CN203343741U - Counterpoint platform with tight locate function of fluid pressure boost - Google Patents

Counterpoint platform with tight locate function of fluid pressure boost Download PDF

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Publication number
CN203343741U
CN203343741U CN2013203746861U CN201320374686U CN203343741U CN 203343741 U CN203343741 U CN 203343741U CN 2013203746861 U CN2013203746861 U CN 2013203746861U CN 201320374686 U CN201320374686 U CN 201320374686U CN 203343741 U CN203343741 U CN 203343741U
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China
Prior art keywords
fluid
movable platform
face
limit base
pedestal
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Expired - Lifetime
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CN2013203746861U
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Chinese (zh)
Inventor
庄运清
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Gaoming Iron Enterprise Co ltd
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Gaoming Iron Enterprise Co ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25Movable or adjustable work or tool supports
    • B23Q1/26Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/38Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Units (AREA)

Abstract

The utility model discloses an counterpoint platform with positioning function is pressed tightly in fluid pressure boost, include: a base and a movable platform; at least two groups of guide devices are arranged between the base and the movable platform; the center of the component mounting surface of the base is convexly provided with a hollow limiting seat, a cavity is formed in the hollow limiting seat, and the center of the end surface is provided with a shaft hole penetrating through the cavity; the inner surface of the movable platform is convexly provided with a leaning plate, and a spacing space is defined between the leaning plate and the inner surface of the movable platform; an I-shaped packing seat is arranged between the component mounting surface and the inner surface of the movable platform; a fluid pressurization interface is formed by the relative annular clearance space between the floating disc of the I-shaped packing seat and the cavity of the hollow limiting seat; the fluid pressurizing interface is connected with a fluid introducing unit; the utility model discloses make movable platform's stationary state obtain the enhancement firm function and the effect of the urgent tight formula of a fluid pressure boost, reach gain movable platform structural strength and steadiness, promote the purpose of machining precision quality by a wide margin.

Description

Have the urgent positioning function of fluid pressurized to bit platform
Technical field
The utility model relates to a kind of contraposition stage apparatus, and particularly a kind of have the innovation of the urgent positioning function of fluid pressurized to bit platform.
Background technology
Press, along with the arriving of cyberage, how the tupe of multiple manufacture processing has entered the rice grade, and numerous sophisticated products have higher more harsh required precision, especially photoelectricity and product wafer in processing procedure, and its precision positioning technology becomes essential condition.
In the Precision Machining processing procedure, the equipment that bit platform (or claiming the contraposition slide unit) is generally adopted for industrial circle; Have at present the typical structure form to bit platform now, mainly that the screw rod that is horizontally set with array X axis and Y-axis between a movable platform and a pedestal is led device, the assembling seat section that screw rod is led device is located in pedestal, and screw rod is led device, and the flexible moved end of doing is the state of being slidably matched and is linked to movable platform; By this, its when running can see through to be controlled screw rod and leads wherein single group start of device or whole with the mode such as moving, reaches and orders about the movable platform displacement or rotate the purpose of processing precision with adjustment.
Though aforementioned contraposition platform structure really can reach the function of its accurate displacement adjustment in using above, but its problem points is the part that to be location, generally because of, existing contraposition platform structure is no matter in actuator state or surely only during state, the support force of its movable platform and polarization are to be dependent on screw rod to lead the annexation of device and reach fully, yet, because screw rod is led between device and movable platform the sliding connection relation that is, this kind of assembled state has fit tolerance unavoidably in the two place that respectively is connected, and the result of fit tolerance accumulation, certainly will cause and also can't reach the problem of rigidity strong fix state to bit platform when surely stopping state, that is there is no enough bearing support abilities for lateral action power, this problem is particularly serious for bit platform for three axle configuration, while surely stopping because of its movable platform, wherein one lead moving axis and be larger free degree connecting state, therefore the bearing support ability a little less than, and another kind of four axle configuration are existing to bit platform, though its side direction bearing capacity is better than aforementioned three axle configuration persons, its shortcoming is that manufacturing cost significantly improves, and still existence is combined the progression tolerance issues and can't be reached rigidity firm support state, to take off the existing structural design to bit platform on comprehensive, in its process when movable platform is stressed while reaching to a certain degree, often easily produce buffeting, shift phenomenon and badly influence final products machining accuracy and quality, so be difficult to meet the high-precision requirement of industrial circle expection, be necessary to be thought again in fact breakthrough.
The utility model content
Main purpose of the present utility model be to provide a kind of have the urgent positioning function of fluid pressurized to bit platform.
For achieving the above object, the utility model by the following technical solutions:
A kind of have the urgent positioning function of fluid pressurized bit platform is comprised:
One pedestal, for thering is the pedestal form of an area and thickness, this pedestal comprise one put face and a member installment surface;
One movable platform, be located at the member installment surface one spacing distance position of pedestal, and this movable platform comprises a processing table top and an inner face;
At least two groups are led device, are different action shafts and are connected in to the distributional pattern setting between the inner face of the member installment surface of pedestal and movable platform, and this is led device and controls movable platform and produce multi-direction translation adjustment campaign for ordering about;
One hollow limit base, be convexly equipped with the member installment surface central authorities that are positioned pedestal, the inner chamber that forms of this hollow limit base, and the end face central authorities of hollow limit base offer an axis hole and connect this chamber;
One against plate, be convexly equipped with the inner face one spacing distance place that is positioned movable platform, should be formed with a clearance space against defining between plate and movable platform inner face, against plate tool one abutment action face, relative with movable platform inner face interval, and offer one against plate central authorities and penetrate mouth, should be mutually against state against between the end face of plate and hollow limit base;
One I shape clamping base, be located at the middle section between the inner face of the member installment surface of pedestal and movable platform, this I shape clamping base comprises a floating disc of parallel interval configuration, one packing dish and a couple axle that vertically to link, is positioned middle position between this floating disc and packing dish, wherein this floating disc is placed in the chamber of hollow limit base, and the floating disc periphery be provided with stop close ring and and be the air-tight fit relation between chamber, the packing dish is placed in against formed clearance space between plate and movable platform inner face, it is corresponding with the abutment action face against plate that this packing dish has a packing face, this couple axle is worn group in the set axis hole of hollow limit base,
One fluid supercharging interface, the relative formation in annular gap space between the floating disc by the I shape clamping base and the chamber of hollow limit base;
One fluid imports unit, comprises the fluid pressure introduction channel of being located at hollow limit base one side, and a fluid conduit systems that is communicated with this fluid pressure introduction channel, wherein the inner communication of fluid supercharging of this fluid pressure introduction channel interface.
Innovate by this unique design, make the utility model contrast prior art, when this fluid imports unit and imports fluid pressure and make between the fluid pressurized interface that gap expands, whole I shape clamping base can be towards the displacement of pedestal direction, the packing of ordering about the packing dish faces against the abutment action face of plate and produces the effect that pushes against, make movable platform surely only state obtain a kind of firm function of reinforcement and effect of fluid pressurized close type, and then reach gain accurate movable platform structure intensity and steadiness to bit platform, significantly promote machining accuracy quality and simple in structure and be easy to many practical improvements such as volume production manufacture.
The accompanying drawing explanation
The exploded perspective view that Fig. 1 is the preferred embodiment of the utility model structure.
The combination stereogram that Fig. 2 is the preferred embodiment of the utility model structure.
The assembled sectional view that Fig. 3 is the preferred embodiment of the utility model structure.
Fig. 4 is the actuator state schematic diagram that the utility model can utilize fluid pressure packing location.
Fig. 5 is that fluid pressurized of the present utility model discharges interface importing fluid pressure view.
The specific embodiment
Refer to Fig. 1,2,3, what the utlity model has the urgent positioning function of fluid pressurized comprises following formation to bit platform A:
One pedestal 10, for thering is the pedestal form of an area and thickness, this pedestal 10 comprise one put face 11 and a member installment surface 12;
One movable platform 20, be located at the member installment surface 12 1 spacing distance positions of pedestal 10, and this movable platform 20 comprises a processing table top 21 and an inner face 22;
At least two groups are led device 30, be different action shafts and establish between the inner face 22 of the member installment surface 12 that is connected in pedestal 10 and movable platform 20 to the distributional pattern group, lead device 30 and use to order about and control movable platform 20 and produce multi-direction translation adjustment campaigns (be generally X-axis, Y-axis and rotatablely move);
One hollow limit base 40, be convexly equipped with member installment surface 12 central authorities that are positioned pedestal 10, the inner chamber 41 that forms of this hollow limit base 40, and end face 42 central authorities of hollow limit base 40 offer an axis hole 43 and connect this chamber 41;
One against plate 50, be convexly equipped with the inner face one spacing distance place that is positioned movable platform 20, should be formed with a clearance space 51 against defining between plate 50 and movable platform 20 inner faces, relative with movable platform 20 inner face 22 intervals against plate 50 tool one abutment action faces 52, and offer one against plate 50 central authorities and penetrate mouth 53, should be mutually against state against between the end face 42 of plate 50 and hollow limit base 40 again;
One I shape clamping base 60, be located at the middle section between the inner face 22 of the member installment surface 12 of pedestal 10 and movable platform 20, this I shape clamping base 60 comprises a floating disc 61 of parallel interval configuration, one packing dish 62 and a couple axle 63 that vertically to link, is positioned middle position between this floating disc 61 and packing dish 62, but the chamber 41 that wherein this floating disc 61 is placed in hollow limit base 40 is the locating slip quick condition, and floating disc 61 peripheries be provided with stop close ring 612 and and be the air-tight fit relation between chamber 41, packing dish 62 is placed in against formed clearance space 51 between plate 50 and movable platform 20 inner faces 22, it is corresponding with the abutment action face 52 against plate 50 that this packing dish 62 has a packing face 624, 63 of this couple axles are worn group and are the axially moving state of pivot in the set axis hole 43 of hollow limit base 40,
One fluid supercharging interface 70, the relative formation in annular gap space between the floating disc 61 by I shape clamping base 60 and the chamber 41 of hollow limit base 40;
One fluid imports unit 80, comprise the fluid pressure introduction channel 81 of being located at hollow limit base 40 1 sides and use a fluid conduit systems 82 that imports an external fluid (for gas or oil) pressure and be communicated with this fluid pressure introduction channel 81, wherein the inner communication of fluid supercharging of this fluid pressure introduction channel 81 interface 70.
Form design by said structure, the utility model is in bit platform A practical application, the innovation unique function that it can reach as shown in Figure 4, when this fluid imports unit 80 and imports fluid pressures (as shown in arrow L1) and make between fluid pressurized interface 70 that gap expands, whole I shape clamping base 60 can be towards pedestal 10 direction displacements (as shown in arrow L2), the packing face 624 that orders about packing dish 62 produces towards the abutment action face 52 against plate 50 effect (as shown in arrow L3) that pushes against, make by this movable platform 20 surely only state can obtain a kind of firm function of reinforcement and effect of fluid pressurized close type, this is demand that the utility model is wanted and the main effect and the purpose that reach.
As shown in Figure 3, wherein should discharge interface 54 against more forming a fluid supercharging between the end face of plate 50 and hollow limit base 40, and establish one second group of fluid in hollow limit base 40 1 sides and import unit 90, comprise the fluid pressure introduction channel 91 of being located at hollow limit base one side and use a fluid conduit systems 92 that imports an exterior fluid pressure and be communicated with this fluid pressure introduction channel 91, wherein the inner communication of fluid supercharging of this fluid pressure introduction channel 91 discharges interface 54; Embodiment design by this, in its start as shown in Figure 5, when this fluid pressurized discharges interface 54 importing fluid pressure (as shown in arrow L4), can make against between plate 50 and hollow limit base 40, produce fluid pressure support floating effect (even also against plate 50 together with against plate 50, producing the buoyance lift effects, as shown in arrow L5), be beneficial to the smooth and easy adjustment displacement against plate 50.
Wherein, the packing dish 62 of this I shape clamping base 60 can adopt the metal material (as iron) with one first hardness to be formed, should can adopt the metal material (as aluminium) with one second hardness to be formed against 52, the abutment action face of plate 50, wherein said the first hardness be greater than the second hardness.Material difference formula design by this, mainly can promote tight ness rating and the steadiness of this packing dish 62 under the pressure of abutment action face 52 time again, has advantages of the gain of packing effect.
And for example, shown in Fig. 1,3,5, wherein the central corresponding axis hole of the end face 42 of this hollow limit base 40 43 places more can form a flange 44, and order is greater than this flange 44 against the set bore that penetrates mouth of plate 50.
Wherein, this pedestal 10 put face 11 and install and use form, comprise downward assembling morphology (being state shown in Fig. 3) or to over slung type assembling morphology (this illustration face omits and illustrates) person.Wherein saidly to the over slung type assembling morphology, usually be applied to microspur type pressing equipment, also belong to the applicable category of the utility model.
The effect explanation:
What the utlity model has the urgent positioning function of fluid pressurized mainly passes through described pedestal to bit platform, movable platform, lead device, the hollow limit base, against plate, the I shape clamping base, the fluid pressurized interface, the innovation unique texture form technical characterictic that fluid importing unit etc. forms, make the utility model contrast [background technology] structure of having withdrawn deposit, when this fluid imports unit and imports fluid (for gas or oil) pressure and make between the fluid pressurized interface that gap expands, whole I shape clamping base can be towards the displacement of pedestal direction, the packing of ordering about the packing dish faces against the abutment action face of plate and produces the effect that pushes against, make movable platform surely only state obtain a kind of firm function of reinforcement and effect of fluid pressurized close type, can eliminate contraposition platform member combinational gap and progression tolerance, and effectively support the side force of countermeasure activity platform, weight power and roll extrusion active force, and then can reach gain accurate movable platform structure intensity and steadiness to bit platform, significantly promote machining accuracy quality and simple in structure and be easy to many practical improvements such as volume production manufacture.
Above-described embodiment those disclosed herein use and illustrate the utility model, though and through specific term, describe in literary composition, when not limiting the novel the scope of the claims of this novel practical with this; The personage who is familiar with the technique field is when can after the spirit of understanding the utility model and principle, to it, change and revise and reach equivalent purpose, and these change and modification, all should be covered by the category that claim defined as described later.
The above; it is only the specific embodiment of the present utility model; but protection domain of the present utility model is not limited to this; anyly be familiar with those skilled in the art in the technical scope that the utility model discloses; can expect easily changing or replacing, within all should being encompassed in protection domain of the present utility model.Therefore, protection domain of the present utility model should be as the criterion with the protection domain of described claim.

Claims (6)

  1. One kind have the urgent positioning function of fluid pressurized to bit platform, it is characterized in that comprising:
    One pedestal, for thering is the pedestal form of an area and thickness, this pedestal comprise one put face and a member installment surface;
    One movable platform, be located at the member installment surface one spacing distance position of pedestal, and this movable platform comprises a processing table top and an inner face;
    At least two groups are led device, are different action shafts and are connected between the inner face of the member installment surface of pedestal and movable platform to the distributional pattern setting, lead device and control movable platform and produce multi-direction translation adjustment campaign for ordering about;
    One hollow limit base, be convexly equipped with the member installment surface central authorities that are positioned pedestal, the inner chamber that forms of this hollow limit base, and the end face central authorities of hollow limit base offer an axis hole and connect this chamber;
    One against plate, be convexly equipped with the inner face one spacing distance place that is positioned movable platform, should be formed with a clearance space against defining between plate and movable platform inner face, against plate tool one abutment action face, relative with movable platform inner face interval, and offer one against plate central authorities and penetrate mouth, should be mutually against state against between the end face of plate and hollow limit base;
    One I shape clamping base, be located at the middle section between the inner face of the member installment surface of pedestal and movable platform, this I shape clamping base comprises a floating disc of parallel interval configuration, one packing dish and a couple axle that vertically to link, is positioned middle position between this floating disc and packing dish, wherein this floating disc is placed in the chamber of hollow limit base, and the floating disc periphery be provided with stop close ring and and be the air-tight fit relation between chamber, the packing dish is placed in against formed clearance space between plate and movable platform inner face, it is corresponding with the abutment action face against plate that this packing dish has a packing face, this couple axle is worn group in the set axis hole of hollow limit base,
    One fluid supercharging interface, the relative formation in annular gap space between the floating disc by the I shape clamping base and the chamber of hollow limit base;
    One fluid imports unit, comprises the fluid pressure introduction channel of being located at hollow limit base one side, and a fluid conduit systems that is communicated with this fluid pressure introduction channel, wherein the inner communication of fluid supercharging of this fluid pressure introduction channel interface.
  2. According to claim 1 have the urgent positioning function of fluid pressurized to bit platform, it is characterized in that, described against forming a fluid supercharging realizing interface between the end face of plate and hollow limit base, and establish one second group of fluid in hollow limit base one side and import unit, comprise the fluid pressure introduction channel of being located at hollow limit base one side and use a fluid conduit systems that imports an exterior fluid pressure and be communicated with this fluid pressure introduction channel, wherein the inner communication of fluid supercharging of this fluid pressure introduction channel discharges interface.
  3. According to claim 2 have the urgent positioning function of fluid pressurized to bit platform, it is characterized in that, the packing dish of described I shape clamping base adopts the metal material with one first hardness to form, should adopt the metal material with one second hardness to form against the abutment action face of plate, wherein said the first hardness be greater than the second hardness.
  4. According to claim 3 have the urgent positioning function of fluid pressurized to bit platform, it is characterized in that, the end face of described hollow limit base central authorities corresponding axis hole place more forms a flange, and order is greater than this flange against the set bore penetrated mouthful of plate.
  5. According to claim 4 have the urgent positioning function of fluid pressurized to bit platform, it is characterized in that, described pedestal put face and install and use form, comprise downward assembling morphology or to the over slung type assembling morphology.
  6. According to claim 5 have the urgent positioning function of fluid pressurized to bit platform, it is characterized in that, described fluid adopts gas or oil.
CN2013203746861U 2013-05-03 2013-06-27 Counterpoint platform with tight locate function of fluid pressure boost Expired - Lifetime CN203343741U (en)

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TW102115841 2013-05-03
TW102115841 2013-05-03

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104139310A (en) * 2013-05-03 2014-11-12 高明铁企业股份有限公司 Counterpoint platform with tight locate function of fluid pressure boost
CN105014395A (en) * 2014-04-29 2015-11-04 高明铁企业股份有限公司 Alignment platform with positioning function

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI563110B (en) * 2016-04-19 2016-12-21 Gmt Global Inc Anti-vibration and aligning apparatus? for vacuum evaporating system

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Publication number Priority date Publication date Assignee Title
JPS5843517A (en) * 1981-09-10 1983-03-14 Nippon Telegr & Teleph Corp <Ntt> Fixing device for shifting stand in floating type alignment stage
US5163651A (en) * 1990-03-13 1992-11-17 Ntn Corporation Movable table
JPH1170434A (en) * 1997-08-29 1999-03-16 Ntn Corp Movable table
KR200465028Y1 (en) * 2011-03-29 2013-02-07 지엠티 글로벌 아이엔씨 high loading alignment of amendment moving platform system
CN202292108U (en) * 2011-08-02 2012-07-04 王锦燕 Alignment platform
CN104139310B (en) * 2013-05-03 2016-12-28 高明铁企业股份有限公司 Counterpoint platform with tight locate function of fluid pressure boost

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104139310A (en) * 2013-05-03 2014-11-12 高明铁企业股份有限公司 Counterpoint platform with tight locate function of fluid pressure boost
CN104139310B (en) * 2013-05-03 2016-12-28 高明铁企业股份有限公司 Counterpoint platform with tight locate function of fluid pressure boost
CN105014395A (en) * 2014-04-29 2015-11-04 高明铁企业股份有限公司 Alignment platform with positioning function

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Publication number Publication date
CN104139310A (en) 2014-11-12
TWI515075B (en) 2016-01-01
CN104139310B (en) 2016-12-28
TW201446396A (en) 2014-12-16

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C14 Grant of patent or utility model
GR01 Patent grant
AV01 Patent right actively abandoned

Granted publication date: 20131218

Effective date of abandoning: 20161019

AV01 Patent right actively abandoned

Granted publication date: 20131218

Effective date of abandoning: 20161019

C25 Abandonment of patent right or utility model to avoid double patenting