CN104133802A - Data exchange method between Vxworks embedded operating system and motion control card of double-workpiece-platform scanning mask aligner - Google Patents
Data exchange method between Vxworks embedded operating system and motion control card of double-workpiece-platform scanning mask aligner Download PDFInfo
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Abstract
The invention discloses a data exchange method between a Vxworks embedded operating system and a motion control card of a double-workpiece-platform scanning mask aligner, and belongs to the technical field of data exchange between two physical board cards or two systems. The method aims to solve the problems that when data exchange is carried out on an operating system and a motion control card of an existing double-workpiece-platform scanning mask aligner, a DSP and a Vxworks read and write the same internal storage at the same time, and therefore the data exchange efficiency is low. Two data areas of a double-port RAM of an FPGA are adopted for alternately storing data sent by an upper computer, the board card reading task of the Vxworks monitors the full-writing flag bits of the two data areas, it shows that the data reading task is completed when the full-writing flag bits are set to be zero, the board card reading task of the Vxworks monitors full-writing marker registers of the data areas in real time, and the data of the area with data fully written are read. The method is used for the data exchange between the Vxworks embedded operating system and the motion control card.
Description
Technical field
The present invention relates to the method for interchanging data between Vxworks embedded OS and the motion control card of double-workpiece-table scanning photoetching machine, belong to the Data Interchange Technology field between two physics boards or two systems.
Background technology
Double-workpiece-table scanning photoetching machine is the responsible servo-control system high to requirement of real-time, and it requires to complete all operations such as scanning, exposure, photoetching within the 200us cycle.Vxworks operating system is the high operating system of a stability, high speed of wind and company's exploitation.In the field that its good reliability can be widely used communicating by letter with real-time performance, military affairs, Aeronautics and Astronautics etc. are high-grade, precision and advanced and requirement of real-time is high.The operating system of existing double-workpiece-table scanning photoetching machine and motion control are stuck in while carrying out exchanges data, usually DSP and Vxworks can occur and read while write the situation of same internal memory, and cause exchanges data efficiency low.
Summary of the invention
The operating system and the motion control that the present invention seeks in order to solve existing double-workpiece-table scanning photoetching machine are stuck in while carrying out exchanges data, exist DSP and Vxworks to read while write same internal memory, cause the inefficient problem of exchanges data, the method for interchanging data between a kind of Vxworks embedded OS and motion control card of double-workpiece-table scanning photoetching machine is provided.
Method for interchanging data between Vxworks embedded OS and the motion control card of double-workpiece-table scanning photoetching machine of the present invention, described method for interchanging data is realized on the basis of the double-workpiece-table photoetching machine control system communicator based on Vxworks operating system, this communicator comprises host computer, industrial computer functional module, motion control card, synchro control card and signals collecting board
The program module that host computer is write based on MFC framework realizes, and industrial computer functional module adopts IC-e6-VMEa mainboard card to realize, and industrial computer functional module realizes based on Vxworks embedded real-time operating system;
Industrial computer Functional Module includes network communication module, task scheduling modules, parameter arrange module and VME module for reading and writing;
Host computer is used for receiving user's steering order and controls parameter, and according to self-defining communication protocol, steering order and control parameter is packed, and sends to network communication module;
Network communication module sends to parameter that module is set control parameter, and steering order and control parameter are sent to task scheduling modules;
Parameter arranges module for the control parameter receiving is processed, and obtains the controlled quentity controlled variable to motor in photoetching machine control system;
Task scheduling modules is pressed into the steering order of reception and control parameter in information receiving vessel, data in message parse TU task unit information extraction receiving vessel, and resolve steering order and control parameter according to self-defining communication protocol, and send to parameter that module is set by resolving the control parameter obtaining;
VME module for reading and writing arranges the controlled quentity controlled variable signal of the motor of module transmission for receiving parameter, and receives the steering order of task scheduling modules parsing acquisition and control parameter;
VME module for reading and writing sends to motion control card, synchro control card and signals collecting board by VME bus by the controlled quentity controlled variable of the motor receiving, steering order and control parameter;
In the time that task scheduling modules is resolved to Electric Machine Control sign on, the data that motion control card, synchro control card and the collection of signals collecting board obtain send to VME module for reading and writing by VME bus, VME module for reading and writing will gather the data packing obtaining by task scheduling modules, and send to host computer by network communication module, after host computer is resolved data according to communication protocol, data are shown in real time, realize thus the communication of double-workpiece-table photoetching machine control system;
Described method for interchanging data is:
Motion control card sends the method for data to industrial computer functional module:
Motion control card comprises FPGA and DSP, in motion control card, wish sends the alternately preservation of two data fields of the dual port RAM of data acquisition FPGA, the alternately read-write of two data fields is controlled and is realized by flag register, when DSP writes the first blocks of data district after full data, flag register is by the first Xie Man mark position, blocks of data district 1, and now in motion control card, wish transmission data continue to write the second blocks of data district; The read data tasks synchronization of Vxworks embedded OS is monitored the full zone bit of writing of two data fields simultaneously, in the time monitoring Xie Man mark position 1, first data field, read the data in the first blocks of data district by VME bus, and after reading, write full mark position 0; When DSP writes the second blocks of data district after full data, the second blocks of data is write full mark position 1 by flag register, and now in motion control card, wish transmission data continue to write the first blocks of data district; When the read data task of Vxworks embedded OS monitors Xie Man mark position 1, second data field, read the data in the second blocks of data district by VME bus, and after reading, write full mark position 0; Said process successively repeatedly;
Industrial computer functional module sends the method for data to motion control card:
Industrial computer functional module sends data by VME bus by wish and writes in dual port RAM, and motion control card is directly by dual port RAM reading out data;
Realize thus the exchanges data between Vxworks embedded OS and motion control card.
Advantage of the present invention: in the present invention, industrial computer functional module, as slave computer, has realized the exchanges data between slave computer and motion control board.Slave computer is IC-e6-VMEa board, in IC-e6-VMEa board, carry Vxworks embedded real-time operating system, as the maincenter of whole double-workpiece-table scanning photoetching machine communication system, upwards carry out exchanges data by TCP network communication protocol and host computer, carry out the transmission of data by VME bus and motion control card, synchro control card, data acquisition card downwards.Method for interchanging data of the present invention is equally applicable to the exchanges data between the board such as Vxworks embedded OS and synchro control card, data acquisition card.
Described method for interchanging data adopts two data fields of the dual port RAM of FPGA to be used for alternately preserving to the data of host computer transmission, can avoid DSP and Vxworks to read while write same internal memory, Vxworks reads board task and monitors the full zone bit of writing of two data fields always.In the time of Xie Man mark position 0, data field, represent that the read data task of Vxworks embedded OS completes.Full flag register is write in the real-time monitor data of the board task of the reading district of Vxworks, finds which blocks of data district writes completely attend school which blocks of data.The method effective guarantee the exchanges data efficiency between Vxworks embedded OS and motion control card.
Brief description of the drawings
Fig. 1 is the theory diagram of the double-workpiece-table photoetching machine control system communicator based on Vxworks operating system of the present invention;
Fig. 2 is the process flow diagram of host computer and the network service of industrial computer functional module;
When Fig. 3 is task scheduling modules reception host computer data, the communication pattern schematic diagram based on container;
Fig. 4 is the multitask priority schematic diagram of Vxworks embedded real time system in industrial computer functional module;
Fig. 5 is the application program general frame of double-workpiece-table photoetching machine control system Vxworks.
Embodiment
Embodiment one: present embodiment is described below in conjunction with Fig. 1, method for interchanging data described in present embodiment between Vxworks embedded OS and the motion control card of double-workpiece-table scanning photoetching machine, described method for interchanging data is realized on the basis of the double-workpiece-table photoetching machine control system communicator based on Vxworks operating system, this communicator comprises host computer 1, industrial computer functional module 2, motion control card 3, synchro control card 4 and signals collecting board 5
The program module that host computer 1 is write based on MFC framework realizes, and industrial computer functional module 2 adopts IC-e6-VMEa mainboard card to realize, and industrial computer functional module 2 realizes based on Vxworks embedded real-time operating system;
Industrial computer functional module 2 comprises that network communication module 2-1, task scheduling modules 2-2, parameter arrange module 2-3 and VME module for reading and writing 2-4;
Host computer 1 is for receiving user's steering order and controlling parameter, and according to self-defining communication protocol by steering order with control parameter packing, send to network communication module 2-1;
Network communication module 2-1 sends to parameter that module 2-3 is set control parameter, and steering order and control parameter are sent to task scheduling modules 2-2;
Parameter arranges module 2-3 for the control parameter receiving is processed, and obtains the controlled quentity controlled variable to motor in photoetching machine control system;
Task scheduling modules 2-2 is pressed into the steering order of reception and control parameter in information receiving vessel, data in message parse TU task unit information extraction receiving vessel, and resolve steering order and control parameter according to self-defining communication protocol, and send to parameter that module 2-3 is set by resolving the control parameter obtaining;
VME module for reading and writing 2-4 arranges the controlled quentity controlled variable signal of the motor of module 2-3 transmission for receiving parameter, and receives the steering order of task scheduling modules 2-2 parsing acquisition and control parameter;
VME module for reading and writing 2-4 sends to motion control card 3, synchro control card 4 and signals collecting board 5 by VME bus by the controlled quentity controlled variable of the motor receiving, steering order and control parameter;
In the time that task scheduling modules 2-2 is resolved to Electric Machine Control sign on, motion control card 3, synchro control card 4 and signals collecting board 5 gather the data that obtain and send to VME module for reading and writing 2-4 by VME bus, VME module for reading and writing 2-4 will gather the data packing obtaining by task scheduling modules 2-2, and send to host computer 1 by network communication module 2-1, after host computer 1 is resolved data according to communication protocol, data are shown in real time, realize thus the communication of double-workpiece-table photoetching machine control system;
Described method for interchanging data is:
Motion control card 3 sends the method for data to industrial computer functional module 2:
Motion control card 3 comprises FPGA and DSP, in motion control card 3, wish sends the alternately preservation of two data fields of the dual port RAM of data acquisition FPGA, the alternately read-write of two data fields is controlled and is realized by flag register, when DSP writes the first blocks of data district after full data, flag register is by the first Xie Man mark position, blocks of data district 1, and now in motion control card 3, wish transmission data continue to write the second blocks of data district; The read data tasks synchronization of Vxworks embedded OS is monitored the full zone bit of writing of two data fields simultaneously, in the time monitoring Xie Man mark position 1, first data field, read the data in the first blocks of data district by VME bus, and after reading, write full mark position 0; When DSP writes the second blocks of data district after full data, the second blocks of data is write full mark position 1 by flag register, and now in motion control card 3, wish transmission data continue to write the first blocks of data district; When the read data task of Vxworks embedded OS monitors Xie Man mark position 1, second data field, read the data in the second blocks of data district by VME bus, and after reading, write full mark position 0; Said process successively repeatedly;
Industrial computer functional module 2 sends the method for data to motion control card 3:
Industrial computer functional module 2 sends data by VME bus by wish and writes in dual port RAM, and motion control card 3 is directly by dual port RAM reading out data;
Realize thus the exchanges data between Vxworks embedded OS and motion control card.
In present embodiment, industrial computer functional module 2 plugs in VME industry control cabinet, operation Vxworks embedded real-time operating system.Motion control card 3, synchro control card 4 and signals collecting board 5 are also inserted in VME industry control cabinet.IC-e6-VMEa mainboard card is as the hinge of whole photoetching machine control system, and the inside lift-launch Vxworks embedded real-time operating system, needs and motion control card, synchro control card, data acquisition card carry out a large amount of exchanges data.
Present embodiment comprises communicating by letter of host computer and slave computer, the communicating by letter of slave computer and motion control card, synchro control card, data acquisition card.Host computer and slave computer carry out data transmission by network service.Slave computer and motion control card, synchro control card, data acquisition card carry out data transmission by the read-write of VME bus.Motion control card 3 can be equivalent to synchro control card 4 and signals collecting board 5.Motion control card 3, synchro control card 4 and signals collecting board 5 have the unique identifier of oneself, and its address is determined, can read and write data to any one board by VME bus, and other boards are not affected.
Motion control card 3 is stored data by dual port RAM, and when slave computer need to, by VME bus when writing data in motion control card, write in dual port RAM by VME bus, motion control card is directly read from dual port RAM; In the time that slave computer need to read the data in motion control board by VME bus, motion control card directly writes dual port RAM by data, and slave computer reads the data in dual port RAM by VME bus.
The method that the method that wherein industrial computer functional module 2 sends data to motion control card 3 and motion control card 3 send data to industrial computer functional module 2 mutually roughly the same.
Industrial computer functional module 2 is the hinge of data transmission and the primary module of VME bus, and main task is the instruction that receives, resolves, carries out host computer according to network communication protocol.By VME bus, the corresponding command is write to the associated storage district of motion control card, detect the data acquisition mark of motion control card by VME bus, read the position data of precise motion control platform, and pack, encapsulate, send to host computer by network communication protocol.Full flag register is write in the real-time monitor data of the board task of the reading district of Vxworks, finds which blocks of data district writes completely attend school which blocks of data.
Embodiment two: present embodiment is described below in conjunction with Fig. 1 to Fig. 3, present embodiment is described further embodiment one, host computer 1 carries out exchanges data with industrial computer functional module 2 by TCP network communication protocol, form with socket is carried out data transmission, when it carries out data transmission, the self-defining communication protocol of employing is specific as follows:
| Frame head | Frame type | Data type | Data length | Data | Verification and | Postamble |
| 0xAA?0x55 | 0x00-0xff | A1，B2... | 8，9... | Double type | 0/1 | 0xA5?0x5A |
| 2 char | 1 char | 1 char | 1 char | Indefinite | Optional | 2 char |
。
In above-mentioned self-defining communication protocol, frame type represents plate card number, and data type represents the control command of electric plane No. and transmission, and its control command comprises sinusoidal curve, step signal and S curve etc.Data length can be determined transmission Frame length dynamically, has improved the service efficiency of internal memory.When industrial computer functional module 2 is carried out reading and writing data by VME bus to motion control card, synchro control board and data acquisition card, address is determined by base address, channel address and side-play amount.Address=base address+passage amount+side-play amount.Base address is 0x83000000, and channel address moves left 16 decisions by plate card number, and side-play amount is determined by the control command sending and controlled quentity controlled variable, gives motion control card, synchro control board and data acquisition card numbering.Like this, industrial computer functional module 2 can be carried out reading and writing data to the arbitrary motion control card, synchro control board and the signal acquiring board card that are inserted in VME industry control cabinet.
Under the operational mode of present embodiment, host computer is to slave computer transfer control instruction and controlled quentity controlled variable.Slave computer shows for host computer in real time to data and the status information of host computer translatory movement control card, synchro control card, data acquisition card.
Shown in Fig. 3, be the information cache model based on many containers for network service in task scheduling modules, message sink task is pressed into the data of reception in container, and message parse task is extracted from container data and resolved according to communication protocol.By the transition of container, to avoid because message parse task does not complete, message sink task needs to wait for, and the choking phenomenon occurring, or loss of data.Improve the real-time of Vxworks embedded OS.
Embodiment three: present embodiment is described further embodiment one or two, VME module for reading and writing 2-4, according to VME64x agreement, adopts FPGA programmable logic controller (PLC) part to realize.
Embodiment four: present embodiment is described below in conjunction with Fig. 4 and Fig. 5, present embodiment is described further embodiment one, two or three, motion control card 3, synchro control card 4 and signals collecting board 5 gather the data that obtain and comprise the motor position parameter that grating scale, laser interferometer and inductance sensor collect, or process through motion control card 3, synchro control card 4 or signals collecting board 5 speed or the acceleration information that obtain.
In present embodiment, gather the data that the data that obtain also comprise that other needs host computer to show, all image data upload to host computer, host computer by communication protocol after processing by task scheduling modules 2-2 packing and resolve, and show in real time data according to communication protocol.
In industrial computer functional module in task scheduling modules because Vxworks embedded real time system is multi task model, for ensureing the promptness of message acceptance processing, task priority is divided as shown in Figure 4, system Detection task priority is the highest, has ensured normal operation and the fault handling of lower computer system.Improve message parse task priority processing command in time, prevent from omitting message.
The Vxworks embedded real time system of industrial computer functional module operation is initiated successively system Detection task, message sink task, message parse task, interrupt service task, message transmission task in real-time system.
Network connection state, the detect-message that wherein system Detection task is responsible for detecting host computer and slave computer receive an assignment whether make mistakes, whether detect-message send task and make mistakes, if make mistakes, close network and connect.Message sink task is responsible for receiving by web socket the data of the transmission of host computer, and comprise steering order and controlled quentity controlled variable, and data are pressed in container, more then according to the data in communication protocol extraction vessel, and be pressed in bidirectional buffering queue.
Message acceptance task receives the data of host computer by network service, be pressed in container, then according to the data in communication protocol extraction vessel, the first two char is frame head, the 3rd data are frame types, the 4th data are data types, the 5th data are data lengths, then according to the big or small specified data of data length, then be again verification and, it is finally postamble, according to the data in communication protocol extraction vessel, determine frame head, frame type, data type, data length, data, verification and, postamble, data after extracting are pressed in bidirectional buffering queue.
Message parse task is responsible for according to communication protocol resolution data.Frame type represents plate card number, identifies definite motion control card, synchro control card, data acquisition card with this.Data type distinguishing sensor data or director data, content is 0xA1,0xB2,0xC3..., and as A1 represents motor sinusoidal curve No. 1, wherein A represents sinusoidal curve, and 1 represents motor No. 1.B2 represents motor S curve No. 2.Then being data length, then being then data, is finally postamble.
Message transmission task is responsible for the motion control board reading, synchro control card, data acquisition card data to send to host computer according to communication protocol packing.Host computer is according to communication protocol resolution data, and on host computer, shows in real time.
Host computer sending controling instruction and controlled quentity controlled variable, steering order and controlled quentity controlled variable are packed according to communication protocol, send to slave computer by network service.
Slave computer is pressed into the data that receive in container, then according to the data in communication protocol extraction vessel, and the data of extraction are pressed in bidirectional buffering queue, then resolve according to communication protocol again, and the control command after resolving and control parameter are passed through to VME bus, send to the boards such as corresponding motion control board, synchro control card, data acquisition card.
Host computer is the input of steering order and controlled quentity controlled variable, such as sending to No. 05 plate motion control card position pid parameter, speed by PID parameter, S parameter of curve, controls No. 1 motor.Host computer by controlled quentity controlled variable and the packing of control parameter, is AA 55 03 S1 10 80 80*char 01 A5 5A according to communication protocol.Wherein AA 55 represents that for frame head, 05 plate card number, S1 represent the given S curve of motor No. 1, the 80th, data length, because position PID is that 3 parameters, speed by PID are that 3 parameters, S parameter of curve are 4 parameters, totally 10 parameters, each parameter is double type, and a double type is 8 char, so 80 altogether, the 01st, verification and, A5 5A is postamble.
Host computer sends to slave computer with the form of socket by controlled quentity controlled variable and steering order by network service, slave computer message sink task tNetRecv, by data receiver, and be pressed in container, again then according to the data in communication protocol extraction vessel, be extracted as frame head, frame type, data type, data length, data, verification and, postamble.
Message parse task tNetExplain, according to communication protocol resolution data, AA 55 represents that for frame head, 05 plate card number, S1 represent the given S curve of motor No. 1, the 80th, data length, then be 80 data again, the 01st, be verification and, A55A is postamble, then by writing board task tVmeWrite, position PID, speed by PID, S parameter of curve data is write to board No. 03 by VME bus.The address reading and writing data by VME bus is determined by base address, passage amount and side-play amount.Address=base address+passage amount+side-play amount.Base address is 0x83000000, passage amount moves left 16 decisions by plate card number, for 0x50000, then side-play amount is by position P, position I, position D. speed P, speed I, speed D, then be that S parameter of curve determines, the side-play amount of the position ring P that No. 1, motor is 0x05, so to the data of No. 1 board address 0x83050005 writing position ring P.
Other the like.Complete like this from host computer to slave computer to the communication between board.
When host computer sets up after above-mentioned parameter, can send motor and start controlled quentity controlled variable, it is to send to slave computer by host computer according to communication protocol packing equally that motor starts control command, slave computer knows that through message sink task, message parse task Electric Machine Control starts, then initiate to read board task tVmeRead, message sends task tNetSend.Reading the data that board task reads board in real time, can be the position that motor feeds back by grating scale, or departure, or a certain treated data.Message sends task, according to communication protocol, data packing is sent to host computer, after then host computer is resolved according to communication protocol, data is shown in real time.
The following describes the data exchange ways of slave computer and each board.Motion control card receives the physical location that collects motor from grating scale.Two data storage areas are set in motion control card.Because the motion control cycle of litho machine is 200us, 5000 points of collection per second.In order to alleviate the burden of host computer, 20 points of every collection send and once show curve to host computer.In motion control card, two data fields are set, data field has gathered after 20 points mark position 1, Vxworks embedded system is read board task tVmeRead Real-Time Monitoring zone bit, in the time that zone bit is 1, send the data to host computer and show, and by clear zone bit 0.
Claims (4)
1. the method for interchanging data between Vxworks embedded OS and the motion control card of a double-workpiece-table scanning photoetching machine, it is characterized in that, described method for interchanging data is realized on the basis of the double-workpiece-table photoetching machine control system communicator based on Vxworks operating system, this communicator comprises host computer (1), industrial computer functional module (2), motion control card (3), synchro control card (4) and signals collecting board (5)
The program module that host computer (1) is write based on MFC framework realizes, industrial computer functional module (2) adopts IC-e6-VMEa mainboard card to realize, and industrial computer functional module (2) realizes based on Vxworks embedded real-time operating system;
Industrial computer functional module (2) comprises that network communication module (2-1), task scheduling modules (2-2), parameter arrange module (2-3) and VME module for reading and writing (2-4);
Host computer (1) is for receiving user's steering order and controlling parameter, and according to self-defining communication protocol by steering order with control parameter packing, send to network communication module (2-1);
Network communication module (2-1) sends to parameter that module (2-3) is set control parameter, and steering order and control parameter are sent to task scheduling modules (2-2);
Parameter arranges module (2-3) for the control parameter receiving is processed, and obtains the controlled quentity controlled variable to motor in photoetching machine control system;
Task scheduling modules (2-2) is pressed into the steering order of reception and control parameter in information receiving vessel, data in message parse TU task unit information extraction receiving vessel, and resolve steering order and control parameter according to self-defining communication protocol, and send to parameter that module (2-3) is set by resolving the control parameter obtaining;
VME module for reading and writing (2-4) arranges the controlled quentity controlled variable signal of the motor of module (2-3) transmission for receiving parameter, and receives steering order and control parameter that task scheduling modules (2-2) parsing obtains;
VME module for reading and writing (2-4) sends to motion control card (3), synchro control card (4) and signals collecting board (5) by VME bus by the controlled quentity controlled variable of the motor receiving, steering order and control parameter;
In the time that task scheduling modules (2-2) is resolved to Electric Machine Control sign on, motion control card (3), the data that the collections of synchro control card (4) and signals collecting board (5) obtain send to VME module for reading and writing (2-4) by VME bus, VME module for reading and writing (2-4) will gather the data packing obtaining by task scheduling modules (2-2), and send to host computer (1) by network communication module (2-1), after host computer (1) is resolved data according to communication protocol, data are shown in real time, realize thus the communication of double-workpiece-table photoetching machine control system,
Described method for interchanging data is:
Motion control card (3) sends the method for data to industrial computer functional module (2):
Motion control card (3) comprises FPGA and DSP, in motion control card (3), wish sends the alternately preservation of two data fields of the dual port RAM of data acquisition FPGA, the alternately read-write of two data fields is controlled and is realized by flag register, when DSP writes the first blocks of data district after full data, flag register is by the first Xie Man mark position, blocks of data district 1, and now in motion control card (3), wish transmission data continue to write the second blocks of data district; The read data tasks synchronization of Vxworks embedded OS is monitored the full zone bit of writing of two data fields simultaneously, in the time monitoring Xie Man mark position 1, first data field, read the data in the first blocks of data district by VME bus, and after reading, write full mark position 0; When DSP writes the second blocks of data district after full data, the second blocks of data is write full mark position 1 by flag register, and now in motion control card (3), wish transmission data continue to write the first blocks of data district; When the read data task of Vxworks embedded OS monitors Xie Man mark position 1, second data field, read the data in the second blocks of data district by VME bus, and after reading, write full mark position 0; Said process successively repeatedly;
Industrial computer functional module (2) sends the method for data to motion control card (3):
Industrial computer functional module (2) sends data by VME bus by wish and writes in dual port RAM, and motion control card (3) is directly by dual port RAM reading out data;
Realize thus the exchanges data between Vxworks embedded OS and motion control card.
2. the method for interchanging data between Vxworks embedded OS and the motion control card of double-workpiece-table scanning photoetching machine according to claim 1, it is characterized in that, host computer (1) carries out exchanges data with industrial computer functional module (2) by TCP network communication protocol, form with socket is carried out data transmission, when it carries out data transmission, the self-defining communication protocol of employing is specific as follows:
。
3. the method for interchanging data between Vxworks embedded OS and the motion control card of double-workpiece-table scanning photoetching machine according to claim 1 and 2, it is characterized in that, VME module for reading and writing (2-4), according to VME64x agreement, adopts FPGA programmable logic controller (PLC) part to realize.
4. the method for interchanging data between Vxworks embedded OS and the motion control card of double-workpiece-table scanning photoetching machine according to claim 1 and 2, it is characterized in that, motion control card (3), the data that the collections of synchro control card (4) and signals collecting board (5) obtain comprise grating scale, the motor position parameter that laser interferometer and inductance sensor collect, or through motion control card (3), synchro control card (4) or signals collecting board (5) are processed the speed or the acceleration information that obtain, or motion control card (3), synchro control card (4) or signals collecting board (5) need to transmit the data that show to host computer.
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| CN105068386A (en) * | 2015-09-07 | 2015-11-18 | 哈尔滨工业大学 | Security protection method of double-workpiece-platform system |
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| CN105068386A (en) * | 2015-09-07 | 2015-11-18 | 哈尔滨工业大学 | Security protection method of double-workpiece-platform system |
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| CN105810038B (en) * | 2016-05-10 | 2019-01-11 | 浙江求是科教设备有限公司 | The experiment device for teaching and its method controlled based on ring micro-grid connection under matlab-simulink XPC mode |
| CN107547450A (en) * | 2017-07-28 | 2018-01-05 | 新华三技术有限公司 | Data adding method and device between a kind of plate |
| CN107547450B (en) * | 2017-07-28 | 2020-04-17 | 新华三技术有限公司 | Method and device for adding data between boards |
| CN113032015A (en) * | 2019-12-24 | 2021-06-25 | 中国科学院沈阳自动化研究所 | Communication method for precision motion control |
| CN112363764A (en) * | 2020-11-27 | 2021-02-12 | 哈尔滨工业大学 | Control method of cross-platform communication precision motion platform |
| CN112363764B (en) * | 2020-11-27 | 2021-07-16 | 哈尔滨工业大学 | Control method of cross-platform communication precision motion platform |
| CN112600937A (en) * | 2020-12-29 | 2021-04-02 | 北京神州飞航科技有限责任公司 | FPGA logic remote downloading method |
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