechanism based on the negative stiffness principle provided by the invention.
Fig. 5 is the External view (by three circular even distributions of low frequency single-degree-of-freedom vibration isolating mechanism) of the annular permanent magnet low frequency Three Degree Of Freedom vibration isolating mechanism based on the negative stiffness principle provided by the invention.
Among the figure: the last sheet rubber of 1-; Annular permanent magnet stationary spindle in the 2-; The last sheet rubber upper press ring of 3-; The last sheet rubber outer press ring of 4-; 5-outer ring permanent magnet; Sheet rubber under the 6-; Compressing tablet in the sheet rubber under the 7-; Sheet rubber outer press ring under the 8-; 9-outer ring permanent magnet fixed cover; Annular permanent magnet in the 10-; Among the figure: the 11-lower supporting plate; The 12-upper backup pad; The 13-load; 14-low frequency single-degree-of-freedom vibration isolating mechanism.
Embodiment
Fig. 1, as 2 being the structural representation of the annular permanent magnet low frequency single-degree-of-freedom vibration isolating mechanism based on the negative stiffness principle provided by the invention, this annular permanent magnet low frequency single-degree-of-freedom vibration isolating mechanism comprises interior annular permanent magnet 10, outer ring permanent magnet 5, goes up sheet rubber 1, down sheet rubber 6, interior annular permanent magnet stationary spindle 2, go up sheet rubber upper press ring 3, go up sheet rubber outer press ring 4, compressing tablet 7 in the sheet rubber, sheet rubber outer press ring 8 and outer ring permanent magnet fixed cover 9 down down; Interior annular permanent magnet 10 axial magnetizeds, outer ring permanent magnet 5 diametrical magnetizations, interior annular permanent magnet and outer ring permanent magnet arranged concentric; Annular permanent magnet is fixed on the interior annular permanent magnet stationary spindle 2 in described; Described outer ring permanent magnet 5 is bonded on the outer ring permanent magnet fixed cover 9; The outer rim of last sheet rubber 1 is fixed through the last sheet rubber outer press ring 4 and the end face of outer ring permanent magnet 5, and the intermediate portion of last sheet rubber 1 is fixed through the last sheet rubber upper press ring 3 and the end face of interior ring permanent magnet; The outer rim of described sheet rubber 6 is down fixed through the following sheet rubber pressure ring 8 and the bottom surface of outer ring permanent magnet, and the intermediate portion of following sheet rubber 6 is fixed with the bottom surface of interior annular permanent magnet stationary spindle 2 through compressing tablet 7 in the following rubber.The described sheet rubber of going up adopts industrial rubber or natural rubber with following sheet rubber.
On interior annular permanent magnet stationary spindle 2, be provided with the shaft shoulder and the following shaft shoulder, the last shaft shoulder flushes with the end face of interior annular permanent magnet, and the following shaft shoulder flushes with the bottom surface of interior annular permanent magnet; Last sheet rubber is fixed together through last sheet rubber upper press ring 3 and bolt and interior annular permanent magnet 10; Following sheet rubber is fixed together with bolt and interior annular permanent magnet stationary spindle 2 through compressing tablet 7 in the following sheet rubber.
Fig. 3 is the structure vibration isolation principle figure in vertical direction of the annular permanent magnet low frequency single-degree-of-freedom vibration isolating mechanism based on the negative stiffness principle provided by the invention.Describedly be equivalent to a magnetic spring based on the inside-and-outside ring permanent magnet in the annular permanent magnet low frequency single-degree-of-freedom vibration isolating mechanism of negative stiffness principle, establishing its rigidity is K
v, wherein rubber also produces rigidity under the effect of repulsion, establishes it and is K
L, be K at the component of Vertical direction
LSin θ, but it is in the opposite direction, the magnetic spring produces positive rigidity, rubber produces negative stiffness, described low frequency single-degree-of-freedom vibration isolating mechanism in the rigidity of Vertical direction to being expressed as:
Wherein K is the global stiffness of low frequency single-degree-of-freedom vibration isolating mechanism in Vertical direction, K
The magnetic springBe the rigidity of inside-and-outside ring permanent magnet in Vertical direction, K
RubberBe the rigidity of rubber in Vertical direction, θ rubber be and horizontal line between angle, x is the displacement of Vertical direction, γ is the cosine value (0＜γ＜1) of angle theta between rubber and the horizontal line.
Can know from following formula; But the rigidity that the rigidity partial offset permanent magnet of rubber produces reduces the rigidity of vibration isolating mechanism, even can reach zero; Can get according to
; Natural frequency f levels off to zero, so can realize low frequency vibration isolation, M is the quality of load.
Fig. 4 is four External views that can realize the Three Degree Of Freedom vibration isolating mechanism based on the annular permanent magnet low frequency single-degree-of-freedom vibration isolating mechanism parallel connection use of negative stiffness principle; Promptly four low frequency single-degree-of-freedom vibration isolating mechanisms are formed square structure, and the vibration isolating mechanism of each low frequency single-degree-of-freedom can equivalence be a spring-damp system all; Described Three Degree Of Freedom is to rotate and move along the z direction around the x axle direction with around the y axle direction.
The described vibration isolation principle that rotates around the x direction be as external interference when the x axle acts in the load counterclockwise, the axial relative displacement of inside and outside ring of A, two vibration isolation units of B reduces, magnetic force increases; Simultaneously, the axial relative displacement of inside and outside ring increases in C, two vibration isolation units of D, and magnetic force reduces, and load will return to original equilibrium position under the effect of magnetic force, realize vibration isolation.Otherwise, when external interference when the x axle acts in the load clockwise, in like manner can realize vibration isolation.
Described around the axial vibration isolation of y with identical around the axial vibration isolation principle of x, do not give unnecessary details at this.
Described vibration isolation principle along Z-direction is when the external interference along the z negative direction acts in the load; Axial displacement between the inside-and-outside ring permanent magnet reduces, and its magnetic force increases, and the pulling force of rubber reduces; The load meeting returns to the equilibrium position under the effect of magnetic force and rubber, realize vibration isolation; Otherwise if when the external interference that makes progress acts in the load, the axial displacement of inside and outside ring permanent magnet increases, and axial magnetic reduces, and rubber is stretched and rigidity increases, and load also can be returned to the equilibrium position under the effect of magnetic force and rubber, realize vibration isolation.
Fig. 5 is based on the External view of the annular permanent magnet low frequency Three Degree Of Freedom vibration isolating mechanism of negative stiffness principle, and promptly three low frequency single-degree-of-freedom vibration isolating mechanisms are evenly distributed on the same circumference, and the vibration isolation unit of each low frequency single-degree-of-freedom can equivalence be a spring-damp system all; Described three annular low frequency single-degree-of-freedom vibration isolating mechanism parallel connection uses can realize moving along the z direction, the rotation vibration isolation of x direction and y direction, and its principle is identical with principle shown in Figure 4, and vibration isolating effect is also identical, and just bearing capacity is different.
Claims (4)
1. annular permanent magnet low frequency single-degree-of-freedom vibration isolating mechanism based on the negative stiffness principle is characterized in that: this vibration isolating mechanism comprises sheet rubber (1), interior annular permanent magnet stationary spindle (2), goes up sheet rubber upper press ring (3), goes up sheet rubber outer press ring (4), outer ring permanent magnet (5), sheet rubber (6), compressing tablet (7) in the sheet rubber, sheet rubber outer press ring (8), outer ring permanent magnet fixed cover (9) and interior annular permanent magnet (10) down down down; Annular permanent magnet (10) axial magnetized in described, outer ring permanent magnet (5) diametrical magnetization, interior annular permanent magnet and outer ring permanent magnet arranged concentric; Annular permanent magnet is fixed on the interior annular permanent magnet stationary spindle (2) in described; Described outer ring permanent magnet (5) is bonded on the outer ring permanent magnet fixed cover (9); The described outer rim that goes up sheet rubber (1) is fixed through the last sheet rubber outer press ring (4) and the end face of outer ring permanent magnet (5), and the intermediate portion of last sheet rubber (1) is fixed through the last sheet rubber upper press ring (3) and the end face of interior annular permanent magnet (10); The outer rim of described down sheet rubber (6) is fixed with the bottom surface of outer ring permanent magnet (5) through sheet rubber outer press ring (8) down, and the intermediate portion of following sheet rubber (6) is fixed through the bottom surface of interior compressing tablet (7) of sheet rubber and interior annular permanent magnet stationary spindle (2) down.
2. according to the described a kind of annular permanent magnet low frequency single-degree-of-freedom vibration isolating mechanism of claim 1 based on the negative stiffness principle; It is characterized in that: the annular permanent magnet stationary spindle is provided with the shaft shoulder and the following shaft shoulder in described; The last shaft shoulder flushes with the end face of interior annular permanent magnet, and the following shaft shoulder flushes with the bottom surface of interior annular permanent magnet.
3. according to the described a kind of annular permanent magnet low frequency single-degree-of-freedom vibration isolating mechanism based on the negative stiffness principle of claim 1, it is characterized in that: the described sheet rubber of going up adopts industrial rubber or natural rubber with following sheet rubber.
4. annular permanent magnet low frequency Three Degree Of Freedom vibration isolating mechanism based on the negative stiffness principle; It is characterized in that: this mechanism is made up of three or four low frequency single-degree-of-freedom vibration isolating mechanisms as claimed in claim 1; Described three low frequency single-degree-of-freedom vibration isolating mechanisms are evenly distributed on the same circumference, or described four low frequency single-degree-of-freedom vibration isolating mechanisms are formed square structure; Described Three Degree Of Freedom is meant around x axle direction and the Three Degree Of Freedom that rotates and move along the z axle direction around the y axle direction.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110326616 CN102506110B (en) | 2011-10-25 | 2011-10-25 | Permanent magnet low frequency single-degree-of-freedom vibration isolation mechanism based on negative stiffness theory |
| PCT/CN2012/083359 WO2013060257A1 (en) | 2011-10-25 | 2012-10-23 | Permanently magnetic, low-frequency, single-degree-of-freedom, vibration isolation mechanism based on negative rigidity principle |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110326616 CN102506110B (en) | 2011-10-25 | 2011-10-25 | Permanent magnet low frequency single-degree-of-freedom vibration isolation mechanism based on negative stiffness theory |
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| CN102506110A true CN102506110A (en) | 2012-06-20 |
| CN102506110B CN102506110B (en) | 2013-10-30 |
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Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102853018A (en) * | 2012-08-21 | 2013-01-02 | 华中科技大学 | Vibration isolator with magnetic suspension unit |
| WO2013060257A1 (en) * | 2011-10-25 | 2013-05-02 | 清华大学 | Permanently magnetic, low-frequency, single-degree-of-freedom, vibration isolation mechanism based on negative rigidity principle |
| CN103116249A (en) * | 2012-12-12 | 2013-05-22 | 清华大学 | Negative stiffness system for gravity compensation of micropositioner |
| NL2012384A (en) * | 2013-03-11 | 2014-09-15 | Mapper Lithography Ip Bv | Support module for lithography system. |
| WO2015120683A1 (en) * | 2014-02-14 | 2015-08-20 | 华中科技大学 | A single-degree-of-freedom magnetic vibration isolation device |
| CN105546026A (en) * | 2015-12-24 | 2016-05-04 | 吉林大学 | Low-frequency three-dimensional vibration-isolating mining dump vehicle seat based on magnetic negative-stiffness spring design |
| US9447839B2 (en) | 2011-09-15 | 2016-09-20 | Mapper Lithography Ip B.V. | Support module for lithography system |
| CN106151340A (en) * | 2016-07-08 | 2016-11-23 | 哈尔滨工程大学 | A kind of linear negative rigidity mechanism based on permanent magnet array |
| CN108662055A (en) * | 2018-07-30 | 2018-10-16 | 上海大学 | A kind of quasi-zero stiffness vibration isolators of positive and negative Stiffness |
| CN109505904A (en) * | 2018-12-27 | 2019-03-22 | 长沙理工大学 | A kind of low frequency vibration damping Meta Materials |
| CN111734776A (en) * | 2020-06-29 | 2020-10-02 | 哈尔滨工业大学 | Three-degree-of-freedom low-frequency vibration isolator based on parallel connection of horizontal pre-pressing spring and magnetic spring |
| CN113091587A (en) * | 2021-04-06 | 2021-07-09 | 重庆大学 | Quasi-zero rigidity absolute displacement sensor based on electromagnetic positive rigidity |
| CN113211460A (en) * | 2021-05-01 | 2021-08-06 | 吉林大学 | Device for improving machining rigidity of two single-arm industrial robots in non-contact mode |
| CN113757285A (en) * | 2021-09-08 | 2021-12-07 | 重庆大学 | Negative stiffness generating mechanism and quasi-zero stiffness vibration isolator |
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| US9447839B2 (en) | 2011-09-15 | 2016-09-20 | Mapper Lithography Ip B.V. | Support module for lithography system |
| WO2013060257A1 (en) * | 2011-10-25 | 2013-05-02 | 清华大学 | Permanently magnetic, low-frequency, single-degree-of-freedom, vibration isolation mechanism based on negative rigidity principle |
| CN102853018A (en) * | 2012-08-21 | 2013-01-02 | 华中科技大学 | Vibration isolator with magnetic suspension unit |
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| WO2015120683A1 (en) * | 2014-02-14 | 2015-08-20 | 华中科技大学 | A single-degree-of-freedom magnetic vibration isolation device |
| US9829059B2 (en) | 2014-02-14 | 2017-11-28 | Huazhong University Of Science And Technology | Single degree-of-freedom magnetic vibration isolation device |
| CN105546026A (en) * | 2015-12-24 | 2016-05-04 | 吉林大学 | Low-frequency three-dimensional vibration-isolating mining dump vehicle seat based on magnetic negative-stiffness spring design |
| CN106151340A (en) * | 2016-07-08 | 2016-11-23 | 哈尔滨工程大学 | A kind of linear negative rigidity mechanism based on permanent magnet array |
| CN108662055A (en) * | 2018-07-30 | 2018-10-16 | 上海大学 | A kind of quasi-zero stiffness vibration isolators of positive and negative Stiffness |
| CN108662055B (en) * | 2018-07-30 | 2019-09-27 | 上海大学 | A kind of quasi-zero stiffness vibration isolators of positive and negative Stiffness |
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| CN113757285A (en) * | 2021-09-08 | 2021-12-07 | 重庆大学 | Negative stiffness generating mechanism and quasi-zero stiffness vibration isolator |
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| WO2013060257A1 (en) | 2013-05-02 |
| CN102506110B (en) | 2013-10-30 |
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