CN104109061B - A kind of electronics grade chemical reagents purification devices - Google Patents
A kind of electronics grade chemical reagents purification devices Download PDFInfo
- Publication number
- CN104109061B CN104109061B CN201310222436.0A CN201310222436A CN104109061B CN 104109061 B CN104109061 B CN 104109061B CN 201310222436 A CN201310222436 A CN 201310222436A CN 104109061 B CN104109061 B CN 104109061B
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- Prior art keywords
- reagent
- ion
- storage tank
- room
- deionization
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/50—Improvements relating to the production of bulk chemicals
- Y02P20/582—Recycling of unreacted starting or intermediate materials
Abstract
The invention discloses a kind of electron chemistry reagent purification device, including material storage tank, deionization switch room, circulating pump, I grades of continuous electric field deionization room, II grades of continuous electric field deionization room, high ion concentration reagent reservoirs, low ion concns storage tank, high purity chemical reagents storage tank；The material storage tank, the circulating pump, the deionization switch room, the I grades of continuous electric field deionization room, the II grades of continuous electric field deionization room, the high ion concentration reagent reservoirs, the low ion concns storage tank, the high purity chemical reagents storage tank are linked in sequence.The present invention is treatment electron chemistry reagent intermediate ion, and the ion concentration in chemical reagent after treatment is less than 1ppb, has reached the requirement of EMI C8.
Description
Technical field
The present invention relates to chemical reagent purifier apparatus field, and in particular to a kind of electronics grade chemical reagents purification devices.
Background technology
In semiconductor production process, silicon wafer can usually be polluted by different impurity, and these impurity can cause silicon wafer
Yield declines.In order to obtain the IC chip of high-quality, high yield, it is necessary to remain that silicon wafer is cleaned, especially exist
(such as diffusion, epitaxial growth and chemical gaseous phase deposition) before high-temperature process.Because the light metal such as sodium, potassium, magnesium, iron impurity expands
Dissipating and be quickly moved to the beavy metal impurities such as negative electrical charge region, gold, silver, copper can dissolve in silica oxide layer in temperature drop
In, so as to the performance of semiconductor devices can be influenceed；The foreign ions such as boron, phosphorus, arsenic can influence the diffusion effect of diffusant；Small dirt
Angstrom particle can cause the electric faults such as line short or open circuit.
Therefore chemical reagent cleaning performance directly affects well the various opering characteristics of electric apparatus of semiconductor devices.
The content of the invention
The purpose of the present invention is directed to chemical reagent (diglycolamine, the third two used in current electronic product matting
Alcohol methyl ether acetate, N- methylpyrrolidones, N-METHYLFORMAMIDE) in tenor it is high the drawbacks of, there is provided one kind utilizes ion
Exchange and electrodialysis removes the device of metal ion, with to metal ion clearance in chemical reagent is high and spy of low cost
Point.Mainly include material storage tank, deionization switch room, circulating pump, I grades of continuous electric field deionization room, II grades of continuous electric field go from
Seed cell, high ion concentration reagent reservoirs, low ion concns storage tank, high purity chemical reagents storage tank；By the material storage tank, described follow
Ring pump, the deionization switch room, the I grades of continuous electric field deionization room, the II grades of continuous electric field deionization room, the height
Ion concentration reagent reservoirs, the low ion concns storage tank, the high purity chemical reagents storage tank are linked in sequence.
According to one aspect of the present invention, using circulating pump, the chemical reagent in material storage tank is imported into ion exchange
Room.
According to one aspect of the present invention, deionization switch room is divided into 2 with amberplex in deionization switch room
Operating room.
According to one aspect of the present invention, operating room of 2, deionization switch room is respectively low ion concns reagent chamber and height
Ion concentration reagent chamber.
According to one aspect of the present invention, from high ion concentration reagent chamber, reagent out enters into high ion concentration reagent
In storage tank, from low ion concns reagent chamber, reagent out is entered into low ion concns reagent reservoirs.
According to one aspect of the present invention, the reagent in high ion concentration reagent pot is transported to I grades continuously with circulating pump
Electric field deionization room.
According to one aspect of the present invention, the reagent in low ion concns reagent pot is transported to II grades continuously with circulating pump
Electric field deionization room.
It is characteristic of the invention that：Using high performace ion exchange membrane by electron chemistry agent treatment into high ion concentration reagent and
Low ion concns reagent, then by I grades of continuous electric field deionization room and II grades of continuous electric field deionization room, by high ion concentration
The ion concentration treatment of reagent is of the invention by the ion concentration treatment of low ion concns reagent to below 1ppb to below 10ppb
Treatment effect is high, and the reagent purity that treatment is obtained is high；The automaticity of whole processing procedure is very high, can be carried out continuously fortune
OK.
Brief description of the drawings
Fig. 1 is a kind of electron chemistry reagent purification apparatus structure schematic diagram of the present invention.
In figure：
1 material storage tank, 2 valves, 3 circulating pumps, 4 high ion concentration reagent reservoirs, 5 low ion concns storage tanks, 6 deionizations are handed over
Change room, 7 high ion concentration reagent chamber, 8 low ion concns reagent chamber, 9I grades of continuous electric field deionization room, 10II grades of continuous electric field
Deionization room, 11 high purity chemical reagents storage tanks,
Specific embodiment
Below in conjunction with specific embodiment, the present invention is described in detail.
With reference to Fig. 1, a kind of electron chemistry reagent purification device of present invention offer, including storage tank 1, valve 2, circulating pump 3,
High ion concentration reagent reservoirs 4, low ion concns storage tank 5, deionization switch room 6, high ion concentration reagent chamber 7, low ion is dense
Degree reagent chamber 8, I grades of continuous electric field deionization room 9, II grades of continuous electric field deionization room 10, high purity chemical reagents storage tank 11, and press
It is sequentially attached.
Pending chemical reagent is entered in material storage tank 1 by pipeline, metal ion then will be contained by circulating pump 3
Chemical reagent be transported to deionization switch room 6, in deionization switch room 6, by installed in middle amberplex
Effect, the chemical reagent of low concentration ion enters the low ion concns reagent chamber 8 on one side, and the chemical reagent of high concentration ion enters
The low ion concns reagent chamber 7 of another side, then to respectively enter macroion dense for high concentration ion reagent and low ion concns reagent
Degree reagent reservoirs 4 and low ion concns reagent reservoirs 5.Low ion concns reagent is transported to II grades of continuous electric field deionization with pump
In room 10, by the effect of continuous electric field, the ion in reagent is further removed, and is less than the ion concentration in reagent
1ppb, reagent after purification enters high purity chemical reagents storage tank 11.On the other hand, high ion concentration reagent is transported to I with pump
Level continuous electric field deionization room 9, the ion in reagent is removed by major part, and concentration is reduced to 10ppb or so, then will by pump
The reagent after purification is transported in reagent reservoirs 1, carries out repeating for purge process.
Effect of the deionization switch room 6 played in whole device is to carry out ion pretreatment to electron chemistry reagent, is obtained
To high ion concentration reagent and low ion concns reagent.
The effect of II grades of continuous electric field deionization room 10 played in whole device is by the ion of low ion concns reagent
Concentration is processed to below 1ppb.
The effect of I grades of continuous electric field deionization room 9 played in whole device is that the ion of high ion concentration reagent is dense
Degree is processed to below 10ppb.
It is characteristic of the invention that：Using high performace ion exchange membrane by electron chemistry agent treatment into high ion concentration reagent and
Low ion concns reagent, then by I grades of continuous electric field deionization room and II grades of continuous electric field deionization room, by high ion concentration
The ion concentration treatment of reagent is of the invention by the ion concentration treatment of low ion concns reagent to below 1ppb to below 10ppb
Treatment effect is high, and the reagent purity that treatment is obtained is high；The automaticity of whole processing procedure is very high, can be carried out continuously fortune
OK.
Below by embodiment, the invention will be further described, but embodiment is not intended to limit protection scope of the present invention.
Embodiment 1
N- methylpyrrolidones are put into reagent reservoirs, pump and valve in apparatus of the present invention is then turned on, it is right to carry out
The purifying of N- methylpyrrolidones, purification result is shown in Table 1.
Ion concentration compares after the N- methylpyrrolidone before processings of table 1
From table 1 it follows that the electron level N- methylpyrrolidones after present invention treatment meet following index：It is single from
The content of son is less than 1ppb, reaches the requirement of EMI-C8.
Embodiment 2
Propylene glycol monomethyl ether cupric acetate is put into reagent reservoirs, pump and valve in apparatus of the present invention is then turned on, carried out
Purifying to propylene glycol monomethyl ether cupric acetate, the results are shown in Table 2 after purification.
Ion concentration compares after the propylene glycol monomethyl ether cupric acetate before processing of table 2
From Table 2, it can be seen that the electronic grade propylene glycol monomethyl ether cupric acetate after present invention treatment meets following index：It is single
The content of ion is less than 1ppb, reaches the requirement of EMI-C8.
Installation area used by the present invention is small, and energy consumption is low, and product purification purity is high, and production elasticity is big, three wastes row
Put, the features such as meet environmental requirement.
Electron chemistry reagent purification device proposed by the present invention, is described, phase by field calibration examples of implementation
Close technical staff substantially can be modified or fit not departing from present invention, spirit and scope to the method described in this patent
The technology of the present invention is realized when changing with combining.In particular, all similar replacements and change are to this area
It is it will be apparent that they are considered as in spirit of the invention, scope and content for technical staff.
Claims (1)
1. a kind of purification process for propylene glycol methyl ether acetate electron chemistry reagent purification device, it is characterised in that described
Purification devices include material storage tank, circulating pump, deionization switch room, I grades of continuous electric field deionization room, II grades of continuous electric field go from
Seed cell, high ion concentration reagent reservoirs, low ion concns storage tank, high purity chemical reagents storage tank, and connect in their order；
The purification process includes：Pending chemical reagent is entered in material storage tank by pipeline, then will by circulating pump
Propylene glycol methyl ether acetate chemical reagent containing metal ion is transported to deionization switch room, in deionization switch room, leads to
The effect installed in middle amberplex is crossed, the chemical reagent of low concentration ion enters the low ion concns reagent on one side
Room, the chemical reagent of high concentration ion enters the high ion concentration reagent chamber of another side, then high concentration ion reagent and it is low from
Sub- Concentration Reagent respectively enters high ion concentration reagent reservoirs and low ion concns reagent reservoirs；With pump by low ion concns reagent
It is transported in II grades of continuous electric field deionization room, by the effect of continuous electric field, the ion in reagent is further removed, and makes examination
Ion concentration in agent is less than 1ppb, and reagent after purification enters high purity chemical reagents storage tank；On the other hand, with pump by macroion
Concentration Reagent is transported to I grades of continuous electric field deionization room, and the ion in reagent is removed by major part, and it is left that concentration is reduced to 10ppb
, be transported to the reagent after purification in material storage tank by pump then by the right side, carries out repeating for purge process；
Wherein, the deionization switch room uses high performace ion exchange membrane, in the purified high ion concentration reagent reservoirs
Reagent ion concentration be less than 1ppb.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310222436.0A CN104109061B (en) | 2013-06-06 | 2013-06-06 | A kind of electronics grade chemical reagents purification devices |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310222436.0A CN104109061B (en) | 2013-06-06 | 2013-06-06 | A kind of electronics grade chemical reagents purification devices |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104109061A CN104109061A (en) | 2014-10-22 |
| CN104109061B true CN104109061B (en) | 2017-06-16 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310222436.0A Expired - Fee Related CN104109061B (en) | 2013-06-06 | 2013-06-06 | A kind of electronics grade chemical reagents purification devices |
Country Status (1)
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| CN (1) | CN104109061B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107098810B (en) * | 2017-05-16 | 2021-04-30 | 天津大学 | Separation and purification method for preparing electronic-grade propylene glycol monomethyl ether acetate |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101993386A (en) * | 2010-11-03 | 2011-03-30 | 天津大学 | Method for preparing electronic-grade N, N-dimethylformamide by ion exchange resin method |
| CN101993387A (en) * | 2010-11-03 | 2011-03-30 | 天津大学 | Purifying method for electronic-grade N,N-dimethylformamide |
| CN102557195A (en) * | 2012-01-05 | 2012-07-11 | 河南工业大学 | Method for removing heavy metals in water by collaboration of dialysis through ion exchange membrane and chemical precipitation |
-
2013
- 2013-06-06 CN CN201310222436.0A patent/CN104109061B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101993386A (en) * | 2010-11-03 | 2011-03-30 | 天津大学 | Method for preparing electronic-grade N, N-dimethylformamide by ion exchange resin method |
| CN101993387A (en) * | 2010-11-03 | 2011-03-30 | 天津大学 | Purifying method for electronic-grade N,N-dimethylformamide |
| CN102557195A (en) * | 2012-01-05 | 2012-07-11 | 河南工业大学 | Method for removing heavy metals in water by collaboration of dialysis through ion exchange membrane and chemical precipitation |
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| Publication number | Publication date |
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| CN104109061A (en) | 2014-10-22 |
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Granted publication date: 20170616 |