CN104074716A - Cryopump and method for evacuation - Google Patents
Cryopump and method for evacuation Download PDFInfo
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- CN104074716A CN104074716A CN201410112112.6A CN201410112112A CN104074716A CN 104074716 A CN104074716 A CN 104074716A CN 201410112112 A CN201410112112 A CN 201410112112A CN 104074716 A CN104074716 A CN 104074716A
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- cryopanel
- cryopump
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
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- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
The invention provides a cryopump and a method for evacuation. A cryopump(10) includes a refrigerator (16), a first cryopanel(18) including a radiation shield(30) and a plate member across a shield opening and a second cryopanel(20) enclosed by the first cryopanel(18) and cooled to a lower temperature than that of the first cryopanel(18) . The refrigerator (16) is disposed on the radiation shield(30). The shield member is adjacent to an installation pedestal(37), and is used to enclose the second cryopanel(20). The lateral gap (43) can be formed between the second cryopanel(20)and the installation pedestal (37). The gap part (44) connected to the lateral gap (43) is formed between the second cryopanel(20) and the shield member. The shape of the second cryopanel(20) or the second cryopanel(20) is configured to be consistent to the width of the later gap (43) and the width of the gap part (44).
Description
The application advocates the preference of No. 2013-125819th, the Japanese patent application of No. 2013-062560th, Japanese patent application based on March 25th, 2013 application and application on June 14th, 2013.The full content of these Japanese patent applications is by reference to being applied in this specification.
Technical field
The present invention relates to a kind of cryopump.
Background technique
Cryopump generally possesses two kinds of cryopanels that temperature is different.Condensation of gas is on the cryopanel of low temperature.Along with the use of cryopump, on low temperature plate, condensate layer gradually grows up, and may contact with the cryopanel of high temperature soon.Thus, in the contact position of high temperature cryopanel and condensate layer, gas again gasifies and discharges towards periphery.After this, cryopump cannot be given full play to original effect.Therefore, the hold-up of gas now becomes the maximum hold-up of cryopump.
Patent documentation 1: TOHKEMY 2009-275672 communique
Summary of the invention
One of exemplary object of one embodiment of the present invention is to improve the gas hold-up of cryopump.
The cryopump of one embodiment of the present invention, it possesses: refrigerator, possesses the 1st cooling table and be cooled into 2nd cooling table of temperature lower than described the 1st cooling table; The 1st cryopanel, possesses the radiation barrier part with main opening and the entrance cryopanel that is disposed in described main opening, and with described the 1st cooling table hot connecting; And the 2nd cryopanel, surrounded by described the 1st cryopanel, and with described the 2nd cooling table hot connecting.Described radiation barrier part possesses: fitting seat, be positioned at the side direction of described the 2nd cryopanel, and for described refrigerator being installed on to described radiation barrier part; And shielding element part, adjacent with described fitting seat and surround described the 2nd cryopanel.Between described the 2nd cryopanel and described fitting seat, be formed with sideshake, between described the 2nd cryopanel and described shielding element part, be formed with the clearance portion continuous with described sideshake, the shape of described the 2nd cryopanel or configuration be adjusted to make the width of described sideshake and the width of described clearance portion consistent.
In addition, using also effective as mode of the present invention to constitutive requirements of the present invention or the form of expression mutual technology of replacing between method, Apparatus and system etc.
According to the present invention, can improve the gas hold-up of cryopump.
Brief description of the drawings
Fig. 1 is the side view cutaway drawing that schematically illustrates the major component of the related cryopump of the 1st mode of execution of the present invention.
Fig. 2 is the plan view that schematically illustrates the related top board of the 1st mode of execution of the present invention.
Fig. 3 is the plan view that schematically illustrates the related plate member of the 1st mode of execution of the present invention.
Fig. 4 is the figure that schematically illustrates the related operating cryopump of exhaust of the 1st mode of execution of the present invention.
Fig. 5 is the side view cutaway drawing that schematically illustrates the major component of the related cryopump of the 2nd mode of execution of the present invention.
Fig. 6 is the side view cutaway drawing that schematically illustrates the major component of the related cryopump of the 3rd mode of execution of the present invention.
In figure: 10-cryopump, 16-refrigerator, 18-the 1st cryopanel, 20-the 2nd cryopanel, 22-the 1st cooling table, 24-the 2nd cooling table, 26-shielding element opening, 30-radiation barrier part, 32-plate member, 36-shielding element sidepiece, 37-fitting seat, 41-opens annulus, 42-mounting hole, 43-sideshake, 44-clearance portion, gap, 46-top, gap, 48-below, 50-plate main part, 52-plate outer edge, 54-aperture, 56-gas is by region, 58-gas shield region, 61-top board front surface, 62-center region, 63-exterior lateral area, 74-notch part.
Embodiment
Fig. 1 is the side view cutaway drawing that schematically illustrates the major component of the related cryopump 10 of the 1st mode of execution of the present invention.Cryopump 10 is for example installed on the vacuum chamber of ion implantation apparatus or sputter equipment etc., till the degree of vacuum of vacuum chamber inside is increased to the desired level of desirable technique.Cryopump 10 has the intakeport 12 for receiver gases.The gas that should be discharged from enters the inner space 14 of cryopump 10 by intakeport 12 from the vacuum chamber of cryopump 10 is installed.Fig. 1 illustrates the cross section of the central shaft A of the inner space 14 that comprises cryopump 10.
In addition, below for the ease of understanding the position relationship of constitutive requirements of cryopump 10, sometimes use the terms such as " axially ", " radiation direction ".Axially represent direction through intakeport 12 (in Fig. 1 along single-point line A direction), radiation direction indication is along the direction (direction vertical with single-point line A) of intakeport 12.For simplicity, sometimes by the axial direction relatively near the direction of intakeport 12 be called " on ", relatively away from direction be called D score.That is, sometimes the direction of the relative bottom away from cryopump 10 is called " on ", relatively close direction is called D score.In radiation direction, sometimes will be called " interior " near the direction of intakeport 12 center (axle A centered by Fig. 1), the direction of the periphery near intakeport 12 is called to " outward ".Radiation direction also can be called radially.In addition, configuration-independent when this form of expression and cryopump 10 are installed on vacuum chamber.For example, cryopump 10 can vertically make intakeport 12 towards getting off to be installed on vacuum chamber.
And, sometimes will be called " circumferentially " around axial direction.Be circumferentially the 2nd direction along intakeport 12, and be and radially orthogonal tangent direction.
Cryopump 10 possesses refrigerator 16.Refrigerator 16 is for example the ultra-low temperature refrigerating devices such as Ji Fude-McMahon formula refrigerator (so-called GM refrigerator).Refrigerator 16 is for possessing the two-stage type refrigerator of the 1st cooling table 22 and the 2nd cooling table 24.Refrigerator 16 is constituted as the 1st cooling table 22 is cooled to the 1st temperature levels, and the 2nd cooling table 24 is cooled to the 2nd temperature levels.The temperature of the 2nd temperature levels is lower than the 1st temperature levels.For example, the 1st cooling table 22 is cooled to 65K～120K left and right, is preferably cooled to 80K～100K, and the 2nd cooling table 24 is cooled to 10K～20K left and right.
And refrigerator 16 possesses the 1st cylinder body 23 and the 2nd cylinder body 25.The room temperature portion of refrigerator 16 is connected in the 1st cooling table 22 by the 1st cylinder body 23.The 2nd cylinder body 25 is for being connected in the 1st cooling table 22 attachment portion of the 2nd cooling table 24.
Illustrated cryopump 10 is so-called horizontal low temperature pump.Horizontal low temperature pump generally refers to that refrigerator 16 is arranged to the central shaft A of the inner space 14 of cryopump 10 and intersects the cryopump of (being generally orthogonal).
Cryopump 10 possesses the 1st cryopanel 18 and is cooled into 2nd cryopanel 20 of temperature lower than the 1st cryopanel 18.Detailed content is by aftermentioned, and the 1st cryopanel 18 possesses radiation barrier part 30 and plate member 32, and surrounds the 2nd cryopanel 20.Between plate member 32 and the 2nd cryopanel 20, form the main holding space 21 of condensate layer.
First, the 2nd cryopanel 20 is described.The 2nd cryopanel 20 is arranged at the central part of the inner space 14 of cryopump 10.The 2nd cryopanel 20 is installed on the 2nd cooling table 24 to surround the mode of the 2nd cooling table 24.Therefore, the 2nd cryopanel 20 and the 2nd cooling table 24 hot connectings, thus the 2nd cryopanel 20 is cooled to the 2nd temperature levels.
The 2nd cryopanel 20 possesses top board 60.Top board 60 is directly installed on the upper surface of the 2nd cooling table 24 of refrigerator 16, and the 2nd cooling table 24 is positioned at the central part of the inner space 14 of cryopump 10.So, the main holding space 21 of condensate layer accounts for upper half part of inner space 14.
Top board 60 is in order to arrange in its surface condensation of gas.Top board 60 is the part of the most close plate member 32 in the 2nd cryopanel 20, possesses and the opposed top board front surface 61 of plate member 32.The exterior lateral area 63 that top board front surface 61 possesses center region 62 and surrounds center region 62.
Top board 60 is and the axial vertically cryopanel of the substantially planar of configuration.Top board 60 is fixed on the 2nd cooling table 24 in center region 62.Center region 62 has recess, and top board 60 uses suitable such as bolt of fixed component 64(in this recess) be fixed on the 2nd cooling table 24(with reference to figure 2 and Fig. 3).Around recess, be formed with stepped part 65 upward.The height of stepped part 65 is configured to fixed component 64 to be contained in recess.Exterior lateral area 63 is extended from stepped part 65 towards radial outside.The radial extremity of exterior lateral area 63 is bending downwards, forms the peripheral end 66 of top board 60.As shown in Figure 2, top board 60 is roughly discoideus plate.
In addition, top board 60 also can not have the recess of the center region 62 that holds fixed component 64.Now, top board front surface 61 can be for not having the tabular surface of stepped part 65.And in present embodiment, top board 60 does not possess sorbent, but also can be provided with sorbent at for example its back side.
Fig. 2 is the plan view that schematically illustrates the related top board 60 of the 1st mode of execution of the present invention.The shape of the 2nd cryopanel 20 be adjusted to make the width W 1 of sideshake 43 and the width W 2 of clearance portion 44 consistent., the width W 1 of sideshake 43 and the width W 2 of clearance portion 44 equate substantially.For this reason, top board 60 has the notch part 74 of the width expansion of sideshake of making 43.This notch part 74 has arc shape.In addition, about the conventional plate 67(of below with reference to figure 1), equally also can there is notch part.
And the 2nd cryopanel 20 comprises one or more conventional plates 67.Conventional plate 67 is in order to arrange in its surface condensation of gas or absorption.Conventional plate 67 is arranged in the below of top board 60.The shape of conventional plate 67 is different from top board 60.Conventional plate 67 for example has respectively the shape of circular cone side, the i.e. shape of so-called umbrella.On each conventional plate 67, be provided with the sorbents such as active carbon 68.Sorbent is bonded in for example back side of conventional plate 67.Object is the front surface of conventional plate 67 as cryosurface, the back side is played a role as adsorption plane.
The 1st cryopanel 18 is in order to protect the 2nd cryopanel 20 to avoid from the outside of cryopump 10 or the radiation heat of cryopump container 38 and the cryopanel arranging.The 1st cryopanel 18 and the 1st cooling table 22 hot connectings.Therefore, the 1st cryopanel 18 is cooled to the 1st temperature levels.Between the 1st cryopanel 18 and the 2nd cryopanel 20, have gap, the 1st cryopanel 18 does not contact with the 2nd cryopanel 20.
Radiation barrier part 30 is in order to protect the 2nd cryopanel 20 to avoid arranging from the radiation heat of cryopump container 38.Radiation barrier part 30 is between cryopump container 38 and the 2nd cryopanel 20, and encirclement the 2nd cryopanel 20.Radiation barrier part 30 possesses: delimit as the shielding element front end 28 of the shielding element opening 26 of main opening, with the opposed shielding element of shielding element opening 26 bottom 34 and the shielding element sidepieces 36 that extend bottom 34 from from shielding element front end 28 to shielding element.Shielding element opening 26 is positioned at intakeport 12.Radiation barrier part 30 has the shape of shielding element bottom 34 tubulars that are closed (for example cylinder), and is formed as cup-shaped.
Radiation barrier part 30 possesses the fitting seat 37 of refrigerator 16.Depression when fitting seat 37 is observed from the outside of radiation barrier part 30, is formed with for refrigerator 16 is installed on to the flat on radiation barrier part 30 at shielding element sidepiece 36.Fitting seat 37 is positioned at the side direction of the 2nd cryopanel 20.As mentioned above, top board 60 is directly installed on the upper surface of the 2nd cooling table 24 of refrigerator 16, therefore top board 60 is positioned on the height identical with the 2nd cooling table 24, and therefore fitting seat 37 is positioned at the side direction of top board 60.
Shielding element sidepiece 36 forms the annulus of integrally closed.Shielding element sidepiece 36 possesses fitting seat 37 and opens annulus 41(with reference to figure 2).Open annulus 41 for the shielding element part along the C word shape circumferentially extending, upwards adjacent with fitting seat 37 in week.Open annulus 41 and together surround the 2nd cryopanel 20 with fitting seat 37, and form the annulus of sealing.Between the 2nd cryopanel 20 and fitting seat 37, be formed with sideshake 43, at the 2nd cryopanel 20 and open the clearance portion 44 that is formed with C word shape between annulus 41.Clearance portion 44 forms with sideshake 43 annular gap sealing continuously.Clearance portion 44 upwards has certain width in week.
As shown in Figure 1, have the mounting hole 42 of refrigerator 16 on fitting seat 37, the 2nd cooling table 24 and the 2nd cylinder body 25 of refrigerator 16 are inserted into radiation barrier part 30 from this mounting hole 42.The 1st cooling table 22 of refrigerator 16 is disposed at the outside of radiation barrier part 30.Radiation barrier part 30 is connected in the 1st cooling table 22 via heat transfer component 45.Heat transfer component 45 is fixed on the peripheral part of mounting hole 42 by the flange of its one end, be fixed on the 1st cooling table 22 by the flange of the other end.Heat transfer component 45 is for example the short cylinder of hollow, and its central shaft along refrigerator 16 extends between radiation barrier part the 30 and the 1st cooling table 22.So, radiation barrier part 30 and the 1st cooling table 22 hot connectings.In addition, radiation barrier part 30 also can directly be installed on the 1st cooling table 22.
Between the 2nd cylinder body 25 and mounting hole 42, gap 46 above being formed with near shielding element opening 26 1 sides, gap 48 below being formed with away from shielding element opening 26 1 sides.Because refrigerator 16 is inserted into mounting hole 42 center, therefore the width in gap 46, top equates with the width in gap, below 48.
In the present embodiment, radiation barrier part 30 is configured to the tubular of one as shown in the figure.Mode as an alternative, radiation barrier part 30 also can be formed as entirety by multiple parts and be cylindrical shape.These multiple parts also can mutually keep gap and arrange.For example, radiation barrier part 30 can be divided into 2 parts in the axial direction.Now, the cylinder that the top of radiation barrier part 30 is both ends open, it possesses the section 1 of shielding element front end 28 and shielding element sidepiece 36.The bottom of radiation barrier part 30 upper end is opened and lower end closed, and it possesses part 2 and the shielding element bottom 34 of shielding element sidepiece 36.Between the section 1 of shielding element sidepiece 36 and part 2, be formed with the gap of extending along circumferentially.Upper half part of the mounting hole 42 of refrigerator 16 is formed at the section 1 of shielding element sidepiece 36, and lower half portion is formed at the part 2 of shielding element sidepiece 36.
On cryopump 10, be provided with the refrigeration hood 70 of the 2nd cylinder body 25 that surrounds refrigerator 16.Refrigeration hood 70 is formed as the drum of diameter less times greater than the 2nd cylinder body 25, and one end is installed on the 2nd cooling table 24, extends towards the 1st cooling table 22 through the mounting hole 42 of radiation barrier part 30.Between refrigeration hood 70 and radiation barrier part 30, be provided with gap, refrigeration hood 70 does not contact with radiation barrier part 30.Refrigeration hood 70 and the 2nd cooling table 24 hot connectings, thus be cooled to the temperature identical with the 2nd cooling table 24.Therefore, refrigeration hood 70 can also be regarded a part for the 2nd cryopanel 20 as.
Plate member 32 is in order to protect the 2nd cryopanel 20 avoid from the radiation heat of the external heat source of cryopump 10 and be arranged at intakeport 12(or shielding element opening 26, below identical) entrance cryopanel.The external heat source of cryopump 10 is for example the thermal source in the vacuum chamber of installation cryopump 10.Not only limit photothermal entering, but also limit entering of gas molecule.Plate member 32 occupies a part for the opening area of intakeport 12, to the gas flowing into inner space 14 by intakeport 12 is constrained to desirable amount.Plate member 32 covers a greater part of of intakeport 12.For example, and the gas of condensation under the chilling temperature of plate member 32 (moisture) captures its surface.
Between shielding element front end 28 and plate member 32, there is vertically small gap.Limit gas flow in order to cover this gap, plate member 32 possesses skirt section 33.Skirt section 33 is for surrounding the short cylinder of plate member 32.Skirt section 33 and plate member 32 together form the integrative-structure of the round tray shape using plate member 32 as bottom surface.This round tray structure is configured to cover on radiation barrier part 30.Therefore, skirt section 33 is outstanding to axial below from plate member 32, and with shielding element front end 28 radially adjoinings extend.Radial distance between skirt section 33 and shielding element front end 28 is for example about the tolerance of size of radiation barrier part 30.
Gap between shielding element front end 28 and plate member 32 is likely because of the error change on manufacturing.This error can reduce by the processing of precise part and assembling, but considers that the rising of consequent manufacture cost is unrealistic.Error causes the individual difference of cryopump 10.While supposing there is no skirt section 33, change according to the size in gap to the gas influx of radiation barrier part 30 interior side inflows.The influx of gas is directly related with the exhaust velocity of cryopump 10.No matter excesssive gap or too small, the performance of actual exhaust velocity on also can off-design.By cover the gap between shielding element front end 28 and plate member 32 with skirt section 33, the gas flow in restricted passage gap, and reduce individual difference.Its result, can also reduce the individual difference of cryopump exhaust velocity with respect to design performance.
Shielding element front end 28 and plate member 32 exceed the intakeport flange 40 of cryopump container 38 and are disposed at axial top.So, radiation barrier part 30 extends towards the vacuum chamber that cryopump 10 is installed.By radiation barrier part 30 is extended upward, can expand main holding space 21 axial spaces of condensate layer.Wherein, the axial length of this extension is configured to not and vacuum chamber (or gate valve) between vacuum chamber and cryopump 10 disturbs.
Cryopump container 38 is the framework of holding the cryopump 10 of the 1st cryopanel the 18, the 2nd cryopanel 20 and refrigerator 16, and is configured to the vacuum vessel of the vacuum-tightness that keeps inner space 14.Front end 39 by cryopump container 38 delimited intakeport 12.Cryopump container 38 possesses the intakeport flange 40 extending towards radial outside from front end 39.Intakeport flange 40 spreads all over the complete cycle of cryopump container 38 and arranges.Use intakeport flange 40 that cryopump 10 is installed on to vacuum chamber.
Fig. 3 is the plan view that schematically illustrates the related plate member 32 of the 1st mode of execution of the present invention.In Fig. 3, dot the representational constitutive requirements that are positioned at plate member 32 belows.
Plate member 32 for example possesses, across the one flat plate of shielding element opening 26 (plectane).The size (for example diameter) of plate member 32 and the consistent size of shielding element opening 26.Plate member 32 is divided into plate main part 50 and plate outer edge 52.Plate outer edge 52 is for plate main part 50 is installed on to the edge part on radiation barrier part 30.
Plate member 32 is installed on the plate assembly department 29 of shielding element front end 28.Plate assembly department 29 is from shielding element front end 28 to the outstanding protuberance of radially inner side, and on circumferentially, uniformly-spaced (for example, every 90 °) form.Plate member 32 is fixed on plate assembly department 29 by suitable method.For example, plate assembly department 29 and plate outer edge 52 have bolt hole (not shown), plate outer edge 52 by bolton in plate assembly department 29.
In plate member 32, be formed with multiple apertures 54 of allowing gas flow.Aperture 54 is for being formed at the penetration hole of plate main part 50 and plate outer edge 52.Therefore, can make to be condensate in the 2nd cryopanel 20(is mainly top board 60) on gas enter in the main holding space 21 between plate member 32 and the 2nd cryopanel 20 by aperture 54.In addition, aperture 54 is not formed near the plate assembly department 29 in plate outer edge 52.
Aperture 54 is arranged regularly.In the present embodiment, aperture 54 uniformly-spaced arranges to form respectively the grid of aperture 54 in two orthogonal rectilinear directions.Instead scheme, aperture 54 also can radially and circumferentially uniformly-spaced arrange respectively.
The shape of aperture 54 is for example circular, but is not limited to this, and aperture 54 can be also the slit that has the opening of other shapes such as rectangle, extend with straight line shape or curve-like or the breach that is formed at the periphery of plate member 32.The size of aperture 54 is significantly less than shielding element opening 26.
Plate main part 50 possesses: the gas with multiple apertures 54 is formed at by region 56 and on plate main part 50 from gas by the gas shield region 58 of different position, region 56.Therefore, plate main part 50 is divided into gas by region 56 and gas shaded areas 58.Gas is adjacent one another are by region 56 and gas shield region 58.Therefore, plate member 32 has multiple apertures 54 in its surperficial part, forms thus gas by region 56.And part is formed with gas shield region 58 in plate member 32.
In Fig. 3, represent that with single-point line gas passes through the border in region 56 and gas shield region 58.In the present embodiment, gas is positioned at the exterior lateral area 63 of top board 60 and the inner side on the border (being stepped part 65) of center region 62 by region 56 and the border in gas shield region 58.Thus, gas is opposed with the exterior lateral area 63 of top board 60 by region 56, and gas shield region 58 is opposed with the center region 62 of top board 60.
As described later, gas is in order to be controlled at the condensate layer 72(growing up on top board front surface 61 with reference to figure 4 by region 56 and the border in gas shield region 58) shape set.Therefore,, in order to make condensate layer 72 grow into desirable shape, gas can be different with diagram by region 56 and the border in gas shield region 58.This border can be consistent with the border of center region 62 with the exterior lateral area of top board 60 63, also can be positioned at its outside or intersect with it.And gas is not limited to circle by region 56 and the shape on the border in gas shield region 58, can be other arbitrary shapes.
Gas shield region 58 is from the regular arrangement of aperture 54, to remove at least 1 aperture to form.As shown in Figure 3, gas shield region 58 for comprise hypothesis according to gas the region of 4 apertures (the central part doublet at plate main part 50 represents) of forming when regular arrangement the by the aperture 54 in region 56.Owing to aperture not being set in gas shield region 58, therefore gas shield region 58 does not make gas pass through.
Can be provided with at least 1 aperture in gas shield region 58.For example, the position of the imaginary aperture that can dot in the drawings does not form the aperture (that is, by compared with the regular arrangement in region 56, reducing the quantity of aperture 54 with gas) of all quantity, forms thus gas shield region 58.Or, can form and be less than gas by the hole of the aperture 54 in region 56 in the position of imaginary aperture.It is identical or be less than the little hole number of the position of this imagination aperture that this minute opening can be arranged to the little hole number of quantity and the position of imaginary aperture.So, by compared with region 56, also can limit the gas flow in gas shield region 58 with gas.
Therefore, can be at gas by distributing and form aperture with the 1st in region 56, in gas shield region 58, do not form aperture or form aperture with the 2nd distribution different from the 1st distribution.The opening area that the per unit in gas shield region 58 is for example set in the 2nd distribution for is less than gas by the opening area of the per unit in region 56.At this, opening area refers to the area sum of aperture.And the 1st distributes can not have regularity.Therefore, gas can be arranged brokenly by the aperture 54 in region 56.
In addition, in design, for example, can require performance to decide the area sum of the opening that plate member 32 has according to exhaust velocity etc.Therefore,, when removing or dwindle aperture in order setting gas shield region 58, preferably make up the minimizing of consequent opening area.For this reason, can append new aperture 54 by region 56 at gas, also can amplify existing aperture 54.Can also change the position of existing aperture 54.
The action of the cryopump 10 based on said structure is below described.In the time that cryopump 10 is worked, first, before starting working, it with other suitable roughing vacuum pumps, vacuum chamber inside is slightly evacuated to for example 1Pa left and right.Afterwards, cryopump 10 is worked.The 1st cooling table 22 and the 2nd cooling table 24 are cooled by the driving of refrigerator 16, are also cooled with their hot linked the 1st cryopanel the 18, the 2nd cryopanels 20.The 1st cryopanel 18 and the 2nd cryopanel 20 are cooled to respectively the 1st temperature and the 2nd temperature lower than the 1st temperature.
Plate member 32 cooling from vacuum chamber towards the inner sudden gas molecules of cryopump 10, make the gas that vapour tension fully reduces under this chilling temperature (such as moisture etc.) be condensate in surface and exhaust.Under the chilling temperature of plate member 32, the gas of the insufficient reduction of vapour tension enters main holding space 21 by multiple apertures 54.Or a part of gas is reflected by the gas shield region 58 of plate member 32 and is not entered main holding space 21.
The gas (such as argon etc.) that in the gas molecule entering, vapour tension fully reduces under the chilling temperature of the 2nd cryopanel 20 is condensate in the surface (being mainly top board front surface 61) of the 2nd cryopanel 20 and exhaust.Under this chilling temperature vapour tension also the gas of insufficient reduction (such as hydrogen etc.) be adhered to the surface of the 2nd cryopanel 20 and the sorbent 68 that has been cooled adsorbs and exhaust.Thus, cryopump 10 can make the degree of vacuum of vacuum chamber reach desirable level.
Fig. 4 is the figure that schematically illustrates the operating cryopump 10 of exhaust.As shown in Figure 4, on the top board 60 of cryopump 10, pile up and have the ice or the frost that are formed by the gas of condensation.The primary coil of this condensate layer 72 is for example argon.This ice sheet was grown up along with exhaust working time, thereby thickness increases gradually.In addition, in Fig. 4, for simple and clear, omit diagram and be deposited in the condensate layer on conventional plate 67 and refrigeration hood 70.
In the time that plate member 32 does not have gas shield region 58 (, when plate member 32 has the aperture of the doublet shown in Fig. 3), as shown in the dotted line in Fig. 4, dome or mushroom-shaped condensate layer are grown up on top board 60.In the time that multiple apertures 54 are evenly distributed in plate member 32, gas easily flow into the central part of main holding space 21.Therefore, as shown in the figure, easily cause condensation to concentrate on central part.And the quantity that reduces the aperture 54 of plate outer edge 52 for the installation of plate member 32 is likely also that condensation concentrates on one of reason of central part.
If the condensate layer of dome is radially further grown up, the peripheral part of condensate layer likely contacts with shielding element sidepiece 36.If the gap between fitting seat 37 and top board 60 is narrow and small, first condensate layer contacts with fitting seat 37.On contact position, gas again gasifies and is discharged into the outside of main holding space 21 and cryopump 10.Therefore, after, cryopump 10 cannot provide the exhaust performance in design.Therefore, the hold-up of gas now becomes the maximum hold-up of cryopump 10.The part (near now, condensate layer fitting seat 37) of condensate layer determines the gas occlusion limit of cryopump 10.
Cryopump is generally designed to axisymmetric.For example, but refrigerator 16 landscape configuration in horizontal low temperature pump 10, therefore must have asymmetric part (fitting seat 37).In the present embodiment, make the shape of top board 60 upwards consistent in week with so corresponding width in the gap between top board 60 and radiation barrier part 30 that makes of asymmetric part.Can avoid the condensate layer of radially growing up on top board 60 to only have privileged site (being now near condensate layer fitting seat 37) first to contact with radiation barrier part 30.Its result, according to present embodiment, can improve the gas hold-up of cryopump 10.
And if the condensate layer of dome is further grown up vertically, near condensate layer top central shaft A likely contacts with the lower surface of plate member 32.The hold-up of gas now becomes the maximum hold-up of cryopump 10.The part (near now, condensate layer top central shaft A) of condensate layer determines the gas occlusion limit of cryopump 10.
In the time that plate member 32 has gas shield region 58 (, when plate member 32 does not have the aperture of the doublet shown in Fig. 3), as shown in the solid line of Fig. 4, the condensate layer 72 of cylinder type is grown up on top board 60.The central part that is limited gas and flow into main holding space 21 by gas shield region 58, therefore can relax condensation and concentrate on central part.Its result, as shown in arrow D in figure, near the height of the condensate layer central shaft A of the condensate layer 72 of cylinder type becomes the condensate layer that is less than dome.On the other hand, as shown in arrow E in figure, the condensate layer height of peripheral part becomes the condensate layer that is greater than dome.
Thus, according to present embodiment, can make the height of the condensate layer upper surface of growing up on top board front surface 61 be evenly distributed.By making the shape of condensate layer 72 the hold efficiency that improves condensate layer 72 in main holding space 21 corresponding with main holding space 21.So, can improve the gas hold-up of cryopump 10.
Fig. 5 is the side view cutaway drawing that schematically illustrates the major component of the related cryopump 10 of the 2nd mode of execution of the present invention.In the related cryopump 10 of the 2nd mode of execution, the 2nd cryopanel 20 has the configuration different from the 1st mode of execution.About other parts, the 2nd mode of execution is identical with the 1st mode of execution.Below, in explanation, for identical position, for fear of repeating, suitably description thereof is omitted.
As shown in Figure 5, the configuration of the 2nd cryopanel 20 is adjusted to and makes the width of sideshake 43 consistent with the width of clearance portion 44.As shown in arrow F in figure, the 2nd cryopanel 20 is configured to the misalignment central shaft A of the 2nd cryopanel 20, so that the 2nd cryopanel 20 spaces out with fitting seat 37.The 2nd cryopanel 20 in the mode of the high temperature side away from refrigerator 16 from center line A bias.So, sideshake 43 is expanded, and at opposition side, clearance portion 44 is narrowed with respect to central shaft A.In the 2nd mode of execution, top board 60 does not have notch part 74.So, with the 1st mode of execution similarly, the width in gap that also can make to be enclosed on top board 60 the condensate layer side of growing up is even.In addition, in one embodiment, top board 60 also can have notch part 74, and the eccentric configuration of the 2nd cryopanel 20.
Fig. 6 is the side view cutaway drawing that schematically illustrates the major component of the related cryopump 10 of the 3rd mode of execution of the present invention.In the related cryopump 10 of the 3rd mode of execution, refrigerator 16 has the configuration different from the mode of execution of narrating.About other parts, the 3rd mode of execution is identical with the mode of execution of narrating.Below, in explanation, for identical position, for fear of repeating, suitably description thereof is omitted.
As shown in Figure 6, refrigerator 16 be configured to top gap 46 width G 1 wider than the width G in below gap 48 2.Thus, can expand the space between refrigeration hood 70 and radiation barrier part 30.By expanding the gap, top 46 near main holding space 21, can hold more condensate layer.And, because the 2nd cryopanel 20 entirety move, therefore, compared with the mode of execution of narrating, can also expand in the axial direction main holding space 21 downwards.So, can improve the gas hold-up of cryopump 10.
As described above, according to the embodiment of the present invention, the shape of top board 60 or configuration are configured to make the gap between radiation barrier part 30 and top board 60 substantially even.Thus, can be suppressed at condensation on the condensate layer being stacked on top board 60 and concentrate on privileged site.Thus, the efficiency of holding of condensate layer in main holding space 21 can be improved, and the gas hold-up of cryopump 10 can be improved.
Above, describe the present invention according to embodiment.But the invention is not restricted to above-mentioned mode of execution, it will be appreciated by those skilled in the art that and can implement various design alterations, and can implement various variation, and this variation is also contained in scope of the present invention.
For example, the textural association of another mode of execution explanation in structure and the 1st mode of execution to the 3 mode of executions of arbitrary mode of execution explanation in the 1st mode of execution to the 3 mode of executions can also be formed to cryopump 10.
And cryopump 10 can possess the entrance cryopanel that is disposed in shielding element opening 26 and replace plate member 32.Entrance cryopanel for example can possess the plate of 1 or polylith flat board (for example plectane) type, also can possess the concentric circles of being formed as or grid-like venetian blind or zigzag shape thing.Can, by shape, configuration or the interval of the blade of adjustment venetian blind or zigzag shape thing, form gas by region 56 and gas shield region 58 at shielding element opening 26.
In the above-described embodiment, plate member 32 is divided into two kinds of regions, and gas is by region 56 and gas shield region 58.But plate member 32 can have three kinds of above regions.In plate member 32, can form with gas by the region that more easily makes gas pass through compared with region 56 as the 3rd region, also can form and more be difficult for region that gas is passed through compared with gas shield region 58.
Embodiments of the present invention can also show as follows.
1. a cryopump, it possesses:
Refrigerator, possesses the 1st cooling table and is cooled into 2nd cooling table of temperature lower than described the 1st cooling table;
The 1st cryopanel, possesses and has the radiation barrier part of main opening and the plate member across described main opening, and with described the 1st cooling table hot connecting; And
The 2nd cryopanel, is surrounded by described the 1st cryopanel, and with described the 2nd cooling table hot connecting,
Described plate member possesses plate main part and for described plate main part is installed on to the outer edge on described radiation barrier part,
Described plate main part possesses: gas, by region, has the multiple apertures for condensation is passed through in the gas of described the 2nd cryopanel; And gas shield region, in described plate main part, be formed at from described gas by different position, region.
2. according to the cryopump described in mode of execution 1, wherein,
Described the 2nd cryopanel possesses and the opposed front surface of described plate main part, the exterior lateral area that described front surface possesses center region and surrounds described center region,
Described gas is opposed by region and described exterior lateral area, and described gas shield region and described center region are opposed.
3. according to the cryopump described in mode of execution 1 or 2, wherein,
Described radiation barrier part possesses the sidepiece that surrounds described the 2nd cryopanel, between described sidepiece and described the 2nd cryopanel, is formed with the gap with narrow,
Described gas shield region is formed at the position corresponding with described narrow.
4. according to the cryopump described in any one mode of execution in mode of execution 1 to 3, wherein,
Described radiation barrier part possesses: fitting seat, be positioned at the side direction of described the 2nd cryopanel, and for described refrigerator being installed on to described radiation barrier part; And annulus, it is adjacent with described fitting seat and surround described the 2nd cryopanel,
Between described the 2nd cryopanel and described fitting seat, be formed with sideshake, between described the 2nd cryopanel and described annulus, be formed with the annular gap continuous with described sideshake,
The shape of described the 2nd cryopanel or configuration be adjusted to make the width of described sideshake and the width of described annular gap consistent.
5. according to the cryopump described in mode of execution 4, wherein,
Described the 2nd cryopanel has the notch part that described sideshake width is expanded.
6. according to the cryopump described in mode of execution 4 or 5, wherein,
Described the 2nd cryopanel is configured to the misalignment of described the 2nd cryopanel through the axis of described main opening, so that described the 2nd cryopanel and described fitting seat space out.
7. according to the cryopump described in any one mode of execution in mode of execution 1 to 6, wherein,
On described radiation barrier part, be formed with the mounting hole for described refrigerator is installed,
Described refrigerator possesses the attachment portion that connects described the 1st cooling table and described the 2nd cooling table, and described attachment portion is inserted in described mounting hole,
Between described attachment portion and described mounting hole, gap above being formed with near described main opening one side, gap below being formed with away from described main opening one side, the width in gap, described top is wider than the width in gap, described below.
8. a vacuum exhaust method, it uses cryopump, wherein:
Described cryopump possesses: across the plate member of main opening and with opposed the 2nd cryopanel of described plate member,
Described method for exhausting possesses following steps:
Plate member and the 2nd cryopanel are cooled to respectively to the 1st temperature and the 2nd temperature lower than the 1st temperature;
By being formed at the multiple apertures in the surperficial part of described plate member, gas is received between described plate member and described the 2nd cryopanel; And
Make described condensation of gas on described the 2nd cryopanel.
9. a cryopump, it possesses:
The 1st cryopanel, possesses and has the radiation barrier part of main opening and the plate member across described main opening; And
The 2nd cryopanel, possesses and the opposed front surface of described plate member, and is cooled into temperature lower than described the 1st cryopanel,
Described front surface possesses center region and surrounds the exterior lateral area of described center region,
Described plate member possesses: gas, by region, has the multiple apertures for condensation is passed through in the gas of described the 2nd cryopanel, and opposed with described exterior lateral area; And gas shield region, opposed with described center region.
10. a cryopump, it possesses:
The 1st cryopanel, possesses the radiation barrier part with main opening and the entrance cryopanel that is disposed in described main opening; And
The 2nd cryopanel, is surrounded by described the 1st cryopanel, and is cooled into temperature lower than described the 1st cryopanel,
Described radiation barrier part possesses the sidepiece that surrounds described the 2nd cryopanel, between described sidepiece and described the 2nd cryopanel, is formed with the gap with narrow,
Described entrance cryopanel possesses gas shield region in the position corresponding with described narrow.
11. 1 kinds of cryopumps, it possesses:
Refrigerator, possesses the 1st cooling table and is cooled into 2nd cooling table of temperature lower than described the 1st cooling table;
The 1st cryopanel, possesses the radiation barrier part with main opening and the entrance cryopanel that is disposed in described main opening, and with described the 1st cooling table hot connecting; And
The 2nd cryopanel, is surrounded by described the 1st cryopanel, and with described the 2nd cooling table hot connecting,
Described radiation barrier part possesses: fitting seat, be positioned at the side direction of described the 2nd cryopanel, and for described refrigerator being installed on to described radiation barrier part; And shielding element part, it is adjacent with described fitting seat and surround described the 2nd cryopanel,
Between described the 2nd cryopanel and described fitting seat, be formed with sideshake, between described the 2nd cryopanel and described shielding element part, be formed with the clearance portion continuous with described sideshake,
The shape of described the 2nd cryopanel or configuration be adjusted to make the width of described sideshake and the width of described clearance portion consistent.
12. according to the cryopump described in mode of execution 11, wherein,
Described the 2nd cryopanel has the notch part that described sideshake width is expanded.
13. according to the cryopump described in mode of execution 11 or 12, wherein,
Described the 2nd cryopanel is configured to the misalignment of described the 2nd cryopanel through the axis of described main opening, so that described the 2nd cryopanel and described fitting seat space out.
14. according to the cryopump described in any one mode of execution in mode of execution 11 to 13, wherein,
Described the 2nd cryopanel possesses and the opposed front surface of described entrance cryopanel, the exterior lateral area that described front surface possesses center region and surrounds described center region,
Described entrance cryopanel possesses for making the gas that condensation is passed through in the gas of described the 2nd cryopanel pass through region and gas shield region, and described gas is opposed by region and described exterior lateral area, and described gas shield region and described center region are opposed.
15. according to the cryopump described in mode of execution 14, wherein,
Described gas possesses plate portion by region, and this plate portion has multiple apertures.
16. according to the cryopump described in any one mode of execution in mode of execution 11 to 15, wherein,
On described radiation barrier part, be formed with the mounting hole for described refrigerator is installed,
Described refrigerator possesses the attachment portion that connects described the 1st cooling table and described the 2nd cooling table, and described attachment portion is inserted in described mounting hole,
Between described attachment portion and described mounting hole, gap above being formed with near described main opening one side, gap below being formed with away from described main opening one side, the width in gap, described top is wider than the width in gap, described below.
Claims (6)
1. a cryopump, is characterized in that, possesses:
Refrigerator, possesses the 1st cooling table and is cooled into 2nd cooling table of temperature lower than described the 1st cooling table;
The 1st cryopanel, possesses the radiation barrier part with main opening and the entrance cryopanel that is disposed in described main opening, and with described the 1st cooling table hot connecting; And
The 2nd cryopanel, is surrounded by described the 1st cryopanel, and with described the 2nd cooling table hot connecting,
Described radiation barrier part possesses: fitting seat, be positioned at the side direction of described the 2nd cryopanel, and for described refrigerator being installed on to described radiation barrier part; And shielding element part, it is adjacent with described fitting seat and surround described the 2nd cryopanel,
Between described the 2nd cryopanel and described fitting seat, be formed with sideshake, between described the 2nd cryopanel and described shielding element part, be formed with the clearance portion continuous with described sideshake,
The shape of described the 2nd cryopanel or configuration be adjusted to make the width of described sideshake and the width of described clearance portion consistent.
2. cryopump according to claim 1, is characterized in that,
Described the 2nd cryopanel has the notch part that described sideshake width is expanded.
3. cryopump according to claim 1 and 2, is characterized in that,
Described the 2nd cryopanel is configured to the misalignment of described the 2nd cryopanel through the axis of described main opening, so that described the 2nd cryopanel and described fitting seat space out.
4. according to the cryopump described in any one in claims 1 to 3, it is characterized in that,
Described the 2nd cryopanel possesses and the opposed front surface of described entrance cryopanel, the exterior lateral area that described front surface possesses center region and surrounds described center region,
Described entrance cryopanel possesses for making gas that condensation passes through in the gas of described the 2nd cryopanel by region and gas shaded areas, and described gas is opposed by region and described exterior lateral area, and described gas shield region and described center region are opposed.
5. cryopump according to claim 4, is characterized in that,
Described gas possesses plate portion by region, and this plate portion has multiple apertures.
6. according to the cryopump described in any one in claim 1 to 5, it is characterized in that,
On described radiation barrier part, be formed with the mounting hole for described refrigerator is installed,
Described refrigerator possesses the attachment portion that connects described the 1st cooling table and described the 2nd cooling table, and described attachment portion is inserted in described mounting hole,
Between described attachment portion and described mounting hole, gap above being formed with near described main opening one side, gap below being formed with away from described main opening one side, the width in gap, described top is wider than the width in gap, described below.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
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| JP2013-062560 | 2013-03-25 | ||
| JP2013062560 | 2013-03-25 | ||
| JP2013-125819 | 2013-06-14 | ||
| JP2013125819A JP6076843B2 (en) | 2013-06-14 | 2013-06-14 | Cryopump |
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| Publication Number | Publication Date |
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| CN104074716A true CN104074716A (en) | 2014-10-01 |
| CN104074716B CN104074716B (en) | 2016-08-17 |
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| CN201410112112.6A Active CN104074716B (en) | 2013-03-25 | 2014-03-24 | Cryopump and evacuation method |
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| Country | Link |
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| KR (1) | KR101530926B1 (en) |
| CN (1) | CN104074716B (en) |
| TW (1) | TWI580865B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105484968A (en) * | 2014-10-07 | 2016-04-13 | 住友重机械工业株式会社 | Cryopump |
| CN106014916A (en) * | 2015-03-31 | 2016-10-12 | 住友重机械工业株式会社 | Cryopump |
| CN114810550A (en) * | 2021-01-29 | 2022-07-29 | 爱发科低温泵株式会社 | Low-temperature pump |
| CN116066323A (en) * | 2022-12-16 | 2023-05-05 | 安徽万瑞冷电科技有限公司 | Cryogenic pump |
Families Citing this family (1)
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| JP6534358B2 (en) * | 2016-03-22 | 2019-06-26 | 住友重機械工業株式会社 | Cryopump, cryopump control apparatus and cryopump control method |
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| CN116066323A (en) * | 2022-12-16 | 2023-05-05 | 安徽万瑞冷电科技有限公司 | Cryogenic pump |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20140116824A (en) | 2014-10-06 |
| KR101530926B1 (en) | 2015-07-06 |
| TWI580865B (en) | 2017-05-01 |
| CN104074716B (en) | 2016-08-17 |
| TW201441486A (en) | 2014-11-01 |
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