CN104103562B - Base for ADF source quartz boat - Google Patents
Base for ADF source quartz boat Download PDFInfo
- Publication number
- CN104103562B CN104103562B CN201410350714.5A CN201410350714A CN104103562B CN 104103562 B CN104103562 B CN 104103562B CN 201410350714 A CN201410350714 A CN 201410350714A CN 104103562 B CN104103562 B CN 104103562B
- Authority
- CN
- China
- Prior art keywords
- plate
- base plate
- support
- quartz boat
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 229910052904 quartz Inorganic materials 0.000 title claims abstract description 19
- 239000010453 quartz Substances 0.000 title claims abstract description 19
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 19
- 230000003014 reinforcing Effects 0.000 claims description 4
- 210000003462 Veins Anatomy 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 8
- 229910052710 silicon Inorganic materials 0.000 abstract description 8
- 239000010703 silicon Substances 0.000 abstract description 8
- 238000007599 discharging Methods 0.000 abstract description 2
- 238000009792 diffusion process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 210000001215 Vagina Anatomy 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006011 modification reaction Methods 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
Abstract
A kind of base for ADF source quartz boat, it includes that base plate, support, portable plate, baffle plate and block, the lower end of described support are fixed on the rear end of described base plate, and described baffle plate is arranged on the front end of base plate, arranges some blocks at baffle plate rear；The both sides, upper end of described portable plate are provided with convex button, are provided with the chute coordinated with described convex button inside described support.Present configuration is simple, small and exquisite, mobile flexible；Quartz boat tiltable is placed on above, therefore need not hold with hand steered when discharging paper source and silicon chip；Its portable plate gradient adjustable, can adjust the gradient of quartz boat as required.
Description
Technical field
The present invention relates in technique for processing silicon chip for fixing the equipment of quartz boat, specifically
A kind of base for ADF source quartz boat.
Background technology
Paper source diffusion in technique for processing silicon chip is to be stacked alternately paper source and silicon chip in diffusion stone
On Ying Zhou, then once form P layer, p type island region and N-type region through High temperature diffusion.At present, exist
On quartz boat during ADF source, quartz boat is all to keep flat on the table, in order to prevent the silicon chip sequenced
Toppling over paper source, operator need to help the silicon chip sequenced and paper source, another hands on the other hand
For placing silicon chip and paper source, operation bothers very much, inefficiency.
Summary of the invention
For the shortcoming overcoming above-mentioned prior art to exist, it is an object of the invention to provide one
Easy to use, it is not necessary to the hand steered base for ADF source quartz boat.
In order to solve the problems referred to above, the present invention by the following technical solutions: a kind of for ADF source
The base of quartz boat, it is characterised in that it includes base plate, support, portable plate, baffle plate and gear
Block, the lower end of described support is fixed on the rear end of described base plate, and support is rectangular with base plate, institute
State baffle plate and be arranged on the front end of base plate, some blocks are set at baffle plate rear；Described portable plate
Both sides, upper end are provided with convex button, are provided with the cunning coordinated with described convex button inside described support
Groove.
Further, between described base plate and support, it is provided with reinforcing plate.
Preferably, described portable plate upper surface is provided with rubber antiskid pad, described rubber antiskid
3 the corrugated anti-slip veins being arranged side by side along portable plate length direction it are provided with on pad.
Preferably, described baffle plate is obtuse angle with the angle of described base plate.
The invention has the beneficial effects as follows: its simple in construction, small and exquisite, mobile flexible；Quartz
Boat tiltable is placed on above, therefore need not hold with hand steered when discharging paper source and silicon chip；It
Portable plate gradient adjustable, can adjust the gradient of quartz boat as required.
Accompanying drawing explanation
The present invention is described further with embodiment below in conjunction with the accompanying drawings:
Fig. 1 is the overall structure schematic diagram of the present invention；
Fig. 2 is the portable plate top view of the present invention.
In figure, 1 base plate, 2 supports, 21 chutes, 3 portable plates, 31 convex buttons, 32 rubber are anti-
Skidding, 4 baffle plates, 5 blocks, 6 reinforcing plates, 7 quartz boats.
Detailed description of the invention
Below in conjunction with the accompanying drawings the present invention is described in further details:
As depicted in figs. 1 and 2, the specific embodiment of the present invention include base plate 1, support 2,
Portable plate 3, baffle plate 4 and block 5.
The lower end of described support 2 is fixed on the rear end of described base plate 1, support 2 and base plate 1 in
Right angle, further, in order to ensure the intensity of integral frame, at described base plate 1 and support 2
Between be provided with reinforcing plate 6.Described baffle plate 4 is arranged on the front end of base plate 1, it is preferred that institute
The angle stating baffle plate 4 and described base plate 1 is obtuse angle.At baffle plate 4 rear, some blocks 5 are set,
Block 5 is bar shaped, is equidistantly arranged on base plate 1.
The both sides, upper end of described portable plate 3 are provided with convex button 31, set inside described support 2
Being equipped with the chute 21 coordinated with described convex button 31, convex button 31 is arranged in chute 21.For
Support 2, its structure includes cross bar and the montant of cross bar both sides, and chute 21 is arranged in montant
Side.
In order to prevent quartz boat 7 from horizontally slipping on portable plate 3, table on described portable plate 3
Face is provided with rubber antiskid pad 32, and described rubber antiskid pad 32 is provided with anti-slip veins, anti-skidding
Stricture of vagina vertically arranged.
During use, first regulate the gradient of portable plate 3, after finding suitable gradient, will live
The bottom of dynamic plate 3 is stuck on block 5, is then placed on baffle plate 4 bottom of quartz boat 7,
The other end is placed on portable plate 3.In alignment processes, if needing to increase or reduce quartz
The gradient of boat, hands can lift the upper end of quartz boat, another hand adjustment joint portable plate 3.
The above is the preferred embodiment of the present invention, for the common skill of the art
For art personnel, under the premise without departing from the principles of the invention, it is also possible to make some improvement and
Retouching, these improvements and modifications are also regarded as protection scope of the present invention.
Claims (1)
1. the base for ADF source quartz boat, it is characterised in that it includes base plate, support, work
Dynamic plate, baffle plate and block, the lower end of described support is fixed on the rear end of described base plate, and support and base plate are in directly
Angle, is provided with reinforcing plate between described base plate and support, and described baffle plate is arranged on the front end of base plate, baffle plate
It is obtuse angle with the angle of described base plate, the base plate at baffle plate rear is provided with some bar shapeds of equidistantly arrangement
Block；The both sides, upper end of described portable plate are provided with convex button, are provided with and described convex button inside described support
The chute coordinated,
Described portable plate upper surface is provided with rubber antiskid pad, and described rubber antiskid pad is provided with along work
3 corrugated anti-slip veins that dynamic plate length direction is arranged side by side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410350714.5A CN104103562B (en) | 2014-07-23 | Base for ADF source quartz boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410350714.5A CN104103562B (en) | 2014-07-23 | Base for ADF source quartz boat |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104103562A CN104103562A (en) | 2014-10-15 |
| CN104103562B true CN104103562B (en) | 2017-01-04 |
Family
ID=
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000208503A (en) * | 1999-01-19 | 2000-07-28 | Nec Kyushu Ltd | Vertical heat treatment device |
| CN201893828U (en) * | 2010-11-25 | 2011-07-06 | 东莞市霖玖玖电子科技有限公司 | Support for iPhone and ipad |
| CN202561382U (en) * | 2012-04-24 | 2012-11-28 | 浙江中呼科技有限公司 | Multi-angle tablet computer support |
| CN202749355U (en) * | 2012-09-27 | 2013-02-20 | 淄博晨启电子有限公司 | Diffusion quartz boat for preventing silicon slices from mismatch |
| CN203258329U (en) * | 2013-04-07 | 2013-10-30 | 余明月 | Adjustable support for tablet computer and intelligent mobile phone |
| CN103511803A (en) * | 2013-09-30 | 2014-01-15 | 吴江市钱氏纺织有限公司 | Foldable electronic product bracket |
| CN204029782U (en) * | 2014-07-23 | 2014-12-17 | 济南晶博电子有限公司 | For the base of ADF source quartz boat |
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000208503A (en) * | 1999-01-19 | 2000-07-28 | Nec Kyushu Ltd | Vertical heat treatment device |
| CN201893828U (en) * | 2010-11-25 | 2011-07-06 | 东莞市霖玖玖电子科技有限公司 | Support for iPhone and ipad |
| CN202561382U (en) * | 2012-04-24 | 2012-11-28 | 浙江中呼科技有限公司 | Multi-angle tablet computer support |
| CN202749355U (en) * | 2012-09-27 | 2013-02-20 | 淄博晨启电子有限公司 | Diffusion quartz boat for preventing silicon slices from mismatch |
| CN203258329U (en) * | 2013-04-07 | 2013-10-30 | 余明月 | Adjustable support for tablet computer and intelligent mobile phone |
| CN103511803A (en) * | 2013-09-30 | 2014-01-15 | 吴江市钱氏纺织有限公司 | Foldable electronic product bracket |
| CN204029782U (en) * | 2014-07-23 | 2014-12-17 | 济南晶博电子有限公司 | For the base of ADF source quartz boat |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant |