CN203425676U - Device for recycling organic waste gas of stripper on line - Google Patents
Device for recycling organic waste gas of stripper on line Download PDFInfo
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- CN203425676U CN203425676U CN201320447931.7U CN201320447931U CN203425676U CN 203425676 U CN203425676 U CN 203425676U CN 201320447931 U CN201320447931 U CN 201320447931U CN 203425676 U CN203425676 U CN 203425676U
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- exchange resin
- resin tower
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- communicated
- stripper
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Abstract
The utility model discloses a device for recycling organic waste gas of a stripper on line. The device comprises a dehydrator, a normal temperature water condenser, a brine ice condenser, a condensate receiver, a cation exchange resin tower, an anion exchange resin tower and a mixing tank, wherein an inlet of the dehydrator is communicated with an exhaust pipe used for introducing organic waste gas to be treated; an outlet of the dehydrator is sequentially communicated with the normal temperature water condenser and the brine ice condenser; an outlet of the brine ice condenser is communicated with an inlet of the condensate receiver; an outlet of the condensate receiver is sequentially communicated with the cation exchange resin tower and the anion exchange resin tower; an outlet of the anion exchange resin tower is connected with a first feeding hole of the mixing tank; the mixing tank also comprises a second feeding hole and a discharge opening. The utility model provides the device for recycling organic waste gas of the stripper on line through which the cost is reduced and recycling is realized.
Description
Technical field
The utility model relates to a kind of organic waste gas treatment device.
Background technology
At present, in domestic semiconductor crystal wafer manufactory and TFT-LCD panel photoelectricity manufacturing industry panel processing procedure, need to use a large amount of organic solution to produce a large amount of organic exhaust gas (VOCs).Wherein, photoresist lift off operation is one of master operation producing organic exhaust gas.At present photoresist lift off liquid (stripper) main component used is higher boiling and complete water-soluble organic solution almost, as monoethanolamine (MEA), and dimethyl sulfoxide (DMSO) (DMSO), ethylene glycol monobutyl ether (BDG) etc.Organic exhaust gas directly affects very large on human body, have the effects such as infiltration, fat and volatilization due to organic exhaust gas, and human body contacts with organic exhaust gas or works the mischief through breathing digestive system.Some organic exhaust gas not only easily causes operating environment air quality to worsen, and through secondary pollution that photochemical action causes.So can directly be discharged in atmosphere after must being processed.Burning method is the organic waste gas treatment method that current Bei Ge panel factory extensively adopts.The method, because organic principle concentration in waste gas is not enough to provide burning capacity conventionally, therefore keeps the fuel cost of high temperature very considerable.
Therefore, how effectively to save running cost and be effectively recovered as with what realize organic exhaust gas the important topic that semiconductor and flat sheet industries need to process organic exhaust gas in producing.
Summary of the invention
In order to overcome the deficiency that the cost of existing VOCs treatment technology is high, cannot recycle, the utility model provides a kind of and has reduced costs, realized the device that recycles online stripper organic exhaust gas recycling.
The utility model solves the technical scheme that its technical problem adopts:
A kind of device that recycles online stripper organic exhaust gas, comprise dehydrater, normal-temperature water condenser, brine ice condenser, condensate liquid receiver, cationic ion-exchange resin tower, anion exchange resin tower and the groove that is mixed, the import of described dehydrater with in order to import the blast pipe of pending organic exhaust gas, be communicated with, the outlet of described dehydrater successively with described normal-temperature water condenser, brine ice condenser is communicated with, the outlet of described brine ice condenser is communicated with the import of described condensate liquid receiver, the outlet of described condensate liquid receiver successively with cationic ion-exchange resin tower, anion exchange resin tower is communicated with, the outlet of described anion exchange resin tower with described in be mixed the first charging aperture of groove be connected, the described groove that is mixed also comprises the second charging aperture and discharging opening.
Further, online concentration detector is installed at described the first charging aperture place.
Further, described discharging opening is connected with discharge nozzle, on described discharge nozzle, filter is installed.
The beneficial effects of the utility model are mainly manifested in: both saved fuel that burning method consumes, can obtain on the spot stripper liquid again, saved logistics cost and solvent expense, met recycling economy rule.
Accompanying drawing explanation
Fig. 1 is the schematic diagram that recycles online the device of stripper organic exhaust gas.
The specific embodiment
Below in conjunction with accompanying drawing, the utility model is further described.
With reference to Fig. 1, a kind of device that recycles online stripper organic exhaust gas, comprise dehydrater 1, normal-temperature water condenser 2, brine ice condenser 3, condensate liquid receiver 4, cationic ion-exchange resin tower 5, anion exchange resin tower 6 and the groove 7 that is mixed, the import of described dehydrater 1 with in order to import the blast pipe of pending organic exhaust gas, be communicated with, the outlet of described dehydrater 1 successively with described normal-temperature water condenser 2, brine ice condenser 3 is communicated with, the outlet of described brine ice condenser 3 is communicated with the import of described condensate liquid receiver 4, the outlet of described condensate liquid receiver 4 successively with cationic ion-exchange resin tower 5, anion exchange resin tower 6 is communicated with, the outlet of described anion exchange resin tower 6 with described in be mixed the first charging aperture of groove 9 be connected, the described groove 9 that is mixed also comprises the second charging aperture 8 and discharging opening.
Further, online concentration detector 7 is installed at described the first charging aperture place.
Further, described discharging opening is connected with discharge nozzle, and filter 10 is installed on described discharge nozzle.
In the present embodiment, dehydrater 1 is in order to remove steam in stripper waste gas; Condenser divides two parts, and normal-temperature water condenser 2 for first, cools to 30-40 ℃ by organic exhaust gas, enter afterwards second portion, with brine ice condenser 3, make gas cool to 0 ℃ of following fully condensation, so can reduce the use amount of brine ice, reduce energy consumption.With high boiling solvent in stripper, do absorbent absorption condensation gas as BDG.
At the bottom of absorption tower, collect condensate liquid and absorbent, regular discharge enters resin tower, and a set of resin tower is respectively cationic ion-exchange resin tower 6 and anion exchange resin tower 7.This cover resin tower, in order to remove the minor metallic element in condensate liquid and absorbent, plays the object of purified metal impurity.
Solvent after resin tower, via online concentration detector 7, detects the composition in solvent.Online concentration detector can be spectrophotometer.According to the result of online concentration detector, by stripper formula, hand in other solvents retroactively and be mixed evenly at the groove 9 that is mixed; Through millipore filter 10, except degranulation, guarantee that particle requirement reaches use standard.
In the online recycling device of stripper organic exhaust gas that the utility model provides, adopt the mode of segmentation condensation, saved the consumption of brine ice, reduced energy consumption.
In the online recycling device of stripper organic exhaust gas that the utility model provides, adopt high boiling solvent in stripper formula to make absorbent, the organic solvent that absorbent can be corresponding with organic exhaust gas on the one hand dissolves each other, high boiling solvent volatility is little on the other hand, benefit is that absorbent can, with condensate liquid directly as stripper, not need additional separation in addition.
In the online recycling device of stripper organic exhaust gas that the utility model provides, need the impurity of removing to be mainly metal impurities, therefore above device and pipeline adopt the materials such as quartz or PFA as far as possible, reduce the treating capacity of ion exchange resin.
Stripper waste gas is removed wherein moisture through dehydrater 1, through normal- temperature water condenser 2 and 3 condensations of brine ice condenser, reclaim respectively, condensate liquid distributes and removes impurity metal ion through cationic ion-exchange resin 5 and anion exchange resin tower 6, by online concentration detector, detect each solvent composition content in solution afterwards, according to stripper formula, by the first charging aperture, pass into solution after detectable concentration, by the second charging aperture 8, add other solvents and be mixed, after filter 10, produce.
Claims (3)
1. a device that recycles online stripper organic exhaust gas, it is characterized in that: described device comprises dehydrater, normal-temperature water condenser, brine ice condenser, condensate liquid receiver, cationic ion-exchange resin tower, anion exchange resin tower and the groove that is mixed, the import of described dehydrater with in order to import the blast pipe of pending organic exhaust gas, be communicated with, the outlet of described dehydrater successively with described normal-temperature water condenser, brine ice condenser is communicated with, the outlet of described brine ice condenser is communicated with the import of described condensate liquid receiver, the outlet of described condensate liquid receiver successively with cationic ion-exchange resin tower, anion exchange resin tower is communicated with, the outlet of described anion exchange resin tower with described in be mixed the first charging aperture of groove be connected, the described groove that is mixed also comprises the second charging aperture and discharging opening.
2. the device that recycles online stripper organic exhaust gas as claimed in claim 1, is characterized in that: online concentration detector is installed at described the first charging aperture place.
3. the device that recycles online stripper organic exhaust gas as claimed in claim 1, is characterized in that: described discharging opening is connected with discharge nozzle, on described discharge nozzle, filter is installed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320447931.7U CN203425676U (en) | 2013-07-24 | 2013-07-24 | Device for recycling organic waste gas of stripper on line |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320447931.7U CN203425676U (en) | 2013-07-24 | 2013-07-24 | Device for recycling organic waste gas of stripper on line |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203425676U true CN203425676U (en) | 2014-02-12 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320447931.7U Expired - Lifetime CN203425676U (en) | 2013-07-24 | 2013-07-24 | Device for recycling organic waste gas of stripper on line |
Country Status (1)
| Country | Link |
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| CN (1) | CN203425676U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111249853A (en) * | 2020-02-18 | 2020-06-09 | 上海盛剑环境系统科技股份有限公司 | Treatment method and treatment system for stripping liquid waste gas |
-
2013
- 2013-07-24 CN CN201320447931.7U patent/CN203425676U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111249853A (en) * | 2020-02-18 | 2020-06-09 | 上海盛剑环境系统科技股份有限公司 | Treatment method and treatment system for stripping liquid waste gas |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: Hangzhou Xiaoshan Linjiang Industrial Park Red fifteen road Xiaoshan District Hangzhou 310000 Zhejiang province No. 9936 Patentee after: GREENDA CHEMICAL Co.,Ltd. Address before: 310051 Hangzhou City, Zhejiang province Xiaoshan District Linjiang Industrial Park Red fifteen East Hangzhou electrification group east gate Patentee before: HANGZHOU GREENDA CHEMICAL Co.,Ltd. |
|
| CP03 | Change of name, title or address | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140212 |
|
| CX01 | Expiry of patent term |