CN104120380A - Mask plate for vapor deposition of organic light emitting display and assembly of mask plate - Google Patents
Mask plate for vapor deposition of organic light emitting display and assembly of mask plate Download PDFInfo
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- CN104120380A CN104120380A CN201310151057.7A CN201310151057A CN104120380A CN 104120380 A CN104120380 A CN 104120380A CN 201310151057 A CN201310151057 A CN 201310151057A CN 104120380 A CN104120380 A CN 104120380A
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Abstract
The invention provides a mask plate for vapor deposition of an organic light emitting display and an assembly of the mask plate. The assembly is composed of the mask plate and a mask outer frame; a mask plate main body forming the mask plate is provided with at least one first opening area and at least two second opening areas, wherein the second opening areas are correspondingly arranged near the two sides of the first opening area, each second opening area comprises at least one opening, the openings forming each second opening area are designed according to a preset rule, and openings forming the first opening area are parallel to the openings forming the corresponding second opening areas. The requirement on even vapor deposition of organic materials in the preparation process of the organic light emitting display can be satisfied well according to the technical scheme.
Description
Technical field
The present invention relates to a kind of mask plate and assembly thereof, be specifically related to mask plate and assembly thereof for a kind of vaporization coating of organic light-emitting display, it belongs to organic light emitting display and manufactures supporting field.
Background technology
Organic light emitting diode (OLED) is self-luminous display device, compare with existing LCD technology, utilizing the made indicating meter of organic light emitting diode technology not only to have can true color, the reaction times is fast, high brightness (100～14,000cd/m2), the above visual angle of high luminous efficiency (16～38lm/W), 170 degree, LCD ghost as none, can be made into large size and flexibility panel, the advantage such as operation in the scopes that can spend at-30 degree～80 Celsius, and processing procedure is simple, integral thickness also can be contracted to below 1mm, and cost more only has 30～40% of TFT-LCD.Therefore, utilizing the made indicating meter of OLED technology to firmly get society welcomes.
The coloring mode of tradition OLED display picture element point has three kinds: three look independence evaporations, color conversion and colour filter method, wherein the mode of three look independence evaporations is simple owing to carrying out, and in current research, occupies dominant position.So-called three look independence evaporations are that red (R), green (G), blue (B) three kinds of organic materialss are deposited on to substrate correspondence by the mode of evaporation
Location of pixels on, thereby three looks are by coordinating the luminous image that forms various high purity image quality.
In the process of three look independence evaporations, need to use a kind of mask plate component, the decomposing schematic representation of described mask plate component as shown in Figure 1, it comprises the framework 20 of mask plate 10 and permanent mask plate 10, and mask plate 10 is fixed on framework 20 by being applied to after the tensile force f of its periphery is tightened.As shown in Figure 2, it consists of some the first open areas 100 floor map of mask plate 10, has 4 the first open areas 100 shown in Fig. 2 on mask plate.Shown in Fig. 3, be the enlarged diagram of a part in Fig. 2, as shown in the figure, the first open area 100 on mask plate 10 is to consist of opening 1000 arrays, and the pattern of opening 1000 is strip (as shown in FIG.).When mask plate 10 peripheries are carried out to the application of force, perpendicular to opening 1000 place directions (being opening 1000 arragement directions) and near the opening 1000 of the first open area frontside edge, due to the singularity of present position, (opening one side is open region herein, opposite side is non-open region) form the sudden change that outer peripheral areas part when stressed of opening 1000 herein can exist power, it can cause developed width size and the theoretical size of a part opening on mask plate 10 to have larger difference, as shown in Figure 3, the opening size of whole openings 1000 of the first open area 100 is all designed to d1, in the process of actually operating, in the limit of error that the size d1 that the opening size of the first open area 100 middle portions can guarantee in design allows, and the opening size d2 of the opening 1000 of close the first open area frontside edge, d3, d4, the d5 relatively opening size d1 of design has larger deviation.
Mask plate 10 as mentioned above, because the opening size width of the opening 1000 perpendicular to opening 1000 place directions and close the first open area frontside edge is inconsistent, and and the deviation between design load is larger, it is when the vapor deposition for organic light emitting display (OLED) substrate, can there is the inhomogeneous even phenomenon of dislocation in formed pixel corresponding with opening 1000, thereby can affect the demonstration image quality of final indicating meter.
For this problem, industry is needed a kind of solution that can overcome this problem badly, thus meet organic light emitting display (OLED) in three look independence evaporate process to precision, inhomogeneity requirement.
Summary of the invention
The present invention aims to provide a kind of mask plate and assembly thereof, to meet in organic light emitting display preparation process the uniform requirement of organic materials vapor deposition.Advantage of the present invention will display in following introduction, and technical scheme provided by the present invention is as follows:
A vaporization coating of organic light-emitting display mask plate, it comprises mask plate main body, in mask plate main body, is formed with: at least one first open area, the first open area is corresponding to organic materials effective deposition regions territory on substrate; And at least two the second open areas, near the both sides that are arranged on the first open area that the second open area is corresponding; Described the second open area comprises and has an opening at least, and the opening that forms the second open area is by default rule design; The opening that forms the first open area is parallel to each other with the opening of described the second corresponding open area.
Further, the first open area is greater than with the spacing between corresponding the second open area the spacing forming between adjacent two openings in the first open area.
Further, form the second open area by the strip that is shaped as of default rule designed openings.
The default rule design that forms the opening of the second open area in the present invention is further unfolded as follows:
The opening shape, the opening size that form opening shape, opening size and formation first open area of the second open area are consistent.
Further, partly or entirely form on the strip opening of the second open area and be provided with some amount for the muscle of connection opening both sides.
As a kind of optimal way of muscle design, for the muscle of connection opening both sides, on corresponding opening, be uniformly distributed, and in having the open area of muscle, the spacing on opening between two adjacent muscle is and increases progressively, successively decreases or constant trend in the direction of aperture distribution.
As the another kind of design of strip opening, the length of strip opening that partly or entirely forms the second open area is inconsistent, and the inconsistent strip opening of described length length in the direction of aperture distribution is the trend that increases progressively, successively decreases.Further, partly or entirely form on the strip opening of the second open area and be provided with some amount for the muscle of connection opening both sides.
The present invention also provides a kind of vaporization coating of organic light-emitting display mask plate component, and it consists of above mask plate and a mask housing, and mask plate is fixed on after tightening on mask housing, and its fixed form can be the bonding or laser welding of glue.
The present invention's the first open area effective area of organic materials evaporation (for) dual-side on mask plate is designed with the second open area, mask plate surrounding is being carried out to the application of force while tightening, near edge, traditional masks plate open area, existing opening size difference is transferred to the second open area.Thereby there is the inhomogeneous even phenomenon of dislocation in the position of avoiding organic materials to be deposited on substrate by mask plate component.
Accompanying drawing explanation
Above-mentioned and/or additional aspect of the present invention and advantage will become from the following description of the accompanying drawings of embodiments and obviously and easily understand, wherein:
Fig. 1 is the exploded view of traditional organic vapor deposition mask plate component;
Fig. 2 is the floor map of traditional masks plate;
Fig. 3 is a part enlarged diagram in Fig. 2;
Fig. 4 is mask plate overall schematic provided by the invention;
Fig. 5 is the enlarged diagram of b part in Fig. 4;
Fig. 6 is the another kind of embodiment of b part in corresponding diagram 4 of the present invention;
Fig. 7 is the another kind of embodiment of b part in corresponding diagram 4 of the present invention;
Fig. 8 is the another kind of embodiment of b part in corresponding diagram 4 of the present invention;
Fig. 9 is the another kind of embodiment of b part in corresponding diagram 4 of the present invention;
Figure 10 is the another kind of embodiment of b part in corresponding diagram 4 of the present invention;
Figure 11 is the another kind of floor map of mask plate provided by the present invention;
Figure 12 is the another kind of floor map of mask plate provided by the present invention;
Figure 13 is the decomposing schematic representation of mask assembly of the present invention;
In figure, 10 is mask plate, and 20 is the framework of permanent mask plate 10, and F is the pulling force that is applied to mask plate 10 peripheries; 100 is the first open area that organic materials evaporation is corresponding, and a is region to be amplified; 1000 for forming the opening of the first open area 100, d1 is the A/F of the first open area 100 region intermediates, d2, d3, d4, d5 are the A/F near the first open area frontside edge perpendicular to opening 1000 place directions, and L is the Distances Between Neighboring Edge Points of the first adjacent two openings 1000 in open area 100; 101 is the second auxiliary open area, and b is the second open area to be amplified, D be the first open area with corresponding the second open area between spacing; 1010 for forming the opening of the second open area 101; D ' is the A/F of opening 1010; 1011 for to be arranged on the muscle on opening 1010, and h1, h2, h3, h4, h5, h6, h7, h8, h9, h10 are the spacing being respectively between adjacent two muscle.
Embodiment
Describe embodiments of the invention below in detail, the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has the element of identical or similar functions from start to finish.Below by the embodiment being described with reference to the drawings, be exemplary, only for explaining the present invention, and can not be interpreted as limitation of the present invention.In addition, in the present invention, " vaporization coating of organic light-emitting display mask plate " can be referred to as " mask plate ", the position that in the present invention, the noun in the expression orientation such as " on ", " in ", D score, " left side ", " right side " only limits to show in figure.
With reference to figure 2, it is the two dimensional structure schematic diagram of mask plate for traditional vaporization coating of organic light-emitting display, and Fig. 3 is a part enlarged diagram on traditional masks plate.As shown in FIG., the first open area 100 on mask plate 10 is to consist of opening 1000 arrays, and the pattern of opening 1000 is strip (so-called strip is that opening pattern is long and narrow), and opening 1000 is corresponding to the position of pixel on display base plate; Certainly, opening 1000 being defined as to the opening 1000 that strip do not refer to mask plate 10 first open areas 100 herein can only be illustrated strip, it can also be designed to other structure, for example: it can arrange the muscle (not shown) of connection opening both sides on strip opening.
As one embodiment of the invention, Fig. 4 is a kind of overall schematic of mask plate provided by the present invention, its mask plate comprises mask plate main body 10, in mask plate main body 10, is formed with: 100, the first open areas 100, a plurality of the first open area are corresponding to organic materials effective deposition regions territory on substrate; And near the both sides that are arranged on the first open area of a plurality of the second open area 101, the second open area 101 correspondences; The opening that forms described the first open area 100 is parallel to each other with the opening that forms described the second corresponding open area 101.
In an embodiment of the present invention, can be understood as the first open area 100 of mask plate of the present invention consistent with the first open area design of traditional mask plate.
As one embodiment of the invention, as shown in Figure 4, to be greater than with space D between corresponding the second open area 101 the spacing L(L order of magnitude forming between the first adjacent two openings in open area 100 be micron level in the first open area 100 of mask plate main body 10 of the present invention).So design is to consider that the organic light emitting display substrate by mask plate vapor deposition need to carry out the design of interlock circuit in effective evaporation area peripheral edge, if the first open area 100 be designed to closely be connected with the second open area 101 (be space D equal spacing L or space D close with spacing L), in the evaporate process of organic materials, organic materials can affect the design of substrate circuit by the second open area 101 formation of deposits invalid organic membrane region on substrate of mask plate.Therefore between the first open area 100 and corresponding the second open area 101, be provided with certain space D, the order of magnitude of space D is in millimeter rank.
Figure 5 shows that the enlarged diagram of b part in Fig. 4, what it was mainly shown is a kind of organigram of the second open area 101, as shown in Figure 5, form the second open area 101 and there is at least one opening 1010, and the arrangement mode that forms the second open area 101 openings 1010 is consistent with the arrangement mode of diagram traditional masks plate the first open area 100 openings 1000, the opening 1010 that forms the second open area 101 is strip structure and forming array structure, the width d1 of the width d ' of its opening and the first open area 100 openings 1000 is on the same order of magnitude, be that d ' is controlled at 0.1<d '/d1<10 with the ratio range of d1.
As a kind of preferred embodiment of the present invention, the width d ' that forms the opening 1010 of the second open area 101 equates with the width d1 of the first open area 100 openings 1000.
It shown in Fig. 6, Fig. 7, is the improvement of the second open area 101 structures in the present invention, on the second open area 101,1010 of part strip openings are provided with the muscle 1011 of connection opening 1010 both sides, muscle 1011 is evenly distributed in 1010 of corresponding openings, as shown in the figure, on opening 1010, the spacing h1 between adjacent two muscle 1011 is identical.
Embodiment shown in Fig. 6 more specifically can be expressed as: the muscle 1011 that is provided with connection opening 1010 left and right sides (orientation shown in figure) on the opening 1010 of the second open area 101 left-hand components, muscle 1011 is evenly distributed in 1010 of corresponding openings, and on each opening 1010, the spacing h of muscle equates.
Embodiment shown in Fig. 7 more specifically can be expressed as: on the opening 1010 of the second open area 101 left-hand components, be provided with the muscle 1011 of connection opening 1010 both sides, muscle 1011 is evenly distributed in 1010 of corresponding openings.On the distribution arrangement of opening, spacing on opening 1010 between adjacent two muscle 1011 is from left to right and increases progressively relation, as shown in Figure 7, on adjacent two openings, spacing h2, the h3 of muscle pass is: h2<h3, the spacing of other position muscle by that analogy.Certainly, as another embodiment of the invention, the increasing progressively of the adjacent two muscle spacing shown in Fig. 7 is related to that design can also be designed to successively decrease and is related to (not shown).
As some embodiments of the present invention, the design of opening of the present invention can also be done following improvement: as shown in Figure 8, the second 101 tops, open area divides the length of opening inconsistent, be the length that opening 1010 length of left-hand component are not more than right-hand component opening 1010, and on the arragement direction of opening 1010 (from left to right), the length of opening is and increases progressively relation.
On the basis of above embodiment, the present invention is directed to the second open area 101 further improves as follows: as shown in Figure 9, Figure 10, part forms on the opening 1010 of the second open area 101 and is provided with muscle 1011, and muscle 1011 is arranged on corresponding opening 1010 uniformly.On the distribution arrangement of opening 1010, the spacing between adjacent two muscle 1011 remains unchanged (as shown in Figure 9) or spacing is arranged by default rule.A kind of default rule is as shown in figure 10: from left to right in direction, spacing between adjacent two muscle 1011 first remains unchanged, increase gradually until the opening part of muscle is not set, on opening, the spacing between two muscle has following relation: h4=h5=h6=h7=h8< h9< h10 again.
As some embodiments of the present invention, in the present invention, the second open area 101 is symmetricly set on corresponding 100 both sides, the first open area, as shown in Figure 4.
Figure 11, Figure 12 are two kinds of structural representations of mask plate of the present invention.In Figure 11, on the arragement direction of opening, the first adjacent open area 100 shares same the second open area 101; In Figure 12, the opening arrangement mode that forms the first open area 100 on mask plate 10 is inconsistent, and on it, the second open area 101 matches with the first corresponding open area 100.
Shown in Figure 13 for the decomposing schematic representation of mask assembly of the present invention, it comprises mask plate 10 and a mask housing 20, mask plate 10 stretches tight after flat and is fixed on mask housing 20 by apply tensile force f at its periphery, and its fixed form can be the bonding or laser welding of glue.
Above embodiment is only the embodiment of exemplary of the present invention, and the simple change that those skilled in the art are made by it or equivalence are replaced and all dropped in protection scope of the present invention without the scheme of substance innovation.
Claims (9)
1. a vaporization coating of organic light-emitting display mask plate, it comprises mask plate main body, it is characterized in that, in described mask plate main body, is formed with:
At least one first open area, described the first open area is corresponding to organic materials effective deposition regions territory on substrate;
And at least two the second open areas, near the both sides that are arranged on described the first open area corresponding to described the second open area, described the second open area comprises and has an opening at least, and the opening that forms described the second open area is by default rule design;
The opening that forms described the first open area is parallel to each other with the opening that forms described the second corresponding open area.
2. vaporization coating of organic light-emitting display mask plate according to claim 1, is characterized in that, described the first open area is greater than with the spacing between described the second corresponding open area the spacing forming between adjacent two openings in described the first open area.
3. vaporization coating of organic light-emitting display mask plate according to claim 2, is characterized in that, forms described the second open area by the strip that is shaped as of described default rule designed openings.
4. vaporization coating of organic light-emitting display mask plate according to claim 3, is characterized in that, the opening shape, the opening size that form described first open area of opening shape, opening size and formation of described the second open area are consistent.
5. vaporization coating of organic light-emitting display mask plate according to claim 3, is characterized in that, partly or entirely forms on the strip opening of described the second open area and is provided with some amount for the muscle of connection opening both sides.
6. vaporization coating of organic light-emitting display mask plate according to claim 5, it is characterized in that, the described muscle for connection opening both sides is uniformly distributed on corresponding opening, and in having the open area of muscle, on opening, described in adjacent two, the spacing between muscle is and increases progressively, successively decreases or constant trend in the direction of aperture distribution.
7. vaporization coating of organic light-emitting display mask plate according to claim 3, it is characterized in that, partly or entirely the length of the strip opening of described the second open area of formation is inconsistent, and the inconsistent strip opening of described length length in the direction of aperture distribution is the trend that increases progressively, successively decreases.
8. vaporization coating of organic light-emitting display mask plate according to claim 7, is characterized in that, part forms on the strip opening of described the second open area and is provided with some amount for the muscle of connection opening both sides.
9. a vaporization coating of organic light-emitting display mask plate component, it comprises:
According to claim 1-8 mask plate described in any one, and a mask housing,
It is characterized in that, described mask plate is fixed on after tightening on mask housing, and its fixed form can be the bonding or laser welding of glue.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310151057.7A CN104120380A (en) | 2013-04-27 | 2013-04-27 | Mask plate for vapor deposition of organic light emitting display and assembly of mask plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310151057.7A CN104120380A (en) | 2013-04-27 | 2013-04-27 | Mask plate for vapor deposition of organic light emitting display and assembly of mask plate |
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| CN104120380A true CN104120380A (en) | 2014-10-29 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201310151057.7A Pending CN104120380A (en) | 2013-04-27 | 2013-04-27 | Mask plate for vapor deposition of organic light emitting display and assembly of mask plate |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017117999A1 (en) * | 2016-01-06 | 2017-07-13 | 京东方科技集团股份有限公司 | Metal mask plate and manufacturing method therefor |
| CN109487206A (en) * | 2018-12-11 | 2019-03-19 | 武汉华星光电半导体显示技术有限公司 | Mask plate and the mask device for using the mask plate |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1510971A (en) * | 2002-11-29 | 2004-07-07 | �����ձ������ƶ���ʾ��ʽ���� | Evaporation mask and method for manufacturing organic electroluminescent device thereby |
| CN203320116U (en) * | 2013-04-27 | 2013-12-04 | 昆山允升吉光电科技有限公司 | Mask plate for vapor deposition of organic light emitting display and assembly with mask plate |
-
2013
- 2013-04-27 CN CN201310151057.7A patent/CN104120380A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1510971A (en) * | 2002-11-29 | 2004-07-07 | �����ձ������ƶ���ʾ��ʽ���� | Evaporation mask and method for manufacturing organic electroluminescent device thereby |
| CN203320116U (en) * | 2013-04-27 | 2013-12-04 | 昆山允升吉光电科技有限公司 | Mask plate for vapor deposition of organic light emitting display and assembly with mask plate |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017117999A1 (en) * | 2016-01-06 | 2017-07-13 | 京东方科技集团股份有限公司 | Metal mask plate and manufacturing method therefor |
| US10604833B2 (en) | 2016-01-06 | 2020-03-31 | Boe Technology Group Co., Ltd. | Metal mask plate and fabrication method thereof |
| CN109487206A (en) * | 2018-12-11 | 2019-03-19 | 武汉华星光电半导体显示技术有限公司 | Mask plate and the mask device for using the mask plate |
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Application publication date: 20141029 |