CN104122026B - A kind of pressure sensor and pressure system - Google Patents
A kind of pressure sensor and pressure system Download PDFInfo
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- CN104122026B CN104122026B CN201310148877.0A CN201310148877A CN104122026B CN 104122026 B CN104122026 B CN 104122026B CN 201310148877 A CN201310148877 A CN 201310148877A CN 104122026 B CN104122026 B CN 104122026B
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Abstract
The invention discloses pressure sensor, the pedestal of through hole is provided with including middle part, two open ends of through hole are embedded with seal glass and covered with diaphragm respectively, pedestal, seal glass, diaphragm surround a fluid-tight room, the oiling passage of connection fluid-tight room is arranged on pedestal, and the inlet end of the outside oil circuit of oiling passage connection is provided with seal member；It is arranged in the present invention to the oiling passage of fluid-tight room oiling on pedestal, on the one hand oiling via process is processed on pedestal fairly simple, easily realize, and after completing to the oiling of fluid-tight room, during using at the oil inlet of seal member sealed oiling passage, without considering that the factors such as oiling channel deformation can be caused by putting on thrust on oiling passage, being flattened when eliminating the closure of prior art topping up pipe causes body to deform, the problems such as rupturing oil leak, it is the pressure sensor component being fixed on by welding procedure on pedestal particularly with seal member, the set-up mode of this paper oiling passages can improve the reliability and stability of seal member welding.In addition, including the pressure system of above-mentioned pressure sensor present invention also offers a kind of.
Description
Technical field
The present invention relates to Pressure Control Technology field, more particularly to a kind of pressure sensor.The invention further relates to one kind
Pressure system with above-mentioned pressure sensor.
Background technology
With the fast development of China's economic construction, it is related to the industries such as air conditioner refrigerating, the heat pump air conditioner of field of heat exchange not
It is disconnected to develop towards diversification, multi-functional direction.In various heat-exchange apparatus, Jie with pressure is flowed during due to work
Matter, therefore, pressure sensor are indispensable important components in heat-exchange apparatus.
Pressure sensor is that one kind acts on medium (all kinds of flowable materials) pressure on core body circuit block, makes pressure
Power element is deformed, so that etching electric bridge in pressure core produces corresponding electric signal, then by modulate circuit by its turn
It is changed to the voltage output signal of standard.
Fig. 1 is refer to, Fig. 1 is a kind of schematic diagram of typical pressure sensor partial structurtes in the prior art.
Pressure sensor includes being embedded with fixed seal glass 2, seal glass 2 simultaneously at pedestal 1, the opening of pedestal 1
Be sealed with guide pin 3, induction chip boarded parts 4 and oil filler pipe 5, another opening portion of pedestal is covered by diaphragm 7, itself and sealing glass
Glass 2, the formation fluid-tight of pedestal 1 room, the lower section of induction chip boarded parts 4 are pasted with induction chip 6, and induction chip 6 passes through the He of spun gold 8
Guide pin 3 is connected.
In pressure sensor production process, fluid is injected fluid-tight room by operating personnel by oil filler pipe 5 first, works as filling
After the completion of, by the oil inlet plug at end part of oil filler pipe 5, when pressure is applied on diaphragm, diaphragm is delivered to sensing by fluid
On chip 6, induction chip 6 is deformed, and the deformation is handled, and is then converted into the electric signal of standard.It is general at present
Take following several closure modes.
First method, oil filler pipe 5 is flattened, and is then carried out again, and which technics comparing is complicated, while in closure process
Easily there is Leakage in middle oil filler pipe 5, and welding is insufficient caused by oil leak, cause that fluid-tight chamber air-tightness is good, intensity not
Foot, pressure sensor functional reliability and stability reduction.
The second way is direct welded seal part in the end of oil filler pipe 5, which, it is necessary to be previously applied certain pressure
Seal contacts oil filler pipe 5 and seal by power, because oil filler pipe 5 is than relatively thin, the pressure being previously applied is too small easily make it is close
There are welded gaps with oil filler pipe 5 in sealing, occurs the insufficient phenomenon of welding；If the pressure applied is excessive, easily cause oil-filled
Pipe 5 is bent, influence oil filler pipe 5 and seal welding quality, is occurred to weld insufficient, fluid-tight chamber air-tightness can be caused not good,
Seal glass will be destroyed when serious.
Therefore, a kind of pressure sensor how is provided, oiling passage plugging technique is simple in the pressure sensor, and closure
Reliably, it is the current technical issues that need to address of those skilled in the art.
The content of the invention
One object of the present invention aims to provide a kind of pressure sensor, oiling passage plugging technique in the pressure sensor
Simply, and closure is reliable.Another object of the present invention aims to provide a kind of pressure system with above-mentioned pressure sensor.
To achieve the above object, the invention provides a kind of pressure sensor, including pedestal, it is provided with the pedestal logical
Hole, two open ends of the through hole are embedded with seal glass and covered with diaphragm respectively, the pedestal, seal glass, diaphragm
A fluid-tight room is surrounded, the oiling passage for connecting the fluid-tight room is additionally provided with, the oiling passage is arranged on the pedestal, institute
The inlet end for stating the outside oil circuit of oiling passage connection is provided with seal member.
Preferably, the oiling passage includes the first oil duct and the second oil duct being vertically arranged, and passes through the described first oil
Road connects the fluid-tight room.
Preferably, the pedestal includes upper matrix and the lower bottom base being engaged with the upper matrix, and the through hole includes setting
The first through hole being placed on the upper matrix and the second through hole being arranged on the lower bottom base, the seal glass insertion are described
In first through hole, the membrane covered is at the lower ending opening of second through hole.
Preferably, first oil duct and second oil duct are on the upper matrix or the lower bottom base.
Preferably, first oil duct is surrounded by the mating surface of the upper matrix and the lower bottom base, second oil duct
In the upper matrix or the lower bottom base.
Preferably, at least one of mating surface of both described upper matrix and the lower bottom base is provided with annular groove, described
Annular groove and the corresponding through hole constitute shoulder hole structure, first oil duct be formed at the annular groove and its mating surface it
Between.
Preferably, at least one of mating surface of both described upper matrix and the lower bottom base is provided with annular groove and at least
The link slot of one connection fluid-tight room, the annular groove connects the link slot and second oil duct, first oil
Road is formed between the annular groove, the link slot mating surface corresponding with both.
Preferably, one of which is oily provided with logical described second in the mating surface of both described upper matrix and the lower bottom base
The link slot of the fluid-tight room is communicated with the annular groove in road, another one, the link slot connects the annular groove and described
Fluid-tight room, first oil duct is formed between the annular groove, the link slot and both corresponding mating surfaces.
Preferably, the inlet end of the oiling passage is provided with shoulder hole structure, and the seal member is arranged at described
Shoulder hole stepped locations.
Preferably, it is provided with the substrate for installing induction chip, the substrate and sets on the inner face of the seal glass
There is at least one pad being connected with the induction chip.
Preferably, it is additionally provided with and press-fits the diaphragm in the pressure ring on the pedestal.
Preferably, the upper matrix and the lower bottom base are provided with the groove for placing weld-ring at least one, the upper matrix,
The weld-ring, the lower bottom base on described matrix with being integrally formed in the sintering process of the seal glass.
The pressure sensor that the present invention is provided be by processed on pedestal oiling passage complete to pedestal, seal glass and
Fluid is filled in the fluid-tight room that diaphragm is surrounded, and after the completion of fluid filling, it is only necessary to by the inlet end of oiling passage
The sealing of oiling passage can be completed using seal member sealing.
Compared with prior art sets embedded topping up pipe in seal glass, to the oiling of fluid-tight room oiling in the present invention
Passage is arranged on pedestal, and on the one hand processing oiling via process is fairly simple on pedestal, without considering processing cooperation, installing
The factors such as sintering, it is easier to realize, and after completing to the oiling of fluid-tight room, use the oil-feed of seal member sealed oiling passage
When at mouthful, without considering that the factors such as oiling channel deformation can be caused by putting on thrust on oiling passage, eliminated prior art and filled
Flattened when liquid pipe is blocked and cause the problems such as body deformation, rupture oil leak, particularly with seal member fixed by welding procedure
In the pressure sensor component on pedestal, the set-up modes of this paper oiling passages can improve seal member welding reliability and
Stability, and the sealing means enormously simplify plugging technology, can improve the production efficiency of pressure sensor, and reducing it makes
Use cost.
In a preferred embodiment, the oiling passage includes the first oil duct and the second oil duct being vertically arranged,
And the fluid-tight room is connected by first oil duct；The oiling passageway machining technics comparing of the structure is simple, and works as with close
When sealing the end of part closure Vertical Channel, the contrast locating of seal member is more accurate, is conducive to quick and precisely installing and improving
The reliability of closure, improves the stability of pressure sensor work.
In a preferred embodiment, the pedestal includes upper matrix and the bottom being engaged with the upper matrix
Seat, the through hole includes the first through hole being arranged on the upper matrix and the second through hole being arranged on the lower bottom base, institute
State seal glass to be embedded in the first through hole, the membrane covered is at the lower ending opening of second through hole；The embodiment party
Pedestal is set to the upper matrix and lower bottom base two parts cooperated in formula, the first oil duct of processing and the can be further reduced
The difficulty of two oil ducts, improves use intensity.
In a preferred embodiment, first oil duct is enclosed by the mating surface of the upper matrix and the lower bottom base
Into second oil duct is in the upper matrix or the lower bottom base.
Pedestal is set to the upper matrix and lower bottom base two parts of mutual cooperation, the part of oiling passage in the embodiment
Oil duct (the first oil duct) is arranged in the mating surface of matrix or/and lower bottom base, and oil duct is processed compared in inside parts.This implementation
The processing mode that mode processes oil duct on piece surface is easy to positioning to process, and reduces the processing technology requirement of oiling passage,
Process velocity and efficiency can be improved, and pedestal has Split type structure, also beneficial to the assembling of base interior parts.
In another preferred embodiment, at least one of mating surface of both described upper matrix and the lower bottom base
Annular groove is provided with, the annular groove constitutes shoulder hole structure with the corresponding through hole, and first oil duct is formed at the ring
Between shape groove and its mating surface.
When filling fluid to fluid-tight room, fluid initially enters the second oil duct, subsequently into annular groove, then after annular groove
Into fluid-tight room, the sectional areas of ring channel structures compares larger, the pressure for the fluid that can be entered with relative reduction by the second oil duct
Power, can be with relatively reduced fluid to fluid-tight chamber interior parts (sensing core so when fluid flows into fluid-tight room again through link slot
The parts such as piece, spun gold) and fluid-tight room end diaphragm impact, it is to avoid destruction fluid-tight chamber interior parts and diaphragm, ensure
Each parts normal work.
In another preferred embodiment, at least one of mating surface of both described upper matrix and the lower bottom base
The link slot of the fluid-tight room is connected with least one provided with annular groove, the annular groove connection link slot and described the
Two oil ducts, first oil duct is formed between the annular groove, the link slot mating surface corresponding with both.
Present embodiment consider slow down imported hydraulic oil to fluid-tight chamber interior parts and diaphragm impulsive force on the basis of,
The volume for reducing the first oil duct being connected with fluid-tight room is as far as possible considered, that is to say, that reduce as far as possible and be sealed in pressure
Its internal fluid is sensed, the influence that fluid expands with heat and contract with cold to pressure sensor performance is reduced.
To realize another object, the present invention also provides a kind of pressure system, including pressure pipeline and located at the pressure
Pressure sensor on pipeline, the pressure sensor is the pressure sensor described in any of the above-described.
Because above-mentioned pressure sensor has above-mentioned technique effect, the pressure system with above-mentioned pressure sensor also should
There should be corresponding technique effect.
Brief description of the drawings
Fig. 1 is a kind of partial structural diagram of typical pressure sensor in the prior art；
Fig. 2 is a kind of structural representation of embodiment of pressure sensor provided by the present invention；
Fig. 3 is the sectional view of lower bottom base in pressure sensor shown in Fig. 2；
Fig. 4 is the top view of lower bottom base in pressure sensor shown in Fig. 2；
Fig. 5 is the structural representation of second of embodiment of pressure sensor provided by the present invention；
Fig. 6 is the sectional view of lower bottom base in pressure sensor shown in Fig. 5；
Fig. 7 is the top view of lower bottom base in pressure sensor shown in Fig. 5；
Fig. 8 is the structural representation of the third embodiment of pressure sensor provided by the present invention；
Fig. 9 is the sectional view of lower bottom base in pressure sensor shown in Fig. 8；
Figure 10 is the top view of lower bottom base in pressure sensor shown in Fig. 8；
Figure 11 is the structural representation of the third embodiment of pressure sensor provided by the present invention；
Figure 12 is the sectional view of lower bottom base in pressure sensor shown in Figure 11；
Figure 13 is the top view of lower bottom base in pressure sensor shown in Figure 11.
Wherein, the corresponding relation in Fig. 1 between reference and component names is：
1 pedestal；2 seal glass；3 guide pins；4 induction chip boarded parts；5 oil filler pipes；6 induction chips；7 diaphragms；8 gold medals
Silk.
Wherein, corresponding relations of the Fig. 2 into Figure 13 between reference and component names is：
1 ' pedestal；10 ' lower bottom bases；101 ' second oil ducts；102 ' link slots；103 ' annular grooves；Matrix on 11 '；2 ' sealings
Glass；3 ' guide pins；4 ' substrates；5 ' induction chips；6 ' steel balls；7 ' pressure rings；8 ' diaphragms；9 ' spun golds.
Embodiment
The core of the present invention aims to provide a kind of pressure sensor, oiling passage plugging technique in the pressure sensor
Simply, and closure is reliable.Another core of the present invention, which is aimed to provide, a kind of includes the pressure system of above-mentioned pressure sensor.
Without loss of generality, the technical program is introduced so that circle is in the cross section of the pedestal in pressure sensor as an example herein,
It will be understood by those skilled in the art that being also not excluded for pedestal of the cross section for the other forms such as square.
In order that those skilled in the art more fully understand the present invention program, with reference to the drawings and specific embodiments to this
Invention is described in further detail.
Fig. 2 is refer to, Fig. 2 is the structural representation of the first embodiment of pressure sensor provided by the present invention
Figure.
Pressure sensor provided by the present invention includes the pedestal that middle part is provided with through hole, the two open ends difference of through hole
It is embedded with seal glass and covered with diaphragm 8 ', pedestal 1 ', seal glass 2 ', diaphragm 8 ' surround a fluid-tight room, usually, fluid-tight
Induction chip 5 ' is provided with room, induction chip 5 ' can be directly or indirectly fixed on pedestal or seal glass 2 ', sealed
Guide pin 3 ' is sealed with glass 2 ', induction chip 5 ' can connect guide pin 3 ' by spun gold 9 '.
The oiling passage of connection fluid-tight room is additionally provided with the present invention on pressure sensor, oiling passage is arranged at pedestal 1 '
On, the inlet end of the outside oil circuit of oiling passage connection is provided with seal member, and seal member can pass through welding manner or mistake
The fit system that is full of is fixed on pedestal, and seal member can be metal, such as steel, or nonmetallic such as rubber.
It is pointed out that " connection " herein refers to the passage of liquid communication.
In pressure sensor production process, fluid (silicone oil) is injected fluid-tight by operating personnel by oiling passage first
Room, is fixed on pedestal 1 ' after the completion of filling, then by seal member, realizes the sealing of oiling passage oil inlet.So, pressure is worked as
When power is applied on diaphragm, diaphragm is delivered on induction chip 5 ' by fluid, and induction chip 5 ' is deformed, and this is deformed
Handled, be then converted into the electric signal of standard, realize the purpose of pressure detecting.
It is outside to the oiling of fluid-tight room in the present invention compared with prior art sets embedded topping up pipe in seal glass 2 '
Oiling passage be to be arranged at oiling passage on pedestal 1 ', oiling via process is on the one hand processed on pedestal 1 ' simpler
It is single, without considering processing cooperation, installing the factors such as sintering, it is easier to realize, and after completing to the oiling of fluid-tight room, using close
When sealing at the oil inlet of part sealed oiling passage, without considering that putting on thrust on oiling passage can cause oiling passage to become
The factors such as shape, the shape without changing oiling passage is flattened when eliminating the closure of prior art topping up pipe and causes body deformation, rupture
The problems such as oil leak, be the pressure sensor component being fixed on by welding procedure on pedestal 1 ' particularly with seal member, herein
The set-up mode of oiling passage can improve the reliability and stability of seal member welding, and the sealing means are greatly simplified
Plugging technology, can improve the production efficiency of pressure sensor, reduce its use cost.
The design method of oiling passage can have diversified forms, and several oiling passages introduced below are than more preferably embodiment party
Formula, particular content is as described below.
In a preferred embodiment, oiling passage can include the first oil duct and the second oil duct being vertically arranged
101 ', and fluid-tight room is connected by the first oil duct；The oiling passageway machining technics comparing of the structure is simple, and ought use sealing
When part blocks the end of Vertical Channel, the contrast locating of seal member is more accurate, is conducive to quick and precisely installing and improving closure
Reliability, improve pressure sensor work stability.
Further, pedestal 1 ' can include upper matrix 11 ' and the lower bottom base 10 ' being engaged with upper matrix 11 ', through hole bag
Include the first through hole being arranged on matrix 11 ' and the second through hole being arranged on lower bottom base 10 ', seal glass 2 ' embedded first
In through hole, membrane covered is at the lower ending opening of the second through hole；Pedestal is set to the upper base of mutual cooperation in the embodiment
Body and lower bottom base two parts, can further reduce the difficulty of the first oil duct of processing and the second oil duct, improve use intensity.
Above-mentioned, the first oil duct and the second oil duct 101 ' can be formed in same part, that is to say, that while in upper matrix
11 ' or lower bottom base 10 ' on process the first oil duct and the second oil duct 101 ', can also, cooperatively form oiling passage by two parts.
Referring again to Fig. 2, the first oil duct is surrounded by the mating surface of upper matrix 11 ' He lower bottom base 10 ', the second oil duct 101 '
The fluid-tight room is connected by the first oil duct, that is to say, that upper matrix 11 ' and lower bottom base 10 ' surround the first oil duct, second jointly
Oil duct 101 ' is formed in matrix 11 ' or lower bottom base 10 ', and the second oil duct 101 ' connects fluid-tight room by the first oil duct.
Pedestal 1 ' is set to the upper matrix 11 ' and the two parts of lower bottom base 10 ' of mutual cooperation, oiling is led in the embodiment
The part oil duct (the first oil duct) in road is arranged in the mating surface of matrix 11 ' or/and lower bottom base 10 ', compared in inside parts
Process oil duct.The processing mode that present embodiment processes oil duct on piece surface is easy to positioning to process, and reduces oiling passage
Processing technology requirement, can improve process velocity and efficiency, and pedestal 1 ' has Split type structure, it is also internal beneficial to pedestal 1 '
The assembling of parts.
Specifically, the set-up mode of the first oil duct can be by diversified forms, such as only in upper matrix 11 ' and lower bottom base 10 '
Set in one of both after oil groove, upper matrix 11 ' and the cooperation of lower bottom base 10 ', its corresponding mating surface formation first of the oil groove
Oil duct, it is, of course, also possible to be provided with oil groove on both upper matrix 11 ' and lower bottom base 10 ', upper matrix 11 ' and lower bottom base 10 ' are matched somebody with somebody
The first oil duct is formed after conjunction.The preferred embodiment of several first oil duct designs is following present, the main distinction is the first oil
The shape design in road, is described in detail below.
Fig. 5 is refer to, Fig. 5 is the structural representation of second of embodiment of pressure sensor provided by the present invention
Figure；Fig. 6 is the sectional view of lower bottom base in pressure sensor shown in Fig. 5；Fig. 7 is lower bottom base 10 ' in pressure sensor shown in Fig. 5
Top view.
In the first embodiment, set at least one of mating surface of both upper matrix 11 ' and lower bottom base 10 '
There is annular groove 103 ', annular groove 103 ' and the second through hole constitute shoulder hole structure, and the first oil duct is formed at annular groove 103 ' and its
Between mating surface.
When filling fluid to fluid-tight room, fluid initially enters the second oil duct 101 ', subsequently into annular groove 103 ', then passes through
Annular groove 103 ' enters fluid-tight room afterwards, the sectional area of the structure of annular groove 103 ' compare it is larger, can be with relative reduction by the second oil
The pressure for the fluid that road 101 ' enters, can be with relatively reduced fluid so when fluid flows into fluid-tight room again through link slot 102 '
Impact to fluid-tight chamber interior parts (part such as induction chip 5 ', spun gold 9 ') and the diaphragm 8 ' of fluid-tight room end, it is to avoid
Fluid-tight chamber interior parts and diaphragm 8 ' are destroyed, each parts normal work is ensured.
Fluid used in usual pressure sensor is silicone oil, and silicone oil has the characteristic expanded with heat and contract with cold, in order to reduce as far as possible
Silicone oil expand with heat and contract with cold pressure sensor is detected and the life-span influence, can be with the basis of the first embodiment
Improved as follows.
Fig. 3 and Fig. 4 are refer to, Fig. 3 is the sectional view of lower bottom base in pressure sensor shown in Fig. 2；Fig. 4 is to be pressed shown in Fig. 2
The top view of lower bottom base in force snesor.
In second of embodiment, at least one of mating surface of both upper matrix 11 ' and the lower bottom base 10 '
The link slot 102 ' of fluid-tight room is connected with least one provided with annular groove 103 ', the quantity of link slot 102 ' can be one
Can be two or more, the second oil duct of the connection of annular groove 103 ' 101 ' and link slot 102 ', the first oil duct are formed at ring
Between shape groove 103 ', link slot 102 ' mating surface corresponding with both；Wherein, the second oil duct 101 ' can be with annular groove 103 '
It is arranged on same part, the opening of the second oil duct 101 ' of connection is provided with the bottom wall of annular groove 103 '；Second oil duct 101 '
It can also be arranged at from the annular groove 103 ' on two different parts, i.e., one is arranged on matrix 11 ', another
It is arranged on lower bottom base 10 ', the second oil duct 101 ' is connected with the aperture position of annular groove 103 ', no matter which kind of is set, as long as energy
Realize above-mentioned technique effect.
Present embodiment is considering to slow down imported hydraulic oil to fluid-tight chamber interior parts and the basis of the impulsive force of diaphragm 8 '
On, consider the volume for reducing the first oil duct being connected with fluid-tight room as far as possible, that is to say, that reduce as far as possible and be sealed in pressure
Power senses its internal fluid, reduces the influence that fluid expands with heat and contract with cold to pressure sensor performance.
Certainly, for the convenience of processing, link slot 102 ' can be generally configured as horizontal, also be not excluded for certain angle
That spends is skewed.
It is specifically real with above two below there is shown herein the third of pressure sensor and the 4th kind of embodiment
The main distinction for applying mode is that the first oil duct of oiling passage and the second oil duct 101 ' are respectively arranged at lower bottom base 10 ' and upper
It is specific to set as described below on matrix 11 '.
Fig. 8 to Figure 13 is refer to, Fig. 8 is the structure of the third embodiment of pressure sensor provided by the present invention
Schematic diagram；Fig. 9 is the sectional view of lower bottom base in pressure sensor shown in Fig. 8；Figure 10 is lower bottom base in pressure sensor shown in Fig. 8
Top view；Figure 11 is the structural representation of the third embodiment of pressure sensor provided by the present invention；Figure 12 is
The sectional view of lower bottom base in pressure sensor shown in Figure 11；Figure 13 is the top view of lower bottom base in pressure sensor shown in Figure 11.
In the third and the 4th kind of embodiment, the second oil duct 101 ' and the first oil duct are respectively arranged at pedestal 1 '
Upper matrix 11 ' and lower bottom base 10 ' two parts on, refer to Fig. 8 and Figure 11, the second oil duct 101 ' can be arranged at matrix
On 11 ', the first oil duct is surrounded by the oil groove being opened on lower bottom base 10 ' and the upper mating surface of matrix 11 ', such as above-mentioned oil groove can be with
For ring channel structures, or the connecting groove structure or annular groove 103 ' being substantially horizontal are constituted with link slot 102 '
The forms such as structure, as long as above-mentioned technique effect can be realized.
The parts such as general seal glass, induction chip are installed in the through hole of matrix 11 ', and oil groove is located at into lower bottom base
On 10 ', the installation site without considering the parts such as seal glass 2 ', oil groove processing technology is fairly simple, and relative by annular
Groove 103 ' and link slot 102 ' are arranged on same part, and annular groove 103 ' and link slot 102 ' are arranged on two parts,
Service life can be improved with the use intensity of matrix 11 ' in relative increase He lower bottom base 10 '.
Certainly, annular groove 103 ' and/or link slot 102 ' can also be arranged on matrix 11 ', the second oil duct 101 '
It can be arranged on lower bottom base 10 '.
In the respective embodiments described above, the inlet end of oiling passage can be provided with shoulder hole structure, and seal member is set
In the shoulder hole stepped locations；The set-up mode not only contributes to the closure to oiling channel entrance end, and will sealing
Part can save space, the dress of pedestal 1 ' and miscellaneous part not influenceed with completely set up inside the large diameter hole of shoulder hole
Match somebody with somebody, structure of modification is carried out without the mating parts to pedestal 1 ' in the prior art.
Above-mentioned seal member can be steel ball 6 ', and steel ball 6 ' is easier positioning.
Further, the base for installing induction chip 5 ' can be provided with above-described embodiment on the inner face of seal glass 2 '
At least one pad being connected with induction chip 5 ' is provided with plate 4 ', substrate 4 '；It is provided with the set-up mode on substrate 4 '
Several fix the position of induction chip 5 ', when installing induction chip 5 ', can consider length, the guide pin 3 ' of spun gold 9 '
The practical factor such as position, select suitable pad, realize the fixation of induction chip 5 ', it is achieved thereby that induction chip 5 ' is fixed
Convenience.
In addition, the thickness of diaphragm 8 ' is general than relatively thin, easily welded Lou when being welded with pedestal 1 ', herein further in pressure
Set in sensor and press-fit diaphragm 8 ' in the pressure ring 7 ' on pedestal 1 ', the periphery of diaphragm 8 ' is pressed on pedestal 1 ' by pressure ring 7 ',
It is divided into upper matrix 11 ' and the two-part structure of lower bottom base 10 ' for pedestal 1 ', diaphragm 8 ' is pressed in lower bottom base 10 ' by pressure ring 7 '
On.So, in welding, diaphragm 8 ', pressure ring 7 ' are welded on pedestal 1 ' together, and pressure ring 7 ' can increase diaphragm 8 ' and pedestal 1 '
Throat thickness, it is to avoid leakage problem is welded when diaphragm 8 ' is welded, the use intensity of diaphragm 8 ' is added, extends the use of diaphragm 8 '
Life-span.
Pedestal 1 ' is divided into the embodiment of upper matrix 11 ' and lower bottom base 10 ' for above-mentioned, upper matrix 11 ' and lower bottom base
10 ' can use following assembly technology.
In the first assembly technology, pre-processed upper matrix 11 ' and lower bottom base 10 ' first can be welded on one
Rise, then seal glass 2 ' is sintered on the assembly of upper matrix 11 ' and the lower bottom base 10 ' welded, finally completes other
The assembling of parts.
In the first assembly technology, at least one upper placement weld-ring of setting in upper matrix 11 ' and lower bottom base 10 ' in advance
Groove, upper matrix 11 ', weld-ring, lower bottom base 10 ' are integrally formed in sintering process of the upper matrix 11 ' with seal glass 2 ', and technique is more
Plus it is simple, it is not necessary to increase extra technique.
It should be noted that it is used herein it is upper and lower wait the noun of locality, for for pressure sensor shown in Fig. 2
For position, statement is intended merely to conveniently, it will be understood by those skilled in the art that the noun of locality used herein should not be limited
Protection scope of the present invention processed.
Except above-mentioned pressure sensor, the present invention also provide it is a kind of include the pressure system of above-mentioned pressure sensor, including
Pressure pipeline and the pressure sensor on the pressure pipeline, because there is above-mentioned pressure sensor above-mentioned technology to imitate
Really, the pressure system with above-mentioned pressure sensor should also have corresponding technique effect.
In a kind of specific embodiment, pressure system is specifically as follows refrigerant pressure system.
The structure of other each several parts of above-mentioned refrigerant pressure system refer to prior art, repeat no more herein.
A kind of pressure sensor and pressure system provided by the present invention are described in detail above.It is used herein
Specific case is set forth to the principle and embodiment of the present invention, and the explanation of above example is only intended to help and understands
The method and its core concept of the present invention.It should be pointed out that for those skilled in the art, not departing from this
On the premise of inventive principle, some improvement and modification can also be carried out to the present invention, these are improved and modification also falls into the present invention
In scope of the claims.
Claims (11)
1. a kind of pressure sensor, including middle part are provided with the pedestal (1 ') of through hole, the two open ends difference of the through hole is embedding
Enter to have seal glass (2 ') and covered with diaphragm (8 '), the pedestal (1 '), seal glass (2 '), diaphragm (8 ') surround a fluid-tight
Room, it is characterised in that be additionally provided with the oiling passage for connecting the fluid-tight room, the oiling passage is arranged at the pedestal (1 ')
On, the inlet end of the outside oil circuit of oiling passage connection is provided with seal member；
The oiling passage includes the first oil duct and the second oil duct (101 ') being vertically arranged, and is connected by first oil duct
The fluid-tight room；
The pedestal (1 ') includes upper matrix (11 ') and the lower bottom base (10 ') being engaged with the upper matrix (11 '), described logical
Hole includes the first through hole being arranged on the upper matrix (11 ') and the second through hole being arranged on the lower bottom base (10 '), institute
State in the embedded first through hole of seal glass (2 '), the diaphragm (8 ') is covered at the lower ending opening of second through hole.
2. pressure sensor according to claim 1, it is characterised in that first oil duct and second oil duct
Both (101 ') are formed in the upper matrix (11 ') or the lower bottom base (10 ').
3. pressure sensor according to claim 1, it is characterised in that first oil duct is by the upper matrix (11 ')
Surrounded with the mating surface of the lower bottom base (10 '), second oil duct (101 ') is formed under the upper matrix (11 ') or described
In base (10 ').
4. pressure sensor according to claim 3, it is characterised in that the upper matrix (11 ') and the lower bottom base
At least one of the mating surface of both (10 ') is provided with annular groove (103 '), the annular groove (103 ') and the corresponding through hole
Shoulder hole structure is constituted, first oil duct is formed between the annular groove (103 ') and its mating surface.
5. pressure sensor according to claim 3, it is characterised in that the upper matrix (11 ') and the lower bottom base
At least one of the mating surface of both (10 ') connects the link slot of the fluid-tight room provided with annular groove (103 ') with least one
(102 '), the annular groove (103 ') connects the link slot (102 ') and second oil duct, and first oil duct is formed at
Between the annular groove (103 '), the link slot (102 ') mating surface corresponding with both.
6. pressure sensor according to claim 3, it is characterised in that the upper matrix (11 ') and the lower bottom base
The annular groove (103 ') of second oil duct (101 '), another one are communicated with the mating surface of both (10 ') in one of which
On be communicated with the link slot (102 ') of the fluid-tight room, the link slot (102 ') connects the annular groove (103 ') and described
Fluid-tight room, first oil duct is formed at the annular groove (103 '), the link slot (102 ') and both corresponding mating surfaces
Between.
7. the pressure sensor according to any one of claim 1 to 6, it is characterised in that the entrance point of the oiling passage
Portion is provided with shoulder hole structure, and the seal member is arranged at the shoulder hole stepped locations.
8. pressure sensor according to claim 7, it is characterised in that set on the inner face of the seal glass (2 ')
Have and at least one and the induction chip (5 ') company are provided with the substrate (4 ') of installation induction chip (5 '), the substrate (4 ')
The pad connect.
9. pressure sensor according to claim 7, it is characterised in that be additionally provided with and press-fit the diaphragm (8 ') in described
Pressure ring (7 ') on pedestal (1 ').
10. pressure sensor according to claim 7, it is characterised in that the upper matrix (11 ') and the lower bottom base
(10 ') are provided with the groove for placing weld-ring at least one, and the upper matrix (11 '), the weld-ring, the lower bottom base (10 ') exist
The upper matrix (11 ') in the sintering process of the seal glass (2 ') with being integrally formed.
11. a kind of pressure system, including pressure pipeline and the pressure sensor on the pressure pipeline, it is characterised in that
The pressure sensor is the pressure sensor described in any one of claim 1 to 10.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310148877.0A CN104122026B (en) | 2013-04-25 | 2013-04-25 | A kind of pressure sensor and pressure system |
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| CN201310148877.0A CN104122026B (en) | 2013-04-25 | 2013-04-25 | A kind of pressure sensor and pressure system |
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| CN104122026A CN104122026A (en) | 2014-10-29 |
| CN104122026B true CN104122026B (en) | 2017-11-03 |
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| CN201310148877.0A Active CN104122026B (en) | 2013-04-25 | 2013-04-25 | A kind of pressure sensor and pressure system |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106706202B (en) * | 2016-12-21 | 2024-04-05 | 安徽天利粮油集团股份有限公司 | Dryer pressure monitoring device |
| CN107665792A (en) * | 2017-09-19 | 2018-02-06 | 国网黑龙江省电力有限公司哈尔滨供电公司 | A kind of block head and its manufacture method for effectively preventing high-voltage circuit-breaker hydraulic mechanism oil leak |
| CN109959481B (en) * | 2017-12-14 | 2021-03-26 | 浙江三花制冷集团有限公司 | Pressure sensor |
| CN107875507B (en) * | 2017-12-28 | 2018-12-21 | 北京灵泽医药技术开发有限公司 | Two-way mechanism and detection device, system, extrusion infusing pipeline and fluid control devices |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN85108071A (en) * | 1984-10-12 | 1986-04-10 | 罗斯蒙德公司 | Adopt the pressure sensing cell of brittle diaphragm |
| CN2556622Y (en) * | 2002-06-25 | 2003-06-18 | 沈阳仪器仪表工艺研究所 | To tube base type pressure sensor |
| CN2938053Y (en) * | 2006-06-21 | 2007-08-22 | 宝鸡恒通电子有限公司 | Silicon pressure sensor |
| CN101226092A (en) * | 2008-01-16 | 2008-07-23 | 西安维纳信息测控有限公司 | SOI complete silicon structure silicone-oil-filling high-temperature-resistance pressure sensor |
| CN202066613U (en) * | 2011-05-30 | 2011-12-07 | 中国电子科技集团公司第四十九研究所 | Oil-filled temperature pressure combined sensor |
| CN102507073A (en) * | 2011-10-27 | 2012-06-20 | 威海市天罡仪表股份有限公司 | Pressure and pressure difference combination measurement and communication realization method |
-
2013
- 2013-04-25 CN CN201310148877.0A patent/CN104122026B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN85108071A (en) * | 1984-10-12 | 1986-04-10 | 罗斯蒙德公司 | Adopt the pressure sensing cell of brittle diaphragm |
| CN2556622Y (en) * | 2002-06-25 | 2003-06-18 | 沈阳仪器仪表工艺研究所 | To tube base type pressure sensor |
| CN2938053Y (en) * | 2006-06-21 | 2007-08-22 | 宝鸡恒通电子有限公司 | Silicon pressure sensor |
| CN101226092A (en) * | 2008-01-16 | 2008-07-23 | 西安维纳信息测控有限公司 | SOI complete silicon structure silicone-oil-filling high-temperature-resistance pressure sensor |
| CN202066613U (en) * | 2011-05-30 | 2011-12-07 | 中国电子科技集团公司第四十九研究所 | Oil-filled temperature pressure combined sensor |
| CN102507073A (en) * | 2011-10-27 | 2012-06-20 | 威海市天罡仪表股份有限公司 | Pressure and pressure difference combination measurement and communication realization method |
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| CN104122026A (en) | 2014-10-29 |
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