CN104118658A - Box used for storing substrates and provided with cotton ropes - Google Patents

Box used for storing substrates and provided with cotton ropes Download PDF

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Publication number
CN104118658A
CN104118658A CN201310148394.0A CN201310148394A CN104118658A CN 104118658 A CN104118658 A CN 104118658A CN 201310148394 A CN201310148394 A CN 201310148394A CN 104118658 A CN104118658 A CN 104118658A
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CN
China
Prior art keywords
substrate
supporting member
connecting frame
tensioning
loading
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Pending
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CN201310148394.0A
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Chinese (zh)
Inventor
金佐谦
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GSE CO Ltd
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GSE CO Ltd
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Priority to CN201310148394.0A priority Critical patent/CN104118658A/en
Publication of CN104118658A publication Critical patent/CN104118658A/en
Pending legal-status Critical Current

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Abstract

The invention discloses a box used for storing substrates, in particular to a box used for storing substrates and provided with cotton ropes. Multiple substrates can be vertically stored in the box at preset intervals, under the condition that an independent clamping device is not used, the substrates are vertically maintained and supported so as to be prevented from falling off, moreover, the substrates can be thinner and bigger, and damage on the substrates due to breaking in the processing period is minimized.

Description

For loading the box body with cotton rope of substrate
Technical field
The present invention relates to a kind of for loading the box body of substrate, more specifically, relate to a kind of for loading the box body with cotton rope of substrate, this box body can be assembled into preset distance spaced apart by multiple substrates vertically, independent holding device, keep vertically and support this substrate so that it does not drop in the case of not using, even and this substrate is thinner and larger, the damage that also can make substrate cause because of breaking between processing period minimizes.
Background technology
For kinds of processes is applied to substrate, need a kind of for keeping or load the device of substrate.This substrate that is kept or is loaded experiences the kinds of surface treatment process such as clean, etching etc. in chamber.
Depend primarily on the quantity of the substrate of processing in the given time to work efficiency clean or that etching is relevant.That is to say, in order to improve this work efficiency, the quantity that the substrate of clean or etching is experienced in increase is in the given time important.
Therefore, need to during a course of processing, process multiple substrates simultaneously.For this reason, also need a kind of box body that can load multiple substrates.
This need to have a kind of structure that can load multiple substrates for loading the box body of substrate, thereby while making make supporting or keep substrate, substrate is caused the minimizing possibility of damage, and corresponding with the size of multiple substrate.
A kind of document (korean patent application No.10-2010-0079158) that had previously been called " for the box body of the etching of glass " by the applicant in name on August 17th, 2010 for the relevant box body that loads substrate is filed an application.The box body for etching glass substrate of earlier application has very large from main effect, but has the structure that clamps the opposite side of this substrate in a kind of bottom of the substrate vertically loading in supporting.
But, aforesaid have following shortcoming for loading the box body of substrate,, the structure that is used for the opposite side of clamping substrate is slightly complicated, and when shifting the substrate being loaded in vertically in box body to add man-hour, be thinner and larger by this substrate, therefore, this substrate is vibrated and is rocked.Thus, during the course of processing, this large and thin substrate is easy to break.
Therefore,, for large and thin substrate, need a kind of for making the vibration of substrate during the course of processing and rocking minimized structure.In addition, this additional structure should not hinder substrate load is taken out in box body or by substrate from box body.
Summary of the invention
Therefore, the present invention imagines solution foregoing problems, and an aspect of of the present present invention is to provide a kind of for loading the box body with cotton rope of substrate, this box body can be assembled into preset distance spaced apart by multiple substrates vertically, in the case of not using independent holding device, keep vertically and bearing substrate so that its do not drop, even and substrate be thinner and larger, the caused damage of breaking during also can making substrate by the course of processing minimizes.
According to a kind of illustrative embodiments of the present invention, provide a kind of for loading the box body with cotton rope of substrate, this box body comprises: load frame, it forms by vertically connecting multiple unit rectangular frame; Lateral support unit, it prevents that each substrate loading vertically to bottom from top in load frame from dropping; And bottom supporting unit, it is arranged on the bottom of also supporting the each substrate vertically loading in the interior bottom of load frame, this lateral support unit comprises: multiple tensionings keep supporting member, it is in a row that these multiple tensionings keep supporting members to arrange on the first connecting frame and the second connecting frame, the first connecting frame and the second connecting frame among four connecting frames of Component units rectangular frame perpendicular to the substrate setting of vertically loading; And this cotton rope, this cotton rope keeps supporting member and is arranged on when each tensioning on the second connecting frame keeps on supporting member, keeping tensioning being wrapped in the each tensioning being arranged on the first connecting frame, and adjacent with the both sides of the substrate of each vertical loading.
Lateral support unit can further comprise gusset piece, and each gusset piece is provided with tensioning in a row thereon and keeps supporting member, and is removably attached to respectively the first connecting frame and the second connecting frame.
Lateral support unit can be arranged in each unit rectangular frame.
Being wrapped in the each tensioning being arranged in the first connecting frame keeps supporting member and is arranged on each tensioning in the second connecting frame keeping cotton rope on supporting member can comprise vertically isolated cotton rope of single cotton rope or at least two.
Bottom supporting unit can comprise and keeps supporting member and contact supporting member, this maintenance supporting member on even keel is arranged in the inner underside of load frame, this contact supporting member is attached to the bottom that keeps supporting member the vertical substrate loading of contact supporting, wherein, it is long and treating to be formed with the long groove that contacts in the part contacting with substrate that contact supporting member is arranged to along the longitudinal direction of the bottom of substrate, and this engagement concavity groove is formed with the multiple drain gutters along depth direction.
Brief description of the drawings
By the description of illustrative embodiments being made below in conjunction with accompanying drawing, above-mentioned and/or other side of the present invention will become obviously and be understandable, wherein:
Fig. 1 be according to one embodiment of the present invention for loading the block diagram of the box body with cotton rope of substrate;
Fig. 2 show according to one embodiment of the present invention for loading the view of the lateral support unit that the box body with cotton rope of substrate uses;
Fig. 3 show according to one embodiment of the present invention for loading another view of the lateral support unit that the box body with cotton rope of substrate uses;
Fig. 4 be according to one embodiment of the present invention for loading the block diagram of the bottom supporting unit that the box body with cotton rope of substrate uses; And
Fig. 5 be according to one embodiment of the present invention for loading the exploded perspective view of the height adjustment unit that the box body with cotton rope of substrate uses.
Detailed description of the invention
About the problems referred to above, object and effect, below with reference to accompanying drawings the illustrative embodiments for the box body with cotton rope that loads substrate according to the present invention is described.
In addition,, for clear and convenient, size, the shape etc. of the element shown in accompanying drawing can be exaggerated.In addition the term specifically limiting in the time considering configuration of the present invention and operation, can be according to user and operator's intention or custom change.The definition of these terms must be based on described in this specification sheets content.
Fig. 1 be according to one embodiment of the present invention for loading the block diagram of the box body with cotton rope of substrate.As shown in fig. 1, comprise load frame 10 according to one embodiment of the present invention for loading the box body of substrate; Lateral support unit 20, it drops for preventing each substrate 1 vertically loading from top to bottom; And bottom supporting unit 30, it is arranged on each bottom of the interior bottom of load frame 10 substrate 1 that supporting is vertically loaded.
As shown in fig. 1, this load frame 10 connects multiple unit rectangular frame 11 by the vertical direction and forms.Particularly, these multiple unit rectangular frame 11 in the vertical directions are set to spaced apart preset distance, and connect by vertical connecting frame 13, thereby form this load frame 10.
The each unit rectangular frame 11 that forms load frame 10 forms by connecting four connecting frames.Particularly, each unit rectangular frame 11 comprises that two are vertically arranged at the connecting frame that vertically each substrate 1 of loading arranges from top to bottom, and two connecting frames that arrange abreast with each substrate 1.
Hereinafter, two connecting frames that are vertically arranged at each substrate 1 being loaded into vertically in load frame 10 will be referred to as the first connecting frame 11a and the second connecting frame 11b, and will be referred to as the 3rd connecting frame 11c and the 4th connecting frame 11d with two connecting frames that each substrate 1 arranges abreast.Now, the first connecting frame 11a and the second connecting frame 11b are set to face with each other abreast, and the 3rd connecting frame 11c and the 4th connecting frame 11d are also set to face with each other abreast.
In the load frame 10 of as above constructing, lateral support unit 20 is formed as preventing that the substrate 1 vertically loading from dropping.That is to say, this lateral support unit 20 prevents that each substrate 1 being loaded in vertically from top to bottom load frame 10 from dropping.
The bottom of the substrate 1 of meanwhile, being kept upright by lateral support unit 20 is supported by bottom supporting unit 30.That is to say each bottom of the substrate 1 that this bottom supporting unit 30 is arranged in the interior bottom of load frame 10 and supporting is vertically loaded.
As mentioned above, substrate 1 is supported by bottom supporting unit 30 in its bottom place, and prevents that by lateral support unit 20 it from dropping, and makes to make substrate 1 to be kept upright in load frame 10.
The lateral support unit 20 that each substrate 1 that prevents from vertically loading from top to the bottom of load frame 10 drops does not clamp and fixed substrate 1 not, but substrate 1 is kept upright.
As above the lateral support unit 20 working comprises and is separately positioned in the first connecting frame 11a and the second connecting frame 11b and the tensioning corresponding to each other keeps supporting member 21, and cotton rope 23 is wrapped in corresponding tensioning and keeps on supporting member 21 and keep tensioning (with reference to Fig. 1).
Particularly, it is in a row that multiple tensionings of formation lateral support unit 20 keep supporting members 21 to arrange on the first connecting frame 11a and the second connecting frame 11b, and this first connecting frame 11a and this second connecting frame 11b arrange perpendicular to the substrate 1 vertically loading among four connecting frames of Component units rectangular frame 11.
That is to say, multiple tensionings keep supporting member 21 on the first connecting frame 11a facing with each other and the second connecting frame 11b, to arrange in a row.In addition, tensioning in a row being set in each in the first connecting frame 11a and the second connecting frame 11b keeps supporting member 21 spaced apart with preset distance each other.
In addition, each tensioning in a row being set on the first connecting frame 11a keeps supporting member 21 and each tensioning in a row is set on the second connecting frame 11b keeping supporting member 21 to be arranged to face with each other and corresponding one by one each other.
Now, tensioning in a row is set in each in the first connecting frame 11a and the second connecting frame 11b and keeps the distance between supporting member 21 can equal to be vertically loaded in the distance between the substrate 1 in load frame 10, and quantity that tensioning in a row keeps supporting member 21 is set can equals to be vertically loaded in the quantity of the substrate 1 in load frame 10 in each in the first connecting frame 11a and the second connecting frame 11b.
Therefore, be vertically loaded in the substrate 1 in load frame 10 quantity, be arranged on tensioning on the first connecting frame 11a and keep the quantity of supporting member 21 and be arranged on tensioning on the second connecting frame 11b that to keep the quantity of supporting member 21 be all identical.
Meanwhile, cotton rope 23 is wrapped in the tensioning being arranged on the first connecting frame 11a and keeps on supporting member 21 and be arranged on the corresponding tensioning maintenance supporting member 21 on the second connecting frame 11, and keeps tensioning.
Particularly, the cotton rope 23 that forms lateral support unit 20 had not only been wrapped in the tensioning being arranged on the first connecting frame 11a and has kept on supporting member 21 but also be wrapped in that to be arranged on the second connecting frame 11b upper and keep the corresponding tensioning of supporting member 21 to keep on supporting member 21 with the tensioning being arranged on the first connecting frame 11a, and kept thus tensioning.
That is to say, the cotton rope 23 that forms lateral support unit 20 keeps on supporting member 21 but also is wrapped in being arranged on the second connecting frame 11b and when tensioning on the first connecting frame 11a keeps the corresponding tensioning of supporting member 21 to keep on supporting member 21, keeping tensioning with being arranged on being not only wrapped in the tensioning being arranged on the first connecting frame 11a.
Thus, being not only wrapped in the tensioning being arranged on the first connecting frame 11a keeps on supporting member 21 but also is wrapped in the tensioning being arranged on the second connecting frame 11b keeping the cotton rope 23 on supporting member 21 adjacent with the both sides that are vertically loaded in the each substrate 1 in load frame 10.
Cotton rope 23 is configured as to be similar to since the tensioning on the first connecting frame 11a and keeps supporting member 21, the tensioning being wrapped on the second connecting frame 11b along a side of substrate 1 keeps on supporting member 21, and is again connected to the ring of the tensioning maintenance supporting member 21 on the first connecting frame 11a along the opposite side of substrate 1.
In other words the substrate 1, vertically loading is placed in the section being formed by cotton rope 23.Therefore, cotton rope 1 is adjacent with the both sides of the substrate 1 vertically loading.
The section being limited by the cotton rope 23 of the both sides around substrate 1 depends on that the tensioning that is wound with cotton rope 23 on its of the first connecting frame 11a and the second connecting frame 11b keeps the diameter of supporting member 21.That is to say, if this tensioning keeps supporting member 21 to have relatively large diameter, the section of the both sides around substrate 1 of cotton rope 23 can become wider so.On the other hand, if this tensioning keeps supporting member 21 to have relatively little diameter, the section of the both sides around this substrate 1 of cotton rope 23 can become narrower so.
Substrate 1 loads vertically through the section being limited by cotton rope 23.Therefore, the interior zone being limited by the cotton rope 23 of the both sides around substrate 1 must widely for example load this substrate 1(to being easy in the vertical direction, wider approximately 1.5 to 3 times than the thickness of substrate 1).
But, if the interior zone being limited by the cotton rope 23 of the both sides around substrate 1 is wide, make so the substrate 1 that is surrounded with cotton rope 23 move significantly in a lateral direction, and thus may be impaired owing to rocking.Thus, can suitably keep being arranged on the gap (for example, wide approximately 1.5 to 3 times than the thickness of substrate 1) between the cotton rope 23 on the both sides of each substrate 1.
The substrate 1 that above-mentioned lateral support unit 20 prevents from being loaded in load frame 10 drops, and makes to make substrate 1 to be kept upright.
In addition, aforesaid do not clamp and not fixed substrate 1 two edges but the structure that supports its both sides is favourable for making substrate 1 by the minimizing possibility impaired due to vibration.
Meanwhile, with reference to the tensioning of the formation lateral support unit 20 described in Fig. 1 keep supporting member 21 fastened live and be arranged on the first connecting frame 11a and the second connecting frame 11b of Component units rectangular frame 11.
But, along with change is loaded in the space between quantity and the substrate of the substrate 1 in load frame 10, can change equally tensioning and keep the quantity of supporting member 21 and the space between them.
Therefore,, adjusting under the state in the space between tensioning maintenance supporting member 21, tensioning can be kept supporting member 21 to be attached to the first connecting frame 11a and the second connecting frame 11b of Component units rectangular frame 11, and tensioning can be kept supporting member 21 unload from it.
For example, tensioning can be kept supporting member 21 be directly attached to the first connecting frame 11a of Component units rectangular frame 11 and the second connecting frame 11b and tensioning can be kept supporting member 21 unload from it, and capable of regulating tensioning subsequently keep space between supporting member and tensioning to keep the quantity of supporting member.
In addition, as shown in Figure 2, the gusset piece 25 that is provided at predetermined intervals the tensioning maintenance supporting member 21 of predetermined quantity on it is attached to the first connecting frame 11a and the second connecting frame 11b of Component units rectangular frame 11, thereby prepares in the space between the quantity of the substrate 1 in load frame to be for a change loaded in 10 and change substrate.
Particularly, as shown in Figure 2, this lateral support unit 20 can further comprise gusset piece 25, and this gusset piece 25 is provided with and tensioning maintenance supporting member 21 in a row is set and is removably attached to the first connecting frame 11a and the second connecting frame 11b.
Being arranged on tensioning on gusset piece 25 keeps the quantity of supporting member 21 and tensioning to keep space between supporting member 21 can correspond respectively to the space between quantity and the substrate 1 of the substrate 1 being loaded in load frame 10.
Lateral support unit 20 with reference to Fig. 1 and Fig. 2 description is arranged at least one in the unit rectangular frame 11 that forms load frame 10.
For substrate 1 is minimized because of the damage that is loaded in the vibration of the substrate 1 in load frame 10 and causes, lateral support unit 20 can be arranged at least two in unit rectangular frame 11, maybe lateral support unit 20 can be separately positioned on all unit rectangular frame 11.
Thus, lateral support unit 20 is arranged in the unit rectangular frame 11 vertically connecting respectively, and the substrate 1 that makes to be loaded in load frame 10 can be supported on multiple positions vertically.As a result, rocking of substrate 1 minimized, and make to cause due to vibration the minimizing possibility of damage.
Meanwhile, Fig. 1 and Fig. 2 show a described only cotton rope 23 that forms lateral support unit 20 are wrapped on the tensioning maintenance supporting member 21 of the first connecting frame 11a and the tensioning maintenance supporting member 21 of the second connecting frame 11b.
As selection, as shown in Figure 3, the tensioning that two of being spaced apart from each other vertically or many cotton ropes 23 can be wrapped in to the first connecting frame 11a keeps the tensioning of supporting member 21 and the second connecting frame 11b to keep on supporting member 21.Thus, if use two or many cotton ropes, can make so rocking and vibrate further and reducing of substrate 1.
In simple terms, being wrapped in each tensioning maintenance supporting member 21 of the first connecting frame 11a and each tensioning of the second connecting frame 11b keeps the cotton rope 23 on supporting member 21 to be realized or to be realized by least two cotton ropes 23 that are spaced apart from each other vertically as shown in Figure 3 by single line rope 23 as shown in Figures 1 and 2.
Referring to figs. 1 through Fig. 3, it is cylindrical that the tensioning of lateral support unit 20 keeps supporting member 21 to be configured as being substantially similar to, and be formed with the groove 21a that prevents that cotton rope 23 from moving.That is to say, tensioning keeps supporting member 21 to be formed with the groove 21a caving in along the part that is wound with cotton rope 23 on it, makes to be wrapped in tensioning and keeps the cotton rope 23 on supporting member 21 can stably be maintained and can not depart from.
By aforementioned lateral bearing unit 20, the substrate 1 being loaded in load frame 10 can be kept upright and can not be dropped, and makes substrate 1 by owing to rocking or vibration and impaired minimizing possibility.
, drop even if aforementioned lateral bearing unit 20 prevents substrate 1 meanwhile, also need the bottom of bearing substrate 1 so that substrate 1 in the vertical direction that maintenance has been loaded is upright.
As shown in fig. 1, bottom supporting unit 30 is arranged in the interior bottom of load frame 10, and supporting is vertically from top to the bottom of bottom-loading substrate 1.
As shown in Figure 4, bottom supporting unit 30 comprises the maintenance supporting member 31 in the inner underside that is horizontally set on load frame 10, and is attached to this maintenance supporting member 31 the vertically contact supporting member 33 of the bottom of the substrate 1 of loading of contact supporting.It is long that this contact supporting member 33 is arranged to along the longitudinal direction of the bottom of substrate 1, and treating to be formed with in the part contacting with substrate the long groove 33a that contacts.This contact groove 33a is formed with the multiple drain gutters along depth direction.
Keep supporting member 31 to be secured to and to be arranged in load frame 10, and can be moving up and down.That is to say, keep the height of supporting member 31 to adjust by height adjustment unit 50 after a while to be stated.Therefore, keep supporting member 31 can be fixed and be arranged in this framework, not move, or can be fixed to this height adjustment unit 50 and adjust height by this height adjustment unit 50.
Contact supporting member 33 is attached to the structure that keeps supporting member 31 and have the bottom that can stably support the substrate vertically loading.Therefore, as shown in Figure 5, it is long that contact supporting member 33 is arranged to along the longitudinal direction of substrate 1, so that the bottom of contact bearing substrate 1.
Contact supporting member 33 is formed with long contact groove 33a in the part of the bottom of contact substrate 1, so that bottom stable and that this substrate 1 is supported in contact securely.Therefore, the bottom of this substrate is arranged to contact contact grooves with this, makes firmly and stably to support this substrate.
Meanwhile, when carrying out when being loaded in substrate in box body and spraying the special process of etching liquid, this etching liquid is known from experience and is remained in this contact groove 33a.Therefore, the bottom of substrate can be by overetch, and the side production causing due to etching can remain in this contact groove.
Therefore, as shown in Figure 4, contact groove 33a is formed with the multiple drain gutter 33b along depth direction.These multiple drain gutter 33b are spaced apart with preset distance each other.Because all etching liquid or side production are all discharged downwards by this drain gutter 33b, therefore, prevent from residually not wishing that the etching liquid or the side production that obtain are possible.
Meanwhile, bottom supporting unit 30 can be fixed to and be arranged in load frame 10, maybe can be fixed to height adjustment unit 50 and be arranged to vertically to adjust height.This height adjustment unit 50 is placed on the below of bottom supporting unit 30 and makes it possible to adjust the height of this bottom supporting unit 30.
Fig. 5 is the exploded perspective view of height adjustment unit.As shown in Figure 5, this height adjustment unit comprises vertical pedestal 51 and height arm control, and this height arm control has the one end that is attached to slidably this vertical pedestal 51 and the other end that is attached to bottom supporting unit 30.
As shown in Figure 5, multiple vertical pedestals 51 along its length or Width be formed on the inner bottom part of framework, and each vertical pedestal 51 is all configured as and is similar to the vertical plate vertically stretching out.Be configured as on the transverse side of vertical pedestal 51 that is similar to vertical plate, be vertically formed with multiple the first height adjustment hole 51a.
One end of this height arm control has the structure that can slide on vertical pedestal 51.That is to say, as shown in Figure 5, the lower end of this height arm control is inserted in this vertical pedestal and is moving up and down.In addition, be formed with a through hole 53b, this through hole 53b has the similar shape with the first height adjustment hole 51a.
Therefore,, in the time that the first fastener 51b is attached to through hole 53b and the first height adjustment hole 51a, the lower end of this height arm control can be stably attached to this vertical pedestal 51.In addition, multiple the first height adjustment hole 51a that connect with through hole 53b are made differently and being selected by the first fastener 51b, make the position of this height arm control of capable of regulating.As a result, the height of bottom supporting unit 30 of adjusting the upper end (other end) that is attached to this height arm control is possible.
As shown in Figure 5, the concrete structure of height arm control comprises the first height arm control 53 and the second height arm control 55, this first height arm control 53 be can on vertical pedestal 51, slide up and down and can adjust height by the first fastener 51b, this second height arm control 55 has one end of the upper end that is attached to the first height arm control 53 and is attached to the other end of bottom supporting unit 30.
The first height arm control 53 has and is vertically inserted in slidably the lower end in baseplate, and is its height of capable of regulating thus.For this reason, as mentioned above, the first height arm control 53 is formed with through hole 53b, and the first fastener 51b is by a thread connection in through hole 53b and multiple the first height adjustment hole 51a.
In the upper end of the first height arm control 53, multiple the second height adjustment groove 53a are vertically formed.The lower end of the second height arm control 55 is attached to the second height adjustment groove 53a by the second fastener 55a.The lower end of the second height arm control 55 is formed with a connection holes 55b.As a result, the second fastener 55a is connected one in connection holes 55b and multiple the second height adjustment groove 53a, makes the height of capable of regulating the second height arm control 55 and this second height arm control 55 is attached to the upper end of the first height arm control 53.
If the upper end of the second height arm control 55 utilizes multiple fastening method and is attached to bottom supporting unit 30, and the first height arm control 53 and bottom supporting unit 30 are connected in predetermined height by the second height arm control 55, just adjust the height of the supporting member 57 that connects the upper end of the first adjuster and the bottom of bottom supporting unit, thereby prevent that bottom supporting unit 30 from sinking.
As mentioned above, the height of bottom supporting unit 30 is adjusted by height adjustment unit, thereby even if make to change the size of the substrate in box body to be loaded in, is also easy to varying sized accordingly.
Meanwhile, aforementioned can be by individually for carrying out the function of box body for the box body with cotton rope that loads substrate, or multiple box bodys can be connected to each other and use and act on the box body that loads large size substrate.That is to say, the box body for loading substrate that utilizes cotton rope of Fig. 1 is connected in series or in parallel, and reconstitutes thus large-sized box body.In this case, not only many substrates but also the substrate with different size all can be loaded in box body.
According to one embodiment of the present invention, aforesaidly can multiple substrates be assembled into preset distance spaced apart vertically for the box body with cotton rope that loads substrate, in the case of not using independent holding device, vertically keep and bearing substrate so that its do not drop, even and substrate becomes thinner and larger, also make substrate because the caused damage of breaking between processing period minimizes.
In addition, for supporting the whole bottom of this substrate of bottom supporting unit contact supporting of bottom of substrate of vertical loading, thereby even if vibration box body also stably supports this substrate.In addition, this bottom supporting unit is provided with multiple holes in contact part office, thereby prevents that etching liquid from remaining in this contact portion and preventing from exceedingly carrying out etching at the lower end of this substrate.
Although illustrated and described several illustrative embodiments of the present invention, but one of ordinary skill in the art will be understood that, in the situation that not departing from principle of the present invention and spirit, can make change to these embodiments, wherein, scope of the present invention is defined in claims and their equivalent embodiment.

Claims (5)

1. for loading a box body with cotton rope for substrate, comprising:
Load frame, described load frame forms by vertically connecting multiple unit rectangular frame;
Lateral support unit, described lateral support unit prevents that each substrate loading vertically to bottom from top in described load frame from dropping; And
Bottom supporting unit, described bottom supporting unit is arranged on the bottom of also supporting the each described substrate vertically loading in the interior bottom of described load frame,
Described lateral support unit comprises:
Multiple tensionings keep supporting member, it is in a row that described multiple tensioning keeps supporting member to be set up on the first connecting frame and the second connecting frame, described the first connecting frame and described the second connecting frame among four connecting frames that form described unit rectangular frame perpendicular to the described substrate setting of vertically loading; And
Described cotton rope, described cotton rope keeps supporting member and is arranged on when each tensioning on described the second connecting frame keeps on supporting member, keeping tensioning being wrapped in the each tensioning being arranged on described the first connecting frame, and adjacent with the both sides of the described substrate of each vertical loading.
2. according to claim 1 for loading the box body with cotton rope of substrate, wherein, described lateral support unit further comprises gusset piece, is provided with described tensioning in a row and keeps supporting member and be removably attached to respectively described the first connecting frame and described the second connecting frame on each gusset piece.
3. according to claim 1 and 2 for loading the box body with cotton rope of substrate, wherein, described lateral support unit is arranged in each unit rectangular frame.
4. according to claim 1 and 2 for loading the box body with cotton rope of substrate, wherein, being wrapped in the each tensioning being arranged in described the first connecting frame keeps supporting member and is arranged on each tensioning in described the second connecting frame keeping described cotton rope on supporting member to comprise vertically isolated cotton rope of single cotton rope or at least two.
5. according to claim 1 for loading the box body with cotton rope of substrate, wherein, described bottom supporting unit comprises and keeps supporting member and contact supporting member, described maintenance supporting member on even keel is arranged in the inner underside of described load frame, described contact supporting member is attached to described maintenance supporting member the vertically bottom of the described substrate of loading of contact supporting, wherein, it is long and treating to be formed with the long groove that contacts in the part contacting with described substrate that described contact supporting member is arranged to along the longitudinal direction of the bottom of described substrate, and described engagement concavity groove is formed with the multiple drain gutters along depth direction.
CN201310148394.0A 2013-04-25 2013-04-25 Box used for storing substrates and provided with cotton ropes Pending CN104118658A (en)

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JP2002087470A (en) * 2000-09-14 2002-03-27 Pfu Ltd Structure of cushioning material
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Publication number Priority date Publication date Assignee Title
CN106824957A (en) * 2015-12-07 2017-06-13 镇江荣德新能源科技有限公司 Cleaning gauze sheet loading attachment

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