CN104051943A - A diode pumped passive mode-locked Nd, Y: caF2all-solid-state femtosecond laser - Google Patents
A diode pumped passive mode-locked Nd, Y: caF2all-solid-state femtosecond laser Download PDFInfo
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Abstract
Description
技术领域technical field
本发明属于激光技术领域，尤其涉及一种二极管泵浦的被动锁模Nd,Y:CaF2全固态飞秒激光器。The invention belongs to the field of laser technology, in particular to a diode-pumped passive mode-locked Nd, Y: CaF2 all-solid-state femtosecond laser.
背景技术Background technique
激光二极管具有大功率、高亮度、低成本的优势，被广泛地应用于泵浦近红外波段的全固态激光器。激光二极管直接泵浦的全固态飞秒激光器已经成为目前1-2μm波段全固态飞秒激光器研究的主流方向。而且采用激光二极管直接泵浦有利于获得高功率飞秒激光输出，使全固态飞秒激光器的应用领域更加广阔。Laser diodes have the advantages of high power, high brightness, and low cost, and are widely used to pump all-solid-state lasers in the near-infrared band. All-solid-state femtosecond lasers directly pumped by laser diodes have become the mainstream research direction of all-solid-state femtosecond lasers in the 1-2 μm band. Moreover, the direct pumping of laser diodes is beneficial to obtain high-power femtosecond laser output, which makes the application field of all-solid-state femtosecond lasers wider.
在全固态激光器的增益介质中，掺杂Nd3+离子的激光晶体是目前应用最广泛的晶体之一。它具有荧光寿命长、受激发射截面大等优点。迄今为止，有上百种掺杂Nd3+离子的激光晶体都得到了激光运转，以应用于中、高功率的Nd:YAG和低功率商品化的Nd:YVO4最为广泛。但是，单纯掺杂Nd3+离子的激光介质荧光谱线较窄，不支持超短飞秒脉冲激光的产生与放大，所以在飞秒激光器中很少应用，而大多数都应用于皮秒激光器和纳秒调Q激光器中。以Nd:CaF2晶体为例，随着Nd3+离子掺杂浓度的增大，会形成高浓度淬灭中心而不易得到激光发射；另外，Nd:CaF2晶体在1.06μm处受激发射截面相对较小，作为放大介质其饱和能流密度大且能量转换效率低。基于以上两点，在飞秒激光产生的研究中Nd:CaF2晶体已经被人们遗弃了很久。In the gain medium of all-solid-state lasers, laser crystals doped with Nd 3+ ions are currently one of the most widely used crystals. It has the advantages of long fluorescence lifetime and large stimulated emission cross section. So far, hundreds of laser crystals doped with Nd 3+ ions have been used in laser operation, among which the Nd:YAG with medium and high power and the commercialized Nd:YVO 4 with low power are the most widely used. However, the fluorescence spectrum of the laser medium purely doped with Nd 3+ ions is narrow and does not support the generation and amplification of ultrashort femtosecond pulse lasers, so it is rarely used in femtosecond lasers, and most of them are used in picosecond lasers and nanosecond Q-switched lasers. Taking Nd:CaF 2 crystal as an example, as the doping concentration of Nd 3+ ions increases, high-concentration quenching centers will be formed and it is difficult to obtain laser emission; in addition, the stimulated emission cross section of Nd:CaF 2 crystal at 1.06 μm Relatively small, as an amplification medium, it has a large saturated energy flux density and low energy conversion efficiency. Based on the above two points, Nd:CaF 2 crystals have been abandoned for a long time in the research of femtosecond laser generation.
近年来，人们成功生长了Nd3+和Y3+共掺的CaF2晶体，它与Nd:CaF2晶体相比有很多优良的光学特性。首先，共掺效应明显抑制了Nd:CaF2晶体本身的高浓度淬灭现象，改善了荧光量子效率，晶体在1μm处的发射光谱也因此变得平滑而集中，更容易支持超短激光脉冲的产生。其次，Nd,Y:CaF2晶体荧光寿命较长、受激发射截面较大，更适合作为飞秒激光的放大介质。最后，Nd,Y:CaF2晶体具有较高的热导率，可以生长成大尺寸，并且适合用高功率、高亮度的半导体二极管激光器来直接泵浦。基于上述种种优良特性，Nd,Y:CaF2晶体有待成为产生超短飞秒激光脉冲的优良介质之一。目前关于Nd,Y:CaF2晶体的报道仅有两篇，2013年SuL.B.等报道了Nd,Y:CaF2晶体与Nd:CaF2晶体和Nd:Glass相比所具有的优越的物理特性和激光特性。(LaserPhys.Lett.10(3),035804-035808(2013))。2014年QinZ.P.等报道了利用Nd,Y:CaF2晶体产生了103fs的超短脉冲，但是输出功率只有几十毫瓦(Opt.Lett.39(7),1737-1739(2014))。In recent years, people have successfully grown Nd 3+ and Y 3+ co-doped CaF 2 crystals, which have many excellent optical properties compared with Nd:CaF 2 crystals. First of all, the co-doping effect significantly suppresses the high-concentration quenching phenomenon of the Nd:CaF 2 crystal itself, improves the fluorescence quantum efficiency, and the emission spectrum of the crystal at 1 μm becomes smooth and concentrated, which is easier to support the ultrashort laser pulse. produce. Secondly, Nd,Y:CaF 2 crystal has a longer fluorescence lifetime and a larger stimulated emission cross-section, which is more suitable as an amplification medium for femtosecond lasers. Finally, Nd,Y:CaF 2 crystals have high thermal conductivity, can be grown to large sizes, and are suitable for direct pumping with high-power, high-brightness semiconductor diode lasers. Based on the above-mentioned excellent properties, Nd,Y:CaF 2 crystal is expected to become one of the excellent media for generating ultrashort femtosecond laser pulses. At present, there are only two reports on Nd,Y:CaF 2 crystals. In 2013, SuL.B. et al reported the superior physical properties of Nd,Y:CaF 2 crystals compared with Nd:CaF 2 crystals and Nd:Glass. properties and laser properties. (LaserPhys. Lett. 10(3), 035804-035808(2013)). In 2014, QinZ.P. et al. reported that the use of Nd, Y: CaF 2 crystals produced ultrashort pulses of 103fs, but the output power was only tens of milliwatts (Opt.Lett.39(7), 1737-1739(2014)) .
发明内容Contents of the invention
本发明实施例的目的在于提供一种二极管泵浦的被动锁模Nd,Y:CaF2全固态飞秒激光器，旨在解决现有的Nd,Y:CaF2激光器输出功率较小的问题。The purpose of the embodiments of the present invention is to provide a diode-pumped passive mode-locked Nd, Y:CaF 2 all-solid-state femtosecond laser, which aims to solve the problem of low output power of the existing Nd, Y:CaF 2 laser.
本发明实施例是这样实现的，一种二极管泵浦的被动锁模Nd,Y:CaF2全固态飞秒激光器，该二极管泵浦的被动锁模Nd,Y:CaF2全固态飞秒激光器包括：The embodiment of the present invention is achieved in this way, a diode-pumped passive mode-locked Nd, Y:CaF 2 all-solid-state femtosecond laser, the diode-pumped passive mode-locked Nd, Y:CaF 2 all-solid-state femtosecond laser includes :
泵浦源、光学耦合聚焦系统、Nd,Y:CaF2激光晶体、第一凹面镜，第二凹面镜和双色镜、第三凹面镜、半导体可饱和吸收镜、第一GTI镜和第二GTI镜、耦合输出镜；Pump source, optical coupling focusing system, Nd,Y:CaF 2 laser crystal, first concave mirror, second concave mirror and dichroic mirror, third concave mirror, semiconductor saturable absorber mirror, first GTI mirror and second GTI mirror, coupling output mirror;
泵浦源，输出中心波长为788nm的泵浦激光，经过光学耦合聚焦系统进行空间整形后再通过双色镜聚焦到Nd,Y:CaF2激光晶体上，提供给激光晶体能量；The pump source, which outputs pump laser light with a central wavelength of 788nm, is spatially shaped by the optical coupling focusing system and then focused on the Nd,Y:CaF 2 laser crystal through a dichroic mirror to provide energy to the laser crystal;
光学耦合聚焦系统，接收泵浦源输出的泵浦激光，进行空间整形并耦合聚焦到Nd,Y:CaF2激光晶体上；The optical coupling focusing system receives the pump laser output from the pump source, performs space shaping and couples and focuses it on the Nd,Y:CaF 2 laser crystal;
Nd,Y:CaF2激光晶体，放置在光学耦合聚焦统及第一凹面镜和第二凹面镜的公共焦点处，接收透过光学耦合聚焦系统和双色镜后的泵浦激光，以实现粒子数反转从而形成谐振腔内的激光增益；Nd,Y:CaF 2 laser crystal, placed at the common focal point of the optical coupling focusing system and the first concave mirror and the second concave mirror, receives the pump laser after passing through the optical coupling focusing system and the dichroic mirror, in order to realize the number of particles inversion to create laser gain within the resonator;
第一凹面镜和第二凹面镜及双色镜，构成紧凑型的共焦折叠腔，接收谐振腔内产生的增益激光并各自反射，因光学耦合聚焦系统与Nd,Y:CaF2激光晶体之间的距离太短不足以放下第二凹面镜，故双色镜的存在是将谐振腔内产生的增益激光通过双色镜反射到第二凹面镜；The first concave mirror, the second concave mirror and the dichroic mirror constitute a compact confocal folded cavity, which receives the gain laser generated in the resonant cavity and reflects them separately, due to the optical coupling between the focusing system and the Nd,Y:CaF 2 laser crystal The distance is too short to put down the second concave mirror, so the existence of the dichroic mirror is to reflect the gain laser generated in the resonator to the second concave mirror through the dichroic mirror;
第三凹面镜，接收从第一凹面镜反射过来的增益激光并将其反射聚焦到半导体可饱和吸收镜上；The third concave mirror receives the gain laser light reflected from the first concave mirror and focuses it on the semiconductor saturable absorber mirror;
半导体可饱和吸收镜，接收从第三凹面镜反射过来的增益激光并将其按原路返回，用于启动并维持稳定的锁模；The semiconductor saturable absorber mirror receives the gain laser reflected from the third concave mirror and returns it in the same way to start and maintain stable mode locking;
第一GTI镜和第二GTI镜，接收从第二凹面镜反射过来的增益激光，用于补偿谐振腔内的正色散；The first GTI mirror and the second GTI mirror receive the gain laser light reflected from the second concave mirror, and are used to compensate the positive dispersion in the resonant cavity;
耦合输出镜，接收从第一GTI镜和第二GTI镜依次反射过来的增益激光，在将大部分增益激光按原路返回的同时输出稳定的被动锁模脉冲序列。The coupling output mirror receives the gain laser reflected from the first GTI mirror and the second GTI mirror sequentially, and outputs a stable passive mode-locked pulse sequence while returning most of the gain laser along the original path.
进一步，泵浦源采用光纤耦合输出的二极管激光器，中心波长为788nm，耦合光纤的芯径为200μm，数值孔径为0.22。Further, the pump source adopts a fiber-coupled diode laser with a central wavelength of 788 nm, a core diameter of the coupling fiber of 200 μm, and a numerical aperture of 0.22.
进一步，光学耦合聚焦系统镀有对泵浦激光高透的介质膜。Further, the optical coupling and focusing system is coated with a dielectric film with high transparency to the pump laser.
进一步，Nd,Y:CaF2晶体表面未镀膜，以布儒斯特角放置在谐振腔内，用铟箔包裹固定在紫铜晶体夹内并放置在通有循环水的铜块上，设定循环水的温度为10℃。Further, the Nd,Y:CaF 2 crystal surface is not coated, placed in the resonant cavity at the Brewster angle, wrapped with indium foil and fixed in the copper crystal clip and placed on the copper block with circulating water, set the cycle The temperature of the water is 10°C.
进一步，第一凹面镜和第二凹面镜朝谐振腔内的一面都镀有对增益激光高反介质膜，另一面镀有对泵浦激光高透介质膜；双色镜朝谐振腔内的一面镀有对增益激光高反介质膜和泵浦激光高透介质膜，另一面镀有对泵浦激光高透介质膜。Further, the first concave mirror and the second concave mirror are coated with a high-reflection dielectric film to the gain laser on the side facing the resonator, and the other side is coated with a high-transmittance dielectric film to the pump laser; There is a high-reflection dielectric film for the gain laser and a high-transmission dielectric film for the pump laser, and the other side is coated with a high-transmission dielectric film for the pump laser.
进一步，第三凹面镜朝谐振腔内的一面镀有对增益激光高反介质膜，另一面镀有对泵浦激光高透介质膜。Further, one side of the third concave mirror facing the resonant cavity is coated with a high-reflective dielectric film for the gain laser, and the other side is coated with a high-permeability dielectric film for the pumping laser.
进一步，半导体可饱和吸收镜的调制深度为0.7％，非饱和损耗为0.4％，恢复时间为500fs。Further, the modulation depth of the semiconductor saturable absorber mirror is 0.7%, the unsaturated loss is 0.4%, and the recovery time is 500fs.
进一步，第一GTI镜和第二GTI镜分别提供了-250fs2和-1200fs2的二阶色散量。Further, the first GTI mirror and the second GTI mirror provide the second order dispersion amount of -250fs 2 and -1200fs 2 respectively.
进一步，输出镜朝谐振腔内的一面镀有对增益激光透过率为0.8％的介质膜，另一面镀有对增益激光增透介质膜。Further, the side of the output mirror facing the resonant cavity is coated with a dielectric film with a transmittance of 0.8% for the gain laser, and the other side is coated with an anti-reflection dielectric film for the gain laser.
进一步，该二极管泵浦的被动锁模Nd,Y:CaF2全固态飞秒激光器输出脉冲宽度为264fs，平均输出功率为180mW。Further, the diode-pumped passively mode-locked Nd, Y:CaF 2 all-solid-state femtosecond laser has an output pulse width of 264 fs and an average output power of 180 mW.
本发明提供的二极管泵浦的被动锁模Nd,Y:CaF2全固态飞秒激光器，设有泵浦源、光学耦合聚焦系统、Nd,Y:CaF2激光晶体、第一凹面镜，第二凹面镜和双色镜、第三凹面镜、半导体可饱和吸收镜、第一GTI镜和第二GTI镜、耦合输出镜；由泵浦源输出的788nm的泵浦激光通过光学耦合聚焦系统进行空间整形，再透过镀有对泵浦光高透介质膜的双色镜聚焦到Nd,Y:CaF2激光晶体上，在Nd,Y:CaF2激光晶体上实现粒子数反转并形成增益激光；增益激光起振后入射到第一凹面镜上，再由第一凹面镜反射到第三凹面镜，并被第三凹面镜反射聚焦到半导体可饱和吸收镜上，半导体可饱和吸收镜一方面启动并维持稳定锁模，另一方面将增益激光反射并按原路返回，经第三凹面镜，第一凹面镜及Nd,Y:CaF2激光晶体到达双色镜上，入射到双色镜上的增益激光被反射到第二凹面镜，并被第一GTI镜，第二GTI镜依次反射到耦合输出镜，耦合输出镜在将大部分增益激光反射并按原路返回的同时输出了锁模脉冲序列。本发明实现了基于激光二极管为泵浦源，Nd3+和Y3+共掺的CaF2晶体为增益介质，利用GTI镜补偿色散和半导体可饱和吸收镜(SESAM)启动锁模的全固态飞秒激光器；在重复频率为85MHz的谐振腔内输出了脉冲宽度为264fs的稳定锁模脉冲序列，锁模脉冲对应的光谱中心波长为1063nm，半高全宽为5.0nm。本发明提供的激光器具有生产成本低、结构紧凑、脉冲宽度窄、稳定性高等优点，有很好的应用前景和商业价值。The diode-pumped passive mode-locked Nd, Y:CaF 2 all-solid-state femtosecond laser provided by the present invention is provided with a pump source, an optical coupling focusing system, a Nd, Y:CaF 2 laser crystal, a first concave mirror, a second Concave mirror and dichroic mirror, third concave mirror, semiconductor saturable absorption mirror, first GTI mirror and second GTI mirror, coupling output mirror; the 788nm pump laser output by the pump source is space shaped through the optical coupling focusing system , and then focus on the Nd,Y:CaF 2 laser crystal through a dichroic mirror coated with a high-transmittance dielectric film for the pump light, and realize the particle number inversion on the Nd,Y:CaF 2 laser crystal to form a gain laser; the gain After the laser is oscillated, it is incident on the first concave mirror, reflected by the first concave mirror to the third concave mirror, and then focused on the semiconductor saturable absorber mirror by the third concave mirror. On the one hand, the semiconductor saturable absorber mirror is activated and Maintain stable mode-locking, on the other hand, reflect the gain laser and return according to the original path, pass through the third concave mirror, the first concave mirror and Nd, Y:CaF 2 laser crystal to reach the dichromatic mirror, and the gain laser incident on the dichromatic mirror It is reflected to the second concave mirror, and is reflected by the first GTI mirror and the second GTI mirror to the outcoupling mirror in turn. The outcoupling mirror outputs the mode-locked pulse sequence while reflecting most of the gain laser and returning it in the original way. The invention realizes the all-solid-state fly-by-wire system based on the laser diode as the pumping source, the CaF 2 crystal co-doped with Nd 3+ and Y 3+ as the gain medium, using the GTI mirror to compensate the dispersion and the semiconductor saturable absorbing mirror (SESAM) to start mode-locking. second laser; a stable mode-locked pulse sequence with a pulse width of 264fs is output in a resonant cavity with a repetition rate of 85MHz. The center wavelength of the spectrum corresponding to the mode-locked pulse is 1063nm, and the full width at half maximum is 5.0nm. The laser provided by the invention has the advantages of low production cost, compact structure, narrow pulse width, high stability, etc., and has good application prospect and commercial value.
附图说明Description of drawings
图1是本发明实施例提供的二极管泵浦的被动锁模Nd,Y:CaF2全固态飞秒激光器的光路示意图；Fig. 1 is the passive mode-locked Nd of diode pump that the embodiment of the present invention provides, Y:CaF 2 all-solid-state femtosecond laser optical path schematic diagrams;
图2是本发明实施例提供的二极管泵浦的被动锁模Nd,Y:CaF2全固态飞秒激光器输出的利用强度自相关仪测得的脉冲宽度信号图；Fig. 2 is the passive mode-locked Nd of diode pump that the embodiment of the present invention provides, Y: CaF All solid-state femtosecond laser output utilizes the pulse width signal graph that the intensity autocorrelator measures;
图3是本发明实施例提供的二极管泵浦的被动锁模Nd,Y:CaF2全固态飞秒激光器输出的利用光谱仪测得的光谱宽度信号图；Fig. 3 is the passive mode-locked Nd of diode pump that the embodiment of the present invention provides, Y: CaF All solid-state femtosecond laser output utilizes the spectrometer to measure the spectrum width signal graph;
图中：1、泵浦源；2、光学耦合聚焦系统；3、双色镜；4、Nd,Y:CaF2晶体；5、第一凹面镜；6、第二凹面镜；7、第三凹面镜；8、半导体可饱和吸收镜；9、第一GTI镜；10、第二GTI镜；11、耦合输出镜。In the figure: 1. Pump source; 2. Optical coupling focusing system; 3. Dichroic mirror; 4. Nd,Y:CaF 2 crystal; 5. First concave mirror; 6. Second concave mirror; 7. Third concave surface 8. Semiconductor saturable absorber mirror; 9. First GTI mirror; 10. Second GTI mirror; 11. Coupling output mirror.
具体实施方式Detailed ways
为了使本发明的目的、技术方案及优点更加清楚明白，以下结合实施例，对本发明进行进一步详细说明。应当理解，此处所描述的具体实施例仅仅用以解释本发明，并不用于限定本发明。In order to make the object, technical solution and advantages of the present invention more clear, the present invention will be further described in detail below in conjunction with the examples. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
下面结合附图及具体实施例对本发明的应用原理作进一步描述。The application principle of the present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.
如图1所示，本发明实施例的二极管泵浦的被动锁模Nd,Y:CaF2全固态飞秒激光器主要由：泵浦源1、光学耦合聚焦系统2、双色镜3、Nd,Y:CaF2晶体4、第一凹面镜5、第二凹面镜6、第三凹面镜7、半导体可饱和吸收镜8、第一GTI镜9、第二GTI镜10、耦合输出镜11组成；As shown in Figure 1, the diode-pumped passive mode-locked Nd, Y:CaF 2 all-solid-state femtosecond laser of the embodiment of the present invention is mainly composed of: pump source 1, optical coupling focusing system 2, dichroic mirror 3, Nd, Y : CaF 2 crystal 4, first concave mirror 5, second concave mirror 6, third concave mirror 7, semiconductor saturable absorber mirror 8, first GTI mirror 9, second GTI mirror 10, outcoupling mirror 11;
泵浦源1，本发明实施例采用型号为GKD-30FMS的激光器，耦合输出的光纤芯径200μm，数值孔径为0.22，该激光器通过调节工作温度可以改变输出波长，为了更好地匹配Nd,Y:CaF2晶体的吸收峰，并且保证泵浦源的稳定工作，设定泵浦源的工作温度为25℃，此时激光二极管的输出波长为788nm；Pumping source 1, the embodiment of the present invention adopts a laser model of GKD-30FMS, the coupled output fiber core diameter is 200 μm, and the numerical aperture is 0.22. The laser can change the output wavelength by adjusting the working temperature. In order to better match Nd, Y : The absorption peak of the CaF 2 crystal, and to ensure the stable operation of the pump source, set the operating temperature of the pump source to 25°C, and the output wavelength of the laser diode at this time is 788nm;
光学耦合聚焦系统2，本发明实施例采用的是放大倍率为1:0.8的光学耦合系统，在上述激光二极管的泵浦下，此光学耦合系统焦点处的泵浦激光的聚焦半径约为80μm，聚焦长度为51mm，为了更精确地调节光学耦合聚焦系统2与增益晶体4之间的距离，将光学耦合聚焦系统2放置在光学平移台上；Optical coupling and focusing system 2. The embodiment of the present invention adopts an optical coupling system with a magnification of 1:0.8. Under the pumping of the above-mentioned laser diode, the focusing radius of the pump laser at the focal point of the optical coupling system is about 80 μm. The focal length is 51 mm. In order to more accurately adjust the distance between the optical coupling focusing system 2 and the gain crystal 4, the optical coupling focusing system 2 is placed on an optical translation stage;
双色镜3，因光学耦合聚焦系统2与Nd,Y:CaF2激光晶体4之间的距离太短不足以放下第二凹面镜6，故在本发明的激光腔内放入双色镜3用以导光，谐振腔内的增益激光经双色镜3反射到第二凹面镜6，本发明实施例中选用的双色镜3朝谐振腔内的一面镀有对808-980nm光高透介质膜和对1020-1200nm光高反介质膜，另一面镀有对800-1000nm光高透介质膜；Dichroic mirror 3, because the distance between optical coupling focusing system 2 and Nd, Y:CaF 2 laser crystals 4 is too short enough to put down the second concave mirror 6, so put dichroic mirror 3 in the laser cavity of the present invention for Light guide, the gain laser in the resonant cavity is reflected by the dichroic mirror 3 to the second concave mirror 6, and the dichromatic mirror 3 selected in the embodiment of the present invention is coated with a high-transmittance dielectric film for 808-980nm light and opposite to the resonant cavity. 1020-1200nm optical highly reflective dielectric film, the other side is coated with 800-1000nm optical highly transparent dielectric film;
Nd,Y:CaF2激光晶体4，晶体的尺寸为3*3*6mm3，掺杂浓度为0.5％Nd3+和10％Y3+，通光长度为6mm，以布儒斯特角放置在谐振腔内，用铟箔包裹固定在紫铜晶体夹内并放置在通有循环水的铜块上进行冷却，循环水的温度设定在10℃，为了更精确地调节增益晶体4与耦合系统2及第一凹面镜5之间的距离，将Nd,Y:CaF2增益晶体4放置在光学平移台上；Nd,Y:CaF 2 laser crystal 4, the size of the crystal is 3*3*6mm 3 , the doping concentration is 0.5% Nd 3+ and 10% Y 3+ , the optical length is 6mm, and it is placed at the Brewster angle In the resonant cavity, wrap it with indium foil and fix it in the copper crystal clip and place it on a copper block with circulating water for cooling. The temperature of the circulating water is set at 10°C. In order to adjust the gain crystal 4 and the coupling system more accurately 2 and the distance between the first concave mirror 5, Nd, Y:CaF 2 gain crystal 4 is placed on the optical translation table;
第一凹面镜5和第二凹面镜6，与双色镜3一起构成紧凑型共焦折叠腔，综合考虑到增益激光与泵浦激光在晶体上的匹配程度及输出的脉冲宽度两个因素，在本发明实施例中选用的是曲率半径为200mm的凹面镜，两个凹面镜朝谐振腔内的一面都镀有对1020-1200nm光高反介质膜，另一面镀有对800-1000nm光高透介质膜，为了更精确地调节第一凹面镜5与增益晶体4之间的距离，将第一凹面镜5放置在光学平移台上；The first concave mirror 5 and the second concave mirror 6 form a compact confocal folded cavity together with the dichroic mirror 3. Considering the two factors of the matching degree of the gain laser and the pump laser on the crystal and the output pulse width, in In the embodiment of the present invention, concave mirrors with a radius of curvature of 200mm are selected. The sides of the two concave mirrors facing the resonant cavity are coated with a high-reflective dielectric film for 1020-1200nm light, and the other side is coated with a high-transmittance film for 800-1000nm light. Dielectric film, in order to more accurately adjust the distance between the first concave mirror 5 and the gain crystal 4, the first concave mirror 5 is placed on the optical translation stage;
第三凹面镜7，用于将增益激光聚焦到半导体可饱和吸收镜8上，以更容易获得连续锁模，考虑到半导体可饱和吸收镜8的损伤阈值，本发明实施例采用的是曲率半径为300mm的凹面镜，其中朝谐振腔内的一面镀有对1020-1200nm光高反介质膜，另一面镀有对800-1000nm光高透介质膜；The third concave mirror 7 is used to focus the gain laser onto the semiconductor saturable absorbing mirror 8, so as to obtain continuous mode locking more easily. Considering the damage threshold of the semiconductor saturable absorbing mirror 8, the embodiment of the present invention adopts the radius of curvature It is a 300mm concave mirror, one side facing the resonant cavity is coated with a highly reflective dielectric film for 1020-1200nm light, and the other side is coated with a high-transmittance dielectric film for 800-1000nm light;
半导体可饱和吸收镜8(SESAM)，其调制深度为0.7％，非饱和损耗为0.4％，恢复时间为500fs，在本发明实施例的谐振腔内放入此半导体可饱和吸收镜，锁模一旦启动即可以长时间稳定运转，为了更精确地调节半导体可饱和吸收镜8与第三凹面镜7之间的距离，将半导体可饱和吸收镜8放置在光学平移台上；Semiconductor saturable absorbing mirror 8 (SESAM), its modulation depth is 0.7%, unsaturated loss is 0.4%, recovery time is 500fs, put this semiconductor saturable absorbing mirror in the resonant cavity of the embodiment of the present invention, once the mode locking It can run stably for a long time after starting. In order to more accurately adjust the distance between the semiconductor saturable absorbing mirror 8 and the third concave mirror 7, the semiconductor saturable absorbing mirror 8 is placed on the optical translation stage;
第一GTI镜9和第二GTI镜10，用于补偿谐振腔内空气、增益晶体4、半导体可饱和吸收镜8及各个光学元件引入的正色散，其中第一GTI镜9提供了-250fs2的二阶色散量，第二GTI镜10提供了-1200fs2的二阶色散量；The first GTI mirror 9 and the second GTI mirror 10 are used to compensate the positive dispersion introduced by the air in the resonant cavity, the gain crystal 4, the semiconductor saturable absorbing mirror 8 and various optical elements, wherein the first GTI mirror 9 provides -250fs 2 The amount of second-order dispersion, the second GTI mirror 10 provides the amount of second-order dispersion of -1200fs 2 ;
耦合输出镜11，输出镜朝谐振腔内的一面镀有对1040±50nm光透过率为0.8％的介质膜，另一面镀有对1040±80nm光增透介质膜。The coupling output mirror 11 is coated with a dielectric film with a transmittance of 0.8% for 1040±50nm light on one side of the output mirror facing the resonant cavity, and coated with an anti-reflection dielectric film for 1040±80nm light on the other side.
以下结合附图说明本发明实施例的工作原理：由泵浦源输出的788nm的泵浦激光通过光学耦合聚焦系统进行空间整形，再透过镀有对泵浦光高透介质膜的双色镜聚焦到Nd,Y:CaF2激光晶体上，在Nd,Y:CaF2激光晶体上实现粒子数反转并形成增益激光；增益激光起振后入射到第一凹面镜上，再由第一凹面镜反射到第三凹面镜，并被第三凹面镜反射聚焦到半导体可饱和吸收镜上，半导体可饱和吸收镜一方面启动并维持稳定锁模，另一方面将增益激光反射并按原路返回，经第三凹面镜，第一凹面镜及Nd,Y:CaF2激光晶体到达双色镜上，入射到双色镜上的增益激光被反射到第二凹面镜，并被第一GTI镜，第二GTI镜依次反射到耦合输出镜，耦合输出镜在将大部分增益激光反射并按原路返回的同时输出了锁模脉冲序列，由此，振荡激光在腔的两个端镜(半导体可饱和吸收镜和耦合输出镜)之间来回振荡，形成连续的稳定锁模。The working principle of the embodiment of the present invention will be described below in conjunction with the accompanying drawings: the 788nm pump laser output by the pump source is spatially shaped through an optical coupling focusing system, and then focused through a dichroic mirror coated with a dielectric film that is highly transparent to the pump light On the Nd,Y:CaF 2 laser crystal, the number of particles is reversed on the Nd,Y:CaF 2 laser crystal to form a gain laser; the gain laser is incident on the first concave mirror after being oscillated, and then the It is reflected to the third concave mirror, and is reflected by the third concave mirror to focus on the semiconductor saturable absorber mirror. On the one hand, the semiconductor saturable absorber mirror starts and maintains stable mode-locking, and on the other hand, it reflects the gain laser and returns to the original path. After the third concave mirror, the first concave mirror and the Nd, Y:CaF 2 laser crystal reach the dichromatic mirror, the gain laser incident on the dichromatic mirror is reflected to the second concave mirror, and is absorbed by the first GTI mirror, the second GTI The mirrors are reflected to the coupling output mirror in turn, and the coupling output mirror outputs a mode-locked pulse sequence while reflecting most of the gain laser and returning it in the original way. and coupling output mirror) to oscillate back and forth to form continuous stable mode-locking.
如图2和图3所示，本发明提供的激光器腔长1.76m，重复频率85MHz，可以输出最高平均功率为180mW的稳定连续锁模，在假设脉冲形状为双曲正割型的前提下，利用自相关仪测得的脉冲宽度为264fs，再利用光谱仪测得了中心波长为1063nm处对应的光谱半高全宽为5.0nm。As shown in Figure 2 and Figure 3, the laser cavity provided by the present invention has a length of 1.76m and a repetition rate of 85MHz, and can output a stable continuous mode-locked mode with the highest average power of 180mW. Under the assumption that the pulse shape is a hyperbolic secant type, The pulse width measured by the autocorrelator is 264fs, and the full width at half maximum of the spectrum corresponding to the central wavelength of 1063nm is 5.0nm measured by the spectrometer.
本发明提供的激光器利用高功率、高亮度、低成本的二极管泵浦，采用结构紧凑的共焦腔型，利用小损耗的GTI镜补偿色散，并利用半导体可饱和吸收镜启动并维持稳定锁模，输出功率高，锁模一旦启动即能长时间运转，总之，本发明提供的激光器具有生产成本低、结构紧凑、脉冲宽度窄、稳定性高等优点，有很好的应用前景和商业价值。The laser provided by the invention is pumped by a high-power, high-brightness, low-cost diode, adopts a compact confocal cavity, uses a small-loss GTI mirror to compensate for dispersion, and uses a semiconductor saturable absorber mirror to start and maintain stable mode-locking , high output power, once the mode locking is started, it can run for a long time. In short, the laser provided by the invention has the advantages of low production cost, compact structure, narrow pulse width, high stability, etc., and has good application prospects and commercial value.
以上所述仅为本发明的较佳实施例而已，并不用以限制本发明，凡在本发明的精神和原则之内所作的任何修改，等同替换和改进等，均应包含在本发明的保护范围之内。The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. Any modifications made within the spirit and principles of the present invention, equivalent replacements and improvements, etc., should be included in the protection of the present invention. within range.
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