CN104070608B - Stone platform, its processing method, manufacture method and substrate board treatment - Google Patents
Stone platform, its processing method, manufacture method and substrate board treatment Download PDFInfo
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- CN104070608B CN104070608B CN201410119624.5A CN201410119624A CN104070608B CN 104070608 B CN104070608 B CN 104070608B CN 201410119624 A CN201410119624 A CN 201410119624A CN 104070608 B CN104070608 B CN 104070608B
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- protuberance
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- 239000004575 stone Substances 0.000 title claims abstract description 130
- 239000000758 substrate Substances 0.000 title claims abstract description 40
- 238000000034 method Methods 0.000 title claims abstract description 15
- 238000003672 processing method Methods 0.000 title claims abstract description 15
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 8
- 230000001678 irradiating effect Effects 0.000 claims abstract description 26
- 239000010453 quartz Substances 0.000 claims description 26
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 26
- 239000000463 material Substances 0.000 claims description 25
- 239000010438 granite Substances 0.000 claims description 22
- 238000010330 laser marking Methods 0.000 abstract description 10
- 238000005498 polishing Methods 0.000 abstract description 9
- 239000011248 coating agent Substances 0.000 description 9
- 238000000576 coating method Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 7
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 6
- 238000004140 cleaning Methods 0.000 description 5
- 239000007788 liquid Substances 0.000 description 5
- 238000003754 machining Methods 0.000 description 5
- 239000011435 rock Substances 0.000 description 4
- 229910002092 carbon dioxide Inorganic materials 0.000 description 3
- 230000003746 surface roughness Effects 0.000 description 3
- 239000001569 carbon dioxide Substances 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910052925 anhydrite Inorganic materials 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 229910052626 biotite Inorganic materials 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- OSGAYBCDTDRGGQ-UHFFFAOYSA-L calcium sulfate Chemical compound [Ca+2].[O-]S([O-])(=O)=O OSGAYBCDTDRGGQ-UHFFFAOYSA-L 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 239000003550 marker Substances 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 230000008961 swelling Effects 0.000 description 1
- 210000003437 trachea Anatomy 0.000 description 1
Landscapes
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
The present invention provides and can prevent the stone platform of mirror-polishing, the processing method of stone platform, the manufacture method of stone platform and substrate board treatment when keeping the flatness of stone platform.Laser machine is to the laser emitted by stone platform irradiating laser marking machine (41), thus be processed to the mounting surface of the substrate of stone platform form protuberance, this laser machine has frame (51), the laser marking machine (41) that is supported in this frame (51), controller (42), exhaustor (43).Laser marking machine (41) is connected by cable (45) with controller (42).It addition, exhaustor (43) is connected by connecting tube with controller (42).In the region surrounded by frame (51), on the irradiation area of stone platform irradiating laser, be equipped with protection cap.
Description
Technical field
The present invention relates at stone platform, the processing method of stone platform, the manufacture method of stone platform and substrate
Reason device.
Background technology
Such as, the substrate board treatment to coating of substrates coating liquid uses following structure, i.e. make shape
Become the gap nozzle having the slit for spraying coating liquid, be maintained in the mounting surface of stone platform along absorption
The surface of substrate move, thus coating liquid coating (with reference to patent documentation 1) on a surface of a substrate.
The mounting surface requiring the substrate of this stone platform has high flatness.As the material of such stone platform,
Generally use the granite also known as spending net rock.The stone platform that granite is made has following feature, i.e.
There is rigidity, wearability, corrosion resistance, be also not readily susceptible to the impact of temperature.
Patent documentation 1: Japanese Unexamined Patent Publication 2009-93002 publication
In the case of life-time service such stone platform, due to substrate-placing surface wear and the change of stone platform
Dirty, produce the phenomenon of substrate-placing face mirror-polishing.In the case of the substrate-placing face mirror-polishing of stone platform,
When lifting substrate by lifter pin etc. from mounting surface, making stripping charge become big, it is right because of electrostatic to produce
The problem that substrate brings damage.In the past, in order to tackle such problem, carry out making the substrate of stone platform
The surface roughness of mounting surface becomes big processing.
In order to make the surface roughness of stone platform surface become big, adopt with the following method etc., i.e. big by granularity
Grinding agent grinding stone platform surface formed fine concavo-convex；Cover stone platform to carry out bead
Stone platform surface is made to become coarse；Stone platform surface is formed fine groove.But, no matter which uses
The method of kind, blocks foreign body on the coarse region of stone platform surface, thus produces coarse face secondary mirror again
The phenomenon in face.
It addition, no matter use which kind of method above-mentioned, all produce following problem, i.e. be difficult to maintaining stone to put down
The roughness making surface under the state of the flatness in the substrate-placing face of platform becomes big, it is difficult to obtain required simultaneously
The surface roughness wanted and flatness.
Summary of the invention
The present invention proposes to solve the problems referred to above, and its object is to offer can put down keeping stone
The stone platform of mirror-polishing, the processing method of stone platform, the system of stone platform is prevented under the state of the flatness of platform
Make method and substrate board treatment.
Invention described in technical scheme 1 is a kind of stone platform, by the material containing the heated material expanded
Matter is constituted, and has the protuberance that the material expanded by illuminated laser is formed.
Invention described in technical scheme 2, in the invention described in technical scheme 1, this stone platform by
Granite is constituted, and this granite contains the quartz of heated expansion.
Invention described in technical scheme 3, in the invention described in technical scheme 2, by specific bar
The quartz expanded to stone platform irradiating laser under part forms protuberance, and these specified conditions include: the wavelength of laser
For 10600nm, output is 20W to 25W, to the scanning speed on the surface of stone platform is
1000mm/sec to 1250mm/sec.
Invention described in technical scheme 4, in the invention described in technical scheme 2, by irradiating laser
The surface temperature making stone platform rises to 400 degree to the 700 degree Celsius quartz expanded Celsius and forms protuberance.
The processing method that invention is a kind of stone platform described in technical scheme 5, this stone platform is for by containing
The material of the heated material expanded is constituted, illuminated laser the material expanded forms protuberance.
Invention described in technical scheme 6, in the invention described in technical scheme 5, this stone platform by
Granite is constituted, and this granite contains the quartz of heated expansion.
Invention described in technical scheme 7, in the invention described in technical scheme 6, by specific bar
The quartz expanded to stone platform irradiating laser under part forms protuberance, and these specified conditions include: the wavelength of laser
For 10600nm, output is 20W to 25W, to the scanning speed on the surface of stone platform is
1000mm/sec to 1250mm/sec.
Invention described in technical scheme 8, in the invention described in technical scheme 6, irradiating laser makes stone
The surface temperature of platform rises to 400 degree to 700 degree Celsius Celsius, makes quartz expansion to form protuberance.
The manufacture method that invention is a kind of stone platform described in technical scheme 9, it is characterised in that including:
Manufacturing procedure, is processed into the platform-like with planar portions by the granite containing quartz；Laser irradiation process,
By to the planar portions irradiating laser of described granite, make quartz expansion to form protuberance.
Invention described in technical scheme 10 is a kind of substrate board treatment, by substrate-placing at stone platform
On process, it is characterised in that described stone platform is by the material structure containing the heated material expanded
Becoming, have protuberance, this protuberance is formed by the material by expanding to the mounting surface irradiating laser of described substrate
In this mounting surface.
According to the invention described in technical scheme 1 to technical scheme 10, by being heated by irradiating laser and
The expansion area obtained forms protuberance, thus structure is extremely simple, it is possible in the flatness maintaining stone platform
State under prevent mirror-polishing.
It addition, according to the invention described in technical scheme 10, even if lifting substrate from stone platform surface
In the case of, it is also possible to prevent the electrostatic produced because of the impact of stripping charge.
Accompanying drawing explanation
Fig. 1 is the axonometric chart of applying device.
Fig. 2 is the side view schematic of applying device.
Fig. 3 is the axonometric chart of the laser machine of the processing method of the stone platform 11 for implementing the present invention.
Fig. 4 is the master of the laser machine of the processing method illustrating the stone platform 11 for implementing the present invention
Want the axonometric chart of part.
The schematic diagram of situation when Fig. 5 is to be shown through Laser Processing machining stone platform 11.
Fig. 6 is to be shown on stone platform 11 explanatory diagram of unit area E carrying out laser machining.
Fig. 7 is to be shown through saying of protuberance 101 that the upper surface irradiating laser to stone platform 11 formed
Bright figure.
Fig. 8 be by irradiating laser after stone platform 11 apparent condition amplify shown in photo.
Fig. 9 is the curve chart of the height and position of the white line part in the photo illustrating Fig. 8.
Figure 10 A to Figure 10 F is the explanatory diagram of the pattern illustrating the protuberance being formed on stone platform 11.
Wherein, description of reference numerals is as follows:
10: main body
11: stone platform
12: lifter pin
13: gap nozzle
14: balladeur train
15: nozzle support portion
16: elevating mechanism
17: guide rail
18: open and close valve
19: open and close valve
20: linear motor
23: linear encoder
31: nozzle cleaning mechanism
34: predistribution mechanism
41: laser marking machine
42: controller
43: exhaustor
44: connecting tube
45: cable
51: frame
52: protection cap
100: substrate
101: protuberance
102: protuberance
103: protuberance
104: protuberance
105: protuberance
106: protuberance
Detailed description of the invention
Below, based on accompanying drawing, embodiments of the present invention are illustrated.Firstly, for applying
The structure of the substrate board treatment of the stone platform 11 of the present invention illustrates.Fig. 1 is as applying this
The axonometric chart of the applying device of the substrate board treatment of the stone platform 11 of invention.It addition, Fig. 2 is coating
The side view schematic of device.Additionally, in FIG, omit illustrate aftermentioned nozzle cleaning mechanism 31 with
And predistribution mechanism 34.It addition, in fig. 2, omit and illustrate aftermentioned balladeur train 14 etc..
This applying device has stone platform 11, and this stone platform 11 is supported on for adsorbing holding substrate 100
Main body 10 on.The flatness of the upper surface of the mounting surface as substrate 100 of this stone platform 11 is several
Microns.The material of this stone platform 11, is usually the granite being referred to as flower net rock.At this stone platform
The adsorption tank omitting diagram it is formed with on the surface of 11.It addition, multiple lifter pins 12 separate suitable between
Every being arranged on stone platform 11.When moving into, taking out of substrate 100, this lifter pin 12 supports from below
Substrate 100 makes this substrate 100 rise to the top on surface of stone platform 11.
The balladeur train being provided above the approximate horizontal erection of two side portions from main body 10 at stone platform 11
14.This balladeur train 14 has: nozzle support portion 15, and it is used for supporting gap nozzle 13: pair of right and left liter
Descending mechanism 16, for supporting the two ends in this nozzle support portion 15.It addition, join at the both ends of main body 10
It is provided with the pair of guide rails 17 extended approximately along horizontal direction parallel.Above-mentioned guide rail 17 guide carriage 14
Both ends, so that balladeur train 14 moves back and forth along the X-direction shown in Fig. 1.
Two side portions at main body 10 and balladeur train 14 is equipped point along the edge side of main body 10 both sides
Not there is a pair linear motor 20 of stator 21 and rotor 22.It addition, at main body 10 and balladeur train 14
Two side portions be fixedly installed a pair linear encoder 23 being respectively provided with scale portion and detection piece.This line
Property encoder 23 for detecting the position of balladeur train 14.
It addition, as in figure 2 it is shown, be equipped with nozzle cleaning mechanism 31 in the side of main body 10.This nozzle
Wiper mechanism 31 has cleaning part 32 and standby container 33.In this applying device, move being coated
Before work or after being coated action, clean gap nozzle 13 with this nozzle cleaning mechanism 31.
It addition, as in figure 2 it is shown, be equipped with predistribution mechanism 34 in the side of main body 10.This predistribution
Mechanism 34 has: predistribution roller 36, and a part impregnated in the cleanout fluid stored in storagetank 35；
Scraper 37.In the Y direction, the length of predistribution roller 36 and scraper 37 is more than or equal to gap nozzle 13
Length.It addition, make predistribution roller 36 rotate by the driving of not shown motor.Fill in this coating
In putting, it is also possible to performed following operation before being coated action, i.e. by from moving to predistribution
The gap nozzle 13 of the top of roller 36 sprays a small amount of coating liquid, removes logical in gap nozzle 13
Cross the coating liquid containing cleanout fluid when nozzle wiper mechanism 31 cleans.
In the applying device of the structure having as above, if stone platform 11 mirror-polishing, then passing through
When lifter pin 12 lifts substrate 100 from the surface of stone platform 11, make stripping charge become big, produce because of quiet
Electricity and problem that substrate 100 is brought damage.Therefore, by the processing side of the stone platform 11 of the present invention
The surface of method processing stone platform 11.
Below, the processing method for this stone platform 11 illustrates.Fig. 3 is for implementing the present invention
The axonometric chart of laser machine of processing method of stone platform 11, Fig. 4 is to illustrate above-mentioned Laser Processing
The axonometric chart of the major part of machine.It addition, Fig. 5 is to be shown through Laser Processing machining stone platform 11
Time the schematic diagram of situation.Additionally, in figure 3, omit and illustrate the connecting tube 44 shown in Fig. 4.
Laser emitted by laser marking machine (laser marker) 41 is irradiated to stone and puts down by this laser machine
On platform 11, thus it is processed to form protuberance to the mounting surface of the substrate 100 on stone platform 11, should
Laser machine has: frame 51；Laser marking machine 41, it is supported in this frame 51；Controller
42；Exhaustor 43.Laser marking machine 41 and controller 42 are connected by cable 45.It addition, exhaustor
43 are connected with not shown exhaust gear by connecting tube 44.In the region surrounded by frame 51,
Protection cap 52 it is equipped with on the irradiation area of stone platform 11 irradiating laser.Additionally, in figure 3, save
Slightly illustrate protection cap 52.
Laser marking machine 41 has: LASER Light Source；A pair scanning mirror, makes emitted by this LASER Light Source
Laser beam deflection X-direction and Y-direction；Optically focused camera lens.By to workpiece (in this embodiment
For stone platform 11) selectively along X, Y-direction scanning laser, it is possible to the whole surface district to workpiece
Territory irradiating laser.In Figure 5, it is schematically shown the laser L irradiated to X-direction or Y-direction.
This laser marking machine 41, in order to use workpiece marking, is typically being sold on the market.
Fig. 6 is to be shown on stone platform 11 explanatory diagram of unit area E carrying out laser machining.
When stone platform 11 is laser machined, the substrate 100 of stone platform 11 mounting surface (on
Surface) upper mounting laser machine shown in Fig. 3 to Fig. 5.Loading the laser that make use of market to sell
In the case of the laser machine of marking machine 41, it is possible to shine to the region E of about 300mm × 300mm
Penetrate laser.Therefore, in order to the whole face of stone platform 11 is laser machined, use following structure,
That is, the mounting surface of the substrate 100 of stone platform 11 is divided into multiple unit area E, to constituent parts region
E irradiating laser respectively.
When stone platform 11 is laser machined, should being processed of upper surface of stone platform 11
Unit area E top mounting laser machine.Then, by swashing from laser marking machine 41
The upper surface (mounting surface of substrate 100) of stone platform 11 is scanned by light L, convex to being formed
The position irradiating laser in portion.So that the surface temperature of the stone platform 11 of illuminated laser is in Celsius 400
Mode in the range of degree extremely 700 degree Celsius, the output of setting laser now and scanning speed.
Additionally, when irradiating laser, owing to discharging the gas etc. produced on stone platform 11, therefore by row
Trachea 43 and connecting tube 44 aspirate the environment gas in the region surrounded by frame 51 and protection cap 52
Body, then discharges to the local of safety via filter etc..
In the present embodiment, carbon dioxide laser (CO2 laser) is utilized.It addition, to stone platform
11 when laser machining, and for the output and scanning speed of laser, uses the wavelength to be
The carbon dioxide laser of 10600nm, setpoint power output is 20w～25w, scanning speed is
The scope of 1000mm/sec～1250mm/sec.Thus, the stone platform 11 of illuminated above-mentioned laser is made
Surface temperature is in the scope of 400 degree to 700 degree Celsius Celsius.If the output of laser is excessive or
Scanning speed is the slowest, then can give too much energy to stone platform 11, if it addition, the output work of laser
Rate is too small or scanning speed is too fast, then the energy given to stone platform is not enough, the most no matter in which kind of feelings
Appropriate swelling state all can not be obtained under condition.Additionally, for the output and scanning speed of laser,
More preferably when output is 20w, scanning speed is 1000mm/sec.Or, in output work
When rate is 25w, scanning speed is 1250mm/sec.Thereby, it is possible to the protuberance desired by being Xing Chenged.
The main constituent of the granite (granite/ flower net rock) constituting stone platform 11 is quartz and Anhydrite, removes
Possibly together with color minerals such as biotite outside this.Quartz contained by this granite is at about 580 degree Celsius
Rapid expansion.Therefore, the surface temperature by making the stone platform 11 formed by granite is in Celsius 400
The scope of degree to 700 degree Celsius, it is possible to make quartz expansion to form protuberance.Additionally, be less than in this temperature
In the case of 400 degree Celsius, quartz will not fully expand, and therefore can not form suitable protuberance.Another
Aspect, in the case of this temperature is higher than 700 degree Celsius, because quartz dissolves or evaporation, therefore produces
Following problem, i.e. forms recess and does not produce protuberance.
Fig. 7 is to be shown through saying of protuberance 101 that the upper surface irradiating laser to stone platform 11 formed
Bright figure.
It is carried out continuously the action above by laser machine irradiating laser for multiple unit area E, from
And can be formed on the upper surface of stone platform 11 towards X, the wire protuberance 101 of Y-direction.Additionally,
The spacing of this protuberance 101, is such as about 5mm in X-direction, Y-direction.
Fig. 8 be by illuminated laser after stone platform 11 apparent condition amplify shown in photo.Separately
Outward, the curve chart of the height and position of the white line part during Fig. 9 is the photo illustrating Fig. 8.
As shown in Figure 8, forming the protuberance being shown as white on the surface of stone platform 11, this protuberance is
The heat that irradiating laser produces makes quartz expansion be formed.The height H(of this protuberance is with reference to Fig. 9), far
Fine concavo-convex more than the surface of stone platform 11, even if therefore produce on the surface of stone platform 11 is micro-
The phenomenon of thin concavo-convex middle blocking foreign body, also the effect of the protuberance because being formed by quartz, will not be produced and make
The such phenomenon of stone platform 11 mirror-polishing.Furthermore it is preferred that the height H of this protuberance is 3 μm to 10 μ
About m.
As it has been described above, the processing method of the stone platform 11 according to the present invention, the laser sold by market
Marking machine 41 is to the upper surface irradiating laser of stone platform 11, so that the quartz expansion contained in granite
Form protuberance, therefore, it is possible to by extremely simple structure, at the shape of the flatness maintaining stone platform 11
Under state, prevent its mirror-polishing.
Additionally, in the above-described embodiment, as it is shown in fig. 7, to towards X-direction and Y-direction
Linearity area illumination laser, thus form the linearity protuberance towards X-direction and Y-direction.But
It is that the shape of this protuberance is not limited to such pattern.
Figure 10 A to Figure 10 F is the explanatory diagram of the pattern illustrating the protuberance being formed on stone platform 11.
Figure 10 A illustrates the above-mentioned linearity protuberance 101 towards X-direction and Y-direction.In contrast,
Figure 10 B illustrates circular protrusions 102.It addition, Figure 10 C illustrates the protuberance 103 of the small diameter circular of approximation point.
It addition, Figure 10 D illustrates the linearity protuberance 104 towards the direction intersected with X-direction and Y-direction.
It addition, Figure 10 E illustrates dotted line shape protuberance 105 facing one direction.And, Figure 10 F illustrate towards
X-direction and multiple crosswise protuberances 106 of Y-direction spread configuration.
As shown in Figure 10 A～Figure 10 F, whole by the mounting surface of the substrate 100 at stone platform 11
The protuberance 101～106 with systematicness to a certain degree is formed, it is possible to prevent stone platform 11 on region
Surface mirror-polishing such that it is able to be effectively prevented and substrate 100 is produced the damage caused because of electrostatic.
Additionally, in the above-described embodiment, the material of stone platform 11 is granite, makes flower by laser
Quartz expansion contained in the rock of hilllock forms protuberance.But, as the material expanded by heating,
Other material outside quartz can be in addition to, it addition, the material of stone platform can also be in addition to granite
Outside other material.
Claims (10)
1. a stone platform, the material of this stone platform contains the material of heated expansion, and this stone is put down
Platform has the mounting surface of substrate, it is characterised in that
The mounting surface of substrate has the protuberance that the material expanded by illuminated laser is formed.
Stone platform the most according to claim 1, it is characterised in that
This stone platform is made up of granite, and this granite contains the quartz of heated expansion.
Stone platform the most according to claim 2, it is characterised in that
Protuberance is formed, this specified conditions bag by the quartz expanded to stone platform irradiating laser under given conditions
Including: the wavelength of laser is 10600nm, output is 20W to 25W, to the surface of stone platform
Scanning speed is 1000mm/sec to 1250mm/sec.
Stone platform the most according to claim 2, it is characterised in that
The surface temperature of stone platform is made to rise to 400 degree of 700 degree of expansions the most Celsius Celsius by irradiating laser
Quartz forms protuberance.
5. a processing method for stone platform, the material of this stone platform contains the material of heated expansion,
And this stone platform has the mounting surface of substrate, it is characterised in that
The material expanded by illuminated laser, forms protuberance in the mounting surface of described substrate.
The processing method of stone platform the most according to claim 5, it is characterised in that
This stone platform is made up of granite, and this granite contains the quartz of heated expansion.
The processing method of stone platform the most according to claim 6, it is characterised in that
Protuberance is formed, this specified conditions bag by the quartz expanded to stone platform irradiating laser under given conditions
Including: the wavelength of laser is 10600nm, output is 20W to 25W, to the surface of stone platform
Scanning speed is 1000mm/sec to 1250mm/sec.
The processing method of stone platform the most according to claim 6, it is characterised in that
Irradiating laser makes the surface temperature of stone platform rise to 400 degree to 700 degree Celsius Celsius, makes quartz
Expand and form protuberance.
9. the manufacture method of a stone platform, it is characterised in that
Including:
Manufacturing procedure, is processed into the platform-like with planar portions by the granite containing quartz；
Laser irradiation process, by described granite for loading the planar portions irradiating laser of substrate,
Quartz expansion is made to form protuberance in described planar portions.
10. a substrate board treatment, processes substrate-placing on stone platform, and its feature exists
In,
The material of described stone platform contains the material of heated expansion,
Having protuberance, this protuberance is formed by the material by expanding to the mounting surface irradiating laser of described substrate
In this mounting surface.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013066081 | 2013-03-27 | ||
| JP2013-066081 | 2013-03-27 | ||
| JP2014-006691 | 2014-01-17 | ||
| JP2014006691A JP6227424B2 (en) | 2013-03-27 | 2014-01-17 | Stone surface plate, stone surface plate processing method, stone surface plate manufacturing method, and substrate processing apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104070608A CN104070608A (en) | 2014-10-01 |
| CN104070608B true CN104070608B (en) | 2016-09-21 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201410119624.5A Active CN104070608B (en) | 2013-03-27 | 2014-03-27 | Stone platform, its processing method, manufacture method and substrate board treatment |
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| CN (1) | CN104070608B (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101784497A (en) * | 2007-07-16 | 2010-07-21 | 康宁股份有限公司 | The method that is used for local reversible glass swelling |
| CN102076621A (en) * | 2008-05-01 | 2011-05-25 | 康宁股份有限公司 | Raised features on transparent substrates and related methods |
| CN202053082U (en) * | 2011-04-14 | 2011-11-30 | 武汉三工光电设备制造有限公司 | Adjustable working platform |
| CN202607083U (en) * | 2012-02-22 | 2012-12-19 | 大连骄子兄弟激光技术有限公司 | Laser metallic surface roughening machine |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7480432B2 (en) * | 2006-02-28 | 2009-01-20 | Corning Incorporated | Glass-based micropositioning systems and methods |
-
2014
- 2014-03-27 CN CN201410119624.5A patent/CN104070608B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101784497A (en) * | 2007-07-16 | 2010-07-21 | 康宁股份有限公司 | The method that is used for local reversible glass swelling |
| CN102076621A (en) * | 2008-05-01 | 2011-05-25 | 康宁股份有限公司 | Raised features on transparent substrates and related methods |
| CN202053082U (en) * | 2011-04-14 | 2011-11-30 | 武汉三工光电设备制造有限公司 | Adjustable working platform |
| CN202607083U (en) * | 2012-02-22 | 2012-12-19 | 大连骄子兄弟激光技术有限公司 | Laser metallic surface roughening machine |
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| CN104070608A (en) | 2014-10-01 |
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