CN104139310A - Counterpoint platform with tight locate function of fluid pressure boost - Google Patents
Counterpoint platform with tight locate function of fluid pressure boost Download PDFInfo
- Publication number
- CN104139310A CN104139310A CN201310261979.3A CN201310261979A CN104139310A CN 104139310 A CN104139310 A CN 104139310A CN 201310261979 A CN201310261979 A CN 201310261979A CN 104139310 A CN104139310 A CN 104139310A
- Authority
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- China
- Prior art keywords
- fluid
- movable platform
- face
- limit base
- pedestal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 title claims abstract description 76
- 238000012856 packing Methods 0.000 claims abstract description 28
- 238000007667 floating Methods 0.000 claims abstract description 17
- 238000012545 processing Methods 0.000 claims abstract description 8
- 230000000149 penetrating effect Effects 0.000 claims abstract 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 29
- 230000009471 action Effects 0.000 claims description 16
- 230000008676 import Effects 0.000 claims description 16
- 238000004891 communication Methods 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 239000007769 metal material Substances 0.000 claims description 4
- 238000013519 translation Methods 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 12
- 238000003825 pressing Methods 0.000 abstract description 2
- 230000006835 compression Effects 0.000 abstract 1
- 238000007906 compression Methods 0.000 abstract 1
- 230000002708 enhancing effect Effects 0.000 abstract 1
- 230000000087 stabilizing effect Effects 0.000 abstract 1
- 238000005728 strengthening Methods 0.000 abstract 1
- 238000006073 displacement reaction Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000013461 design Methods 0.000 description 5
- 238000003754 machining Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000002787 reinforcement Effects 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Machine Tool Units (AREA)
Abstract
The invention discloses an alignment platform with a fluid pressurization and pressing positioning function, which comprises: a base and a movable platform; at least two groups of guide devices are arranged between the base and the movable platform; the center of the component mounting surface is convexly provided with a hollow limiting seat, a cavity is formed in the hollow limiting seat, and the center of the end surface is provided with a shaft hole penetrating through the cavity; the inner surface of the movable platform is convexly provided with a leaning plate, and a spacing space is defined between the leaning plate and the inner surface of the movable platform; an I-shaped packing seat is arranged between the component mounting surface and the inner surface of the movable platform; a fluid pressurization interface is formed by the relative annular clearance space between the floating disc of the I-shaped packing seat and the cavity of the hollow limiting seat; the fluid pressurizing interface is connected with a fluid introducing unit; the invention ensures that the stationary state of the movable platform obtains a fluid pressurization and compression type strengthening and stabilizing function and effect, and achieves the purposes of enhancing the structural strength and stability of the movable platform and greatly improving the processing precision and quality.
Description
Technical field
The present invention relates to a kind of contraposition stage apparatus, particularly a kind of innovation with the urgent positioning function of fluid pressurized is to bit platform.
Background technology
Press, along with the arriving of cyberage, how the tupe of multiple manufacture processing has entered rice grade, and numerous sophisticated products have higher more harsh required precision, especially photoelectricity and product wafer in processing procedure, and its precision positioning technology becomes necessary requirement.
In Precision Machining processing procedure, the equipment that bit platform (or claiming contraposition slide unit) is generally adopted for industrial circle; The existing typical structure form to bit platform at present, mainly that the screw rod that is horizontally set with array X axis and Y-axis between a movable platform and a pedestal is led device, the assembling seat portion that screw rod is led device is located in pedestal, and screw rod is led device, and the flexible moved end of doing is the state of being slidably matched and is linked to movable platform; By this, its when running can see through to be controlled screw rod and leads wherein single group start of device or entirety with the mode such as moving, reaches and orders about movable platform displacement or rotate the object of processing precision with adjustment.
Though aforementioned contraposition platform structure is in using the upper function that really can reach its accurate displacement adjustment, but its problem points is the part that to be location, generally because of, existing contraposition platform structure is no matter in actuator state or surely only when state, the support force of its movable platform and polarization are to be dependent on screw rod to lead the annexation of device and reach completely, but, because screw rod is led and is sliding connection relation between device and movable platform, this kind of assembled state has fit tolerance unavoidably in the two place that is respectively connected, and the result of fit tolerance accumulation, certainly will cause the problem that also cannot reach rigidity strong fix state to bit platform in the time surely stopping state, that is there is no enough bearing support abilities for lateral action power, this problem is particularly serious for bit platform for three axle configuration, surely while stopping because of its movable platform, wherein one lead moving axis and be larger free degree connecting state, therefore bearing support ability a little less than, and another kind of four axle configuration are existing to bit platform, though its side direction bearing capacity is better than aforementioned three axle configuration persons, its shortcoming is that manufacturing cost significantly improves, and still existence is combined progression tolerance issues and cannot be reached rigidity firm support state, to take off the existing structural design to bit platform on comprehensive, in its process when movable platform is stressed while reaching to a certain degree, often easily produce buffeting, shift phenomenon and badly influence final products machining accuracy and quality, so be difficult to meet the high-precision requirement of industrial circle expection, be necessary to be thought again in fact breakthrough.
Summary of the invention
Main purpose of the present invention be to provide a kind of have the urgent positioning function of fluid pressurized to bit platform.
For achieving the above object, the present invention by the following technical solutions:
A kind of have the urgent positioning function of fluid pressurized bit platform is comprised:
One pedestal, for thering is the pedestal form of an area and thickness, this pedestal comprise one put face and a member installment surface;
One movable platform, is located at the member installment surface one spacing distance position of pedestal, and this movable platform comprises a processing table top and an inner face;
At least two groups are led device, are different action shafts and are connected between the member installment surface and the inner face of movable platform of pedestal to distributional pattern setting, lead device and produce multi-direction translation adjustment campaign for ordering about control movable platform;
One hollow limit base, is convexly equipped with the member installment surface central authorities that are positioned pedestal, the inner chamber that forms of this hollow limit base, and the end face central authorities of hollow limit base offer an axis hole and connect this chamber;
One against plate, be convexly equipped with the inner face one spacing distance place that is positioned movable platform, should be formed with a clearance space against defining between plate and movable platform inner face, relative with movable platform inner face interval against plate tool one abutment action face, and offer one against plate central authorities and penetrate mouth, should between plate and the end face of hollow limit base, be mutually against state again;
One I shape clamping base, be located at the middle section between member installment surface and the inner face of movable platform of pedestal, this I shape clamping base comprises a floating disc of parallel interval configuration, one packing dish and a vertical couple axle that is positioned middle position between this floating disc and packing dish to link, wherein this floating disc is placed in the chamber of hollow limit base, and floating disc periphery be provided with stop close ring and and between chamber, be air-tight fit relation, packing dish is placed in against the clearance space forming between plate and movable platform inner face, it is corresponding with the abutment action face against plate that this packing dish has a packing face, this couple axle is worn group in the set axis hole of hollow limit base,
One fluid pressurized interface, by the relative formation in annular gap space between the floating disc of I shape clamping base and the chamber of hollow limit base;
One fluid imports unit, comprises the fluid pressure introduction channel of being located at hollow limit base one side and a fluid conduit systems that is communicated with this fluid pressure introduction channel, wherein the inner communication of fluid supercharging of this fluid pressure introduction channel interface.
Innovate by this unique design, make the present invention contrast prior art, in the time that this fluid imports unit and imports fluid pressure and make between fluid pressurized interface that gap expands, entirety I shape clamping base can be towards the displacement of pedestal direction, the packing of ordering about packing dish faces against the abutment action face of plate and produces the effect that pushes against, make movable platform surely only state obtain a kind of firm function of reinforcement and effect of fluid pressurized close type, and then reach accurate movable platform structure intensity and the steadiness to bit platform of gain, significantly promote machining accuracy quality and simple in structure and be easy to many practical improvements such as volume production manufacture.
Brief description of the drawings
Fig. 1 is the exploded perspective view of structure preferred embodiment of the present invention.
Fig. 2 is the combination stereogram of structure preferred embodiment of the present invention.
Fig. 3 is the assembled sectional view of structure preferred embodiment of the present invention.
Fig. 4 is the actuator state schematic diagram that the present invention can utilize fluid pressure packing location.
Fig. 5 is that fluid pressurized of the present invention discharges interface importing fluid pressure view.
Detailed description of the invention
Refer to Fig. 1,2,3, what the present invention had a urgent positioning function of fluid pressurized comprises following formation to bit platform A:
One pedestal 10, for thering is the pedestal form of an area and thickness, this pedestal 10 comprise one put face 11 and a member installment surface 12;
One movable platform 20, is located at the member installment surface 12 1 spacing distance positions of pedestal 10, and this movable platform 20 comprises a processing table top 21 and an inner face 22;
At least two groups are led device 30, be different action shafts and be connected between the member installment surface 12 of pedestal 10 and the inner face 22 of movable platform 20 to distributional pattern setting, lead device 30 use order about control movable platform 20 produce multi-direction translation adjustment campaign (be generally X-axis, Y-axis and rotatablely move);
One hollow limit base 40, is convexly equipped with member installment surface 12 central authorities that are positioned pedestal 10, the inner chamber 41 that forms of this hollow limit base 40, and end face 42 central authorities of hollow limit base 40 offer an axis hole 43 and connect this chamber 41;
One against plate 50, be convexly equipped with the inner face one spacing distance place that is positioned movable platform 20, should be formed with a clearance space 51 against defining between plate 50 and movable platform 20 inner faces, relative with movable platform 20 inner face 22 intervals against plate 50 tool one abutment action faces 52, and offer one against plate 50 central authorities and penetrate mouth 53, between plate 50 and the end face 42 of hollow limit base 40, be mutually against state;
One I shape clamping base 60, be located at the middle section between the member installment surface 12 of pedestal 10 and the inner face 22 of movable platform 20, this I shape clamping base 60 comprises a floating disc 61 of parallel interval configuration, one packing dish 62 and a vertical couple axle 63 that is positioned middle position between this floating disc 61 and packing dish 62 to link, the chamber 41 that wherein this floating disc 61 is placed in hollow limit base 40 is can locating slip quick condition, and floating disc 61 peripheries be provided with stop close ring 612 and and between chamber 41, be air-tight fit relation, packing dish 62 is placed in against the clearance space 51 forming between plate 50 and movable platform 20 inner faces 22, it is corresponding with the abutment action face 52 against plate 50 that this packing dish 62 has a packing face 624, 63 of this couple axles are worn group and are the axially moving state of pivot in the set axis hole 43 of hollow limit base 40,
One fluid pressurized interface 70, by the relative formation in annular gap space between the floating disc 61 of I shape clamping base 60 and the chamber 41 of hollow limit base 40;
One fluid imports unit 80, comprise and be located at the fluid pressure introduction channel 81 of hollow limit base 40 1 sides and use a fluid conduit systems 82 that imports an external fluid (for gas or oil) pressure and be communicated with this fluid pressure introduction channel 81, the wherein inner communication of fluid supercharging of this fluid pressure introduction channel 81 interface 70.
Form design by said structure, the present invention is in bit platform A practical application, the innovation unique function that it can reach as shown in Figure 4, in the time that this fluid imports unit 80 and imports fluid pressure (as shown in arrow L1) and make between fluid pressurized interface 70 that gap expands, entirety I shape clamping base 60 can be towards pedestal 10 direction displacements (as shown in arrow L2), the packing face 624 that orders about packing dish 62 produces towards the abutment action face 52 against plate 50 effect (as shown in arrow L3) that pushes against, make by this movable platform 20 surely only state can obtain a kind of firm function of reinforcement and effect of fluid pressurized close type, this is demand that the present invention wants and the main effect and the object that reach.
As shown in Figure 3, wherein should discharge interface 54 against more forming a fluid pressurized between plate 50 and the end face of hollow limit base 40, and establish one second group of fluid in hollow limit base 40 1 sides and import unit 90, comprise that the fluid pressure of being located at hollow limit base one side imports duct 91 and uses a fluid delivery tube 92 that imports an exterior fluid pressure and be communicated with this fluid pressure importing duct 91, wherein this fluid pressure imports inner communication of fluid supercharging release interface 54, duct 91; Embodiment design by this, in its start as shown in Figure 5, in the time that this fluid pressurized release interface 54 imports fluid pressure (as shown in arrow L4), can make against between plate 50 and hollow limit base 40, produce fluid pressure support floating effect (even also against plate 50 together with producing buoyance lift effect against plate 50, as shown in arrow L5), be beneficial to the smooth and easy adjustment displacement against plate 50.
Wherein, the packing dish 62 of this I shape clamping base 60 can adopt the metal material (as iron) with one first hardness to form, should can adopt the metal material (as aluminium) with one second hardness to form against 52, the abutment action face of plate 50, wherein said the first hardness be greater than the second hardness.Material difference formula design by this, mainly can promote tight ness rating and the steadiness of this packing dish 62 when under the pressure of abutment action face 52 again, has advantages of the gain of packing effect.
And for example, shown in Fig. 1,3,5, wherein the central corresponding axis hole of the end face 42 of this hollow limit base 40 43 places more can form a flange 44, and order is greater than this flange 44 against the set bore that penetrates mouth of plate 50.
Wherein, this pedestal 10 put face 11 and install and use form, comprise downward assembling morphology (being state shown in Fig. 3) or to over slung type assembling morphology (this illustration face omits and illustrates) person.Wherein saidly conventionally be applied to microspur type pressing equipment to over slung type assembling morphology, also belong to the applicable category of the present invention.
Advantage of the present invention:
The present invention have the urgent positioning function of fluid pressurized to bit platform mainly by described pedestal, movable platform, lead device, hollow limit base, against plate, I shape clamping base, fluid pressurized interface, the innovation unique texture form technical characterictic that fluid importing unit etc. forms, make the present invention contrast [background technology] existing structure of carrying, in the time that this fluid imports unit and imports fluid (for gas or oil) pressure and make between fluid pressurized interface that gap expands, the I-shaped clamping base of entirety can be towards the displacement of pedestal direction, the packing of ordering about packing dish faces against the abutment action face of plate and produces the effect that pushes against, make movable platform surely only state obtain a kind of firm function of reinforcement and effect of fluid pressurized close type, can eliminate contraposition platform member combinational gap and progression tolerance, and effectively support the side force of countermeasure activity platform, weight power and roll extrusion active force, and then can reach accurate movable platform structure intensity and the steadiness to bit platform of gain, significantly promote machining accuracy quality and simple in structure and be easy to many practical improvements such as volume production manufacture.
The above; be only the specific embodiment of the present invention, but protection scope of the present invention is not limited to this, any be familiar with those skilled in the art the present invention disclose technical scope in; can expect easily changing or replacing, within all should being encompassed in protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection domain of described claim.
Claims (6)
1. have the urgent positioning function of fluid pressurized to a bit platform, it is characterized in that comprising:
One pedestal, for thering is the pedestal form of an area and thickness, this pedestal comprise one put face and a member installment surface;
One movable platform, is located at the member installment surface one spacing distance position of pedestal, and this movable platform comprises a processing table top and an inner face;
At least two groups are led device, are different action shafts and are connected between the member installment surface and the inner face of movable platform of pedestal to distributional pattern setting, lead device and produce multi-direction translation adjustment campaign for ordering about control movable platform;
One hollow limit base, is convexly equipped with the member installment surface central authorities that are positioned pedestal, the inner chamber that forms of this hollow limit base, and the end face central authorities of hollow limit base offer an axis hole and connect this chamber;
One against plate, be convexly equipped with the inner face one spacing distance place that is positioned movable platform, should be formed with a clearance space against defining between plate and movable platform inner face, relative with movable platform inner face interval against plate tool one abutment action face, and offer one against plate central authorities and penetrate mouth, should between plate and the end face of hollow limit base, be mutually against state again;
One I shape clamping base, be located at the middle section between member installment surface and the inner face of movable platform of pedestal, this I shape clamping base comprises a floating disc of parallel interval configuration, one packing dish and a vertical couple axle that is positioned middle position between this floating disc and packing dish to link, wherein this floating disc is placed in the chamber of hollow limit base, and floating disc periphery be provided with stop close ring and and between chamber, be air-tight fit relation, packing dish is placed in against the clearance space forming between plate and movable platform inner face, it is corresponding with the abutment action face against plate that this packing dish has a packing face, this couple axle is worn group in the set axis hole of hollow limit base,
One fluid pressurized interface, by the relative formation in annular gap space between the floating disc of I shape clamping base and the chamber of hollow limit base;
One fluid imports unit, comprises the fluid pressure introduction channel of being located at hollow limit base one side and a fluid conduit systems that is communicated with this fluid pressure introduction channel, wherein the inner communication of fluid supercharging of this fluid pressure introduction channel interface.
According to claim 1 have the urgent positioning function of fluid pressurized to bit platform, it is characterized in that, describedly between plate and the end face of hollow limit base, form a fluid pressurized realizing interface, and establish one second group of fluid in hollow limit base one side and import unit, comprise the fluid pressure introduction channel of being located at hollow limit base one side and a fluid conduit systems that is communicated with this fluid pressure introduction channel, wherein the inner communication of fluid supercharging of this fluid pressure introduction channel discharges interface.
According to claim 2 have the urgent positioning function of fluid pressurized to bit platform, it is characterized in that, the packing dish of described I shape clamping base adopts the metal material with one first hardness to form, should adopt the metal material with one second hardness to form against the abutment action face of plate, wherein said the first hardness be greater than the second hardness.
According to claim 3 have the urgent positioning function of fluid pressurized to bit platform, it is characterized in that, corresponding axis hole place of the end face of described hollow limit base central authorities forms a flange, and order is greater than this flange against the set bore penetrating mouthful of plate.
According to claim 4 have the urgent positioning function of fluid pressurized to bit platform, it is characterized in that, described pedestal put face and install and use form, comprise downward assembling morphology or to over slung type assembling morphology.
According to claim 5 have the urgent positioning function of fluid pressurized to bit platform, it is characterized in that, described fluid adopts gas or oil.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW102115841 | 2013-05-03 | ||
| TW102115841 | 2013-05-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104139310A true CN104139310A (en) | 2014-11-12 |
| CN104139310B CN104139310B (en) | 2016-12-28 |
Family
ID=49743674
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310261979.3A Expired - Fee Related CN104139310B (en) | 2013-05-03 | 2013-06-27 | Counterpoint platform with tight locate function of fluid pressure boost |
| CN2013203746861U Expired - Lifetime CN203343741U (en) | 2013-05-03 | 2013-06-27 | Counterpoint platform with tight locate function of fluid pressure boost |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2013203746861U Expired - Lifetime CN203343741U (en) | 2013-05-03 | 2013-06-27 | Counterpoint platform with tight locate function of fluid pressure boost |
Country Status (2)
| Country | Link |
|---|---|
| CN (2) | CN104139310B (en) |
| TW (1) | TWI515075B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104139310B (en) * | 2013-05-03 | 2016-12-28 | 高明铁企业股份有限公司 | Counterpoint platform with tight locate function of fluid pressure boost |
| CN105014395A (en) * | 2014-04-29 | 2015-11-04 | 高明铁企业股份有限公司 | Alignment platform with positioning function |
| TWI563110B (en) * | 2016-04-19 | 2016-12-21 | Gmt Global Inc | Anti-vibration and aligning apparatus? for vacuum evaporating system |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5843517A (en) * | 1981-09-10 | 1983-03-14 | Nippon Telegr & Teleph Corp <Ntt> | Fixing device for shifting stand in floating type alignment stage |
| GB2243075B (en) * | 1990-03-13 | 1993-02-03 | Ntn Toyo Bearing Co Ltd | Movable table |
| CN202292108U (en) * | 2011-08-02 | 2012-07-04 | 王锦燕 | Alignment platform |
| KR20120006919U (en) * | 2011-03-29 | 2012-10-10 | 지엠티 글로벌 아이엔씨 | high loading alignment of amendment moving platform system |
| CN203343741U (en) * | 2013-05-03 | 2013-12-18 | 高明铁企业股份有限公司 | Counterpoint platform with tight locate function of fluid pressure boost |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1170434A (en) * | 1997-08-29 | 1999-03-16 | Ntn Corp | Movable table |
-
2013
- 2013-06-27 CN CN201310261979.3A patent/CN104139310B/en not_active Expired - Fee Related
- 2013-06-27 CN CN2013203746861U patent/CN203343741U/en not_active Expired - Lifetime
-
2014
- 2014-04-22 TW TW103114488A patent/TWI515075B/en not_active IP Right Cessation
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5843517A (en) * | 1981-09-10 | 1983-03-14 | Nippon Telegr & Teleph Corp <Ntt> | Fixing device for shifting stand in floating type alignment stage |
| GB2243075B (en) * | 1990-03-13 | 1993-02-03 | Ntn Toyo Bearing Co Ltd | Movable table |
| KR20120006919U (en) * | 2011-03-29 | 2012-10-10 | 지엠티 글로벌 아이엔씨 | high loading alignment of amendment moving platform system |
| CN202292108U (en) * | 2011-08-02 | 2012-07-04 | 王锦燕 | Alignment platform |
| CN203343741U (en) * | 2013-05-03 | 2013-12-18 | 高明铁企业股份有限公司 | Counterpoint platform with tight locate function of fluid pressure boost |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104139310B (en) | 2016-12-28 |
| CN203343741U (en) | 2013-12-18 |
| TWI515075B (en) | 2016-01-01 |
| TW201446396A (en) | 2014-12-16 |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
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Granted publication date: 20161228 Termination date: 20210627 |