CN104084849A - Magneto-rheological finishing method of easy-deliquescence crystals - Google Patents
Magneto-rheological finishing method of easy-deliquescence crystals Download PDFInfo
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- CN104084849A CN104084849A CN201410288335.8A CN201410288335A CN104084849A CN 104084849 A CN104084849 A CN 104084849A CN 201410288335 A CN201410288335 A CN 201410288335A CN 104084849 A CN104084849 A CN 104084849A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/005—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
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Abstract
The invention discloses a magneto-rheological finishing method of easy-deliquescence crystals. The method includes the steps of firstly, preparing non-aqueous magneto-rheological finishing solution; secondly, adding the non-aqueous magneto-rheological finishing solution into a magneto-rheological machine tool circulating system for magneto-rheological finishing twice; thirdly, then using aromatic hydrocarbon to clean the easy-deliquescence crystals fast so as to complete the finishing. The method is simple in process flow and high in operability, and high-precision and ultra-smooth easy-deliquescence crystals which can satisfy the high, medium and low frequency band requirements of a strong-light optical system.
Description
Technical field
The present invention relates to a kind of magnetic rheological polishing method, be specifically related to a kind of magnetic rheological polishing method of deliquescent crystal, realize the polishing of deliquescent crystal element.
Background technology
Technique of Magnetorheological Finishing (MRF) is a kind of novel optics processing method, and it utilizes the rheological characteristic of Magnetorheologicai polishing liquid in magnetic field to carry out polishing to workpiece, can realize certainty and remove and Subnano-class surface roughness.
In current MRF processing, the material of processing is mainly the optical materials such as fused quartz, pottery and carborundum, these materials do not have deliquescent behaviours, what therefore in polishing, use is water-base magnetic rheology polishing liquid, its base load liquid is water, and the removal of material mainly relies on the polishing powder in Magnetorheologicai polishing liquid to carry out shear removal to material.But, for deliquescent crystal as KDP crystalline material, and be not suitable for utilizing this water-base magnetic rheology polishing liquid to process: to there is on the one hand the characteristics such as quality soft (Mohs' hardness 2.4 left and right), high, the easy deliquescence of fragility and easy anneal crack due to this crystalloid, utilize traditional Magnetorheologicai polishing liquid to carry out shear removal, easily plane of crystal produce carbonyl iron dust in obvious cut, Magnetorheologicai polishing liquid easily embed plane of crystal and embed after be difficult to clean; On the other hand, the water capacity in Magnetorheologicai polishing liquid easily causes the atomization of crystal, for easy deliquescence crystalloid material, once there is surperficial deliquescence, will produce irreversible destruction by Surface Quality.This series of problems causes current MRF technique inapplicable on as KDP/DKDP crystal at processing deliquescent crystal, and current high light optical system has urgent demand to the KDP crystal photoelement of high surface figure accuracy, simultaneously, high light optical system comprises each index of KDP crystal: bore, surface figure accuracy, gradient error, PSD1, PSD2, surface roughness has high requirement, ultraprecise Diamond Cutting temporarily cannot process the KDP crystal photoelement that meets all these index requests for various reasons, therefore, need to study new processing technology and solve these technical problems.
Summary of the invention
The technical problem to be solved in the present invention is to overcome the deficiencies in the prior art, provide a kind of technological process simple, workable, can process the high accuracy that meets high light optical system the high, normal, basic each frequency range of crystal is required, the magnetic rheological polishing method of ultra-smooth deliquescent crystal.
For solving the problems of the technologies described above, the magnetic rheological polishing method that the technical solution used in the present invention is a kind of deliquescent crystal, comprises the following steps:
(1) preparation non-water-base magnetic rheology polishing liquid, described non-water-base magnetic rheology polishing liquid comprises alkoxyl alcohol, magnetosensitive particle, surfactant and deionized water;
(2) non-water-base magnetic rheology polishing liquid is added in the magnetorheological lathe circulatory system, deliquescent crystal to be processed is carried out to MRF processing (be conventionally machined to when plane of crystal approaches aimed at precision and stop) for the first time, after aromatic hydrocarbon cleans, then carry out MRF processing for the second time;
(3) after MRF machines for the second time, adopt rapidly aromatic hydrocarbon to clean gained deliquescent crystal, complete the MRF processing of deliquescent crystal.The surface roughness of the deliquescent crystal finally obtaining is less than 1.5nm conventionally.
In above-mentioned magnetic rheological polishing method, preferably, in described step (2), the technological parameter of described MRF for the first time processing is: the relative velocity of polishing wheel and deliquescent crystal to be processed (can by the rotating speed control of polishing wheel) is 1m/s～3m/s, the maximum magnetic field strength of machining area is 210mT～230mT, pressing is deeply 0.1mm～0.3mm, and the flow of non-water-base magnetic rheology polishing liquid is 100L/h～130L/h.
In above-mentioned magnetic rheological polishing method, preferably, in described step (2), the technological parameter of the described processing of MRF is for the second time: the relative velocity of polishing wheel and deliquescent crystal to be processed is 1m/s～3m/s, the maximum magnetic field strength of machining area is 210mT～230mT, pressing is deeply 0.1mm～0.3mm, and the flow of non-water-base magnetic rheology polishing liquid is 100L/h～130L/h.
In above-mentioned magnetic rheological polishing method, preferred, described non-water-base magnetic rheology polishing liquid is obtained by following methods preparation:
(a), according to the formula of non-water-base magnetic rheology polishing liquid, take respectively alkoxyl alcohol, magnetosensitive particle, surfactant and deionized water, by mass fraction, alkoxyl alcohol is 30%～60%, magnetosensitive particle is 30%～60%, and surfactant is 3%～8%, and deionized water is 3%～6%;
(b) alkoxyl alcohol is placed in to a container tank, is first heated to 65 DEG C～75 DEG C and also remains on this temperature always, then add surfactant, through being mixed to form complex liquid, then add magnetosensitive particle in complex liquid, after stirring, obtain mixed liquor;
(c) mixed liquor is poured in ball grinder, with rotating speed ball milling 2h～5h of 150r/min～250r/min, then added deionized water, then with rotating speed ball milling 2h～5h of 50r/min～100r/min, obtain non-water-base magnetic rheology polishing liquid.
In above-mentioned magnetic rheological polishing method, preferred, the viscosity of described non-water-base magnetic rheology polishing liquid in the time of 20 DEG C is 0.35Pas～0.55Pas.
In above-mentioned magnetic rheological polishing method, preferred, described alkoxyl alcohol comprises diethylene glycol monobutyl ether or ethylene glycol monoethyl ether.
In above-mentioned magnetic rheological polishing method, preferred, described magnetosensitive particle is carbonyl iron dust; The granularity of described carbonyl iron dust is 1 μ m～10 μ m, is greater than 97% containing Fe purity, and quality factor is greater than 1.75 relatively, and Effective permeability is greater than 3.
In above-mentioned magnetic rheological polishing method, preferred, described surfactant is one or more in phosphoric acid fat, aliphatic acid, class of department, tween.
In above-mentioned magnetic rheological polishing method, preferred, described surfactant is the mixture of aliphatic acid, Si Ban and tween, and described aliphatic acid is stearic acid; The mass ratio of described stearic acid, class of department, tween is 1: 1: 1.
In above-mentioned magnetic rheological polishing method, preferred, in described step (b), the speed of described stirring is 20r/min～60r/min, and the time of described stirring is 10min～30min.
In above-mentioned magnetic rheological polishing method, preferred, in described step (c), the mixed liquor in described ball grinder and the mass ratio of steel ball are 8～12: 1, and the diameter of described steel ball is 2mm～4mm.
In the present invention, according to reality processing needs, the desirable identical value of technological parameter of the technological parameter of MRF processing for the first time and MRF processing for the second time, also desirable different value, can decide the process time of MRF processing for the first time and MRF processing for the second time according to the required processing stage of deliquescent crystal, and twice processing intermediate demand sets apart and do simple cleaning.
In the present invention, the air humidity that twice MRF adds man-hour is conventionally 45%～55%.
In the present invention, there is the residual of magnetic flow liquid in the plane of crystal after polishing, after polishing, need to adopt rapidly aromatic hydrocarbon to clean, the general hardness of deliquescent crystal is low, easily occurs cut, in the process of cleaning, add appropriate aromatic hydrocarbon to plane of crystal, use absorbent cotton wiping 2 to 3 times gently, can clean up, obtain the crystal of the high accuracy ultra-smooth of surface clean no marking.
Compared with prior art, the invention has the advantages that:
1. the non-water-base magnetic rheology liquid in the present invention has that good rheological property, zero magnetic field viscosity are low, excellent in stability, does not precipitate and non-caking feature, and its main component is magnetosensitive particle, surfactant, base load liquid, deionized water.In order to meet the requirement of MRF, magnetosensitive particle must have following characteristic: magnetic conductivity is high, magnetic hysteresis loss is few, purity is high, and the shape of magnetosensitive particle can be to material production removal effect in polishing process.Magnetosensitive particle of the present invention has been selected carbonyl iron dust, and the granularity of single particulate of carbonyl iron dust is 1 μ m～10 μ m, and containing Fe purity, for being greater than 97%, quality factor is greater than 1.75 relatively, and Effective permeability is greater than 3, can meet the requirement to magnetosensitive particle.Surfactant is generally made up of nonpolar oleophilic moiety and polarity hydrophilic segment, and the present invention utilizes the chemical action of surfactant, and hydrophily magnetosensitive particle can be dispersed in oil loving base load liquid uniformly.Base load liquid of the present invention adopts stable chemical performance, non-volatile, avirulent alkoxyl alcohol, magnetorheological processing is processed as certainty, need the circulatory system to keep Long-term stability, because need each component chemical stable in properties of magnetic flow liquid, and between each component, there is not chemical reaction, alkoxyl alcohol stable chemical nature, there is not chemical reaction with the crystal in various compositions and the polishing of magnetic flow liquid, meanwhile, alkoxyl alcohol nontoxicity, is convenient to process operation.
2. magnetic rheological polishing method technological process of the present invention is simple, workable, can process and meet the high accuracy ultra-smooth deliquescent crystal optical element that high light optical system requires the high, normal, basic each frequency range of crystal.This magnetic rheological polishing method has adopted non-water-base magnetic rheology polishing liquid, in the time of polishing deliquescent crystal, due to the quality of deliquescent crystal soft (Mohs' hardness 2.4), when polishing, easily cause embedding and the surface of iron powder to produce cut, utilize the dissolution of hydrone in non-water-base magnetic rheology polishing liquid to replace traditional shearing force to realize the removal of material, realize the crystal processing of high accuracy ultra-smooth in conjunction with the certainty correction of the flank shape technology of magnetorheological processing, can effectively avoid carbonyl iron dust under the effect of pressure, to embed the surface of crystal, also can avoid surface to occur cut simultaneously.Because the deliquescent crystal chance water capacity is prone to surface atomizing, the water content in Magnetorheologicai polishing liquid needs accurately to control.In the present invention, the water content of non-water-base magnetic rheology polishing liquid is lower, and in polishing process, because Magnetorheologicai polishing liquid is always in circulating state, the moisture contacting with crystal will soon be pulled away, and has avoided the atomization of plane of crystal.Water content in Magnetorheologicai polishing liquid is very low, dissolve the efficiency of removing also lower, in the time of the bigbore crystal of processing, if efficiency is on the low side, process time is just long, therefore, the present invention can be by controlling different machined parameters in preliminary working (polishing for the first time) with in later stage high accuracy processing (polishing for the second time), the higher parameter of initial stage processing service efficiency, this can cause plane of crystal quality to have slight decline, approach after target call in precision, use low removal efficiency, improve the surface quality of crystal, so just can in ensureing machining accuracy, avoid process time long.
3. to have Magnetorheologicai polishing liquid residual on the present invention deliquescent crystal surface after MRF, can see under the microscope residual due to iron powder, plane of crystal has a large amount of " pore ", and subregion presents dusky a slice, therefore needs rational cleaning agent and cleaning.General cleaning agent, such as alcohol is owing to having hydrophily, can absorb airborne hydrone, cause the atomization on deliquescent crystal surface, the present invention adopts volatile aromatic hydrocarbon as cleaning agent, due to aromatic hydrocarbon stable chemical nature, not can with crystal generation chemical reaction,, volatilely do not absorb water meanwhile, can ensure not destroy the plane of crystal after polishing, and effectively clean the pollutant of plane of crystal.Common paper handkerchief is easy to clash obvious cut at plane of crystal, the present invention can the high-quality lens wiping paper of adapted, under the environment of constant temperature, low humidity, realize the surface clean of deliquescent crystal after polishing, remove the impurity components such as residual Magnetorheologicai polishing liquid, obtained the residual deliquescent crystal of surperficial no marking iron powder.
Brief description of the drawings
Fig. 1 is the photo that in the embodiment of the present invention, KDP crystal is carried out MRF processing.
Fig. 2 is the primary face shape of the front KDP crystal of magnetorheological correction of the flank shape in the embodiment of the present invention.Adopt the non-water-base magnetic rheology polishing liquid in the present invention on KDP crystal, to make a call to a removal spot every 1 hour, the result of utilizing wavefront interferometer to measure, PV represents surface figure accuracy peak-to-valley value, rms represents the mean square error of surface figure accuracy, Power represents spherical aberration, and wave represents wavelength X (λ=632.8nm).
Fig. 3 is the initial surface roughness of the front KDP crystal of magnetorheological correction of the flank shape in the embodiment of the present invention.Wherein, PV represents surface roughness peak-to-valley value, and rms represents the mean square error of surface roughness, and Ra represents the profile arithmetic average error of surface roughness.
Fig. 4 is the face shape of the rear KDP crystal of MRF processing for the first time in the embodiment of the present invention.
Fig. 5 is the surface roughness of the rear KDP crystal of MRF processing for the first time in the embodiment of the present invention.
Fig. 6 is the face shape of the rear KDP crystal of MRF processing for the second time in the embodiment of the present invention.
Fig. 7 is the surface roughness of the rear KDP crystal of MRF processing for the second time in the embodiment of the present invention.
Fig. 8 is that in the embodiment of the present invention, twice MRF processed the microphotograph of rear gained KDP plane of crystal before cleaning.
Fig. 9 is that in the embodiment of the present invention, twice MRF processed the microphotograph of rear gained KDP plane of crystal after cleaning.
Detailed description of the invention
Below in conjunction with Figure of description, the invention will be further described with concrete preferred embodiment, but protection domain not thereby limiting the invention.
embodiment:
A kind of magnetic rheological polishing method of deliquescent crystal of the present invention, processing object is the square KDP crystal of a 47mm × 47mm, primary face shape is the surface after ultra-precise cutting, initial surface figure accuracy is 1.481 λ (PV) (λ=632.8nm), surface no marking, surface roughness is 1.58nm(RMS).This magnetic rheological polishing method comprises the following steps:
(1) preparation non-water-base magnetic rheology polishing liquid, by mass fraction, this non-water-base magnetic rheology polishing liquid comprises 31% diethylene glycol monobutyl ether (477g, 500ml), 59% carbonyl iron dust (900g), 5% surfactant (75g) and 5% deionized water (75g, 75ml) composition.Wherein, the viscosity of diethylene glycol monobutyl ether in the time of 20 DEG C is 6.49mPas; The granularity of carbonyl iron dust is mainly in 1 μ m～10 μ m scope, and average grain diameter is 5 μ m, is greater than 97% containing Fe purity, and quality factor is greater than 1.75 relatively, and Effective permeability is greater than 3, and this carbonyl iron dust can be bought and obtain in market; Surfactant is the mixture of stearic acid, class 60 of department and polysorbate60, and three's mass ratio is 1: 1: 1.The viscosity of this non-water-base magnetic rheology polishing liquid in the time of 20 DEG C is 0.5Pas.
The preparation method of the non-water-base magnetic rheology polishing liquid of the present embodiment comprises the following steps:
(a), according to the formula of above-mentioned non-water-base magnetic rheology polishing liquid, take diethylene glycol monobutyl ether base load liquid 500ml(477g), magnetosensitive particle carbonyl iron dust 900g, stearic acid 25g, class of department 60 is 25g, polysorbate60 is 25g, deionized water 75ml(75g).
(b) diethylene glycol monobutyl ether (alkoxyl alcohol) is placed in to the container tank of stainless steel, homogeneous heating to 70 DEG C also remains on this temperature always, then add the surfactant configuring, be mixed to form complex liquid, carbonyl iron dust is added in complex liquid again, stir 20min with mechanical agitator, rotating speed is 30r/min, obtain mixed liquor, now the temperature of this mixed liquor is still 70 DEG C.
(c) above-mentioned mixed liquor is poured in ball grinder, the ratio that is 10: 1 according to the steel ball in mixed liquor and ball grinder (diameter 2mm) mass ratio is put into ball milling steel ball, ball sealer grinding jar, and ball mill was with the rotating speed ball milling of 200r/min 3 hours; Then open ball grinder, add 75ml deionized water, stir by stirring rod, ball sealer grinding jar, ball mill, with the rotating speed ball milling of 100r/min 2 hours, after ball milling completes, takes out ball grinder, separates steel ball, obtains non-water-base magnetic rheology polishing liquid.
(2) non-water-base magnetic rheology polishing liquid of step (1) preparation is added in the conventional magnetorheological lathe circulatory system, as shown in Figure 1, KDP crystal is carried out to twice taste rheology polishing (air humidity is 45%): when twice polishing, the relative velocity of polishing wheel and KDP crystal is 1.5m/s, the maximum magnetic field strength of machining area is 230mT, the flow of non-water-base magnetic rheology polishing liquid is 130L/h, the pressure of twice polishing is respectively 0.2mm deeply, 0.15mm, be respectively 50min process time, 34min, after polishing, clean KDP crystal with dimethylbenzene for the first time, carry out again polishing for the second time, through twice MRF processing, after processing, the face shape of KDP crystal converges to 0.494 λ (PV), and surface roughness is 0.99nm(RMS).
Fig. 2,4,6 is respectively the surface figure accuracy of initial, the MRF KDP crystal once, after twice of MRF, Fig. 3,5,7 is respectively the surface roughness of initial, the MRF KDP crystal once, after twice of MRF, from result, through twice MRF correction of the flank shape, the surface figure accuracy of KDP crystal has converged to 0.494 λ from 1.481 λ, surface roughness rises to 0.99nm from 1.58nm, and surface figure accuracy and surface quality are all largely increased.Fig. 8,9 is respectively the surface quality before and after cleaning, and from result, through cleaning, the clean no marking of plane of crystal, has realized the KDP crystal processing of high accuracy ultra-smooth.
After (3) twice MRF machine, there is the residual of Magnetorheologicai polishing liquid in KDP plane of crystal, as shown in Figure 8, and under the microscope, surface is unclean, present the dusky a slice of a part and part " pore ", after the cleaning of dimethylbenzene, the wiping 2 times gently of use absorbent cotton, can clean up, as shown in Figure 9, KDP plane of crystal iron powder embeds, no marking, has obtained the high accuracy ultra-smooth no marking KDP crystal of expection.
The above is only the preferred embodiment of the present invention, and protection scope of the present invention is also not only confined to above-described embodiment.All technical schemes belonging under thinking of the present invention all belong to protection scope of the present invention.Be noted that for those skilled in the art, improvements and modifications under the premise without departing from the principles of the invention, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (10)
1. a magnetic rheological polishing method for deliquescent crystal, comprises the following steps:
(1) preparation non-water-base magnetic rheology polishing liquid, described non-water-base magnetic rheology polishing liquid comprises alkoxyl alcohol, magnetosensitive particle, surfactant and deionized water;
(2) non-water-base magnetic rheology polishing liquid is added in the magnetorheological lathe circulatory system, deliquescent crystal to be processed is carried out to MRF processing for the first time, after aromatic hydrocarbon cleans, then carry out MRF processing for the second time;
(3) after MRF machines for the second time, adopt rapidly aromatic hydrocarbon to clean gained deliquescent crystal, complete the MRF processing of deliquescent crystal.
2. magnetic rheological polishing method according to claim 1, it is characterized in that, in described step (2), the technological parameter of the described processing of MRF is for the first time: the relative velocity of polishing wheel and deliquescent crystal to be processed is 1m/s～3m/s, the maximum magnetic field strength of machining area is 210mT～230mT, pressing is deeply 0.1mm～0.3mm, and the flow of non-water-base magnetic rheology polishing liquid is 100L/h～130L/h.
3. magnetic rheological polishing method according to claim 1, it is characterized in that, in described step (2), the technological parameter of the described processing of MRF is for the second time: the relative velocity of polishing wheel and deliquescent crystal to be processed is 1m/s～3m/s, the maximum magnetic field strength of machining area is 210mT～230mT, pressing is deeply 0.1mm～0.3mm, and the flow of non-water-base magnetic rheology polishing liquid is 100L/h～130L/h.
4. according to the magnetic rheological polishing method described in any one in claim 1～3, it is characterized in that, described non-water-base magnetic rheology polishing liquid is obtained by following methods preparation:
(a), according to the formula of non-water-base magnetic rheology polishing liquid, take respectively alkoxyl alcohol, magnetosensitive particle, surfactant and deionized water, by mass fraction, alkoxyl alcohol is 30%～60%, magnetosensitive particle is 30%～60%, and surfactant is 3%～8%, and deionized water is 3%～6%;
(b) alkoxyl alcohol is placed in to a container tank, is first heated to 65 DEG C～75 DEG C and also remains on this temperature always, then add surfactant, through being mixed to form complex liquid, then add magnetosensitive particle in complex liquid, after stirring, obtain mixed liquor;
(c) mixed liquor is poured in ball grinder, with rotating speed ball milling 2h～5h of 150r/min～250r/min, then added deionized water, then with rotating speed ball milling 2h～5h of 50r/min～100r/min, obtain non-water-base magnetic rheology polishing liquid.
5. magnetic rheological polishing method according to claim 4, is characterized in that, the viscosity of described non-water-base magnetic rheology polishing liquid in the time of 20 DEG C is 0.35Pas～0.55Pas.
6. magnetic rheological polishing method according to claim 4, is characterized in that, described alkoxyl alcohol comprises diethylene glycol monobutyl ether or ethylene glycol monoethyl ether.
7. magnetic rheological polishing method according to claim 4, is characterized in that, described magnetosensitive particle is carbonyl iron dust; The granularity of described carbonyl iron dust is 1 μ m～10 μ m, is greater than 97% containing Fe purity, and quality factor is greater than 1.75 relatively, and Effective permeability is greater than 3.
8. magnetic rheological polishing method according to claim 4, is characterized in that, described surfactant is one or more in phosphoric acid fat, aliphatic acid, class of department, tween.
9. magnetic rheological polishing method according to claim 8, is characterized in that, described surfactant is the mixture of aliphatic acid, Si Ban and tween, and described aliphatic acid is stearic acid; The mass ratio of described stearic acid, class of department, tween is 1: 1: 1.
10. magnetic rheological polishing method according to claim 4, is characterized in that, in described step (b), the speed of described stirring is 20r/min～60r/min, and the time of described stirring is 10min～30min; In described step (c), the mixed liquor in described ball grinder and the mass ratio of steel ball are 8～12: 1, and the diameter of described steel ball is 2mm～4mm.
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| CN104588353A (en) * | 2015-01-15 | 2015-05-06 | 山东大学 | Magnetic-jet washing device for washing surface of large-sized KDP (potassium dihydrogen phosphate) crystal and washing process |
| CN105252375A (en) * | 2015-10-14 | 2016-01-20 | 中国人民解放军国防科学技术大学 | Method for increasing laser-damaged threshold through ion beam elastic domain etching |
| CN107791104A (en) * | 2016-08-31 | 2018-03-13 | 中国人民解放军国防科学技术大学 | A kind of processing method for lifting magnetorheological water dissolving polishing deliquescent crystal processing efficiency |
| CN108161583A (en) * | 2017-12-29 | 2018-06-15 | 中国人民解放军国防科技大学 | Magnetorheological preparation method of surface phase structure of deliquescent crystal |
| CN116120839A (en) * | 2023-04-04 | 2023-05-16 | 中国科学技术大学 | Magnetorheological fluid for perovskite semiconductor material and magnetorheological polishing method |
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| 曾育伟等: "KDP晶体的磁流变抛光工艺研究", 《航空精密制造技术》, vol. 48, no. 4, 15 August 2012 (2012-08-15) * |
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