TW201446396A - Alignment platform with positioning function - Google Patents

Abstract

An alignment platform with positioning function is characterized by comprising: a base, which comprises a positioning surface and component mounting surface; a movable platform, which is arranged above the component mounting surface and comprises a platform surface and an inner surface; a plurality of movement guide devices, which are arranged and coupled between the base and movable platform; a hollow constraint seat, which is raised and set on a middle of the component mounting surface with a chamber formed therein and a shaft hole penetrating through the chamber arranged at the middle of the end face; an abutting plate, which is raised and set on the inner surface of the movable platform in such a way that the abutting plate and the inner surface of the movable platform define and form therebetween a separation space, the abutting plate having an abutting surface opposing and spaced from the inner surface of the movable platform; and an I-shaped fastening seat, which is arranged between the component mounting surface of the base and the inner surface of the movable platform and comprises a floating disk, a fastening disk, and a linking shaft, wherein the floating disk is received in the chamber of the hollow constraint seat, the fastening disk is received in the separation space and the fastening disk has a fastening surface that corresponds to the abutting surface of the abutting plate, and the linking shaft is received in the shaft hole of the hollow constraint seat. As such, the movable platform is provided with an enhanced stabilizing function and effect in a still condition so as to achieve the advantages of improving the structural strength and stability of the movable platform of the precision alignment platform and greatly enhancing precision and quality of machining.

Description

Alignment platform with positioning function

[1] The present invention relates to a aligning platform device, and more particularly to an innovative aligning platform structure design having a positioning function; and the present invention claims the Republic of China Patent Application No. 102115841 "having a fluid boosting positioning function" The domestic priority of the "Phase Alignment Platform" invention patent case, first affirmed.

[2] Press, with the advent of the high-tech era, a variety of manufacturing processing modes have entered the nanometer level, many precision products have higher and more stringent precision requirements in the process, especially optoelectronics and wafer products, Precision positioning technology has become a must. [3] In the precision machining process, the alignment platform (or the alignment slide) is a device commonly used in the industry; the typical structural type of the conventional alignment platform is mainly a movable platform and a pedestal. Between the array of X axial and Y axial screw guides, the assembly of the screw guide is positioned on the base, and the telescopic actuation end of the screw guide is in a sliding fit state. The movable platform; thereby, the operation thereof can achieve the purpose of driving the displacement or rotation of the movable platform to adjust the processing precision by controlling a single group of actuations or integral movements of the screw guiding devices. [4] However, the above-mentioned conventional alignment platform structure can achieve the function of precise displacement adjustment in use, but the problem lies in the positioning part, the general cause, the conventional alignment platform structure. The supporting force and the positioning of the movable platform are completely determined by the connection relationship of the screw guiding devices, whether in the actuated state or the fixed state, however, since the screw guiding device and the movable platform are The sliding fit connection relationship, such a combined state inevitably has a matching tolerance at the joint of the two, and the result of the accumulation of the tolerances is bound to cause the problem that the alignment platform cannot reach the rigid stable state when the alignment platform is in the fixed state. That is, there is not enough load-bearing support capacity for the lateral force. This problem is especially serious for the alignment platform of the three-axis configuration type. When the movable platform is fixed, one of the guide shafts is relatively The large degree of freedom is connected, so the load bearing support ability is weak; and the other four-axis configuration type conventional alignment platform has better lateral bearing capacity than the aforementioned three-axis configuration type, but The point is that the manufacturing cost is greatly improved, and there is still a problem of combined progressive tolerance and cannot reach the rigid and stable support state; it is a comprehensive design of the structure of the alignment platform, and when the active platform is subjected to a certain degree of force during the processing, It is often prone to chattering and offset phenomena that seriously affect the processing accuracy and quality of the final product. It is difficult to meet the high precision requirements expected by the industry. It is necessary to think about breakthroughs. [5] Therefore, in view of the problems existing in the above-mentioned conventional alignment platform structure, how to develop an innovative structure that can be more ideal and practical, and the relevant industry should further consider the goal and direction of breakthrough. [6] In view of this, the inventor has been engaged in the manufacturing development and design experience of related products for many years. After detailed design and careful evaluation of the above objectives, the inventor has finally obtained the practical invention.

[7] The main purpose of the present invention is to provide a positioning platform with positioning function, and the technical problem to be solved is to develop a new type of precision pair with more stable structure and more ideal and practicality. The platform is an innovative breakthrough for the goal. [8] The technical feature of the present invention to solve the problem is mainly that the alignment platform includes: a base, which is a body type, including a surface and a component mounting surface; and a movable platform, which is disposed in the component At a distance from the surface, including the processing table and the inner surface; a complex array of guiding devices, which is arranged between the component mounting surface connected to the base and the inner surface of the movable platform; a hollow limiting seat, the convex setting is located at the base The central part of the seat is provided with a cavity, and a cavity is formed inside the hollow limit seat, and a shaft hole penetrating chamber is arranged in the center of the end face of the hollow limit seat; abutting plate is convexly disposed at a distance from the inner surface of the movable platform, and abuts A space is defined between the plate and the inner surface of the movable platform, and the abutting action surface of the plate is opposite to the inner surface of the movable platform, and a penetration port is provided in the center of the plate, and the plate and the hollow limit are abutted. The end faces of the seat are in abutting state; a I-shaped pressing seat is arranged at a central area between the component mounting surface of the base and the inner surface of the movable platform, and the I-shaped pressing seat comprises a floating disk and a forced Tight plate and vertical joint positioning An interlocking shaft between the disc and the pressing disc, the floating disc is placed in the chamber of the hollow limiting seat to be in a limitable sliding state, and the pressing disc is placed between the abutting plate and the inner surface of the movable platform In the space, the pressing surface of the pressing plate corresponds to the abutting action surface of the abutting plate, and the axial hole of the interlocking shaft through the hollow limiting seat is axially pivotable. [9] With this innovative and unique design, according to the prior art, when the movable platform is loaded, the integral I-shaped pressing seat is displaced toward the base, and the pressing surface of the pressing plate is urged toward the abutting plate. The abutting action surface generates a pressing effect, so that the fixed state of the movable platform is strengthened and stabilized, thereby achieving the structural strength and stability of the movable platform of the gain precision alignment platform, greatly improving the processing precision quality, and the structure is simple and easy. Mass production and many other practical advancements. [10] Another main object of the present invention is to form a fluid pressure increasing interface by the annular gap space between the floating disk of the I-shaped pressing seat and the cavity of the hollow limiting seat; The fluid introduction unit comprises a fluid pressure introduction passage disposed on one side of the hollow limit seat and a fluid conduit for introducing an external fluid pressure and communicating with the fluid pressure introduction passage, wherein the fluid pressure introduction passage is connected to the fluid at the end Another technical feature of the pressure interface is that when the fluid introduction unit introduces a fluid pressure to expand the gap between the fluid pressure increasing interfaces, the integral I-shaped pressing seat is displaced toward the base direction, and the pressing surface of the pressing disk is urged toward The abutting action surface of the abutting plate generates an abutting action, so that the fixed state of the movable platform obtains a fluid boosting and tightening type to strengthen and stabilize the function and effect.

[12] Please refer to Figures 1, 2, 3 and 4, which are preferred embodiments of the alignment platform with positioning function of the present invention, but these embodiments are for illustrative purposes only, and are not used in patent applications. Limited by this structure. The alignment platform A includes the following structure: a base 10 having a seat and a thickness, the base 10 includes a facing surface 11 and a component mounting surface 12; 20, disposed at a distance of the component mounting surface 12 of the base 10, the movable platform 20 includes a processing table 21 and an inner surface 22; the complex array of guiding devices 30, the different axial distribution type The component mounting surface 12 is coupled between the component mounting surface 12 of the base 10 and the inner surface 22 of the movable platform 20, and the guiding device 30 is configured to drive the control movable platform 20 to generate a multi-directional translation adjustment motion (usually an X-axis and a Y-axis). And a rotary motion seat); a hollow limiting seat 40 is convexly disposed at the center of the component mounting surface 12 of the base 10, and a cavity 41 is formed inside the hollow limiting seat 40, and the center of the end surface 42 of the hollow limiting seat 40 is opened. A shaft hole 43 extends through the chamber 41; abutting plate 50 is disposed at a distance from the inner surface 22 of the movable platform 20, and a space is defined between the abutting plate 50 and the inner surface 22 of the movable platform 20. 51, the abutting plate 50 has an abutting action surface 52 and the inner surface of the movable platform 20 2, the spacing is opposite, and a penetration opening 53 is defined in the center of the plate 50, and the abutting plate 50 and the end surface 42 of the hollow limiting seat 40 are in abutting state; an I-shaped pressing seat 60, Provided in a central region between the component mounting surface 12 of the base 10 and the inner surface 22 of the movable platform 20, the I-shaped clamping seat 60 includes a floating disk 61, a pressing disk 62 and a vertical direction arranged in parallel The interlocking shaft 63 is disposed at a central position between the floating plate 61 and the pressing plate 62. The floating plate 61 is placed in the chamber 41 of the hollow limiting seat 40 to be in a positional sliding state. The tight disk 62 is placed in the space 51 formed between the abutting plate 50 and the inner surface 22 of the movable platform 20, and the pressing plate 62 has a pressing surface 624 corresponding to the abutting surface 52 of the abutting plate 50. The interlocking shaft 63 is axially pivoted by the shaft hole 43 provided in the hollow limiting seat 40. [13] By the technical characteristics of the above structure, as shown by the hollow arrow in FIG. 4, when the movable platform 20 is loaded, the integral I-shaped pressing seat 60 is displaced toward the base 10 to drive the pressing force. The pressing surface 624 of the disk 62 acts against the abutting action surface 52 of the abutting plate 50, so that the fixed state of the movable platform 20 obtains the reinforcing function and effect of the load direction, thereby achieving the activity of the gain alignment platform A. Platform 20 structural strength and stability. [14] Further, as shown in FIG. 7, the alignment platform A may further include: a fluid pressure increasing interface 70, by the floating disk 61 of the I-shaped pressing seat 60 and the chamber of the hollow limiting seat 40. The annular gap space between 41 is oppositely configured; a fluid introduction unit 80 includes a fluid pressure introduction passage 81 provided on one side of the hollow limit seat 40 and a pressure for introducing an external fluid (which is gas or oil) and communicating The fluid pressure introduction channel 81 is a fluid conduit 82, wherein the fluid pressure introduction channel 81 is connected to the fluid pressurization interface 70; the fluid pressure introduction interface 70, the fluid introduction unit 80, etc., which are added in this example, are actually The innovative and unique function that can be achieved in the application is as shown in Fig. 8. When the fluid introduction unit 80 introduces a fluid pressure (as indicated by an arrow L1) to expand the gap of the fluid pressurizing interface 70, the integral I-shaped type is forced. The seat 60 is displaced in the direction of the base 10 (as indicated by the arrow L2), and urges the pressing surface 624 of the pressing plate 62 to abut against the abutting surface 52 of the abutting plate 50 (as indicated by arrow L3). ), thereby enabling the fixed state of the activity platform 20 to obtain one By a fluid tight compression function and effect of reinforcing a solid; this feature in addition to solid reinforcing load direction with the urging force functions to strengthen the structure, the structure may further have more enhanced features to the lateral forces. [15] As shown in FIG. 7, a fluid pressure release interface 54 is formed between the abutting plate 50 and the end surface 42 of the hollow limiting seat 40, and a hollow pressure limiting seat 40 is disposed on one side of the hollow limiting seat 40. The second group of fluid introduction units 90 includes a fluid pressure introduction port 91 disposed on one side of the hollow limit seat 40 and a fluid delivery tube 92 through which an external fluid pressure is introduced and communicated with the fluid pressure introduction port 91, wherein the fluid pressure is The inner end of the introduction channel 91 is connected to the fluid pressure release interface 54; this embodiment is designed to operate as shown in FIG. 9, when the fluid pressure release interface 54 is introduced into the fluid pressure (as indicated by arrow L4). The fluid pressure struts floating effect between the abutting plate 50 and the hollow limiting seat 40 can be generated (that is, the abutting plate 50 and the abutting plate 50 have a floating effect, as indicated by an arrow L5), so as to facilitate Adjust the displacement smoothly by the plate 50. [16] The pressing plate 62 of the I-shaped pressing seat 60 may be made of a metal material having a first hardness (such as iron), and the abutting action surface 52 of the abutting plate 50 may have The second hardness is made of a metal material such as aluminum, wherein the first hardness is greater than the second hardness. The material difference design mainly enhances the tightness and stability of the pressing disc 62 against the action surface 52, and has the advantage of the tightening effect gain. [17] As shown in the fifth, seventh, and seventh figures, the center of the end surface 42 of the hollow limiting seat 40 is further formed with a ring-shaped projection 44 corresponding to the shaft hole 43 and is provided for penetration by the abutment plate 50. The mouth 53 has a larger diameter than the ring tenon 44. [18] As shown in FIGS. 5 and 7, the periphery of the floating disk 61 may further be provided with a tight fit ring 612 and a chamber 41 in a gas-tight relationship. [19] Wherein, the placement surface 11 of the base 10 is installed and used, including a downward assembly type (see the state disclosed in Figures 4 and 7) or an upward suspension assembly type (this example) Those who are omitted from the drawing. The upward suspension assembly type is generally applied to a macro type stamping apparatus, and is also applicable to the scope of the present invention. [20] Advantages of the present invention: The "alignment platform with positioning function" disclosed by the present invention mainly relies on the base, the movable platform, the guiding device, the hollow limiting seat, the abutting plate, and the type of force The innovative unique structural form and technical features formed by the tight seat and the like make the present invention compare with the conventional structure proposed in [Prior Art], when the movable platform is loaded, the integral I-shaped pressing seat is displaced toward the base. The driving force of the pressing plate is driven to abut against the abutting action surface of the abutting plate, so that the fixed state of the movable platform is strengthened and stabilized, thereby achieving the structural strength of the movable platform of the precision precision alignment platform. It has many practical advancements such as stability, greatly improved processing accuracy, simple structure, and easy mass production. [21] Another main object of the present invention is to form a fluid pressure increasing interface by the annular gap space between the floating disk of the I-shaped pressing seat and the cavity of the hollow limiting seat; The fluid introduction unit comprises a fluid pressure introduction passage disposed on one side of the hollow limit seat and a fluid conduit for introducing an external fluid pressure and communicating with the fluid pressure introduction passage, wherein the fluid pressure introduction passage is connected to the fluid at the end Another technical feature of the pressure interface is that when the fluid introduction unit introduces a fluid pressure to expand the gap between the fluid pressure increasing interfaces, the integral I-shaped pressing seat is displaced toward the base direction, and the pressing surface of the pressing disk is urged toward The abutting action surface of the abutting plate generates an abutting action, so that the fixed state of the movable platform obtains a fluid-boosting and tightening type to strengthen the stabilizing function and effect, thereby eliminating the gap and progressive tolerance of the alignment platform component combination, and effectively supporting Against the lateral force, heavy pressure and rolling force of the active platform, the strength and stability of the movable platform of the precision precision alignment platform can be achieved. Quality and accuracy of the structure simple and easy to many progressive practical production manufacturing. The invention disclosed in the above embodiments is specifically described, and the description of the present invention is not limited thereto, and the scope of the invention is not limited thereto; those skilled in the art can understand the present invention. The spirit and principles are changed and modified to achieve an equivalent purpose, and such changes and modifications are to be included in the scope defined by the scope of the patent application as described later.

A. . . Alignment platform

10. . . Pedestal

11. . . Setting

12. . . Component mounting surface

20. . . Activity platform

twenty one. . . Processing table

twenty two. . . inside

30. . . Pilot

40. . . Hollow limit seat

41. . . Chamber

42. . . End face

43. . . Shaft hole

44. . . Ring crown

50. . . Abutment board

51. . . Space

52. . . Abutting action surface

53. . . Penetration port

54. . . Fluid pressurization release interface

60. . . I-shaped forced seat

61. . . Floating disk

612. . . Stop ring

62. . . Forced disk

624. . . Forced face

63. . . Linking axis

70. . . Fluid pressurization interface

80. . . Fluid introduction unit

81. . . Fluid pressure introduction channel

82. . . Fluid conduit

90. . . Second group of fluid introduction units

91. . . Fluid pressure introduction tunnel

92. . . Fluid delivery tube

[11] Fig. 1 is a perspective view showing a detailed portion of a preferred embodiment of the structure of the present invention. Figure 2 is a perspective view of most of the preferred embodiment of the structure of the present invention. Figure 3 is a perspective view of a combination of preferred embodiments of the structure of the present invention. Figure 4 is a cross-sectional view showing a combination of preferred embodiments of the structure of the present invention. Fig. 5 is an exploded perspective view showing another embodiment of the structure of the present invention. Figure 6 is a combined perspective view of another embodiment of the structure of the present invention. Figure 7 is a cross-sectional view showing a combination of another embodiment of the structure of the present invention. Figure 8 is a schematic illustration of the operational state of the present invention utilizing fluid pressure forced positioning. Fig. 9 is a schematic view showing the introduction of a fluid pressure release state of the fluid pressurization release interface of the present invention.

A. . . Alignment platform

10. . . Pedestal

11. . . Setting

12. . . Component mounting surface

20. . . Activity platform

twenty one. . . Processing table

twenty two. . . inside

30. . . Pilot

40. . . Hollow limit seat

41. . . Chamber

42. . . End face

43. . . Shaft hole

50. . . Abutment board

51. . . Space

52. . . Abutting action surface

53. . . Penetration port

54. . . Fluid pressurization release interface

60. . . I-shaped forced seat

61. . . Floating disk

62. . . Forced disk

624. . . Forced face

63. . . Linking axis

Claims (8)

A positioning platform having a positioning function, comprising: a base having a seat type having an area and a thickness, the base comprising a facing surface and a component mounting surface; and a movable platform disposed on the base The component mounting surface is spaced apart from the position, the movable platform includes a processing table and an inner surface; the complex array of guiding devices are arranged in different axial distribution modes to assemble the component mounting surface and the activity connected to the base Between the inner faces of the platform, the guiding devices are used to drive the control movable platform to generate a multi-directional translation adjustment movement; a hollow limiting seat is convexly disposed at the center of the component mounting surface of the base, and the hollow limiting seat is formed inside a chamber, a central portion of the end surface of the hollow limiting seat defines a shaft hole through the chamber; an abutting plate, the convex setting is located at a distance between the inner surface of the movable platform, and between the abutting plate and the inner surface of the movable platform The partitioning space is formed to be opposite to the inner surface of the movable platform, and a penetration opening is formed in the center of the plate, and the end surface of the abutting plate and the hollow limiting seat is a mating state; a I-shaped pressing seat, disposed in a central region between the component mounting surface of the base and the inner surface of the movable platform, the I-shaped pressing seat comprising a floating disk arranged in parallel intervals, a tensioning disc and a vertical connecting shaft positioned at a central position between the floating disc and the pressing disc, wherein the floating disc is placed in the chamber of the hollow limiting seat to be in a limitable sliding state The tight disc is placed in a space formed between the abutting plate and the inner surface of the movable platform, the pressing disc has a pressing surface corresponding to the abutting action surface of the abutting plate, and the interlocking shaft is worn in the hollow limit The shaft hole provided in the seat is axially pivotable. The alignment platform having the positioning function according to claim 1, wherein the alignment platform further comprises: a fluid pressure increasing interface, between the floating disk of the I-shaped pressing seat and the cavity of the hollow limiting seat The annular gap space is oppositely configured; a fluid introduction unit includes a fluid pressure introduction passage provided on one side of the hollow limit seat and a fluid conduit for introducing an external fluid pressure and communicating with the fluid pressure introduction passage, wherein the fluid The inner end of the pressure introduction passage is connected to the fluid pressurization interface; thereby, when the fluid introduction unit introduces fluid pressure to expand the gap of the fluid pressurization interface, the integral I-shaped pressing seat is displaced toward the base to drive the pressing force. The pressing surface of the disc acts against the abutting action surface of the abutting plate, so that the fixed state of the movable platform obtains a fluid pressurizing and tightening type to strengthen and stabilize the function and effect. The alignment platform having the positioning function according to claim 2, wherein a fluid pressure release interface is formed between the abutting plate and the end surface of the hollow limiting seat, and a second is disposed on the side of the hollow limiting seat. The fluid introduction unit includes a fluid pressure introduction passage provided on one side of the hollow limit seat and a fluid conduit for introducing an external fluid pressure and communicating with the fluid pressure introduction passage, wherein the fluid pressure introduction passage is connected to the fluid at the inner end The pressurized release interface; when the fluid pressure release interface is introduced into the fluid pressure, a fluid pressure stretching effect between the abutting plate and the hollow limiting seat can be generated to facilitate smooth adjustment of the displacement of the movable platform. The alignment platform having the positioning function according to claim 3, wherein the pressing plate of the I-shaped pressing seat is made of a metal material having a first hardness, and the abutting action surface of the abutting plate is The metal material having a second hardness is used, wherein the first hardness is greater than the second hardness. The alignment platform having the positioning function according to claim 4, wherein a central portion of the end surface of the hollow limiting seat further forms a ring crown, and the aperture of the abutting plate is larger than the ring. Convex. The alignment platform having the positioning function according to claim 4, wherein the periphery of the floating disk is further provided with a tight-fit ring and a chamber in a gas-tight relationship. The alignment platform with positioning function according to claim 6, wherein the surface of the pedestal is installed and used, including a downward assembly type or an upward suspension assembly type. An alignment platform having a positioning function as claimed in claim 7, wherein the flow system employs a gas or an oil.