CN210676247U - Device for removing solid particles in ultrahigh pure ethyl silicate steel cylinder - Google Patents
Device for removing solid particles in ultrahigh pure ethyl silicate steel cylinder Download PDFInfo
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- CN210676247U CN210676247U CN201921437742.5U CN201921437742U CN210676247U CN 210676247 U CN210676247 U CN 210676247U CN 201921437742 U CN201921437742 U CN 201921437742U CN 210676247 U CN210676247 U CN 210676247U
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Abstract
The utility model discloses a get rid of device of solid particle in super high pure ethyl silicate steel bottle. Compared with the prior art, the utility model discloses a two return circuits filter, but two steel bottles of simultaneous processing, the treatment effeciency of steel bottle has been improved to filter repeatedly and replace a large amount of high-purity water washing, do not produce the waste liquid, also need not to carry out the dewatering processing to the steel bottle again, the processing time and the quantity that have reduced the steel bottle are few, device structural design is reasonable, and easy operation can the close check metal impurity content within acceptable range, still can further be provided with the tail gas adsorption column simultaneously, has solved tail gas discharge environmental pollution's problem.
Description
Technical Field
The utility model relates to a super high pure ethyl silicate technical field, in particular to get rid of device of solid particle in super high pure ethyl silicate steel bottle.
Background
With the development of the semiconductor industry, the semiconductor industry puts higher requirements on main processes of the manufacturing process, such as ion implantation, diffusion, epitaxial growth and photoetching; the critical dimension in the semiconductor process is getting smaller and smaller, and has reached 3nm according to the recent report; since the components and interconnections in the integrated circuit are very fine, if contaminated by solid particles such as dust particles or metal particles, the damage to the functions of the circuits in the chip, short circuit or open circuit, which may cause the failure of the integrated circuit and affect the formation of the geometric features, can be easily caused during the manufacturing process. There is a need for effective decontamination of solid particles during the manufacturing process.
At present, the ultra-high pure ethyl silicate is mainly applied to a low-pressure chemical vapor deposition (LPCVD) process of an integrated circuit, the ethyl orthosilicate is evaporated from a liquid state to a gaseous state and decomposed at 700-750 ℃ under the pressure of 300mTOR to deposit on the surface of a silicon wafer to generate a silicon dioxide film, the defects that a SiC oxide layer is too thin and a Plasma Enhanced Chemical Vapor Deposition (PECVD) silicon dioxide layer is too loose are overcome to a certain extent, the compactness of an oxide layer medium and the adhesion capability of the oxide layer medium and the SiC wafer are ensured, the electrical property and the yield of a device are improved, and the defect that the oxide layer with a certain thickness is oxidized at high temperature for a long time is overcome, so the requirement of electronic-grade ethyl orthosilicate in the.
If the solid particles in the tetraethoxysilane exceed the standard, the performance of each component in the circuit in the silicon chip is seriously influenced, even the circuit is damaged, and the chip is scrapped. Therefore, the solid particles need to be removed before the tetraethoxysilane is used, and the process requirements are met. While storage and transportation of large quantities of tetraethoxysilane is carried out through steel cylinders. The requirement on the cleanliness of the steel cylinder for packing materials is extremely high, and for newly purchased steel cylinders and polluted steel cylinders, the solid particle impurities in the steel cylinders exceed the standard and cannot be directly used for filling ultrahigh pure ethyl silicate, the steel cylinders need to be treated, and the content of the solid particle impurities in the steel cylinders is ensured to be within an acceptable range.
At present, the treatment of the steel cylinder is mainly focused on the gas steel cylinder, and particularly the content of water in the gas steel cylinder. The moisture in permanent gas cylinders, high pressure liquefied gas cylinders and low pressure liquefied gas cylinders is usually treated by heating, high purity helium replacement and vacuum pumping, but the heating is required to consume energy, the use of expensive and scarce high purity helium as replacement gas increases the cost, and the technology for removing solid particles in wet chemical cylinders is less, especially the technology for removing solid particles in electronic grade wet chemical cylinders is less. At present, ultrapure water cleaning is reported, but an ultrapure water preparation device is needed for cleaning by using ultrapure water only, water in a steel cylinder needs to be removed after cleaning, the process is complex, and the treatment period is long.
SUMMERY OF THE UTILITY MODEL
The to-be-solved technical problem of the utility model is to provide a get rid of device of solid particle in super high pure ethyl silicate steel bottle, the device easy operation, but the solid particle impurity content of the reasonable strict control of technology is within acceptable range, has also solved tail gas emission environmental pollution problem simultaneously.
The utility model provides a get rid of device of solid particle in super high pure ethyl silicate steel bottle, include:
the device comprises a first filter, a second filter, a high-purity nitrogen steel cylinder, an ultrahigh pure ethyl silicate steel cylinder, a first steel cylinder to be treated, a second steel cylinder to be treated and a vacuum pump;
the ultrahigh pure ethyl silicate steel cylinder is internally provided with ultrahigh pure ethyl silicate;
the first steel cylinder to be treated comprises a gas phase valve and a liquid phase valve; the second steel cylinder to be treated comprises a gas phase valve and a liquid phase valve;
the ultrahigh pure ethyl silicate steel cylinder is communicated with a liquid phase valve of a first steel cylinder to be treated;
the first steel cylinder to be treated is communicated with the second steel cylinder to be treated through a first filter and a second filter; the first filter and the second filter are connected in parallel;
the high-purity nitrogen steel cylinder is communicated with a gas valve of a first steel cylinder to be treated and a gas valve of a second steel cylinder to be treated;
and the vacuum pump is communicated with a gas valve of the first steel cylinder to be treated and a gas valve of the second steel cylinder to be treated.
Preferably, the device also comprises a tail gas adsorption column; the tail gas adsorption column is communicated with the vacuum pump.
Preferably, a third filter is further included; the high-purity nitrogen steel cylinder is communicated with a gas valve of the first steel cylinder to be processed and a gas valve of the second steel cylinder to be processed through a third filter.
Preferably, the device further comprises a pressure regulating valve; the high-purity nitrogen steel cylinder is communicated with the third filter through a pressure regulating valve.
Preferably, the device further comprises a first one-way valve and a second one-way valve; the gas valve of the first steel cylinder to be treated is communicated with the vacuum pump through a first one-way valve; and a gas valve of the second steel cylinder to be treated is communicated with the vacuum pump through a second one-way valve.
Preferably, a liquid pipeline is arranged in the first steel cylinder to be processed; one end of the liquid pipeline is communicated with the liquid valve, and the opening at the other end of the liquid pipeline is positioned at the bottom of the first steel cylinder to be processed.
Preferably, a liquid pipeline is arranged in the second steel cylinder to be treated; one end of the liquid pipeline is communicated with the liquid valve, and the opening at the other end is positioned at the bottom of the second steel cylinder to be treated.
The utility model provides a get rid of device of solid particle in super high pure ethyl silicate steel bottle, include: the device comprises a first filter, a second filter, a high-purity nitrogen steel cylinder, an ultrahigh pure ethyl silicate steel cylinder, a first steel cylinder to be treated, a second steel cylinder to be treated and a vacuum pump; the ultrahigh pure ethyl silicate steel cylinder is internally provided with ultrahigh pure ethyl silicate; the first steel cylinder to be treated comprises a gas phase valve and a liquid phase valve; the second steel cylinder to be treated comprises a gas phase valve and a liquid phase valve; the ultrahigh pure ethyl silicate steel cylinder is communicated with a liquid phase valve of a first steel cylinder to be treated; the first steel cylinder to be treated is communicated with the second steel cylinder to be treated through a first filter and a second filter; the first filter and the second filter are connected in parallel; the high-purity nitrogen steel cylinder is communicated with a gas valve of a first steel cylinder to be treated and a gas valve of a second steel cylinder to be treated; and the vacuum pump is communicated with a gas valve of the first steel cylinder to be treated and a gas valve of the second steel cylinder to be treated. Compared with the prior art, the utility model discloses a two return circuits filter, but two steel bottles of simultaneous processing, the treatment effeciency of steel bottle has been improved to filter repeatedly and replace a large amount of high-purity water washing, do not produce the waste liquid, also need not to carry out the dewatering processing to the steel bottle again, the processing time and the quantity that have reduced the steel bottle are few, device structural design is reasonable, and easy operation can the close check metal impurity content within acceptable range, still can further be provided with the tail gas adsorption column simultaneously, has solved tail gas discharge environmental pollution's problem.
Drawings
FIG. 1 is a schematic structural view of a device for removing solid particles from a steel cylinder containing ultra-pure ethyl silicate provided by the present invention;
fig. 2 is a schematic structural diagram of a device for removing solid particles from an ultrahigh pure ethyl silicate steel cylinder used in embodiment 1 of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely below with reference to the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
The utility model provides a get rid of device of solid particle in super high pure ethyl silicate steel bottle, include: the device comprises a first filter, a second filter, a high-purity nitrogen steel cylinder, an ultrahigh pure ethyl silicate steel cylinder, a first steel cylinder to be treated, a second steel cylinder to be treated and a vacuum pump; the ultrahigh pure ethyl silicate steel cylinder is internally provided with ultrahigh pure ethyl silicate; the first steel cylinder to be treated comprises a gas phase valve and a liquid phase valve; the second steel cylinder to be treated comprises a gas phase valve and a liquid phase valve; the ultrahigh pure ethyl silicate steel cylinder is communicated with a liquid phase valve of a first steel cylinder to be treated; the first steel cylinder to be treated is communicated with the second steel cylinder to be treated through a first filter and a second filter; the first filter and the second filter are connected in parallel; the high-purity nitrogen steel cylinder is communicated with a gas valve of a first steel cylinder to be treated and a gas valve of a second steel cylinder to be treated; and the vacuum pump is communicated with a gas valve of the first steel cylinder to be treated and a gas valve of the second steel cylinder to be treated.
Referring to fig. 1, fig. 1 is a schematic structural diagram of a device for removing solid particles from an ultra-pure ethyl silicate steel cylinder provided by the present invention.
The utility model provides a get rid of solid particle's in high pure ethyl silicate steel bottle device can handle two steel bottles simultaneously, first steel bottle and the second steel bottle of waiting to handle.
The first steel cylinder to be treated comprises a first gas phase valve and a liquid phase valve; the liquid phase valve of the first steel cylinder to be treated is communicated with the ultrahigh pure ethyl silicate steel cylinder; the ultrahigh pure ethyl silicate steel cylinder is internally provided with ultrahigh pure ethyl silicate, and the ultrahigh pure ethyl silicate flows into a first steel cylinder to be treated from the ultrahigh pure ethyl silicate steel cylinder; a liquid pipeline is preferably arranged in the first steel cylinder to be treated; one end of the liquid pipeline is communicated with the liquid valve, and the opening at the other end is positioned at the bottom of the first steel cylinder to be processed.
The gas phase valve of the first steel cylinder to be treated is communicated with the high-purity nitrogen steel cylinder; according to the utility model, the device preferably further comprises a third filter, and the high-purity nitrogen steel cylinder is communicated with the gas phase valve of the first steel cylinder to be processed through the third filter; in order to control the pressure of the high-purity nitrogen, the high-purity nitrogen gas cylinder preferably further comprises a pressure regulating valve, and the high-purity nitrogen gas cylinder is communicated with the third filter through the pressure regulating valve; in order to observe the pressure of the high-purity nitrogen more intuitively, pressure gauges are preferably arranged at the front and the rear of the pressure regulating valve; in order to prevent gas backflow, the high-purity nitrogen gas cylinder preferably further comprises a one-way valve, and the high-purity nitrogen gas cylinder is communicated with the third filter through a pressure regulating valve and the one-way valve; in order to better control the gas trend, the third filter is preferably communicated with the gas phase valve of the first steel cylinder to be treated through a first valve.
The gas phase valve of the first steel cylinder to be treated is communicated with a vacuum pump; the utility model preferably further comprises a first one-way valve, wherein the gas phase valve of the first steel cylinder to be processed is communicated with the vacuum pump through the first one-way valve; in order to better control the gas trend, the gas-phase valve of the first cylinder to be treated is preferably communicated with the first one-way valve through the second valve.
The first steel cylinder to be treated is communicated with the second steel cylinder to be treated through a first filter and a second filter; the first filter and the second filter are connected in parallel, so that a double-loop filtering mode is formed, and the filtering efficiency is improved. In order to control the trend of the materials in the first filter and the second filter, valves are preferably arranged at two ends of the first filter and the second filter, and the trend of the materials can be controlled by opening and closing the valves. In the utility model, in order to improve the use efficiency of the filter, the gas phase valve of the first steel cylinder to be processed is preferably communicated with the gas phase valve of the second steel cylinder to be processed through the first filter and the second filter; the liquid phase valve of the first steel cylinder to be treated is preferably communicated with the liquid phase valve of the second steel cylinder to be treated through a first filter and a second filter; the ultrahigh pure ethyl silicate in the first steel cylinder to be treated enters a second steel cylinder to be treated through a first filter or a second filter; the tetraethoxysilane in the second steel cylinder to be treated can enter the first steel cylinder to be treated through the second filter or the first filter, so that the materials in each filter flow in a certain direction; a liquid pipeline is preferably arranged in the second steel cylinder to be treated; one end of the liquid pipeline is communicated with the liquid valve, and the opening at the other end is positioned at the bottom of the second steel cylinder to be treated. Through the double-loop filtering system, high-purity tetraethoxysilane is used for repeatedly rinsing and filtering to remove particles in the steel cylinder to replace high-purity water for cleaning, and high-purity nitrogen is used for replacing expensive high-purity helium, so that the cost is saved, the operation flow is simplified, the water removal operation of the steel cylinder is not needed, the processing time is shortened, the using amount of the ultra-pure tetraethoxysilane is small, and the metal impurity content of the steel cylinder can be strictly controlled within an acceptable range.
The gas phase valve of the second steel cylinder to be treated is communicated with the high-purity nitrogen steel cylinder; the gas phase valve of the second steel cylinder to be treated can be preferably communicated with the high-purity nitrogen steel cylinder through a third filter; the second steel cylinder to be treated is communicated with the high-purity nitrogen steel cylinder through the fourth filter; the third filter and the fourth filter are connected in parallel. For better control of the gas flow, the fourth filter is preferably connected to the gas phase valve of the second cylinder to be treated by a valve.
The device provided by the utility model preferably also comprises a tail gas adsorption column; the tail gas adsorption column is communicated with the vacuum pump, so that the environment pollution caused by tail gas emission can be prevented.
In the utility model, in order to better control the filling amount of the gas and the liquid in the first steel cylinder to be processed and the second steel cylinder to be processed, the steel cylinder to be processed preferably further comprises a weighing device; the first steel cylinder to be processed and the second steel cylinder to be processed are respectively placed on the weighing device.
The utility model provides a liquid phase valve of first steel bottle that treats in the device and the liquid phase valve of second steel bottle that treats are preferred still to be linked together with particle size analysis device, through detecting the granularity of tetraethoxysilane in tetraethoxysilane and the second steel bottle that treats in the first steel bottle that treats, whether accord with the requirement to judge the steel bottle.
For realizing abluent automation, the utility model discloses it is preferred still to include the gas distribution panel, with control the utility model provides a gas valve.
The utility model discloses a two return circuits are filtered, but two steel bottles of simultaneous processing, the treatment effeciency of steel bottle has been improved to filter repeatedly and replace a large amount of high-purity water to wash, do not produce the waste liquid, also need not to carry out the dewatering processing to the steel bottle again, the processing time and the quantity that have reduced the steel bottle are few, device structural design is reasonable, easy operation, can strictly control metal impurity content within acceptable range, still can further be provided with the tail gas adsorption column simultaneously, tail gas discharge environmental pollution's problem has been solved.
The utility model also provides a method for get rid of solid particle in super high pure ethyl silicate steel bottle through above-mentioned device, include:
a device for removing solid particles in the ultrahigh pure ethyl silicate steel cylinder is adopted; the device comprises a first filter, a second filter, a high-purity nitrogen steel cylinder, an ultrahigh pure ethyl silicate steel cylinder, a first steel cylinder to be treated, a second steel cylinder to be treated and a vacuum pump;
the ultrahigh pure ethyl silicate steel cylinder is internally provided with ultrahigh pure ethyl silicate;
the first steel cylinder to be treated comprises a gas phase valve and a liquid phase valve; the second steel cylinder to be treated comprises a gas phase valve and a liquid phase valve;
the ultrahigh pure ethyl silicate steel cylinder is communicated with a liquid phase valve of a first steel cylinder to be treated;
the first steel cylinder to be treated is communicated with the second steel cylinder to be treated through a first filter and a second filter; the first filter and the second filter are connected in parallel;
the high-purity nitrogen steel cylinder is communicated with a gas valve of a first steel cylinder to be treated and a gas valve of a second steel cylinder to be treated;
the vacuum pump is communicated with a gas valve of the first steel cylinder to be treated and a gas valve of the second steel cylinder to be treated;
filling qualified ultrahigh pure ethyl silicate into a first steel cylinder to be treated;
filling high-purity nitrogen into a second steel cylinder to be treated, extracting, repeatedly treating, and filling the ultrahigh pure ethyl silicate in the first steel cylinder to be treated into the second steel cylinder to be treated through a first filter or a second filter; the high-purity nitrogen is preferably charged into the second steel cylinder to be treated in such an amount that the pressure of the second steel cylinder to be treated is 1 to 5 psig.
After the first steel cylinder to be treated is vacuumized, the ultrahigh pure ethyl silicate in the second steel cylinder to be treated is introduced into the first steel cylinder to be treated through a second filter or a first filter; the time of the vacuum pumping treatment is preferably 5-10 min.
After the second steel cylinder to be treated is vacuumized, the ultrahigh pure ethyl silicate in the first steel cylinder to be treated is introduced into the second steel cylinder to be treated through the first filter or the second filter; the time of the vacuum pumping treatment is preferably 5-10 min.
And repeating the steps.
The utility model discloses in, it all has partial super high pure ethyl silicate to prefer at last in with first steel bottle and the second steel bottle of waiting to handle, detects its granularity.
In order to further explain the present invention, the following embodiments are combined to describe in detail the apparatus for removing solid particles from ultra-high purity ethyl silicate steel cylinder provided by the present invention.
The reagents used in the following examples are all commercially available.
Example 1
The device shown in fig. 2 is mainly composed of a filter, a high-purity nitrogen steel cylinder, a qualified product steel cylinder, a steel cylinder to be treated, a steel cylinder scale, a vacuum pump, a tail gas adsorption column, a gas distribution panel, corresponding connecting pipelines, valves and instruments.
The process consists of qualified product rinsing and filtering, vacuumizing and tail gas adsorbing units. A certain amount of qualified tetraethoxysilane is filled into the steel cylinder 1 to be treated in advance. Firstly, regulating the pressure of high-purity nitrogen to 15-20 psig by a steel cylinder pressure regulating valve; resetting the steel cylinder scale 2 to be processed; secondly, opening a valve 14, a valve 13, a valve 12, a valve 11 and a liquid valve of the steel cylinder 2 to be treated, flushing high-purity nitrogen into the steel cylinder 2 to be treated to the pressure of 1-5 psig, and then closing the liquid valve of the steel cylinder 2 to be treated and the valve 14; thirdly, opening a gas phase valve and a valve 15 of the steel cylinder 2 to be treated, pumping out gas in the steel cylinder 2 to be treated, vacuumizing for 5-10 min, and closing the gas phase valve and the valve 15 of the steel cylinder 2 to be treated; fourthly, repeating the second step and the third step once; fifthly, opening the valve 1, the valve 3 to the valve 9, and closing the valve 1 when the pressure is 1-5 psig; sixthly, opening the valve 15, vacuumizing the pipeline for 5-10 min, and then closing the valve 15 and the valve 5; seventhly, opening a valve 1, a valve 4, a gas phase valve of the steel cylinder 1 to be treated, a liquid phase valve, a valve 6, a valve 8 and a liquid phase valve of the steel cylinder 2 to be treated, filtering tetraethoxysilane, and then filling the filtered tetraethoxysilane into the steel cylinder 2 to be treated, and closing the valve 1, the liquid phase valve of the steel cylinder 1 to be treated, the valve 6 and the valve 8 when the number of readings of the steel cylinder 1 to be treated is not reduced; eighthly, opening the valve 2, vacuumizing the steel cylinder 1 to be treated for 2-5 min, and then closing the valve 2 and the valve 4; the ninth step, opening a valve 14, a valve 12, a gas phase valve of the steel cylinder 2 to be processed, a valve 9, a valve 7 and a liquid phase valve of the steel cylinder 1 to be processed, filtering tetraethoxysilane and then guiding the filtered tetraethoxysilane into the steel cylinder 1 to be processed, and closing the valve 14, the liquid phase valve of the steel cylinder 2 to be processed, the valve 9 and the valve 7 when the number of readings of the steel cylinder 2 to be processed is not reduced; step ten, opening a valve 15, vacuumizing the steel cylinder 2 to be treated for 2-5 min, and then closing the valve 15 and the valve 12; step ten, repeating the steps seven to ten for 2 times; step ten, guiding half of the tetraethoxysilane in the steel cylinder 1 to be treated to the steel cylinder 2 to be treated; and step thirteen, respectively analyzing the granularity of the tetraethoxysilane in the steel cylinder 1 to be treated and the steel cylinder 2 to be treated.
The steel cylinder processing device can process the particles in the steel cylinders to be qualified, meets the requirement of filling electronic-grade ethyl orthosilicate and simultaneously processes two steel cylinders.
The results obtained by testing the steel cylinder 1 before and after treatment are shown in tables 1 and 2.
TABLE 1 test results of steel cylinders to be treated before and after treatment
TABLE 2 detection results of solid particles before and after treatment of steel cylinders to be treated
Claims (7)
1. The utility model provides a get rid of device of solid particle in super high pure ethyl silicate steel bottle which characterized in that includes:
the device comprises a first filter, a second filter, a high-purity nitrogen steel cylinder, an ultrahigh pure ethyl silicate steel cylinder, a first steel cylinder to be treated, a second steel cylinder to be treated and a vacuum pump;
the ultrahigh pure ethyl silicate steel cylinder is internally provided with ultrahigh pure ethyl silicate;
the first steel cylinder to be treated comprises a gas phase valve and a liquid phase valve; the second steel cylinder to be treated comprises a gas phase valve and a liquid phase valve;
the ultrahigh pure ethyl silicate steel cylinder is communicated with a liquid phase valve of a first steel cylinder to be treated;
the first steel cylinder to be treated is communicated with the second steel cylinder to be treated through a first filter and a second filter; the first filter and the second filter are connected in parallel;
the high-purity nitrogen steel cylinder is communicated with a gas valve of a first steel cylinder to be treated and a gas valve of a second steel cylinder to be treated;
and the vacuum pump is communicated with a gas valve of the first steel cylinder to be treated and a gas valve of the second steel cylinder to be treated.
2. The apparatus of claim 1, further comprising a tail gas adsorption column; the tail gas adsorption column is communicated with the vacuum pump.
3. The device of claim 1, further comprising a third filter; and the high-purity nitrogen steel cylinder is communicated with a gas valve of the first steel cylinder to be treated and a gas valve of the second steel cylinder to be treated through a third filter.
4. The device of claim 3, further comprising a pressure regulating valve; the high-purity nitrogen steel cylinder is communicated with the third filter through a pressure regulating valve.
5. The device of claim 1, further comprising a first one-way valve and a second one-way valve; the gas valve of the first steel cylinder to be treated is communicated with the vacuum pump through a first one-way valve; and a gas valve of the second steel cylinder to be treated is communicated with the vacuum pump through a second one-way valve.
6. The apparatus of claim 1, wherein a liquid line is disposed in the first cylinder to be treated; one end of the liquid pipeline is communicated with the liquid valve, and the opening at the other end of the liquid pipeline is positioned at the bottom of the first steel cylinder to be processed.
7. The apparatus of claim 1, wherein a liquid line is disposed in the second cylinder to be treated; one end of the liquid pipeline is communicated with the liquid valve, and the opening at the other end is positioned at the bottom of the second steel cylinder to be treated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921437742.5U CN210676247U (en) | 2019-08-30 | 2019-08-30 | Device for removing solid particles in ultrahigh pure ethyl silicate steel cylinder |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201921437742.5U CN210676247U (en) | 2019-08-30 | 2019-08-30 | Device for removing solid particles in ultrahigh pure ethyl silicate steel cylinder |
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| CN210676247U true CN210676247U (en) | 2020-06-05 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110420943A (en) * | 2019-08-30 | 2019-11-08 | 苏州金宏气体股份有限公司 | A kind of device and method removing solid particle in ultra-pure ethyl orthosilicate steel cylinder |
-
2019
- 2019-08-30 CN CN201921437742.5U patent/CN210676247U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110420943A (en) * | 2019-08-30 | 2019-11-08 | 苏州金宏气体股份有限公司 | A kind of device and method removing solid particle in ultra-pure ethyl orthosilicate steel cylinder |
| CN110420943B (en) * | 2019-08-30 | 2024-05-31 | 金宏气体股份有限公司 | Device and method for removing solid particles in ultra-high purity ethyl silicate steel cylinder |
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Address after: 215152 Anmin Road, Panyang Industrial Park, Huangdai Town, Xiangcheng District, Suzhou City, Jiangsu Province Patentee after: Jinhong Gas Co.,Ltd. Address before: 215152 No. 6 Anmin Road, Panyang Industrial Park, Huangdi Town, Xiangcheng District, Suzhou City, Jiangsu Province Patentee before: SUZHOU JINHONG GAS Co.,Ltd. |
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